CN101216993B - A monitoring method and device for the analog interference elimination of the device - Google Patents
A monitoring method and device for the analog interference elimination of the device Download PDFInfo
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- CN101216993B CN101216993B CN2007100632302A CN200710063230A CN101216993B CN 101216993 B CN101216993 B CN 101216993B CN 2007100632302 A CN2007100632302 A CN 2007100632302A CN 200710063230 A CN200710063230 A CN 200710063230A CN 101216993 B CN101216993 B CN 101216993B
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Abstract
The invention discloses a monitoring method and a monitoring device for eliminating equipment analog quantity interference. The method comprises the following steps of performing resistance capacitance (RC) filtering on a detected analog voltage signal of equipment to eliminate high frequency noise interference signals; collecting a filtered analog voltage signal, digital-filtering, and eliminating noise interference signal from the analog voltage signal by using numerical quadrature filtering algorithm in frequency domain; and acquiring equipment current state based on the relationship between voltage and a to-be-monitored value. In order to ensure that monitoring work can be completed well if a useful signal is weak, the filtered analog voltage signal obtained can be selectively amplified to increase subsequent sampling precision. The invention can eliminate interference on the analog signal, accurately monitor equipment current state, and ensure accurate judgment of an operation tothe equipment state judge and the operation of normal process.
Description
Technical field
The present invention relates to the detection and the monitoring technique field of equipment, relate in particular to a kind of at equipment detection and monitor procedure in abatement apparatus the analog quantity monitoring method and the device that disturb.
Background technology
No matter in plant equipment still in electronic equipment, especially in automation equipment, often need the state of some parts of equipment be detected, obtain that its state is used to monitor or the duty of opertaing device.With the plasma etching equipment is example, and the state of some parts will represent with numerical value, such as the power of radio-frequency power supply, and the rotating speed of molecular pump, the vacuum tightness of chamber, or the like.In the control system of reality, corresponding sensor is all arranged in these parts, the numerical value of rotating speed or power is converted to analog voltage signal represent, and the analog quantity that this analog voltage signal is exactly the present invention to be discussed.
Prior art is to read described analog quantity by industrial computer, and utilize the linear relationship between voltage and the numerical value to obtain the present residing state of equipment, with the radio-frequency power supply is example, the power of the 0-1000w of the linear corresponding radio-frequency power supply of 0-10v for example, when the size of the voltage signal of reading is 5v, be 500w with regard to the power of knowing radio-frequency power supply this moment.
Though prior art under normal circumstances can reflect the state of equipment, but when the voltage value of the analog quantity of indication equipment state is very little, because noise and interference will cause it and have a strong impact on this moment, its accuracy just is difficult to guarantee, still with the radio-frequency power supply example, as the frequency of operation of radio-frequency power supply in tens watts, the output of respective sensor will be less than 1v, under power frequency and Radio frequency interference (RFI) combined action, the voltage signal of analog quantity will have greatly changed, just current state that can accurately indication equipment.Further since in this case the operator output power of radio-frequency power supply is not had accurate cognition, be difficult to carry out correct technological process.
Summary of the invention
At the technological deficiency that exists in the prior art scheme, the purpose of this invention is to provide monitoring method and device that a kind of abatement apparatus analog quantity is disturbed, eliminated the interference of simulating signal, current state that can accurately monitoring equipment.Guarantee the state accuracy of judgement of operator, guarantee correctly carrying out of technological process equipment.
The objective of the invention is to be achieved through the following technical solutions:
The monitoring method that a kind of abatement apparatus analog quantity is disturbed comprises:
A, the analog voltage signal of detected equipment is carried out the noise interferences that high frequency is eliminated in capacitance-resistance RC filtering;
B, gather the analog voltage signal after the interference of high frequency is eliminated in filtering, and described analog voltage signal is carried out digital filtering, in frequency domain, adopt the digital quadrature filtering algorithm, eliminate the noise interferences in the analog voltage signal;
C, utilize the relation between voltage and the numerical value to be monitored to obtain the current state of equipment.
Also comprise before the described step B:
D, the analog voltage signal of filtering being eliminated after the interference of high frequency selectively amplify.
