CN101136206A - Method for connecting magnetic head rectangular bar in photoetching technology - Google Patents
Method for connecting magnetic head rectangular bar in photoetching technology Download PDFInfo
- Publication number
- CN101136206A CN101136206A CNA2006101260800A CN200610126080A CN101136206A CN 101136206 A CN101136206 A CN 101136206A CN A2006101260800 A CNA2006101260800 A CN A2006101260800A CN 200610126080 A CN200610126080 A CN 200610126080A CN 101136206 A CN101136206 A CN 101136206A
- Authority
- CN
- China
- Prior art keywords
- magnetic head
- rectangular bar
- head rectangular
- holding device
- framework
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Magnetic Heads (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
Abstract
The method for connecting strips of magnetic head in photo etching process includes: form a holding device with an adhesive surface; provide a group of magnetic head strips each of which has a first surface for forming air bearing face and a second surface reversed to the first surface, and fix every strip of magnetic head onto the holding device the adhesive surface of which faces to the first surface of the strip; connect the strips by sealing adhesive; provide a carrier and fix it onto the second surface of the strips; remove the holding device. A magnetic head producing method is also disclosed.
Description
Technical field
The present invention relates to a kind of manufacture method that is used for the magnetic head in the information recording disk driver, particularly, the present invention relates to a kind of method that in photoetching process (photolithography process), magnetic head rectangular bar (sliderrow bar) is coupled together.
Background technology
A kind of common information storing device is a disk drive system, and it uses magnetic media to store data and the removable read/write head that is arranged at this magnetic media top comes optionally to write on the magnetic media such as reading of data on the disk or with data from magnetic media.
Fig. 1 a is depicted as traditional disc driver 200, and disk 101 is installed on the Spindle Motor 102 and by its rotation.Carry magnetic head fold piece combination 100 on the voice coil motor arm 104.Described magnetic head fold piece combination 100 comprises the magnetic head 103 with read-write sensor.The motion of one voice coil motor control voice coil motor arm 104, and then control head 103 moving between disk 101 surperficial tracks finally realize read-write sensor data write on disk 101 of magnetic head 103.When running status, comprise and form aerodynamic force between the magnetic head 103 of reading and writing sensor and the disk 101 and contact, and produce lift.The mutual balance of elastic force that the cantilever by magnetic head fold piece combination 100 of this lift and opposite sign but equal magnitude applies, and then cause in the whole radial stroke of motor arm 104, the surface of the disk 101 of rotation forms and keeps predetermined flying height.
Fig. 1 b has showed the stereographic map that magnetic head shown in Fig. 1 a is observed from the bottom.As shown in the figure, form magnetic read/write head 116 on the side of this magnetic head 103, be used to realize the data read-write operation of magnetic head with respect to disk 101.Described magnetic head 103 has air bearing face (air bear surface, ABS) 117 towards disk 101.When disc driver moves, produce aerodynamics between the air bearing face 117 of described magnetic head 103 and the disk 101 of high speed rotating and contact, thereby make magnetic head 103 dynamically be suspended in disk 101 tops and realize data read-write operation.
For making magnetic head successfully carry out data read-write operation with respect to disk, magnetic head must have good flight stability, that is, when flying magnetic head was above disk, the flying height of magnetic head must keep constant numerical value.If the flight stability of magnetic head is poor, then flying height is indefinite, promptly sometimes flying height become higher and sometimes this flying height become lower.If flying height is too high, then magnetic head possibly can't successfully be finished read-write operation; If flying height is too low, then magnetic head possibility scratch disk causes disk and/or magnetic head to damage.
Be appreciated that ground, the machining precision of magnetic head air loading end is a key factor of the above-mentioned flight stability of influence.Here, briefly introduce the formation technology of magnetic head air loading end.In general, the air bearing face of magnetic head is to pass through photoetching process and vacuum etch processes (vacuum etching process) successively and form.At first, form face (ABS-forming surface) at the air bearing face and go up covering photoresist layer (photo-resistcoating); Then, by exposure air bearing face pattern (ABS pattern) is sent to above-mentioned photoresist layer; Next, remove by the unexposed portion of development (developing) operation described photoresist layer; At last, by the part that is not covered on the described air bearing face of the ion beam milling formation face, thereby form the air bearing face by photoresistance.
