CN101267920A - Method and apparatus for cleaving brittle materials - Google Patents

Abstract

An apparatus for cleaving a section of a bar of brittle material is provided. The apparatus comprises a support adapted to hold the section of the bar in a position to be cleaved, a blade, an actuator coupled to the blade for driving the blade at least partially through the bar to create a cleaved portion of the bar, and a follower for engaging the end of the bar during cleaving. An method of cleaving a section of a bar of brittle material is also provided. The method comprises initiating a crack in the bar and driving a blade through the bar to remove a portion of the brittle material from the end of the bar. In one embodiment, the blades drives through the bar at a controlled speed.

Description

The method and apparatus of cleaving brittle materials

Technical field

The present invention relates generally to split and cuts, and more specifically, relates to the method and apparatus that fragile material is split into slice (thin section).

Background technology

The Boping of semiconductor or similar material " wafer " is for optoelectronic device and other solid state electronic devices, and be used for various systems for example the substrate of microelectromechanical systems (MEMS) be of great use.At present, they normally cut the crystal block of material or casting ingot and then the polishing of gained thin slice to be obtained.Sawing method can produce a large amount of discarded objects and cost costliness.Expensive market of limiting some product like this, for example electro-optical system.The grinding and buffing crystal can bring flaw and pollution to crystal with the conventional art that obtains slice.The alternative that relies on additional process to make slice also fails to confirm to obtain high-quality material.The method of designing up to now that is used to be split into thin slice, promptly bonding ennation on crystal only is suitable for very little section, and it is pretty troublesome and slow to remove adhesive.Tradition is split one of the subject matter of cutting very thin section and is to split two proterties that part is extremely different when cutting.The main body of crystal keeps suitable rigidity, but slice can not be resisted same power, so the chopper sheet turns to the next door, makes the slice fracture before riving fully reaching.

Therefore, the method and apparatus that needs improved cleaving brittle materials.

Summary of the invention

According to aspect of the present invention, provide the device of the section of the bar that is used for cleaving brittle materials.Described device comprises, is suitable for sliced section with bar and is retained on and waits to split the support member that cuts the position; Blade; Actuator, this actuator are connected with blade and are used to drive blade and split with the quilt that generates bar by bar to small part and cut part; With the follower that is used for engaging the bar end during cutting splitting.The method that is used for the cleaving brittle materials bar also is provided.

Description of drawings

Fig. 1 is a side elevational view, has schematically shown the device that is used for cleaving brittle materials according to the embodiment of the invention.

Fig. 2 is the side elevational view of amplifying, and has schematically shown the blade that is in primary importance of Fig. 1 device.

Fig. 3 is a side elevational view, has schematically shown the blade of Fig. 2 device part that is in the second place.

Fig. 4 is the side elevational view of another embodiment of the present invention of being in primary importance similar to Fig. 2 device of being used for cleaving brittle materials.

Fig. 5 is the side elevational view of the device part of Fig. 4 of being in the second place similar to Fig. 3.

Fig. 6 is the side elevational view that the present invention similar to Fig. 2 is used to split the other embodiment that cuts the fragile material device that is in primary importance.

Fig. 7 is the device part side elevational view that Fig. 6 similar to Fig. 3 is in the second place.

Fig. 8 has schematically shown the beginning of splitting the process of cutting according to a method of the present invention.

Fig. 9 has schematically shown the beginning of splitting the process of cutting according to another method of the present invention.

Figure 10 has schematically shown the beginning of splitting the process of cutting according to the other method of the present invention.

Figure 11 A is schematically illustrated in the blade that is in primary importance in the incipient stage process of splitting the process of cutting in another method of the present invention.

Figure 11 B is schematically illustrated in the blade that splitting of representing among Figure 11 A is in the second place in cutting.

Figure 12 A is the side elevational view that the present invention similar to Fig. 2 is in another embodiment that is used for the cleaving brittle materials device of primary importance.

Figure 12 B is the side elevational view of the device part of Figure 12 A that be in the second place similar to Fig. 3.

Figure 13 A has schematically shown according to the groove of the inventive method cleaving brittle materials, blade and gripper shoe.

Figure 13 B has schematically shown the beginning of splitting the process of cutting according to the inventive method.

Figure 13 C is schematically illustrated in the expansion (propagation) according to the crack of causing in the step shown in Figure 13 B of the inventive method.

Figure 13 D has schematically shown the expansion of splitting the process of cutting according to the inventive method.

Figure 14 A has schematically shown blade and the gripper shoe according to the inventive method cleaving brittle materials bar.