The monitoring device that a kind of abatement apparatus analog quantity is disturbed comprises:
Capacitance-resistance RC filtering circuit is used for the analog voltage signal of detected equipment is carried out the interference that high frequency is eliminated in capacitance-resistance RC filtering;
Signal sample circuit is gathered the analog voltage signal after the interference of high frequency is eliminated in filtering, and is transferred to digital filter circuit;
Digital filter circuit is used for digital voltage signal is carried out digital filtering, adopts the digital quadrature filtering algorithm in frequency domain, eliminates the noise interferences in the analog voltage signal;
Data processing circuit utilizes the relation between voltage and the numerical value to be monitored to obtain the current state of equipment according to the digital voltage signal through digital filtering.
Described device also comprises:
Signal amplification circuit carries out processing and amplifying to the analog voltage signal after the interference of capacitance-resistance RC filtering elimination high frequency.
Described signal amplification circuit comprises operational amplifier and two peripheral resistance, sets the enlargement factor of the ratio relation control operational amplifier of two peripheral resistance to signal.
Described capacitance-resistance RC filtering circuit comprises filter resistance and filter capacitor.
Described digital filter circuit comprises:
Mould/number conversion circuit, the analog signal conversion that is used for collecting is a digital signal;
Digital signal processing circuit is used for digital voltage signal is carried out digital filtering, adopts the digital quadrature filtering algorithm in frequency domain, eliminates noise interferences and output in the analog voltage signal.
Described digital filter circuit also comprises:
The Signal Matching circuit adopts push-up storage, is used for coupling because digital signal processing circuit TMS320C32 and mould/number conversion circuit CS5396 processing speed.
As seen from the above technical solution provided by the invention, monitoring method and device that a kind of abatement apparatus analog quantity of the present invention is disturbed carry out the noise interferences that high frequency is eliminated in capacitance-resistance RC filtering to the analog voltage signal of detected equipment; Then, gather the analog voltage signal after the interference of high frequency is eliminated in filtering, and described analog voltage signal is carried out digital filtering, in frequency domain, adopt the digital quadrature filtering algorithm, eliminate the noise interferences in the analog voltage signal; At last, utilize the relation between voltage and the numerical value to be monitored to obtain the current state of equipment.And when useful signal is very little, also can finish monitoring well in order to guarantee, and can also the analog voltage signal that filtering is eliminated after the interference of high frequency selectively be amplified, improve follow-up sampling precision.Eliminated the interference of simulating signal, current state that can accurately monitoring equipment.Guarantee the state accuracy of judgement of operator, guarantee correctly carrying out of technological process equipment.
Description of drawings
Fig. 1 is the monitoring device structural drawing one that abatement apparatus analog quantity of the present invention is disturbed;
Fig. 2 is the monitoring device structural drawing two that abatement apparatus analog quantity of the present invention is disturbed;
Fig. 3 is the monitoring device structural drawing three that abatement apparatus analog quantity of the present invention is disturbed.
Embodiment
The monitoring method that a kind of abatement apparatus analog quantity of the present invention is disturbed, its core are the noise interferences of the analog voltage signal of detected equipment being carried out capacitance-resistance RC filtering elimination high frequency; Then, gather the analog voltage signal after the interference of high frequency is eliminated in filtering, and described analog voltage signal is carried out digital filtering, in frequency domain, adopt the digital quadrature filtering algorithm, eliminate the noise interferences in the analog voltage signal; At last, utilize the relation between voltage and the numerical value to be monitored to obtain the current state of equipment.And when useful signal is very little, also can finish monitoring well in order to guarantee, and can also the analog voltage signal that filtering is eliminated after the interference of high frequency selectively be amplified, improve follow-up sampling precision.
The monitoring device that a kind of abatement apparatus analog quantity of the present invention is disturbed, as shown in Figure 1, its embodiment is: described device comprises, capacitance-resistance RC filtering circuit, signal sample circuit, digital filter circuit and data processing circuit, wherein,
Capacitance-resistance RC filtering circuit is used for the analog voltage signal of detected equipment is carried out the interference that high frequency is eliminated in capacitance-resistance RC filtering; As shown in Figure 2, comprise filter resistance R1 and filter capacitor C1, the network that filter resistance R1 and filter capacitor C1 form possesses the function of low-pass filtering, and the analog voltage signal of detected equipment is carried out rough filtering, eliminates the interference of high frequency.
