CN101274469A - Construction method of micro point array in microchannel - Google Patents
Construction method of micro point array in microchannel Download PDFInfo
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Abstract
The invention provides a method for establishing a micro-point array in a micro-channel which relates to the technical field of processing of micro-channels. In the method, the main steps of arrangement, casting, etc. are adopted to cure microfilament arrays contacted in a cross manner in polymer and then the steps of demoulding, filament removal, etc. are adopted to entirely form micro-points or micro-point arrays in the micro-channel. The method of the invention is based on a molding process belonging to the soft lithography category without relying on a costly and stringent photoetching process; in addition, the method can also flexibly and differently create various surfaces, geometric shapes and sizes of different micro-point materials in different micro-flowing channels through combining and arranging material composition, geometric shapes and sizes of the crossed filaments, which results in that basic technical types of the micro-flowing and the micro-array can be closely integrated as a whole to provide a flexible and low-cost processing and manufacturing approach for the integration of the techniques of micro-fluidic control and micro-solid control.
Description
Technical field:
The present invention relates to the microchannel process technology field, be specifically related to the processing method of a kind of microchannel and inner microarray thereof row.
Background technology:
In the open source literature, in order to adapt to various different application occasions, people proposed between some microchannels and the microarray row may in conjunction with technological approaches or clue.For example, on May 24th, 2007 laid-open U.S. Patents 20070116607[Wang, William X.; Yi, Jun; Ke, Sheng; Halmela, Maria; Lahteenmaki, Pertti; Kihara, Kazuma:Microsystems thatintegrate three-dimensional microarray and multi-layer microfluidics forcombinatorial detection of bioagent at single molecule level] described technology pilot figure integrates microfluidic components and microarray assembly, obviously this also can advance the efficient that microarray is handled to a great extent, but microfluidic components that this disclosed technology also just will be made respectively and microarray component interface formula ground are also altogether, thereby the tight integrated of two kinds of technical advantages also obviously can not embody effectively.Chinese patent 00119003.2 (Lu Zuhong, He Nongyue: compound micro path array chip and preparation method thereof, April 11 calendar year 2001) disclosed micro path array chip and preparation method thereof, be to mount and coat required particular chemical composition arranging good micro-through-hole or capillary inner surface in advance, form the jitty arranged array that a thin slice causes two-dimensional directional by vertical cutting.Such technology type though microarray row or microchannel form are arranged, obviously can not embody technical functionality and advantage that microarray row and micro-flow channels combine.
And for example, after forming the microarray row on the surface, the uncovered chip in micro-machined in addition microchannel on the impression, with this make up micro point array in microchannel [as: Zhang Zhi is auspicious, Deng: the integration of protein dna mixing microarray and micro-fluidic chip, the chemistry journal, Vol.63 (18): 1743-1746,2005], perhaps in microflute, print probe points and form array on the surface of (or covering with material in addition) certain area, seal its open face [Mikkel Noerholm, Henrik Bruus then, Mogens H.Jakobsen, Pieter Telleman and Niels B.Ramsing:Polymer microfluidic chip foronline monitoring of microarray Hybridizations, LabChip, 2004,4,28-37].Dhananjay Dendukuri etc. then proposes directly to do to arrhea etching with optical device in micro-flow channels, in the microchannel, process micro polymer lattice array [Dhananjay Dendukuri, ShelleyS.Gu, Daniel C.Pregibon, T.Alan Hatton and Patrick S.Doyle:Stop-flowlithography in a microfluidic device, Lab Chip, 2007,7,818-828].But these class methods obviously come with some shortcomings, and for example, little pattern is difficult to alignment; The bad solution of cosmetic issue; The equipment cost height that certain methods is employed also is difficult to grasp; Airtightly on certain flowing pressure threshold value still can not solve,, the anxiety of little some material of infringement array be arranged then if realize closed permanent with plasma.
