CN101196732A - Method and system for monitoring semiconductor production line - Google Patents
Method and system for monitoring semiconductor production line Download PDFInfo
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- CN101196732A CN101196732A CNA2006101191336A CN200610119133A CN101196732A CN 101196732 A CN101196732 A CN 101196732A CN A2006101191336 A CNA2006101191336 A CN A2006101191336A CN 200610119133 A CN200610119133 A CN 200610119133A CN 101196732 A CN101196732 A CN 101196732A
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Abstract
A monitoring method on a semiconductor production line is provided, which comprises: obtaining state information of each semiconductor equipment on the production line; establishing an interlinkage between the state information of the each semiconductor equipment and the related information marking; obtaining the state information of the each semiconductor equipment through recognizing the information marking; the invention also provides a monitoring system on a semiconductor production line, which comprises: a data obtaining device for obtaining state information of each semiconductor equipment on the production line; a data processing device for generating information marking of the state information of the semiconductor equipment on the production line and establishing an interlinkage between the state information and the related information marking. The monitoring method and system on the production line in the invention can monitor the state information problem of each equipment on the whole production line.
Description
Technical field
The present invention relates to technical field of manufacturing semiconductors, the method for supervising and the system of production line during particularly a kind of semiconductor is made.
Background technology
Relate to procedures up to a hundred and multiple devices in the manufacture process of semiconductor devices, particularly along with the semiconductor manufacturing develops to the high integration direction, manufacture process has adopted the pipelining of high integration, and more depends on the equipment of high automation.In the production run, need the resource in the manufacturing works be made full use of by efficient orderly production scheduling, to raise the efficiency and to reduce cost.The patent No. is the dynamic dispatching method that 200510026662.7 Chinese patent discloses a kind of production line, can realize dynamic Real Time Production Schedule by this method, and the various resources during the whole utilization of big limit is produced reduce cost.Yet this needs various semiconductor equipment production run states on the real-time and effective monitoring production line, to reduce the vacant time of equipment and to reduce failure rate.Existing a kind of method for supervising and system to the semiconductor fabrication factory production line is as follows:
As shown in Figure 1, described supervisory system comprises the semiconductor equipment 100 of production line, mail or message server 108, terminal 106.The semiconductor equipment 100 of production line is connected with described server 108 by LAN (Local Area Network), and described terminal 106 is connected with described server 108 by LAN (Local Area Network) or wireless network.Above-mentioned supervisory system is when work, the control computer of described semiconductor equipment 100 self is sent to server 108 with status information, described server 108 is judged the type of described status information, if report to the police or error message, the transmitter unit that described server 108 triggers self is sent to terminal 106 with described warning or error message.There are following defective in above-mentioned supervisory system and method: single, the hysteresis of status information of equipment, and can't in time comprehensive consersion unit status information.
Fig. 2 is existing another kind of supervisory system synoptic diagram.As shown in Figure 2, this supervisory system comprises the semiconductor equipment 200 on the production line, and server 202 and terminal computer 204, described semiconductor equipment 200, server 202 and terminal computer 204 are connected by LAN (Local Area Network).A plurality of sensors are arranged in the semiconductor equipment 200, be sent to the control computer 201 of described semiconductor equipment 200 self in the described sensor monitors semiconductor equipment after each unit (unit) status information, described control computer 201 is sent to server 202 by manufacturing execution system with described information, and generates database.By the described server 202 of described terminal computer 204 visits, access the status information of related semiconductor equipment in server 202 databases, and be sent to terminal computer 204.
There are following defective in above-mentioned method for supervising and system: described terminal computer 204 can only be visited the status information that accesses related semiconductor equipment in an equipment or the department each time, can not call the status information of the semiconductor equipment of many semiconductor equipments or whole production line simultaneously, feasible monitoring and management to equipment in the production line is in a kind of discrete state.
Summary of the invention
Therefore, the object of the present invention is to provide a kind of method for supervising and system of semiconductor production line, can't monitor the problem of status information of each semiconductor equipment of whole production line simultaneously to solve existing production monitoring method and system.
For achieving the above object, the method for supervising of a kind of semiconductor production line provided by the invention comprises:
Obtain the status information of each semiconductor equipment in the production line; The corresponding message identification of generation and described status information, and between described status information and corresponding message identification thereof, set up link; By the identification of described message identification being obtained the status information of described each semiconductor equipment; Wherein, by described link with the state information updating of described semiconductor equipment to corresponding message identification.
