CN101246203A - Amorphous alloy low-intensity magnetic field sensor - Google Patents

Amorphous alloy low-intensity magnetic field sensor Download PDF

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Publication number
CN101246203A
CN101246203A CNA2008100505655A CN200810050565A CN101246203A CN 101246203 A CN101246203 A CN 101246203A CN A2008100505655 A CNA2008100505655 A CN A2008100505655A CN 200810050565 A CN200810050565 A CN 200810050565A CN 101246203 A CN101246203 A CN 101246203A
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magnetic field
circuit
amorphous alloy
frequency
coil
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张涛
岳鑫隆
韩冰
黄东岩
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Jilin University
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Jilin University
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Abstract

The invention belongs to the field of weak magnetic field test technology, particularly relating to a kind of weak magnetic field sensor which is based on amorphous alloy. The invention is composed of probe, bistable oscillation circuit and frequency measure circuit, the probe is composed of magnetic field collecting loop 1 and 2 which are winded around the amorphous alloy bar, the loop 1 and 2 are reversely connected in series and used as an inductance part of bistable oscillation circuit; the oscillation signal whose frequency is relative to the loop 1, 2 inductance valve is produced in switch triode collector of the bistable oscillation circuit, magnetic field valve on amorphous alloy bar is measured by measuring frequency of oscillation signal with frequency measure circuit. The invention measures the magnetic field with the method for measuring oscillation frequency of bistable oscillation circuit, compared with the traditional method for measuring voltage, it has high measure precision and sensitivity, better anti-interference ability, which can be used for measuring magnetic field in every field of production and scientific research.

Description

Amorphous alloy low-intensity magnetic field sensor
Technical field
The invention belongs to the weak magnetic measurement technical field, be specifically related to a kind of low-intensity magnetic field sensor based on non-crystaline amorphous metal.
Background technology
Magnetic-field measurement is a major issue in each field of production scientific research, and a lot of new technology and new materials all is applied on the device of magnetic-field measurement now.The most frequently used magnetic field sensor has Hall (Hall) sensor, fluxgate sensor, and vibration or rotating coil etc., but in weak magnetic measurement, these sensors all have certain defective.The hall device output signal changes little, also has certain magnetic direction anisotropy when measuring magnetic field, is applicable to the medium-high magnetic field measurement; Fluxgate and magnetic test coil measuring magnetic field, the coiling of coil requires accurate especially, and higher to signal processing requirement; And the circuit too complex of the sensor, cost is higher.
The prior art close with the present invention is the article of the exercise question of publication on " Sensors and Actuators A 59 (1997) 1-8 " for " Rencent advances of micro magnetic sensors and sensingapplication ".Disclosed sensor is the formations such as bistable oscillation circuit, rectification circuit, amplifying circuit of inductance element by the CoFeSiB of annealing or the amorphous wire (band) of materials such as CoSiB or CoFeMoSiB or with the coil on this amorphous wire (band).
The multi-resonant oscillating circuit of background technology as shown in Figure 1.Power supply is the positive 5V of direct current among Fig. 1, and 1,2 is the coil that twines on amorphous ribbon, and 5,6 is repeating resistance, and 7,8 is coupling capacitance, and 9,10 is switch triode, and 11,12 is smoothing capacity, and 13,14 is pull-up resistor, and 15 is zero-regulator resistor.This circuit can by the measurement of a, b both end voltage amount (a, b mark among the figure) is measured-1Oe~+ low-intensity magnetic field in the 1Oe scope, so this circuit extensively is incorporated in scientific and technical literature and is applied in the magnetic-field measurement device.
