CN101236876B - X-ray tube and X-ray analyzing apparatus - Google Patents
X-ray tube and X-ray analyzing apparatus Download PDFInfo
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- CN101236876B CN101236876B CN2008100094018A CN200810009401A CN101236876B CN 101236876 B CN101236876 B CN 101236876B CN 2008100094018 A CN2008100094018 A CN 2008100094018A CN 200810009401 A CN200810009401 A CN 200810009401A CN 101236876 B CN101236876 B CN 101236876B
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
- G21K1/04—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using variable diaphragms, shutters, choppers
- G21K1/043—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using variable diaphragms, shutters, choppers changing time structure of beams by mechanical means, e.g. choppers, spinning filter wheels
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
- H01J35/18—Windows
- H01J35/186—Windows used as targets or X-ray converters
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
- H05G1/02—Constructional details
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/086—Target geometry
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/12—Cooling
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/16—Vessels
- H01J2235/163—Vessels shaped for a particular application
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/16—Vessels
- H01J2235/165—Shielding arrangements
- H01J2235/167—Shielding arrangements against thermal (heat) energy
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/16—Vessels
- H01J2235/165—Shielding arrangements
- H01J2235/168—Shielding arrangements against charged particles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/18—Windows, e.g. for X-ray transmission
Abstract
To be able to achieve further small-sized formation and light-weighted formation and to promote a sensitivity an X-ray tube and an X-ray analyzing apparatus are disclosed, there are provided a vacuum cabinet (2) inside of which is brought into a vacuum state and which includes a window portion formed by an X-ray transmitting film through which an X-ray can be transmitted, an electron beam source (3) installed at inside of the vacuum cabinet (2) for emitting an electron beam e, a target T generating a primary X-ray X1 by being irradiated with the electron beam e and installed at inside of the vacuum cabinet 2 to be able to emit the primary X-ray X1 to an outside sample S by way of the window portion (1) , and an X-ray detecting element (4) arranged at inside of the vacuum cabinet (2) to be able to detect a fluorescent X-ray and a scattered X-ray X2 emitted from the sample S and incident from the window portion (1) for outputting a signal including energy information of the fluorescent X-ray and the scattered X-ray X2.
Description
Technical field
The present invention relates to a kind of X-ray tube and x-ray analysis equipment, for example be used for the fluorescent x-ray analyzer of energy dispersion type, be more preferably used in the fluorescent x-ray analyzer of nimble type of small size and light weight and pocket.
Background technology
X-ray fluorescence analysis is through surveying from this sample emitted fluorescence X ray so that obtain spectrum from the energy of fluorescent X-ray thus from the elementary X ray of x-ray source emission and with X-ray detector to sample irradiation, thereby carries out the qualitative analysis or the quantitative analysis of sample.Because can be nondestructively and analytic sample promptly, so x-ray fluorescence analysis be widely used in the substep/quality control.
As the analytical method of x-ray fluorescence analysis, there is the Wavelength dispersion type of wavelength and the intensity of measured X ray, under the situation of energy that comes chromatic dispersion fluorescent X-ray and measured X ray without pulsed height analyzer and intensity, surveys the ability of fluorescent X-ray through the semiconductor detecting element
The chromatic dispersion quantity type.
In correlation technique (for example references 1 (JP-A-8-115694)); In order to improve the sensitivity of fluorescent X-ray; Attempting through provide the taking-up window to make X-ray tube and X-ray analyzer approach sample to X-ray tube, wherein said taking-up window is used to take out through its inner fluorescent X-ray that also arrives the outside.
In addition, as described in the references 2 (Japan Patent No.3062685), the energy dispersion type fluorescent x-ray analyzer of nimble type has generally been used with the X-ray tube and the X-ray analyzer of small size form.
According to above-mentioned correlation technique, following point still exists.
For example; According to the x-ray analysis equipment described in the references 1; Although through making X-ray tube and X-ray detector approach the remarkable result that sample has realized improving detectivity,, X-ray tube and X-ray detector have limited and constant or a plurality of sizes separately; Therefore, make X-ray tube and X-ray detector approach sample aspect be restricted.
