CN101244542A - Constant temperature conveyer of polishing solution - Google Patents
Constant temperature conveyer of polishing solution Download PDFInfo
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- CN101244542A CN101244542A CNA2007100673533A CN200710067353A CN101244542A CN 101244542 A CN101244542 A CN 101244542A CN A2007100673533 A CNA2007100673533 A CN A2007100673533A CN 200710067353 A CN200710067353 A CN 200710067353A CN 101244542 A CN101244542 A CN 101244542A
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- temperature
- constant temperature
- polishing solution
- polishing
- liquid level
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Abstract
The invention relates to polishing liquid constant-temperature transport device, comprising a bucket body, a temperature adjustor, a temperature sensor and a controller, wherein the bucket body is used to store the polishing liquid; a heat insulation layer is arranged around the bucket body; the bucket body is provided with a transfer pump and a reflow pipe, which are communicated with the polishing process area, for the polishing liquid; the temperature adjustor is arranged at the outer wall of the bucket body; the temperature sensor is arranged in the bucket body; the controller comprises a constant temperature control module, which controls the temperature adjustor heating when the temperature detected by the temperature sensor is lower than the set value and refrigeration when the temperature detected by the temperature sensor is higher than the set value; the temperature sensor is connected with the input of the constant temperature control module; the output of the constant temperature control module is connected with the temperature adjustor. The transport device has an advantage of simple structure and thermostatic liquid, which can improve the quality of the processed surface efficiently.
Description
(1) technical field
The present invention relates to polish manufacture field, a kind of equipment that keeps the works fine state of polishing fluid in the polishing process, especially a kind of constant temperature conveyer of polishing solution of making.
(2) background technology
Polishing fluid is absolutely necessary in polishing processing, the pH value of polishing fluid, and temperature all directly influences the quality of finish of polishing material.But owing to the friction between workpiece and the polishing disk, the polishing fluid heating causes temperature to raise in process.The polishing fluid temperature raises influences the removal speed of polishing material, thereby directly influences the machined surface quality of workpiece.
Because polishing fluid is recycled, and the impurity or the fragment that come off from workpiece in polishing process can flow into circulation along with polishing fluid, be used for polishing processing once more if be mixed with the polishing fluid of these impurity, cut will appear in the finished surface of workpiece so, does not reach the requirement of finished surface.
The polishing fluid that causes volatilizees because temperature raises in process, and also having the nature volatilization is the main cause of polishing fluid loss.When the polishing fluid loss causes liquid level not enough, cause the polishing fluid undersupply, thereby influence the workpiece machining surface quality, cause the fragment of workpiece easily.
(3) summary of the invention
In order to overcome in the existing polishing process because the polishing fluid temperature rise influences the deficiency of machined surface quality, the invention provides a kind of simple in structure, have thermostatic control polishing fluid temperature, can effectively promote the constant temperature conveyer of polishing solution of the quality of finished surface.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of constant temperature conveyer of polishing solution, comprise the staving that is used to deposit polishing fluid, described staving is provided with thermal insulation layer outward, described staving is provided with and polishes the polishing fluid delivery pump that machining area is communicated with, return duct, described constant temperature conveyer of polishing solution also comprises thermoregulator, temperature sensor and controller, described thermoregulator is installed on the bucket outer wall, described temperature sensor is installed in the staving, described controller comprises and is used for that the control thermoregulator heats when temperature that temperature sensor records is lower than setting value, the thermostatic control module of control thermoregulator refrigeration when the temperature that temperature sensor records is higher than setting value, described temperature sensor connects the input of thermostatic control module, and the output of described thermostatic control module connects thermoregulator.
As preferred a kind of scheme: described thermoregulator is a semiconductor chilling plate, described semiconductor chilling plate connect can controlled conversion polarity of electrode dc source, described dc source connects the thermostatic control module.
As preferred another kind of scheme: fin is installed in described semiconductor chilling plate below, and radiator fan is installed in described fin below.
As preferred another scheme: be provided with liquid level sensor, level alarm device in the described staving, described liquid level sensor connects controller, described controller also comprises the level alarm module that is used for sending warning information when liquid level that liquid level sensor records is lower than setting height, and described level alarm module connects the level alarm device.
Further, the described return duct end of stretching into staving is provided with filter.
Further, described liquid level sensor is a magnetic float liquid level switch.
Further again, described filter is the microporous fibre filter screen.
Described polishing fluid delivery pump is corrosion-resistant submerged pump.