In association area, the magnetic head work flow normally carries out at yoke long strips, and wherein each magnetic head rectangular bar is made of a plurality of magnetic head bodies.According to different product types, a magnetic head rectangular bar may comprise 30-100 magnetic head body.These magnetic head rectangular bars are packaged together mutually by cementing agent and form the long strips combination.After completion of processing, these long strips combinations are disconnected from each other, and each long strips is cut and forms independent magnetic head.
Fig. 2 a-2b has showed the magnetic head rectangular bar that is used to form magnetic head.As shown in the figure, the width of magnetic head rectangular bar 2 is W, and thickness is T.Described magnetic head rectangular bar 2 has the air bearing face and forms face 3.Fig. 2 c has showed the carrier 1 that is used to carry said head long strips 2.Be traditional magnetic head rectangular bar method of attachment below.At first, as shown in Figure 3, by point gum machine 6 a kind of quick curing glue (fast-curing glue) 5 is coated with and is set on the above-mentioned carrier 1.Then, as shown in Figure 4, utilize vacuum cups 7 that magnetic head rectangular bar 2 is moved to described carrier 1 and magnetic head rectangular bar 2 is bonded on the carrier 1 by above-mentioned quick curing glue 5.Here, described magnetic head rectangular bar 2 has the magnetic head installed surface 4 that contacts with above-mentioned quick curing glue 5, and this magnetic head installed surface 4 is relative with described air bearing face formation face 3.Next, as shown in Figure 5, repeat above-mentioned two steps and all be attached to carrier 1 up to all magnetic head rectangular bars 2.Then, described long strips was kept 1-3 hour, make that solidifying glue 5 fast thoroughly solidifies, and then make all magnetic head rectangular bars 2 be fixed on the described carrier 1.Then, as shown in Figure 6, by point gum machine 8 a kind of packaging plastic 9 is coated with and is located in the gap that is formed between the magnetic head rectangular bar 2.At last, utilize ultraviolet ray that above-mentioned packaging plastic 9 is exposed, make packaging plastic 9 solidify gradually, thereby all magnetic head rectangular bars 2 are fixed together and form magnetic head rectangular bar and make up.
Fig. 7 a has showed one group of magnetic head rectangular bar 2 that is packaged together and is bonded on the carrier 1.Fig. 7 b has showed among Fig. 7 a the cut-open view along the Z-Z direction.With reference to figure 7b, form one group of glue depression 30 in the gap between the described magnetic head rectangular bar 2 (not label).These glue depressions 30 are owing to shrinking naturally of glue causes in above-mentioned packaging plastic 9 solidification processs.With reference to figure 7a-7b, the air bearing face of described magnetic head rectangular bar 2 forms face 3 and has constituted the basic surface that magnetic head rectangular bar makes up jointly with glue depression 30, will be coated with photoresist layer on this basic surface.
With reference to figure 7b, be readily appreciated that the flatness of the basic surface of said head long strips combination depends primarily on two factors: the consistency of thickness of glue depression 30 and said head long strips 2.At first,, be generally the hundreds of micron, therefore be difficult to improve the consistency of thickness of magnetic head rectangular bar 2 because magnetic head rectangular bar 2 has very little thickness.On the other hand, because the intrinsic characteristic of above-mentioned packaging plastic 9, it is 30 inevitable that glue caves in.Connect in the operation at traditional magnetic head rectangular bar, because each magnetic head rectangular bar 2 and the packaging plastic 5 that is positioned at below it have different thickness (being that magnetic head rectangular bar 2 and packaging plastic 5 have difference in thickness), simultaneously owing to there is glue depression 30, so the flatness of the basic surface of magnetic head rectangular bar combination seriously reduces.Correspondingly, the photoresist layer that is formed on the basic surface of magnetic head rectangular bar combination has relatively poor flatness.