In addition; Nimble type energy dispersion type fluorescent x-ray analyzer according to correlation technique; Although require the form of smaller szie and the form of light weight, as the structure of this device, X-ray tube and X-ray detector occupy most volume and quality; Therefore according to this correlation technique, be restricted aspect realization smaller szie form and the light weight form.In addition; The environment that does not contain sample through the inside in the sample room that is in hermetic closed state that is used for analyzing makes the style of opening of elementary this sample of X ray direct irradiation constitute nimble type; And therefore in view of fail safe to X ray; Restriction produces the amount of X ray from X-ray tube, and therefore must more effectively survey the fluorescent X-ray from sample.
Summary of the invention
The present invention carries out under situation in view of the above problems; And its objective is provides a kind of X-ray tube and x-ray analysis equipment; It can realize the form of smaller szie and the form of light weight, and can wait and improve sensitivity through more effectively surveying fluorescent X-ray.
In order to address the above problem, the present invention adopts structure.Just, X-ray tube of the present invention comprises: vacuum chamber, and its inside is in vacuum state, and it comprises by the formed window portion of X ray transmission film, can the Transmission X ray through this X ray transmission film; Be installed in the electron beam source of internal vacuum chamber, be used for divergent bundle; Target is used for producing elementary X ray through shining with electron beam, and is installed in the inside of vacuum chamber, so that can elementary X ray be transmitted into external sample through window portion; And the X ray detecting element, it is disposed in internal vacuum chamber so that can survey from sample emission and from the fluorescent X-ray and the scattered x-ray of window portion incident, is used to export the signal of the energy information that comprises fluorescent X-ray and scattered x-ray.
According to this X-ray tube; The X ray detecting element that constitutes the element of X-ray detector is disposed in the inside of vacuum chamber; So that can survey fluorescent X-ray and scattered x-ray from window portion incident; Therefore the X ray detecting element is included in the inside of vacuum chamber with the electron beam source and the target of the composed component that constitutes X-ray tube by integral body, so that can further promote the small size that this device is overall and the form of light weight.In addition, the X ray detecting element is disposed in the inside of vacuum chamber, so as with the target that is used to produce the elementary X ray that can survey near sample, therefore can encourage very effectively and survey.In addition, when being applied to opening nimble type, can effectively survey, therefore, even when further restriction produces the amount of X ray, also can survey, and can realize tight security with high sensitivity.
In addition, according to X-ray tube of the present invention, target is arranged near window portion or contact with window portion, and the light receiving surface of X ray detecting element be disposed in target around.
Just; According to this X-ray tube; The light receiving surface of X ray detecting element be disposed in target around; Therefore, when analyzing under the state that makes sample near window portion, can survey fluorescent X-ray that produces by sample through elementary X ray or the like effectively through near the X ray detecting element of arranging at (just window portion) around the target from target.
In addition, according to X-ray tube of the present invention, this X ray detecting element comprises beam orifice, and this beam orifice is disposed in the location between electron beam source and the target, and can transmission electron beam through this beam orifice.Just, according to this x-ray analysis equipment, the beam orifice through the X ray detecting element between electron beam source and target, arranged comes irradiating electron beam, therefore, electron beam is narrowed down and can electron beam be shone on the target through beam orifice.
In addition, according to X-ray tube of the present invention, at least one in target and the window portion is set to earth potential or positive potential.Just, according to this X-ray tube, at least one in target and the window portion is set to earth potential or positive potential, therefore, through by electric field secondary electron being withdrawn into target or window portion from target, can suppressing secondary electron and be incident on the X ray detecting element.
In addition, according to X-ray tube of the present invention, the optical gate (shutter) that can stretch out and can withdraw from the path of electron beam to the path of electron beam is set between electron beam source and target.Just; According to this X-ray tube; At electron beam source be arranged in and be provided with between the inner target of this pipe and can stretch out and can be to the path of electron beam from the optical gate of the path withdrawal of electron beam; Therefore, compare, can make further that X ray generation point (target) and sample are more closer to each other with the situation that optical gate is set on the path of elementary X ray.In addition, be in closure state through making optical gate, up to make to constitute from the thermionic electron beam of electron beam source stable till, and, can measure through stable electron beam thus making electron beam open optical gate after stable.
