CN101153585A - Evacuation apparatus - Google Patents
Evacuation apparatus Download PDFInfo
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- CN101153585A CN101153585A CNA2007101821937A CN200710182193A CN101153585A CN 101153585 A CN101153585 A CN 101153585A CN A2007101821937 A CNA2007101821937 A CN A2007101821937A CN 200710182193 A CN200710182193 A CN 200710182193A CN 101153585 A CN101153585 A CN 101153585A
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- Prior art keywords
- pump
- gas
- relief opening
- booster pump
- discharge
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2250/00—Geometry
- F04C2250/10—Geometry of the inlet or outlet
- F04C2250/102—Geometry of the inlet or outlet of the outlet
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The present invention proposes an evacuation apparatus including a mechanical booster pump 5 , a back pump 3 placed at a down-stream side of the mechanical booster pump in series, the booster pump 5 having discharge openings 27 a and 27 b for discharging a low compression gas and a discharge opening 29 for discharging a high compression gas, and, in a stage where gas-discharging is started, the gas is discharged toward the ambient side through the discharge opening 29 for discharging a high compression gas with the operation of the mechanical booster pump and, in a stage where the discharged gas pressure reaches afterward a medium vacuum, the back pump starts operation and the gas is sent to the back pump through the discharge openings 27 a and 27 b for discharging a low compression gas.
Description
Technical field
The present invention relates to a kind of evacuator that case, chamber and analog are found time of being used for, the suction booster that it is provided with mechanical type vacuum booster pump and in series is arranged on mechanical type vacuum booster pump downstream side.
Background technique
In order to realize making the inside of case, chamber and analog form vacuum, be the mechanical type booster pump that is used for aspiration vacuum at the upstream side (inlet side) of vacuum pump (suction booster) traditionally with low rate of pumping with rate of pumping fast.With regard to this mechanical type booster pump, adopt roots-type vacuum pump 021 usually, as shown in Figure 5, it carries out compression/exhaust work by rotating a pair of roots-type blade 020.And be known that suction booster can be realized several times maximum rate of pumping by adopting the mechanical type booster pump.
Yet, even the mechanical type booster pump with a large amount of gas delivery to being positioned at the downstream side, it is the suction booster of atmospheric side, but near the raising of the rate of pumping of locating on every side the barometric pressure in running is not fairly obvious, and this is to cause owing to the limited swept volume of suction booster causes the limited rate of pumping of whole device.
That is, in Fig. 3, the relation between rate of pumping and the pressure shows, when adopting suction booster under atmospheric pressure pump gas beginning, because the limited swept volume of suction booster itself, therefore down auxiliary at the mechanical type booster pump, the rate of pumping of whole device is raising effectively not.When degree of vacuum becomes very high, the effect that can obtain to improve, but this raising can not obtain in whole pressure range.
In addition, for example, the model utility No.JP/7-19554 of Japanese granted (afterwards it being called document 1) has disclosed an application; Wherein the booster pump of similar mechanical type booster pump is arranged on the upstream side of vacuum pump; And carry out the exhaust of gas by the two-stage vacuum pump that series connection is provided with.
In the technology of document 1, quote as proof as Fig. 6, elementary outlet pipe (passage) A and main exhaust (passage) B draw from the inside of chamber, and are connected with each other.Elementary outlet pipe A is provided with the stop valve 03a and the fly valve 04 of series connection, and is connected to backing pump 01.Main exhaust B is provided with stop valve 03b1,03b2 and exhaust pump 02.According to this structure,, finish main exhaust (finding time) work by backing pump 01 and exhaust pump 02 by closing stop valve 03a and fly valve 04 and opening stop valve 03b1,03b2 and exhaust pump 02.
In addition, the example of the vacuum pump of installing as two-stage, as quoting as proof among Fig. 7, also disclosed a kind of structure, wherein booster pump 012 is connected to the intergrade of multi-stage dry vacuum pump 10 or the final stage of vacuum pump 10, thereby reaches the purpose (patent documentation 2:JP2003-155998A) that reduces energy consumption.