The described step of obtaining the status information of each semiconductor equipment in the production line is as follows: the status information of each semiconductor equipment in the production line is sent to manufacturing execution system; Described manufacturing execution system generates the database of semiconductor equipment status information in server.
Described message identification is a kind of or other mark that can be recorded in information carrier and can be identified in numeral, symbol, literal, the icon.
Described icon is answered the different status information of semiconductor equipment with specific colouring information reacting phase.
Described semiconductor equipment comprises the sensing device of a plurality of chambers or component unit, the described chamber of monitoring or component unit status information and is used for the status information of described sensing device monitoring is fed back to the control computer of server.
Described status information comprises the technological parameter of the product that is moving and will move in duty, parameter setting and this semiconductor equipment of sign title, each chamber or component unit of semiconductor equipment.
The present invention also provides a kind of method for supervising of semiconductor production line, comprising: the status information of obtaining each semiconductor equipment in the production line; The corresponding message identification of generation and described status information, and between described status information and corresponding message identification thereof, set up link; By the identification of described message identification being obtained the status information of described each semiconductor equipment; Wherein, by described link with described state information updating to corresponding message identification, and the operational feedback of will be described message identification identification back being taked is to semiconductor equipment accordingly.
Accordingly, the invention provides a kind of supervisory system of semiconductor production line, comprising: data acquisition facility is used for obtaining the status information of each semiconductor equipment of production line; Data processing equipment is used to generate the message identification of described status information, and sets up link between described status information and its corresponding message identification, and described link is used for state information updating with described semiconductor equipment to described message identification.
Described message identification is a kind of or other mark that can be recorded in information carrier and can be identified in numeral, symbol, literal, the icon.
Described icon reacts the different status information of corresponding semiconductor equipment with specific colouring information.
Described supervisory system also comprises input-output system, in order to export the operation information that described message identification and input are taked described message identification identification back.
Described semiconductor equipment comprises the sensing device of a plurality of chambers or component unit, the described chamber of monitoring or component unit status information and is used for the status information of described sensing device monitoring is fed back to the control computer of server.
Described status information comprises the technological parameter of the product that is moving and will move in duty, parameter setting and this semiconductor equipment of sign title, each chamber or component unit of semiconductor equipment.
The present invention also provides a kind of supervisory system of semiconductor production line, comprising: data acquisition facility is used for obtaining the status information of each semiconductor equipment of production line; Data processing equipment, be used to generate the message identification of the status information of the semiconductor equipment on the described production line, and foundation link between described status information and its corresponding message identification, described link is used for the state information updating of described semiconductor equipment to described message identification, and the operational feedback of will be described message identification identification back being taked is to semiconductor equipment accordingly.
Compared with prior art, the present invention has the following advantages:
Production line method for supervising of the present invention at first obtains the status information of semiconductor equipment, generate and the corresponding message identification of described semiconductor equipment status information by data processing equipment then, described message identification can be a kind of or other mark that can be recorded in information carrier and can be identified in numeral, literal, symbol, the icon.Then set up the link of status information He its corresponding state information of described semiconductor equipment.By described link real-time with the state information updating of described semiconductor equipment to described message identification.By can obtain the status information of each semiconductor equipment on the production line to the identification of described message identification.The method for supervising of production line of the present invention can obtain the status information of production line semiconductor-on-insulator equipment simultaneously, thereby can comprehensively monitor the situation of whole production line, and then realize the scheduling of the high efficiency resources of production and manpower, raise the efficiency, vacant and the stand-by period of minimizing equipment, reduce cost.
In addition, monitoring system of the present invention and method also can be checked information such as the technological parameter of details, product of each and the corresponding semiconductor equipment of described message identification and name of product that this semiconductor equipment will carry out, technological parameter step, can also classify, recombinate described message identification, monitor the status information of semiconductor equipment according to different combinations, make it possible in real time the comprehensively situation of monitoring whole production line.
Description of drawings
Fig. 1 and Fig. 2 are the supervisory system synoptic diagram of existing production line;
Fig. 3 is the method for supervising process flow diagram of semiconductor production line of the present invention;
Fig. 4 is the method for supervising synoptic diagram of semiconductor production line of the present invention;
Fig. 5 is the photoetching process semiconductor equipment synoptic diagram of semiconductor production line;
The icon synoptic diagram that Fig. 6 exports for the method for supervising monitoring photoetching process semiconductor equipment shown in Figure 5 of using semiconductor production line of the present invention;
Fig. 7 is the supervisory system synoptic diagram according to the semiconductor production line of the embodiment of the invention.