Signal sample circuit is gathered the analog voltage signal after the interference of high frequency is eliminated in filtering, and is transferred to digital filter circuit;
Digital filter circuit is used for digital voltage signal is carried out digital filtering, adopts the digital quadrature filtering algorithm in frequency domain, eliminates the noise interferences in the analog voltage signal; As shown in Figure 3, described digital filter circuit comprises: mould/number conversion circuit and digital signal processing circuit, wherein,
Mould/number conversion circuit (CS5396), the analog signal conversion that is used for collecting is a digital signal; Adopt high-precision A/D converter CS5396.
Digital signal processing circuit (TMS320C32), it is a dsp chip, write corresponding code and can realize digital voltage signal is carried out digital filtering, in frequency domain, adopt the digital quadrature filtering algorithm, eliminate noise interferences and output in the analog voltage signal.Digital signal processing circuit among the present invention adopts high-speed floating point type digital signal processor TMS320C32.
In addition, described digital filter circuit also comprises:
Signal Matching circuit (FIFO RAM) adopts push-up storage FIFO RAM, is used for coupling because digital signal processing circuit TMS320C32 and mould/number conversion circuit CS5396 processing speed.
Data processing circuit utilizes the relation between voltage and the numerical value to be monitored to obtain the current state of equipment according to the digital voltage signal through digital filtering.Realize by industrial computer.
The monitoring device that described abatement apparatus analog quantity is disturbed also comprises:
Signal amplification circuit carries out processing and amplifying to the analog voltage signal after the interference of filtering elimination high frequency.As shown in Figure 2, comprise operational amplifier and two peripheral resistance R 2 and R3, wherein the multiple of R2 and R3 relation is to enlargement factor that should circuit, and the setting of the value by R2 and R3 can be controlled the enlargement factor to signal.
In sum, the present invention to sensor to the analog voltage signal of equipment at first carry out the noise that higher-frequency is eliminated in RC filtering, can selectively amplify then, at last it is sampled and digital filtering.Why say so and selectively amplify, be because for the less situation of useful signal, in order to improve the precision of subsequent sampling, to carry out the amplification of certain multiple (such as 10 times) to simulating signal, and for the more moderate or bigger situation of the amplitude of useful signal, we just do not amplify it, directly give A/D sampling, carry out follow-up processing.
In order to have guaranteed the final precision of filtering.The present invention has adopted digital filter circuit, when the amplitude of useful signal hour, it is very strong that The noise just seems, this influence can not be ignored, but is difficult to differentiate in useful signal in coupling noise in the time domain.Yet because the frequency of noise and useful signal is different,, remove noise, keep useful signal so can in frequency domain, separate them.The digital quadrature filtering algorithm with high frequency-selecting performance and linear phase characteristic that the present invention adopts can improve the dynamic range of signal greatly, even if make under the very faint situation of useful signal, also can obtain good filter effect.As shown in Figure 3, CS5396 samples to original signal (noise is arranged), sample sequence is sent into TMS320C32 and is handled, because TMS320C32 and CS5396 processing speed do not match, so the centre has added push-up storage FIFO RAM, TMS320C32 gets sampling to such an extent that data are handled by removing noise and digital filtering, eliminate noise and obtain useful signal, afterwards useful signal being passed to data processing circuit (industrial computer) exports, here it should be noted that, if the circuit of front has added amplifier, the amplitude of signal will be dwindled corresponding multiple when giving the industrial computer demonstration so at last, so just can obtain the present duty of equipment accurately.
The method that the present invention adopts RC filtering of hardware capacitance-resistance and digital quadrature filtering to combine is handled the original analog amount, eliminates noise and obtains useful signal, afterwards useful signal is passed to industrial computer and exports, the duty that the equipment that obtains accurately is present.That gives technology normally provides powerful guarantee.
