CN101158734A - Optical fiber anchoring method used for optical sensor - Google Patents
Optical fiber anchoring method used for optical sensor Download PDFInfo
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- CN101158734A CN101158734A CNA2007100798897A CN200710079889A CN101158734A CN 101158734 A CN101158734 A CN 101158734A CN A2007100798897 A CNA2007100798897 A CN A2007100798897A CN 200710079889 A CN200710079889 A CN 200710079889A CN 101158734 A CN101158734 A CN 101158734A
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Abstract
The invention generally relates to an optical sensor which forces the optical fiber with physical strain by changing the axial tension applied in the optical fiber. The physical strain causes the optical characteristics of the optical signal transmitted by the optical fiber to be changed. Additionally, the invention provides a method, a device and parts of the device applied in the optical sensor. The optical fiber sensor of the invention can keep the optical fiber to be in small or no creep deformation under tension, even under the environment with high temperature and high humidity. An example of an optical fiber bracket of the invention provides better keeping quality compared with epoxide resin and other bonds, simultaneously maintaining the tensile strength of the prior optical fiber. Furthermore, the invention provides the optical fiber bracket and a sensor that are especially useful for monitoring the environment state, measuring the physical property and mechanical phenomena.
Description
The mutual reference of related application
The application requires the rights and interests of the U.S. Provisional Application 60/689,246 of submission on June 10th, 2005.It is for referencial use that this application all is introduced in this.
Background technology
In the past few years, the optical fiber based sensor gets the nod on market as the substitute of conditional electronic sensor.Many application as civil building monitoring, down-hole oil and gas application, sea-freight and aviation in, Fibre Optical Sensor provides several advantages than traditional electronic sensor.Different with electronic sensor, the optical fiber based sensor is not subjected to electromagnetic interference effect, is well suited for the electronic noise environment.The optical fiber based sensor can also allow many sensors to work on the single optical fiber of crossing over very long distance at an easy rate by multiplexed.The optical fiber based sensor can be made very for a short time and be light to be used in the limited space.The optical fiber based sensor can also be made high temperature resistant and corrosion environment.
Can obtain utilizing the optical property of various kinds to measure the various optical sensors of interested physical property.Sensor design is become amplitude, phase place, polarization state or other optical property of passing the light of Optical Fiber Transmission by change, can make response the physical property that will measure.Depend on Design of Sensor, the one or more of these optical properties can be monitored by inquiry unit, and can convert thereof into interested physical property.
The present invention concentrates on sensor type, and these types are given optical fiber by changing the tension force that axially is applied on the optical fiber with physical strain, changes in the optical property of the light that passes Optical Fiber Transmission.In such sensor, optical fiber often is installed in the mechanical clamp (mechanical fixture), and the physical property that will measure converts mechanical shift to, and this mechanical shift can change the amount of the strain that exists in the optical fiber.If sensor will keep accurately in time, the method that so optical fiber is installed on the mechanical clamp is just extremely important.Because optical fiber all can cause measuring skew with respect to any slip or the creep (creep) of mechanical clamp.
In the optical fiber based sensor, often use various epoxy resin and other bonding agent that optical fiber is installed on the mechanical clamp.These bonding agents are often being brought into play sufficient effect in moderate temperature and low humidity application, yet, when ambient condition becomes more abominable, the easy creep of bonding agent.And even under moderate state, creep also may become a problem of those application that need long-time stability.
United States Patent (USP) 6,317,555 relate to a kind of creep resistant optical fiber connects (attachment) structure, and wherein the covering of optical fiber has one " external measurement variation zone (expansion or recessed) ".So that variation zone to be provided, this variation zone meshes a lasso part with the fibre cladding vary in diameter, thereby the connection of optical fiber is provided in lasso.Illustrate that this optical fiber will be held relative lasso and bear tension force, have minimum relatively moving or creep.Lasso can be connected or the part than macrostructure style such as shell.Cushion can be arranged between covering and the lasso, thus protection optical fiber and helping at lasso internal fixation optical fiber.
United States Patent (USP) 6,768,825 have described and have utilized United States Patent (USP) 6,317, the optical sensor of 555 creep resistant optical connection structure.This optical sensor comprises optical fiber, has the Bragg grating that is positioned at fiber optic hub, is used at characteristic wave strong point partial reflection light signal at least.This sensor component has two variation zone in the covering of optical fiber, this zone is positioned at the relative both sides of Bragg grating, thereby allows optical fiber to connect.The optical fiber annex is installed on the pressure sensitive structural, changes according to pressure environment to allow characteristic wavelength.
United States Patent (USP) 6,726,371 relate to and are used for coated optical fiber is fixed on device on the fiber clamp.This fixed sturcture comprises a lasso that has the hole, and optical fiber inserts in this hole.Lasso also comprises an opening, and this opening penetrates optical fiber from sleeve pipe one side and inserts in the hole.
Groove (gutter) shape optical fiber retaining element with optical fiber clamping part inserts this element in this opening, is clamped on the optical fiber optical fiber is supported in the lasso.
United States Patent (USP) 6,668,105 relate to a kind of Fibre Optical Sensor flat package, report this Fibre Optical Sensor flat package will encapsulate can extreme sensitivity in strain measurement.This patent provides in conjunction with the encapsulation of plastic material and stacked manufacturing technology and method for packing, so that a kind of sealed package of anti-severe rugged environment condition to be provided.
United States Patent (USP) 5,337,387 relate to the method that hermetic fiber is made into metal parts.Glass capsulation is formed on betal can and has covered between the optical fiber of metal.This method is described for forming durable high leakproofness sealing, but does not wherein have any instruction or suggestion can utilize this method optical fiber that machinery is durable to form metal-ware, uses in sensing is used being used for, and wherein optical fiber is in placed under tension.
United States Patent (USP) 4,357,072 relate to a kind of with the device of optical fiber seal in LED package.The optical fiber that metal is handled has the intervention becket, by around the fiber-fuse low melting point, such as scolder, this optical fiber is fixed in the support.Should get involved becket is described as the light emitting diode positioning optical waveguides useful.This patent is pointed out " can use the non-metallic fiber of short relatively length, in this case, low-melting glass is as the material of annulation ".Yet it does not illustrate how to provide ring when adopting non-metallic optical fiber.This ring is described in fact help to make optical fiber firmer and heavier, thereby allows quickly positioning optical waveguides and counter-bending intensity of force is provided.It is useful that the encapsulating method of this patent and device are described to link and aim at optical fiber for light emitting diode.Wherein do not have any instruction or suggestion can utilize this method and device to form metal-ware with the optical fiber that machinery is durable, be used for sensing and use, wherein optical fiber is placed under the tension force.