Embodiment
For above-mentioned purpose of the present invention, feature and advantage can be become apparent more, the specific embodiment of the present invention is described in detail below in conjunction with accompanying drawing.
Fig. 3 is the process flow diagram of the method for supervising of described semiconductor production line.As shown in Figure 3, at first, obtain the status information (S300) of each semiconductor equipment in the production line; In each semiconductor equipment of production line, control computer is arranged, described control computer is sent to manufacturing execution system with the status information of each component unit in the semiconductor equipment, generates the database of equipment semiconductor equipment status information at server by manufacturing execution system.
Generate with described production line in the corresponding message identification of each semiconductor equipment status information, and between the status information of described semiconductor equipment and its corresponding message identification, set up link (S310).By described link can with the status information of each semiconductor equipment on the production line real-time be updated to its corresponding message identification.
By the identification of described message identification being learned the status information (S320) of described each semiconductor equipment.Described message identification can be numeral, symbol, literal, icon or other mark that can be recorded in information carrier and can be identified.
According to embodiment the method for supervising of described semiconductor production line is described in detail below.Semiconductor production will be passed through photoetching (lithography), etching (etch), ion injects (implant), diffusion (diffusion), cmp a series of technologies such as (CMP), each road technology all has corresponding semiconductor equipment, lithographic equipment for example, etching apparatus etc., semiconductor equipment in above-mentioned each technology is connected to server by LAN (Local Area Network), by the manufacturing execution system in the control computer in server and the semiconductor equipment (MES), each semiconductor equipment calls or carries out various processing step set or the technological parameter that has configured in sequence automatically.Simultaneously each semiconductor equipment by sensor monitors self parameter and status information and feed back to MES, MES judges according to the parameter setting scope whether parameter and the status information from each semiconductor equipment receive be normal, and the parameter of moving in each semiconductor equipment together with product generates the database of status information of equipment in server.As shown in Figure 4, lithographic equipment 600, etching apparatus 602, ion implantation device 604, diffusion facilities 606 and chemical-mechanical grinding device 608 are connected to server 610 by LAN (Local Area Network), have a plurality of semiconductor equipments in each road technology, for example in photoetching process, difference according to output has many gluings and exposure sources, and exposure sources has I line exposing machine, deep ultraviolet exposure machine according to the difference of live width, alignment measurement equipment (Overlay), live width measurement equipments (CD SEM) etc. all are connected to server 610 by LAN (Local Area Network) with described equipment, all have a plurality of sensing devices can monitor its duty of equipment separately in each semiconductor equipment.Can call the formula that configured or parameter by each semiconductor equipment of MES system and carry out manufacturing or measurement, and the result is fed back to server 610 generate the status information of equipment databases product.Data processing equipment 620 is connected with described server 610, at first generate and the corresponding message identification of described semiconductor equipment status information in described data processing equipment 620, described message identification can be a kind of or other mark that can be recorded in information carrier and can be identified in numeral, literal, symbol, the icon.Set up the link of status information He its corresponding state information of semiconductor equipment in the described database then.By described link real-time with the state information updating of described semiconductor equipment to described message identification.By can obtain the status information of each semiconductor equipment on the production line to the identification of described message identification.Message identification described in the present embodiment is an icon, generates a plurality of icons by data processing equipment, and each icon is corresponding with the semiconductor equipment in the production line.The data processing equipment visit is described to be equipped with state information database, and will be encapsulated into from the status information of same semiconductor equipment among the module, and gives this module one reference address.The status information in this module is visited in the address of the module that generates by the semiconductor equipment status information, be sent to corresponding icon, and be converted into the characteristic information of the specific different conditions distinguished information, for example, colouring information, the different colouring information of icon reacts the different conditions information of its corresponding semiconductor equipment.By real-time calling described a plurality of module and be sent to corresponding icon, the status information of learning semiconductor equipment that can be real-time.As seen, corresponding and this status information of real time reaction of status information that described icon is different with the