CN101263329A - Method and arrangement for actuation - Google Patents
Method and arrangement for actuation Download PDFInfo
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- CN101263329A CN101263329A CNA2006800336868A CN200680033686A CN101263329A CN 101263329 A CN101263329 A CN 101263329A CN A2006800336868 A CNA2006800336868 A CN A2006800336868A CN 200680033686 A CN200680033686 A CN 200680033686A CN 101263329 A CN101263329 A CN 101263329A
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Abstract
The present application relates to an arrangement for selectively providing a plurality of output forces, such as for example, a higher and a lower output force or a predetermined, time dependent output force. In one embodiment, a first piston assembly is moveable between a first and a second position and a second piston assembly moveable between a third and a fourth position. When the first piston assembly is in the first position, the second piston assembly is selectively movable between the third position and the fourth position. When the first piston assembly moves the second position, it moves the second piston assembly to the fourth position.
Description
Related application
The application has required the U.S. Provisional Patent Application No that is entitled as DUAL MODEACTUATOR 60/698 of submission on July 13rd, 2005, the U.S. Provisional Patent Application No 60/750 that is entitled as METHOD AND ARRANGEMENT FOR DUAL MODEACTUATION that on December 14th, 889 and 2005 submitted to, 452 preference, its whole disclosure is completely integrated at this by reference.
Background technique
Some processes may require the valve of actuating with high cycle frequency.In other words, valve is with relatively little amount of time opening and closing between the opening and closing action.High frequency actuator is through being usually used in actuating the valve in these application.One has been utilized the process of high frequency actuator is ald (ALD).ALD utilizes actuator to come the process with the extremely thin layer of multiple reactive material of deposition or chemical product on base surface of opening and closing valve promptly.Typical A LD process may for example require tens of to hundreds of actuation cycles before realizing final sedimentary deposit during several minutes.In case layer is deposited, then substrate is removed, and introduces new substrate, and process repeats.
Some processes also may require to have the valve (promptly low by the leakage of valve) of high integrality sealing.Leakage by valve refers to close or the amount of the fluid (gas or liquid) by valve during sealing station when valve is in.In the valve that the sealing that forms by two sealing components are forced together is closed, for example in membrane valve, increase amount with the coarctate power of sealing component and usually reduced leakage by valve.Therefore, the application of wishing high integrality sealing can be designed as and utilizes higher sealing force.Wherein valve is in long relatively time durations, for example suspending the application that maintenance is closed when changing systematic parameter during the system maintenance or when process, benefits from the low leakage of passing through valve, and usually depends on higher sealing force and keep sealing.Yet sealing component is easier to wearing and tearing or damages when using higher sealing force, particularly in the cycle applications of high cycle frequency or prolongation.
Summary of the invention
This discloses the method and apparatus that relate generally to is used to actuate.An inventive concept of Pi Luing in this application relates to the equipment that is used for selectively providing for example higher and lower motivator or closes a plurality of ouput forces of power.In one embodiment, equipment can comprise the actuator of the FLOW CONTROL equipment that is connected to valve for example, and wherein higher actuator can be provided or to close masterpiece be first output and lower motivator or to close masterpiece be second output to actuator.For example, in cycle period, equipment can provide the power of first amount between sealing component when valve cuts out.Yet, keep the down periods or in the cycle period of lower frequency at valve, equipment can provide the power of second amount between sealing component, and wherein the power of second amount is greater than the power of first amount.
Another inventive concept that discloses in application relates to the equipment with a plurality of actuators, and a plurality of actuators can separately be actuated and/or also can work together so that motivator to be provided.In one embodiment, first actuator can move in response to first control signal between the primary importance and the second place, and second actuator can move in response to second control signal between the 3rd position and the 4th position.When first actuator was in primary importance, second actuator was selectively removable between the 3rd position and the 4th position.Yet when first actuator was in the second place, first actuator moved to the 4th position with second actuator.In certain embodiments more, equipment is connected to equipment or FLOW CONTROL equipment, for example valve that is actuated.Like this, can come control flows to cross the fluid of equipment by the position that first actuator is moved to wherein second actuator opening and closing freely equipment.In addition, can control the fluid that flows through equipment by moving first actuator in the mode of impelling second actuator opening and closing equipment.
Another inventive concept that discloses in application relates to be provided predetermined and ouput force time correlation.In one embodiment, in first operating mode, the ouput force of first amount can provide by equipment.In second operating mode, can provide and offset motivator to reduce ouput force to second level.After the predetermined time, offsetting motivator can remove.In embodiment more specifically, the decompression fully that pressure-actuated actuator provides motivator and equipment to prevent actuator during a pattern, but in another pattern, allow from actuator release pressure lentamente.
Another inventive concept that discloses in application relates to the ouput force that first level is provided when with first cycle frequency operation equipment, and the ouput force of second level is provided when with second cycle frequency operation equipment.In one embodiment, equipment provides or has allowed lower ouput force at the upper frequency circulation time, and the higher ouput force at the lower frequency circulation time is provided.