Is known for optical fiber provides several Apparatus and method fors of sealing in this area, but still need alternative method and device optical fiber to be installed in the anchor clamps being used in the art, particularly avoid creep or minimum sensor application is reduced in creep for needs.
Summary of the invention
The invention provides a kind of optical fiber holder spare contains: structure of fiber_optic has the hole or the groove that extend along the longitudinal axis of structure of fiber_optic; Optical fiber passes hole or groove in the structure of fiber_optic, and is orientated the longitudinal axis that is parallel to structure of fiber_optic; And glass that between optical fiber and structure of fiber_optic, forms or metallic seal, this glass or metallic seal to small part is formed on the hole or the groove inside of structure of fiber_optic.Sealing can be formed by glass.In a particular embodiment, optical fiber has protective finish.
In a particular embodiment, the sealing between optical fiber and the structure of fiber_optic is formed on the protective finish of optical fiber.In a particular embodiment, glass sealing material has the thermal expansivity that is higher than optical fiber.In another embodiment, the structure of fiber_optic material has the thermal expansivity that is higher than glass sealing material.In a particular embodiment, form pressure seal.In another embodiment, the structure of fiber_optic material has basically the thermal expansivity that is complementary with glass capsulation material grid.Structure of fiber_optic is made by stainless steel, kovar (fernico Kovar) or because of cutting down (iron-nickel alloy Invar).In a particular embodiment, structure of fiber_optic have the sealing holding chamber to small part be formed in the hole or groove of this structure of fiber_optic.Optical fiber can have protective finish, and this coating is by polyimide, carbon-polyimide or carbon-silicone-perfluor (generation) alkoxy ethene (perfluoroalkoxyethylene, the polyimide of PFA) making.Optical fiber can have the protective finish metal of being made by gold, copper or aluminium.Encapsulant can be a metal alloy, especially when protective finish is metal.Encapsulant can be the metal alloy scolder that comprises lead, tin, silver, indium, gold or copper.
Optical fiber holder spare can also contain: second structure of fiber_optic has the hole or the groove that extend along the longitudinal axis of this structure of fiber_optic; The optical fiber that wherein has protective finish passes second structure of fiber_optic interior hole or groove, and is oriented the longitudinal axis that is parallel to second structure of fiber_optic; And be positioned at the hole of this structure of fiber_optic or groove inner and second glass or the metallic seal that form round optical fiber and to small part, it forms sealing between the coated optical fiber and second structure of fiber_optic, wherein first and second structure of fiber_optic are spaced apart along optical fiber, form two anchor points along optical fiber.
Optical fiber holder spare can also contain: one or more additional optical fiber supports, its each all have hole or a groove that extends along the longitudinal axis of this structure of fiber_optic; The optical fiber that wherein has protective finish passes each additional optical fiber support interior hole or groove, and is oriented the longitudinal axis that is parallel to each additional optical fiber support; And for each additional optical fiber support, be positioned at the hole of this additional optical fiber support or groove inner and the additional glass or the metallic seal that form round optical fiber and to small part, it forms sealing between coated optical fiber and each additional optical fiber support, wherein structure of fiber_optic is spaced apart along optical fiber, and forms a plurality of anchor points along optical fiber.
The optical fiber of optical fiber holder spare can comprise the fiber grating between two anchor points, particularly Fiber Bragg Grating FBG.The optical fiber of optical fiber holder spare can be included in the fiber grating between one or more anchor points.Fiber grating can be a Fiber Bragg Grating FBG, perhaps is more particularly long-period gratings.
The invention provides a kind of optical sensor, comprise optical fiber holder spare of the present invention and anchor clamps, these anchor clamps are being supported first structure of fiber_optic and second structure of fiber_optic, their axial hole is aimed at, and at least a portion of wherein said anchor clamps is about along expansion, compression or the expansion of the longitudinal axis with to compress the two be flexible; And wherein when being subjected to axial strain, one or more optical properties of optical fiber change.Optical sensor of the present invention can be the device that is used to measure strain, measurement skew, measurement temperature, gaging pressure or measures acceleration.
The present invention also provides a kind of method that is used for the measuring optical fiber internal strain, and it utilizes optical sensor of the present invention.
The present invention also provides a kind of optical fiber that is used for having protective finish to be installed in the method for structure of fiber_optic, and it is included between the optical fiber and the step of glass or metallic seal is set between the coated optical fiber.Glass or metallic seal can be formed in the sealing holding chamber, and sealing holding chamber to small part is formed on the hole or the groove inside of structure of fiber_optic.In a particular embodiment, the optical fiber hole or the groove that all pass structure of fiber_optic extends.
Through observing following detailed and accompanying drawing, others of the present invention will be more clear.
Description of drawings
Figure 1A is the floor map that structure of fiber_optic is shown;
Figure 1B is the cross-sectional view of an embodiment of the structure of fiber_optic of Figure 1A, and the axial hole of its medium-height trestle has two parts of different-diameter, causes the formation of a projection;
Fig. 1 C is the cross-sectional view of additional embodiment of the structure of fiber_optic of Figure 1A.In one embodiment, the axial hole of support is cylindrical uniformly, and in another embodiment, the axial hole of support is taper;
Fig. 1 D is the cross-sectional view of additional embodiment of the structure of fiber_optic of Figure 1A.This illustrates two kinds of difformities of the axial hole of support;
Fig. 2 A is the floor map that the alternate design of structure of fiber_optic is shown.In this case, optical fiber is positioned in axial groove or the passage, thereby each wall of this groove or passage is formed one in order to hold the chamber of encapsulant;
Fig. 2 B is the cross-sectional view of an embodiment of the structure of fiber_optic of Fig. 2 A;
Fig. 3 A is the floor map that the strain transducer of the structure of fiber_optic that utilizes Figure 1A is shown.The part of peripheral cell is removed so that the view of this device inside element to be provided;
Fig. 3 B is the stretch-out view at the strain transducer of Fig. 3 A, schematically shows the one or more Fiber Bragg Grating FBGs in the optical fiber;
Fig. 4 is the cross sectional representation of a part of the strain transducer of Fig. 3 A, and the location of structure of fiber_optic in metal ferrules is shown;
Fig. 5 is strain transducer (MOI more of the present invention, in the stainless steel structure of fiber_optic, have the polyimide coating silica fibre, low temperature seal glass) with its figure of optical fiber base strainometer (V1, V2 and V3) of three different fabricators as the wavelength shift of the function of time.In all three strainometers (V1-V3), the connection of optical fiber or anchoring utilize bonding agent for example epoxy resin make.In V1 and V3, the bonding agent annex is prepared on the bare fibre.In V2, the bonding agent annex is prepared on the optical fiber that has protective finish.