In addition, according to X-ray tube of the present invention, between electron beam source and X ray detecting element, arrange to be used to shield photothermal shield member from electron beam source.Just, according to this X-ray tube, this shield member is set between electron beam source and the X ray detecting element, therefore shields the radiant heat from the electron beam source that produces heat, and can suppress by the adverse effect of radiant heat to the generation of cooling X ray detecting element.
X-ray analysis equipment of the present invention comprises: above-mentioned X-ray tube of the present invention and the display part that is used for the analyzer of analytic signal and is used for the analysis result of display analysis appearance.Just,, X-ray tube of the present invention is provided, therefore can reduces the overall dimension of this device according to this x-ray analysis equipment.
In addition, according to x-ray analysis equipment of the present invention, analyzer and display part are set in vacuum chamber so that constitute pocket.Just; According to this x-ray analysis equipment; This device is through integrally being installed to the pocket formation in the vacuum chamber with analyzer and display part; Therefore this x-ray analysis equipment can be made up of nimble type, and it can assign to confirm the result that analyzes through above-mentioned analyzer and display part, and size is little and in light weight.
According to the present invention, realize following effect.Just; According to X-ray tube of the present invention and x-ray analysis equipment; The X ray detecting element is disposed in the inside of vacuum chamber, so that can survey fluorescent X-ray and scattered x-ray from window portion incident, therefore; Can further dwindle the overall dimensions and the weight reduction of this device, and can further encourage effectively and survey.Particularly, when the present invention is applied to the x-ray analysis equipment of opening nimble type,, and can realize tight security even under the situation that further suppresses the X ray generation, also can produce the amount of X ray with high sensitivity detection.
Description of drawings
Fig. 1 is the profile overall construction drawing that illustrates according to the x-ray analysis equipment of an embodiment of x-ray analysis equipment of the present invention;
Fig. 2 is the front view that illustrates according to the major part of the target of this embodiment and the relation of the position between the X ray detecting element;
Fig. 3 is the front view that illustrates according to the major part of the target of another example 1 of this embodiment and the relation of the position between the X ray detecting element; And
Fig. 4 is the front view that illustrates according to the major part of the target of another example 2 of this embodiment and the relation of the position between the X ray detecting element.
Embodiment
To explain embodiment with reference to figure 1 and Fig. 2 as follows according to X-ray tube of the present invention and x-ray analysis equipment.In addition, in employed each accompanying drawing,, suitably changed contraction scale in the explanation below in order to constitute each parts according to size discernible or that be easy to discern.
The x-ray analysis equipment of this embodiment is the energy dispersion type fluorescent x-ray analyzer of pocket (nimble type); And comprise: vacuum chamber 2; Its inner part is in vacuum state; And this vacuum chamber 2 comprises by the film formed window portion 1 of X ray transmission, can the Transmission X ray through this X ray transmission film; Be installed in the electron beam source 3 of vacuum chamber 2 inside, be used for divergent bundle e; Target T, it utilizes electron beam to shine, and produces elementary X ray X1, and is installed in the inside of vacuum chamber 2, is positioned on its outside sample S so that can elementary X ray X1 be transmitted into through window portion 1; X ray detecting element 4, it is disposed in the inside of vacuum chamber 2 so that can survey from sample S emission and from the fluorescent X-ray and the scattered x-ray X2 of window portion 1 incident, is used to launch the signal of the energy information that comprises fluorescent X-ray and scattered x-ray X2; Be used to analyze the analyzer 5 of this signal; And the display part 6 that is used to show the analysis result of analyzer as shown in Figure 15.In addition, through constituting primary structure, thereby constitute X-ray tube by vacuum chamber 2, electron beam source 3, target T and X ray detecting element 4.
Window portion 1 is for example formed by Be (beryllium) paper tinsel as the X ray transmission film.In addition, the front surface of window portion 1 can be attached with primary filter, and this primary filter constitutes S per sample and metallic film or the sheet metal of Cu (copper) of selecting, Zr (zirconium), Mo etc.In addition, window portion 1 is set to earth potential or positive potential with target T, so that will pull back by being incident on electron beam e and the interaction generation of target T on the target T and the secondary electron of emitting.In addition, secondary electron only has the energy of about several eV usually, so earth potential or positive potential are configured to constitute the electric field that is equal to or higher than this energy.