When having considered following description and subsidiary claims in conjunction with the accompanying drawings, select the advantage and the benefit in a step will become obvious for persons skilled in the art.
Description of drawings
In being incorporated in specification and as an illustration illustrate embodiments of the invention in the accompanying drawing of the part of book, this embodiment and the above general description of the present invention that provides and the following detailed description that provides are used from the illustration embodiments of the invention.
Fig. 1 is schematically showing of first exemplary embodiments;
Fig. 2 is schematically showing of second exemplary embodiments;
Fig. 3 is the cross sectional view of the 3rd exemplary embodiments;
Fig. 3 A is the embodiment's of Fig. 3 the cross sectional view of alternate embodiment of Sealing;
Fig. 4 is that embodiment among Fig. 3 is in the cross sectional view of first closed position;
Fig. 5 is that embodiment among Fig. 3 is in the cross sectional view of second closed position;
Fig. 6 is schematically showing of the 4th exemplary embodiments;
Fig. 7 is schematically showing of the 5th exemplary embodiments; With
Fig. 8 is schematically showing of the 6th exemplary embodiments.
Embodiment
Though exemplary embodiments described here is described in the context of the equipment that comprises actuator that is connected to normally closed valve or the actuator of being actuated by biasing member and hydrodynamic pressure, but persons skilled in the art will readily appreciate that the present invention can construct by other modes.For example, equipment can be configured to use the actuator that separates that is connected to the equipment that is actuated or have and the equipment that is actuated is integrated actuates function.Further, equipment can be configured to comprise different actuators, hydraulic actuator for example, the different equipments that is actuated, for example normally open valve or the equipment different with valve.These examples and disclosed exemplary embodiments be intended to illustrate of the present invention use widely and be not intended to limitation of the present invention is provided.
Though the aspect of multiple invention of the present invention, design and feature can and be illustrated as with reference to exemplary embodiments in this description and implement, these multiple aspects, design and feature can be individually or are used in many alternate embodiments with multiple combination and sub-portfolio.Unless clearly in this eliminating, all these combinations and sub-portfolio are intended within the scope of the invention.Again further, though this can describe about of the present invention multiple aspect, the multiple alternate embodiment of design and feature, for example substitution material, structure, structure, method, loop, equipment and parts, software, hardware, control logic, about the substitute of form, cooperation and function etc., but such description to be not intended to be known at present or the complete or detailed tabulation of the obtainable alternate embodiment of development subsequently.Persons skilled in the art can be easily in additional embodiment, take of the present invention aspect, design or feature one or more, even and such embodiment disclose ambiguously also at this and use within the scope of the invention.In addition, even features more of the present invention, design or aspect can be described as preferred equipment or method at this, such description is not intended to the feature that suggestion requires or need be such, unless statement clearly.Again further, can comprise typical or representational value and scope helping understanding this disclosure, yet such value and scope are not interpreted as restrictive, sense and only are intended to and be only key value or scope at narrative tense clearly.In addition, though multiple aspect, feature and design can be identified as invention part of the present invention clearly or form part at this, but it is exclusive that such identification is not meant to, but can have inventive aspect fully described here, design and feature, and being identified as the so specific invention or the part of specific invention ambiguously, the present invention illustrates in subsidiary claims as an alternative.The description of typical method or process is not restricted to and comprises as the institute that requires in all situations in steps, and is that the order that step proposes also is not interpreted as requirement or need, unless so statement clearly.
Indicated direction and directed term, for example top, bottom, top, bottom, above and below are explained conveniently when this only is used for reference to the accompanying drawings, and are not intended to form structure or use and limit or with reference to the present invention.
With reference to figure 1, usually equipment 1 can comprise actuator 2, and actuator can selectively provide or allow first output, 6 and second output 8 in response to control function 4.If valve is connected to actuator 1 or integrates with actuator 1, then exporting 6 and 8 for example can be the motivator of different amounts or the power of closing of different amounts.
According to an inventive aspect, can provide higher motivator being used for the low leakage of passing through valve in the valve down periods that prolong, and can during higher frequency actuation, provide lower motivator to generate and the long valve life-span with the component wear that is used for the speed of actuating faster, reduction, lower particulate.In a pattern, can improve the process of benefiting from two patterns at the equipment of actuating and in second pattern, can under higher motivator, provide the low leakage of passing through valve that upper frequency is provided under the lower motivator.
The example that can benefit from the process of two patterns is ALD.During high frequency actuation, the ALD process can be than typically allow higher levels of leakage by valve during system maintenance or when process is in the standby mode of wherein wishing the low leakage of passing through valve.Therefore, can provide the improved solution that is used for ALD and other application at the equipment that provides the low leakage of passing through valve to combine under the higher motivator with high frequency actuation performance under lower motivator.Yet ALD only is the specific example that can benefit from the process of disclosed equipment.One of ordinary skill in the art will appreciate that at this disclosed equipment and can use in many other application and process.
