CN101258392A - 无源混合lc/saw/baw无线传感器 - Google Patents
无源混合lc/saw/baw无线传感器 Download PDFInfo
- Publication number
- CN101258392A CN101258392A CNA2006800327642A CN200680032764A CN101258392A CN 101258392 A CN101258392 A CN 101258392A CN A2006800327642 A CNA2006800327642 A CN A2006800327642A CN 200680032764 A CN200680032764 A CN 200680032764A CN 101258392 A CN101258392 A CN 101258392A
- Authority
- CN
- China
- Prior art keywords
- fundamental frequency
- sensor
- acoustic wave
- wave device
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007613 environmental effect Effects 0.000 claims abstract description 12
- 230000008859 change Effects 0.000 claims abstract description 11
- 239000000126 substance Substances 0.000 claims abstract description 9
- 230000006698 induction Effects 0.000 claims description 17
- 239000003990 capacitor Substances 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 9
- 230000004044 response Effects 0.000 claims description 7
- 238000010897 surface acoustic wave method Methods 0.000 claims description 7
- 230000001939 inductive effect Effects 0.000 abstract description 12
- 230000008878 coupling Effects 0.000 abstract description 7
- 238000010168 coupling process Methods 0.000 abstract description 7
- 238000005859 coupling reaction Methods 0.000 abstract description 7
- 238000005259 measurement Methods 0.000 abstract description 5
- 239000000758 substrate Substances 0.000 description 10
- 230000005540 biological transmission Effects 0.000 description 3
- 230000000644 propagated effect Effects 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 208000035126 Facies Diseases 0.000 description 1
- 240000004859 Gamochaeta purpurea Species 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/22—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of acoustic effects
- G01K11/26—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of acoustic effects of resonant frequencies
- G01K11/265—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of acoustic effects of resonant frequencies using surface acoustic wave [SAW]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
- G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/36—Detecting the response signal, e.g. electronic circuits specially adapted therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0255—(Bio)chemical reactions, e.g. on biosensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02881—Temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0426—Bulk waves, e.g. quartz crystal microbalance, torsional waves
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Analytical Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measuring Fluid Pressure (AREA)
- Arrangements For Transmission Of Measured Signals (AREA)
Abstract
当询问信号与传感器感应耦合时,可以在无源传感器中使用声波器件。感应耦合的优点在于询问信号能够为所述传感器提供功率。声波器件可对诸如压力、温度、或化学物质的环境因素敏感。环境因素能够引起声波器件的变化,导致传感器基频的改变。包含栅陷式振荡器的询问电路能产生询问信号,检测传感器的基频,并由此产生对环境因素的测量。
Description
技术领域
