CN101135745A

CN101135745A - Optical element, method of manufacturing the same, and projector

Info

Publication number: CN101135745A
Application number: CNA2007101478148A
Authority: CN
Inventors: 远藤隆史; 桥爪俊明
Original assignee: Seiko Epson Corp
Current assignee: Seiko Epson Corp
Priority date: 2006-08-31
Filing date: 2007-08-30
Publication date: 2008-03-05

Abstract

The present invention provides optical element such as high class phase difference element adhibitted with thin membraneous birefringence material as well as its manufacture method. A paper-thin phase difference plate (14) is nipped between a first substrate (11) and a second substrate (12) through adhesive layer (16, 17). Under the state, because the bending flat surface (14d) of the borderline of the first adhesive layer (16) and the phase difference plate (14), balances out with the surface (14e) of the borderline of the second adhesive layer (17) and the phase difference (14), it is able to prevent from generating refraction capability of lens due to phase difference plate (14). Thus, it is able to prevent the phenomena of spot light, radiation through the ray of tabulate phase optical element (10) due to the refraction difference in the phase optical element (10) as a whole.

Description

Optical element, its manufacture method and projector

Technical field

The present invention relates to as the optical element of phase element etc. and the manufacture method of this optical element, also relates to the projector of having assembled this optical element.

Background technology

As existing projector, has following projector: dispose the liquid crystal light valve of one group of polarization plates by front and back, image light is controlled and formed to transmitted light at liquid crystal panel.And, in projector so, there is following projector: the retardation element that for example compensates usefulness by configuration between liquid crystal panel and incident polarization plate, to compensating, and improve contrast (with reference to patent documentation 1) owing to resulting from the phase deviation that the birefringence that residues in the pre-dumping in the liquid crystal produces.

[patent documentation 1] spy opens flat 10-312166 communique

As above-mentioned retardation element, though the birefringent material with sapphire, crystal etc. is formed, but following situation is arranged also: will be with formed extremely thin cuticular plate member of birefringent material so, by adhesive securement on the transparency carrier of for example using with formed thick supports such as glass.Under this situation,, become little and be the phenomenon of lens-shaped so the central portion of cuticular plate member, produces the surface of cuticular plate member because of the distortion of bonding agent swell because will press on thick substrate with its periphery by the cuticular plate member that crystal etc. constitutes.And, in the filming operation, adopt under the etched situation, the concavo-convex situation that produces thin squamous on the surface of birefringent material is arranged.To become lens-shaped, have tiny concavo-convex cuticular plate member on the surface be that retardation element is assembled under the situation in the projector on the surface will be so, produces the problem that projection image bent, produced the part of not focusing.

Summary of the invention

So, the present invention, purpose is to provide the optical element and the manufacture method thereof of the high-precision retardation element that attached thin membranaceous birefringent material etc.

And, the present invention, purpose is to provide the projector that can carry out the projection of image with high precision as above-mentioned optical element by assembling.

In order to address the above problem, the optical element among the present invention possesses: (a) the 1st substrate; (b) the 2nd substrate; (c) have the polarizer of following laminal main part, this main part is formed with inorganic material, has the refractive index anisotropy, and is compared to the thickness of the 1st substrate and the 2nd substrate and forms thinly, is disposed between the 1st substrate and the 2nd substrate; (d) be filled in the 1st bond layer between the 1st substrate and the polarizer; (e) be filled in the 2nd bond layer between polarizer and the 2nd substrate.

In above-mentioned optical element, because have: the main part that approaches with will having refractive index anisotropy and relativity, remain in the 1st thick substrate of relativity ground and the distinctive sandwich construction between the 2nd substrate by bond layer, even, also can remedy such not good shape of main part by the filling shape of the 1st and the 2nd bond layer so the polarizer generation deflection deformation that when the manufacturing of optical element, approaches to relativity, exist under the tiny concavo-convex situation on the surface.More specifically, even for example when polarizer being fixed on the 1st substrate, make the central uplift of laminal main part, also can be when being fixed in the 2nd substrate on the polarizer remedy so to swell and offset distortion by the 2nd bond layer owing to the 1st bond layer.Also have, the 1st substrate and the 2nd substrate than phase differential thickness of slab, become difficult with deflection, can not have deflection, distortion as the shape of optical element integral body, also can be enough high as the optical element integral intensity.According to more than, in this optical element, because the effect that by polarizer the time, becomes and be difficult to produce undesirable optically focused, disperse etc., so can make the optical characteristics of optical element more accurate, under situation about it being assembled in the projector, can carry out the projection of high-precision image.

And, if according to concrete mode of the present invention or viewpoint, then in above-mentioned optical element: the refractive index of the 1st bond layer, with the refractive index of the 2nd bond layer about equally.Under this situation, because the concave shape of the convex form of the 1st bond layer that can be by a side and the opposing party's the 2nd bond layer and fill up the deflection deformation of polarizer mutually, can by the refractive index that equates fill deflection the front and back of polarizer, so, can be not the refracting power of plus or minus just owing to optical element produces any lens effect as long as the 1st substrate and the 2nd substrate are smooth.And then even exist under the tiny concavo-convex situation at above-mentioned optical element surface, also this is concavo-convex because can fill up by bonding agent, so can prevent owing to this tiny concavo-convex cause light generation scattering, refraction.

If according to other mode of the present invention, the refractive index of polarizer then, with the refractive index of the 1st and the 2nd bond layer about equally.Under this situation, can be suppressed at the reflection on the surface of polarizer, can make the optical characteristics of optical element more accurate.

If according to other mode of the present invention, polarizer then, at least a portion around the laminal main part that produces phase differential also possesses the heavy section with thickness thicker than this main part.Under this situation, can it be used easily, and when polarizer being fixed on the 1st substrate, pushing polarizer and improve the operability of manufacturing process with respect to the 1st substrate easily.