semiconductor equipment of production line, for example, drift has taken place in the parameter in the some chambers in a certain semiconductor equipment, sensing device can send warning message, this warning message is transferred into the database of server 610, the data processing equipment 620 described databases of visit also are packaged into a module with this warning message together with the out of Memory of this semiconductor equipment, give described module one reference address, visit is called the information in the described module and is converted thereof into the icon that specific colouring information is sent to described semiconductor equipment correspondence, described icon is output by input-output unit, learns the warning message of corresponding semiconductor equipment by discerning different colouring informations.On macroscopic view, the status information of the described equipment on the whole semiconductor production line can be mapped with its corresponding icon.By the identification of described icon being monitored the situation on the whole semiconductor production line.Described icon can be put at output unit by the physical location of different departments, distinct device on the production line, and making to come into plain view monitors the situation of whole production line, thereby carries out the rational management of product and manpower.Improve resource utilization.With the photoetching process is example, as shown in Figure 5, multiple devices is arranged in the photoetching process: I line exposing equipment (I-Line) 700,702,704,706,708; Deep ultraviolet exposure sources (DUV) 710,712,714,716,718; Alignment measurement equipment (OVL) 720,722; Live width measurement equipment (CDSEM) 724,726; Back monitoring equipment (ADI) 730,732,734 develops.The said equipment is put by position shown in Figure 5 in patterned area, a plurality of products is arranged in operation on each equipment.I line exposing equipment 700 is made up of automatic double surface gluer 700a and exposure machine 700b, and described automatic double surface gluer 700a has four SMIF:701a, 701b, 701c, 701d.By the semiconductor production line method for supervising described as Fig. 4 with the semiconductor equipment of above-mentioned photoetching process be connected to server and by data processing equipment with as described in the technological parameter Info Link of the semiconductor equipment status information of photoetching process and product to corresponding icon, by output unit described icon is exported then.Fig. 6 is the synoptic diagram of the corresponding icon of semiconductor equipment of described output unit output, as shown in Figure 6, each icon is for the status information of its corresponding semiconductor equipment, also corresponding to its corresponding semiconductor equipment component unit, for example 701a ' is corresponding to SMIF 701a for the different piece of each icon.The physical location of icon each self-corresponding semiconductor equipment according to it of output is put.The status information of each component unit of semiconductor equipment of whole patterned area all can show by the different colours information of its corresponding icon.Also can operate described icon by output unit, for example by amplifying the details that to check the corresponding semiconductor equipment of each icon, the batch number that the technological parameter of product and this semiconductor equipment will carry out, technological parameter, information such as step, the method for supervising of above-mentioned semiconductor equipment can be applied to whole production line simultaneously, monitor the situation of whole production line simultaneously, and can refresh with 20 to 120 seconds cycle, make it possible to comprehensively monitor in real time the situation of whole production line, thereby carry out the scheduling of the high efficiency resources of production and manpower, raise the efficiency, vacant and the stand-by period of minimizing equipment, reduce cost.In addition, by described link, can be with the extremely corresponding semiconductor equipment of operational feedback that described message identification identification back is taked.
Accordingly, the present invention also provides a kind of supervisory system of semiconductor production line.The supervisory system of semiconductor production line of the present invention comprises: data acquisition facility and data processing equipment, and described data acquisition facility is used for obtaining the status information of each semiconductor equipment of production line; Described data processing equipment is used to generate the message identification of the status information of the semiconductor equipment on the described production line, and sets up link between described status information and its corresponding message identification.Semiconductor equipment on the production line has the sensing device and the control computer of a plurality of chambers or component unit, the described chamber of monitoring or component unit status information.When product is arranged on the described semiconductor equipment in operation, described sensing device feeds back to control computer with the work state information of each chamber or component unit in this equipment, and control computer is sent to server with the parameter setting of described status information and described semiconductor equipment, the information such as technological parameter of product.Data processing equipment generates the message identification of semiconductor equipment status information and set up link between described status information and its corresponding message identification, can be with the extremely corresponding message identification of the state information updating of described semiconductor equipment by described link.