In the photoetching that forms the magnetic head air loading end, in the technology, the flatness of photoresist layer has bigger influence to the manufacturing accuracy of magnetic head air loading end.Specifically, to form the flatness of photoresist layer of face relatively poor if be covered in the air bearing face, and then the air bearing face pattern that is delivered on the photoresist layer by exposure will be with respect to predetermined air bearing face pattern generating shape distortion.Correspondingly, the air bearing face pattern that is formed on the magnetic head rectangular bar by etch process will be misfitted with predetermined air bearing face.This will make the magnetic head with this air bearing face pattern have relatively poor flight stability, and make disc driver have relatively poor flying quality, and might cause disk and/or magnetic head to damage.
Therefore, be necessary to provide a kind of magnetic head rectangular bar method of attachment of improvement, to overcome the shortcoming of prior art
Summary of the invention
An aspect of of the present present invention provides a kind of method that in photoetching process magnetic head rectangular bar is coupled together, and its air bearing face that can greatly improve the magnetic head rectangular bar that couples together forms the flatness of face.
Another aspect of the present invention provides a kind of magnetic head manufacturing method, and it can improve the machining precision of magnetic head.
For achieving the above object, a kind of method that in photoetching process magnetic head rectangular bar is coupled together comprises the steps: that (1) forms the holding device with tacky surfaces; (2) provide one group have the first surface that is used to form the air bearing face and with the magnetic head rectangular bar of this first surface opposed second surface, and described each magnetic head rectangular bar is fixed on the described holding device, make described first surface face tacky surfaces; (3) by packaging plastic described magnetic head rectangular bar is connected to each other; (4) provide a carrier and being fixed on the second surface of described magnetic head rectangular bar; (5) remove described holding device.
In one embodiment, described step (1) comprising: a framework with perforate (a) is provided; (b) provide the film that comprises the non-adhesive layer that overlaps together as the viscous layer of described tacky surfaces and with this viscous layer, and described film is covered in framework in the mode of described viscous layer frame oriented; (c) provide vacuum to transmit anchor clamps, this vacuum is transmitted anchor clamps and is comprised substrate and be positioned at teat on the substrate to have one group of vacuum hole on the described teat; (d) described vacuum is transmitted anchor clamps and be assembled on the framework, described teat is housed in the perforate of framework and with the non-adhesive layer of described film contacts, thereby form described holding device.In addition, described method can further include after described step (1), and the space that vacuum hole and non-adhesive layer are defined is evacuated, so that produce air pressure film is pressed in step on the teat.
Described step (3) can comprise: a limit offset plate with opening (i) is provided, and will limits offset plate to be fixed to the viscous layer of described film, magnetic head rectangular bar is come out from described opening; (ii) packaging plastic is inserted in the opening of (dispensing) described limit offset plate: (iii) roll the described packaging plastic that is filled in the described limit offset plate opening, described packaging plastic is flow in the space between the described magnetic head rectangular bar; (iv) cure package glue, thus all magnetic head rectangular bars are connected to each other.
Described step (4) can comprise: a kind of quick curing glue is provided and it is coated with the second surface that is set to magnetic head rectangular bar; Carrier is fixed to the second surface of magnetic head rectangular bar by described quick curing glue.
Described step (5) can comprise: (A) vacuum is transmitted anchor clamps and remove from framework; (B) film is removed from magnetic head rectangular bar.Described packaging plastic can be any suitable cementing agent, such as cyanoacrylate adhesive.
A kind of magnetic head manufacturing method comprises the steps: that (1) forms the holding device with tacky surfaces; (2) provide one group of magnetic head rectangular bar that has the first surface that is used to form the air bearing face and be positioned at the second surface of this first surface opposition side, and described each magnetic head rectangular bar is fixed to described holding device, make described first surface in the face of tacky surfaces; (3) by packaging plastic described magnetic head rectangular bar is connected to each other: (4) provide a carrier and are fixed on the second surface of described magnetic head rectangular bar; (5) remove described holding device; (6) first surface of the described magnetic head rectangular bar of etching; (7) described magnetic head rectangular bar is cut into independent magnetic head.