Fig. 6 is the figure as a result of strain transducer life cycle test as described below as shown in Figure 3A.Time is in the unit of test period.Tested 25,476,300 cycles altogether of this sensor, and show not have because aging and failure or the sign that is offset.
Embodiment
The invention provides in a kind of mechanical support at optical sensor (mount) method of supporting (hold) optical fiber, when tension force is applied to optical fiber, and sensor is when being exposed to temperature and humidity, minimizes by this way or stops optical fiber to slide.The present invention also provides optical fiber holder spare and optical sensor, and wherein one or more optical fiber are installed in the device that adopts optical fiber holder spare of the present invention.The present invention further provides the optical fiber that is installed in the structure of fiber_optic of the present invention, particularly maintain the optical fiber of protective finish, wherein the sealing that formed by glass or brazing metal of optical fiber utilization is installed in also that machinery is coupling on the support.Usually form hermetic seal around adopting the optical fiber of glass capsulation technology with the hole in passing Metal Packaging.In these are used,, and glass capsulation is formed between optical fiber and the Metal Packaging its polymer coating of optical fiber flake-off.These peelings and sealing technology often cause the infringement to optical fiber surface, cause optical fiber to slacken.
The method that the present invention adopts preferably keeps the protective finish of optical fiber in position, avoids surface damage with protection optical fiber.In one embodiment, this method adopts low temperature glass directly forming sealing on fibre coating, and with optical fiber anchoring (anchor) on metal shell.Fibre coating has been avoided the surface damage of optical fiber surface, also withdraws from (exit) glass capsulation place simultaneously at optical fiber some strain relief are provided.Perfect by coating is kept, optical fiber can keep most tensile strength.If fibre coating be polymkeric substance as polyimide, so the sealing can not be air-locked fully.Yet for most of sensor application, this is unwanted.
Can utilize two types glass to seal optical fiber anchoring on metal shell: coupling sealing and pressure seal to metal (glass to metal).The coupling sealing utilizes seal glass and the metal support with basic matched coefficient of thermal expansion (CTE).For the purpose of the use here, the CTE that refers to different materials about the term of CTE " basic coupling " differs at most+/-15% each other.CTE is 7ppm/ ℃ of (μ m/mK or 10
-6/ K) material basically with GTE be 7+/-material of 1.05ppm/ ℃ is complementary.In a certain embodiments, use CTE to differ 10% or littler or 5% or littler material.Coupling seals the formation of chemical bond between the oxide that depends on seal glass and metal surface existence.CTE differs by more than two kinds of materials of 15% and can not mate substantially.
Different therewith, pressure seal utilizes the difference of CTE between encapsulant (for example glass) and the timbering material (for example metal) to form pressure seal.The pressure seal design had staggered CTE.Low CTE optical fiber is centered on by the seal glass of higher CTE, and this CTE seal glass is centered on by the metal of higher CTE again successively.For example, have CTE for 1ppm/ ℃ optical fiber, have CTE for 7ppm/ ℃ glass sealing material with have CTE provides a kind of staggered CTE of having for 16ppm/ ℃ stainless steel optical fiber mounting disc sealing.When this assembly when seal temperature cools off, metal shrinks around seal glass, sealing glass shrinks around optical fiber in turn, causes producing around optical fiber very big compression stress.Chemical bonding appears in the pressure seal.The pressure-type sealing of the additional confining force that is provided by pressure preferably has been provided in the sealing of Shi Yonging in the present invention.Term " difference of the CTE value that is applied greater than (or being higher than) or less than (or being lower than) " refers to the difference that is preferably placed at outside the basic matching range, promptly the difference among the CTE be higher than greater than differing+/-15%.
Seal glass can be used under 250 ℃ to 1000 ℃ the softening point usually.Preferred seal glass is those seal glass that softening point is lower than the temperature of fusion of fiber optic protection coating material therefor.In certain embodiments, go up to use low temperature seal glass (being that those have 300 ℃ or the seal glass of low softening point more) at resin-coated optical fiber (for example, being considered to 300 ℃ of pi coated optical fibers continuous or 400 ℃ of short-terms usually).Typical resin optical fiber coating comprises polyimide, carbon/polyimide.The fiber optic protection coating can also be a metallic coating, comprises the coating of copper, aluminium or gold.The present invention is consistent with these coatings.
When being used as protective finish on the optical fiber as the metal of copper or gold or metal alloy, the metal alloy scolder that comprises lead, tin, silver, indium, gold or copper can be used as encapsulant so that optical fiber is fastened in the structure of fiber_optic.The various metal alloy scolders of Shi Yonging are known in the art in the present invention.
The structure of fiber_optic, optical fiber holder spare and the optical sensor that connect optical fiber of having of the present invention can directly or indirectly be combined in the various devices, and these devices include but not limited to strainometer, extensometer, temperature sensor (temperature transducers), pressure transducer (pressure transducers) and accelerometer.The configuration of multiple Fibre Optical Sensor all is known in the art, can be with having structure of fiber_optic and the optical fiber holder spare that connects optical fiber, thus one or more optical fiber are installed into or are installed on the Fibre Optical Sensor.In view of the description here and the knowledge of this area, those of ordinary skill in the art can be used in the device here in the configuration of known optical sensor, perhaps can revise the device here at an easy rate with in the configuration that is used in these sensors.The example that Fig. 3 A provides a kind of optical fiber that will have Fiber Bragg Grating FBG to be installed in the Fibre Optical Sensor configuration is installed.
A kind of fiber optic sensor system comprises: light source, optical fiber, sensing part or converter (transducer), and detector.The Fibre Optical Sensor work principle is some parameters (intensity, wavelength, polarization, phase place etc.) of converter modulation optical system, causes that noticeable variation takes place the character of the optical signalling that receives at detector.Fibre Optical Sensor can be to modulate the intrinsic sensor that directly is created in (optical fiber itself is converter) in the optical fiber, perhaps can be the extrinsic sensor of optical fiber being modulated by means of some external transducer.The Fiber Bragg Grating FBG of introducing in the optical fiber is exemplary converter.The optical fiber mode refractive index that is caused by strain or temperature or any variation of raster pitch all can cause the skew in the feature bragg wavelength.Fiber Bragg Grating FBG is often used in or strain or temperature sensing, especially in the place of environment harshness (for example, high electromagnetic interference (EMI) (Electromagnetic interference EIM), high-temperature, perhaps high corrosion).By using additional converter to act on successively on the Fiber Bragg Grating FBG, use Fiber Bragg Grating FBG to come other environmental parameter of sensing, also be possible as the piezochemistry reaction.