Fig. 7 is the supervisory system synoptic diagram according to the semiconductor production line of the embodiment of the invention.As shown in Figure 7, semiconductor equipment 400 is arranged on the semiconductor production line, 410 and 420, four chambers 402,404 are arranged in the described semiconductor equipment 400,406 and 408, each chamber has identical construction and function, and described chamber 402 has sensing device 402a, and described sensor 402a is used for surveying duty, the parameter setting of chamber 402, and the information such as lot number of the product in this chamber, then described information is sent to control computer 405.Accordingly, chamber 404,406 and 408 also has corresponding sensing device and is used for monitor state information, and described status information is sent to the control corresponding computing machine.Control computer in each semiconductor equipment status information of semiconductor equipment separately is sent to server 430, generates the semiconductor equipment state information database in described server 430.Described server 430 and semiconductor equipment 400,420 are connected by LAN (Local Area Network) with 430.Data processing equipment 500 is connected with server 430 by LAN (Local Area Network), in described data processing equipment 500, generate and semiconductor equipment 400, the duty of each chamber, parameter such as are provided with at the corresponding message identification of information in 410 and 420, and described message identification can be a kind of or other mark that can be recorded in information carrier and can be identified in numeral, literal, symbol, the icon.Set up the link of status information He its corresponding state information of semiconductor equipment in the described database then.By described link real-time with the state information updating of described semiconductor equipment to described message identification.By can obtain the status information of each semiconductor equipment on the production line to the identification of described message identification.Message identification described in the present embodiment is an icon, generates a plurality of icons by described data processing equipment 500, and each icon is corresponding with the semiconductor equipment in the production line.Described data processing equipment 500 visits are described to be equipped with state information database, and will be encapsulated into from the status information of same semiconductor equipment among the module, and gives this module one reference address.The status information in this module is visited in the address of the module that generates by the semiconductor equipment status information, be sent to corresponding icon, and be converted into the characteristic information of the specific different conditions distinguished information, for example, colouring information, the different colouring information of icon reacts the different conditions information of its corresponding semiconductor equipment.By real-time calling described a plurality of module and be sent to corresponding icon, the status information of learning semiconductor equipment that can be real-time.Supervisory system of the present invention also comprises an input-output device 530, described input-output unit 530 is used to export described icon and input is discerned the operation information that the back is taked to described icon information, and this operation information can be sent to described semiconductor equipment by the status information of described semiconductor equipment and the link between the corresponding message identification.Input-output unit 530 as shown in figure 10, described icon 400a, 410a, 420a correspond respectively to the status information of the semiconductor equipment 400,410,420 on the production line; 402b among the icon 400a, 404b, 406b, 408b correspond respectively to the chamber 402,404,406,408 in the semiconductor equipment 400.By the 402b among the icon 400a, 404b, 406b, the different colours of 408b can react the work state information of each chamber in its corresponding semiconductor equipment 400, for example, leave unused (idle), run goods (run), safeguard states such as (maintenance).Can amplify described icon by input operation and operation such as to dwindle, can also check that the technological parameter of product of the semiconductor equipment middle chamber of this icon correspondence is provided with etc.Chamber in the corresponding semiconductor equipment 410,420 is also corresponding to icon 410a, among the 420a.Can open-and-shutly monitor the state of all devices by input-output unit 530, be convenient to carry out production scheduling from macroscopic view.
Though the present invention with preferred embodiment openly as above; but it is not to be used for limiting the present invention; any those skilled in the art without departing from the spirit and scope of the present invention; can make possible change and modification, so protection scope of the present invention should be as the criterion with the scope that claim of the present invention was defined.
Claims (14)
1. the method for supervising of a semiconductor production line comprises:
Obtain the status information of each semiconductor equipment in the production line;
The corresponding message identification of generation and described status information, and between described status information and corresponding message identification thereof, set up link;
By the identification of described message identification being obtained the status information of described each semiconductor equipment;
Wherein, by described link with the state information updating of described semiconductor equipment to corresponding message identification.
2. the method for supervising of semiconductor production line as claimed in claim 1 is characterized in that: the described step of obtaining the status information of each semiconductor equipment in the production line is as follows:
The status information of each semiconductor equipment in the production line is sent to manufacturing execution system;
Described manufacturing execution system generates the database of semiconductor equipment status information in server.
3. the method for supervising of semiconductor production line as claimed in claim 1 is characterized in that: described message identification can be recorded in mark that information carrier also can be identified for a kind of in numeral, symbol, literal, the icon or other.
4. the method for supervising of semiconductor production line as claimed in claim 3, it is characterized in that: described icon is answered the different status information of semiconductor equipment with specific colouring information reacting phase.
5. the method for supervising of semiconductor production line as claimed in claim 1 is characterized in that: described semiconductor equipment comprises the sensing device of a plurality of chambers or component unit, the described chamber of monitoring or component unit status information and is used for the status information of described sensing device monitoring is fed back to the control computer of server.
6. the method for supervising of semiconductor production line as claimed in claim 1 or 2 is characterized in that: described status information comprises the technological parameter of the product that is moving and will move in duty, parameter setting and this semiconductor equipment of sign title, each chamber or component unit of semiconductor equipment.
