CN101250022A - High-pure quartz tube vacuum packaging plant - Google Patents

High-pure quartz tube vacuum packaging plant Download PDF

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Publication number
CN101250022A
CN101250022A CNA2008100154288A CN200810015428A CN101250022A CN 101250022 A CN101250022 A CN 101250022A CN A2008100154288 A CNA2008100154288 A CN A2008100154288A CN 200810015428 A CN200810015428 A CN 200810015428A CN 101250022 A CN101250022 A CN 101250022A
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CN
China
Prior art keywords
spray gun
retaining plate
spray
guide tracks
shape support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CNA2008100154288A
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Chinese (zh)
Other versions
CN101250022B (en
Inventor
刘俊成
翟慎秋
沈涛
王友林
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Shandong University of Technology
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Shandong University of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shandong University of Technology filed Critical Shandong University of Technology
Priority to CN2008100154288A priority Critical patent/CN101250022B/en
Publication of CN101250022A publication Critical patent/CN101250022A/en
Application granted granted Critical
Publication of CN101250022B publication Critical patent/CN101250022B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The invention provides a vacuum sealing device of high purity quartz tubes, which comprises spray guns. The invention is characterized in that the vacuum sealing device comprises three spray guns, a case shape support bracket arranged at the opening of the upper end, a spray gun fixing board, pluralities of guide tracks, a tube bracket and a mounting bracket, wherein the guide tracks are in horizontal penetrative fixation on two opposite lateral walls of the case shape support bracket, the bottom of the mounting bracket is coated on the guide tracks located at the bottom, and the top of the mounting bracket is fixedly connected with the tube bracket via a screw sleeve, the spray gun fixing board is coated on the guide tracks and can slide along the guide tracks, the position of the spray gun fixing board at which is corresponding with the guide tracks is equipped with a locating screw nail, three spray guns are installed on the spray gun fixing board in radicalized, the spray heads are in regular triangle, and the center of the regular triangle is corresponding with an axial center which will be sealed connection with the quartz tube, through holes for installing the quartz tubes are disposed on two opposite lateral walls of the case shape support bracket fixed with the guide tracks and the spray fixing board, and electric phenolics are embedded in the through holes. The vacuum sealing device of high purity quartz tubes is simple and convenient in operation, uniform in heating and fast in sealing speed, thereby being adapted for vacuum sealing of quartz tubes with different length and different diameter.