实施例涉及感测电路领域。实施例还涉及表面声波器件以及体声波传感器。实施例另外涉及利用声波器件改变感应耦合负载的频率。
背景技术
声波器件经常在压电基板上具有一个或两个换能器。换能器能够将电输入信号转换为声信号。当声信号通过或沿着基板传播时,那么声波器件能改变它。换能器也能将声信号转换为电信号。因为声波器件可以为非常良好的且廉价的信号滤波器,所以声波器件的一普遍用途为调节或滤波信号,例如,滤波移动电话接收到的电信号。
声波器件也用作传感器。传感器的压电基板能敏感于环境条件。它能随着温度扩张或收缩。压力能使它挠曲。一些化学传感器是基于声波器件的以致于暴露于诸如水或酒精等化学物质就会引入质量负载效应于传感器。声波器件的基板的应力或挠曲能够改变其声学特性。声学特性的改变能够影响在换能器处变成电信号的声信号。如此,声波器件已经被用于测量温度、压力、化学物质密度、和其他环境特性。
一类声波器件为表面声波器件(SAW),其中,声波沿着基板表面传播。普通类型的SAW具有输入换能器,输出换能器,以及基板。电信号进入输入换能器,变成声信号,并通过基板表面传到输出换能器。然后输出换能器转换该声信号为输出电信号。
另一类声波器件为体声波器件(BAW),其中,声波通过基板传播。BAW器件能用于与SAW和其他声波器件的应用类似的用途。当用作传感器时,BAW具有比SAW更高的有效灵敏度,更高的分辨率,易于在液体应用中使用,和更大的动态范围。但是,SAW一般具有较大的带宽。而且,SAW能经常接收诸如无线电波的电磁信号,直接进入到输入换能器。通常,其更容易将信号从SAW输入或输出。
传感器不能方便地使用,除非还采用询问电路。询问电路是一种产生传递给传感器的询问信号的电路。然后传感器返回响应信号或者以某种方式影响询问信号。例如,电子温度计能接受包含电源和地的询问信号,而返回与温度成比例的电压作为响应信号。作为选择,改变其电阻的材料能用作温度传感器。询问信号可以是电源和地电压,而流过所述材料的电流为响应信号。
询问信号能以许多方式传递给传感器。一种方式是采用电连接,其中,导线把询问信号从询问电路传递给传感器,并返回给询问电路。第二种方式是无线电传输。询问信号作为无线电信号从询问电路传输给传感器,然后其传输响应回去。一些传感器连续传输没有被询问的无线电信号。第三种方式是感应耦合。询问信号被传递通过感应耦合到连接于传感器或其部分的第二电感器的第一电感器。感应耦合优于无线电传输的地方在于询问电路能提供功率给传感器。如此,传感器可以为无源的,不具有功率直到询问电路供给功率为止。
图1,为现有技术,示出了感应耦合到传感器102的询问电路101。询问电路将询问信号传递通过第一电感器103,从第一电感器其感应耦合到第二电感器104。传感器102和第二电感器104作为询问电路101的感应负载出现。
图2,为现有技术,示出了感应耦合询问电路101。函数发生器201通过使电压斜坡反复重复来产生信号。电子或信号领域的技术人员经常称此为锯齿信号。锯齿信号传递给压控振荡器202(VCO)。VCO产生具有依赖于电压输入的频率的信号。锯齿信号引起VCO202产生询问信号,其重复扫过一频率范围。询问信号传递给电感器103,栅陷振荡器(GDO)203,和锁相环(PLL)204。电感器103能感应耦合询问信号到感应负载(未示出)。
询问信号耦合到感应负载的效率依赖于感应负载和询问信号频率。含有感应负载的多个电路具有基频。当询问信号频率与基频相匹配时,耦合最大化。当询问信号扫过频率范围时,GDO203能检测出基频,因为电感器103两端的电压在感应负载的基频处下降到最小值。GDO203以基频发信号给PLL204。PLL204是可以锁定到源信号并追随源信号的振荡器。如此,PLL204锁定和追随询问信号。但是,当GDO203发信号时,PLL204可能停止追随询问信号并且继续以感应负载的基频产生锁定信号。锁定信号传递给频率计数器205。频率计数器205提供感应负载的基频读数。如果感应负载为基于诸如压力的环境因素来改变其基频的传感器,那么该基频也是环境因素的量度。
图2示出的系统示出了可以测量感应负载的基频的询问电路。美国专利3,092,806和美国专利3,906,340公开了类似的询问电路。美国专利3,092,806和美国专利3,906,340在此被并入作为参考。
现有技术提供了基于环境因素来改变它们的基频的传感器。但是,这些传感器往往比基于声波的传感器更大,更复杂,更不准确,以及更不精确。然而,基于声波的传感器还没有被作为具有与它们的环境相关联的基频的可变感应负载使用。
实施例的各方面通过提供方法和系统直接解决了现有技术的缺点,其中,声波传感器能与询问电路感应耦合,并且由此,通过询问传感器看到的感应负载具有可以基于诸如温度、压力或化学物质密度的环境条件改变的基频。
发明内容
因此,实施例的一个方面在于将传感器感应耦合到询问电路。该传感器包括声波器件,例如表面声波器件或体声波器件。该传感器还可以包括参与感应耦合的电感器。该传感器还可以包括可以用于调节传感器基频的微调电容器。询问电路包括栅陷振荡器,用于检测何时询问信号的频率与传感器的基频相匹配。
实施例的另一方面在于,传感器的基频响应于传感器的环境而改变。例如,传感器所暴露的温度或压力的变化可以改变传感器的基频。传感器环境中的化学物质,例如酒精或水,也可以引起传感器基频的改变。如此,传感器的基频的测量也是传感器环境的测量。例如,测量的基频可以指示传感器的温度。询问电路可以测量传感器的基频并由此也测量传感器的环境。
实施例的另一方面在于,产生扫描包含传感器基频的频率范围的询问信号,并且将询问信号感应耦合到传感器。观测感应耦合效率,其在栅陷振荡器的情况下是可以的,可以揭示传感器的基频,由此产生传感器环境的测量。该传感器包括声波器件,诸如,表面声波器件或体声波器件。
附图说明
附图中类似的附图标记在通篇各个视图中指示相同或功能相似的元件,并且所述附图结合在说明书中并且形成其一部分,所述附图进一步示出了实施例以及与详述一起用于解释本发明所公开的实施例。
图1为现有技术,描述了根据实施例的一个方面的感应耦合于传感器的询问电路;
图2为现有技术,描述了根据实施例的一个方面的感应耦合询问电路;
图3描述了根据实施例的一个方面电连接于微调电容器的SAW传感器;
图4描述了根据实施例的一个方面电连接于微调电容器的BAW传感器;以及
图5描述了根据实施例的各方面由感应耦合的询问信号读取传感器测量的高级流程图。
具体实施方式
在这些非限制性实例中所讨论的特定值和配置可以被改变,并且仅被引用用于示出至少一个实施例,而不是意图限制本发明的范围。
图3描述了根据实施例的一个方面的电连接于微调电容器302的表面声波(SAW)器件301。SAW器件301具有附着于基板305的第一换能器303和第二换能器304。该SAW器件301被示为并联电连接于微调电容器302。SAW器件301和微调电容器302也可以并联电连接于电感器(未示出)。微调电容器302可以用于调节包含微调电容器302、SAW器件301和其他可能的器件的整个传感器单元的基频。