By following description also in conjunction with the accompanying drawings, it is more clear that the present invention will become, and these accompanying drawings are used to explain embodiments of the invention.
Description of drawings
Fig. 1 a is the stereographic map of traditional magnetic disk driving arrangement.
Fig. 1 b is the stereographic map of the magnetic head of magnetic disk drive shown in Fig. 1 a.
Fig. 2 a is the stereographic map that magnetic head rectangular bar connects the magnetic head rectangular bar that uses in the operation.
Fig. 2 b is the partial enlarged drawing of the part of magnetic head rectangular bar A shown in Fig. 2 a.
Fig. 2 c is the stereographic map of the carrier that uses in traditional magnetic head rectangular bar method of attachment.
Fig. 3 has showed that will solidify glue fast is coated with and is set to the flow process on the carrier shown in Fig. 2 c.
Fig. 4 has showed magnetic head rectangular bar has been bonded to the flow process on the carrier shown in Fig. 2 c.
Fig. 5 has showed and has been fixed in the yoke long strips on the carrier shown in Fig. 2 c.
Fig. 6 has showed packaging plastic has been coated with the flow process that is set in the gap that is formed between the magnetic head rectangular bar shown in Figure 5.
Fig. 7 a has showed and is packaged together mutually after flow process shown in Figure 6 finishes and is fixed in yoke long strips on the carrier.
Fig. 7 b has showed that structure is along the cut-open view of Z-Z direction shown in Fig. 7 a.
Fig. 8 has showed the described FB(flow block) that yoke long strips is connected to each other of one embodiment of the invention.
Fig. 9 a-9d is a series of views, has showed the flow process that forms holding device, and this holding device is used for yoke long strips is fixed thereon provisionally.
Figure 10 a-10c is a series of views, has showed yoke long strips is attached to process on the holding device that is formed by flow process shown in Fig. 9 a-9d.
Figure 11 a-11d is a series of views, has showed the flow process that the said head long strips is encapsulated, and these magnetic head rectangular bars are carried on the described holding device by flow process shown in Figure 10 a-10c.
Figure 12 a-12b has showed the flow process that carrier is installed to the magnetic head rectangular bar back side, and these magnetic head rectangular bars are packaged together mutually by the flow process shown in Figure 11 a-11d.
Figure 13 a-13d has showed the flow process that above-mentioned holding device is removed.
Figure 14 has showed the surface scan performance plot of the magnetic head rectangular bar combination that is formed by classic method and the described method of one embodiment of the invention respectively.
Figure 15 has showed the glue depression by the pending surface of the yoke long strips of classic method encapsulation.
Figure 16 has showed the glue depression by the pending surface of the yoke long strips of the inventive method encapsulation.
Figure 17 has showed the described magnetic head work flow of one embodiment of the invention block diagram.
Embodiment
The method that in the described photoetching process of one embodiment of the invention yoke long strips is coupled together is described now.With reference to figure 8, this method comprises: form the holding device (step 101) with tacky surfaces; Provide one group have the first surface that is used to form the air bearing face and with the magnetic head rectangular bar of this first surface opposed second surface, and described each magnetic head rectangular bar is fixed to holding device, make described first surface in the face of tacky surfaces (step 102): magnetic head rectangular bar to be connected to each other formation magnetic head rectangular bar combination (step 103) by packaging plastic; A carrier is provided and is fixed on the second surface of magnetic head rectangular bar (step 104); Remove holding device (step 105).