Description

High-pure quartz tube vacuum packaging plant
Technical field
The present invention relates to the quartz ware manufacture field, specifically is a kind of crystal growth high-pure quartz tube vacuum packaging plant.
Background technology
One of main method of the preparation of semi-conductor (as tellurium zinc cadmium, Te-Cd-Hg) single crystal is the high-temperature fusant growth.Because growth conditionss such as growth temperature height, thermal conductivity are low, vapour pressure height, it is airtight that used crucible needs, and high temperature resistant, high pressure resistant.Purity quartz glass pipe for high is the ideal material of this crucible.But the softening temperature of purity quartz glass pipe for high is 1400 ~ 1500 ℃ or higher.High-quality crucible sintering is very difficult.Mostly existing silica tube sealed knot technology is single spray gun sintering, lacks isolated plant, relies on operator's experience to carry out sealed knot, inefficiency, and the reliability of sealing-in is also lower.Skilled manpower's cultivation length consuming time, expense height.The sealing-in of major diameter, thick-walled quartz glass tubes is difficult especially.
Summary of the invention
The purpose of this invention is to provide and a kind ofly can overcome above-mentioned defective, easy and simple to handlely be easy to grasp, reliability and sealing-in efficient height, also can be adapted to the high-pure quartz tube vacuum packaging plant of the silica tube of different lengths different diameter.Its technical scheme is:
Comprise spray gun, it is characterized in that: spray gun has three, sets up the open casing shape support in upper end, spray gun retaining plate, many guide rails, conduit saddle and carriages; Wherein many guide rail levels run through and are fixed on the casing shape support two side in opposite directions; The bottom of carriage is sleeved on the guide rail that is positioned at the below, fixedlys connected with conduit saddle by screw shell in its top; The spray gun retaining plate is sleeved on the many guide rails and can slides along guide rail, and its position corresponding to guide rail is provided with dog screw; Article three, spray gun is installed on the spray gun retaining plate radially, and its shower nozzle is equilateral triangle, and the center of equilateral triangle is corresponding to the axle center of desiring the sealing-in silica tube; Be fixed with on the casing shape support two side in opposite directions of guide rail and be equipped with the through hole that silica tube is installed on the spray gun retaining plate, inlay the bakelite circle in the through hole.
Described high-pure quartz tube vacuum packaging plant is provided with the fixedly fixedly pipe clamp of silica tube in the through hole of spray gun retaining plate and at the spray gun retaining plate away from a side of spray gun, is used to control the rotation of silica tube.
Described high-pure quartz tube vacuum packaging plant, the upper end of carriage are screw rod, and the conduit saddle that has screw rod by screw shell and below is connected, and rotational sleeve can be regulated the height of conduit saddle.
Described high-pure quartz tube vacuum packaging plant, spray gun is provided with holes and fixed-wing that be close to the spray gun retaining plate, the spray gun retaining plate is provided with corresponding to fixed-wing and makes positive triangle that three spray guns constitute, one group of fixed orifices of convergent-divergent in proportion, the spacing in adjacent fixed hole is 1 centimetre or several centimetres in every group of fixed orifices, to be adapted to the silica tube sealed knot of different diameter.
The present invention compared with prior art has the following advantages:
1, adopts the spray gun heating of three radial arrangements of equal angles, tube wall quick heating and evenly, improved sealed knot speed and reliability.The major-diameter thick-wall Glass tubing also can carry out effective sealed knot.
2, inlay the bakelite circle of different inner diameters in the through hole that silica tube is installed, the height of bracket axial location and conduit saddle is regulated the spray gun position, can realize the sealed knot to the silica tube of different diameter, different lengths.
3, adopt casing shape support, and be equipped with fixedly spray gun etc. of guide rail and spray gun retaining plate, it is artificial hand-held that spray gun need not, easy and simple to handle, is easy to grasp, reduced labour intensity.
Description of drawings
Fig. 1 is the structural representation of the embodiment of the invention;
Fig. 2 is an A-A sectional view embodiment illustrated in fig. 1.
Among the figure: 1, casing shape support 2, guide rail 3, bakelite circle 4, conduit saddle 5, spray gun 6, dog screw 7, fixed orifices 8, fixed-wing 9, vacuum suction interface 10, spray gun air-supply duct 11, rubber plug 12, fixedly pipe clamp 13, spray gun retaining plate 14, through hole 15, screw shell 16, carriage
Embodiment
In the embodiment shown in Fig. 1~2: casing shape support 1 upper end is uncovered, and four guide rails 2 run through by the bolt level and are fixed on casing shape support 1 two side in opposite directions, and the cross section of four guide rails 2 constitutes square; Spray gun retaining plate 13 is sleeved on four guide rails 2 and can slides along guide rail, and it is provided with dog screw 6 corresponding to the position that is positioned at guide rail 2; Article three, spray gun 5 is installed on the spray gun retaining plate 13 radially, and its shower nozzle is equilateral triangle, and the center of equilateral triangle is corresponding to the axle center of desiring the sealing-in silica tube; The bottom of carriage 16 is sleeved on two guide rails 2 that are positioned at the below and can slides along guide rail 2, and the upper end of carriage 16 is a screw rod, and the conduit saddle 4 that has screw rod by screw shell 15 and below is connected, and rotates the height that screw shell 15 can be regulated conduit saddle 4; Be fixed with on casing shape support 1 two side in opposite directions of guide rail 2 and be equipped with the through hole 14 that silica tube is installed on the spray gun retaining plate 13, inlay bakelite circle 3 in the through hole 14.Be provided with the fixedly fixedly pipe clamp 12 of silica tube at through hole 14 places of spray gun retaining plate 13 and at spray gun retaining plate 13 away from a side of spray gun 5.Spray gun 5 is provided with holes and fixed-wing 8 that be close to spray gun retaining plate 13, spray gun retaining plate 13 is provided with corresponding to fixed-wing 8 and makes positive triangle that three spray guns 5 constitute, one group of fixed orifices 7 of convergent-divergent in proportion, the spacing in adjacent fixed hole 7 is 1 centimetre in every group of fixed orifices 7, can regulate the size of the positive triangle of three spray guns, 5 formations like this, to adapt to the silica tube of different diameter.