The above; only for the preferable embodiment of the present invention, but protection scope of the present invention is not limited thereto, and anyly is familiar with those skilled in the art in the technical scope that the present invention discloses; the variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claim.
Claims (5)
1. the monitoring method that the abatement apparatus analog quantity is disturbed is characterized in that, comprising:
A, the analog voltage signal of detected equipment is carried out the noise interferences that high frequency is eliminated in capacitance-resistance RC filtering;
B, gather the analog voltage signal after the interference of high frequency is eliminated in filtering, and described analog voltage signal is carried out digital filtering, in frequency domain, adopt the digital quadrature filtering algorithm, eliminate the noise interferences in the analog voltage signal;
C, utilize the relation between voltage and the numerical value to be monitored to obtain the current state of equipment;
Also comprise before the described step B:
D, the analog voltage signal of filtering being eliminated after the interference of high frequency selectively amplify.
2. the monitoring device that the abatement apparatus analog quantity is disturbed is characterized in that, comprising:
Capacitance-resistance RC filtering circuit is used for the analog voltage signal of detected equipment is carried out the interference that high frequency is eliminated in capacitance-resistance RC filtering;
Signal sample circuit is gathered the analog voltage signal after the interference of high frequency is eliminated in filtering, and is transferred to digital filter circuit;
Digital filter circuit is used for digital voltage signal is carried out digital filtering, adopts the digital quadrature filtering algorithm in frequency domain, eliminates the noise interferences in the analog voltage signal;
Data processing circuit utilizes the relation between voltage and the numerical value to be monitored to obtain the current state of equipment according to the digital voltage signal through digital filtering;
Described device also comprises:
Signal amplification circuit carries out processing and amplifying to the analog voltage signal after the interference of capacitance-resistance RC filtering elimination high frequency;
Described signal amplification circuit comprises operational amplifier and two peripheral resistance, sets the enlargement factor of the ratio relation control operational amplifier of two peripheral resistance to signal.
3. the monitoring device that abatement apparatus analog quantity according to claim 2 is disturbed is characterized in that described capacitance-resistance RC filtering circuit comprises filter resistance and filter capacitor.
4. the monitoring device that abatement apparatus analog quantity according to claim 2 is disturbed is characterized in that described digital filter circuit comprises:
Mould/number conversion circuit, the analog signal conversion that is used for collecting is a digital signal;
Digital signal processing circuit is used for digital voltage signal is carried out digital filtering, adopts the digital quadrature filtering algorithm in frequency domain, eliminates noise interferences and output in the analog voltage signal.
5. the monitoring device that abatement apparatus analog quantity according to claim 4 is disturbed is characterized in that described digital filter circuit also comprises:
The Signal Matching circuit adopts push-up storage, the processing speed that is used to mate digital signal processing circuit TMS320C32 and mould/number conversion circuit CS5396.
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| CN2007100632302A CN101216993B (en) | 2007-01-04 | 2007-01-04 | A monitoring method and device for the analog interference elimination of the device |
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| CN2007100632302A CN101216993B (en) | 2007-01-04 | 2007-01-04 | A monitoring method and device for the analog interference elimination of the device |
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| CN101216993A CN101216993A (en) | 2008-07-09 |
| CN101216993B true CN101216993B (en) | 2011-01-12 |
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| CN109951198B (en) * | 2017-12-20 | 2022-06-07 | 三星电子株式会社 | Wireless communication device performing selective noise filtering and method of operating the same |
| CN110336560A (en) * | 2019-04-26 | 2019-10-15 | 珠海格力电器股份有限公司 | Eliminate the method, apparatus and electric appliance of analog sampling circuit electromagnetic interference in electric appliance |
| CN112056635A (en) * | 2020-10-22 | 2020-12-11 | 凡品思(深圳)科技有限公司 | Method and device for preventing dry burning of electronic cigarette |
| CN112350687A (en) * | 2020-10-29 | 2021-02-09 | 天津飞旋科技有限公司 | Hardware filtering device, method and system |
| CN114280324B (en) * | 2021-12-30 | 2024-04-30 | 上海兰宝传感科技股份有限公司 | High-sensitivity spinning bead ring speed measuring method |
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Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100016, building 2, block M5, No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |
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