Fig. 2 illustrates schematically showing according to the exemplary embodiments of the equipment of principle of the present invention.Equipment can be implemented as the actuator 10 with higher force actuator assembly 12 and low force actuator assembly 14.Higher force actuator assembly 12 can comprise the housing 16 that defines compartment 18, is arranged in the piston assembly 20 in the compartment slidably and is arranged in the biasing element 22 of piston assembly 20 tops.Biasing element 22 can be spring or other suitable devices, with downward joint and offset piston 20.Seal element 24,26 can be provided, O type circle for example, with the district of the compartment 18 that is sealed in piston 20 belows, but to form first pressurized chamber 28.Fluid input 30 and fluid path 32 provide the path that is used for chamber 28 pressurizations.
Low force actuator assembly 14 can be connected to higher force actuator assembly 12.This embodiment illustrates the actuator assemblies 12,14 that is in linear structure; Yet this diagram is typical, and actuator assemblies can be constructed in many ways.Low force actuator assembly 14 comprises the housing 34 that defines compartment 36, is arranged in the piston 38 in the compartment and be arranged in the biasing element 40 of piston 38 belows slidably.The district of seal element 26,42 with the compartment 36 of packed-piston top can be provided, but to form second pressurized chamber 44.Fluid input 46 and fluid path 48 provide the path that is used for chamber 44 pressurizations.
Low force actuator assembly 14 can pass through suitable device, for example is connected to the equipment that is actuated by bonnet nut 52, for example valve or valve body 50.Valve body 50 comprises ingress port 52 and outlet port 54.The fluid that flows through valve 50 is by the water-tight equipment control that comprises sealing component 56 and valve seat 58.Sealing component 56 can be connected to the piston 38 in the low force actuator assembly 14 and be positioned at valve seat 58 tops, and valve seat 58 is positioned near ingress port 52.In this exemplary embodiments, sealing component 56 is sealing blocks.Yet, can use other sealing components, for example at the barrier film shown in the exemplary embodiments of Fig. 3 to Fig. 5.
Actuator 10 can be with two kinds of mode operations.In first kind of pattern, but first pressurized chambers 28 in the higher force actuator 12 can pressurize with mobile higher force actuator to primary importance, leave with than hanging down engaging of force actuator 14.But this allows low force actuator 14 to open and close valve 50 by second pressurized chamber 44 in the low force actuator that selectively pressurizes.Therefore, in typical embodiment, but the pressure signal in first and second pressurized chambers 28,44 can be separate, and low force actuator 14 circulates between third and fourth position to allow higher force actuator 12 to remain on primary importance.
In second pattern, but the pressure in first pressurized chamber 28 be removed, thereby allow biasing element 22 to impel higher force piston assembly 20 to the second place, this higher force piston assembly 20 engages low power piston assembly 38.Because the power that is applied by the biasing element 22 of higher force actuator assembly 12 has surpassed the power that the biasing element 40 by low force actuator assembly 14 applies, so higher force piston assembly 20 can be by low power piston assembly 38 work, selectively to open and close valve 50.Therefore, but but cyclical pressure signal to the first pressurized chamber 28 can be independent of valve 50 any pressure signal circulation to second pressurized chamber 44.Yet, but the motivator that the pressure in second pressurized chamber 44 can be used to provide additional is to valve 50.Illustrated equipment 10 is arranged so that valve 50 cuts out when low force actuator moves to the 4th position in Fig. 2.Yet equipment 10 and/or valve 50 can additionally be constructed, and valve is opened when the ouput force that receives from actuator 12,14.
Fig. 3 to Fig. 5 illustrates another exemplary embodiments.Actuator 100 usually is similar to the actuator 10 of Fig. 2, wherein it comprises the higher force actuator assembly 102 that is connected to low force actuator assembly 104, this low force actuator assembly 104 is connected to the equipment that is actuated, for example valve 106 or other FLOW CONTROL equipment.Though exemplary embodiments illustrates the actuator 100 that comprises two actuator assemblies 102,104, one of ordinary skill in the art will appreciate that and to add add-on assemble, for example the 3rd, the 4th assembly etc.
The U.S. Patent application No11/143 that is entitled as FLUID ACTUATOR that illustrated higher force actuator assembly 102 was submitted on June 1st, 2005 in the exemplary embodiments of Fig. 3 to Fig. 5 discloses in 411 in detail, and it is complete to be disclosed in this by with reference to fully merging.Therefore, higher force actuator assembly 102 will only usually be discussed at this.Higher force actuator assembly 102 can comprise lower shell body 108, upper shell 110 and cover 112.Upper shell 110 can be assembled with lower shell body 108, makes lower shell body and upper shell define lower compartment 114.Lid 112 can be assembled with upper shell 110, makes upper shell and lid define compartment 116.