In addition, not only filament 7 but also CNT all can be used to negative electrode.
For example, W (tungsten), Mo (molybdenum), Cr (chromium), Rh (rhodium) etc. are used to target T.Target T is arranged near to or in contact with window portion 1.X ray detecting element 4 is the semiconductor detecting elements that constitute for example Si (silicon) element etc. of pin structure diode.According to this X ray detecting element 4,, produce current impulse corresponding to a slice x-ray photon when a slice x-ray photon incident above that the time.The energy of the transient current value of this current impulse and the fluorescent X-ray of incident is proportional.
As depicted in figs. 1 and 2, X ray detecting element 4 comprises beam orifice 4a, and this beam orifice 4a is disposed in the filament 7 of electron beam source 3 and the location between the target T, and can transmission electron beam e.In addition, target T be disposed in beam orifice 4a under and near beam orifice 4a, and the light receiving surface of X ray detecting element 4 be disposed in target T around.
In addition, X ray detecting element 4 is configured to remain on steady temperature through unshowned cooling body (for example constituted the cooling body of cold-producing medium or used the cooling body of Peltier's element by liquid nitrogen).In addition, X ray detecting element 4 can be spent-100 degree and guarantees inherent function through being cooled to approximately-30.In addition, receive the protection of metallic plate etc. around the beam orifice 4a of X ray detecting element 4, make elementary X ray X1 or electron beam e can not be incident on the light receiving surface.
In addition, metal protection member 10 is set between target T and the X ray detecting element 4, makes elementary X ray X1, secondary electron or the electronics that reflects from target T not get into X ray detecting element 4.Metal protection member 10 is fixed on the vacuum chamber 2 through unshowned support component, and heart place is formed with the beam orifice of electron beam e therein, so that can transmission electron beam e.In addition, metal protection member 10 is set to earth potential or positive potential, and this and window portion 1 is similar with target T.
In addition, through X ray detecting element 4 is set to negative potential, can suppresses hot electron (electron beam e) and be incident on the X ray detecting element 4.
In addition, optical gate 11 is set between the filament 7 and target T of electron beam source 3, so that can stretch out to the path of electron beam e/can be from the path withdrawal of electron beam e.Optical gate 11 is by forming as the Ta of material that can screening electron bundle e, W, Cu etc., and is connected on the driving mechanism 12, solenoid etc. of sized motor.Driving mechanism 12 is connected to CPU9, and is controlled such that the path of electron beam e escapes optical gate 11, and electron beam e only is irradiated on the target T in Measuring Time.In addition, CPU 9 controls, and makes optical gate 11 be in closure state, till the thermionic electron beam e that makes formation from the filament 7 of electron beam source 3 stablizes, and after stablizing electron beam e, opens optical gate 11.
In addition, shield member 13 is arranged to support through the vacuum chamber 2 between electron beam source 3 and the X ray detecting element 4, and wherein this shield member 13 has the hole that is used for transmission electron beam e in heart place therein.Shield member 13 is formed by the metallic plate of Cu with high-termal conductivity etc., sheet metal etc., being used to shield the radiant heat from electron beam source 3, thereby makes heat be discharged to vacuum chamber 2, prevents thus the cooling of X ray detecting element 4 is had a negative impact.
Filament 7, target T, X ray detecting element 4, metal protection member 10, optical gate 11, driving mechanism 12 and shield member 13 be disposed in vacuum chamber 2 before comprise the inside of part 2a.
In addition, current/voltage control section 8 is connected to CPU9 with analyzer 5, so that carry out various controls through setting.
In addition, analyzer 5, current/voltage control section 8 and CPU9 be set at vacuum chamber 2 after comprise the inside of part 2b, and display part 6 through after comprise part 2b outer surface arrange that its display surface is set up.Just, analyzer 5 is arranged on the vacuum chamber 2 by integral body with display part 6.
In addition, power supply with required above-mentioned each structure of current potential be set be connected to the power unit (not shown).
