CN101126384A - Method for exactly controlling output quantity of piezoelectric pump - Google Patents
Method for exactly controlling output quantity of piezoelectric pump Download PDFInfo
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- CN101126384A CN101126384A CNA2007100559720A CN200710055972A CN101126384A CN 101126384 A CN101126384 A CN 101126384A CN A2007100559720 A CNA2007100559720 A CN A2007100559720A CN 200710055972 A CN200710055972 A CN 200710055972A CN 101126384 A CN101126384 A CN 101126384A
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Abstract
The invention relates to a method to precisely control the output of a piezoelectric pump and belongs to the controlling means on the output of the piezoelectric pump. The pump output of the piezoelectric pump is precisely controlled by controlling the amount of the waveforms of the sine wave driving voltage, wherein, the individual waveform is the minimum period of the waveform of the sine wave driving voltage, which is corresponding to a vibration period of the piezoelectric vibrator, namely, a suction-pump process. The method has high control accuracy and the control system is simple in structure; also, the controlled piezoelectric pump is low in noise and long in service life.
Description
Technical field
The present invention relates to a kind of output quantity of piezoelectric pump controlling method, be specifically related to a kind of controlling method of utilizing driving voltage waveform number exactly controlling output quantity of piezoelectric pump.
Background technique
Along with development of science and technology, in fields such as medicine, biology, life, chemistry, the precision of convection cell, quantitative control technique have had higher requirement, press for a kind of apparatus and method that can accurately control fluid flow.The accurate conveying that realizes fluid that appears as of piezoelectric pump provides possibility.Piezoelectric pump is that the pump chamber that utilizes piezoelectric vibrator distortion to cause changes the suction that realizes fluid and pumps, piezoelectric vibrator is generally thin discs shape, the miniaturization that can realize piezoelectric pump in conjunction with stacked structure, MEMS technology is suitable for the trace control of liquid more with microminiaturized.The flow control of piezoelectric pump at present mainly realizes by the voltage or the adjustment frequency of okperation of regulating piezoelectric vibrator.Under closed loop control condition in conjunction with flow transducer, pump described in patent 03814147.7 " fluid delivery system and method with closed-loop flow control " has been realized closed loop control in conjunction with flow transducer, can reach high control precision, but system architecture complexity, cost height.Carrying out under the open loop controlled conditions of piezoelectric pump as parameter with voltage or frequency, because the output flow of driving voltage, frequency of okperation and pump presents severe nonlinear, adopt voltage or frequency adjusting parameter, had a strong impact on the open loop control accuracy of piezoelectric pump as the piezoelectric pump flow.
Because the shortcoming of above control mode needs a kind of improved controlling method that is used for the accurate flow control of piezoelectric pump with not enough.
Summary of the invention
The object of the present invention is to provide a kind of method of exactly controlling output quantity of piezoelectric pump, utilize the vibration number of piezoelectric vibrator in the driving voltage waveform number control piezoelectric pump under steady job voltage and the frequency, and then realize the accurate control of pump output.The technological scheme that the present invention takes is:
Utilize the mode of controlling sinusoidal drive voltage waveform number accurately to control the pump output of piezoelectric pump, wherein single waveform is a minimum period of sinusoidal drive voltage waveform, corresponding a vibrational period of piezoelectric vibrator, promptly one of pump sucks-pumps process.
Single sinusoidal waveform correspondence of pump and is sucked-pump process among the present invention, piezoelectric vibrator 9 is encouraged by sinusoidal drive voltage, when voltage is raised to the B point by the A point of waveform, piezoelectric vibrator 1 upwards vibrates maximum position, working fluid is by entering the mouth 12 in the middle of inlet valve 11 enters into pump chamber 10, this moment, outlet valve 14 cut out, and had realized the suction process of pump; When drive signal waveform voltage by the B point when the C point is reduced to the D point, piezoelectric vibrator 9 vibrates reverse maximum position downwards, this moment inlet valve 11 close, outlet valve 14 opens, fluid pumps through exporting 13, has realized the process that pumps of pump; When drive signal waveform voltage is got back to the E point by the D point, piezoelectric vibrator is returned to dead-center position, has finished a work cycle of pump suction-pump.
The piezoelectric pump of controlling among the present invention is single cavity piezoelectric pump, or multi-cavity body piezoelectric pump or multiple pressure electric tachometer indicator piezoelectric pump.
Utilize single waveform to carry out drive controlling among the present invention, or utilize a plurality of waveform combination, realize once or the control of pumping repeatedly.