Low force actuator assembly 104 for example is connected to higher force actuator assembly 102 by suitable manner by being threaded.Low force actuator assembly 104 comprises the housing 137 that forms piston compartment 138.Low force actuator piston 140 is movably disposed within the piston compartment 138.The biasing element 142 that can be implemented as spring is arranged in piston 140 belows, with piston to upper offset.
But the top 149 of low power piston assembly 140 has occupied a lot of volumes of pressurized chamber 141.This makes the pressure in the chamber 141 promptly set up, thereby causes hanging down when wishing actuating rapidly of power piston assembly 140.
Fig. 3 A is the alternate embodiment that is used for the Sealing of low power piston assembly 140.Sealing 144 in Fig. 3 is illustrated as O type circle.The spring energized Sealing of Sealing 144 in Fig. 3 A ' be illustrated as.As be known in the art spring energized Sealing 144 ' can comprise outer seal material 150, for example PTFE, elastomer, thermoplastic component or other polymer elements.Outer seal material 150 can be by metal spring, elastomer O type circle or other similar biasing arrangement 152 excitations.The Sealing different with O type circle or spring energized Sealing can be used for Sealing 144 '.For example, in the exemplary embodiments of Fig. 6, used bellows-type seal element.
Though actuator assemblies 102,104 and valve body 106 have been described and have been depicted as by bonnet nut and be linked together or assemble, any method that parts are interfixed is fine.This comprises directly and round-about way.For example, wherein each is fixed to the equipment that is positioned at the common elements between the actuator assemblies 102,104 and is fine with higher force actuator assembly 102 and low force actuator assembly 104.
The spring 122 of higher force actuator assembly 102 has applied power on higher force actuator piston assembly 124, this power is setovered assembly to its extreme lower position.Chamber 135,136 pressurizations of piston assembly 124 belows can be offset spring force.The biasing of pressure antagonistic spring 122 is setovered piston 124 to its uppermost position.But the fluid that is directed in the pressurized chamber 135,136 can be an air, but can be any fluid, comprises liquid.Low force actuator assembly 104 can move in a similar manner.Than hanging down in the force actuator assembly 104, spring 142 is positioned at and hangs down power piston 140 belows, and therefore piston assembly 140 is setovered to its uppermost position illustrated.Hydrodynamic pressure in the chamber 141 above low force actuator piston assembly 140 is setovered piston assembly to its lower position.
Be depicted as with reference to 3, two piston assemblys of figure 124,140 especially and be in its uppermost position.Higher force actuator piston assembly 124 is positioned at this position, because obeyed the bias force that is applied by spring 122 by chamber 135,136 pressurizations are applied to making every effort to overcome of assembly.Low force actuator piston 140 is in this position, because be applied to power on the piston assembly 140 greater than the power that is applied to by the hydrodynamic pressures in the chamber 141 on the assembly by spring 142, this chamber 141 can be depressurized.When actuator 10 was in position shown in Fig. 3, flow path 156 opens and fluid can flow through valve body 106.
With reference to figure 4, piston assembly 124,140 is depicted as and is in its lower position especially.Higher force actuator piston assembly 124 is in this position, but because the power that is applied by spring 122 is greater than being applied to the power of assembly by the hydrodynamic pressures in the pressurized chamber 135,136, but should can be depressurized pressurized chamber 135,136.Low force actuator piston assembly 140 is in this position because higher force actuator piston assembly 124 by spring 142 biasings to engage low force actuator assembly and it moved to its lower position.Therefore, the bias force that is applied by spring 122 has overcome the bias force that is applied by spring 142.If but the pressurized chamber 141 of low force actuator piston assembly 140 tops is pressurized, then the pressure in the chamber 141 will further impel low force actuator piston assembly 140 to its lower position.When dual mode actuator 100 was in position shown in Fig. 4, sealing component 160 moved to engaging with valve seat 162 and stopping by the mobile of valve body 106.Because higher force actuator 102 by low force actuator 104 or with its collaborative work to cause higher sealing force, so the sealing that causes between barrier film 160 and valve seat 162 can cause the low leakage of passing through valve.
With reference to figure 5, higher force actuator piston assembly 124 is in its uppermost position and low force actuator piston assembly 140 and is in its lower position.Higher force actuator piston assembly 124 does not hang down moving of force actuator piston 140 with the mobile phase mutual effect or the interference of low force actuator piston 140 when remaining on its uppermost position by the pressure in the chamber 135,136.Therefore, during pressurized and decompression, low force actuator piston assembly 140 can selectively engage and separate sealing component 160 and valve seat 162 when the chamber 141 of assembly top.Therefore, but 141 pressure that are applied to low force actuator piston assembly 140 move barrier film 160 into contact with valve seat 162 with higher force actuator 102 and have nothing to do from the pressurized chamber.The structure of the relatively low spring force of spring 142 and low power piston assembly 140 is convenient to the pressurized and moving assembly promptly when reducing pressure when the chamber 141 of low force actuator piston top.