Fig. 9 a-9d has showed the step 101 in the said method.Shown in Fig. 9 a, provide to have the framework 10 that perforate 31 and periphery have one group of screw 11.Described framework 10 can be formed such as steel or stupalith, so that enough rigidity is provided by any stiff materials.Provide by viscous layer 12b simultaneously and laminate the film 12 that the non-adhesive layer 12a on this viscous layer 12b constitutes.By described viscous layer 12b is attached to framework 10 and described film 12 is attached to framework 10, thereby the perforate 31 of framework 10 is thoroughly covered by described film 12.Then, shown in Fig. 9 b, the part that described film 12 surpasses framework 10 peripheries is cut off, thereby makes film 12 have the shape consistent with framework 10.
Then, shown in Fig. 9 c-9d, provide vacuum to transmit anchor clamps 13.This vacuum is transmitted the teat 15 that anchor clamps 13 have substrate 132 and extend to form from this substrate 132.Corresponding with the screw 11 of described framework 10, form one group of screw 14 around the described substrate 132.Form one group of vacuum hole 16 on the described teat 15.Then described vacuum is transmitted anchor clamps 13 and be assembled to framework 10, described teat 15 is contained in the perforate 31 (with reference to figure 9a), and teat 15 is by the non-adhesive layer 12a of film 12 covering (with reference to figure 9a), thus formation holding device 300.Described vacuum is transmitted anchor clamps 13 can pass corresponding screw 11 and 14 and be assembled to described framework 10 by one group of screw (figure does not show).At last, will be formed at described vacuum by suitable equipment such as pump and transmit the vacuum hole 16 of anchor clamps 13 and be evacuated, thereby the generation air pressure is pressed onto described teat 15 with described film 12 with the space between the film 12.
Figure 10 a-10c has showed the step 102 in the said method.As shown in the figure, yoke long strips 18 is fixed to above-mentioned holding device 300.Each magnetic head rectangular bar 18 has width W 1 and thickness T 1.In addition, described each magnetic head rectangular bar 18 has first surface 19 (the air bearing face forms face, with reference to figure 13d) and and these first surface 19 opposing second surface 182 (magnetic head installed surface) that are used to form the air bearing face.Described first surface 19 will such as processed in the photo-mask process, thereby form air bearing face pattern in follow-up manufacturing process on this surface.In this step, vacuum pick 17 is repeated to use, so that fixed head long strips 18 and it is moved to the viscous layer 12b of described film 12.Then, each magnetic head rectangular bar 18 is attached on the viscous layer 12b, and described first surface 19 is attached to this viscous layer 12b.
Figure 11 a-11d has showed a series of views of step 103 in the said method.At first, shown in Figure 11 a, move limit offset plate (glue-restraining plate) 21 with vacuum pick 20 with opening 211, and will limit offset plate 21 to bond on the viscous layer 12b of described film 12, thereby the magnetic head rectangular bar 18 by described viscous layer 12b fixing is come out from described opening 211.Then, shown in Figure 11 b, with a kind of packaging plastic 23, for example cyanoacrylate adhesive (cyanoacrylate) is coated with and is set in the described opening 211 by point gum machine 22.Next, shown in Figure 11 c-11d, roll the described packaging plastic 23 that is contained in the opening 211, make described packaging plastic 23 flow to all equably and be formed in the gap between the magnetic head rectangular bar 18.Described roller compaction processes realizes by roller (laminator) 270.Particularly, described roller 270 comprises a pair roller 27 and the linear film (liner film) 28 between this pair roller 27.Certainly, described roller 270 also can have other appropriate configuration and realizes above-mentioned functions.When carrying out roller compaction processes, described linear film 28 is covered in the second surface 182 of described magnetic head rectangular bar 18, and described two rollers 27 then roll along described linear film 28, thereby make packaging plastic 23 be extruded.At last, described packaging plastic 23 is solidified, make that all magnetic head rectangular bars 18 are adhered to one another.
Figure 12 a-12b has showed a series of views of step 104 in the said method.At first, shown in Figure 12 a, a kind of quick curing glue 24 is coated with on the second surface 182 that is set to described magnetic head rectangular bar 18 by point gum machine 25.Then, shown in Figure 12 b, be fixed on the second surface 182 of described magnetic head rectangular bar 18 with vacuum pick 27 mobile vehicle 26 and by above-mentioned quick curing glue 24, thereby monolithic magnetic head long strips 18 is covered up hill and dale by described carrier 26.