It is that (with a definite sequence) is fed into certain material in prepared microchannel in advance that a kind of mode is arranged in the publication, as test with reagent [United States Patent (USP), United States Patent20030203366 (Application Number10/132575), Lim, Drahoslav, Anderson, Norman G., Braatz, James A.:Microarray channel devices produced by a blockmold process], [Chinese patent 200410041365.5 Southeast China University turn round and look at loyal pool to the photon particulate; Liu Zhaobin; Zhao Xiangwei; Zhang Hong; Lu Zuhong, utilize the micro channel array formula biochip and the application process of photon particulate coding] etc., the technology type that these processing modes have microfluidic to a certain degree to combine with microarray, but they are limited for rich functions expansion under the micro-fluidic notion, fail to utilize as surfaces a large amount of in the microchannel, the dead volume of device is still in the majority, or the like.Same deficiency also can be seen in the other publication, as, United States Patent (USP) 6,645,432[Anderson, et al.:Microfluidic systemsincluding three-dimensionally arrayed channel networks, Nov.11,2003] a kind of micro-flow system that comprises the channel network that three-dimensional is arranged is disclosed, the micro-flow channels and the network thereof that contain intersection in its micro-flow system of processing, its microchannel inner surface only plays the simple effect of movement-oriented restriction.This deficiency makes this technology be difficult to expand the interior ability of initiatively controlling of micro-flow channels.Obviously, in view of the conventional art inertia in the existing technology, all have many deficiencies for the manufacturing approach that microchannel and microarray row are closely linked in the disclosed method in the above-mentioned many pieces of documents, and the correlation technique application positive anxious treat need to develop microfluidic performance and microarray high flux advantage are obtained the technology type that combines better.
Summary of the invention:
Purpose of the present invention is exactly the problem that runs in the above-mentioned prior art in order to overcome, and a kind of flexible processing method that makes up the microarray row in the microchannel is provided, particularly, provide and a kind ofly microchannel and microarray row are combined (or integrated) technology in one with moulding technology.Microarray row in the microchannel of constructing by this processing method provided by the present invention or technological approaches, can be and further develop out the new technology form that micro-fluidic and little solid controlling technology and microarray technology are closely combined together important platform is provided, expand the practical application of micro-system principle dramatically.
For realizing purpose of the present invention, the construction method of micro point array in microchannel of the present invention comprises the key step of following order:
The first step, the cloth silk that intersects: at least two microfilaments of arranging on a substrate surface, each root microfilament have at least a microfilament to intersect with it, have at least an infall that a contact point is arranged;
Second step, cast cured explosive: on above-mentioned cloth silk substrate surface, the pouring liquid polymer floods wherein at least one intersection contact point, solidifies this liquid polymer then;
The 3rd goes on foot, removes the logical point of silk: solidified in the polymer blocks of intersection microfilament at this, remove one or several microfilament selectively, and keep a microfilament at least in wherein, make and in this cured polymer piece, form microchannel or micro channel array, removed respectively the intersect contact point of microfilament simultaneously and just exposed in formed microchannel, promptly formed little point or microarray row in the microchannel with each microfilament of reservation.
Substrate of the present invention, its composition material can be plastics, can be metal or alloy, can be other solid-state materials, and satisfy the requirement that softening or melting temperature is higher than the solidification temperature of institute's cast polymerization thing.The preferential lucite that adopts in the invention process can satisfy the condition that cast polymerization thing among the present invention preferentially adopts dimethyl silicone polymer (PDMS) heat cure.Further, substrate of the present invention, its surface configuration can be a plane surface, also can be the surface with concavo-convex pattern structure, its main purpose is to provide bearing-surface for the pouring liquid polymer.In some cases, substrate even can also be microfilament itself.
Microfilament of the present invention, its material can be a metal, as fine stainless steel wire, platinum microfilament etc., also can be polymer, as the microsilk of coilings such as the PLA of nylon microsilk, biodegradability or polycaprolactone, or even the organism hair, can also be through these microfilament forms after the physical pressure effect, can be through these microfilament forms after surface absorption or the chemical modification, or the like, look the different application situation and select.