If according to other mode of the present invention, then polarizer is formed with quartzy; The the 1st and the 2nd substrate, with crystal, sapphire, and any of glass formed.Under this situation, crystal, though so the low deflection easily of hardness because be compared to sapphire etc., as above-mentioned, owing to by the 1st and the 2nd bond layer clamping polarizer, can prevent to produce the effect of optically focused etc. by harder the 1st substrate and the 2nd substrate and from front and back.

If according to other mode of the present invention, then the 1st and the 2nd bond layer is formed by light-cured resin.Under this situation, the operation that the clamping polarizer is fixed between the 1st substrate and the 2nd substrate becomes simply, can provide high-precision optical element with easy manufacturing process.

Projector among the present invention, projection possesses the optical element among above-mentioned the present invention by by the formed image light of the optic modulating device that lighting device threw light on by projecting lens.Under this situation, can make the high precisionization such as optical compensation of the liquid crystal panel of optic modulating device by optical element of the present invention, can the high-quality image of projection.

In the concrete mode of above-mentioned projector, optic modulating device possesses the liquid crystal panel of transmission-type and a pair of polarizer that the holding liquid crystal panel is disposed; Optical element is disposed between at least one side and liquid crystal panel of a pair of polarizer.Under this situation, optical element is for example as optical compensation plate etc. and work.

In other mode of above-mentioned projector, optic modulating device possesses the liquid crystal panel of reflection-type and corresponding to the set polarization beam apparatus of liquid crystal panel; Optical element is disposed between polarization beam apparatus and the liquid crystal panel.Under this situation, optical element is for example as optical compensation plate etc. and work.

The manufacture method of the optical element among the present invention, comprise following operation: (a), form the polarizer of main part with the thickness that produces predetermined phase differential by being carried out etching to form, have the anisotropic planar plate members of refractive index with inorganic material; (b) at the thickness of the main part that is compared to polarizer and on the 1st substrate that forms thickly, by the 1st bond layer mounting polarizer, with respect to the 1st substrate push this polarizer around; (c) on polarizer, be compared to the 2nd substrate that the thickness of the main part of polarizer forms thickly by the 2nd bond layer mounting, it is pushed with respect to polarizer.

In above-mentioned manufacture method, because on the 1st substrate, push by the 1st bond layer mounting polarizer, and on this polarizer, push by the 2nd bond layer mounting the 2nd substrate, even, also can when fixing the 2nd substrate, offset so protuberance to a certain degree by the 2nd bond layer so when polarizer being fixed on the 1st substrate, make the central uplift of laminal main part owing to the 1st bond layer.That is to say, about resulting optical element, be difficult to produce the effect of undesirable optically focused etc. because by polarizer the time, become, so can make the optical characteristics precision of optical element, under situation about it being assembled in the projector, can carry out the projection of high-precision image.

And, if according to concrete mode of the present invention or viewpoint, then in above-mentioned manufacture method, in the etching work procedure of planar plate members, to among the surface of planar plate members except covering corresponding to around the face of the table side of the middle body of main part and the back side of planar plate members, and the planar plate members of the state of crested be impregnated in the wet etch solution.Under this situation, can process and simple and easy and form the main part of central authorities accurately, promptly produce the film like part of birefringence effect by wet etching.

If according to other mode of the present invention, then after the polarizer mounting having been carried out pushing on the 1st substrate, the 1st bond layer is solidified with ultraviolet ray by the 1st bond layer; After the 2nd substrate-placing having been carried out pushing on polarizer, the 2nd bond layer is solidified with ultraviolet ray by the 2nd bond layer.Under this situation, the operation that the clamping polarizer is fixed between the 1st substrate and the 2nd substrate becomes simply, can provide high-precision optical element with easy manufacturing process.

Description of drawings

Fig. 1 (a) and (b) are side sectional view and planimetric maps of the phase place optical element of the 1st embodiment.

Fig. 2 (a)～(f) is the side sectional view that the manufacturing process to the phase place optical element of Fig. 1 describes.

Fig. 3 is the stereographic map that the shape to the polarizer in the operation that is shown in Fig. 2 (b) describes.

Fig. 4 is the figure that the optical system to the projector of the 2nd embodiment of the phase place optical element of having assembled Fig. 1 describes.

The image formation state of the phase place optical element of embodiment has been assembled in Fig. 5 (a)～(c) expression.

The image formation state of the phase place optical element of comparative example has been assembled in Fig. 6 (a)～(c) expression.

Fig. 7 is the figure that the optical system to the projector of the 3rd embodiment of the phase place optical element of having assembled Fig. 1 describes.

Symbol description

10... the phase place optical element, 11... the 1st substrate, 11d, 11e... plane, 12... the 2nd substrate, 12d, 12e... the plane, the 14... polarizer, 14a... main part, 14b... presses press box portion, 14d, 14e... plane, 16... the 1st bond layer, 17... the 2nd bond layer, 21... light supply apparatus, 23... color separation optical system, 23a, 23b... dichronic mirror, the 25... modulating sections, 25a, 25b, 25c... liquid crystal panel, 25e, 25f, 25g... polarizing filter, 27... cross colour splitting prism, 29... projecting lens, 81... mask, 83... container handling, 110... projector, AX... optical axis, CP... middle body, the PP... flat board

Embodiment

The 1st embodiment

Fig. 1 (a) and (b), be to as the structuring concept of the phase place optical element of the optical element of the 1st embodiment among the present invention the side sectional view and the planimetric map that describe.

Illustrated phase place optical element 10 has by the sandwich construction of lamination, and possesses: flat the 1st substrate 11, and flat the 2nd substrate 12, and remain in polarizer 14 between the two substrates 11,12.Between the 1st substrate 11 and polarizer 14, the 1st bond layer 16 is set and fills both gap, these the 1st substrates 11 and polarizer 14 interfix by the 1st bond layer 16.And, between the 2nd substrate 12 and polarizer 14, the 2nd bond layer 17 is set and fills both gap, these the 2nd substrates 12 and polarizer 14 interfix by the 2nd bond layer 17.