By this way; According to this embodiment; X ray detecting element 4 is disposed in the inside of vacuum chamber 2; So that can survey from the fluorescent X-ray of window portion 1 incident and the X ray X2 of scattering, so X ray detecting element 4 is included in the inside of vacuum chamber 2 with target T by integral body with electron beam source 3, and can further reduce the overall size of this device and alleviate its weight.In addition, X ray detecting element 4 is disposed in the inside of vacuum chamber 2, and can therefore can encourage very effectively and survey through surveying near sample S with the target T that is used to produce elementary X ray X1.Particularly, can effectively survey through being applied to opening nimble type, therefore, the amount that produces X ray through further inhibition can be surveyed with high sensitivity more, and can realize tight security.
In addition; The light receiving surface of X ray detecting element 4 be disposed in target T around; Therefore; When analyzing under the state that makes sample S near window portion 1,, can survey the fluorescent X-ray that produces by sample S through elementary X ray X1 etc. effectively from target T through near the X ray detecting element of arranging at (just window portion 1) around the target T 4.
In addition, the beam orifice 4a through the X ray detecting element 4 between electron beam source 3 and target T, arranged shines electron beam e on the target, therefore, through being narrowed down by beam orifice 4a, electron beam e is shone on the target T.
In addition, metal protection member 10 is set between X ray detecting element 4 and the target T, and therefore, the secondary electron conductively-closed and the prevention that produce at target T place are incided on the X ray detecting element 4.In addition, the radiant heat that metal protection member 10 shields from the periphery of target, and can suppress cooling off the adverse effect that X ray detecting element 4 causes.
In addition, metal protection member 10 is set to earth potential or positive potential, therefore, will move metal protection member 10 to from the secondary electron of target T through electric field, can realize high shield effectiveness.
In addition, target T and window portion 1 are set to earth potential or positive potential, therefore, through electric field secondary electron are withdrawn into target T and window portion 1 from target T, can suppress secondary electron and incide on the X ray detecting element 4.
In addition; Can stretch out to the path of electron beam e/can be set at filament 7 from the optical gate 11 of the path of electron beam e withdrawal and be arranged between the target T of inside of this pipe; Therefore; Compare with the situation that optical gate is set on the path of elementary X ray, can make X ray generation point (target T) and sample S more closer to each other.In addition, optical gate 11 is in closure state, till the thermionic electron beam e that makes formation from filament 7 stablizes, and after stablizing electron beam e, opens optical gate 11, therefore can measure through stable electron beam e.
In addition; The present invention is made up of the pocket that analyzer 5 and display part 6 integrally are installed on the vacuum chamber 2; Therefore the present invention can be made up of nimble type, and it can confirm the result that analyzes through above-mentioned analyzer 5 and display part 6, and size is little and in light weight.
In addition, technical scope of the present invention is not limited to the foregoing description, and can in the scope that does not break away from main points of the present invention, carry out various modifications.
For example, as shown in Figure 3 although used the single X ray detecting element 4 that is formed with beam orifice 4a in the center as another example 1 according to the foregoing description, can construct the structure on every side that wherein a plurality of X ray detecting elements 14 are disposed in target T.In addition, as shown in Figure 4 as another example 2, can construct and wherein have only an X ray detecting element 14 to be disposed in the structure on every side of target T.
In addition, although the foregoing description is an energy dispersion type fluorescent x-ray analyzer, the present invention can be applied to the analysis of other types, for example the Wavelength dispersion type fluorescent x-ray analyzer.
In addition, the present invention can be made up of the reflection-type that is, it is used for through producing elementary X ray from circular filament to the target radiation electron beam of column, wherein filament be disposed in target around, as in the X-ray tube described in the references 1.
In addition, although the present invention is preferred for nimble type x-ray analysis equipment, as in the above-described embodiments, the present invention can also be applied to the x-ray analysis equipment of fixed.For example; Can constitute such fixed x-ray analysis equipment; It waits and constitutes through X-ray tube and analyzer 5, control system and display part 6 are set dividually, and this X-ray tube for example is made up of vacuum chamber 2, electron beam source 3, target T and X ray detecting element 4.