Concrete working method is: during connection+5V power supply, because the parameter of each symmetric element (elements such as coil, triode, resistance, electric capacity) can not be equal fully in the multi-harmonic-oscillations bridge circuit, make switching tube 9,10 conducting simultaneously, if at first conducting of switching tube 9, and 10 remain offs, then one route+5V power supply is by coil 2, repeating resistance 6 and coupling capacitance 8, switching tube 9, form current path by pull-up resistor 13 to ground again, another road is then by coil 1, through switching tube 9 collectors, switching tube 9 emitters, pull-up resistor 13 is to ground.Coil current increases in time that (coil exists with the inductance form, so electric current thereon can not be undergone mutation, increase gradually in time when being the electric current on the coil of supply voltage loading back), the electric capacity 8 and the electric capacity 11 that link to each other with switching tube 9 base stages and emitter are recharged, when the magnetic core magnetic flux reaches capacity, switching tube 9 ends and switching tube 10 conductings, the electric capacity 8 and the electric capacity 11 that link to each other with switching tube 9 base stages and emitter discharge rapidly by the resistance that is in parallel with it, magnetic field energy in the coil 2 is also bled off, while coil 1 and the electric capacity 7 that links to each other with switching tube 10 base stages are recharged, when magnetic core oppositely reaches capacity, switching tube 10 ends again, and switching tube 9 begins conducting again, after this repeats said process, switching tube 9 and switching tube 10 alternate conduction with end, thereby form the vibration of certain frequency.
When externally-applied magnetic field, the amorphous soft magnet band is under the action of a magnetic field, its resistance value can produce bigger variation, and because this amorphous soft magnet band has served as the magnetic core that is wrapped in the coil on this band, the inductance value that is wrapped in the coil on this band like this will produce bigger change thereupon, thereby has caused the circuit oscillation frequency that bigger variation takes place.
Summary of the invention
The purpose of this invention is to provide a kind of amorphous alloy low-intensity magnetic field sensor, it can be good at solving-1Oe~+ problems of measurement of Weak magentic-field in the 1Oe scope, and traditional multi-harmonic-oscillations Magnetic Sensor is compared in the present invention and the background technology, carries out the magnetic-field measurement method by survey frequency and can obtain to have higher precision and sensitivity than the method for utilizing voltage to carry out magnetic-field measurement pointed in the background technology.
Amorphous alloy low-intensity magnetic field sensor of the present invention is made up of probe 48, bistable oscillation circuit 49, frequency measurement circuit 50, as Fig. 2, shown in Figure 3.
As a further improvement on the present invention, also be connected to the feedback circuit of forming by filtering circuit 33, differential amplifier circuit 34 and electric current and voltage conversion (V/I) circuit 35 at voltage output end Eout1, the Eout2 of bistable oscillation circuit 49, it is converted to dc current signal with the two-way voltage signal after filtering, differential amplification, as shown in Figure 5.
Fig. 2 is probe 48 structural representations, and field signal on AMORPHOUS ALLOY RIBBONS 4 is gathered coil 1,2 and tickler 3 is formed by being wrapped in for it, the tight side by side coiling of coil 1,2,3 and do not have superimposing thread; AMORPHOUS ALLOY RIBBONS 4 is both as the magnetic core of coil 1,2,3, while is as the sensing element of externally-applied magnetic field again, the A end is gathered the common port of coil 1,2 for field signal, the B end is the link of coil 2 with the bistable oscillation circuit 49 of back, the C end is the link of coil 1 with the bistable oscillation circuit 49 of back, the D end is the earth terminal of tickler 3, and the E end is that the feedback signal input end of tickler 3, this feedback signal are the dc current signals that is produced by feedback circuit.
The number of turn of gathering coil and tickler 1,2,3 is 150~500 circles, and band is made of the material that Co base or Fe base amorphous ribbon etc. has better soft magnet performance, is generally long 60mm~100mm, wide 1mm~3mm, thick 20 μ m~40.
The purpose of Zhi Zuoing is in order to keep two field signals to gather the symmetry of coil as much as possible like this, the tail end of coil 1 is received as public A end with the head end of coil 2, like this two field signals are gathered the form that coil 1,2 is connected into the series connection reversal connection, advantage is that useful signal is doubled, and useless interference offsets.