Figure 14 B has schematically shown the beginning of splitting the process of cutting according to the inventive method.

Figure 14 C is schematically illustrated in the expansion according to the crack that causes in the step shown in Figure 14 B of the inventive method.

Figure 14 D has schematically shown the expansion of splitting the process of cutting according to the inventive method.

Figure 15 is an enlarged perspective, has schematically shown the blade according to the embodiment of the invention.

The specific embodiment

With reference to the accompanying drawings various embodiment of the present invention are described hereinafter.It is to be noted that diagrammatic sketch is not that the part of drawing in proportion and have analog structure or function is all being represented with identical reference number in the diagrammatic sketch.It should be appreciated that text and diagrammatic sketch just will be convenient to describe specific embodiments of the invention.Be not will be with them as exhaustive explanation of the present invention or limiting the scope of the invention.In addition, in conjunction with situation and nonessential this embodiment that is defined in of specific embodiment description of the present invention, but can in any other embodiment of the present invention, implement.

Device 10 according to the embodiment of the invention can be used for, and for example, splits the section (see figure 1) of cutting out the fragile material bar.Fragile material used herein generally be meant fracture or broken before can only bear the material of a small amount of distortion.Semiconductor/substrate material (for example GaAs and sapphire) that silicon or other are commonly used normally hard and/or crisp.But when monocrystalline state, the thin slice of these fragile materials can be split and cut, and can make according to embodiments of the invention.Therefore, " approaching " sheet used herein or " thin " part, thus generally be meant the enough thin sheet or the piece that before fragmentation, can bear the fragile material of an amount of deflection big when being bulk than material.Usually, according to the embodiment of the invention, preferably the wafer less than the silicon of 200 micron thickness is a thin slice.Other embodiments of the invention can be used the silicon of greater or lesser thickness.In certain embodiments, generate silicon wafer with 50-200 micron thickness.Also can generate other thickness in an embodiment of the present invention.

Device 10 comprises collet element or pedestal 12 and erected configuration, and this erected configuration comprises a plurality of side frame elements 14 and top board 16.Though not shown in Figure 1 for fear of covering diagram of the present invention, device 10 can comprise that one adjusts the telescope to one's eyes in order to help the blade location and to aim at.Thereby can also comprise flexible band, cable or chain or rack-and-pinion (not shown) in 10 at device provides rotation to drive follower 24 so that move to linear movement.

Device 10 further comprises blade 18; Actuator 20, this actuator 20 are connected with blade 18 and are used to drive blade to small part and pass the bar of fragile material or crystal block (boule) 22 and split with the quilt that generates this bar and cut part; With follower 24, be used for the end 26 that engages bar 22 during cutting splitting.Device 10 can comprise propulsive mechanism for example push rod 28 to supply with the crystal block 22 of fragile material.Any suitable actuator or motor, not shown, all can be connected and be used for crystal block 22 is moved towards device 10 cutting mechanism with push rod 28.The guiding mechanism of guide 30, back guide 32 and vertical guide 34 is set up in order to guide crystal block 22 to enter and is used to split the position of cutting before including.Be provided with fine adjustment slide 36, and preceding guide 30 is preferably fixed on the one or more fixed position of slide 36, then guide 32 is slidably mounted within on the slide 36.Specifically, fine adjustment slide 36 can be regulated the position of crystal block 22 with definite depth of cut, and in certain embodiments, regulates the position (seeing Figure 14) of blade when cutting is carried out.Preceding guide 30 can be the part of fine adjustment slide 36.The part that back guide 32 can be a crystal block propulsive mechanism 28 and advance along fine adjustment slide 36.Fine adjustment slide 36 can be linear movement platform (stage), and it comprises trapped orbit 35 and the shiftable track 37 that is connected with pedestal 12, and this shiftable track 37 is removable by trapped orbit 35 supports and relative fixed track 35.After crystal block 22 was transported to rough position by push rod 28, fine adjustment slide 36 provided meticulous for crystal block 22 with respect to the position of blade 18 and is final adjusting.Fine adjustment slide 36 can be driven by motor and be controlled automatically.Bar cramp push rod 38 is connected with bar cramp actuator or motor 40 so that secure grip or clamp crystal block 22, make its downwards and guide 30 and 32 and carriage 36 on be in the appropriate location.Pad 39 can be connected with the bottom of bar cramp push rod 38 in order to engage crystal block 22.Plate 17 is set up in order to supporting blade 18 and follower adjusting part 64, and it will be described below.Plate 17 moves up and down on linear bearing 50.