Further require described microfilament constituent material chemically can not take place crosslinkedly in the invention process, but can allow to a certain extent certain reaction takes place between the two, be beneficial to further application of the present invention with the polymer of casting usefulness.The temperature range of the solid-state or glassy state of the constituent material of microfilament of the present invention requires to coordinate mutually with the solidification temperature scope of polymer with casting; Require the melting temperature of microfilament to be higher than the solidification temperature of liquid polymer in principle.For example, the solidification temperature of PDMS is selected an important references of suitable microfilament and base material for use generally at 60～120 ℃ when this temperature range can be used as the invention process.
Casting liquid polymer of the present invention can adopt thermosetting polymer, and this base polymer can be in heating, add and depress or under curing agent, action of ultraviolet light, carry out chemical reaction, and crosslinking curing becomes indissoluble infusibility state of matter.This base polymer has been applied in the micro fabrication widely, as molding process, embossing technique, little contact printing or seal technology, and moulding technology involved in the present invention, etc.They are with low cost, and show chemical inertness in most of occasion.The embodiment of the invention preferentially adopt the silicone rubber kinds polymer (or silicone polymer, silicones), its typically be represented as dimethyl silicone polymer (Polydimethylsiloxane, PDMS).This base polymer may be the polymer of the structurally variable most species found so far, and a large amount of these base polymer commercializations have been arranged.For PDMS, Dow Corning (Midland, Michigan, Sylgard 184 U.S.A.), GE Silicones (Waterford, New York, RTV 615 USA), etc. the specification product be widely used in the micro-nano Study on Technology with the exploitation among.In addition, also can adopt epoxy resin in some embodiments of the invention, based on the thermosetting polymer of polyisoprene (polyisoprene), etc.
Method of removing microfilament in cure polymer of the present invention comprises physical method and chemical method etc.The most direct physical method is, in the power that an end that is cured in the microfilament in the polymer of desiring to remove is applied suitable size, directly extracts out and get final product, and certainly, this requires to be had certain tensile strength except that microfilament.Perhaps, after curing, polymer blocks immersed in some suitable solvents that help expansion soak.Soak with solution such as absolute ethyl alcohol or acetone, triethylamines such as PDMS, can successfully extract the microfilament that is cured in wherein out; But preferably do not remove to spur the microfilament of other reservations this moment, waits to be removed microfilament and extract the back out by the gradient desolventizing, still can make polymer (as the situation of PDMS) deadend respectively keep microfilament.Chemical method then is meant after curing, polymer blocks is put into particular solution carried out chemical attack or electrochemical corrosion to removing microfilament, perhaps joins with the microfluidic drive unit and implements chemical attack with the microfluidic maneuverability pattern.In this process, require etchant solution itself not react, but the microfilament that solidifies in this polymer can be eroded with cure polymer.When for example using PDMS to solidify fine stainless steel wire, can use strong acid to corrode, thereby remove fine stainless steel wire, form passage; And, can also use electrochemical method for accelerating the speed of its corrosion.Also have a kind of effective method to be, adopt the laser focusing to burn to melt treating in the cure polymer and remove microfilament, be aided with Mechanical Method, can realize removing a silk purpose.
The radial dimension of available microfilament is below 1 millimeter in the invention process; Obtaining of the microfilament of conventional minimum dimension decide on the manufacturing process of business-like different material microfilament, but for example the circular section fine stainless steel wire diameter of commercialization can be as small as 18 microns.
The cross section of available microfilament can be that circular, rectangle or other are irregularly shaped in the invention process; For example with fine stainless steel wire (be generally circular) radially extruding between rigid planar, can form the cross section (further, this extruding even can make the radial dimension of fine stainless steel wire narrow down to nanoscale) of approximate rectangular football field shape.
The property versatile and flexible of the inventive method is also embodied in, and can arrange by the microfilament that employing has different geometrical size and shape or its combination to solidify in polymer, realizes having the different sizes and the cross section, microchannel of geometry, little point.Therefore, " little point " of the present invention comes down to have the physical surface of certain topological geometry and area.Implement resulting this " little point " based on the inventive method, further develop the various dissimilar application important platform of (comprising biological, chemical property, hydrodynamics) just with physical surface.
