CN101187729A - Light interference type display panel color-variable pixel unit - Google Patents
Light interference type display panel color-variable pixel unit Download PDFInfo
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- CN101187729A CN101187729A CNA2007100976485A CN200710097648A CN101187729A CN 101187729 A CN101187729 A CN 101187729A CN A2007100976485 A CNA2007100976485 A CN A2007100976485A CN 200710097648 A CN200710097648 A CN 200710097648A CN 101187729 A CN101187729 A CN 101187729A
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Abstract
The invention relates to a color changeable pixel unit of a light interfering type displaying panel, which comprises a first electrode, a second electrode, a movable electrode which is arranged in parallel with the first electrode and a plurality of supports which are located between the first electrode and the second electrode, wherein the deforming restoring force of the second electrode can be adjusted through changing the distributing density of the supports to increase the deforming restoring force of a light reflecting electrode. When the distance between the supports is shortened or the distributing density is increased, the unit area dependent variable of the light reflecting electrode is increased relatively, stress which is produced by the light reflecting electrode under the effects of external force can be increased along, and thereby when the outer force disappears, increased stress enables the light reflecting electrode to restore to original status smoothly.
Description
Technical field
The present invention relates to a kind of light interference type display panel, relate in particular to a kind of color-variable pixel unit of light interference type display panel.
Background technology
Flat-panel screens is owing to have little, the lightweight characteristic of volume, at the Portable display device, and very advantageous in the monitor market of using, little space.Flat-panel screens is now removed LCD (LiquidCrystal Display, LCD), organic electric exciting light-emitting diode (Organic Electro-LuminescentDisplay, OLED) and plasma display (Plasma Display Panel, PDP) or the like outside, a kind of plane display mode of light interference type that utilizes is suggested.
This display is formed by light interference type color-variable pixel unit array, its characteristic has low electric power power consumption, rapid answer (Response Time) and bistable state (Bi-Stable) characteristic in itself, the panel of display will be can be applicable to, particularly in the application of Portable (Portable) product, for example mobile phone (Mobile Phone), PDA(Personal Digital Assistant), portable computer (Portable Computer) or the like.
See also the 5th, 835, No. 255 patents of the U.S., this patent has disclosed the adjustment assembly (Arrayof Modulation) of a visible light, is a color-variable pixel unit, is used as the usefulness of flat-panel screens.See also Fig. 1, Fig. 1 is the diagrammatic cross-section of existing color-variable pixel unit.Each color-variable pixel unit 100 comprises twice wall (Wall) 102 and 104, and 102,104 on twice wall is supported by stilt 106 and forms a chamber (Cavity) 108.The distance that the twice wall is 102,104, just the height of chamber 108 is D.Wall 102 is a smooth incident electrode, has absorptivity, but the absorption portion visible light.104 on wall is a smooth reflecting electrode, utilizes driven can make it produce deformation.
Usually utilize the incident light source of white light as this color-variable pixel unit 100, the light that white light comprises various different wave lengths in the visible light spectrum scope (Wave Length represents with λ) is blended together.When incident light passes wall 102 and when entering in the chamber 108, only has the incident light of coincidence formula 1.1 medium wavelengths restriction to produce constructive interference and the output that is reflected in cavity 108, wherein N is a natural number.In other words,
2D＝Nλ
1 (1.1)
When the height D of chamber 108 satisfies incident light half-wavelength (λ
1During/2) integral multiple, can make this lambda1-wavelength λ
1In this chamber 108, produce constructive interference, and export this wavelength X
1Reflected light.At this moment, observer's eyes are observed along the direction of incident light incident wall 102, can see that wavelength is λ
1Reflected light, therefore, color-variable pixel unit 100 is in "open" state.
Fig. 2 is the diagrammatic cross-section of color-variable pixel unit 100 after adding voltage among Fig. 1.Please refer to Fig. 2, under the driving of voltage, wall 104 can produce deformation because of electrostatic attraction, sinks to the direction of wall 102.At this moment, the distance that the twice wall is 102,104, just the height of chamber 108 is d, and this d can equal zero.
That is to say that the D in the formula 1.1 will replace with d, in the wavelength of all light, the wavelength (λ of coincidence formula 1.1 is only arranged in the incident light
2) can in cavity 108, produce constructive interference, the reflection of process wall 104 penetrates wall 102 and exports.In this color-variable pixel unit 100, it is λ that wall 102 is designed to wavelength
2Light have higher absorptivity, so all light in the incident light are all by filtering, the observer for observing along the direction of incident light incident wall 102 will can not see that any light is reflected out.Therefore, this moment color-variable pixel unit 100 is in "off" state.
