CN101132654B - 微机电麦克风封装系统 - Google Patents

微机电麦克风封装系统 Download PDF

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CN101132654B
CN101132654B CN2006101112989A CN200610111298A CN101132654B CN 101132654 B CN101132654 B CN 101132654B CN 2006101112989 A CN2006101112989 A CN 2006101112989A CN 200610111298 A CN200610111298 A CN 200610111298A CN 101132654 B CN101132654 B CN 101132654B
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micro
packaging system
substrate
chip
electro
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CN101132654A (zh
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王维中
吴松茂
杨学安
杨国宾
林千琪
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Advanced Semiconductor Engineering Inc
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Advanced Semiconductor Engineering Inc
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48135Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/48137Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15313Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a land array, e.g. LGA
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/191Disposition
    • H01L2924/19101Disposition of discrete passive components
    • H01L2924/19105Disposition of discrete passive components in a side-by-side arrangement on a common die mounting substrate

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  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)

Abstract

一种微机电麦克风封装系统,其包括:一基板、一芯片、一微机电麦克风组件、一不导电胶、一导电胶及一盖体。该基板具有一第一表面。该芯片设置于该基板的该第一表面上。该微机电麦克风组件设置于该基板的该第一表面上,且与该芯片电性连接。该不导电胶包覆该芯片。该导电胶包覆该不导电胶。该盖体覆盖于该基板的该第一表面上,以形成一容纳空间,该盖体具有一收音孔。本发明的微机电麦克风封装系统利用该导电胶包覆该芯片及该不导电胶,可提供屏蔽效果,以隔绝外界噪声干扰。并且,该盖体不须为金属材质。

Description

微机电麦克风封装系统
技术领域
本发明涉及一种微机电麦克风系统,特别是涉及一种微机电麦克风封装系统。
背景技术
参考图1所示,现有的微机电麦克风封装系统10包括一基板11、一芯片12、一微机电麦克风组件13及一金属盖体14。该基板11具有一第一表面111。该芯片12设置于该基板11的该第一表面111上。该微机电麦克风组件13设置于该基板11的该第一表面111上,且设置于该芯片12旁,与该芯片12电性连接。
该金属盖体14覆盖于该基板11的该第一表面111上,以形成一容纳空间,用保护该芯片12及该微机电麦克风组件13。该金属盖体14具有一收音孔141,使声音能经由该收音孔141传递至该微机电麦克风组件13。另外借助该金属盖体14覆盖于该芯片12及该微机电麦克风组件13外,可屏蔽外界噪声的干扰。
发明内容
本发明之目的在于提供一种微机电麦克风封装系统。
为实现所述之目的,本发明包含:一基板、一芯片、一微机电麦克风组件、一不导电胶、一导电胶及一盖体。该基板具有一第一表面。该芯片设置于该基板的该第一表面上。该微机电麦克风组件设置于该基板的该第一表面上,且与该芯片电性连接。该不导电胶包覆该芯片,且包覆部分的该微机电麦克风组件边缘。该导电胶包覆该不导电胶,且包覆部分的该微机电麦克风组件边缘。该盖体覆盖于该基板的该第一表面上,以形成一容纳空间,该盖体具有一收音孔。
本发明提供之一种微机电麦克风封装系统利用该导电胶包覆该芯片及该不导电胶,可提供屏蔽效果,以隔绝外界噪声干扰。并且,该盖体可不必为金属材质。
本发明之目的特征及优点将以实施例结合附图进行详细说明。
附图说明
图1为现有的微机电麦克风封装系统的示意图;
图2为本发明第一实施例的微机电麦克风封装系统的示意图;及
图3为本发明第二实施例的微机电麦克风封装系统的示意图。
具体实施方式
请参阅图2,其显示了本发明第一实施例的微机电麦克风封装系统20的示意图。本发明第一实施例的微机电麦克风封装系统20包括:一基板21、一芯片22、一微机电麦克风组件23、一不导电胶24、一导电胶25及一盖体26。该基板21具有一第一表面211及一第二表面212,该第二表面212相对于该第一表面211。该芯片22设置于该基板21的该第一表面211上,在本实施例中,可利用黏胶32将该芯片22固定于该基板21的该第一表面211上。
该微机电麦克风组件23设置于该基板21的该第一表面211上,且与该芯片22电性连接。在本实施例中,可利用复数条接线27电性连接该芯片22及该微机电麦克风组件23。该微机电麦克风组件23可由硅以蚀刻方式制成。
该不导电胶24包覆该芯片22及所述接线27。在本实施例中,该不导电胶24另包覆部分的该微机电麦克风组件23边缘。该导电胶25包覆该不导电胶24。在本实施例中,该导电胶25可另包覆部分的该微机电麦克风组件23边缘。该导电胶25可为一银胶。由于该导电胶25包覆该芯片22及该不导电胶24,可提供屏蔽效果,以隔绝外界噪声干扰该芯片22。
本发明的微机电麦克风封装系统20另包括一接地垫28,设置于该基板21的该第一表面211上,与该导电胶25电性连接。该接地垫28可与外界的接地端电性连接,使该导电胶25为接地,以提供较佳屏蔽效果。
该盖体26覆盖于该基板21的该第一表面211上,以形成一容纳空间,该容纳空间内具有该芯片22、该微机电麦克风组件23、该不导电胶24及该导电胶25等组件,使该盖体26可保护所述组件。该盖体26具有至少一收音孔261,使声音能经由该收音孔261传递至该微机电麦克风组件23。在本实施例中,该盖体26为一体成型。由于该导电胶25可提供屏蔽效果,该盖体26则可不必为金属材质,可为其它材质,以降低成本。
本发明的微机电麦克风封装系统20另包括复数个接点29,设置于该基板21的该第二表面212,所述接点29用以与外界的组件电性连接。本发明的微机电麦克风封装系统20另包括一被动组件31,设置于该基板21的该第一表面211。
请参阅图3,其显示了本发明第二实施例的微机电麦克风封装系统40的示意图。本发明第二实施例的微机电麦克风封装系统40包括:一基板41、一芯片42、一微机电麦克风组件43、一不导电胶44、一导电胶45及一盖体46。该第二实施例的微机电麦克风封装系统40与第一实施例的微机电麦克风封装系统20不同之处在于,该第二实施例的微机电麦克风封装系统40的该盖体46并非为一体成型,该盖体46包括一盖板461及至少一支撑部462,该支撑部462形成于该基板41的该第一表面411的周边,该盖板461设置于该支撑部462上,故而可较有弹性地设计该盖体46的形状。
并且,在本实施例中,由于该导电胶45可提供屏蔽效果,该盖板461及该支撑部462可不必为金属材质,可为其它材质,以降低成本。另外,一收音孔463设置于该盖板461。
以上所述仅为本发明其中的较佳实施例而已,并非用来限定本发明的实施范围;即凡依本发明权利要求所作的均等变化与修饰,皆为本发明专利范围所涵盖。