For force applications, the optical fiber that has Fiber Bragg Grating FBG can for example be installed on the diaphragm (diaphragm), the influence that the shape of diaphragm is under pressure and changes.Alternatively, the pressure on the fiber grating in acting on optical fiber generates three dimensional strain mould place, and optical fiber itself can be used as sensator.
For magnetic field and electric field sensing, the optical fiber that has Fiber Bragg Grating FBG can be coated with a ferroelectric coating.In the time of in coated optical fiber is in electromagnetic field, the field causes that the grating in the coated optical fiber expands or contraction.For chemical sensing, the optical fiber that has Fiber Bragg Grating FBG can be coated with layer of material, the influence of the particular chemicals that this material can be existed (chemical-sensitive coating), make this coating and existence chemicals amount pro rata, perhaps in Fiber Bragg Grating FBG, bring out strain pro rata with the reaction that produces this chemicals.For example, the palladium coated optical fiber that has a Fiber Bragg Grating FBG with palladium can be used to the generation of monitor hydrogen.Palladium absorbs hydrogen and cause strain in fiber grating.
The configuration of the Fibre Optical Sensor in these sensors, operation, use and application all are known in the art.Below list of references be cited to provide the detailed description of the sensor arrangement that comprises structure of fiber_optic that the present invention adopts and optical fiber holder spare, and sensor operation, the detailed description using and use: Farhad Ansari (Ed.) (1993) Applications of Fiber Optic Sensors inEngineering Mechanics, American Society of Civil Engineers;
Eric Udd (Ed.) (1995) Fiber Optic Smart Structures, John Wiley﹠amp; Sons Inc.; Regis J.Van Steenkiste and George S.Springer (1997) Strain and Temperature Measurement with Fiber Optic Sensors, Technomic Publishing Co; Farhad Ansari (Ed.) (1998) Fiber OpticSensors for Construction Materials and Bridges, TechnomicPublishing Co; Raymond M.Measures (2001) Structural Monitoringwith Fiber Optic Technology, Academic Press; Jose MiguelLopez-Higuera (Ed.) (2002) Handbook of Optical Fibre SensingTechnology, John Wiley ﹠amp; Sons Inc.; Optical Fiber Sensor GuideFundamentals and Applications (2005) Micron Optics obtains certainly: http://www.micronoptics.com/pdfs/; Morey W.et al., " RecentAdvances in Fiber Grating Sensors for Utilitiy IndustryApplications ", Proc.SPIE vol.2594,1995; Kashyap, R., " Photosensitive Optical Fibers:Devices and Applications ", Op.Fiber Tech., Vol.1, pp 17-34,1994; Morey, W.W., Meltz, G., andGlen, W.H., " Fiber Optic Bragg Grating Sensors ", SPIE Proc, Vol.1169, pp 98-107,1989; G.Meltz, " Overview of fiber grating-basedsensors, " Proc.SPIE, Distributed and Multiplexed Fiber OpticSensors VI Denver, CO, vol.2838, pp.1-21,1996; Patrick, H.J.; Williams, G.M.; Kersey, A.D., Pedrazzani, J.R., Vengsarkar, A.M. " Hybrid fiber Bragg grating/long period fiber grating sensor forstrain/temperature discrimination, " Photonics Technology Letters, IEEE, Volume 8, Issue 9, Sept.1996 page (s): 1223-1225 and More, W.W., " Development of Fiber Bragg Grating Sensors for UtilityApplications ", EPRI, Report TR-105190, September 1995.
Here the definition below adopting:
" creep " refers to the slow variation of two target relative positions, perhaps distortion of materials when the temperature that is under pressure, raises or high humility influence.
" flexible " refers to material or object, as device or device portions, increases or reduce the ability of the size of one or more physical dimensions.That resilient material can be extended, compression or not only extended but also compressed." elasticity " refers to material, object, device or device portions rubber-like character.
" glass capsulation ", " seal glass " and " glass sealing material " refer to the low melting temperature glass material that is commonly used to form at the pin that passes the airtight Electronic Packaging of metal (pin) insulated enclosure on every side.During seal process, seal glass often is used in combination with various bonding agents (binder) and viscosity improver, to improve flowability and wetting state.The seal glass that is fit to be used for to form sealing of the present invention can be the form of commercial available prefabricated component, is the shape of various expectations.In a certain embodiments, use the gas preform with following surface properties: glass transition temperature is 225 ℃, and softening point is 276 ℃, and CTE is 7.5ppm/ ℃.Have overall diameter (0utside Diameter OD)=0.044 inch, interior diameter (Inside Diameter ID)=0.016 inch, and the gas preform of length=0.03 inch for example can be used in the illustrational cover coil support of Figure 1A.
" optical fiber " refers to any type of optical fiber with core and covering well known in the art the most widely.The optical fiber anchoring that method of the present invention and device can be used for glass (quartz) is made is at the metal structure of fiber_optic.The optical fiber that can be used in the sensing application comprises single mode and multimode optical fiber.Can comprise that the uniform optical fiber of those cladding diameters and those cladding diameters have the optical fiber of distortion by optical fiber used in this invention.When the optical fiber that cladding diameter has a distortion was used in the device here, these distortion were not to be used to be used for optical fiber anchoring or to be connected unique structure on the structure of fiber_optic or in the structure of fiber_optic.
Optical fiber of the present invention preferably has the coated optical fiber of the protection optical fiber protective finish avoiding damaging along the optical fiber outside surface.The existence of protective finish has increased the serviceable life of optical fiber.Typical non-metallic fiber coating comprises having for example resin, polymkeric substance or these mixtures of material of carbon, polyimide, carbon/polyimide and carbon-silicone-PFA (perfluor (generation) alkoxy ethene).Protective finish also comprises metallic coating, as copper, aluminium and gold.For sensor application, optical fiber can comprise one or more fiber gratings, as the Fiber Bragg Grating FBG that plays transformer action.