As mentioned above, under the driving of voltage, wall 104 can produce deformation because of electrostatic attraction, sinks to the direction of wall 102, makes this color-variable pixel unit 100 switch to "off" state by "open" state.And when color-variable pixel unit 100 will switch to "open" state by "off" state, then must remove earlier in order to drive the voltage of wall 104 deformation, then, deformation restoring force own paddles one's own canoe, the wall 104 that loses the electrostatic attraction effect can revert to the original state as Fig. 1, makes this color-variable pixel unit 100 present a "open" state.
Yet, when utilizing the bigger metallic film of membrane stress to make wall 104, the time regular meeting because its membrane stress is excessive, and the problem that causes this metallic film in coating process or subsequent manufacturing processes, to peel off.And, also can and then have influence on the performance of its fiduciary level for the adjustment of wall 104.
In summary, need a kind of color-variable pixel unit, the color-variable pixel unit that can utilize the little metallic film manufacturing of membrane stress to have high deformation restoring force, above-mentioned metallic film peels off and the problem of fiduciary level to improve.
Summary of the invention
At above-mentioned defective, fundamental purpose of the present invention is, a kind of color-variable pixel unit of light interference type display panel is provided, and above-mentioned metallic film peels off and the problem of fiduciary level to improve.
Another object of the present invention is to, a kind of color-variable pixel unit of light interference type display panel is provided, the color-variable pixel unit that can select the metallic film manufacturing of low membrane stress to have high deformation restoring force.
Another purpose of the present invention is, a kind of color-variable pixel unit of light interference type display panel is provided, and adjusts the wherein distribution density of stilt, to improve the wherein unit area deformation quantity of light reflecting electrode.
According to above-mentioned purpose of the present invention, a kind of color-variable pixel unit of light interference type display panel is proposed, comprise at least: one first electrode; One second electrode is a movable electrode, and becomes to be arranged in parallel approximately with this first electrode; And a plurality of stilts, between this first electrode and this second electrode, wherein adjust the deformation restoring force of this second electrode by the distribution density that changes these stilts.
The spacing of the present invention by changing the stilt in the color-variable pixel unit with and the density that distributes, to improve the deformation restoring force of light reflecting electrode wherein.When the hypotelorism of stilt or distribution density improved, the unit area dependent variable of light reflecting electrode also improved relatively, and this time reflecting electrode is subjected to the external force effect and the stress that produces also increases thereupon.Therefore, after external force disappeared, the stress of this increase just can make the light reflecting electrode successfully return to original state.
According to a preferred embodiment of the present invention, stilt is a plurality of support columns, has the gap between support column and another support column, and forms array shape arrangement and cross a zone of action.The scope of the distribution density of this support column is between every square millimeter 225 to every square millimeter 2500.According to another preferred embodiment of the present invention, the preferred range of the distribution density of this support column is between every square millimeter 400 to every square millimeter 2500.
The material of stilt generally can the usability luminescent material in the present invention, for example photoresistance, or the polymeric material of non-sensitization, for example polyester or poly-vinegar or the like.According to another preferred embodiment of the present invention, be applicable in the present invention as the material that forms stilt to comprise positive photoresistance, negative photoresistance, various polymkeric substance, for example, acrylic (Acrylic) resin, epoxy resin or the like.Change the distribution density of the stilt in the variable pixel components, can adjust the deformation restoring force of light reflecting electrode significantly, make variable pixel components of the present invention can utilize the little metallic film of membrane stress to be used as the light reflecting electrode, and avoid prior art in order to reach high deformation restoring force, and the metallic film that is caused when using the big metallic film of membrane stress peels off and the problem of fiduciary level.
In addition, the present invention also can reduce in order to take into account the research and development time and the manufacturing cost of the big and incrust metallic film of membrane stress, uses the present invention and cooperates existing and low-cost metallic film can obtain enough deformation restoring forces and manipulates for color-variable pixel unit.
Brief Description Of Drawings
Below in conjunction with accompanying drawing,, will make technical scheme of the present invention and other beneficial effects apparent by detailed description to preferred embodiment of the present invention.