The 1st substrate 11 is the formed thicker planar plate members of inorganic material with glass, sapphire, crystal etc., the plane 11d that for example becomes light incident side of the 1st substrate 11, and with the plane 11e that for example becomes emitting side, mutual almost parallel.The 1st substrate 11 is not though with respect to visible light etc. and have transmitance, have the lensing of optically focused etc.On the other hand, the 2nd substrate 12 also is the formed thicker planar plate members of inorganic material with glass, sapphire, crystal etc., the plane 12d that for example becomes light incident side of the 2nd substrate 12, and with the plane 12e that for example becomes emitting side, mutual almost parallel.And the 2nd substrate 12 is not though with respect to visible light etc. and have transmitance, have the lensing of optically focused etc.Also have, two

substrates

11,12, thickness forms thicklyer with the degree of hundreds of μ m～several mm, become be difficult to because make, the stress when assembling and the support of deflection deformation.

Polarizer 14 is formed with the inorganic material of crystal, sapphire etc., is as a whole to possess thin flat member: rectangle and laminal main part 14a and surround that the periphery ground of main part 14a is provided be the 14b of the press box portion of pressing of heavy section.

At this, main part 14a, for example be positive uniaxiality crystal and other refractive index anisotropic material, with crystallographic axis be the orientation (coordination direction) of optic axis for example be set at along the direction of optical axis AX, perpendicular to the suitable orientation in the plane of optical axis AX, in order to realize phase differential, has the thickness of a few μ m～tens μ m as target.Main part 14a is because so be film like, so when polarizer 14 is attached at the 1st substrate 11 by the 1st bond layer 16, form the protuberance of the lens-shaped of tens μ m degree at central portion.Therefore, the surperficial 14d of the accompanying drawing downside of main part 14a forms concave surface in the 1st bond layer 16 sides; The surperficial 14e of this accompanying drawing upside forms convex surface in the 2nd bond layer 17 sides.Press the 14b of press box portion, for being used for polarizer 14 is attached to the part of the 1st substrate 11, guarantee the physical strength of polarizer 14 to make the pressing operation of polarizer 14 reliable by the frame part that forms heavy wall.At this, press the projection direction of the 14b of press box portion, because the relation of manufacturing process is the 2nd substrate 12 sides that attached from the back.Also have, press under the situation of the 14b of press box portion not being provided with, main part 14a directly need be attached at the 1st substrate 11, easily in the generation of the surface of main part 14a cut, defective, crack.

The 1st bond layer 16, for example the light-cured resin by ultraviolet curable resin etc. is formed, and carries out bonding and it is fastened to each other with polarizer 14 the 1st substrate 11.Under this situation, the 1st bond layer 16 is sandwiched between two sides 11e, the 14d and has the profile of lens-shaped.And the 2nd bond layer 17 is also for example formed by light-cured resin, carries out bonding and it is fastened to each other with polarizer 14 the 2nd substrate 12.Under this situation, the 2nd bond layer 17 is sandwiched between two sides 12d, the 14e and has the profile of concavees lens shape.At this, the light-cured resin of ultraviolet curable resin etc., can be in the visible region for example the scope refractive index in 1.3～1.7 degree control, can be roughly consistent in for example quartzy refractive index 1.5 that forms the 1st substrate 11.Thereby, the surperficial 14d that can prevent because of the border bending of the 1st bond layer 16 and polarizer 14 produces the refracting power as lens, and the surperficial 14e that can prevent because of the border bending of the 2nd bond layer 17 and polarizer 14 produces the refracting power as lens.Thus, can be as a whole and suppress light by flat phase place optical element 10 because the phenomenon that the refraction differences in the phase place optical element 10 optically focused take place, disperse.Also have, though between polarizer 14 and the 1st and the

2nd bond layer

16,17 refringence more or less, concavo-convex the cancelling each other of result's two

bond layers

16,17 can not produce refracting power as phase place optical element 10 integral body yet.But,, then can not ignore, so preferably both refractive index ratios are more close in the reflection at interface because big if the refringence of polarizer 14 and the 1st and the

2nd bond layer

16,17 becomes.

Also have, with crystal under the formed situation, the deflection quantitative change that main part 14a arranged is big and become the tendency of problem at polarizer 14.The value of so-called bending strength is generally arranged as the numerical value of expression deflection easness, and crystal is the bending strength of 50Mpa degree, is compared to the bending strength of sapphire 450～700Mpa degree and quite little.Thereby, forming under the situation of polarizer 14 with crystal, the especially easy deflection of main part 14a can prevent to produce refracting power by the deflection of main part 14a by the formation for present embodiment effectively.

As in the above-mentioned phase place optical element 10, suppose and do not filling the 2nd bond layer 17, do not attaching under the situation of the 2nd substrate 12 that the phase place optical element is made of the 1st substrate 11, the 2 substrates 12 and the 1st bond layer 16.Under this situation, the plane 14e that reveals of main part 14a works as convex lens, might produce useless imaging effect and make the optical characteristics deterioration.Will be so the phase place optical element be disposed under the situation of periphery of for example liquid crystal light valve etc. of projector, might be at central authorities, the periphery place of picture, projection image becomes and does not focus.

Below, with reference to Fig. 2 etc., about the manufacture method of the phase place optical element 10 of Fig. 1 and describe.Prepare the constitutive requirements that become phase place optical element 10, the material of the 1st and the

2nd substrate

11,12 and polarizer 14 in advance.Particularly, the plate material as the glass of the material of the 1st and the

2nd substrate

11,12, sapphire, crystal etc. is cut, and the processing of implementing to grind etc. for each platen surface and obtain thickness (for example, flat board 0.5mm) of purpose.Meanwhile, the plate material as the crystal of the material of polarizer 14 etc. is cut, and the processing of implementing to grind etc. for platen surface and obtain the flat board of the thickness (for example, 80 μ m) of purpose.At this moment, for the optic axis of the main part 14a that makes polarizer 14 is orientation, the degree of tilt of purpose, makes this optic axis become and cut as the configuration ground of purpose material to polarizer 14.Also having, about the 1st and the

2nd substrate

11,12, at its non-glass, and is under the situation of crystalline material of sapphire, crystal etc., also the material of these the 1st and the

2nd substrates

11,12 is cut and makes as the destination disposes optic axis.