The power supply of probe 48 is the positive 5V of direct current, is loaded on the common port A of coil 1,2.For AMORPHOUS ALLOY RIBBONS 4, the AMORPHOUS ALLOY RIBBONS for materials such as Co base or Fe base are made requires it to have good soft magnetic characteristic, promptly requires its variation to external magnetic field very responsive.Probe 48 has two functions, one of them function has become to gather the variation of the inductance value of coil 1,2 for the change transitions with the external magnetic field signal, promptly when external magnetic field exists, owing to the resistance value that serves as the AMORPHOUS ALLOY RIBBONS 4 of gathering coil 1,2 magnetic cores can change along with the effect of external magnetic field, because AMORPHOUS ALLOY RIBBONS 4 has been served as the magnetic core that coil 1,2 twines, this changes with regard to the inductance value that has caused coil 1,2.Probe another function of 48 for by in the probe+the 5V power supply, gathering coil 1,2 through field signal be that bistable oscillation circuit 49 is powered.
As shown in Figure 3, be bistable oscillation circuit 49, itself and prior art shown in Figure 1 are similar, have just increased current-limiting resistance 16,17,18,19, and an end of current-limiting resistance 16,17 is connected respectively on two output terminal C, the B that gather coil 1,2.The other end of current-limiting resistance 16 is connected to the collector of switch triode 9, and is connected to the base stage of switch triode 10 after repeating resistance 5, coupling capacitance 7; The other end of current-limiting resistance 17 is connected to the collector of switch triode 10, and is connected to the base stage of switch triode 9 after repeating resistance 6, coupling capacitance 8.The emitter of switch triode 9 is by the smoothing capacity 11 and the pull-up resistor 13 back ground connection of current-limiting resistance 18, parallel connection, and the emitter of switch triode 10 is by the smoothing capacity 12 and the pull-up resistor 14 back ground connection of current-limiting resistance 19, parallel connection; At current-limiting resistance 18 and 19 access zero-regulator resistors 15, the adjustable side ground connection of zero-regulator resistor 15 has so just constituted a bistable state multi-harmonic-oscillations bridge circuit again.This circuit not only can produce the frequency stabilization vibration under the condition of two collection coil 1,2 inductance value constant (promptly not having externally-applied magnetic field) of serving as inductance, and because smoothing capacity 11, pull-up resistor 13 and smoothing capacity 12, pull-up resistor 14 have constituted the rectification circuit of two AC-DC respectively, so produce a direct current voltage output signal between Eout1 that can be in Fig. 3 and Eout2.
As shown in Figure 3, in the middle of frequency measurement circuit 50,36,37,38 is thirty system counter 74HC90,39 is applied single chip computer AT 89C2051 in measurement and data processing, and 40 is the demonstration outputs of data after single-chip microcomputer is handled, and 41,42 is the crystal oscillator electric capacity of arranging in pairs or groups with quartz crystal oscillator, 43 is quartz crystal oscillator, 44 is current-limiting resistance, and 45 is frequency divider CC4060, and 46,47 is with double D trigger CC4013.For realizing frequency measurement to higher frequency signals, utilize thirty system counter 74HC90 that the oscillator signal that bistable oscillation circuit 49 produces is carried out 1/10 continuous three times frequency division earlier, to reach purpose, realize accurate measurement to the output signal oscillation frequency of bistable oscillation circuit to oscillator signal 1/1000 frequency division.Afterwards the output terminal of last decade counter 38 is received the T0 end of single-chip microcomputer, utilized single-chip microcomputer to measure this frequency through the signal of 1/1000 frequency division.41,42,43,44,45 have constituted quartz oscillator and frequency divider, with 32768Hz crystal oscillation signal frequency split is the 2Hz signal, obtaining the duration through CC4013 double D trigger four frequency divisions again is that 1s, frequency are the time-base signal of 0.5Hz, this signal is sent into the INT0 end of single-chip microcomputer, controls the start and stop of T0 counter.Handling the frequency signal that collects by mcu programming afterwards, is standard with the calibration curve of being set up in the experiment, the anti-pairing magnetic field value of measured frequency values of looking into.By mcu programming the size of this magnetic field value is exported out by display part shown in Figure 3 again.