In typical embodiment, chamber 141 can pressurized and decompression, makes for example opening and closing in roughly 20 milliseconds the command signal of being sent of valve.This allows dual mode actuator 100 as the high frequency actuator operation, and this allows dual mode actuator 100 to carry out ALD and similar process again.Because pressure is relatively low and pressure effect pneumatic piston area thereon is relatively little, so low sealing force takes place.Because circulation rapidly, valve member may experience the temperature of rising; Yet low sealing force has minimized damage and the distortion to the parts of for example sealing component 160 or valve seat 162, and this may prolong the working life of valve.In addition, low sealing force is more impossible causes because the particulate that causes of the wearing and tearing of the valve member of sealing component 160 and valve seat 162 for example.
When needs higher force seal part, higher force actuator piston assembly 124 can move to its lower position and engage sealing components 160 by low force actuator piston assembly 140, to form the higher force seal between sealing component 160 and the valve seat 162, this can produce the low leakage of passing through valve.Higher force actuation piston assembly 124 can move to its lower position by reducing or eliminating Pneumatic pressures in the chamber 135,136 of piston 118,120 belows.This allows spring 122 to move higher force actuation piston assembly 124 to cause the higher force seal between sealing component 160 and the valve seat 162.
Actuator be characterized as higher force and low power.For example but be not restricted to higher force actuator and can provide 50lbs roughly or higher power, and low force actuator can provide 50lbs roughly or lower power to valve seat to valve seat.In exemplary embodiments, higher force actuator provides roughly 701bs pressure to valve seat, and low force actuator provides roughly 20lbs pressure to valve seat.
As shown in Fig. 3 to Fig. 5, another feature of equipment is the normal or default position closes flow route 156 of dual mode actuator 100.If break down in air is supplied with, then the spring 122 of higher force actuator assembly 102 has applied the power that higher force actuator piston assembly 124 is moved to lower position, and this will seal or seal the flow path that passes through valve body 106.This has reduced because of the system failure makes undesirable possibility that flows through valve body 106.
Fig. 6 schematically illustrates another exemplary embodiments of the equipment that is embodied as dual mode actuator 170.The actuator 10 that actuator 170 is similar to Fig. 2 substantially is that actuator 170 comprises the higher force actuator 172 that is connected to low force actuator 174, and low force actuator 174 is connected to valve body 176.Low force actuator 174 comprises the piston assembly 178 that is arranged in slidably in the piston compartment 180.
Yet in this embodiment, seal element 42 (as shown in Figure 2) is embodied as bellows 182.Bellows 182 sealed piston assembly 178 tops compartment 180 the district and below the top of piston 178, extend.Though the main purpose of bellows 182 is districts of the compartment 180 of packed-piston 178 tops, bellows 182 is attached to piston, makes it work as piston and compresses when its uppermost position moves to its lower position.Bellows 182 typically has elastic characteristic, and this elastic characteristic impels bellows to turn back to its physical slot.These elastic characteristics have caused the power that makes progress on low force actuator piston assembly 178, it moves piston assembly to its uppermost position.Therefore, be similar to the barrier film 160 of Fig. 3 to Fig. 5, bellows 182 can cause faster the response time with open valve 176.In addition, bellows 182 can be by metal, and this makes it more be not easy to be subjected to damage or distortion because of the heat that generates during the high frequency actuation.
Though description that provides for these embodiments and diagram show water-tight equipment and comprise sealing block 56 and barrier film 160 as sealing component, any can open or the parts or the method for cut-off valve are thought of as the water-tight equipment that is used for scope of the present invention.In addition, equipment 10,100 and 170 has illustrated the moving of piston that had the gentle dynamic Control of spring.The method of these mobile pistons only is typical and does not limit the present invention in any way.The structure or the method for any mobile piston between the two positions merge at this.For example, but spring can substitute on piston, to apply power by other pressurized chamber.In another example, but spring can be positioned at the higher force actuator piston below and the pressurized chamber can be arranged in the piston top.Similarly, spring can be positioned at low force actuator piston top, but and the pressurized chamber can be arranged in the piston below.Further, apparatus embodiments 10,100,170 comprises the higher force actuator that has connected low force actuator linearly, with power linear transmission between actuator, and is delivered to the equipment that is actuated.Yet equipment can be configured to nonlinear way or non-linear transmission power, for example to comprise the mode of the power that rotatablely moves or transmitted.
Fig. 7 illustrates the schematic representation according to another exemplary embodiments of the equipment of principle of the present invention.In this embodiment, equipment 200 can comprise the actuator 202 that is connected to the equipment 204 that is actuated, to equip 204 in response to input 206 operations.The equipment 204 that is actuated can be normally closed membrane valve for example, is similar to the valve 106 among Fig. 3 to Fig. 5.Yet the equipment 204 that is actuated can be any equipment by actuator 202 operation, wherein wish with time correlation apply power, for example between the sealing component of valve and sealing force time correlation, or from actuator and motivator time correlation.Actuator 202 can for example be the double-piston actuator that is similar to the higher force actuator assembly 102 in Fig. 3 to Fig. 5.Yet actuator 202 can be any equipment that provides with the motivator of time correlation that can provide or be controlled as.