Obviously, method of the present invention provides a kind of easy technology approach to realize that how much topologys go up the complicated microarray row and the microfluidic technical approach of UNICOM thereof, this method make microchannel inner surface patternization become directly, simple, both can in block, be processed into complicated discontinuous MCA, can make outside some the macroscopical physical function of interior little pattern of passage and passage interface easily again, also improve the processing mode that fields such as existing life science, chemical science, material science make up the microarrays row from an easy technical standpoint.The most significantly technique effect that the present invention brings is that the microarray row are directly made up processing in microchannel or micro channel array in incorporate mode, based on this, handles the application purposes that can realize many kind reality in conjunction with the microfluidic of microchannel.For example, under the microfluidic condition able to programmely on each or a part of little point by physical absorption or chemical reaction and in conjunction with on identical or different functional component, comprise in order to the biomaterial of control cell etc., its binding capacity also can obtain quantitative adjusting.Further, by manipulation, can also be implemented on little point optionally ability, thereby on each little some surface, process complicated material pattern in conjunction with different material to drop in the microchannel or fluid column hydrodynamics.Thereby the microarray in this microchannel row be one can be to the technology platform of multiple function application development.On this technology platform, can develop and the new technology that the functional component of institute's combination is handled on high flux ground, also can investigate the interaction between the bond that microfluidic inclusion and microarray list easily, even also will be easy to develop the technical functionality of the renewal that micro-fluidic and little solid controlling is integrated.In addition, in the process technology of the present invention, the material range of choice that relates to employed microfilament and servicing unit is very extensive, and great majority height commercialization is cheap, thereby very suitable many specific embodiments is produced in a large number.
Description of drawings:
Fig. 1 is that microfilament is the vertical view that right-angled intersection is arranged on substrate surface.
Fig. 2 is that microfilament is the front view that right-angled intersection is arranged on substrate surface.
Fig. 3 is the vertical view of cast polymerization thing in the microfilament process of arranging.
Fig. 4 is the front view of cast polymerization thing in the microfilament process of arranging.
Fig. 5 is that the interior microarray of the passage of micro channel array lists intention.
Fig. 6 is circular section microfilament intersection contact point exposes into little point when forming passage a schematic diagram.
Fig. 7 is the schematic diagram of single micro point array in microchannel.
Fig. 8 makes the cross arrangement schematic diagram with the square-section microfilament.
Fig. 9 is that the microarray that the square-section microfilament is made little square surface in little square-section channel array that template forms lists intention.
Figure 10 is that the microarray that makes up when making the passage template with the circular section microfilament of sinusoidal sigmoid lists intention.
Figure 11 is that the microarray that microchannel inside spin formula is arranged lists intention.
Figure 12 is based on the parallel micro point array in microchannel schematic diagram of arranging of sandwich.
Figure 13 is based on the micro point array in microchannel schematic diagram of sandwich cross arrangement.
Figure 14 is that the circular arc type microarray lists intention in the microchannel.
Among above-mentioned each figure, 1 is sunk structure, and 2 are substrate, 3 is upper surface of substrate, and 4 is I kind microfilament, and 5 is I microfilament array, 6 is II kind microfilament, and 7 is II microfilament array, 8 crosspoints for the microfilament of arranging by two different directions, 9 is gland sheet through hole, and 10 is the gland sheet, and 11 is the through hole that forms after gland sheet and substrate 2 are fixed together, 12 are the casting polymer, 13 is the cure polymer sheet, and 14 is microchannel and array thereof, and 15 is micro point array in microchannel.