Yet,,, therefore can not expect that rate of pumping improves to some extent owing to when carrying out elementary exhaust, only have only backing pump 01 exhaust according to patent documentation 1.Though when carrying out the main exhaust operation, backing pump 01 and exhaust pump 02 be with the form exhaust of two-stage,, in patent documentation 1, disclose the operation control that relates to exhaust pump 02.Therefore, the technology of the document has stayed such problem, promptly not only in the pressure range that is pressed onto rough vacuum from atmosphere and comprise in the whole pressure range from the rough vacuum to the high vacuum how improving rate of pumping.
In addition, the purpose of the booster pump 012 in the patent documentation 2 is to drive dry vacuum pump 010 necessary energy consumption in order to reduce.In patent documentation 2, do not mention the raising rate of pumping.
Summary of the invention
With regard to the above-mentioned background technology, the objective of the invention is in order to realize a kind of evacuator that case, chamber and analog are found time of being used for, the suction booster that it is provided with mechanical type vacuum booster pump and in series is arranged on mechanical type vacuum booster pump downstream side, thereby in the pressure range that is pressed onto rough vacuum from atmosphere, improve rate of pumping, in the whole pressure range that is pressed onto high vacuum from atmosphere, improve rate of pumping thus.
To achieve these goals, the present invention proposes a kind of evacuator that case, chamber and analog are found time of being used for, it comprises the mechanical type booster pump, in series is arranged on the suction booster in mechanical type booster pump downstream side and be used for the controller of control gear operation; Wherein the mechanical type booster pump has the relief opening that is used to discharge low compression gas, by this relief opening, the low compression gas with low compression ratio that compresses with the part compress mode in booster pump is discharged, with the relief opening that is used to discharge high compressed air, by this relief opening, the high compressed air with high compression ratio is discharged; And controller is controlled like this, thereby in the exhaust starting stage, by the formula booster pump of operating machine, this gas discharges towards atmospheric side by the relief opening that is used to discharge high compressed air, reach the medium vacuum stage subsequently in exhaust pressure, the suction booster starting operation, and gas is sent to suction booster by being used to discharge the low relief opening that compresses gas.
According to the foregoing description, when exhaust was initial, by the formula booster pump of operating machine, this gas discharged towards atmospheric side (outside) by the relief opening that is used to discharge high compressed air.By this way, the gas of barometric pressure level is compressed and directly is discharged into the outside in the case with high compression ratio.Because this gas is to be discharged into the outside under the situation that does not have influence on suction booster, so it can improve rate of pumping under the prerequisite that does not import the large supercharged pump with higher emissions capacity, thereby guarantees higher rate of pumping.
In addition, owing to compare with the rate of pumping of suction booster, the rate of pumping of booster pump is higher, and therefore, it can exhausting air, keeps rate of pumping simultaneously when pressure is barometric pressure when initial.At first, it can improve rate of pumping in the scope that is pressed onto rough vacuum from atmosphere.
When the relief opening exhaust that is used to discharge high compressed air by the mechanical type booster pump obtained medium vacuum, the gas of medium vacuum was sent to suction booster, suction booster starting simultaneously from the relief opening (or a plurality of relief opening) that is used to discharge low compression gas subsequently.Like this, the vacuum state gas that arrives to a certain degree is sent to suction booster from being used to discharge the low relief opening (or a plurality of relief opening) that compresses gas.Because the function of the increase air pressure/increase flow of mechanical type booster pump, therefore, the rate of pumping of suction booster is improved and can keeps this rate of pumping that is enhanced, and has realized high vacuum thus.
Therefore, make not only in the scope that is pressed onto rough vacuum from atmosphere but also comprise that improving rate of pumping in the gamut that is pressed onto high vacuum from atmosphere becomes possibility.
According to another embodiment of the present invention, preferably, controller is by discerning the practice condition of medium vacuum from the consumption time signal of timer.
In the above embodiments, controller is automatically controlled the suction booster pumping operation by this structure, wherein said being configured to, exhausting air is fed into suction booster by being used to discharge the low relief opening (or a plurality of relief opening) that compresses gas, drives described suction booster simultaneously.Here, because this control is not based on the signal from pressure transducer, carry out work, therefore, will get rid of about the fault of pressure transducer and/or the risk of mis-behave and be based on from the consumption time signal of timer.Like this, will realize control highly reliably.