In the accompanying drawing,
Fig. 1 is the diagrammatic cross-section of existing color-variable pixel unit;
Fig. 2 is the diagrammatic cross-section of color-variable pixel unit after adding voltage among Fig. 1;
Fig. 3 is the vertical view of the color-variable pixel unit of a preferred embodiment of the present invention; And
Fig. 4 A figure to Fig. 4 B is the manufacture method synoptic diagram of the color-variable pixel unit of a preferred embodiment of the present invention.
Embodiment
Hereinafter, will describe the present invention in detail.
The metallic film that has color-variable pixel unit now peels off and the problem of fiduciary level in order to improve, and the present invention proposes a kind of color-variable pixel unit of light interference type display panel.
Feature of the present invention is, comprise at least the spacing that changes the stilt in the color-variable pixel unit with and the density that distributes, to improve the deformation restoring force of light reflecting electrode wherein.When the hypotelorism of stilt or distribution density improved, the unit area dependent variable of light reflecting electrode also improved relatively, and this time reflecting electrode is subjected to the external force effect and the stress that produces also increases thereupon.Therefore, after external force disappeared, the stress of this increase just can make the light reflecting electrode successfully return to original state.So, needn't use the big material of membrane stress to make the light reflecting electrode, by adjusting the distribution density of stilt, can improve the deformation restoring force of light reflecting electrode significantly, the metallic film that can solve existing color-variable pixel unit effectively peels off and the problem of fiduciary level.
Fig. 3 is the vertical view of the color-variable pixel unit of a preferred embodiment of the present invention.As shown in Figure 3, color-variable pixel unit 300 has separation structure 302, is positioned at relative both sides.And in this embodiment, the stilt of color-variable pixel unit 300 is a plurality of support columns 306, represents with square in Fig. 3, yet in actual applications, can optionally be designed to arbitrary shape.Separation structure 302 and support column 306 are arranged between light incident electrode and the light reflecting electrode (wall 102 of Fig. 1 and wall 104).Have spacing 1 between support column 306 and another support column 306, and form array shape arrangement and cross a zone of action 312.
Feature of the present invention be the spacing 1 that changes the stilt 306 in the color-variable pixel unit 300 with and distribution density, to improve the deformation restoring force of light reflecting electrode wherein.
According to one embodiment of the invention, color-variable pixel unit 300 is of a size of 204 μ m * 204 μ m, and 306 one-tenth arrays of support column are arranged in wherein.When the number of support column 306 was 3 * 3, the spacing 1 of support column 306 was about 50 μ m, and the deformation restoring force of this time reflecting electrode is little.Under same condition, when the number of support column 306 was 4 * 4, the spacing 1 of support column 306 was about 40 μ m, and can see the bright dipping reflecting electrode significantly this moment after deformation, the situation that its deformation restoring force increases before.And when the number of support column 306 was 5 * 5, the spacing 1 of support column 306 was about 30 μ m, and the speed of recovering after the deformation of this time reflecting electrode is quicker.Below the above-mentioned condition of arrangement is in table one.
Table one: the comparison of the support column number of color-variable pixel unit.
| The number of support column (individual) | The spacing of support column (μ m) | Area size (the μ m in zone 312 2) | Unit area density (1/mm 2) |
| 3×3 | 50 | 2500 | 225 |
| 4×4 | 40 | 1600 | 400 |
| 5×5 | 30 | 900 | 625 |
By can finding out in the table one, when the number of support column 306 is many more, its spacing 1 is more little, and the area in the zone 312 that is surrounded is also more little, and support column 306 numbers in the unit area are also many more, and promptly its unit area density is big more.According to another preferred embodiment of the present invention, after the elastic limit of consideration light reflecting electrode and the conditions such as aperture opening ratio of variable pixel components, the spacing 1 of support column 306 can be contracted to 20 μ m, the number of the support column 306 in its unit area, be its unit area density, can reach every square millimeter of 2500 (2500mm
-2).Light reflecting electrode in the color-variable pixel unit 300 is subjected to 306 supports of maximum support columns in per unit area at this moment, so its deformation restoring force is also best.
It should be noted that in this embodiment stilt is support column independently, yet, the stilt of other type, for example latticed interconnective stilts such as (grid) also can apply among the present invention, is not subjected to the restriction of present embodiment.The invention is characterized in to utilize to change the density that stilt distributed, control its support for the start area of light reflecting electrode, the density of stilt is big more in unit area, and then the deformation restoring force of per unit area is also big more.That is to say, be example with above-mentioned latticed stilt, and when the size of the grid that it comprised was thin more, then the deformation restoring force of per unit area also improved relatively.