Blade 18 is preferably enough split the excessive wear of cutting in the operation with opposing firmly.Preferably, blade 18 is enough firm in to avoid cutting deflection under the load splitting.As example, the typical case who is split into the wide silicon plane of 10mm splits and cuts load is about 3-5 newton.Be suitable for riving fragile material for example the representative materials of silicon comprise and having or not with hardened carbon tool steel, zirconia, tungsten carbide and the sapphire of TIN coating.According to the required power and the intensity of blade material, the thickness of point of a knife typically is and is bordering on 20 microns to avoid deflection.

In a preferred embodiment, blade 18 is blades of wearing into spill, shown in Fig. 1-6 and 15.Should be appreciated that blade 18 can be any suitable form or shape, for example V-arrangement.As in Figure 15, illustrating in greater detail, wear into the concave curved surface 44 that the blade 18 of spill has a front edge 42 and extends out from front edge 42.Concave curved surface 44 causes to be split and cuts material bending in splitting the process of cutting.Become to make the fragile material of given thickness crooked and do not fracture the Curve selection of concave curved surface 44.The radius of concave curved surface 44 depends on to be split the intensity of cutting material and is split the thickness that cuts off sheet.Preferably, the radian that has of the concave curved surface 44 of blade 18 is similar to below the radian of the convex curved surface 78 of the follower 24 that will describe.Described radian can extend across the whole basal surface of blade 18, or extends at least and will split the isometric distance of width of cutting thin slice.For example, the silicon of 65 micron thickness typically has the minimum bending radius of about 62mm.The cutting surface of blade 18 can be treated, for example splits when cutting by nonvolatil film or lubricant so that at blade and reduces friction.

Actuator 20 is connected with blade 18, applies active force driving blade 18 towards also preferably passing through crystal block 22 thereby be used for blade 18.Pressure cell 46 combines with actuator 20 and is applied to power on the blade 18 in order to measurement.Preferably drive damage and minimizing wrong the split chance of cutting of blade 18 to avoid blade with slow and controlled way.As silicon hard, fragile material has sizable strain in its inside during in their splittings, so their cleave velocity, promptly the speed that material is advanced is passed in the crack, near the velocity of sound or be approximately per second number kilometer.Yet when the cutting slice, the strain in the slice discharges rapidly, and the splitting that each is independent partly is limited in the distance of about 1mm.Like this, be the section (about 100 square millimeters) that obtains to be concerned about, just need repeatedly to make in advance the crack.If cause blade to be beated forward splitting when cutting because the strain that blade and just being split cuts in the material discharges suddenly, blade may make thin slice/follower system overload, has increased the possibility that the crack turns in thin slice, so damages thin slice.With slow, controlled way moving blade also is desirable, so that be complementary with the position of follower, will be described in detail below.

Structural support (physical support) or gripper shoe 48 can split cut during, particularly split and cut the starting stage (seeing Fig. 1-2), be used for guide blade 18.Gripper shoe 48 can be by for example linear bearing 50 supports of bearing, and described bearing can be advanced up and down on guide 34.Fixture 47 can be used for gripper shoe 48 is combined on the bearing 50.As example, gripper shoe 48 can comprise surface 49, and this surface 49 is basically perpendicular to the top surface 52 of crystal block 22, so gripper shoe 48 is aimed at and supporting blade 18 during cutting splitting.Gripper shoe 48 also can comprise a flange that extends in the groove, will be described in detail below.