The pressure source of actuator 202, the equipment 204 that is actuated to provide the required pressure signal to move are provided with can be implemented as fluid in input 206.For example the switching of solenoid pilot valve equipment 208 in series is positioned between pressure source 206 and the actuator 202.Switching equipment 208 can switch between the primary importance 210 and the second place 212, in primary importance 210 pressure source 208 be placed as be communicated with actuator 202 fluids and in the second place 212 pressure source 206 be placed as with vent path 214 fluids with actuator 202 fluid breakdown and actuator and be communicated with.
For example have and preestablish or the pressure of the safety valve of the adjustable cracking pressure of user or safety check keeps equipment 216 to be included in the vent path 214.In equipment, also comprise and leaking or bypass path 218.In the exemplary embodiments of Fig. 7, pressure keep equipment 218 can comprise check valve design and leakage paths 218 can be included in safety check the sealing component place demarcation leakage or around the pipeline of safety check bypass, the two all makes pressure slowly to dissipate from actuator 202 is inboard.
Pressure keeps equipment 216 can have multiple structure and be positioned at multiple position.For example, pressure keeps equipment 216 can be incorporated into actuator 202, be incorporated into and switch equipment 218 or as switching between equipment 208 and the actuator 202, install at the parts that separate that switch equipment 208 backs or some other suitable positions.Among the typical embodiment, pressure keeps equipment 216 to be installed in the vent path 214 in Fig. 7, is switching equipment 208 downstreams.This embodiment has realized the result who wishes and has not needed other parts.
For typical embodiment among Fig. 7, be in operation, when switching equipment 208 was in primary importance 210, pressure source 206 was communicated with actuator 202 fluids.As a result of, the pressure signal from pressure source 206 allows actuator 202 to resist for example biasing open valve 204 of the biasing element of spring 220.When switching equipment 208 switched to the second place 212, pressure source no longer was communicated with actuator 202 fluids.As an alternative, actuator 202 is placed as with vent path 214 fluids and is communicated with, and makes can discharge by vent path from the pressure in the actuator of pressure signal.Pressure in the release actuator 202 allows valve 204 to be moved to closed position in the biasing of biasing element 220.Therefore, will switch equipment 208 moves between the primary importance 210 and the second place 212 and makes valve 204 circulate between enable possition and closed position respectively.In service at high cycle frequency, for example among the ALD, valve 204 circulates continually, for example 20 circulations of per minute.
At circulation time, the pressure in the vent path 214 keeps equipment 216 to limit from the amount of the pressure of actuator 202 releases.For example, roughly pressure and the pressure of 70psi keep equipment 216 to comprise the safety check of the cracking pressure that has about 30psi if pressure source 206 has been supplied with to actuator 202, then when switching equipment 208 moved to the second place 212, pressure kept equipment 216 to be exposed to the pressure of the roughly 70psi in the actuator 202.Pressure in the actuator 202 causes pressure to keep equipment 216 to open, thus the release of authorized pressure.Yet when pressure dropped to roughly 30psi, pressure kept equipment 216 to close, thereby prevented the release of any other pressure by equipment.As a result of, roughly the pressure of 30psi remains in the actuator 202.The opposing or offset from the biasing of biasing element or close some of power thereby the pressure that keeps in actuator 202 works makes whole sealing forces that sealing force on the sealing component of valve 204 can provide less than biasing element.Amount from the reality of the power of biasing member and actuator determined by the user, and can be for example cracking pressure by changing pressure holding valve 216 or the bias force of biasing element adjust and customize.
Therefore, when valve 204 Rapid Cycle (for example per second once circulates), sealing force relatively low (for example 20lbs).As a result of, the sealing force that provides between the sealing component has been provided the pressure that keeps in actuator 202, and this has reduced and high-speed actuation and the higher relevant possibility that Sealing destroys and particulate generates of sealing force, therefore prolongs the life-span of valve.
Even leakage paths 218 is constructed so that when pressure keeps equipment 216 and closes when preventing that pressure from passing through equipment and discharge that pressure also can discharge by leakage paths 218, although discharge with low-down speed.As a result of, the time durations of closed position is longer than in the expection of high cycle frequency run duration if valve 204 maintains, and for example 30 seconds, then the pressure that keep equipment 216 to remain in the actuator 202 by pressure will be by leakage paths 218 releases.The speed that pressure discharges can be based on the structure customization or the adjustment of leakage paths 218.For example, if leakage paths 218 is configured to be opened to the path of atmosphere, then the relative size in path can be determined rate of pressure release.
Therefore, equipment 200 pressure that allows pneumatic actuator 202 to discharge lentamente to be kept whole and feasiblely can apply whole bias forces with cut-off valve 204 and cause the Sealing that has the low leakage of passing through valve.In this way, equipment 200 provides the high integrality sealing, but does not use higher sealing force in high frequency cycle period.