Below utilize Fig. 4 A and Fig. 4 B to explain manufacture method of the present invention.Please refer to Fig. 4 A, on a substrate, for example transparency carrier 409, form earlier first electrode 410 and sacrifice layer 411 in regular turn.Sacrifice layer 411 can adopt material transparent, for example dielectric material, or opaque material, and for example metal material, polysilicon or amorphous silicon adopt amorphous silicon as the material that forms sacrifice layer 411 in the present embodiment.
Then, in first electrode 410 and sacrifice layer 411, form opening 412 again and form stilt 406 in it, for example in first electrode 410 and sacrifice layer 411, form opening 412 with a micro image etching procedure to be applicable to.Feature of the present invention is to form opening 412 with a predetermined density, utilizes to change the density that opening 412 is distributed, to adjust the deformation restoring force of color-variable pixel unit.
Then, form a material layer (not expression among Fig. 4 A) to fill up opening 412 at sacrifice layer 411.Material layer is applicable to the usefulness that forms stilt 406, generally can the usability luminescent material, and for example photoresistance, or the polymeric material of non-sensitization, for example polyester or poly-vinegar or the like.If use non-photosensitive material to form material layer, then need a micro image etching procedure on material layer, to define stilt 406.Form material layer with photosensitive material in the present embodiment, therefore only need with a micro-photographing process patterned material layer.
Then, form second electrode 414 on sacrifice layer 411 and stilt 406.At last, please refer to Fig. 4 B, with structure release etch processing procedure (Release Etch Process), for example a plasma etching processing procedure removes the sacrifice layer 411 shown in Fig. 4 A and formation chamber 416 (position of sacrifice layer 411).The height D of chamber 416 is the thickness of sacrifice layer 411.The plasma etching processing procedure to be to contain fluorine-based or the etchant of chloro, for example etchants such as carbon tetrafluoride, boron chloride, Nitrogen trifluoride or sulfur hexafluoride etc. for precursor to produce a plasma etching sacrifice layer 411.
Be applicable in the present invention as the material that forms stilt 406 to comprise positive photoresistance, negative photoresistance, various polymkeric substance, for example, acrylic (Acrylic) resin, epoxy resin or the like.
Change the density of the stilt in the variable pixel components, can adjust the deformation restoring force of light reflecting electrode significantly, make variable pixel components of the present invention can utilize the little metallic film of membrane stress to be used as the light reflecting electrode, and avoid existing in order to reach high deformation restoring force, and the metallic film that is caused when using the big metallic film of membrane stress peels off and the problem of fiduciary level.In addition, the present invention also can reduce in order to take into account the research and development time and the manufacturing cost of the big and incrust metallic film of membrane stress, uses the present invention and cooperates existing and low-cost metallic film can obtain enough deformation restoring forces and manipulates for color-variable pixel unit.
Be understandable that; for the person of ordinary skill of the art; can make other various corresponding changes and distortion according to technical scheme of the present invention and technical conceive, and all these changes and distortion all should belong to the protection domain of accompanying Claim of the present invention.
Claims (25)
1. color-variable pixel unit, it comprises:
First electrode;
Second electrode, it is parallel to described first electrode in fact, and wherein said second electrode can move to described first electrode in response to the electrostatic attraction between described first electrode and described second electrode;
The separation structure that between described first electrode and described second electrode and along a side of described changeable colour pixel, extends; And
Between described first electrode and described second electrode and at a plurality of stilts of described color-variable pixel unit inside, the restoring force that wherein said second electrode moves relative to described first electrode depends on the distribution density of above support.
2. color-variable pixel unit according to claim 1, wherein said a plurality of stilts comprise a plurality of support columns, and the described distribution density of above support is the quantity of these support columns in the per unit area.
3. color-variable pixel unit according to claim 2, the scope of wherein said distribution density is between every square millimeter 225 to every square millimeter 2500.
4. color-variable pixel unit according to claim 2, the scope of wherein said distribution density is between every square millimeter 400 to every square millimeter 2500.
5. color-variable pixel unit according to claim 1, wherein said stilt are latticed stilt.
6. color-variable pixel unit according to claim 1, the material of wherein said stilt comprises photosensitive material.
7. color-variable pixel unit according to claim 6, the material of wherein said stilt comprises photoresistance.
8. color-variable pixel unit according to claim 1, the material of wherein said stilt comprise polyester or poly-vinegar.