图4描述了根据实施例的一个方面的电连接于微调电容器302的体声波BAW器件401。BAW器件具有附着于基板402的第一换能器403和第二换能器404。该BAW器件401被示为并联电连接于微调电容器302。该BAW器件401和微调电容器302也可以并联电连接于电感器(未示出)。微调电容器302可以用于调节包含微调电容器302、BAW器件301和其他可能的器件的整个传感器单元的基频。
图5描述了根据实施例的各方面由感应耦合的询问信号读取传感器测量的高级流程图。在开始501后,询问信号产生502。用于产生询问信号的方法和系统是电子或信号领域的技术人员公知的。上文已讨论了基于使用函数发生器产生锯齿信号并将该锯齿信号供给压控振荡器。询问信号于是感应耦合到感测电路503。然后感测电路的基频被观测504并且在过程结束506前被用于产生传感器读数505。
要理解的是,可以按照需要将上面公开的以及其他的特征和功能的变型,或者其替换形式组合到多种其他不同的系统或应用中。也可以随后由本领域的技术人员作出在这里目前无法预料的或不曾预料到的多种替换、修改、变化或改进,其也将包含在所附的权利要求中。
Claims (15)
1、一种包括与包括表面声波器件的传感器感应耦合的询问电路的系统,其中,所述传感器具有响应于诸如温度、压力、或化学物质的环境因素而变化的基频,并且其中,所述询问电路包括测量所述基频的栅陷振荡器。
2、权利要求1所述的系统,并且所述传感器进一步包括电感器。
3、权利要求2所述的系统,并且所述传感器进一步包括微调电容器。
4、权利要求1所述的系统,并且所述传感器进一步包括微调电容器。
5、权利要求1所述的系统,其中所述声波器件对压力变化有反应,并由此改变所述基频。
6、一种包含与包括体声波器件的传感器感应耦合的询问电路的系统,其中,所述传感器具有响应于诸如温度、压力、或化学物质的环境因素而变化的基频,并且其中所述询问电路包括测量所述基频的栅陷振荡器。
7、权利要求6所述的系统,其中所述声波器件对压力变化有反应,并由此改变所述基频。
8、权利要求6所述的系统,其中所述声波器件对温度变化有反应,并由此改变所述基频。
9、权利要求6所述的系统,其中所述声波器件对至少一种化学物质有反应,并由此改变所述基频。
15、一种方法,包括:
产生扫描过频率范围的询问信号;
将所述询问信号感应耦合到包括声波器件的感测电路;
观测基频,所述基频是询问信号最大地耦合到感测电路所处于的频率;以及
由所述基频产生传感器读数。
16、权利要求15所述的方法,其中所述声波器件为表面声波器件。
17、权利要求15所述的方法,其中所述声波器件为体声波器件。
18、权利要求15所述的方法,进一步包括通过微调电容器调节所述基频。
19、权利要求15所述的方法,进一步包括将所述感测电路暴露于变化的温度使得所述基频变化并且所述传感器读数为温度测量。
20、权利要求15所述的方法,进一步包括将所述感测电路暴露于变化的压力使得所述基频变化并且所述传感器读数为压力测量。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/223,375 US20070051176A1 (en) | 2005-09-08 | 2005-09-08 | Passive hybrid lc/SAW/BAW wireless sensor |
US11/223,375 | 2005-09-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN101258392A true CN101258392A (zh) | 2008-09-03 |
Family
ID=37440227
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA2006800327642A Pending CN101258392A (zh) | 2005-09-08 | 2006-09-05 | 无源混合lc/saw/baw无线传感器 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20070051176A1 (zh) |
CN (1) | CN101258392A (zh) |
WO (1) | WO2007030440A1 (zh) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7434989B2 (en) * | 2005-09-07 | 2008-10-14 | Applied Sensor Research & Development Corporation | SAW temperature sensor and system |
US20070057772A1 (en) * | 2005-09-09 | 2007-03-15 | Honeywell International Inc. | Hybrid SAW/BAW sensor |
US20080001685A1 (en) * | 2006-01-18 | 2008-01-03 | Honeywell International Inc. | Acoustic wave sensor system |
US20090056452A1 (en) * | 2006-01-18 | 2009-03-05 | Honeywell International Inc. | Acoustic wave sensor system |
US20080129143A1 (en) * | 2006-12-05 | 2008-06-05 | Honeywell International Inc. | Trimming element and sensor on a single chip |
US8089031B2 (en) * | 2007-02-27 | 2012-01-03 | Tokyo Electron Limited | Heating apparatus for heating objects to be heated, heating method for heating the objects to be heated, and storage medium in which computer-readable program is stored |
DE102008040820A1 (de) * | 2008-03-12 | 2009-09-17 | Robert Bosch Gmbh | Druckmessvorrichtung und Verfahren zum Messen eines Drucks |
