CN101192361A - High positioning accuracy image detection device for two-D display panel and its method - Google Patents
High positioning accuracy image detection device for two-D display panel and its method Download PDFInfo
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- CN101192361A CN101192361A CNA2006101457838A CN200610145783A CN101192361A CN 101192361 A CN101192361 A CN 101192361A CN A2006101457838 A CNA2006101457838 A CN A2006101457838A CN 200610145783 A CN200610145783 A CN 200610145783A CN 101192361 A CN101192361 A CN 101192361A
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Abstract
The invention provides a method and a device with a high positioning and high accuracy image detection function applicable to planar display panel. A complex positioning marks and a to-be-detected panel are arranged on the detection platform of an image detection device. The straight line fabricated by positioning marks in groups of two superposes the to-be-detected panel. When complex image of the to-be-detected panel on the detection platform are obtained, the images then bear the positioning mark image, and thus the positioning marks in groups of two not only can be used as the separation line of the overlapped area in the neighboring images, but also can delete accurately the overlapped region of the neighboring images when the complete image of the to-be-detected panel is reformed. Therefore, problems of repeated analysis or being unable to detect are avoided when defect analysis is carried out later on.
Description
Technical field
The present invention is a kind of demonstration pick-up unit, refers to a kind of processing procedure defective that is applied to the detection plane display panel especially, has high precision and high efficiency image detection device.
Background technology
Because semiconductor product is quite small (with single line footpath about the hundreds of micron grade) in each processing procedure formed thereby structure, can't be with its defective of visual check of the mankind, add and during processing procedure, repeatedly to confirm whether defectiveness of different fabrication steps, be to have the digitized video pick-up unit in all with present panel manufacturing plant, see also shown in Figure 5ly, this digitized video pick-up unit (50) includes:
One test platform (51) is placed on it for measured panel (60), and wherein this measured panel is made up of a plurality of panel unit;
Two axial brake devices (52) are to be arranged at this test platform (51) side, move in horizontal direction to drive this test platform (51);
One main control system (53) is to be electrically connected to this axial brake device (52), to control displacement and the direction that this axial brake device (52) moves;
One video camera (not shown) is to be positioned on this test platform (51), and is electrically connected with this main control system (53), controls it by this main control system (53) and takes action and its filmed image of reception/storage.
Above-mentioned axial brake device (52) is the linear linear moving apparatus of mainly being made up of servo motor (521), control the rotating speed of this servo motor (521) by main control system (53), adjustment is to the displacement of this test platform (51), so main control system (53) is promptly automatically controlled test platform (51) and is moved with the displacement of equivalent, image for this video camera camera plane display panel zones of different, as shown in Figure 6A, the image of the actual measured panel of correspondence of being recombinated out again, shown in Fig. 6 B, and then carry out the defective compare of analysis, to reach the function of automatic detection.
But aforesaid digitized video pick-up unit has image and detects coarse problem, promptly when main control system is controlled the linear motion device of being formed with servo motor, the displacement error of its accumulation may be up to 1000 microns, but when this main control system is made image reorganization program in computing, only can adjust the displacement that axial brake device drives according to control, foundation as its adjacent two zones of recombinating, relation because of cumulative errors, so have excessive overlapping region, or there is not a complete overlapping areas, and make that the image and the actual panel that restructure at last are inconsistent, shown in Fig. 6 B, thus, when supposing to detect the defect size allow and having 200 microns approximately, main control system then has the problem of accuracy error when the image after the reorganization is carried out defect analysis, cause defective can be repeated to analyze and maybe can't detect, influence follow-up processing procedure and yield.So, being used the detection platform of the linear linear motion device that contains servo motor at present, still non-the best needs further improvement.
Summary of the invention
Main goal of the invention of the present invention provides a kind of image detection device that is applied to two-d display panel, has effects such as high contraposition accuracy and high-level efficiency.
Desire to reach the employed major technique means of above-mentioned purpose and be and make that this image detection device that is applied to two-d display panel is to include a detection platform, an axial brake device, a main control system and a video camera equally; Wherein be that the positioning mark that indicates anchor point is arranged on this detection platform, making main control system see through video camera obtains when respectively distinguishing filmed image, the overlapping region that can cut apart adjacent image by the straight line that one group of positioning mark is in twos fabricated exactly, and each image made up; Thus, the main control system of image detection device of the present invention is obtained the image of a complete corresponding measured panel before can carrying out the defective analysis, allow the accuracy rate of defective analysis result and recall ratio effectively promote.
Also positioning mark can be set thereon on the measured panel on the test platform of image detection device of the present invention, can allow main control system see through the image that video camera is obtained positioning mark equally, and then use as the defects detection of judging two-d display panel.
Description of drawings
Fig. 1: look synoptic diagram in the present invention's first preferred embodiment, but do not comprise video camera.
Fig. 2: the side view that is Fig. 1.
Fig. 3: look synoptic diagram in the present invention's second preferred embodiment, but do not comprise video camera.
Fig. 4 A to C: be to cut apart and make up synoptic diagram with the image therebetween that image processing is carried out in second preferred embodiment.