The coil 1 of series connection reversal connection, 2 inductive parts as bistable oscillation circuit 49, when externally-applied magnetic field is had an effect, because the effect of external magnetic field, the resistance value of AMORPHOUS ALLOY RIBBONS 4 can change along with the effect of external magnetic field in the probe segment, change with regard to the inductance value that has caused coil 1 and coil 2, collector place of switch triode 9 or switch triode 10 produces a frequency and coil 1 in the bistable oscillation circuit 49, the oscillator signal that 2 inductance values are relevant, utilize the frequency of single chip computer measurement through the switch triode 9 or the switch triode 10 collector place oscillator signals of frequency division, according to the frequency values of demarcating out in the experiment and the typical curve of measured magnetic field value, just realized measurement again to unknown low-intensity magnetic field.
The acquisition of typical curve is the top that known low-intensity magnetic field is placed probe, behind the connection+5V power supply, behind bistable oscillation circuit, frequency measurement circuit, will obtain the oscillator signal with the corresponding certain frequency f in magnetic field.Change the intensity of low-intensity magnetic field, will obtain a series of oscillator signal, be the coordinate mapping with frequency and magnetic field H again, thereby obtain the f-H typical curve.
Sensitivity by the designed open loop situations magnetic field sensor that goes out of above-mentioned principle is higher, but degree of stability is limited, improves the performance index of sensor by the method for changing element, and difficulty is bigger.As the further improvement of this patent, designed the closed-loop measuring system of this sensor on this basis, as shown in Figure 4, and on circuit, given realization, after experiment showed this system of adding, the performance index of sensor were enhanced.
As shown in Figure 5, feedback circuit partly comprises filtering circuit 33, differential amplifier circuit 34 and electric current and voltage conversion (V/I) circuit 35 these three parts altogether in the closed-loop measuring system, in filtering circuit 33, two low-pass filter circuits have been formed by filter resistance 20, filter capacitor 22 and filter resistance 21, filter capacitor 23, realize the d. c. voltage signal that the dc voltage output end (Eout1 and Eout2) of bistable oscillation circuit from Fig. 3 inserts is carried out low-pass filtering, filter out and be superimposed upon this two high frequency noises above the d. c. voltage signal.In differential amplifier circuit, utilization be that instrument amplifier carries out differential amplification.Wherein, 24 are enlargement factor adjusting resistance, and 25 is instrument amplifier.The function that this partial circuit is realized is for carrying out differential amplification with two through the direct current signal that obtains after the low-pass filtering.The range of adjustment of differential enlargement factor is 30~100 times.In voltage-to-current conversion (V/I) circuit 35, conventional current/charge-voltage convertor (Tong Shibai, Hua Chengying: Basic Analog Electronics, Higher Education Publishing House have been constituted by resistance 26,27,28,29,31 and operational amplifier 30,32,2002,438~439).Its function is transformed into dc current signal for the d. c. voltage signal that will obtain after differential amplification, feed back to the E end of the tickler 3 in the probe of Fig. 3.In tickler, will produce a magnetic field H reverse like this with externally-applied magnetic field fThen amorphous magnetic core is except the action of alternating magnetic field that is subjected to external magnetic field effect and multi-harmonic-oscillations bridge circuit, also to be subjected to the effect in the magnetic field of tickler generation, promptly oppositely weakened the external magnetic field in the magnetic core, sensitivity decreases although it is so, but by this negative feedback stablized multi-resonant oscillating circuit the working point, stablized the output frequency of circuit, well improve indexs such as the frequency stability of sensor and temperature stability, but also strengthened the antijamming capability of system.
The surge frequency range of flop-over circuit is between 30KHz~500KHz, and collective frequency is with the sensitivity and the degree of stability of changes of magnetic field, and the optimum frequency scope is between 70KHz~100KHz when measuring magnetic field with frequency change.
Description of drawings
Fig. 1: the multi-harmonic-oscillations magnetic field sensor circuit figure of background technology;
Fig. 2: amorphous alloy low-intensity magnetic field sensor probe segment structural representation of the present invention;
Fig. 3: amorphous alloy low-intensity magnetic field sensor measuring system block diagram of the present invention;
Fig. 4: amorphous alloy low-intensity magnetic field sensor closed-loop measuring system chart of the present invention;
Fig. 5: amorphous alloy low-intensity magnetic field sensor feedback circuit figure of the present invention;
Fig. 6: the present invention is at the oscillator signal figure at switching tube collector frequency output point place;
(a) do not add the situation of external magnetic field; (b) be added with the situation of 0.94Oe external magnetic field;
Fig. 7: frequency of the present invention is with the calibration curve of changes of magnetic field output.