The specific embodiment:
The present invention is further described as follows below in conjunction with drawings and Examples:
Embodiment 1:
As Fig. 1～shown in Figure 6, the process that makes up microarray row in the plane micro channel array according to the inventive method has been described.Specify as follows:
The first step, the cloth silk that intersects: as Fig. 1 and shown in Figure 2, have in central authorities on substrate 2 upper surfaces 3 of sunk structure 1, along a direction with the mode of 90 microns of the spacings I kind microfilament 4 and fixing of arranging, form I microfilament array 5, along another direction II kind microfilament 6 of arranging, form II microfilament array 7; I microfilament array 5 is with II microfilament array 7 intersects in twos, each infall has a contact point 8.Then, gland sheet 10 glands of central authorities being opened through hole 9 are on substrate 2 upper surfaces 3, make in the first step by cramping therebetween by I kind microfilament 4 and the II kind microfilament 6 formed I microfilament arrays 5 that intersect and II microfilament array 7, and make the position of the sunk structure 1 in through hole 9 and the substrate 2 corresponding, then that gland sheet 10 is fixing with substrate 2, as shown in Figure 3.
Second step, cast cured explosive: as shown in Figure 3 and Figure 4, in the formed through-hole structure 11 of gland sheet 10 and substrate 2 fixing backs, cast polymeric material 12, and make its curing.Then, remove two ends and the two ends of the II kind microfilament 6 in the II microfilament array 7 and the fixed relationship of substrate 2 of the I kind microfilament 4 in gland sheet 10, the I microfilament array 5, from sunk structure 1 taking-up with the I microfilament array 5 that intersects, polymer sheet 13 that II microfilament array 7 is solidified togather.
The 3rd goes on foot, removes the logical point of silk: as Fig. 5 and shown in Figure 6, each II kind microfilament 6 of II microfilament array 7 is removed from polymer sheet 13, formed micro channel array 14; Simultaneously in these microchannels with I microfilament array in each 8 place, crosspoint of each I kind microfilament 4, form the microarray row 15 in the microchannel.
The fixed form on the upper surface 3 of substrate 2 for I kind microfilament 4 and II kind microfilament 6 can be taked multiple mode, as fixing with daily level and smooth mouthful anchor clamps, also microfilament can be wound in substrate 2 ends and fix in the screw means mode.Can also take such mode, promptly in advance microfilament be arranged at certain intervals, get and be fit to length and fix, pipette then and be fixed in the substrate 2 as two ends.
After removing an II kind microfilament 6 or its II microfilament array 7 on the direction, just expose out with I kind microfilament 4 or 8 positions, its I microfilament array 5 original crosspoints, its face in microchannel 14, thereby form little point and array 15 thereof in the microchannel of indication of the present invention.
Further, after removing II microfilament array 7,, each microchannel 14 and each inner little point 15 thereof will all be linked up on flowing, thereby constitute the network of microfluidic in fact if in I microfilament array 5, remove any I kind microfilament 4 again.
The effective length of microchannel 14 can be determined or regulates, generally be no more than 50 millimeters by the length on through hole 9 respective direction that change sunk structure 1 and gland sheet 10 in the substrate 2.The channel density of micro channel array 14 can determine that the arrangement pitches maximum of adjacent two II kind microfilaments 6 generally is no more than 50 millimeters by the arranging density of II kind microfilament 6 in the II microfilament array 7.The dot density of microarray row 15 can be counted to determine by I microfilament array 5 and intersecting of II microfilament array 7 in the micro channel array.This puts 15 geometry and size slightly can be with the geometry and the size of I kind microfilament 4, II kind microfilament 6, and the interacting state in solidification process and deciding between the cast polymerization thing 12 that is adopted and these I kind microfilaments 4 and/or II kind microfilament 6 surfaces.For example, ideally, if the cross section of I kind microfilament 4 and II kind microfilament 6 contact positions is circle, the upright projection of these exposed little points 15 is rounded so, and its circular diameter is less than less microfilament diameter; If the cross section of I kind microfilament 4 is circular, the surface of Jie Chu II kind microfilament 6 is the plane with it, the upright projection of then formed exposed little point 15 is micro rectangle, and its length is the transverse width of the plane surface of II kind microfilament 6, and its width is then less than the diameter of I kind microfilament 4; Can learn from the geometrical relationship inference rightly and so on.Find that according to experiment when adopting PDMS as cast material, the minimum geometries of exposed little point 15 can reach nanoscale.Therefore, the geometric figure of little point 15 that the present invention can provide will be diversified, and its size can change in the micro/nano level scope.