Claims (4)

1, a kind of high-pure quartz tube vacuum packaging plant, comprise spray gun (5), it is characterized in that: spray gun (5) has three, set up upper end open casing shape support (1), spray gun retaining plate (13), many guide rails (2), conduit saddle (4) and carriage (16), wherein many guide rails (2) run through by the bolt level and are fixed on casing shape support (1) two side in opposite directions; Spray gun retaining plate (13) is sleeved on the many guide rails (2) and can slides along guide rail (2), and its position corresponding to guide rail (2) is provided with dog screw (6); Article three, spray gun (5) is installed on the spray gun retaining plate (13) radially, and its shower nozzle is equilateral triangle, and shower nozzle points to the center of equilateral triangle, that is desires the axle center of sealing-in silica tube; The bottom of carriage (16) is sleeved on the guide rail (2) that is positioned at the below, and its top screws is connected with conduit saddle (4) by screw shell (15); Be fixed with on casing shape support (1) two side in opposite directions of guide rail (2) and be equipped with the through hole (14) that silica tube is installed on the spray gun retaining plate (13), inlay bakelite circle (3) in the through hole (14).
2, high-pure quartz tube vacuum packaging plant as claimed in claim 1 is characterized in that: the upper end of carriage (16) is a screw rod, and the conduit saddle (4) that has screw rod by screw shell (15) and below is connected.
3, high-pure quartz tube vacuum packaging plant as claimed in claim 1, it is characterized in that: spray gun (5) is provided with fixed-wing with holes and that be close to spray gun retaining plate (13) (8), and spray gun retaining plate (13) is provided with corresponding to fixed-wing (8) and makes positive triangle that three spray guns (5) constitute, one group of fixed orifices (7) of convergent-divergent in proportion.
4, high-pure quartz tube vacuum packaging plant as claimed in claim 1 is characterized in that: be provided with the fixedly fixedly pipe clamp (12) of silica tube in the through hole of spray gun retaining plate (13) and at spray gun retaining plate (13) away from a side of spray gun (5).
CN2008100154288A 2008-03-20 2008-03-20 High-pure quartz tube vacuum packaging plant Expired - Fee Related CN101250022B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2008100154288A CN101250022B (en) 2008-03-20 2008-03-20 High-pure quartz tube vacuum packaging plant

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2008100154288A CN101250022B (en) 2008-03-20 2008-03-20 High-pure quartz tube vacuum packaging plant

Publications (2)

Publication Number Publication Date
CN101250022A true CN101250022A (en) 2008-08-27
CN101250022B CN101250022B (en) 2010-08-25

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Application Number Title Priority Date Filing Date
CN2008100154288A Expired - Fee Related CN101250022B (en) 2008-03-20 2008-03-20 High-pure quartz tube vacuum packaging plant

Country Status (1)

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CN (1) CN101250022B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102181922A (en) * 2011-03-16 2011-09-14 中国科学院上海技术物理研究所 Quartz container used for isothermal crystal vapor phase epitaxy process
CN106005597A (en) * 2016-07-05 2016-10-12 中国工程物理研究院核物理与化学研究所 Sealing and cutting device for frozen glass sample bottle
CN112830102A (en) * 2020-12-26 2021-05-25 云南农业大学 Tellurium-zinc-cadmium crystal material vacuum storage device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1086344A (en) * 1993-04-02 1994-05-04 广州灯泡厂 The quartz ampoule method for sealing of lamp courage in tungsten halogen lamp and the high-pressure mercury lamp
CN201195711Y (en) * 2008-03-20 2009-02-18 山东理工大学 High-purity quartz capsule vacuum enveloping apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102181922A (en) * 2011-03-16 2011-09-14 中国科学院上海技术物理研究所 Quartz container used for isothermal crystal vapor phase epitaxy process
CN102181922B (en) * 2011-03-16 2012-11-14 中国科学院上海技术物理研究所 Quartz container used for isothermal crystal vapor phase epitaxy process
CN106005597A (en) * 2016-07-05 2016-10-12 中国工程物理研究院核物理与化学研究所 Sealing and cutting device for frozen glass sample bottle
CN112830102A (en) * 2020-12-26 2021-05-25 云南农业大学 Tellurium-zinc-cadmium crystal material vacuum storage device

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Granted publication date: 20100825

Termination date: 20140320