Embodiment
Below in conjunction with description of drawings concrete structure of the present invention and working method
Embodiment 1:
As shown in Figure 2, amorphous ribbon 4 as magnetic core adopts the CoFeSiB material, as the magnetic core of gathering coil, amorphous ribbon 4 long 80mm, wide 2mm, thickness is 30 μ m, direct current resistance is about 1 Ω, and what gather coil 1,2 and tickler 3 employings is 0.1mm diameter enameled wire, and the coiling number of turns is 280 circles, winding method is three-way with being coil 1,2 series connection reversal connections around, method of attachment.
Being coil 1 between A and C, is coil 2 between A and B, and A is the power supply access point, and B, C are probe and oscillatory circuit tie point; Be tickler 3 between D and E, D is the tickler earth point, and E is feedback circuit and tickler tie point.The symmetry that connects the assurance multi-resonant oscillating circuit that to try one's best like this.
As shown in Figure 3, the supply voltage that the multi-resonant oscillating circuit field signal of amorphous alloy low-intensity magnetic field sensor is gathered coil is 5V, with signals collecting coil 1,2 C, two current-limiting resistances 16 of the oscillatory circuit that B point place connects, 17 can select 50 Ω for use, repeating resistance 5,6 is 1k Ω, coupling capacitance 7,8 is 0.1 μ F, switch triode 9,10 model is 3DK4D, thereafter the resistance 18 that connects, 19 is 50 Ω, smoothing capacity 11,12 is 0.1 μ F, pull- up resistor 13,14 is 10 Ω, and zero-regulator resistor 15 is 20k Ω, integrated chip 36,37,38 is counter 74HC90, single-chip microcomputer 39 is AT89C2051, and 40 are measurement result demonstration output terminal, resonant capacitance 41,42 is 100pF, quartz crystal oscillator 43 oscillation frequency are 32768Hz, resistance 44 is 4.7k Ω, and integrated chip 45 is 4060, integrated chip 46,47 is CD4013.
Resistance 20,21 is 1k Ω in the filtering circuit of Fig. 5, filter capacitor 22,23 is 10 μ F, enlargement factor adjusting resistance 24 is 830 Ω in the amplifying circuit, 25 is instrument amplifier AD620, feedback circuit resistance 26,27,28,29 is 10k Ω, operational amplifier 30 is OP07, and it is 1.3k Ω that feedback current is regulated resistance 31, and operational amplifier 32 is OP07.
In the experiment, add and treat that measuring magnetic field is to be provided by helmholtz coil, the size in magnetic field is by the helmholtz coil direct current power source supplying power is controlled, the voltage of this helmholtz coil/magnetic field conversion coefficient is 0.094OeN, be of the influence of external interference fields such as elimination magnetic field of the earth to measurement result, in the experiment, helmholtz coil and sensor are all placed in the middle of the shielding device of making of high-permeability material.
With the device of present embodiment switching tube 9,10 collectors place obtain without the waveform figure of frequency division as shown in Figure 6.The waveform of the signal of Fig. 6 for directly gathering out from the switching tube collector, do not handle through 1/1000 frequency division, in Fig. 6, (a) be the waveform figure that collects when not adding external magnetic field, wherein, curve I is the waveform of gathering out from switching tube 9 collectors, curve II is the waveform from switching tube 10 collector collections place, we can find out from Fig. 6 (a), when not adding the outfield, because the symmetry of circuit is better, make the dutycycle of waveform be approximately 1: 1, this moment, the oscillation frequency of oscillatory circuit was 58.090kHz, the peak-to-peak value Vpp=4.86V of oscillator signal, and the waveform symmetry of curve I and curve II, just meeting about two switching tube alternate conduction and the analysis that ends.Fig. 6 (b) adds 0.94Oe magnetic field for working as, resulting waveform figure when obtaining peak response, curve III is to be the waveform of gathering out from switching tube 9 collectors, curve IV is the waveform from switching tube 10 collector collections place, Fig. 6 (b) and Fig. 6 (a) are compared us as can be seen, when the outfield exists, because two signals collecting coils 1,2 are series connection reversal connection structure, make outer field signal also inequality to the effect of two coils, just caused inductance value no longer equal of two coils, so just caused the asymmetry aggravation of oscillatory circuit, make the dutycycle and the frequency of waveform that bigger change all take place, this moment, the oscillation frequency of oscillatory circuit became 93.475kHz, the peak-to-peak value Vpp=5.99V of oscillator signal, and the waveform symmetry of curve III and curve IV, met about two switching tube alternate conduction and the analysis that ends.