Then, as be shown in ground among Fig. 2 (a), the rectangular area of central authorities that keeps a side platen surface at the dull and stereotyped PP for the crystal of the material of polarizer 14 etc. applies mask 81 to other zone, and implements hydrofluoric acid treatment for dull and stereotyped PP.This mask 81, for example the alloy, the various organism of rubber-like etc. by chromium and gold constitute.Also have, mask 81 as long as have corrosion resistance for the hydrofluorite as mordant, is not limited to above-mentioned material.Then, the dull and stereotyped PP with crested impregnated in in the hydrogen fluoride solution 85 instinct container handlings 83 with the schedule time.Thus, can be from the rectangular area of the central authorities of the dull and stereotyped PP of one-sided etching, the central portion that can make dull and stereotyped PP is the thickness of purpose.At this moment, though the table side of dull and stereotyped PP expose the plane because etch processes and being disappeared by erosion, dull and stereotyped PP expose the plane on every side with the plane of the inboard of dull and stereotyped PP, then be protected and avoid etching by mask 81.

Then, as be shown in ground among Fig. 2 (b), the dull and stereotyped PP after the hydrofluoric acid treatment is fetched into outside the container handling 83, the surface is suitably cleaned and removed mask 81 and become the polarizer 14 of the state that can carry out subsequent processing.Fig. 3 is the stereographic map of polarizer 14.As with reference to the accompanying drawings as can be known, polarizer 14 possesses by the laminal main part 14a that is surrounded by the 14b of press box portion of periphery, and this main part 14a is in order to produce the phase differential that needs, the thickness that for example has a few μ m～tens μ m degree.And, press the 14b of press box portion, the intensity in order need to guarantee for example has the thickness from less than 100 μ m to hundreds of μ m degree.

Then, as be shown in ground among Fig. 2 (c), than the unfertile land expansion, become the 1st bond layer 16 of film like by coating ultraviolet curable resin on preprepared the 1st substrate 11.Then, as be shown in Fig. 2 (d) make middlely polarizer 14 depression the surface become upside, on the 1st substrate 11, make it to fit by the 1st bond layer 16 mounting polarizers 14.Afterwards, with ultraviolet ray the 1st bond layer 16 is solidified.At this, among polarizer 14, be compared to the 1st substrate 11 and quite thin main part 14a, so because himself extremely thinly has a flexibility, middle body CP protuberance forms convex surface as a whole.At this moment, the 1st bond layer 16, the central portion thickening becomes lens-shaped.On the other hand, about the 1st substrate 11, so because being compared to that the main part 14a of polarizer 14 is thick can deflection.Also have, constitute the ultraviolet curable resin of the 1st bond layer 16, for example can be the resin of epoxies, little with the refringence of polarizer the 14, the 1st substrate 11.

Then, as be shown in ground among Fig. 2 (e), than the unfertile land expansion, become the 2nd bond layer 17 of film like by coating ultraviolet curable resin on the polarizer 14 of the state in being shown in Fig. 2 (d).Then, as be shown in that ground makes it to fit by the 2nd bond layer 17 mountings the 2nd substrate 12 among Fig. 2 (f).Afterwards, with ultraviolet ray the 2nd bond layer 17 is solidified.Thus, obtain being as a whole flat phase place optical element 10.At this, the 2nd substrate 12, because it is thick and can deflection to be compared to the main part 14a of polarizer 14, thus the 2nd bond layer 17, because of the influence central portion attenuation of main part 14a becomes the concavees lens shape.Also have, constitute the ultraviolet curable resin of the 2nd bond layer 17, for example can be the resin of epoxies, little with the refringence of polarizer the 14, the 2nd substrate 12.

The result, the surperficial 14d that can prevent in the border bending of the 1st bond layer 16 and polarizer 14 produces the refracting power as lens, and the surperficial 14e that can prevent in the border bending of the 2nd bond layer 17 and polarizer 14 produces the refracting power as lens.And, even producing under the concavo-convex situation of tiny squamous at surperficial 14d and surperficial 14e owing to above-mentioned etch processes, also because can fill up the concavo-convex of squamous so by the 1st and the

2nd bond layer

16,17, so can prevent in the boundary portion of the 1st adhesive linkage 16 with surperficial 14d, and the boundary portion of the 2nd adhesive linkage 17 and surperficial 14e, owing to this tiny concavo-convex make light generation scattering, refraction.Also have, even refringence more or less between polarizer 14 and the 1st and the

2nd bond layer

16,17, also because the shape of the 2nd bond layer 17, become the shape of the shape of offsetting the 1st bond layer 16, so do not produce refracting power as phase place optical element 10 integral body, and produce the effect that phase differential is provided by the polarizer in the middle of being sandwiched in 14.Just, though because the main part 14a deflection of polarizer 14, the phase differential that produces by polarizer 14 is strict conformance not, is the degree that less than 1 is spent as angle, and the influence that contrast is caused is very not big.

The 2nd embodiment

Fig. 4 is the figure that the formation to the optical system of the projector of having assembled the phase place optical element 10 that is shown among Fig. 1 describes.

This projector 110, possess: the light supply apparatus 21 that sends light source light, to be separated into the color separation optical system 23 of 3 looks of RGB from the light source light of light supply apparatus 21, by the modulating sections 25 of throwing light on from color separation optical system 23 emitted illumination light of all kinds, to be used for to pass through the picture optical projection of cross colour splitting prism 27 in the projecting lens 29 of the projection optical system of screen (not shown) from the cross colour splitting prism 27 and the conduct of synthesizing of all kinds of modulating sections 25 as light.