Follower 24 is suitable for engaging with the end 26 of crystal block 22 during cutting splitting.Follower 24 can also play split cut during with slow and controlled way play a part the guiding blade 18.Follower 24 can link to each other with connector 54 by for example a plurality of bolts of any suitable means or other securing member 55, thereby is rigidly fixed on the connector 54.Connector 54 can combine with follower supporting component 61 by any suitable device, and goes out as shown, the pivot by extending through axle 62 lower ends or sell 60 and combine with assembly 61 pivotly or rotatably.Supporting component 61 comprises axle 62, is fixed on the adjusting part 64 of axle 62 upper ends, and rotation stop regulating part 66, and it is used to limit the angular displacement with respect to axle 62 of connector 54 and follower 24.Adjusting part 64 is used for by for example bar 63 and bolt 65 axle 62 being fixed to plate 17, and is used for making axle 62 highly be conditioned by bolt 67, thereby makes the rotation of pin 60 be in the position that wafer warpage takes place.Assembly 64 further allows axle 62 and therefore sells 60 to produce vertical mobile, and harmonious with blade 18 on the path that is parallel to blade 18 with follower 24.Follower 24 relies on some friction combination to rotate around pin 60, described some friction is combined between the end surfaces 26 of follower surface 76 and crystal block 22, from on follower 24 tops, i.e. the pressure at the thin slice top of surface on 77, and/or explicit driving mechanism for example is installed in the belt pulley that has the chain, cable or the flexible band that are installed on the top board 16 on the pin 60, or be installed in the pinion on the pin 60 and be installed in tooth bar on the pedestal 12, or controlled so that sell 60 in due course between and the suitable motor that rotates with suitable speed.The control of friction is to rely on the friction resistant coating on one of surface 44 and 78 or two and/or the size on follower 24 tops is decided to be with respect to blade 18 loosely to cooperate between the surface 44 and 78, so that be not combined on the blade 18.When blade 18 advanced, adjusting part 64 also moved down, and it moves down axle 62.Friction between the end face 26 of follower surface and crystal block 22 causes that connector 54 and follower 24 rotate around pin 60.Therefore, when blade 18 advanced, follower 24 moved down and leans on the quilt of fragile material to split and cuts the part rotation.Shown in Fig. 2 and 3, split cut during, follower 24 rotates around the axis 68 of rotation, this rotation 68 is limited by the center line of pin 60.When blade 18 advances, the position of pin 60, thus the axis 68 that just rotates is moved down into the second place 68B shown in Fig. 3 from the primary importance 68A shown in Fig. 2.

In an embodiment shown in Fig. 2 and 3, follower 24 is rolling followers, and it has at least one and the similar convex curved surface of circular arc.In a preferred embodiment, follower 24 can comprise and is suitable for first convex curved surface 76 that engages with the end 26 of crystal block 22 and splitting second convex curved surface 78 that is suitable for engaging with blade 18 during cutting.Radially extensional surface 77 extends to second convex surfaces 78 from first convex surfaces 76.Radially extensional surface 77 engages with the part of fragile material and has a thickness radius about equally with the described part of fragile material.Second convex curved surface 78 can be provided with the akin camber line of camber line that has with the concave curved surface 44 of blade 18, and preferably surface 78 extends through the arc of the length of the arc 44 that is similar to blade 18.First convex curved surface 76 has first radius, 80, the second convex curved surface 78 and has second radius 82, and it is preferably approximate with the radius on surface 44.The length of first radius 80 depends on is just split the intensity of cutting material and is just being split the thickness that cuts part.Thereby the length of the arc on surface 76 preferably wants long enough can cover the surface of the part 84 of crystal block 22 in the whole moving area of follower 24.Select first and second radiuses 80 and 82 and split the thickness that cuts part 84, thereby second convex curved surface 78 is engaged with the concave curved surface 44 of blade 18, first convex curved surface 76 and the quilt of fragile material are split and are cut part 84 and engage simultaneously.As example, first radius, 80 to the second radiuses 82 are little, and gap is similar to is split the thickness that cuts part 84.

Follower 24 can have other embodiment and within the scope of the invention.For example, follower 24 can comprise flexible flake or bar 86 and movable part, it is leaned against on the crystal block (see Fig. 4-5) thereby this movable part applies power pushing bar to bar 86.Should be appreciated that flexible flake 86 is selectable rather than requires.Movable part can be any suitable type, and for example rotatable roller 88 is shown in Fig. 4-5, or slide block 90, shown in Fig. 6-7 and be described below.Roller 88 is combined in the lower end of axle 62 with pivot, for example by pin 60, and by being actuated by rotatable with the friction of bar 86, for example rely on some coarse coating or little transmission device between roller 88 and the bar 86, thereby when roller 88 and blade 18 move downward under the active force of actuator 20, in Fig. 4-5, roller 88 is rotated in a clockwise direction around axis 68.Roller 88 also can be driven by rack-and-pinion or tape handler (not shown).Flexible barcode thing 86 can have and is suitable for splitting the second portion 94 that cuts the first 92 that part 84 engages and be suitable for engaging with blade 18 with the quilt of fragile material.First 92 has first thickness and second portion has second thickness.As example, first thickness is littler than second thickness, and this gap is similar to is split the thickness that cuts part 84.Because roller 88 moves downward during cutting and around axis 68 rotations splitting, before the blade 18 so roller 88 compressing flexible barcode things 86 make with crystal block 22 and blade 18 and engage, thereby the quilt of control fragile material is split the outside power on the part 84 of cutting and keep blade 18 alignings to cut so that correctly split.