Fig. 8 schematically illustrates another exemplary embodiments of equipment.In this embodiment, equipment 234, pressure source 236, switching equipment 238, pressure maintenance equipment 240 and vent path 242 that equipment 230 comprises actuator 232, is actuated, they can be similar to the described embodiment of Fig. 7 in design.Further, equipment 230 roughly is similar to equipment 200 operations of Fig. 7.Yet in this embodiment, pressure keeps equipment 240 to be positioned between switching equipment 238 and the actuator 232, and leakage paths 244 is illustrated as around pressure maintenance equipment 240 bypass.In addition, equipment can comprise that the pressure that prevents in the actuator 246 passes through the safety check 246 that safety check 246 discharges.Safety check 246 also can have and preestablishes or the adjustable cracking pressure of user, for example 5psi.
As in Fig. 7 and Fig. 8 by example diagram, the present invention can provide simultaneously by the power that provides or allow to apply motivator for example or close first amount of power or these power of allowing to apply different amounts provide two or more outputs.When initial conditions changed, the example of Fig. 7 and Fig. 8 provided the ouput force of a level, and after during a period of time after initial conditions changes, provided the ouput force of second level.
In the example of Fig. 7 and Fig. 8, change between the output and time correlation.In the example of Fig. 7 and Fig. 8, when equipment remains on the predetermined amount of time of the second place, applied different power.This for example circulation and in another operating mode when static in being equipped in an operating mode maybe can take place when equipping when moving in a pattern and moving in second pattern with second cycle frequency with first cycle frequency.
The present invention describes with reference to preferred embodiment.When reading and having understood this specification, will expect revising and changing.Be intended to the modification and the change that comprise that all are such, as long as they are in the scope of subsidiary claims or its equivalent.
Claims (40)
1. actuator device comprises:
First piston assembly movably between the primary importance and the second place; With
Second piston assembly movably between the 3rd position and the 4th position;
When the first piston assembly was in primary importance, second piston assembly was selectively removable between the 3rd position and the 4th position; And wherein when the first piston assembly moved to the second place, the first piston assembly moved to the 4th position with second piston assembly.
2. actuator device according to claim 1, further comprise first biasing member with first piston biasing to the second place and second biasing member with the biasing of second piston to the 3rd position.
3. actuator device according to claim 2, wherein the bias force of first biasing member is greater than the bias force of second biasing member.
4. actuator device according to claim 1, but comprise that further at least one is positioned at the pressurized chamber near the first piston assembly, when pressurizeing, the first piston assembly is setovered to primary importance.
5. actuator device according to claim 1, but comprise that further at least one is positioned at the pressurized chamber near second piston assembly, with when the pressurization with second piston assembly to the 4th location bias.
6. actuator device according to claim 1, wherein second piston assembly is suitable for cut-off valve when being in the 4th position.
7. actuator device comprises:
First actuator; With
Can be by second actuator of first actuator engagement;
Wherein second actuator can irrespectively provide the power of first amount with first actuator;
And the power of second amount wherein can selectively be provided by first actuator of second actuators acts, and the power of this second amount is greater than the power of first amount.
8. actuator assemblies according to claim 7, but further comprise at least one pressurized chamber, but wherein the pressurization of this at least one pressurized chamber is selectively provided the power of second amount.
9. valve assembly according to claim 7, wherein first actuator is included in the first piston compartment movably first piston assembly, selectively to engage and to break away from second piston assembly in second actuator.
10. valve assembly according to claim 9, wherein in first pattern, hydrodynamic pressure moves away the first piston assembly and the engaging of second piston assembly.
11. valve assembly according to claim 9 further comprises first biasing member that is arranged as near the first piston assembly, engages so that the first piston assembly is biased to second piston assembly.
12. valve assembly according to claim 11 further comprises second biasing member that is arranged as near second piston assembly, leaves and the engaging of sealing component so that second piston assembly is biased to.
13. valve assembly comprises:
First actuator comprises:
Define first housing parts of first compartment; With
Be arranged in the first piston assembly in first compartment slidably;
Can be by second actuator of first actuator engagement, second actuator comprises:
Be connected to second housing parts of first housing parts, second housing parts defines second compartment; With
Be arranged in second piston assembly in second compartment slidably;
With the valve body of second actuator assembling, valve body defines flow path; With
The sealing component that can engage with valve body is with seal flow path;
Wherein second actuator can irrespectively selectively apply the power of first amount to sealing component, with seal flow path with first actuator;
And wherein first actuator can selectively apply the power of second amount to sealing component, with seal flow path by second actuator.
14. valve assembly according to claim 13, wherein the first piston assembly is removable between the primary importance and the second place, and wherein first biasing member is arranged in first compartment, so that the first piston assembly is biased to the second place.
15. valve assembly according to claim 14, wherein the power of second amount is generated by first biasing member that the first piston assembly is biased to the second place.