In addition, elastic layer 29 (with reference to figure 13d) can be set between described magnetic head rectangular bar 18 and the carrier 26.When shrinking owing to self-characteristic, described quick curing glue 24 will produce differential contraction stress.This differential contraction stress will cause carrier 26 and the magnetic head rectangular bar 18 that is carried on this carrier 26 produces unfavorable distortion.Described elastic layer 29 helps to reduce this distortion.In addition, described 29 whiles of elastic layer are as the hardening agent (curing agent) of described quick curing glue 24, with the convenient flow process of solidifying.Though should be noted that and use elastic layer to absorb stress in this embodiment: yet, when stress is very faint, also can not use this elastic layer.
Figure 13 a-13d has showed a series of views of step 105 in the said method.At first, shown in Figure 13 a, described vacuum is transmitted anchor clamps 13 remove, thereby form combination 800 from framework 10.Optimally, before described vacuum transmission anchor clamps 13 are removed from framework 1, can eliminate the air pressure that is applied to described film 12, this air pressure makes film 12 compress vacuum and transmits on the teat 15 of anchor clamps 13, thereby makes the dismounting flow process become simpler.Then, shown in Figure 13 b,, make the non-adhesive layer 12a of described film 12 towards the top with described combination 800 upsets.Next, shown in Figure 13 c, the non-adhesive layer 12a of described film 12 is peeled off from described viscous layer 12b, viscous layer 12b is removed from magnetic head rectangular bar 18 such as dissolution method by suitable mode again.Form combination 900 by removing film 12.Figure 13 d has showed 900 cut-open views along the B-B direction of combination shown in Figure 13 c.As shown in the figure, described magnetic head rectangular bar 18 is by packaging plastic 23 and together adhered to one another, thereby forms the magnetic head rectangular bar combination, and this packaging plastic 23 is by described limit offset plate 21 restrictions.Described carrier 26 and elastic layer 29 are fixed to described limit offset plate 21 by quick curing glue 24.Especially, therefore alignment ideally mutually has higher flatness between the first surface 19 of described magnetic head rectangular bar 18.
Figure 14 has showed that respectively the air bearing face of the magnetic head rectangular bar combination that is formed by classic method and the inventive method forms the surface scan performance plot of face.As shown in the figure, represent the curve 80 of the surface scan characteristic of magnetic head rectangular bar combination of the present invention, more Paint Gloss than the curve 81 of the surface scan characteristic of representing the combination of classic method magnetic head rectangular bar.In other words, use the inventive method can obtain the magnetic head rectangular bar aggregate surface flatness more desirable than classic method.
Figure 16 has showed that the air bearing face that is formed at the magnetic head rectangular bar combination forms the glue depression 400 of face.As shown in the figure, the degree of depth (representing with 23R) of this glue depression 400 only is 1 micron, and the degree of depth of the glue that forms in classic method depression 30 (representing with 9R, is 20 microns as shown in figure 15).That is, the magnetic head rectangular bar combination is more shallow than the glue depression that classic method produces.
With conventional art relatively owing to form face 19 with the air bearing face of magnetic head rectangular bar 18, rather than with its magnetic head installed surface as reference field, the influence that is caused by the difference in thickness of magnetic head rectangular bar is reduced, even avoids fully.In addition, because the air bearing face of magnetic head rectangular bar 18 forms face 19 and is pressed in tightly on the teat 15 of anchor clamps 13, the glue contraction that the air bearing face forms face is stopped that by described teat 15 therefore, the glue depression mainly occurs in the second surface (magnetic head installed surface) 182 of magnetic head rectangular bar; So the influence that is formed the comprehensive flatness generation of face by 400 pairs of air bearing faces of glue depression is reduced greatly.Promptly, the flatness that the air bearing face of described magnetic head rectangular bar combination (interconnected magnetic head rectangular bar) forms face is greatly improved, thereby can have good flight stability by the magnetic head that the inventive method is processed to form, and then magnetic disk drive has good flying quality, also can not be damaged between disk and/or the magnetic head.