Fiber Bragg Grating FBG (FBG) is by introduce wavelength dependency filtrator/reverberator that the periodic refractive index structure forms in fiber core.No matter when the wide range light beam incides on the grating, and its part energy all can transmission be passed optical fiber, and another part can be reflected.It is very narrow that the signal of the light that is reflected will become, and concentrate on corresponding to twice periodic unit feature bragg wavelength place at interval.Traditional FBG has the grating cycle of hundreds of nanometer scale.Cycle is the long period Bragg grating (LPG of hundreds of micron dimensions (several centimetres), people such as A.M.Vengsarkar, " Long-period fiber Bragg gratings asband-rejection filters ", J.Lightwave Technol.14,58 (1996)) also can be in sensor application, and can be used in the device of the present invention.
By strain or temperature and the mould refractive index of the optical fiber that causes or any variation of raster pitch all can cause bragg wavelength to be offset.Employing has the sensor of the optical fiber of FBG, correctly imbeds in the interested substrate by optical fiber correctly is installed on the interested substrate or with optical fiber, can measure strain.An advantage of this technology is such fact, and the signal that promptly detects is by optical spectrum encoded, thereby need not comprehend the loss in the optical fiber.By with mechanical strain and use the variations in refractive index that causes by the strain optical effect, physically increase or reduce grating at interval, strain can make the feature bragg wavelength be offset.For axial load, wavelength variations is typically about the every microstrain of 1.2pm, or is 12nm for 1% strain.
In optical fiber of the present invention and optical sensor, can also use fiber grating with aperiodicity refractive index structures.For example, can adopt chirped fiber grating.Chirped fiber grating is for (intragrating) sensing advantageous particularly in the grating.
" monolithic substrate (unitary body) " refers to by continuous single material and makes or by entity or the object made of interconnective separate parts in operation.Monolithic substrate does not comprise that physically (physical) is that separate, discontinuous element.Preferred monolithic substrate is made by homogenous material.Yet monolithic substrate can comprise uses one or more fixators, a plurality of parts that couple together as welding joint, glue, epoxy resin, screw, bolt, anchor clamps, clasp or their any known equivalents.
" thermal expansivity (CET) " refers to the length of material of generation given variation in temperature or the part of volume changes.Usually with length/length/unit temperature (m/m/ ℃) expression.
" perpendicular to the longitudinal axis " refers to the defined direction of axle of locating with 90 degree angles by with respect to the longitudinal axis.Similarly, " be parallel to the longitudinal axis " and refer to the defined direction of axle of locating with zero degree or 180 degree angles by with respect to the longitudinal axis.For the ordinary skill in the art, obviously, some and perpendicular or parallel deviation here device and device component in can accept, as long as the operation of this device or device component can not be subjected to the adverse effect of this deviation significantly.
In instructions, be that concrete feature, structure or the character that this embodiment of contact illustrates or describes comprises at least one embodiment of the present invention referring to " preferred embodiment ", " alternate embodiment " or " exemplary embodiment " meaning.Must not refer to identical embodiment what each position of instructions occurred referring to " preferred embodiment ", " alternate embodiment " or " exemplary embodiment ".
Further describe the present invention referring to accompanying drawing, in the accompanying drawings, similar numeral similar elements, the same numbers that occurs in a more than width of cloth figure refers to similar elements.
Fig. 1 illustrates an exemplary embodiment of optical fiber holder spare of the present invention, and it can support (hold) the optical fiber that is under the tension force, makes optical fiber and structure of fiber_optic not have creep or creep very little.The structure of fiber_optic 100 that illustrates comprises monolithic substrate 101.Monolithic substrate 101 has the axial hole that extends along the longitudinal axis 103 that is formed by its inner cylindrical wall 106 of structure of fiber_optic.The optical fiber of being made up of silica fibre (fibre core and covering) 104a and protective finish 104b 104 passes the axial hole in the structure of fiber_optic 100, and extends along the longitudinal axis 103.Optical fiber 104 is maintained in the structure of fiber_optic 100, and sealing 105 forms (or alternatively being formed by brazing metal) by glass.During the seal process, the glass sealing material that heats gas preform form for example is to its temperature of fusion, and when solidifying, forms the sealing of arranging around fibre coating 104b.The inside, chamber of formation between the optical fiber that sealing 105 is arranged on insertion and the axial hole 102, and fill up the space (void) between fibre coating 104b and structure of fiber_optic 106 inwalls, between optical fiber and structure of fiber_optic, form sealing, with the coupling of mechanical fiber optic ground, anchoring be connected on the structure of fiber_optic.
In a certain embodiments, shown in Figure 1B, the wall 106 of the axial hole of support 101 comprises the projection (ledge) 120 that the distortion by bore dia forms.The projection that exists generates the antelabium (lip) of a correspondence in sealing 105.Like this, the lip configuration that forms with respect to the projection structure in the hole in sealing just provides extra physical strength in sealing, and has improved the repellence (shown in Figure 1B) to the power that is parallel to a power that applies and applies from antelabium/projection joint along downward direction.Therefore, this structure has reduced the possibility in (referring to Figure 1A) hole and optical fiber relative motion when optical fiber moves down.
The other structure of the sealing of structure of fiber_optic and pore structure is illustrated among Fig. 1 C and the 1D.In Fig. 1 C, what illustrate is the hole (solid line 106) of homogeneous diameter.Shown in the dotted line 106a is selective bellmouth.Bellmouth can provide the repellence that optical fiber is moved downward the raising of (shown in Figure 1B) with respect to support 101.Other selective pore structure is illustrated among Fig. 1 D, the wall indentation of its mesopore.Dotted line 110a illustrates sweep-saw dentation hole, and dotted line 100b illustrates the V-arrangement zigzag.The wall that forms the axial hole of support 101 can be to have the zigzag of one or more saw tooth region or have one or more projections.The not implicit support of term used herein " hole " forms any concrete structure of each inwall in hole.The inwall of support can form the pore structure with respect to the longitudinal axis 103 symmetries, and perhaps these inwalls can comprise with respect to asymmetric sawtooth of the longitudinal axis or projection.In certain embodiments, the wall of support comprises single sawtooth or the projection with respect to axle 103 symmetries.In other embodiments, the wall of support comprises with respect to axle 103 and is symmetrical arranged or a plurality of sawtooth or the projection of asymmetric setting.