In above projector 110, light supply apparatus 21 possesses: illuminator 21a, concavees lens 21b, a pair of

fly lens

21d, 21e, polarisation transformation member 21g and overlapping lens 21i.Wherein, illuminator 21a for example is made of high-pressure mercury-vapor lamp, possesses light source light is reclaimed the concave mirror that makes it forwards to penetrate.Concavees lens 21b though have the effect that makes from the light source light parallelization of illuminator 21a, also can omit.A pair of

fly lens

21d, 21e constitute by being configured to rectangular a plurality of important document lens, make it optically focused respectively to cutting apart through the light source light from illuminator 21a of concavees lens 21b, disperse by these important document lens.Polarisation transformation member 21g for example will only be transformed to from the light source light that fly lens 21e shoots out perpendicular to the S polarized component of the paper of Fig. 4 and will be supplied in the next stage optical system.Overlapping lens 21i suitably assembles as a whole by making through the illumination light of polarisation transformation member 21g, can carry out the overlapping illumination for the optic modulating device of all kinds that is arranged at modulating sections 25.That is, through the illumination light of two

fly lens

21d, 21e and overlapping lens 21i, through being specified in following color separation optical system 23, to being arranged at the overlapping equably illumination of

liquid crystal panel

25a, 25b of all kinds, 25c of modulating sections 25.

Color separation optical system 23 possesses the 1st and the 2nd

dichronic mirror

23a, 23b, and 3

field lens

23f, 23g, 23h and

catoptron

23j, 23m, 23n, 23o for correcting optical system constitute lighting device with light supply apparatus 21.At this, the 1st dichronic mirror 23a is to for example ruddiness among 3 looks of RGB and green glow reflects and make blue light carry out transmission.And the 2nd dichronic mirror 23b reflects and makes ruddiness carry out transmission for example green glow among the 2 red and green looks of going into to shine.In this color separation optical system 23, the roughly light source light of white from light supply apparatus 21 because of the crooked light path of catoptron 23j, is incident in the 1st dichronic mirror 23a.Passed through the blue light of the 1st dichronic mirror 23a, it is constant for example to press S polarization original state, is incident in field lens 23f through catoptron 23m.And, by the 1st dichronic mirror 23a reflected, by the further green glow of reflection of the 2nd dichronic mirror 23b, for example be incident in field lens 23g unchangeably by S polarization original state.And then, passed through the ruddiness of the 2nd dichronic mirror 23 b, it is constant for example to press S polarization original state, through lens LL1, LL2 and catoptron 23n, 23o, is incident in and is used for field lens 23h that incident angle is regulated.Lens LL1, LL2 and field lens 23h constitute relay optical system.This relay optical system possesses the picture with the 1st lens LL1, by the 2nd lens LL2 roughly former state be sent to the function of field lens 23h.

Modulating sections 25 possesses: 33 groups of polarizing

filter

25e, 25f, 25g that

liquid crystal panel

25a, 25b, 25c and clamping each

liquid crystal panel

25a, 25b, 25c are disposed.At this, be disposed at the liquid crystal panel 25a that the blue light among the 1st light path OP1 is used, with its a pair of polarizing

filter

25e, 25e of clamping, be configured for blue light is carried out based on image information the liquid crystal light valve of the blueness usefulness of 2 dimension briliancy modulation.Wherein, liquid crystal panel 25a though possess the liquid crystal cells that for example carries out the work of vertical orientating type, also can comprise the liquid crystal cells of the work of carrying out the TN type.Liquid crystal panel 25a has the general structure that accompanies liquid crystal layer between a pair of substrate, and possesses alignment films, transparent common electrode layer, black matrix etc. in the substrate-side of appearance, and the substrate-side inside possesses alignment films, transparent pixels electrode, circuit layer etc.The liquid crystal light valve of blue usefulness, with the phase place optical element 10 that is shown among Fig. 1, degree improves the optical compensation plate of usefulness as a comparison, for example is assembled between polarizing filter 25e and the liquid crystal panel 25a.Similarly, be disposed at the liquid crystal panel 25b that the green glow among the 2nd light path OP2 is used,, also constitute the liquid crystal light valve of green usefulness with corresponding polarizing

filter

25f, 25f; And be disposed at the liquid crystal panel 25c that the ruddiness among the 3rd light path OP3 is used,, also constitute the liquid crystal light valve of red usefulness with polarizing filter 25g, 25g.And, the liquid crystal light valve of these green glows and red usefulness, also degree improves the optical compensation plate of usefulness as a comparison, with the phase place optical element 10 that is shown among Fig. 1, is assembled in for example between the 1st polarizing filter 25f, the 25g and liquid crystal panel 25b, 25c.Also have, above polarizing

filter

25e, 25f, 25g, though also can be for formed absorptive-type polarizers such as resins, also can be the polarizer of the reflection-type of wire-grid polarizer etc.

For the 1st liquid crystal panel 25a that blue light is used, the blue light by the 1st dichronic mirror 23a of color separation optical system 23 is carried out branch of transmission institute carries out incident by field lens 23f.The 2nd liquid crystal panel 25b for green glow is used is reflected and the green glow of branch by the 2nd dichronic mirror 23b by color separation optical system 23, carries out incident by field lens 23g.For the 3rd liquid crystal panel 25c that ruddiness is used, the ruddiness by the 2nd dichronic mirror 23b is carried out branch of transmission institute carries out incident by field lens 23h.Each liquid crystal panel 25a～25c, optic modulating device for non-light emitting-type that the spatiality intensity distributions of the illumination light of going into to shine is modulated, be incident in the light of 3 looks of each liquid crystal panel 25a～25c respectively, corresponding to the drive signal that is input into each liquid crystal panel 25a～25c as electric signal or picture signal and modulated.At this moment,, adjust the polarization direction of the illumination light be incident in each liquid crystal panel 25a～25c by polarizing

filter

25e, 25f, 25g, and from by the light components of taking out predetermined polarization direction the emitted light modulated of each liquid crystal panel 25a～25c as light.And, by phase place optical element 10, can adjust and make the phase modulation (PM) undertaken by liquid crystal panel 25a～25c become appropriately, can carry out their optical compensation.