With reference to Figure 17, a kind of magnetic head manufacturing method comprises the steps: to form the holding device (step 201) with tacky surfaces; Yoke long strips is provided, described each magnetic head rectangular bar has the first surface that is used to form the air bearing face and reaches and this first surface opposed second surface, and described magnetic head rectangular bar is fixed to holding device, make first surface face tacky surfaces (step 202); By packaging plastic magnetic head rectangular bar is coupled together (step 203): provide carrier also this carrier to be fixed to the second surface (step 204) of described magnetic head rectangular bar; Remove described holding device (step 205); The first surface (step 206) of the described magnetic head rectangular bar of etching; Described magnetic head rectangular bar is cut into independent magnetic head (step 207.)
Above invention has been described in conjunction with most preferred embodiment, but the present invention is not limited to the embodiment of above announcement, and should contain various modification, equivalent combinations of carrying out according to essence of the present invention.
Claims (10)
1. a method that in photoetching process magnetic head rectangular bar is coupled together comprises the steps:
(1) forms holding device with tacky surfaces;
(2) provide one group have the first surface that is used to form the air bearing face and with the magnetic head rectangular bar of this first surface opposed second surface, and described each magnetic head rectangular bar is fixed to holding device, make described first surface face tacky surfaces;
(3) by packaging plastic magnetic head rectangular bar is connected to each other;
(4) provide a carrier and being fixed on the described second surface of magnetic head rectangular bar;
(5) remove described holding device.
2. method according to claim 1 is characterized in that step (1) comprising:
(a) provide a framework with perforate;
(b) provide the film that comprises the non-adhesive layer that overlaps together as the viscous layer of described tacky surfaces and with this viscous layer, and described film is covered in framework in the mode of described viscous layer frame oriented;
(c) provide vacuum to transmit anchor clamps, this vacuum is transmitted anchor clamps and is comprised substrate and be positioned at teat on the substrate to have one group of vacuum hole on the described teat;
(d) described vacuum is transmitted anchor clamps and be assembled on the framework, described teat is housed in the perforate of framework and with the non-adhesive layer of described film contacts, thereby form described holding device.
3. method according to claim 2, it is characterized in that further being included in described step (1) after, the space that vacuum hole and non-adhesive layer are defined is evacuated and produces air pressure, thereby film is pressed in step on the described teat.
4. method according to claim 3 is characterized in that described step (3) comprising:
(i) provide a limit offset plate, and will limit offset plate to be fixed to the viscous layer of described film, magnetic head rectangular bar is come out from described opening with opening;
(ii) packaging plastic is inserted in the opening of described limit offset plate;
(iii) roll the packaging plastic of inserting in the limit offset plate opening, described packaging plastic is flow in the space between the magnetic head rectangular bar;
(iv) solidify described packaging plastic, thereby all magnetic head rectangular bars are connected to each other.
5. method according to claim 4 is characterized in that described step (5) comprising:
(A) described vacuum being transmitted anchor clamps removes from framework;
(B) described film is removed from described magnetic head rectangular bar.
6. method according to claim 1 is characterized in that described step (4) comprising:
A kind of quick curing glue is provided and it is coated with the second surface that is set to described magnetic head rectangular bar;
Described carrier is fixed to the second surface of described magnetic head rectangular bar by described quick curing glue.
7. method according to claim 6 is characterized in that: be provided with the elastic layer that is used to absorb the differential contraction stress that is produced by quick curing glue between the second surface of described carrier and magnetic head rectangular bar.
8. method according to claim 1 is characterized in that: described packaging plastic comprises cyanoacrylate adhesive.