In another embodiment of the present invention, the bar 86 of follower 24 comprises shock wave absorbed layer 96, and as shown in Fig. 6-7, it can be an elastomer layer, and buffering is from the shock wave of each continuous splitting.In some embodiments, elastomer layer 96 is sandwiched in first and second flexible sheets for example between first and second stalloys 98 and 99.In a preferred embodiment, first lamellar body 98 is similar to the bar 86 shown in Fig. 4-5, and has first and second parts 92 and 94.Alternately, if elastomer is enough firm, elastomer layer 96 can directly engage with crystal block 22, and elastomer layer preferably is formed with first and second parts 92 and 94 in this case.

Slide block 90 can be used for flexible barcode thing 86 is applied active force (seeing Fig. 6-7).When blade 18 descended, slide block 90 moved down and preferably is connected with the lower end of axle 62, and more preferably was rigidly fixed in the lower end of axle 62.Area supported 91 can be set on the slide block 90 and by low coefficient of friction plastic and form, and is used to be sliding engaged to flexible barcode thing 86.Alternately, hydraulic support or other flat bearing commonly used or any device that other is fit to can be used as the area supported 91 that forms slide block 90.

In operation, bar cramp 38 be raised so that the crystal block 22 of fragile material be pushed into mechanism for example push rod 28 promote or move to the position of expectation to cut so that split.Such promotion can be by forward and backward boule guides 30 and 32 guiding.The position of crystal block 22 can be regulated by fine adjustment slide 36.Split when cutting the position when crystal block 22 is in, its end face 26 is pushed against and is in the suitable position of phase blade 18 on the follower 24, so that determine the cutting progress of expectation, is promptly split the expectation thickness that cuts the crystal block part.

Start bar cramp motor 40 then, make bar cramp 38 engage and crystal block is remained on desired locations and cut so that split with crystal block 22.If desired or be desirably between crystal block 22 and the follower 24 and have some spaces to cut, fine adjustment slide 36 (can be left blade 18) backward and move so that this space to be provided for splitting.The length of bar cramp push rod 38 and suppleness can make crystal block 22 keep being securely held.

Split and cut actuator 20 by starting and the downward blade 18 that drives, until the beginning crack.This can loosen by the active force on the blade observes.Fine adjustment slide 36 is further moved backward then, so that advance along initial splitting in blade 18 back sides.Blade 18 is advanced further now.When blade 18 advanced, follower adjusting part 64 also moved down, and it moves down follower shaft 62, by the follower on any above-mentioned means rotational pin 60, thereby rotated follower 24.

Splitting cut last, thin slice can be by a kind of the removing in two kinds of methods.From top, can use carrying device (affordance) for example vacuum tweezer grasp thin slice.Fine adjustment slide 36 further moves backward with the release thin slice, thereby thin slice is removed.From following, blade 18 rollbacks, fine adjustment slide 36 further moves backward then, thereby thin slice is discharged.The combination of these technology or other are removed technology and also can be used.

On the other hand, the invention provides the method for cleaving brittle materials bar.Substantially, this method is included in the bar and causes the crack and to drive that blade passes bar and a part of removing fragile material from the bar end.

Figure 8 illustrates the process of cutting of splitting, wherein blade 18 is according to embodiment of the invention cleaving brittle materials bar 22.In this embodiment, chopper 18 on the crystal face, be preferably on the weak crystal face fragile material exerted an influence.For example, known to silicon, (111) face is the most weak, and (110) face is about the same.

Split and cut operation and in fragile material, carry out with controlled speed.Crack propagation can be produced by the plane of disruption of expection rapidly, typically causes a series of cracks small, that increase.Chopper 18 should be enough firmly, enough firm, and suitably moulding so that from the bar of material, peel off the material sheet of expection.

In certain embodiments, splits face in the face of the rear side of the blade 18 of bar 22 main parts or surface 19 are substantially perpendicular to, it is parallel with the top surface 52 of crystal block that this splits face, so seldom be with or without masterpiece and be used on the blade it is pushed and split in the thin slice that cuts.In a preferred embodiment, thereby the opposite side of blade or apparent surface 21 are made into that enough angles are enough firm can bear active force, but angle is not excessive, thereby otherwise are split and cut thin slice and can bear excessive bending and fracture.

Cut starting point in order to establish suitable splitting, groove 100 preferably is formed on will be split in the bar 22 that cuts, as shown in Figure 9.Groove 100 can be used for positioning blade 18, like this can be in the face of the surface of most of fragile material blade 18 forms the crack 19 times, thereby prevent or minimize the outwardly-bent of blade, described outwardly-bent cause to split to cut depart from and damage thin slice.Initial groove also can reduce the pressure of blade top, has reduced desirable strength and has increased blade (sharpness) life-span.