Embodiment 2:
As shown in Figure 7, this Figure illustrates the single micro point array in microchannel of making by the technology of the present invention approach.Have on lucite substrate 2 upper surfaces 3 of rectangular recess (or sunk structure 1), along the direction nylon yarn (as II kind microfilament 6) of 40 microns of diameters and fixing of arranging, also fixing with tens of of 20 microns circular section platinum wires of 10 micron pitch parallel arrangement diameters (as I kind microfilament 4) on another direction, to have then and be placed in the substrate 2 with the lucite cover plate 10 of the onesize rectangular through-hole 9 of above-mentioned rectangular recess (or sunk structure 1) and make groove 1 and through hole 2 aligns, fix.
With 10: 1 weight ratio proportioning PDMS prepolymers and curing agent, mix to be placed on and bleed in the vacuum pumping tank about 40 minutes, to exclude the air in the polymer, then in the through hole 11 of cover plate 10 and substrate 2 fixing back formation, pouring liquid PDMS polymer 12, and heating made its curing in 30 minutes under 90 ℃.
After removing respective fixation, from rectangular recess (or sunk structure 1), take out cured polymer sheet 13, this moment should be together with platinum wire (I kind microfilament 4) in being solidificated in and nylon yarn (II kind microfilament 6), be placed in the absolute ethyl alcohol and soaked 30 minutes, then nylon yarn (II kind microfilament 6) is extracted out from polymer, can be formed the array 15 that has the little platinum point of dozens of in the microchannel, circular section 14 of 40 microns of internal diameters.
Embodiment 3:
As Fig. 8 and shown in Figure 9, this two figure has described by the technology of the present invention approach and has been processed to form rectangle microarray row in the microchannel.Get the fine stainless steel wire (i.e. I kind microfilament 4 and II kind microfilament 6) in identical rectangular cross section, make their orthogonal thereto arrays (promptly forming I microfilament array 5 and II microfilament array 7) arrange and be fixed in the lucite substrate 2; Corresponding recessed empty position and fixing on pressure cover plate 10 aligns substrate 2, cast PDMS solidifies, as shown in Figure 8; Solidify the back and extract the superincumbent II microfilament array 7 of arrangement out, promptly form the microarray row 15 in the microchannel 14, its point be shaped as rectangle, length is the width that is arranged in following I kind microfilament 4, width is for arranging the width of superincumbent II kind microfilament 6, as shown in Figure 9.
Embodiment 4:
As shown in figure 10, this Figure illustrates the integrated of microchannel with microfluidic mixed function and microarray row.By method of the present invention, the row fine stainless steel wire (as I microfilament array 5) of vertically arranging in the plane laterally is arranged into identical fine stainless steel wire (as II kind microfilament 6) sinusoidal form and array (as II microfilament array 7) thereof and fixing then thereon; After directly pouring into a mould PDMS and curing then, take off from the plane,, can solidify the certain thickness PDMS of one deck once more in the bottom surface as finding bottom surface PDMS cured thickness deficiency together with two fine stainless steel wire arrays 5 and 7 in inside submission fork contact; Put into the n-hexane solvent then it is expanded, extract and put into water behind the microfilament of arranging and make the PDMS reduction, promptly form sine-shaped, sinusoidal microchannel 14 and stainless steel microarray 15 wherein with sine curve.If two kinds of different solutions are imported the sinusoidal passage, then this sinusoidal passage can be used as micro-mixer, and the solution in constantly mixing will flow through the stainless steel microarray row 15 that wherein exposed.