According to a preferred embodiment of the invention, the mechanical type booster pump is a pawl formula vacuum pump, the relief opening that wherein is used to discharge high compressed air is positioned at the wall place of pump case, wall is in the plane perpendicular to the pump rotor axle, the relief opening that is used to simultaneously discharge high compressed air is over against compression volume, and this compression volume is in the plane that is parallel to the plane that comprises the pump rotor running shaft.
Top embodiment has realized a kind of booster pump, this booster pump is provided with and is used to discharge the relief opening of high compressed air and is used to discharge the low relief opening that compresses gas, the relief opening that wherein is used to discharge high compressed air is arranged on the wall place of pump case, thereby over against compression volume, described wall is in the plane perpendicular to the pump rotor axle, and the exhaust ports that is used to discharge low compression gas is in the sidewall surfaces of pump case, and described sidewall surfaces is in the plane that is parallel to the plane that comprises the pump rotor running shaft.
The present invention has realized being used for evacuator that case, chamber and analog are found time, it comprises mechanical type booster pump and the suction booster that in series is arranged on mechanical type booster pump downstream side, and it has improved the rate of pumping that is pressed onto the gamut of high vacuum from atmosphere by improving the rate of pumping that is pressed onto in the rough vacuum scope from atmosphere.
Description of drawings
Now with reference to the preferred embodiments of the present invention and accompanying drawing the present invention is described in more detail.Wherein:
Fig. 1 shows the unitary construction of first embodiment of the invention;
Fig. 2 shows the A-A sectional view among Fig. 1;
Fig. 3 shows the characteristic of rate of pumping to degree of vacuum;
Fig. 4 shows time diagram, and wherein (a) shows the time diagram of mechanical type booster pump; (b) show the time diagram of suction booster; (c) show first time diagram of driving/close valve; (d) show second time diagram of driving/close valve;
Fig. 5 shows the diagram of roots-type vacuum pump;
Fig. 6 is the accompanying drawing that is used to explain conventional art; And
Fig. 7 also is the accompanying drawing that is used to explain conventional art.
Embodiment
Below, the present invention is described in detail for illustrated embodiment with reference to the accompanying drawings.Yet the size of the parts of Miao Shuing, material, shape, relative position etc. are only used for explaining and invention scope are not construed as limiting in these embodiments, unless any specific explanation is arranged.
Fig. 1 shows the unitary construction of the embodiment of the invention and Fig. 2 and shows A-A sectional view among Fig. 1.
As shown in Figure 1, evacuator 1 disposes suction booster 3 and is arranged on the mechanical type vacuum booster pump 5 of suction booster 3 upstream sides, thereby finds time by process pump 3 and 5 pairs of vacuum boxs 7.
Mechanical type vacuum booster pump 5 is a kind of pawl formula vacuum pumps 9, and it comprises a pair of pump rotor 11a and 11b, intakeport 13 and relief opening 15.Mechanical type booster pump 5 also comprises pump case 17 (housing), described a pair of pump rotor 11a and 11b are contained in wherein, and rotating machinery, by this rotating machinery, power is passed to rotor and makes pump rotor 11a and 11b around axle 19 rotations from the motor (not shown) as power source.In addition, the type of suction booster 3 is not limited to roots-type, but can be the vacuum pump of any other type, for example pawl formula, screw type, gear type etc.
At (shown in the arrow S among Fig. 1) when above-mentioned rotating machinery makes pump rotor 11a and 11b each other with counterrotating, change by the volume that utilizes the seal space that pump case 17 and pump rotor 11a and 11b surround and to carry out air-breathing and bleeding.
In addition, when the cross-section area that is used to discharge the first relief opening 27a that hangs down compression gas equated with the cross-section area that is used to discharge the second relief opening 27b that hangs down compression gas, the cross-section area of these relief openings was formed the cross-section area much larger than DOHC29.
As shown in Figure 2, DOHC29 is arranged at the wall place of pump case 17, and this wall is in the plane perpendicular to the axis of pump rotor 11a and 11b, and DOHC29 faces compression volume 25, with the discharging high compressed air.
In addition, as shown in Figure 2, intakeport 13 is set on the sidewall surfaces of pump case 17, described sidewall surfaces is in the plane on the plane that is parallel to the spin axis that comprises pump rotor 11a and 11b, and being used for first and second relief opening 27a of low compression gas and the opposite side wall surface that 27b is in pump case 17, this sidewall surfaces is in the plane on the plane that is parallel to the spin axis that comprises pump rotor 11a and 11b.