In certain embodiments, initial groove can by in the face of by split cut the bar end vertical surperficial 101 and form in the face of the inclined surface 103 of most of bar.The adoptable form of initial groove is sharp notch, V-arrangement or " keyhole " breach." keyhole " breach 100 shown in Fig. 9 has the bottom or the relief 102 of expansion, thereby the crack is vertically beginning under the side.The stress at the sharp notch 105 dependence breach tips shown in Figure 10 is concentrated and is made the crack under vertical side.Breach of the present invention can produce by machinery, chemistry or alternate manner.For example, the desired shape of initial groove generates with diamond bit or with reactive ion etching.

The initial groove on the bar top surface, making groove in the side of bar and bottom is useful to help the guiding crack more reliably.

In Figure 11 A-11B, embodiments of the invention have been shown, wherein have been introduced into and regulate blade 18 in the bar 22 later in crack 107.In this embodiment, blade 18 has the V-arrangement of symmetry, is used to make the intensity maximization of the blade of opening up the crack to be used to begin the crack.After the crack generated, blade 18 relied on or is inclined to the end of bar 22, as shown in Figure 11 B, made towards the blade face 19 of most fragile material parallel with rod surface 26.

In some embodiments of the invention, be formed at 50 to 100 microns at interval of grooves 100 in the bar 22.Initial groove 100 is aimed at below blade 18, then bar 22 is clamped in the appropriate location.After this blade 18 applies active force.When being split the slice separates of cutting, in any suitable manner it is picked up, for example be to spray in certain embodiments by inhaling rod (suctionwand) or gas.Described process repeats until bar 22 too short so that can not support further to split and cut always.Another bar location can be used to split then and cut.

Figure 12 illustrates embodiments of the invention, wherein follower 24 engages with the end 26 of bar 22 with the quilt of restriction thin slice and splits the outside active force that cuts on the part.Follower 24, it comprises for example roller 88 of any suitable movable part, with slowly and controlled way split and also guide blade 18 in the process of cutting.Roller 88 is split and is cut material splitting the cutpoint upper support, thereby restriction is left the power of bar 22 main bodys and assisted to prevent that thin slice is broken or fracture.

In another embodiment of the present invention, structural support or gripper shoe 48 are used to guide blade 18 (seeing Figure 13 A-13D).About this point, when vee-cut was formed in the bar 22, gripper shoe 48 can comprise dependence flange 104, and this dependence flange 104 extends in the groove 100, is preferably V-arrangement, and temporary transient vertically surface 106 is provided.Temporary transient vertically surface 106 makes blade 18 aim at the cusp that forms vee-cut 100 bottoms.When blade 18 descends, gripper shoe 48 supporting blades 18.

In some embodiments, corrosive agent can be used to preferentially to destroy the groove and/or the crack of the tensioning combination of fragile material.Therefore, corrosive agent can be used to reduce required active force and make that the speed of splitting is constrained to more much smaller than the velocity of sound, thereby produces more manageable cracking.Any suitable corrosive agent can use.For example, potassium hydroxide (KOH) solution can be used as the corrosive agent of silicon.Alternately, electrochemical reaction can be used to destroy the tight combination of fragile material.This can finish by the conductive layer of putting into blade.

In other embodiment of the present invention, can adjust after causing the crack or be shifted in the position of blade 18.Shown in Figure 14 A-14D, can be along the line 110 form cracks, this line 110 is different from dotted line 112, extends downwardly in the bar 22 in the vertical lower face of blade 18.The crack be generated thrust bar 22 with blade after, blade 18 can resemble Figure 14 B carry out the transition to shown in Figure 14 C slightly to the thin slice displacement, therefore when blade 18 its downward paths of continuation, blade 18 is not to external pressure.

Describe the present invention by various embodiment and method, wherein thin section of brittle material begins to be split to cut from an end of fragile material bar.Will be understood that the present invention is applicable to also to divide equally to split and cuts that wherein the bar edge is split continuously perpendicular to the path of longitudinal axis 21 (see figure 1)s of crystal block 22 and cut.When dividing part equally when becoming extremely thin, they are too fragile so that can not split by the conventional method support and cut.First follower can be used for engaging an end face of Boping portions, and second follower can be used for engaging the opposed end of Boping portions.To split the later stage that cuts be applicatory equally dividing equally for aforesaid blade, follower and groove, can obtain than independent use tradition split segmentation method thin the section of Duoing.