Fig. 5: look synoptic diagram on the existing image detection device.
Fig. 6 A to B: be the combination of the image therebetween synoptic diagram that Fig. 5 carries out image processing.
The primary clustering symbol description
(10) image detection device (10a) image detection device
(11) test platform (12) axial brake device
(121) servo motor (13) main control system
(14) video camera (20) measured panel
(30) positioning mark (50) image detection device
(51) test platform (52) axial brake device
(521) servo motor (53) main control system
(60) measured panel
(61a)～(61e) overlapping region
Embodiment
At first seeing also Figure 1 and Figure 2, is to be image detection device (10) first preferred embodiments of the present invention, and it includes:
One test platform (11) is placed on it for measured panel (20);
Plural number positioning mark (30), be to be arranged on this test platform (11), straight line (L) that wherein a pair of in twos positioning mark (30) is constituted is as the usefulness of judging the adjacent area image overlap, shown in Fig. 4 A, again each positioning mark (30) but be reflectorized material or luminescent material;
Two axial brake devices (12) are the dual-sides that is arranged at this test platform (11), move to drive the horizontal direction that this test platform (11) is X or Y direction, and this axial brake device (12) can be a kind of linear motion device that comprises a servo motor (121);
One main control system (13) is built-in image processing program and motor driven program, and is electrically connected to this servo motor (121), to control displacement and the direction that this axial brake device (12) moves;
One video camera (not shown) is the top that is positioned at this test platform (11), and is electrically connected with this main control system (13), controls it by this main control system (13) and takes action and its filmed image of reception/storage.
Please cooperate shown in Figure 3, it is another preferred embodiment for image detection device of the present invention (10a), its most structure is same as the previously described embodiments, only should plural number positioning mark (30) but be that direct forming is in measured panel (20), the a pair of equally in twos straight line of fabricating (L), as the usefulness of judging the adjacent area image overlap, get the cut-off rule of each area image of measured panel (20) to judge shooting as main control system.Because this preferred embodiment is to add the making of positioning mark (30) in measured panel (20) processing procedure, so can adopt chromium (Cr), aluminium (Al), aluminium alloy (AlNd), silver (Ag), silver-platinum alloy (AP), the nickel (Ni) etc. can the reflective and common material that reaches in the two-d display panel processing procedure.
Please cooperate and consult shown in Fig. 4 A, be that this main control system receives video camera to platform shooting to be measured on the above-mentioned test platform, and six images that photograph (number is coverage and the mode that depends on video camera, be not certain), because video camera is the last direction that is positioned at platform to be measured, so no matter positioning mark is arranged on the test platform or measured panel, all have the image of positioning mark via each obtained image of this main control system after the video camera shooting, thus, the straight line (L) that can fabricate by a pair of positioning mark in twos, as the overlapping scope of judging two adjacent imagery zones (61a～61e), be with, this main control system with virtual line can judge exactly the overlapping region (61a～61e), in and deletion to the overlapping region (behind the 61a～61e), shown in Fig. 4 B, form unification and open the picture of complete corresponding measured panel, shown in Fig. 4 C, carry out the defective compare of analysis again, improve the efficient and detection accuracy rate and recall ratio analyzed.
As shown in the above description, the method of the high accurate positioning degree of image analysing computer device of the present invention is to utilize plural positioning mark to be set in test platform or treat on the side panel, straight line and measured panel that a pair of in twos positioning mark of order is fabricated are overlapping, make each imagery zone that photographs comprise at least one group of positioning mark in twos.Be with, when main control system Control Shaft device moves to a fixed point by test platform, promptly controlling video camera takes, to obtain the plural area image of finishing measured panel, positioning mark position by each area image, can distinguish the overlapped part of adjacent area image exactly, improve the accuracy that detects.
Though but the present invention discloses in previous embodiment; but be not limited in content mentioned in the previous embodiment; for example axial brake device (12) only be provided with one with control X or Y direction one of them; or positioning mark (30) can be various shape; differentiate the position when making adjacent positioning mark (30) shape difference in order to the reorganization image; any variation and modification that all the other are done without departing from the spirit and scope of the present invention all belong to protection scope of the present invention.
Claims (9)
1. high accurate positioning degree image detection device that is applied to two-d display panel is characterized in that including:
One test platform is placed on it for a measured panel;
The plural number positioning mark is the both sides that are arranged on this test platform and are positioned at this measured panel;
At least one axial brake device is the side that is arranged at this test platform, moves in horizontal direction to drive this test platform;
One main control system is electrically connected to this servo motor, to control displacement and the direction that this axial brake device moves; And
One video camera is the top that is positioned at this test platform, and is electrically connected with this main control system, controls it by this main control system and takes action and its filmed image of reception/storage;
Wherein, this video camera is taken the measured panel that is arranged on this test platform, to obtain the area image of a plurality of these measured panel, respectively this area image is to include at least one pair of corresponding positioning mark image, this main control system by this to the virtual line that corresponding positioning mark constituted, as the usefulness of judging the adjacent area image overlap area.
2. the high accurate positioning degree image detection device that is applied to two-d display panel as claimed in claim 1 is characterized in that: but each positioning mark is a reflectorized material.