16. valve assembly according to claim 13, wherein second piston assembly is removable between the 3rd position and the 4th position, and wherein second biasing member is arranged in second compartment, so that second piston assembly is biased to the 3rd position.
17. valve assembly according to claim 13, but wherein by increasing the power that at least one hydrodynamic pressure that is positioned at the pressurized chamber of close first piston assembly reduces by second amount.
18. valve assembly according to claim 13, but wherein increase the power of first amount by increasing at least one hydrodynamic pressure that is positioned at the pressurized chamber of close second piston assembly.
19. valve assembly according to claim 13, wherein sealing component is a barrier film.
20. valve assembly according to claim 13, wherein the power of second amount is greater than the power of first amount.
21. the method for a control valve comprises:
Use the motivator of first amount to come cut-off valve, flow with the fluid of control by valve; With
Use the motivator of second amount valve to be kept in the closed position;
Wherein the motivator of first amount is greater than the motivator of second amount.
22. method according to claim 21, wherein the power of first amount is used for circulating valve between enable possition and closed position.
23. method according to claim 22, wherein the first actuator movable member can make valve be less than circulation in about 20 milliseconds between enable possition and the closed position.
24. a method that is used for providing from actuator ouput force comprises:
The first removable actuator member is moved to leaving and the engaging of the second removable actuator member;
The second removable actuator member is independent of the first removable actuator member moves, so that the power of first amount to be provided; With
The first removable actuator member is moved to engaging with the second removable actuator member, provide the power of second amount to move the first removable actuator member and the second removable actuator member.
25. method according to claim 23, wherein the power of first amount is less than the power of second amount.
26. method according to claim 23, wherein by the bias force of spring, the first actuator movable member moves to engaging with the second actuator movable member.
27. method according to claim 23, but wherein by the first actuator movable member is moved to leaving and the engaging of the second actuator movable member.
28. a method of controlling actuator comprises:
The ouput force of first amount is provided from actuator in response to first input signal; With
The ouput force of second amount is provided from actuator experienced predetermined time durations after receiving first input signal after.
29. method according to claim 28, wherein second ouput force of measuring from actuator surpasses first ouput force of measuring.
30. method according to claim 28, wherein input signal is that the hydrodynamic pressure that will supply to actuator is reduced to second amount from first amount.
31. method according to claim 28 wherein provides the ouput force of second amount to comprise that the amount with the pressure in the actuator is reduced to the 3rd amount from second amount from actuator after having experienced predetermined time durations.
32. method according to claim 31, wherein the 3rd amount is zero substantially.
33. the method for the equipment that an operating pressure is actuated comprises the steps:
With first the amount pressure feed to actuator, so that equipment is moved to primary importance;
Reduce amount to the second amount of pressure, so that equipment is moved to the second place; With
Pressure is reduced to the 3rd amount from second amount, will equips simultaneously and usually maintain the second place.
34. method according to claim 33, wherein the pressure of the 3rd amount is zero substantially.
35. method according to claim 33, the equipment of wherein actuating comprise valve and wherein primary importance close corresponding to valve corresponding to the opening of valves and the second place.
36. an equipment that is used to move the equipment of actuating comprises:
Be suitable for the pressure-actuated actuator of circuit between the primary importance and the second place;
The pressure that is used for keeping the amount of the pressure in the actuator when actuator is in the second place keeps equipment; With
Can be from the vent path that is kept equipping the actuator release pressure of keeping by pressure, actuator remains on the second place simultaneously.
37. equipment according to claim 36, wherein biasing element is setovered actuator to primary importance.
38. equipment according to claim 36, the equipment of wherein actuating is a valve, and primary importance is closed corresponding to valve corresponding to the opening of valves and the second place.
39. equipment according to claim 36, wherein pressure keeps equipment to comprise safety check.
40. an equipment that uses with high cycle frequency valve, system comprises:
Actuator;
Can be with the pressure source of actuator pressurization;
Can be from the vent path of actuator release pressure;
Be used for selectively actuator being placed the switching equipment that is communicated with pressure source and vent path fluid, so that actuator moves between the primary importance and the second place;
Be used to limit from the pressure of actuator and keep equipping by the amount of the pressure of vent path release; With
Be used for leakage paths by the pressure that keeps in the pressure maintenance equipment release actuator.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US69888905P | 2005-07-13 | 2005-07-13 | |
| US60/698,889 | 2005-07-13 | ||
| US60/750,452 | 2005-12-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101263329A true CN101263329A (en) | 2008-09-10 |
Family
ID=39962983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2006800336868A Pending CN101263329A (en) | 2005-07-13 | 2006-07-12 | Method and arrangement for actuation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101263329A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2530796A (en) * | 2014-10-03 | 2016-04-06 | Sev Glocon Ltd | Actuator arrangement |
-
2006
- 2006-07-12 CN CNA2006800336868A patent/CN101263329A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2530796A (en) * | 2014-10-03 | 2016-04-06 | Sev Glocon Ltd | Actuator arrangement |
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Open date: 20080910 |