In one aspect of the invention, being used to split the device that cuts the fragile material bar section with end can be provided and comprise that the sliced section that is suitable for bar is retained on and wait to split support member, blade, the actuator that cuts the position, this actuator combines with blade and is used to drive blade and splits with the quilt that generates rod by bar to small part and cut part, and is used for the follower that engages the end of bar during cutting splitting.

The concave curved surface that blade can have front edge and leave from this front edge extension.The concave curved surface of blade can be provided with camber line, and follower can have convex curved surface, and this convex curved surface is provided with the approximate camber line of camber line with the concave curved surface of blade.Follower can have other convex curved surface, and radially extensional surface can extend to other convex curved surface from the convex curved surface of appointment first.The quilt of bar is split to cut partly can have a thickness, and the convex curved surface of appointment first can have first radius, and other convex curved surface can have second radius, and this second radius ratio, first radius is little, and little gap is approximately the quilt of bar and splits the thickness that cuts part.The quilt of bar is split to cut partly can have a thickness, and follower can comprise movable part and at least one layer material that is fixed on this movable part, this at least one layer material has the first that is provided with first thickness and is provided with the second portion of second thickness, this second thickness is littler than first thickness, and little gap is approximately the quilt of bar and splits the thickness that cuts part.Movable part can have the parts that can rotate around rotation.Actuator can follow into direction driving blade, and movable part can be transferable parts on the direction that is parallel to the blade direct of travel.Described at least one layer material can comprise elastomer layer.The end of bar can have the flat surface that the crosscut bar extends, and follower can comprise flat surface, and the flat surface of the end of bar is extended and is parallel on this surface from convex curved surface.

In another aspect of the present invention, the device that is used for the section of cleaving brittle materials rod can be set up and comprise that the sliced section that is suitable for bar is retained on waits to split the support member that cuts the position, blade with front edge and recessed zone, front edge is left in the zone extension of described indent, and actuator, this actuator combines with blade and is used to drive blade and splits with the quilt that generates bar by bar to small part and cut part.Recessed zone can be formed by concave curved surface.

In another aspect of the present invention, split and cut device and can be set up and comprise having and to be split the fragile material rod of the section of cutting, being used for sliced section with bar is retained on and waits to split the support member that cuts the position, blade and actuator, this actuator combine with blade and are used to drive blade and split with the quilt that generates bar by bar to small part and cut part.Be used for splitting in the follower that engages the bar end during cutting can be included in.

In another aspect of the present invention, split the method for cutting fragile material bar and be provided and comprise with end, in bar, cause the crack and drive blade by bar, so that remove the part of fragile material from the end of bar.

Actuation step can comprise with controlled speed drive blade by rod.The distance that the initiation step can be included in from bar end 50-200 micron causes the crack.Fragile material can comprise crystalline material.Fragile material can be selected from silicon, GaAs, germanium, silicon-germanium and sapphire.Cause step and can comprise that driving blade enters in the rod of fragile material.Described method can further comprise, drive blade enter cause the crack in the bar before, along structural support guiding blade.Described method can further comprise, before driving blade along the crack with the alignment blade crack.Described method can further comprise, before causing step, forms groove on the bar surface.Described formation step can comprise the crystal face formation groove along fragile material.Groove can be provided with and be basically perpendicular to the surface that extend on the rod surface.Groove can be a keyhole groove.Described method can comprise further that at least a portion of structural support extends in the groove so that the guiding surface that is basically perpendicular to the bar surface to be provided along structural support guiding blade.Described method can further comprise the bar end is applied active force.The described step that applies can comprise along the bar end and moves follow-up unit.

An advantage by apparatus and method provided by the invention is fragile material can be cleaved into slice and not have sawdust.

Though be appreciated that by foregoing illustrative purposes is illustrated specific embodiments of the invention at this for example, under the situation that does not depart from aim of the present invention and scope, can make various modification modification.

Claims (31)

1. device, it is used to split a section of cutting the fragile material bar with end, this device comprises support member, blade and the actuator that is suitable for the described section of bar is retained on the position that will cut, and this actuator combines with blade and is used to drive blade and splits with the quilt that generates bar by bar at least in part and cut part; And be used at the follower of splitting the end that is used to engage bar during cutting.

2. device as claimed in claim 1 is characterized in that, the concave curved surface that blade has front edge and leaves from this front edge extension.