Cross colour splitting prism 27 is the light compositing member, is to make the roughly square shape of overlooking that 4 right-angle prisms have fitted, and right-angle prism has been fitted at the interface each other, a pair of dielectric multilayer film 27a, the 27b that intersects with forming the X shape.One side's the 1st dielectric multilayer film 27a reflects blue light, and the opposing party's the 2nd dielectric multilayer film 27b then reflects red light.This cross colour splitting prism 27, blue light from liquid crystal panel 25a is reflected with the 1st dielectric multilayer film 27a and makes it to follow into the direction right side and penetrate, make green glow directly advance, penetrate by the 1st and the 2nd

dielectric multilayer film

27a, 27b, the ruddiness from liquid crystal panel 25c is reflected with the 2nd dielectric multilayer film 27b and makes it to follow into the direction left side and penetrate from liquid crystal panel 25b.

Projecting lens 29, the picture light of the colour that will be synthesized by cross colour splitting prism 27, with the multiplying power projection of expection on screen (not shown).That is, colored live image, the colored rest image corresponding to the multiplying power of the expection of drive signal that is input into each liquid crystal panel 25a～25c or picture signal is projected on screen.

In above projector 110, be assembled in the phase place optical element 10 in the modulating sections 25, as being illustrated ground, to be used by purpose to for example not carrying out inching by the amount of phase modulation that liquid crystal panel 25a～25c correctly adjusts.By will be so phase place optical element 10 be disposed at suitable position in the liquid crystal light valve, can improve the contrast of the optical modulation of being undertaken by modulating sections 25, perhaps can carry out accurate control efficiently, can carry out the projection of high-quality image the optical modulation amount.At this moment, be assembled in the direction of the optic axis among the main part 14a of the polarizer 14 in the phase place optical element 10, the thickness of main part 14a, with corresponding with respect to the adjustment amount of the birefringent phase difference necessity that is produced by liquid crystal panel 25a～25c.Thereby, though in phase place optical element 10 thickness of inner main part 14a usually as thin as a wafer, so thickness is preferably set respectively by liquid crystal panel 25a～25c.

Below, describe about concrete example.As above-mentioned projector 110 in, for example carry out the simulation of the phase place optical element 10 of assembly drawing 1 in liquid crystal light valve 25b, the 25f of green usefulness and study green imaging characteristic.As a result, as be shown in the overall diagram of Fig. 5 (a) and Fig. 5 (b) and the partial enlarged drawing (c) ground, as can be known in picture integral body, the grid of projection image is clear.On the other hand, make phase place optical element 10 for situation corresponding to the comparative example of the structure that is shown in the middle operation among Fig. 2 (c) under, as be shown in the overall diagram of Fig. 6 (a) and Fig. 6 (b) and the partial enlarged drawing (c) ground, as can be known at the picture periphery, the grid of projection image becomes unintelligible.

The 3rd embodiment

Fig. 7 is the figure that the formation to the optical system of the projector of having assembled the phase place optical element 10 that is shown among Fig. 1 describes.Also have, the projector 300 of the 3rd embodiment is out of shape the projector 110 of the 2nd embodiment, and the part that does not describe especially is identical with the 2nd embodiment.

This projector 300, possess: the light supply apparatus 21 that sends light source light, to be divided into the color separation optical system 323 of 3 looks of RGB from the light source light of light supply apparatus 21, by the modulating sections 325 of throwing light on from color separation optical system 323 emitted illumination light of all kinds, the cross colour splitting prism 27 and the conduct of synthesizing as light of all kinds from modulating sections 325 are used for passing through the picture optical projection of cross colour splitting prism 27 in the projecting lens 29 of the projection optical system of screen (not shown).

Color separation optical system 323 possesses: the 1st and the 2nd

dichronic mirror

323a, 23b and catoptron 323n.In this color separation optical system 323, the roughly light source light of white from light supply apparatus 21 is incident in dichronic mirror 323a.By the blue light that the 1st dichronic mirror 323a is reflected, it is constant for example to press S polarization original state, is incident in polarization beam apparatus 55a through catoptron 323n.And, the 1st dichronic mirror 323a is carried out transmission and by the green glow that the 2nd dichronic mirror 23b is reflected, for example is incident in polarization beam apparatus 55b unchangeably by S polarization original state.And then, passed through the ruddiness of the 2nd dichronic mirror 23 b, it is constant for example to press S polarization original state, is incident in polarization beam apparatus 55c.

Modulating sections 325 possesses: 3

polarization beam apparatus

55a, 55b, 55c, 3

liquid crystal panel

56a, 56b, 56c and phase place optical elements 310.At this, be disposed at the polarization beam apparatus 55a among the 1st light path OP1 that blue light uses, with liquid crystal panel 56a that is appended hereto it and phase place optical element 310, be configured for the blue light among the illumination light is carried out based on image information the liquid crystal light valve of the blueness usefulness of 2 dimension briliancy modulation.Among the liquid crystal light valve of blueness usefulness, polarization beam apparatus 55a is corresponding to polarizing filter 25e, the 25e of Fig. 4; Liquid crystal panel 56a is corresponding to the liquid crystal panel 25a of Fig. 4; And phase place optical element 310 is corresponding to the phase place optical element 10 of Fig. 4.