Embodiment 5:
The microarray row that microchannel inside spin formula is arranged.By the inventive method, at overall diameter is that 0.5 centimetre, length are on 3 centimetres the extracapillary surface, by mode as schematically shown in Figure 11, axially earlier 5 centimetres fine stainless steel wire 6 along it with parallel 40 microns of the diameters of arranging of 60 microns limit spacing, length, two ends are all fixed; Then with 2 40 microns fine stainless steel wire 4 on the above-mentioned parallel microfilament of arranging 6, get in its axial 2 centimetre lengths in middle part and do spiral winding, itself and each root are walked abreast arrange microfilament 6 to intersect and contact, and two ends are fixed; Mount the Sylgard 184PDMS liquid prepolymer that is coated with ratio mixing in 10: 1 then on the extracapillary surface of the good microfilament of above-mentioned cloth, perhaps directly be dipped into the cylinder of the good microfilament of above-mentioned cloth in the PDMS liquid prepolymer and lift out, the PDMS layer liquid is buried respectively contacted the crosspoint, after outgasing and being heating and curing, remove and make the microfilament 4 that spiral twines, promptly form diameter and be 40 microns spiral and move towards hundreds of arrays circular microchannel in to thousands of individual little points.
Embodiment 6:
Based on the parallel micro point array in microchannel of arranging of sandwich.By the inventive method, as schematically shown in Figure 12, (1) has the fine stainless steel wire of 100 nanometer polypyrrole layers several along parallel stretching the arranging of directions X with the surface of 20 microns of diameters by electrochemical polymerization; (2) on above-mentioned formed parallel microfilament, use through flattening several to 20 microns fine stainless steel wires of 5 micron thickness, along parallel stretching the arranging of Y direction; (3) on the parallel microfilament of (2) formed Y direction, again with several with the stretching fine stainless steel wire of arranging of (1) identical mode with polypyrrole modifying layer, institute is arranged form each microfilament array and be the parallel contact net that intersects of sandwich, and (1) with (2) complete consistency from top to bottom, wherein the spacing between each adjacent contact points is 75 microns.The parallel contact net that intersects of this sandwich is solidified in the usual way in the PDMS piece, extract the fine stainless steel wire array of 5 micron thickness that are clipped in the middle then, can form then to be in 5 microns high, about 63 microns wide microchannels has the microarray row form of contraposition arrangement up and down.
Embodiment 7:
Micro point array in microchannel based on the sandwich cross arrangement.By the inventive method, as shown in figure 13, center on parallel stretching 20 microns fine stainless steel wires of arranging with 20 microns fine stainless steel wires with weaving manner, form sandwich intersection contact net, wherein the spacing between each adjacent contact points is 75 microns, it is solidified in the PDMS piece by aforementioned usual manner, extract the parallel stretching fine stainless steel wire of arranging then, can form diameter and be in 20 microns the passage and be staggered microarray row form up and down.
Embodiment 8:
Circular arc type microarray row in the microchannel.By the inventive method, on a slide surface, drip spin coating PDMS prepolymer, make its thickness reach 30 microns; The diameter of arranging thereon is 60 microns a nylon microfilament 4, and nylon microfilament 4 is immersed from top to bottom by the upper surface of liquid PDMS, exposes face and is not sticky with PDMS; Then 50 ℃ of down bakings 2 hours, after the taking-up, be that 20 microns fine stainless steel wire 6 is some along the vertical direction of nylon microfilament 4 diameter of arranging at certain intervals; Cast once more PDMS prepolymer and 50 ℃ of down bakings 3 hours takes out, and extracts nylon microfilament 4, promptly forms radius and be 30 microns circular arc type microarray row in the microchannel of gained, as schematically shown in Figure 14.