Claims (8)

1.一种微机电麦克风封装系统,其特征在于,包括:
一基板,具有一第一表面;
一芯片,设置于该基板的该第一表面上;
一微机电麦克风组件,设置于该基板的该第一表面上,且与该芯片电性连接;
一不导电胶,包覆该芯片,且包覆部分的该微机电麦克风组件边缘;
一导电胶,包覆该不导电胶,且包覆部分的该微机电麦克风组件边缘;及
一盖体,覆盖于该基板的该第一表面上,以形成一容纳空间,该盖体具有一收音孔。
2.如权利要求1所述的微机电麦克风封装系统,其特征在于,另包括一接地垫,设置于该基板的该第一表面上,与该导电胶电性连接。
3.如权利要求1所述的微机电麦克风封装系统,其特征在于,该盖体
包括一盖板及至少一支撑部。
4.如权利要求3所述的微机电麦克风封装系统,其特征在于,该支撑部形成于该基板的该第一表面的周边,该盖板设置于该支撑部上,该收音孔设置于该盖板。
5.如权利要求1所述的微机电麦克风封装系统,其特征在于,另包括复数个接点,设置于该基板的一第二表面,该第二表面相对于该第一表面。
6.如权利要求1所述的微机电麦克风封装系统,其特征在于,另包括复数条接线,用以电性连接该芯片及该微机电麦克风组件。
7.如权利要求1所述的微机电麦克风封装系统,其特征在于,另包括一被动组件,设置于该基板的该第一表面上。
8.如权利要求1所述的微机电麦克风封装系统,其特征在于,该导电胶为一银胶。
CN2006101112989A 2006-08-21 2006-08-21 微机电麦克风封装系统 Active CN101132654B (zh)

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Publication number Priority date Publication date Assignee Title
CN101249936B (zh) * 2008-04-10 2010-06-02 日月光半导体制造股份有限公司 微机电系统的封装构造及其制造方法
US8872288B2 (en) * 2012-08-09 2014-10-28 Infineon Technologies Ag Apparatus comprising and a method for manufacturing an embedded MEMS device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001268695A (ja) * 2000-03-22 2001-09-28 Hosiden Corp エレクトレットコンデンサマイクロホン
DE102004011148B3 (de) * 2004-03-08 2005-11-10 Infineon Technologies Ag Mikrophon und Verfahren zum Herstellen eines Mikrophons
CN1755929A (zh) * 2004-09-28 2006-04-05 飞思卡尔半导体公司 形成半导体封装及其结构的方法
CN1819708A (zh) * 2005-02-09 2006-08-16 星电株式会社 话筒

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001268695A (ja) * 2000-03-22 2001-09-28 Hosiden Corp エレクトレットコンデンサマイクロホン
DE102004011148B3 (de) * 2004-03-08 2005-11-10 Infineon Technologies Ag Mikrophon und Verfahren zum Herstellen eines Mikrophons
CN1755929A (zh) * 2004-09-28 2006-04-05 飞思卡尔半导体公司 形成半导体封装及其结构的方法
CN1819708A (zh) * 2005-02-09 2006-08-16 星电株式会社 话筒

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