The feedback field H that on probe, loads f=NI, I are the feedback current that is connected to the E end of coil 3 from the output terminal FeedbackSignal of feedback circuit shown in Figure 5, and N is the circle density of tickler 3.Wherein the value of I changes with survey external magnetic field value, can all load a feedback field that is complementary with institute's measuring magnetic field value like this when measuring the field signal of a different value.When the feedback circuit that does not connect as shown in Figure 5, because the degree of stability deficiency of circuit, cause measured final frequency value in the 0.02Hz scope, to shake, after inserting feedback circuit as shown in Figure 5, the degree of stability of circuit has obtained very big improvement, can reach 0.001Hz to the measuring accuracy of final frequency.
Utilize output frequency that single-chip microcomputer detects from the collector of the switching tube 9 of bistable oscillation circuit or switching tube 10 and seen Fig. 7 by the relation curve of measuring magnetic field.From magnetic field shown in Figure 7-frequency relation measures curve and can find out, along the magnetic field-frequency curve of output of positive and negative two directions of amorphous ribbon-1Oe~+ overlap in the scope of 1Oe, illustrate the present invention can be in range indifference accurately measure the magnetic field of both forward and reverse directions.(Fig. 7 is a standard Magnetic Field-frequency plot that is obtained in experiment, is used in actual applications calibration curve)
Concrete technical parameter such as following table through the sensor that experiment measuring obtained:
Range ± 1Oe
Peak response 87.95Hz/Oe
Reproducibility error 0.17%

Claims (5)

1, amorphous alloy low-intensity magnetic field sensor is made up of probe (48), bistable oscillation circuit (49), frequency measurement circuit (50), it is characterized in that:
Probe (48) is gathered coil (1,2) and is formed by being wrapped in field signal on the AMORPHOUS ALLOY RIBBONS (4), connect reversal connection and as the inductive part of bistable oscillation circuit (49) of coil (1,2);
Collector place of switch triode (9) or switch triode (10) produces a frequency and coil (1, the 2) oscillator signal that inductance value is relevant in the bistable oscillation circuit (49), just can measure size by the magnetic field value on the AMORPHOUS ALLOY RIBBONS (4) by the frequency of frequency measurement circuit (50) measurement oscillator signal.
2, amorphous alloy low-intensity magnetic field sensor as claimed in claim 1, it is characterized in that: be connected to the feedback circuit of being made up of filtering circuit (33), differential amplifier circuit (34) and voltage-current converter circuit (35) at dc voltage output end Eout1, the Eout2 of bistable oscillation circuit (49), it is converted to the DC current feedback signal with the two-way voltage signal after filtering, differential amplification.
3, amorphous alloy low-intensity magnetic field sensor as claimed in claim 2, it is characterized in that: on AMORPHOUS ALLOY RIBBONS (4), also be wound with tickler (3), coil (1,2,3) is closely coiling and do not have superimposing thread side by side, one end ground connection of tickler (3), the other end is the feedback signal input end, and this feedback signal is the DC current feedback signal that is produced by feedback circuit.
4, as claim 1,2 or 3 described amorphous alloy low-intensity magnetic field sensors, it is characterized in that: the number of turn of gathering coil (1,2) and tickler (3) is 150~500 circles.