Fig. 2 A illustrates an alternate embodiment of structure of fiber_optic 100.The structure of fiber_optic 200 that illustrates comprises monolithic substrate 201.Monolithic substrate 201 has the pod 202 that is parallel to the longitudinal axis 103 extensions, and this pod is dimensioned and is shaped to receiving optical fiber.Groove 202 is depicted as by three inwalls of support (that is, two sidewall 206 and diapire 207) and forms.Groove 202 is depicted as has rectangular shape, but groove can have various other shapes, for example cylindrical.The optical fiber of being made up of silica fibre 104a and protective finish 104b 104 is positioned in the groove 202, and extends along the longitudinal axis 103.Monolithic substrate 201 has one and widens perpendicular to the longitudinal axis 103, a part of sidewall engrail by making groove or a part of sidewall of making groove and to form chamber 203.Chamber 203 forms a depression (pocket), thereby wherein encapsulant is placed on formation sealing 105 between optical fiber and structure of fiber_optic in the depression.When encapsulant melted, chamber 203 held the sealing material, and preferably limited to (confine) encapsulant by this way, and promptly along with the encapsulant cooling, each wall that forms chamber 203 applies compressive stress towards optical fiber 104.Chamber 203 is to support and keeping sealing to form the chamber of material, and it determines the shape of the sealing that forms between optical fiber and support to small part.Encapsulant is arranged on 203 inside, chamber, and fills up fibre coating 104b and form space between each wall in chamber 203.
In one exemplary embodiment, the thermal expansivity of structure of fiber_optic 200 is higher than the encapsulant thermal expansivity of seal glass for example that is used for forming sealing 105, and sealing material coefficient of thermal expansion coefficient is higher than the thermal expansivity of optical fiber 104 successively again.Along with the seal temperature cooling of assembly from raising, the encapsulant in the chamber 203 causes compressive stress to shrink than optical fiber 104 faster speed between the encapsulant that forms sealing 105.Meanwhile, each wall 203 in the structure of fiber_optic 200 also causes compressive stress to shrink than encapsulant faster rate between structure of fiber_optic 200 and sealing 105.Fig. 2 B illustrates sealing 105 better.
Fig. 2 B is the cross-sectional view of the support of Fig. 2 A at the sawtooth place that forms chamber 203.This illustrates the one or more walls shaping coelosis in next life 203 to groove.Two kinds of different chamber structures have been shown in Fig. 2 B.In with first kind of structure shown in solid line 209 (sawtooth in the sidewall 206) and the wall 207, the chamber is shaped with serrated wall 209 and non-serrated wall 207.In with second kind of structure shown in solid line 209 and the dotted line 210, the sawtooth in the chamber 203 usefulness walls 206 and 207 is shaped.Each wall 207 and 206 of groove can comprise single sawtooth (shown in Fig. 2 B), and single projection (not shown) or a plurality of sawtooth or projection form the shape in chamber 203, and the shape of sealing 105 is determined in this chamber 203 successively to small part.
Shown in Fig. 2 B, sealing 105 is formed between each wall of optical fiber in the bracket groove 202 and groove, thus mechanically coupled fiber and support.
Being sealed in of forming in the support of each device of the present invention provides durable mechanical couplings between optical fiber and support, minimum is reduced in creep or avoided creep (that is, the relative motion between optical fiber and support), and this is especially valuably in sensor application.
In the preferred embodiment shown in Figure 1A and the 2A, monolithic substrate is preferably made by the material that thermal expansivity is higher than glass sealing material.For example, when making monolithic substrate, the expectation linear coefficient of thermal expansion is preferably the use of about 9.9ppm/ ℃ stainless steel alloy, is used for linear coefficient of thermal expansion and is about 7.1ppm/ ℃ glass sealing material.Alternatively, when making monolithic substrate, expectation low bulk electron is as iron/nickel alloy Invar
TM(Impy S.A.Corp., Paris France) and iron-nickel-cobalt alloy Kovar
TMThe use of (CRS Holdings, Inc., Wilmington Delaware) is used for the lower higher temperatures seal glass of linear coefficient of thermal expansion.
The structure of fiber_optic that is connected optical fiber 100 and 200 at Figure 1A with having shown in the 2A is some examples of anchoring fiber device of the present invention.Those of ordinary skill in the art will understand, and the structure of various structure of fiber_optic can provide in order to receiving optical fiber and the hole or the chamber that hold seal glass.In the present invention, any structure of fiber_optic structure all is operable, as long as chamber and this chamber that it can provide optical fiber to pass through can hold the liquefaction encapsulant.The chamber of restriction encapsulant can have any geometric configuration, as long as along with encapsulant during cooling expands, it can office make encapsulant, and can cause that preferably compressive stress is with expansion in sealing.
Fig. 3 A illustrates the exemplary embodiment of the strain transducer 300 of the structure of fiber_optic 101 that utilizes Figure 1A shown type.In a preferred embodiment, two structure of fiber_optic 101 are connected on the single optical fiber spare, and separate a segment distance.When optical fiber was subjected to axial strain, the one or more optical properties that are located at these optical fiber 305 length between two structure of fiber_optic 101 changed.In a preferred embodiment, the length that is located at this optical fiber 305 between two structure of fiber_optic comprises one or more fiber gratings, is in particular Fiber Bragg Grating FBG, and these fiber gratings come in response to axial strain by the center wavelength shift of the spectrum that will be reflected.Fig. 3 B schematically shows one or more Bragg gratings of the sensor fiber that is positioned at Fig. 3 A.
For the purpose of handling and installing, structure of fiber_optic 101 is installed in lasso 302 inside.The covering pipe 303 of protectiveness slips over lasso 302 and this protection optical fiber.Lasso 302 is free to slide along the longitudinal axis 103 in protection tube 303.In certain embodiments, installation bracket (bracket) 301 fastening (fasten) is on lasso 302, and installation bracket 301 can be fastened by means of any other means that are fit to and connect, welds, glues together or be fastened on the specimen 304.For example, each lasso 302 can be provided with groove (groove) 306, and this groove (slot) 306 is bonded on the respective grooves 307 in the installation bracket 301, lasso is connected or be fastened between the carriage.(groove 306 further specifies with being bonded among Fig. 4 of installation bracket groove 307.) specimen 304 mechanically is coupling on the carriage 301, carriage 301 mechanically is coupling in again on cover Figure 30 2 successively, and lasso 302 mechanically is coupling in again on the support 101 successively, and support 101 mechanically is coupling on the optical fiber 104 again successively two positions.The strain that gives specimen 304 can be detected as the strain that optical fiber is installed.
The material (compliant material) of being obedient to that the protection tube 303 of sensor can be alternatively will stretch when being applied on the sensor when strain among Fig. 3 A is made, thereby allows protection tube 303 directly to be combined on the lasso 302.In this structure, protection tube 303 needn't slip over lasso 302.