7. the method for supervising of a semiconductor production line comprises:
Obtain the status information of each semiconductor equipment in the production line;
The corresponding message identification of generation and described status information, and between described status information and corresponding message identification thereof, set up link;
By the identification of described message identification being obtained the status information of described each semiconductor equipment;
Wherein, by described link with described state information updating to corresponding message identification, and the operational feedback of will be described message identification identification back being taked is to semiconductor equipment accordingly.
8. the supervisory system of a semiconductor production line comprises:
Data acquisition facility is used for obtaining the status information of each semiconductor equipment of production line;
Data processing equipment is used to generate the message identification of described status information, and sets up link between described status information and its corresponding message identification, and described link is used for state information updating with described semiconductor equipment to described message identification.
9. the supervisory system of semiconductor production line as claimed in claim 8 is characterized in that: described message identification can be recorded in mark that information carrier also can be identified for a kind of in numeral, symbol, literal, the icon or other.
10. the supervisory system of semiconductor production line as claimed in claim 9, it is characterized in that: described icon reacts the different status information of corresponding semiconductor equipment with specific colouring information.
11. the supervisory system of semiconductor production line as claimed in claim 8 is characterized in that: described supervisory system also comprises input-output system, in order to export the operation information that described message identification and input are taked described message identification identification back.
12. the supervisory system of semiconductor production line as claimed in claim 8 is characterized in that: described semiconductor equipment comprises the sensing device of a plurality of chambers or component unit, the described chamber of monitoring or component unit status information and is used for the status information of described sensing device monitoring is fed back to the control computer of server.
13. the supervisory system of semiconductor production line as claimed in claim 8 is characterized in that: described status information comprises the technological parameter of the product that is moving and will move in duty, parameter setting and this semiconductor equipment of sign title, each chamber or component unit of semiconductor equipment.
14. the supervisory system of a semiconductor production line comprises:
Data acquisition facility is used for obtaining the status information of each semiconductor equipment of production line;
Data processing equipment, be used to generate the message identification of the status information of the semiconductor equipment on the described production line, and foundation link between described status information and its corresponding message identification, described link is used for the state information updating of described semiconductor equipment to described message identification, and the operational feedback of will be described message identification identification back being taked is to semiconductor equipment accordingly.
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| CNA2006101191336A CN101196732A (en) | 2006-12-05 | 2006-12-05 | Method and system for monitoring semiconductor production line |
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| CNA2006101191336A CN101196732A (en) | 2006-12-05 | 2006-12-05 | Method and system for monitoring semiconductor production line |
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| CN101620426B (en) * | 2008-07-02 | 2012-08-29 | 鸿富锦精密工业（深圳）有限公司 | Regional machine monitor and management method and computer system therefor |
| CN101650533B (en) * | 2008-08-11 | 2013-04-17 | 中芯国际集成电路制造(上海)有限公司 | Method and system for monitoring photolithographic process |
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| CN105094069A (en) * | 2014-05-15 | 2015-11-25 | 中芯国际集成电路制造(上海)有限公司 | Process control method and system in manufacturing process of semiconductor device |
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| CN103645692A (en) * | 2013-11-26 | 2014-03-19 | 上海华力微电子有限公司 | Wafer operation control system |
| CN105094069A (en) * | 2014-05-15 | 2015-11-25 | 中芯国际集成电路制造(上海)有限公司 | Process control method and system in manufacturing process of semiconductor device |
| CN105094069B (en) * | 2014-05-15 | 2017-12-29 | 中芯国际集成电路制造(上海)有限公司 | Process control method and system in fabrication of semiconductor device |
| CN106591793A (en) * | 2015-10-16 | 2017-04-26 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Substrate collecting and placing method |
| CN106591793B (en) * | 2015-10-16 | 2019-02-19 | 北京北方华创微电子装备有限公司 | A kind of folding and unfolding piece method |
| CN108345275A (en) * | 2017-01-25 | 2018-07-31 | 中芯国际集成电路制造(上海)有限公司 | Equipment monitoring system and apparatus monitoring method |
| CN107976979A (en) * | 2017-11-23 | 2018-05-01 | 广东惠利普路桥信息工程有限公司 | A kind of equipment management system based on MES |
| CN107704935A (en) * | 2017-11-23 | 2018-02-16 | 广东惠利普路桥信息工程有限公司 | A kind of shop equipment system for tracing and managing |
| CN107942986A (en) * | 2017-12-21 | 2018-04-20 | 东莞科耀机电设备有限公司 | A kind of production monitoring method |
| CN109696894A (en) * | 2018-12-30 | 2019-04-30 | 联想(北京)有限公司 | Production line state judging method and device |
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