5, as claim 1,2 or 3 described amorphous alloy low-intensity magnetic field sensors, it is characterized in that: AMORPHOUS ALLOY RIBBONS (4) is made of Co base or Fe base amorphous ribbon and material with better soft magnet performance, long 60mm~100mm, wide 1mm~3mm, thick 20 μ m~40.
CNA2008100505655A 2008-04-02 2008-04-02 Amorphous alloy low-intensity magnetic field sensor Pending CN101246203A (en)

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CN101915900A (en) * 2010-07-30 2010-12-15 石家庄吉纳科技有限公司 Amorphous wire magneto-impedance transducer and magnetic field detection method based on amorphous wire magneto-impedance effect
CN101915898A (en) * 2010-07-30 2010-12-15 石家庄吉纳科技有限公司 Amorphous wire magneto-impedance sensor and amorphous wire magneto-impedance effect-based magnetic field detection method
CN101930062A (en) * 2010-07-30 2010-12-29 石家庄吉纳科技有限公司 Amorphous wire magneto-impedance sensor and magnetic field detection method based on amorphous wire magneto-impedance effect
CN102478646A (en) * 2010-11-29 2012-05-30 中国科学院合肥物质科学研究院 Magnetic sensor based on amorphous magnetic core coil and working method thereof
CN103885006A (en) * 2014-03-31 2014-06-25 哈尔滨工业大学深圳研究生院 Alternating current magnetic field sensor with measuring frequency scanning function
CN103885000A (en) * 2014-03-31 2014-06-25 哈尔滨工业大学深圳研究生院 Alternating current induced magnetic field sensor with measuring frequency scanning function
CN103885001A (en) * 2014-03-31 2014-06-25 哈尔滨工业大学深圳研究生院 Series array type alternating current magnetic field sensing device
CN104849679A (en) * 2014-02-18 2015-08-19 北京中电嘉泰科技有限公司 Magnetic probe and magnetic field sensor having same
CN107271933A (en) * 2017-06-15 2017-10-20 成都理工大学 A kind of axis fluxgate sensor of spherical three
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101915900A (en) * 2010-07-30 2010-12-15 石家庄吉纳科技有限公司 Amorphous wire magneto-impedance transducer and magnetic field detection method based on amorphous wire magneto-impedance effect
CN101915898A (en) * 2010-07-30 2010-12-15 石家庄吉纳科技有限公司 Amorphous wire magneto-impedance sensor and amorphous wire magneto-impedance effect-based magnetic field detection method
CN101930062A (en) * 2010-07-30 2010-12-29 石家庄吉纳科技有限公司 Amorphous wire magneto-impedance sensor and magnetic field detection method based on amorphous wire magneto-impedance effect
CN102478646A (en) * 2010-11-29 2012-05-30 中国科学院合肥物质科学研究院 Magnetic sensor based on amorphous magnetic core coil and working method thereof
CN104849679A (en) * 2014-02-18 2015-08-19 北京中电嘉泰科技有限公司 Magnetic probe and magnetic field sensor having same
CN103885001A (en) * 2014-03-31 2014-06-25 哈尔滨工业大学深圳研究生院 Series array type alternating current magnetic field sensing device
CN103885000A (en) * 2014-03-31 2014-06-25 哈尔滨工业大学深圳研究生院 Alternating current induced magnetic field sensor with measuring frequency scanning function
CN103885006A (en) * 2014-03-31 2014-06-25 哈尔滨工业大学深圳研究生院 Alternating current magnetic field sensor with measuring frequency scanning function
CN103885001B (en) * 2014-03-31 2016-08-17 哈尔滨工业大学深圳研究生院 Serial array formula AC magnetic field sensing device
CN108780130A (en) * 2016-03-23 2018-11-09 Tdk株式会社 Magnetic sensor
CN108780130B (en) * 2016-03-23 2020-09-15 Tdk株式会社 Magnetic sensor
CN107271933A (en) * 2017-06-15 2017-10-20 成都理工大学 A kind of axis fluxgate sensor of spherical three
CN107271933B (en) * 2017-06-15 2019-11-01 成都理工大学 A kind of three axis fluxgate sensor of spherical

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