9. a magnetic head manufacturing method comprises the steps:
(1) forms a holding device with tacky surfaces;
(2) provide one group of magnetic head rectangular bar that has the first surface that is used to form the air bearing face and be positioned at the second surface of this first surface opposition side, and described each magnetic head rectangular bar is fixed to described holding device, make described first surface in the face of tacky surfaces;
(3) by packaging plastic described magnetic head rectangular bar is connected to each other;
(4) provide a carrier and being fixed on the second surface of magnetic head rectangular bar;
(5) remove described holding device;
(6) first surface of the described magnetic head rectangular bar of etching;
(7) described magnetic head rectangular bar is cut into independent magnetic head.
10. method according to claim 9 is characterized in that described step (1) comprising:
(a) provide a framework with perforate;
(b) provide the film that comprises the non-adhesive layer that overlaps together as the viscous layer of described tacky surfaces and with this viscous layer, and described film is covered in framework in the mode of described viscous layer frame oriented;
(c) provide vacuum to transmit anchor clamps, this vacuum is transmitted anchor clamps and is contained substrate and be positioned at teat on the substrate, has one group of vacuum hole on the described teat;
(d) described vacuum is transmitted anchor clamps and be assembled to framework, teat is housed in the perforate of framework and with the non-adhesive layer of described film contacts, thereby form described holding device.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2006101260800A CN101136206A (en) | 2006-08-31 | 2006-08-31 | Method for connecting magnetic head rectangular bar in photoetching technology |
| JP2007225345A JP2008059744A (en) | 2006-08-31 | 2007-08-31 | Method for coupling slider bars in photolithography process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2006101260800A CN101136206A (en) | 2006-08-31 | 2006-08-31 | Method for connecting magnetic head rectangular bar in photoetching technology |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101136206A true CN101136206A (en) | 2008-03-05 |
Family
ID=39160263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2006101260800A Pending CN101136206A (en) | 2006-08-31 | 2006-08-31 | Method for connecting magnetic head rectangular bar in photoetching technology |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2008059744A (en) |
| CN (1) | CN101136206A (en) |
-
2006
- 2006-08-31 CN CNA2006101260800A patent/CN101136206A/en active Pending
-
2007
- 2007-08-31 JP JP2007225345A patent/JP2008059744A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008059744A (en) | 2008-03-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP1127679A3 (en) | Information recording medium, method for manufacturing the medium, and apparatus for manufacturing the medium | |
| CN101136206A (en) | Method for connecting magnetic head rectangular bar in photoetching technology | |
| US7540077B2 (en) | Method for bonding slider row bars for photolithography process | |
| CN101615398A (en) | Method that in the photoetching process magnetic head rectangular bar is coupled together and magnetic head manufacturing method | |
| US7549214B2 (en) | Method for bonding slider row bars for photolithography process | |
| EP0067095B1 (en) | Method for making rigid optical discs | |
| US6094805A (en) | Method for manufacturing magnetic head | |
| US20100000433A1 (en) | Method for bonding slider row bars for photolithography process and method for manufacturing sliders | |
| EP1321928B1 (en) | Method of magnetic transfer to flexible medium | |
| JP4648081B2 (en) | Bonding device and bonding method | |
| US20060280897A1 (en) | Optical recording medium and method of producing same | |
| JPH08161771A (en) | Information medium as well as method and apparatus for its manufacture | |
| JPH04134717A (en) | Production of floating type magnetic head | |
| JPH04167217A (en) | Regulating method for height of composite magnetic head | |
| JPS6376128A (en) | Optical information recording medium | |
| JP3058054B2 (en) | Magnetic head | |
| JP3098816B2 (en) | Optical disk recording medium | |
| JPH07240016A (en) | Magnetic head and production of magnetic head | |
| CN1949373B (en) | Optical picking-up device and mfg. method thereof | |
| JP2962610B2 (en) | Method of manufacturing composite thin film magnetic head | |
| JPS6313147A (en) | Production of optical recording medium | |
| JPH04121843A (en) | Production of optical disk | |
| JPH10289494A (en) | Manufacture of pasting type optical disk | |
| JPH0528686A (en) | Floating type magnetic head and mounting structure thereof | |
| JP2001297434A (en) | Magnetic transfer method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20080305 |