Technical conceive of the present invention is: be provided with and have constant temperature function polishing fluid conveying device, on staving, be provided with thermoregulator (semiconductor chilling plate), the real time temperature that records according to temperature sensor, when the temperature of temperature sensor detection is lower than setting value, controller control dc source heats to the power supply of conductor refrigeration sheet, when the temperature of temperature sensor detection was higher than setting value, controller changed the polarity of DC power supply, made conductor refrigeration sheet refrigeration; Realize the polishing fluid constant temperature in the stainless steel cask, can effectively promote the quality of the finished surface of workpiece.
Be provided with liquid level sensor in staving, liquid level sensor is connected with controller, and when the polishing fluid liquid level was lower than setting height in the stainless steel cask, controller provided warning function; Can avoid causing the liquid level deficiency because of the polishing fluid loss.
Outlet at return duct is provided with the microporous fibre filter screen, and the microporous fibre filter screen avoids impurity or fragment along with polishing fluid flows into circulation as the polishing fluid filter purifying, guarantees the quality of finished surface.
Beneficial effect of the present invention mainly shows: 1, simple in structure, have thermostatic control polishing fluid temperature, can effectively promote the quality of finished surface; 2, has the not enough warning function of liquid level; 3, avoid impurity or fragment along with polishing fluid flows into circulation, guarantee the quality of finished surface.
(4) description of drawings
Fig. 1 is the structural representation of constant temperature conveyer of polishing solution.
Fig. 2 is the theory diagram of controller.
(5) specific embodiment
Below in conjunction with accompanying drawing the present invention is further described.
With reference to Fig. 1, Fig. 2, a kind of constant temperature conveyer of polishing solution, comprise the staving 1 that is used to deposit polishing fluid, described staving is provided with thermal insulation layer 2 outward, described staving 1 is provided with and polishes the polishing fluid delivery pump 5 that machining area is communicated with, return duct 4, described constant temperature conveyer of polishing solution also comprises thermoregulator 11, temperature sensor 6 and controller 12, described thermoregulator 11 is installed on staving 1 outer wall, described temperature sensor 6 is installed in the staving 1, described controller 12 comprises and is used for that the control thermoregulator heats when temperature that temperature sensor records is lower than setting value, the thermostatic control module 13 of control thermoregulator refrigeration when the temperature that temperature sensor records is higher than setting value, described temperature sensor 6 connects the input of thermostatic control module 13, and the output of described thermostatic control module 13 connects thermoregulator 11.
Described thermoregulator 11 is a semiconductor chilling plate, described semiconductor chilling plate connect can controlled conversion polarity of electrode dc source, described dc source connects thermostatic control module 13, heats or freezes by the power supply Polarity Control semiconductor chilling plate that changes dc source.Fin 9 is installed in described semiconductor chilling plate below, and radiator fan 10 is installed in described fin 9 belows.
Be provided with liquid level sensor 7, level alarm device 14 in the described staving 1, described liquid level sensor 7 connects controller 12, described controller 12 also comprises the level alarm module 15 that is used for sending warning information when liquid level that liquid level sensor records is lower than setting height, and described level alarm module 15 connects level alarm devices 14.
The end that described return duct 4 stretches into staving is provided with filter 3.Described liquid level sensor 7 is a magnetic float liquid level switch.Described filter 3 is the microporous fibre filter screen.
Present embodiment constant temperature conveyer of polishing solution, comprise staving (stainless steel bucket) 1, thermal insulation layer 2, polishing fluid delivery pump 5, return duct 4, filter 3, conductor refrigeration sheet 8, fin 9, radiator fan 10, temperature sensor 6 and liquid level sensor 7, stainless steel cask 1 outside surrounds and is provided with thermal insulation layer 2, stainless steel cask 1 upper end cover is equipped with polishing fluid delivery pump 5, polishing fluid return duct 4 and polishing fluid filter 3, stainless steel cask 1 is built-in with the liquid level sensor 7 and temperature sensor 6 that detects polishing fluid, the outside, stainless steel cask 1 bottom surface fixed installation conductor refrigeration sheet 8, fin 9 is installed in conductor refrigeration sheet below, and direct current radiator fan 10 is installed in the fin below.Liquid level sensor 7 is connected with controller 12, and when the polishing fluid liquid level was lower than setting height in the stainless steel cask 1, controller provided warning function; Temperature sensor 6 is connected with controller 12, when the temperature of temperature sensor 6 detections is lower than setting value, controller 12 control dc sources heat to 8 power supplies of conductor refrigeration sheet, when the temperature of temperature sensor detection is higher than setting value, controller changes the polarity of DC power supply, make conductor refrigeration sheet 8 refrigeration, realize the polishing fluid constant temperature in the stainless steel cask.Polishing fluid delivery pump 5 is delivered to the polishing machining area with polishing fluid, and the polishing fluid after the use flows back to stainless steel cask after purifying by polishing fluid return duct 4 and through polishing fluid filter 3, realizes recycling.