Embodiment 9:
Utilize the organism hair to make up the method for micro point array in microchannel.By the inventive method, hair and the fine stainless steel wire of getting suitable length are some, and with acetone, ethanol, ultra-pure water ultrasonic cleaning, N2 dries up.Then respectively in different directions, according to aforementioned similar mode, intersect that contact is arranged and fixing with required spacing with their.With 10: 1 weight ratio proportioning PDMS prepolymers and curing agent, mix to be placed on and bleed in the vacuum pumping tank about 40 minutes, to exclude the air in the liquid polymer, be cast on the above-mentioned intersection microfilament of having arranged, then 45 ℃ of bakings 4 hours down.Take out the PDMS polymer sheet (this moment is together with wire and hair) solidified, be placed in the absolute ethyl alcohol and soaked about 10 minutes, then fine stainless steel wire is extracted out from polymer sheet, under remaining is the array of the little point of some organism hairs in the microchannel.
Embodiment 10:
Electrochemical erosion method makes up the method for micro point array in microchannel.By the inventive method, (PMMA) is processed into hard substrate and cover plate with polymethyl methacrylate, a direction is arranged stainless steel wire and fixing in the substrate upper edge, arrange Teflon silk thread and fixing on another direction, cover cover plate then and align fixing with substrate, cast prepolymer such as PDMS also solidify, then the polymer that takes out is inserted in 50% hydrochloric acid solution together with being solidificated in inner intersection contact microfilament array, feed direct current, be corroded until stainless steel wire, wash formed micro channel array, promptly construct the Teflon microarray row in the PDMS microchannel.
Embodiment 11:
Make micro point array in microchannel with the light curable polymer.By the inventive method, arrange fixing clean fine stainless steel wire array along first direction earlier after, with oxygen plasma (O
2Pressure 0.5MPa 70W) handled the microfilament surface 5 minutes, and be placed on and evaporate tridecafluoro-1 in the vacuum ejector, 1,2,2-tetrahydrooctyl-1-trichlorosilane makes its surface silicon alkanisation.And then the fixing clean fine stainless steel wire array of on second direction, arranging.Then, inject epoxy prepolymer (as adopting the EP-TEK of masschusetts, u.s.a Epoxy Technology), in air, leave standstill 1 hour after, (contain wavelength 365nm, 406nm and 436nm, the about 10mW/cm of intensity in ultraviolet ray
2) following about 20 minutes of irradiation, promptly realize solidifying, extract the microfilament on first direction then out, the microfilament that remains on second direction in the polymer sheet is exposed in the microchannel, promptly realizes the structure that the stainless steel microarray is listed as the microchannel in.
Claims (5)
1, a kind of construction method of micro point array in microchannel is characterized in that, this method comprises the step of following order:
The first step, the cloth silk that intersects: at least two microfilaments of arranging on a substrate surface, each root microfilament have at least a microfilament to intersect with it, have at least an infall that a contact point is arranged;
Second step, cast cured explosive: on above-mentioned cloth silk substrate surface, the pouring liquid polymer floods wherein at least one intersection contact point, solidifies this liquid polymer then;
The 3rd goes on foot, removes the logical point of silk: solidified in the polymer blocks of intersection microfilament at this, remove one or several microfilament selectively, and keep a microfilament at least in wherein, make and in this cured polymer piece, form microchannel or micro channel array, removed respectively the intersect contact point of microfilament simultaneously and just exposed in formed microchannel, promptly formed little point or microarray row in the microchannel with each microfilament of reservation.
2, method according to claim 1, it is characterized in that: the radial dimension of described microfilament is below 1 millimeter.
3, method according to claim 1 is characterized in that: in the described microarray row between adjacent two little somes maximum spacing be no more than 50 millimeters.
4, method according to claim 1 is characterized in that: removed microfilament and can throw off mutually with cure polymer.
5, method according to claim 1, it is characterized in that: described liquid polymer is meant the polymer of heat or light curable.
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| CNA2007100932468A CN101274469A (en) | 2007-12-29 | 2007-12-29 | Construction method of micro point array in microchannel |
| PCT/CN2008/000191 WO2009082863A1 (en) | 2007-12-29 | 2008-01-28 | A method for forming micro-dots array in micro-channels |
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| CNA2007100932468A CN101274469A (en) | 2007-12-29 | 2007-12-29 | Construction method of micro point array in microchannel |
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