Like this, by on shell wall side, forming relief opening, can constitute mechanical type booster pump 5 with DOHC29 and DOLC27 perpendicular to the shell wall side of pump rotor 11a and 11b axis and the plane that is parallel to the axis that comprises pump rotor 11a and 11b.
Can be communicatively the first relief opening 27a that is used to discharge low compression gas being connected to first low pressure on the suction booster 3 gas passage 30 of indenting, be provided with by first of controller 32 controls and drive/close valve 34.On the other hand, second low pressure of the gas of the second relief opening 27b of surveying flow through being used to the to discharge low compression gas gas passage 36 of indenting, link together at the upstream side of valve 34 and first low pressure gas passage 30 of indenting, indent in the gas passage 30 thereby make the gas of the second relief opening 27b that is used to discharge low compression gas of flowing through flow into first low pressure.In addition, high compression exhaust passage 38 links together with passage 30 at place, the downstream side of valve 34, thereby the gas of the relief opening 29 that is used to discharge high compressed air of flowing through is flow in this passage 30.In addition, passage 38 is provided with second and drives/close valve 39, and opening/close by controller 32 of this valve controlled.
Here, with the explanation that provides about controller 32.Be input in the controller 32 by pressure transducer 40 from the pressure signal of vacuum box 7 or from the inlet pressure signal of mechanical type booster pump 5, and consume time signal and be input to the controller 32 from timer 42.
When exhaust begins, first drives/close valve 34 will be closed, and second drives/close valve 39 will be opened, and suction booster 3 will be shut down, thereby only have only mechanical type booster pump 5 to move.Like this, will cut off from being used to discharge the first relief opening 27a of low compression gas and being used to discharge the low exhausting air of compressing the second relief opening 27b of gas, and directly be discharged into the outside by high compression exhaust passage 38 from the exhausting air of DOHC29.
In the above-mentioned operation phase that gas is discharged by high compression exhaust passage 38, the atmospheric pressure gas of case inside directly is being discharged into the outside with high compression ratio compression back.Because this gas is under the situation of suction booster 3 of not flowing through, promptly be not pressurized under the situation of pump 3 influence and directly be discharged into the outside, therefore, for example it can be under the situation of the suction booster 3 of not selecting larger capacity exhausting air, thereby obtain higher rate of pumping.
In addition, the rate of pumping of mechanical type booster pump 5 is adjusted to and makes this rate of pumping surpass the rate of pumping of suction booster 3.Therefore, be discharged under the situation that gas can not have at the rate of pumping of mechanical type booster pump 5 to worsen, thus, when the beginning exhaust, rate of pumping does not reduce from original rate of pumping basically.
As shown in Figure 3, when gas was just in time arranged above-mentioned operation phase through high compression exhaust passage 38, this gas surpassed the rate of pumping of suction booster 3 with rate of pumping and discharges, and the rate of pumping of wherein said suction booster 3 is represented with Q, then, air pressure is reduced to medium vacuum P1 from barometric pressure P0.
In second stage, when controller went out to reach predetermined medium vacuum P1 by the input-signal judging from pressure transducer 40, controller 32 was just driven/is closed valve 34 with first and opens, and drove/closed valve 39 with second and close, and suction booster 3 is opened.
By top method, be transported to suction booster 3 through being used to discharge the first relief opening 27a of low compression gas and being used to discharge the low gas that compresses the second relief opening 27b discharging of gas.
By the gas of medium vacuum P1 (in the case) the second relief opening 27b through being used to discharge the first relief opening 27a of low compression gas and being used to discharge low compression gas is carried towards suction booster 3, because the boost function of mechanical type booster pump 5 and the compression function of suction booster 3, can make under the prerequisite that does not worsen rate of pumping, make the gas of medium vacuum P1 reach high vacuum.