Persons of ordinary skill in the art may appreciate that the sensor optics of Fig. 3 A is coupling on light source well known in the art and the detector when work.
Fig. 4 is the cross sectional representation of its exemplary ferrule structure of sensor of Fig. 3 A.Fig. 4 illustrates a kind of exemplary mode, wherein is installed in the strain transducer via sealing 105 structure of fiber_optic 100 that are anchored on the coated optical fiber 104.Lasso 302 has axial hole 402, and this axial hole has the interior layer segment 402a and the outer layer segment 402b of different-diameter, so that shoulder 404 is formed on lasso axial hole 402 inside.Axial hole 402a is dimensioned to holding coated optical fiber than the interior layer segment 402a of minor diameter.The larger-diameter outer layer segment of axial hole 402b is dimensioned and is shaped as receiving optical fiber support 100 (for example, the round fiber support of Fig. 1).The optical fiber of structure of fiber_optic 100 with the connection passes the axial hole of lasso, so that structure of fiber_optic is bonded on the shoulder 404.As shown in Figure 3A, second structure of fiber_optic 100 is connected and is sealed on the coated optical fiber with glass capsulation, and separates selected fiber lengths with first structure of fiber_optic.Second structure of fiber_optic is positioned on the optical fiber, thereby in conjunction with shoulder 404, this shoulder is formed on second lasso of strain transducer (as shown in Figure 3A).These two structure of fiber_optic are spaced apart, and the optical fiber between two structure of fiber_optic is remained on the appropriate location of sensor by the tension force between the shoulder in the axial hole of two lassos of sensor like this.Isolated two structure of fiber_optic that are sealed on the optical fiber can alternatively be bonded in respectively on two lassos with suitable adhesive, make to be positioned between two lassos at the optical fiber between two structure of fiber_optic.Alternatively, structure of fiber_optic can also welding or is welded on the lasso, perhaps utilize various fasteners for example analogs such as screw, nut, clip mechanically be fastened on the lasso.The mechanical stops (not shown) can be built in the sensor module, to avoid fibercuts.Actual tension in the optical fiber is set by the interval of regulating installation bracket 301.
In one exemplary embodiment, strain transducer with stainless steel structure of fiber_optic, polyimide coating silica fibre and low temperature seal glass demonstrates littler wavelength shift when being exposed to rising temperature and high humility following time than the compared sensor that adopts the classic method that optical fiber is installed.Shown in the curve of Fig. 5, the performance of an exemplary embodiment of strainometer of the present invention shown in it and the comparison of three different fabricators' strainometer.In all three strainometers (V1-V3), the connection of optical fiber or anchoring by utilize bonding agent for example epoxy resin carry out.In V1 and V3, bonding agent is connected on the bare fibre.In V2, bonding agent is connected on the optical fiber that has protective finish.All strainometers (gauge) are all by prestretched and remain under the constant strain, are exposed under 75 ℃ and 75% the relative humidity.It is constant that ideal situation is that wavelength should keep.From scheming as seen, strainometer of the present invention is compared the wavelength stability that has demonstrated remarkable improvement with the strainometer of three other manufacturers.
Carry out life cycle and test the stability of verifying strain transducer of the present invention.Test hereto, with as shown in Figure 3A sensor bolt on test fixture with a hold-down support and a mobile support saddle.The mobile support saddle motor driven, and along being parallel to the frequency translation of the direction of sensor axis with 6Hz.Mobile support saddle is conditioned and makes it give sensor with strain, and this sensor changes between 0 to 2000 microstrain.The results are shown among Fig. 6 of life cycle test, wherein the time is in circulation.In tested 25,476,300 cycles altogether of sensor of the present invention, do not demonstrate any owing to aging failure or the skew that causes.The curve map of Fig. 6 demonstrate when the strain that applies when vibrating between 0 to 2000 microstrain, the wavelength of the sensor that between lower boundary and coboundary, vibrates.Changing a little in coboundary and the lower boundary is that the temperature variation of test period causes.Any slip or the creep that occur at optical fiber tie point place all can cause zero offset to be shown as downward tendency in data.Do not observe any such zero offset in Fig. 6, this explanation does not have measurable creep in this strain transducer in test period.
When adopting Ma Kushi group or other grouping here, in the group whole combinations of all single members and this group and possibility recombinant all be intended to be included in individually of the present invention openly in.Every kind of combination of the parts of describing here or exemplifying all is used to implement the present invention, unless otherwise noted.Those of ordinary skill in the art can understand, and the method except that those specifically exemplify, device element and material can use in enforcement of the present invention and need not resort to excessive test.All known function equivalents of any these class methods, device element and material all are intended to be included among the present invention.In instructions, no matter when provide a scope, for example, temperature range, frequency range, time range or compositional range, all intermediate ranges that comprise in the scope that this provides, all subranges and all single values all are intended to be included in of the present invention the disclosing.Appointing and one or more single members can be excluded outside claim of the present invention in scope of disclosure or the group here.Here suitably the present invention of exemplary description can be implemented when lacking any not concrete element that discloses or a plurality of element and restrictive condition herein.
As used herein, " containing " and " comprising ", " comprising " or " it is characterized in that " synonym, comprise formula or open, do not get rid of element or method step additional, not narration.As used herein, " by ... form " eliminating unspecified any element, step or composition in the element that requires.As used herein, " basically by ... form " do not get rid of material or step that those do not influence the basic novel character of claim in essence.Term " comprises " any narration here, especially when the component of describing composition or element in outlines device, can with " substantially by ... form " or " by ... form " exchange.
Although the description has here comprised many specificity, these should not constitute limiting the scope of the invention, but should be as just giving the explanation that the invention provides some embodiment.Here each list of references of quoting is all introduced for referencial use.Yet if appearance is any inconsistent between the list of references of quoting and the present invention openly, the present invention discloses preferential.Lists of references more given here are introduced into for referencial use, the detail that relates to the prior art state when being used for being given in applying date of the application, other list of references is cited, and is used for providing additional or alternative device element, annex or the equivalent material of the present patent application, additional or alternative method.All patents mentioned in instructions and open source literature all show under the present invention the technical merit of prior art in the field.Here it is for referencial use that the list of references of quoting all is introduced in this, be used for showing the state of prior art when its open day or the day of submission to, and be intended to show that these information can be used herein, if necessary, be those specific embodiments of prior art thereby get rid of.Those of ordinary skill in the art will understand, except that the device element that those are specific exemplifying, and the material of these device elements, shape and size, also have method can be used in the practice of the present invention, and do not need to resort to excessive test.Whole known function equivalents of any of these material and method all are intended to comprise in the present invention.Employed term and term all are used as the description term, not as restriction, use these terms or term not to be intended to get rid of any equivalent or its part shown and that describe, but will be appreciated that various being modified in all is possible in the scope of the presently claimed invention.Therefore, though should be appreciated that the present invention is specifically open with preferred embodiment and optional feature, those skilled in the art can modify and are out of shape notion disclosed herein, and these modifications and distortion are regarded as within the scope of the present invention.