Among the liquid crystal light valve of blueness usefulness, at first, polarization beam apparatus 55a by phase place optical element 310, carries out about the polarisation of light direction that is incident in liquid crystal panel 56a with from the adjustment of the emitted polarisation of light direction of liquid crystal panel 56a.In this polarization beam apparatus 55a, the polarization separating film 32b that the built-in polarized light that is used for blueness separates.Secondly, liquid crystal panel 56a is that to make the polarization of incident light direction be the liquid crystal panel of the reflection-type that changes of unit with the pixel corresponding to input signal.Liquid crystal panel 56a has the general structure that accompanies liquid crystal layer between a pair of substrate, and possesses alignment films, transparent common electrode layer etc. in the substrate-side of appearance, and the substrate-side inside possesses alignment films, reflective pixel electrode, circuit layer etc.At last, phase place optical element 310, with the situation of the phase place optical element 10 of Fig. 4 similarly, to be used by purpose to for example not carrying out inching by the amount of phase modulation that liquid crystal panel 56a correctly adjusts.This phase place optical element 310, with be shown among Fig. 1 phase place optical element 10 similarly, have the structure of between the 1st substrate 11 and the 2nd substrate 12, passing through bond layer 16,17 clamping polarizers 14, but the thickness of the direction of the optic axis among the main part 14a of polarizer 14, main part 14a and inequality.By will be so phase place optical element 310 be disposed at liquid crystal panel 56a near, the optical modulation amount that can obtain the liquid crystal light valve by blueness usefulness is carried out accurate control efficiently.

In above liquid crystal light valve, polarization beam apparatus 55a, S polarized light among the incident light reflected by polarization separating film 32b make it incident to liquid crystal panel 56a, from liquid crystal panel 56a by reflecting among the emitted light modulated of passing through phase place optical element 310, make transmission the P polarized light of polarization separating film 32b penetrate to cross colour splitting prism 27 sides.This polarization beam apparatus 55a can replace with respect to other the polarization separation element of reflection-type as wire-grid polarizer of the systematic optical axis institute tilted configuration at the center of the 1st light path OP1 etc.

Also have, liquid crystal panel 56a, phase place optical element 310, different with the situation of liquid crystal panel 25a, phase place optical element 10 of projector 110 in being shown in Fig. 4, because light comes and goes, become 2 times so will consider the hysteresis that produces therefrom.Thereby, for example similarly carrying out under the situation of inching of amount of phase modulation with the phase place optical element 10 of Fig. 4, need make the thickness of phase place optical element 310 be compared to phase place optical element 10 and become the adjustment that half waits.

In modulating sections 325, be disposed at the polarization beam apparatus 55b among the 2nd light path OP2 of green usefulness, with liquid crystal panel 56b that is appended hereto it and phase place optical element 310, be configured for the green glow among the illumination light is carried out based on image information the liquid crystal light valve of the green usefulness of 2 dimension briliancy modulation.At this, the polarization beam apparatus 55b of green usefulness, liquid crystal panel 56b and phase place optical element 310 have respectively structure and the function identical with polarization beam apparatus 55a, the liquid crystal panel 56a of blueness usefulness and phase place optical element 310.Also have, in polarization beam apparatus 55b, the polarization separating film 32g that the built-in polarized light that is used for green separates.

In modulating sections 325, be disposed at the polarization beam apparatus 55c among the 3rd light path OP3 of red usefulness, with liquid crystal panel 56c that is appended hereto it and phase place optical element 310, be configured for the ruddiness among the illumination light is carried out based on image information the liquid crystal light valve of the redness usefulness of 2 dimension briliancy modulation.At this, the polarization beam apparatus 55c of red usefulness, liquid crystal panel 56c and phase place optical element 310 have respectively structure and the function identical with polarization beam apparatus 55a, the liquid crystal panel 56a of blueness usefulness and phase place optical element 310.Also have, in polarization beam apparatus 55c, the polarization separating film 32r that the built-in polarized light that is used for redness separates.

Though describe the present invention with regard to above embodiment, the present invention is not limited to above-mentioned embodiment, can implement under variety of way in the scope that does not break away from its purport, for example also can be following distortion.

That is, though in the above-described embodiment, adopted the example of crystal etc. about polarizer 14 and be illustrated as phase place optical element 10, but can adopt beyond quartzy other positive uniaxiality crystal (for example, kalzit, vanadic acid yttrium, rutile etc.).And, also can adopt the negative uniaxiality crystal of sapphire etc. to replace positive uniaxiality crystal.More than, though at the material of polarizer 14 is that bending strength is under the situation of uniaxiality crystal of the plus or minus below the 200Mpa, the tendency that the deflection quantitative change of main part 14a is big strengthens, but the sandwich construction of the above-mentioned present embodiment by becoming between the 1st and the

2nd substrate

11,12 the main part 14a by

bond layer

16,17 clamping polarizers 14 can prevent to produce refracting power by the deflection of main part 14a effectively.

And in phase place optical element 10, the order of the 1st substrate 11 and the 2nd substrate 12 can suitably be changed.That is to say, not only can with the 1st substrate 11 as light incident side and with the 2nd substrate 12 as emitting side, but also can with the 2nd substrate 12 as light incident side and with the 1st substrate 11 as emitting side.

And, in phase place optical element 10, needn't form the 1st substrate 11 and the 2nd substrate 12 with identical materials, for example can form the 1st substrate 11, and form the 2nd substrate 12 with the isotropic substance of glass etc. with the negative uniaxiality crystal of sapphire etc.Also have,, make under the situation of polarizer 14 for the positive uniaxiality crystal of crystal etc., can access the optical element that negative uniaxiality crystal and positive uniaxiality crystal are composited at the negative uniaxiality crystal that makes the 1st substrate 11 for sapphire etc.

And though in above-mentioned the 1st embodiment, the periphery ground that surrounds polarizer 14 is provided with press the 14b of press box portion, also can be only in the part of the periphery of polarizer 14, for example only relative to the setting of 2 limits press the 14b of press box portion.

And,, phase place optical element 10 can be disposed at the emitting side of liquid crystal panel 25a～25c though in above-mentioned the 2nd embodiment, phase place optical element 10 is disposed at the light incident side of liquid crystal panel 25a～25c.Also have, because form under the lenticular situation that optically focused uses at the light incident side of liquid crystal panel 25a～25c, becoming with the angle of the light of liquid crystal panel 25a～25c by phase place optical element 10 equates, so preferably phase place optical element 10 is disposed at emitting side.