Fig. 4 (a)～(d) shows mechanical type booster pump 5 respectively, the ON/OFF time that valve 39 left/closed by valve 34 and second left/close by suction booster 3, first.At exhaust elapsed time t0 place, mechanical type booster pump 5, suction booster 3, first are driven/are closed valve 34 and second and open/close the state that valve 39 is in open and close respectively, cuts out and opens.Under this condition, the gas of relief opening 29 dischargings through being used to discharge high compressed air is directly delivered to the outside through high compression exhaust passage 38.After this, at pressure is the time t1 place of P1, mechanical type booster pump 5, suction booster 3, first are driven/are closed valve 34 and second and open/close the state that valve 39 is in out respectively, opens, opens and closes, and wherein pressure P 1 can obtain by supplying with through the gas of relief opening 29 that is used to discharge high compressed air of mechanical type booster pump 5.Like this, the gas that is discharged is sent to suction booster 3 from being used to discharge the first relief opening 27a of low compression gas and being used to discharge the low second relief opening 27b that compresses gas.
The above embodiment of the present invention makes even also can improve rate of pumping near the rough vacuum scope barometric pressure under the prerequisite that does not worsen rate of pumping when suction booster 3 has small size and little discharge capacity, thereby obtains high vacuum.In addition, it can improve rate of pumping in the whole pressure range that is pressed onto high vacuum from atmosphere.
[second embodiment]
Then, will describe second embodiment.
In this second embodiment, be consumption time signal, rather than the open/close state of pump 5 and 3 changed, and split/close the opening of valve 34 and the 39/state of closing and change from the pressure signal of pressure transducer 40 from timer 42.
By coming scheduled time t1 based on for example calculating to conditions such as the specific operation factor of the swept volume of the compression volume 25 of the volume of vacuum box 7, mechanical type booster pump 5, mechanical type booster pump 5, ambient temperatures, this time t1 is that pressure P 0 drops to the required time of pressure P 1 (medium vacuum).
When controller recognizes time t1 during transit time t0 by the signal from timer 42, controller control running state, thereby the state that mechanical type booster pump 5 is in out, the state that suction booster 3 is in out, first drives/close valve 34 is in the state of opening, and second drives/close valve 39 and be in closing state.Like this, just under the prerequisite that does not worsen rate of pumping, obtained high vacuum through medium vacuum P1.
Second embodiment and first embodiment have improved rate of pumping in the scope that is pressed onto rough vacuum from atmosphere, thereby rate of pumping is improved in the gamut that is pressed onto high vacuum from atmosphere.
In addition, under the situation of adopts pressure sensor 40, there is because dust, waste particulate material or the water droplet in vacuum box 7 or the gas channel causes sensor 40 to stop up and/or the danger of mis-behave the Pressure testing that makes the mistake thus.In addition, under the situation that adopts timer 42, just can not have the danger that detects failure or mis-behave.Therefore, can finish control highly reliably.
In addition, in above-mentioned first and second embodiments, the explanation that provides is that controller 32 automatic opening and closing first are driven/closed valve 34 and second and drive/close valve 39.Yet the operator also can be by being opened and closed valve 34 and 39 by the judgement artificially of pressure transducer 40 detected values according to themselves certainly.
With regard to mechanical type booster pump 5, the explanation that provides at present is that mechanical type booster pump 5 is pawl formula booster pumps 9.Yet without doubt, mechanical type booster pump 5 can be roots-type pump or the progressive cavity pump except pawl formula pump, as long as this mechanical type booster pump 5 disposes the relief opening DOLC27 of discharging low compression ratio gas and the relief opening DOHC29 of discharging high compression ratio gas.
In addition, it should be noted that the explanation that provides at present is, is any for example common gases of air of specific gas that comprises as the gas of medium.
Because the present invention is improved rate of pumping in the scope that is pressed onto rough vacuum from atmosphere, thereby the rate of pumping in the gamut that is pressed onto high vacuum from atmosphere is improved, the present invention can be effectively applied to evacuator that case, chamber and analog are found time, the suction booster that it is provided with booster pump and in series is arranged on the atmospheric side in booster pump downstream side.