3. device as claimed in claim 2 is characterized in that, the spill curved surfaces of blade is provided with camber line, and follower has convex curved surface, and this convex curved surfaces is provided with the akin camber line of camber line with the spill curved surfaces of blade.

4. device as claimed in claim 3 is characterized in that, follower has other convex curved surfaces and reaches radially extensional surface, and radially extensional surface extends to described other convex curved surfaces from the convex curved surfaces of appointment first.

5. device as claimed in claim 4, it is characterized in that, the quilt of bar is split to cut partly has a thickness, and wherein the convex curved surfaces of appointment first has first radius, and other convex curved surfaces has second radius, this second radius ratio, first radius is little, and the quilt that its little gap is approximately bar is split the thickness that cuts part.

6. device as claimed in claim 3, it is characterized in that, the quilt of bar is split to cut partly has a thickness, follower comprises movable part and is pressed against at least one layer material on the bar by this movable part, this at least one layer material has the first that is provided with first thickness and is provided with the second portion of second thickness, this second thickness is littler than first thickness, and the quilt that this little gap is approximately bar is split the thickness that cuts part.

7. device as claimed in claim 6 is characterized in that, movable part is can be around the parts of rotation rotation.

8. device as claimed in claim 6 is characterized in that, actuator follows into direction driving blade, and movable part is along being parallel to movably parts of blade direct of travel.

9. device as claimed in claim 6 is characterized in that, described at least one layer material comprises elastomer layer.

10. device as claimed in claim 3, it is characterized in that, the end of bar has the surface on the plane of extending transverse to bar, and follower includes the surface on plane, and the plane surface of bar end is extended and is parallel on the surface on the plane that this follower comprises from the convex curved surfaces.

11. device as claimed in claim 1 is characterized in that, the bar of fragile material has the other end, and its end with appointment first is relative, and described device comprises the other follower that is suitable for engaging bar the other end.

12. the device of the section of a bar that is used for cleaving brittle materials comprises: support member, it is suitable for described section with bar and is retained on to split and cuts the position; Blade, the concave regions that it has front edge and leaves from the front edge extension; And actuator, it combines with blade and is used to drive blade and splits with the quilt that generates bar by bar at least in part and cut part.

13. device as claimed in claim 12 is characterized in that, concave regions is formed by the spill curved surfaces.

14. split and cut device and comprise for one kind: have and to be split the fragile material bar that cuts off sheet; Be used for described sliced section with bar and be retained on and will split support member, blade and the actuator that cuts the position, this actuator combines with blade and is used to drive blade and splits with the quilt that generates bar by bar at least in part and cut part.

15. as claimed in claim 14 splitting cut device, further comprises follower, is used for the end that engages bar during cutting splitting.

16. a method that is used to split the bar that cuts the fragile material with end is included in and causes the crack in the bar, and the driving blade passes bar so that remove the part of fragile material from the end of bar.

17. method as claimed in claim 16 is characterized in that, actuation step comprises with controlled speed drive blade passes bar.

18. method as claimed in claim 16 is characterized in that, causes step and comprises, causes the crack in the distance from bar end 50-200 micron.

19. method as claimed in claim 16 is characterized in that fragile material comprises crystalline material.

20. method as claimed in claim 16 is characterized in that, fragile material is selected from silicon, GaAs, germanium, silicon-germanium and sapphire.

21. method as claimed in claim 16 is characterized in that, causes step and comprises, drives blade and enters in the bar of fragile material.

22. method as claimed in claim 21 further comprises, before the driving blade enters bar initiation crack, along structural support guiding blade.

23. method as claimed in claim 22 further comprises, before driving blade along the crack with the alignment blade crack.

24. method as claimed in claim 16 further comprises, forms groove in the surface at bar before causing step.

25. method as claimed in claim 24 is characterized in that, the formation step comprises the Jinping's face formation groove along fragile material.

26. method as claimed in claim 24 is characterized in that, groove is provided with and is basically perpendicular to the surface that extend on the bar surface.

27. method as claimed in claim 24 is characterized in that, groove is a key hole shape groove.

28. method as claimed in claim 24 further comprises, along structural support guiding blade, wherein at least a portion of structural support extends in the groove so that the guiding surface that is basically perpendicular to the bar surface to be provided.

29. method as claimed in claim 24 comprises that further the end to bar applies active force.

30. method as claimed in claim 29 is characterized in that, applies step and comprises along the end of bar and move follow-up unit.

31. method as claimed in claim 24 further comprises, uses the combination that corrosive agent is used to destroy the tension of fragile material in groove.

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