And, as above-mentioned phase place optical element 10, also can be because of optical compensation, phase tranformation and other purpose, be assembled in other position (for example polarisation transformation member 21g, color separation optical system 23, the inside of projecting lens 29 grades) of projector 110,300.

And, though in above-mentioned the 3rd embodiment, only lifted: make with

polarization beam apparatus

55a, 55b, the S polarized light that the polarization separating film of 55c has carried out reflection is incident in

liquid crystal panel

56a, 56b, 56c, as the image light polarization beam apparatus 55a that penetrated transmission, 55b, the example of the P polarized light of the polarization separating film of 55c, but also can constitute: the polarization beam apparatus 55a that made transmission, 55b, the P polarized light of the polarization separating film of 55c is incident in

liquid crystal panel

56a, 56b, 56c penetrates with polarization beam apparatus 55a as image light, 55b, the polarization separating film of 55c has carried out the S polarized light of reflection.

And, though in the projector 110,300 of above-mentioned embodiment, with illuminator 21a, a pair of

fly lens

21d, 21e, polarisation transformation member 21g and overlapping lens 21i have constituted light supply apparatus 21, but about

fly lens

21d, 21e, polarisation transformation member 21g etc. can omit, illuminator 21a also can replace with the other light sources of LED etc.

And, though in the above-described embodiment, the look that adopts color separation optical system 23,323 to carry out illumination light separates, after in modulating sections 25,325, having carried out modulation of all kinds, in cross colour splitting prism 27, carry out the synthetic of picture of all kinds, but also can be that liquid crystal light valve forms image by single liquid crystal panel.

Though in the above-described embodiment, only lifted the example of the projector 110,300 that has adopted 3 liquid crystal panel 25a～25c, 56a～56c, but the present invention, the projector that also can be applied to adopt 2 liquid crystal panels has perhaps adopted in the projector of the liquid crystal panel more than 4.

Though in the above-described embodiment, only lifted the example of projector of carrying out the front projection type of projection from the direction of watching screen, the present invention also can be applied to from carrying out the projector of back projection type of projection with the direction opposition side of watching screen.

Claims

1. optical element is characterized in that possessing:

The 1st substrate;

The 2nd substrate;

Polarizer, it has laminal main part, and this main part is formed with inorganic material, has the refractive index anisotropy, and be compared to the thickness of aforementioned the 1st substrate and aforementioned the 2nd substrate and form thinly, be disposed between aforementioned the 1st substrate and aforementioned the 2nd substrate;

The 1st bond layer, it is filled between aforementioned the 1st substrate and the aforementioned polarizer; With

The 2nd bond layer, it is filled between aforementioned polarizer and aforementioned the 2nd substrate.

2. according to the described optical element of claim 1, it is characterized in that:

The refractive index of aforementioned the 1st bond layer, with the refractive index of aforementioned the 2nd bond layer about equally.

3. according to the described optical element of claim 2, it is characterized in that:

The refractive index of aforementioned polarizer, with the aforementioned the 1st and the refractive index of the 2nd bond layer about equally.

4. according to any one the described optical element in the claim 1～3, it is characterized in that:

Aforementioned polarizer, at least a portion around the laminal main part that produces phase differential also possesses the heavy section with thickness thicker than this main part.

5. according to any one the described optical element in the claim 1～4, it is characterized in that:

Aforementioned polarizer is formed with quartzy; The the aforementioned the 1st and the 2nd substrate is formed with any of quartzy, sapphire and glass.

6. according to any one the described optical element in the claim 1～5, it is characterized in that:

The the aforementioned the 1st and the 2nd bond layer is formed by light-cured resin.

7. projector, it is by projecting lens and projection image's light, this as light by forming by the optic modulating device that lighting device threw light on; This projector is characterised in that to possess:

The described optical element of in the claim 1～6 any one.

8. according to the described projector of claim 7, it is characterized in that:

The aforementioned lights modulating device possesses the liquid crystal panel of transmission-type and a pair of polarizer that clamping foregoing liquid crystal panel is disposed; Aforementioned optical element is disposed between at least one side and foregoing liquid crystal panel of aforementioned a pair of polarizer.

9. according to the described projector of claim 7, it is characterized in that:

The aforementioned lights modulating device possesses the liquid crystal panel of reflection-type and corresponding to the set polarization beam apparatus of foregoing liquid crystal panel; Aforementioned optical element is disposed between aforementioned polarization beam apparatus and the foregoing liquid crystal panel.

10. the manufacture method of an optical element is characterized in that, comprises following operation:

By being carried out etching, form the polarizer of main part with the thickness that produces predetermined phase differential to form, have the anisotropic planar plate members of refractive index with inorganic material;

At the thickness of the main part that is compared to aforementioned polarizer and on the 1st substrate that forms thickly, by the aforementioned polarizer of the 1st bond layer mounting, with respect to aforementioned the 1st substrate push this polarizer around; With

On aforementioned polarizer, be compared to the 2nd substrate that the thickness of the main part of aforementioned polarizer forms thickly by the 2nd bond layer mounting, it is pushed with respect to aforementioned polarizer.

11. the manufacture method according to the described optical element of claim 10 is characterized in that:

In the etching work procedure of aforementioned planar plate members, to among the surface of aforementioned planar plate members except covering corresponding to around the face of the table side of the middle body of aforementioned body part and the back side of aforementioned planar plate members, and the aforementioned planar plate members that will be in the state of crested impregnated in the wet etch solution.

12. the manufacture method according to claim 10 or 11 described optical elements is characterized in that:

After aforementioned polarizer mounting having been carried out pushing on aforementioned the 1st substrate, the 1st bond layer is solidified with ultraviolet ray by aforementioned the 1st bond layer; After aforementioned the 2nd substrate-placing having been carried out pushing on aforementioned polarizer, the 2nd bond layer is solidified with ultraviolet ray by aforementioned the 2nd bond layer.