3. the high accurate positioning degree image detection device that is applied to two-d display panel as claimed in claim 1, it is characterized in that: each positioning mark is a luminescent material.
4. high accurate positioning degree image detection device that is applied to two-d display panel is characterized in that including:
One test platform;
One two-d display panel is to be arranged on this test platform;
The plural number positioning mark is to be formed on this two-d display panel;
At least one axial brake device is the side that is arranged at this test platform, moves in horizontal direction to drive this test platform;
One main control system, and be electrically connected to this servo motor, to control displacement and the direction that this axial brake device moves; And
One video camera is the top that is positioned at this test platform, and is electrically connected with this main control system, controls it by this main control system and takes action and its filmed image of reception/storage;
Wherein, this video camera is taken the measured panel that is arranged on this test platform, to get the area image of a plurality of these measured panel, respectively this area image is to include at least one pair of corresponding positioning mark image, this main control system by this to the virtual line that corresponding positioning mark constituted, as the usefulness of judging the adjacent area image overlap area.
5. as being applied to the high accurate positioning degree image detection device of two-d display panel as described in the claim 4, it is characterized in that: but each positioning mark is a reflectorized material.
6. as being applied to the high accurate positioning degree image detection device of two-d display panel as described in the claim 4, it is characterized in that: this reflectorized material is to be chromium, aluminium, aluminium alloy, silver, silver-platinum alloy, nickel.
7. high accurate positioning degree method that improves image detection device is to be applied to it is characterized in that including as claim 1 or 4 described image detection devices:
Plural positioning mark is provided;
Make one group in twos of positioning mark, to fabricate in line;
The image overlap of straight line and measured panel is fabricated in order, as judging plural area image overlapping areas; And
Non-overlapping Domain is carried out the image processing of defective compare of analysis.
8. the high accurate positioning degree method of raising image detection device as claimed in claim 7 is characterized in that: but each positioning mark is reflectorized material or luminescent material.
9. the high accurate positioning degree method of raising image detection device as claimed in claim 8 is characterized in that: this reflectorized material is to be chromium, aluminium, aluminium alloy, silver, silver-platinum alloy, nickel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006101457838A CN100541566C (en) | 2006-11-21 | 2006-11-21 | Be applied to the high accurate positioning degree image detection device and the method thereof of two-d display panel |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2006101457838A CN100541566C (en) | 2006-11-21 | 2006-11-21 | Be applied to the high accurate positioning degree image detection device and the method thereof of two-d display panel |
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| CN101192361A true CN101192361A (en) | 2008-06-04 |
| CN100541566C CN100541566C (en) | 2009-09-16 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106679570A (en) * | 2017-02-23 | 2017-05-17 | 苏州坤镥光电科技有限公司 | OLED panel display industry large-sized ultra-precision full-automatic coordinate measurement device |
| WO2019047005A1 (en) * | 2017-09-05 | 2019-03-14 | 深圳市柔宇科技有限公司 | Alignment device and testing apparatus |
| CN110161729A (en) * | 2019-05-17 | 2019-08-23 | 深圳市华星光电半导体显示技术有限公司 | Display panel test method and system |
| CN110277043A (en) * | 2019-07-01 | 2019-09-24 | 浙江大学昆山创新中心 | The assistant images splicing system and method for optical characteristics detection based on more microscope groups |
| CN113916511A (en) * | 2021-11-29 | 2022-01-11 | Tcl华星光电技术有限公司 | Fault detection system and fault detection method |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101865860A (en) * | 2010-03-19 | 2010-10-20 | 华映视讯（吴江）有限公司 | Macroscopic test machine and related positioning method thereof with addressing function |
| TWI687672B (en) * | 2017-08-11 | 2020-03-11 | 菱光科技股份有限公司 | Optical inspection system and image processing method thereof |
-
2006
- 2006-11-21 CN CNB2006101457838A patent/CN100541566C/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106679570A (en) * | 2017-02-23 | 2017-05-17 | 苏州坤镥光电科技有限公司 | OLED panel display industry large-sized ultra-precision full-automatic coordinate measurement device |
| WO2019047005A1 (en) * | 2017-09-05 | 2019-03-14 | 深圳市柔宇科技有限公司 | Alignment device and testing apparatus |
| CN110709982A (en) * | 2017-09-05 | 2020-01-17 | 深圳市柔宇科技有限公司 | Alignment device and test equipment |
| CN110161729A (en) * | 2019-05-17 | 2019-08-23 | 深圳市华星光电半导体显示技术有限公司 | Display panel test method and system |
| CN110161729B (en) * | 2019-05-17 | 2021-08-03 | 深圳市华星光电半导体显示技术有限公司 | Display panel testing method and system |
| CN110277043A (en) * | 2019-07-01 | 2019-09-24 | 浙江大学昆山创新中心 | The assistant images splicing system and method for optical characteristics detection based on more microscope groups |
| CN113916511A (en) * | 2021-11-29 | 2022-01-11 | Tcl华星光电技术有限公司 | Fault detection system and fault detection method |
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| CN100541566C (en) | 2009-09-16 |
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