JP5217663B2 (ja) * | 2008-06-11 | 2013-06-19 | 東京エレクトロン株式会社 | 被処理体の熱処理装置及び熱処理方法 |
US7919909B2 (en) * | 2009-04-24 | 2011-04-05 | Delaware Capital Formation, Inc. | Integrated coupling structures |
JP5702792B2 (ja) * | 2009-10-21 | 2015-04-15 | コーニンクレッカ フィリップス エヌ ヴェ | 流体の速度を測定するためのセンサシステム |
NZ610140A (en) * | 2010-10-05 | 2015-11-27 | Anpac System Science Shanghai Co Ltd | Micro-devices for disease detection |
DE102010054825A1 (de) * | 2010-12-16 | 2012-06-21 | Deutz Ag | Kolbentemperaturmessung mit Hilfe von SAW-Sensoren |
CA2831223C (en) | 2011-03-24 | 2019-04-02 | Anpac Bio-Medical Science (Lishui) Co., Ltd. | Micro-devices for disease detection |
CN102353473A (zh) * | 2011-06-23 | 2012-02-15 | 成都赛康信息技术有限责任公司 | 基于声表面波的无线传感器网络远程温度在线监测系统 |
CN102853934B (zh) * | 2012-07-27 | 2015-04-15 | 上海赛赫信息科技有限公司 | 无线温度湿度传感器及系统和测量方法 |
CN107421654B (zh) * | 2017-03-27 | 2019-12-20 | 中北大学 | 超高温无源薄膜温度传感器及其制作方法 |
US11509285B2 (en) | 2018-11-05 | 2022-11-22 | X-wave Innovations, Inc. | Wireless sensor system for harsh environment |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3424238A (en) * | 1967-05-08 | 1969-01-28 | Ritter Pfaudler Corp | Glassed heat exchanger construction |
US3978731A (en) * | 1974-02-25 | 1976-09-07 | United Technologies Corporation | Surface acoustic wave transducer |
US4127110A (en) * | 1976-05-24 | 1978-11-28 | Huntington Institute Of Applied Medical Research | Implantable pressure transducer |
US4586382A (en) * | 1982-09-29 | 1986-05-06 | Schlumberger Technology Corporation | Surface acoustic wave sensors |
US4512198A (en) * | 1982-09-29 | 1985-04-23 | Schlumberger Technology Corporation | Surface acoustic wave sensors |
US4622854A (en) * | 1984-12-31 | 1986-11-18 | Schlumberger Technology Corporation | Rounded wall surface acoustic wave sensors |
US4622855A (en) * | 1984-12-31 | 1986-11-18 | Schlumberger Technology Corporation | Low thermal response time surface acoustic wave sensors |
US4703327A (en) * | 1985-10-31 | 1987-10-27 | X-Cyte, Inc. | Interrogator/receiver system for use with a remote transponder |
GB2195183B (en) * | 1986-09-12 | 1990-03-14 | Ford Motor Co | Torque measurement transducer |
US4895017A (en) * | 1989-01-23 | 1990-01-23 | The Boeing Company | Apparatus and method for early detection and identification of dilute chemical vapors |
GB9004822D0 (en) * | 1990-03-03 | 1990-04-25 | Lonsdale Anthony | Method and apparatus for measuring torque |
US5488866A (en) * | 1994-04-11 | 1996-02-06 | Tektronix, Inc. | Time-interleaved method for efficient operation of an acoustic wave sensor array |
US5821425A (en) * | 1996-09-30 | 1998-10-13 | The United States Of America As Represented By The Secretary Of The Army | Remote sensing of structural integrity using a surface acoustic wave sensor |
EP1026492A3 (de) * | 1999-02-01 | 2000-09-06 | Baumer Electric Ag | Drahtlose Drehmoment-Messeinrichtung und Sensor für dieselbe |
US7271720B2 (en) * | 2002-11-18 | 2007-09-18 | Joseph Tabe | Homeland intelligent systems technology “H-LIST” |