Claims (32)
1. optical fiber holder spare, contain:
Structure of fiber_optic has the hole or the groove that extend along the longitudinal axis of structure of fiber_optic;
Optical fiber passes hole or groove in the structure of fiber_optic, and is orientated the longitudinal axis that is parallel to structure of fiber_optic;
And glass that between optical fiber and support, forms or metallic seal, this glass or metallic seal to small part is formed on the hole or the groove inside of structure of fiber_optic.
2. device as claimed in claim 1, wherein sealing is a glass capsulation.
3. device as claimed in claim 1, wherein optical fiber has protective finish.
4. the device that optical fiber as claimed in claim 1 keeps wherein is formed on the protective seam of optical fiber in the sealing between optical fiber and the structure of fiber_optic.
5. optical fiber holder spare as claimed in claim 1, wherein optical fiber has protective finish, and this protective finish is not removed during seal process.
6. optical fiber holder spare as claimed in claim 2, wherein glass sealing material has the thermal expansivity that is higher than optical fiber.
7. optical fiber holder spare as claimed in claim 2, wherein the structure of fiber_optic material has the thermal expansivity that is higher than glass sealing material.
8. optical fiber holder spare as claimed in claim 2 wherein forms pressure seal.
9. optical fiber holder spare as claimed in claim 2, wherein the structure of fiber_optic material has basically the thermal expansivity that is complementary with glass sealing material.
10. optical fiber holder spare as claimed in claim 1, wherein structure of fiber_optic is made by stainless steel, Kovar or Invar.
11. optical fiber holder spare as claimed in claim 1, wherein structure of fiber_optic has to small part and is formed on the hole of structure of fiber_optic or the sealing holding chamber in the groove.
12. optical fiber holder spare as claimed in claim 1, wherein optical fiber has the polyimide protective finish of being made by polyimide, carbon-polyimide or carbon-silicone-PFA.
13. optical fiber holder spare as claimed in claim 1, wherein optical fiber has the metal coating coating of being made by gold, copper or aluminium.
14. as the optical fiber holder spare of claim 13, wherein encapsulant is a metal alloy.
15. as the optical fiber holder spare of claim 14, wherein encapsulant is the metal alloy scolder that comprises lead, tin, silver, indium, gold or copper.
16. optical fiber holder spare as claimed in claim 1 also contains:
Second structure of fiber_optic has the hole or the groove that extend along the longitudinal axis of this structure of fiber_optic;
The optical fiber that wherein has protective finish passes second structure of fiber_optic interior hole or groove, and is oriented the longitudinal axis that is parallel to second structure of fiber_optic; And
Be positioned at the hole of this structure of fiber_optic or groove inner and second glass or the metallic seal that form round optical fiber and to small part, it forms sealing between the coated optical fiber and second structure of fiber_optic,
Wherein first and second structure of fiber_optic are spaced apart along optical fiber, form two anchor points along optical fiber.
17., also contain as the optical fiber holder spare of claim 16:
One or more additional optical fiber supports, each all has hole or the groove that extends along the longitudinal axis of this structure of fiber_optic;
The optical fiber that wherein has protective finish passes each additional optical fiber support interior hole or groove, and is oriented the longitudinal axis that is parallel to each additional optical fiber support; And
For each additional optical fiber support, be positioned at the hole of this additional optical fiber support or groove inner and the additional glass or the metallic seal that form round optical fiber and to small part, it forms sealing between coated optical fiber and each additional optical fiber support,
Wherein structure of fiber_optic is spaced apart along optical fiber, forms a plurality of anchor points along optical fiber.
18. as the optical fiber holder spare of claim 16, wherein optical fiber comprises the Bragg grating that is provided with between two anchor points.
19. as the optical fiber holder spare of claim 17, wherein optical fiber comprises the Bragg grating between one or more anchor points.
20. as the optical fiber holder spare of claim 16, wherein optical fibre packages is contained in the long-period gratings that is provided with between two anchor points.
21. optical sensor, contain optical fiber holder spare just like claim 16, but also contain anchor clamps, these anchor clamps are being supported first structure of fiber_optic and second structure of fiber_optic, their axial holes are aimed at, and at least a portion of wherein said anchor clamps is flexible along the longitudinal axis about expansion, compression or expansion and compression; And wherein when being subjected to axial strain, one or more optical properties of optical fiber change.
22. as the optical sensor of claim 21, wherein sealing is a glass capsulation.
23., wherein seal by the metal alloy scolder and form as the optical sensor of claim 21.
24. as the optical sensor of claim 21, wherein this optical sensor is a kind of device that is used to measure strain.
25. as the optical sensor of claim 21, wherein this optical sensor is a kind of device that is used to measure skew.
26. as the optical sensor of claim 21, wherein this optical sensor is a kind of device that is used to measure temperature.
27. as the optical sensor of claim 21, wherein this optical sensor is a kind of device that is used for gaging pressure.
28. as the optical sensor of claim 21, wherein this optical sensor is a kind of device that is used to measure acceleration.
29. a method that is used for the measuring optical fiber internal strain, it utilizes the optical sensor of claim 21.
30. an optical fiber that is used for having protective finish is installed in the method in the structure of fiber_optic, it contains in the step that glass or metallic seal are set between the optical fiber and between the coated optical fiber.
31. as the method for claim 30, wherein glass or metallic seal are formed in the sealing holding chamber, sealing holding chamber to small part is formed on the hole or the groove inside of structure of fiber_optic.
32. as the method for claim 31, wherein optical fiber all passes the hole or the groove extension of structure of fiber_optic.
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| CNA2007100798897A CN101158734A (en) | 2007-02-16 | 2007-02-16 | Optical fiber anchoring method used for optical sensor |
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| CNA2007100798897A CN101158734A (en) | 2007-02-16 | 2007-02-16 | Optical fiber anchoring method used for optical sensor |
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