Claims (8)
1. X-ray tube comprises:
Vacuum chamber, its inside is in vacuum state, and it comprises by the film formed window portion of X ray transmission, can the Transmission X ray through this X ray transmission film;
Be installed in the electron beam source of the inside of said vacuum chamber, be used for divergent bundle;
Target is used for producing elementary X ray through shining with electron beam, and is installed in the inside of said vacuum chamber, so that can said elementary X ray be transmitted into external sample through said window portion; And
The X ray detecting element is used to export the signal of the energy information that comprises fluorescent X-ray and scattered x-ray,
It is characterized in that said X ray detecting element is disposed in the inside of said vacuum chamber so that can survey fluorescent X-ray and the scattered x-ray that gets into from said window portion after said sample emission, and
Metal protection member is set between said target and said X ray detecting element is transmitted into said X ray detecting element to stop said elementary X ray.
2. X-ray tube according to claim 1,
Wherein said target is arranged near said window portion or contacts with said window portion; And
The light receiving surface of wherein said X ray detecting element be disposed in said target around.
3. X-ray tube according to claim 1,
Wherein said X ray detecting element comprises beam orifice, and this beam orifice is disposed in the location between said electron beam source and the said target, and can transmission electron beam through this beam orifice.
4. X-ray tube according to claim 1,
In wherein said target and the said window portion at least one is set to earth potential or positive potential.
5. X-ray tube according to claim 1,
The optical gate that can stretch out and can withdraw from the path of electron beam to the path of electron beam wherein is set between said electron beam source and said target.
6. X-ray tube according to claim 1,
Arranging shielding parts between said electron beam source and said X ray detecting element wherein are to be used to shield the radiant heat from said electron beam source.
7. x-ray analysis equipment comprises:
According to any one described X-ray tube in the claim 1 to 6;
Be used to analyze the analyzer of said signal; And
Be used to show the display part of the analysis result of said analyzer.
8. x-ray analysis equipment according to claim 7,
Wherein said analyzer and said display part are set in the said vacuum chamber so that constitute pocket.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007018872 | 2007-01-30 | ||
| JP2007-018872 | 2007-01-30 | ||
| JP2007018872 | 2007-01-30 | ||
| JP2007196818A JP5135601B2 (en) | 2007-01-30 | 2007-07-28 | X-ray tube and X-ray analyzer |
| JP2007-196818 | 2007-07-28 | ||
| JP2007196818 | 2007-07-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101236876A CN101236876A (en) | 2008-08-06 |
| CN101236876B true CN101236876B (en) | 2012-05-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008100094018A Expired - Fee Related CN101236876B (en) | 2007-01-30 | 2008-01-30 | X-ray tube and X-ray analyzing apparatus |
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| Country | Link |
|---|---|
| JP (1) | JP5135601B2 (en) |
| CN (1) | CN101236876B (en) |
| CH (1) | CH700708B1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2015006018A (en) * | 2013-06-19 | 2015-01-08 | 富士電機株式会社 | Power conversion device |
| EP3385976A1 (en) * | 2017-04-05 | 2018-10-10 | Excillum AB | Vapour monitoring |
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| US6600156B2 (en) * | 2000-07-28 | 2003-07-29 | Jeol Ltd. | Scanning electron microscope |
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2007
- 2007-07-28 JP JP2007196818A patent/JP5135601B2/en not_active Expired - Fee Related
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2008
- 2008-01-29 CH CH00130/08A patent/CH700708B1/en not_active IP Right Cessation
- 2008-01-30 CN CN2008100094018A patent/CN101236876B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6577704B1 (en) * | 1999-07-06 | 2003-06-10 | Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Analysis device which uses X-ray fluorescence |
| US6600156B2 (en) * | 2000-07-28 | 2003-07-29 | Jeol Ltd. | Scanning electron microscope |
| CN2491832Y (en) * | 2001-02-27 | 2002-05-15 | 成都理工学院 | Portable tube excited X-ray photofluorometer |
Non-Patent Citations (1)
| Title |
|---|
| JP平8-115694A 1996.05.07 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101236876A (en) | 2008-08-06 |
| CH700708B1 (en) | 2010-10-15 |
| JP2008209394A (en) | 2008-09-11 |
| JP5135601B2 (en) | 2013-02-06 |
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