US6424081B1 (en) * | 2000-05-03 | 2002-07-23 | Crystal Photonics, Incorporated | Electronic device including langasite structure compounds and method for making same |
US20020021193A1 (en) * | 2000-05-03 | 2002-02-21 | Crystal Photonics, Incorporated | Electronic filter including langasite structure compound and method for making same |
US6455986B2 (en) * | 2000-05-03 | 2002-09-24 | Crystal Photonics, Incorporated | Electronic device including langasite structure compound and method for making such devices |
US6609430B1 (en) * | 2000-05-09 | 2003-08-26 | Shrinivas G. Joshi | Low profile transducer for flow meters |
US6848295B2 (en) * | 2002-04-17 | 2005-02-01 | Wayne State University | Acoustic wave sensor apparatus, method and system using wide bandgap materials |
JP4049239B2 (ja) * | 2000-08-30 | 2008-02-20 | Tdk株式会社 | 表面弾性波素子を含む高周波モジュール部品の製造方法 |
AU2003240561A1 (en) * | 2002-06-06 | 2003-12-22 | Rutgers, The State University Of New Jersey | MULTIFUNCTIONAL BIOSENSOR BASED ON ZnO NANOSTRUCTURES |
-
2005
- 2005-09-08 US US11/223,375 patent/US20070051176A1/en not_active Abandoned
-
2006
- 2006-09-05 CN CNA2006800327642A patent/CN101258392A/zh active Pending
- 2006-09-05 WO PCT/US2006/034522 patent/WO2007030440A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2007030440A1 (en) | 2007-03-15 |
US20070051176A1 (en) | 2007-03-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101258392A (zh) | 无源混合lc/saw/baw无线传感器 | |
US6973838B2 (en) | Non-contacting crack sensor | |
JP4026849B2 (ja) | 無線問合せ可能な表面波テクノロジーセンサ | |
US9476975B2 (en) | Non-linear resonating sensor and a method | |
US7377168B2 (en) | Wireless sensor antenna configuration | |
US6664708B2 (en) | Method and device for non-contact detection of external electric or magnetic fields | |
CN101517382B (zh) | 用于确定和/或监控介质的过程变量的系统 | |
RU2479849C2 (ru) | Датчик физических параметров с устройством на акустических волнах | |
CN1854689B (zh) | 检测目标环境变量的装置和方法 | |
EP2379988B1 (en) | System and method for remote reading of resonant sensors | |
Viikari et al. | Intermodulation read-out principle for passive wireless sensors | |
US7236092B1 (en) | Passive sensor technology incorporating energy storage mechanism | |
US9214937B2 (en) | Inductive proximity sensor | |
JPH04230599A (ja) | 測定値検出および伝送装置 | |
Varadan et al. | Wireless passive IDT strain microsensor | |
CN102239397A (zh) | 用于使用磁性的压力测量的方法和装置 | |
US9222805B2 (en) | Circuit system and method for evaluating a sensor | |
CN101467034B (zh) | 液体中物质检测传感器 | |
CN101300483A (zh) | 混合saw/baw传感器 | |
EP3086116B1 (en) | Wireless saw moisture sensor | |
Viikari et al. | Wireless ferroelectric resonating sensor | |
US7812960B2 (en) | Optical ultrasound device | |
Aftab et al. | A parallel plate dielectric resonator as a wireless passive strain sensor | |
KR100847081B1 (ko) | 비접촉물성 측정장치 | |
CN102460969B (zh) | 具有可调整的滤波器频率的模拟滤波器 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20080903 |