9. color-variable pixel unit according to claim 1, the material of wherein said stilt comprises acrylic resin or epoxy resin.
10. color-variable pixel unit according to claim 1, the material of wherein said stilt comprises non-photosensitive material.
11. a method of making color-variable pixel unit, described method comprises:
Substrate is provided;
First electrode is provided in described substrate;
Provide second electrode on described first electrode, described second electrode is parallel to described first electrode in fact, and wherein said second electrode can move with respect to described first electrode in response to the electrostatic attraction between described first electrode and described second electrode;
Between described first electrode and described second electrode, provide separation structure, and described separation structure prolongs the side extension of described color-variable pixel unit; And
Provide between described first electrode and described second electrode and at a plurality of stilts of described color-variable pixel unit inside, wherein said second electrode has the mechanical response in response to the pre-selected of described voltage difference, and the mechanical response of described pre-selected is corresponding to one group of mechanical property of described a plurality of stilts.
12. method according to claim 11, wherein said second electrode comprises flexible layers.
13. method according to claim 11, the mechanical response of wherein said pre-selected comprise the distance that is moved by described second electrode owing to the application of the electrostatic attraction between described first electrode and described second electrode.
14. method according to claim 11, wherein said group of mechanical property comprises distribution density.
15. a method of making color-variable pixel unit, described method comprises:
Substrate is provided;
In described substrate, form first electrode;
On described first electrode, form sacrifice layer;
In described sacrifice layer, form opening by the described sacrifice layer of etching;
Fill described opening with material;
Form second electrode on described sacrifice layer and described material, described second electrode is parallel to described first electrode in fact;
Remove described sacrifice layer, form the chamber by this between described first electrode and described second electrode, wherein said second electrode can move with respect to described first electrode in response to the electrostatic attraction between described first electrode and described second electrode.
16. method according to claim 15, wherein said substrate is transparent.
17. method according to claim 15, wherein said sacrifice layer comprises metal.
18. method according to claim 15, wherein said material comprises photosensitive material.
19. method according to claim 15, wherein said material comprises photoresistance.
20. method according to claim 15, wherein said material comprise polyester or poly-vinegar.
21. method according to claim 15, wherein said material comprises acrylic resin or epoxy resin.
22. method according to claim 15, wherein said material comprises non-photosensitive material.
23. method according to claim 15, wherein said opening forms with predetermined density, and described predetermined density is through selecting to think that described color-variable pixel unit provides predetermined restoring force.
24. method according to claim 15, wherein said second electrode comprises flexible layers.
25. method according to claim 24, wherein said second electrode have pre-selected for removing described first electrode behind the described sacrifice layer and the mechanical response of the voltage difference between described second electrode.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031579094A CN1323311C (en) | 2003-08-27 | 2003-08-27 | Colour changeable pixel unit for light interference display panel |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB031579094A Division CN1323311C (en) | 2003-08-27 | 2003-08-27 | Colour changeable pixel unit for light interference display panel |
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| CN101187729A true CN101187729A (en) | 2008-05-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB031579094A Expired - Fee Related CN1323311C (en) | 2003-08-27 | 2003-08-27 | Colour changeable pixel unit for light interference display panel |
| CNA2007100976485A Pending CN101187729A (en) | 2003-08-27 | 2003-08-27 | Light interference type display panel color-variable pixel unit |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB031579094A Expired - Fee Related CN1323311C (en) | 2003-08-27 | 2003-08-27 | Colour changeable pixel unit for light interference display panel |
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| CN104157660B (en) * | 2014-08-06 | 2017-10-31 | 北京智谷睿拓技术服务有限公司 | The adjustable imaging sensor of picture element density and its picture element density method of adjustment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US20010003487A1 (en) * | 1996-11-05 | 2001-06-14 | Mark W. Miles | Visible spectrum modulator arrays |
| JP3919954B2 (en) * | 1998-10-16 | 2007-05-30 | 富士フイルム株式会社 | Array type light modulation element and flat display driving method |
| JP4304852B2 (en) * | 2000-09-04 | 2009-07-29 | コニカミノルタホールディングス株式会社 | Non-flat liquid crystal display element and method for manufacturing the same |
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- 2003-08-27 CN CNB031579094A patent/CN1323311C/en not_active Expired - Fee Related
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| CN1323311C (en) | 2007-06-27 |
| CN1591096A (en) | 2005-03-09 |
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