Claims (8)
1. constant temperature conveyer of polishing solution, comprise the staving that is used to deposit polishing fluid, described staving is provided with thermal insulation layer outward, described staving is provided with and polishes the polishing fluid delivery pump that machining area is communicated with, return duct, it is characterized in that: described constant temperature conveyer of polishing solution also comprises thermoregulator, temperature sensor and controller, described thermoregulator is installed on the bucket outer wall, described temperature sensor is installed in the staving, described controller comprises and is used for that the control thermoregulator heats when temperature that temperature sensor records is lower than setting value, the thermostatic control module of control thermoregulator refrigeration when the temperature that temperature sensor records is higher than setting value, described temperature sensor connects the input of thermostatic control module, and the output of described thermostatic control module connects thermoregulator.
2. constant temperature conveyer of polishing solution as claimed in claim 1, it is characterized in that: described thermoregulator is a semiconductor chilling plate, described semiconductor chilling plate connect can controlled conversion polarity of electrode dc source, described dc source connects the thermostatic control module.
3. constant temperature conveyer of polishing solution as claimed in claim 2 is characterized in that: fin is installed in described semiconductor chilling plate below, and radiator fan is installed in described fin below.
4. as the described constant temperature conveyer of polishing solution of one of claim 1-3, it is characterized in that: be provided with liquid level sensor, level alarm device in the described staving, described liquid level sensor connects controller, described controller also comprises the level alarm module that is used for sending warning information when liquid level that liquid level sensor records is lower than setting height, and described level alarm module connects the level alarm device.
5. constant temperature conveyer of polishing solution as claimed in claim 4 is characterized in that: the end that described return duct stretches into staving is provided with filter.
6. constant temperature conveyer of polishing solution as claimed in claim 4 is characterized in that: described liquid level sensor is a magnetic float liquid level switch.
7. constant temperature conveyer of polishing solution as claimed in claim 5 is characterized in that: described filter is the microporous fibre filter screen.
8. constant temperature conveyer of polishing solution as claimed in claim 4 is characterized in that: described polishing fluid delivery pump is corrosion-resistant submerged pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100673533A CN101244542A (en) | 2007-02-14 | 2007-02-14 | Constant temperature conveyer of polishing solution |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100673533A CN101244542A (en) | 2007-02-14 | 2007-02-14 | Constant temperature conveyer of polishing solution |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101244542A true CN101244542A (en) | 2008-08-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007100673533A Pending CN101244542A (en) | 2007-02-14 | 2007-02-14 | Constant temperature conveyer of polishing solution |
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| CN (1) | CN101244542A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104029130A (en) * | 2014-06-06 | 2014-09-10 | 中国科学院长春光学精密机械与物理研究所 | Intelligent polishing agent supply circulating device |
| CN104400659A (en) * | 2014-10-29 | 2015-03-11 | 哈尔滨工业大学 | Polishing solution feeding system capable of realizing independent control over external cycle |
| CN105643467A (en) * | 2016-01-14 | 2016-06-08 | 中国科学院上海光学精密机械研究所 | Full-automatic solution preparing and injecting device for polishing |
-
2007
- 2007-02-14 CN CNA2007100673533A patent/CN101244542A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104029130A (en) * | 2014-06-06 | 2014-09-10 | 中国科学院长春光学精密机械与物理研究所 | Intelligent polishing agent supply circulating device |
| CN104400659A (en) * | 2014-10-29 | 2015-03-11 | 哈尔滨工业大学 | Polishing solution feeding system capable of realizing independent control over external cycle |
| CN105643467A (en) * | 2016-01-14 | 2016-06-08 | 中国科学院上海光学精密机械研究所 | Full-automatic solution preparing and injecting device for polishing |
| CN105643467B (en) * | 2016-01-14 | 2017-09-12 | 中国科学院上海光学精密机械研究所 | Fully-automatic liquid make-up priming device for polishing |
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Open date: 20080820 |