Claims (3)
1. an evacuator is used for case, chamber and analog are found time, and this evacuator comprises the mechanical type booster pump, in series is arranged on the suction booster in mechanical type booster pump downstream side and be used for the controller of control gear operation;
Wherein the mechanical type booster pump has the relief opening that at least one is used to discharge low compression gas, by this relief opening, the low compression gas with low compression ratio that compresses with the part compress mode in booster pump is discharged, with the relief opening that is used to discharge high compressed air, by this relief opening, the high compressed air with high compression ratio is discharged; And
Its middle controller is controlled like this, thereby in the exhaust starting stage, by the formula booster pump of operating machine, this gas discharges towards atmospheric side by the relief opening that is used to discharge high compressed air, reach the medium vacuum stage subsequently in exhaust pressure, the suction booster starting operation, and gas is sent to suction booster by being used to discharge the low relief opening that compresses gas.
2. evacuator as claimed in claim 1, its middle controller is discerned medium vacuum by the consumption time of being detected by timer.
3. evacuator as claimed in claim 1, wherein the mechanical type booster pump is a pawl formula vacuum pump, the relief opening that wherein is used to discharge high compressed air is positioned at the wall place of pump case, this wall is in the plane perpendicular to the pump rotor axle, and the relief opening that is used to discharge high compressed air is over against compression volume, and this compression volume is in the plane that is parallel to the plane that comprises the pump rotor running shaft.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP270048/06 | 2006-09-29 | ||
| JP2006270048A JP2008088880A (en) | 2006-09-29 | 2006-09-29 | Evacuation apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101153585A true CN101153585A (en) | 2008-04-02 |
Family
ID=38819504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007101821937A Pending CN101153585A (en) | 2006-09-29 | 2007-09-29 | Evacuation apparatus |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20080080982A1 (en) |
| EP (1) | EP1906023A1 (en) |
| JP (1) | JP2008088880A (en) |
| CN (1) | CN101153585A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104204518A (en) * | 2012-03-05 | 2014-12-10 | 阿特利耶博世股份有限公司 | Improved pumping unit and method for controlling such a pumping unit |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2501735B (en) * | 2012-05-02 | 2015-07-22 | Edwards Ltd | Method and apparatus for warming up a vacuum pump arrangement |
| JP5914449B2 (en) * | 2013-11-06 | 2016-05-11 | アネスト岩田株式会社 | Claw pump |
| US10094381B2 (en) * | 2015-06-05 | 2018-10-09 | Agilent Technologies, Inc. | Vacuum pump system with light gas pumping and leak detection apparatus comprising the same |
| DE102016200112A1 (en) * | 2016-01-07 | 2017-07-13 | Leybold Gmbh | Vacuum pump drive with star-delta switchover |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2492075A (en) * | 1945-10-30 | 1949-12-20 | Kinney Mfg Company | Vacuum pump |
| US5961297A (en) * | 1995-02-28 | 1999-10-05 | Iwata Air Compressor Mfg. Co., Ltd. | Oil-free two stage scroll vacuum pump and method for controlling the same pump |
| US6534940B2 (en) * | 2001-06-18 | 2003-03-18 | Smart Marine Systems, Llc | Marine macerator pump control module |
| KR100876318B1 (en) * | 2001-09-06 | 2008-12-31 | 가부시키가이샤 아루박 | Operation method of vacuum exhaust device and vacuum exhaust device |
| JP2005155540A (en) * | 2003-11-27 | 2005-06-16 | Aisin Seiki Co Ltd | Multistage dry-sealed vacuum pump |
| US7189066B2 (en) * | 2004-05-14 | 2007-03-13 | Varian, Inc. | Light gas vacuum pumping system |
| US7140847B2 (en) * | 2004-08-11 | 2006-11-28 | The Boc Group, Inc. | Integrated high vacuum pumping system |
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2006
- 2006-09-29 JP JP2006270048A patent/JP2008088880A/en active Pending
-
2007
- 2007-09-26 US US11/861,337 patent/US20080080982A1/en not_active Abandoned
- 2007-09-26 EP EP07018944A patent/EP1906023A1/en not_active Withdrawn
- 2007-09-29 CN CNA2007101821937A patent/CN101153585A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104204518A (en) * | 2012-03-05 | 2014-12-10 | 阿特利耶博世股份有限公司 | Improved pumping unit and method for controlling such a pumping unit |
Also Published As
| Publication number | Publication date |
|---|---|
| US20080080982A1 (en) | 2008-04-03 |
| JP2008088880A (en) | 2008-04-17 |
| EP1906023A1 (en) | 2008-04-02 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20080402 |