Improvement piezoelectric pump flow control method provided by the invention relates to a kind of level pressure frequency control technique surely, and promptly operating voltage and frequency of okperation immobilize, and are Control Parameter with the driving voltage waveform number.Driving voltage can be chosen according to the voltage rating of piezoelectric vibrator, also can determine according to actual needs; Frequency of okperation is selected the frequency optimum traffic of piezoelectric pump, also can determine according to actual needs.
It is the control technique of Control Parameter with the driving voltage waveform number that improvement piezoelectric pump flow control method provided by the invention has related to a kind of.The driving voltage waveform of piezoelectric pump is sinusoidal wave, its objective is the operating noise that reduces pump, the working life of improving pump, also can adopt the driving voltage waveform of similar sine wave according to the difficulty or ease of circuit implementation.This waveform number control technique, the minimum pump output of pump are the pump output of pump in the driving voltage cycle, as unit, can realize the control of pump output.
The piezoelectric pump flow control method that diverted via provided by the invention has advantage:
1. precision height.Piezoelectric pump belongs to displacement pump, and the volume-variation amount of pump chamber depends on the amount of deformation of piezoelectric vibrator, and the amount of deformation of voltage and piezoelectric vibrator presents comparatively severe nonlinear relation, utilizes voltage to be difficult for obtaining control accuracy preferably for parameter; Piezoelectric pump adopts the method for system resonance to improve its ability to work usually, present non-linear between the output flow of driving voltage frequency and pump, the place an order pump output of time waveform control of different frequency is different, is that Control Parameter can cause bigger departure with the frequency.Utilize in the piezoelectric pump working procedure fluid pump output and driving voltage waveform number under the steady job voltage and frequency to be the characteristics of better linear relationship, the single pump output that is single driving voltage waveform respective pump keeps certain, control the fluid pump output of piezoelectric pump by the number of controlling and driving voltage waveform, improve the open loop control accuracy of piezoelectric pump pump output greatly.
2. noise is low, the life-span is long.The drive waveforms of piezoelectric pump adopted rectangular wave or pulse control mode in the past, and the ability that pumps of pump is stronger, but operating noise is big, and the life-span is low.Employing is sinusoidal wave can be so that the operating noise of piezoelectric pump greatly reduces as driving voltage waveform, and operating life significantly improves.
3. system architecture is simple.For the control accuracy that improves piezoelectric pump adopts closed loop control method usually,, make system comparatively complicated, the reliability variation owing to need extra additional sensor and control circuit.The piezoelectric pump controlling method that the present invention proposes is a kind of open-loop control method, do not need flow transducer, so system architecture is simple, good reliability, and cost is low.
Description of drawings
Fig. 1 is a waveform number control schematic representation of the present invention;
Fig. 2 is control principle figure of the present invention;
Fig. 3 is a controlling object of the present invention---single chamber piezoelectric pump fundamental diagram;
Fig. 4 is a controlling object of the present invention---two chamber piezoelectric pump fundamental diagrams.
Fig. 5 is the pumping control waveform of three different pump outputs of the present invention.
Fig. 6 is two chamber piezoelectric pumps and multi-cavity piezoelectric pump.
Embodiment
Utilize the mode of controlling sinusoidal drive voltage waveform number accurately to control the pump output of piezoelectric pump, wherein single waveform is a minimum period of sinusoidal drive voltage waveform, corresponding a vibrational period of piezoelectric vibrator, promptly one of pump sucks-pumps process.
Single sinusoidal waveform correspondence of pump and is sucked-pump process among the present invention, piezoelectric vibrator 9 is encouraged by sinusoidal drive voltage, when voltage is raised to the B point by the A point of waveform, piezoelectric vibrator 1 upwards vibrates maximum position, working fluid is by entering the mouth 12 in the middle of inlet valve 11 enters into pump chamber 10, this moment, outlet valve 14 cut out, and had realized the suction process of pump; When drive signal waveform voltage by the B point when the C point is reduced to the D point, piezoelectric vibrator 9 vibrates reverse maximum position downwards, this moment inlet valve 11 close, outlet valve 14 opens, fluid pumps through exporting 13, has realized the process that pumps of pump; When drive signal waveform voltage is got back to the E point by the D point, piezoelectric vibrator is returned to dead-center position, has finished a work cycle of pump suction-pump.
The piezoelectric pump of controlling among the present invention is single cavity piezoelectric pump, or multi-cavity body piezoelectric pump or multiple pressure electric tachometer indicator piezoelectric pump.
Utilize single waveform to carry out drive controlling among the present invention, or utilize a plurality of waveform combination, realize once or the control of pumping repeatedly.
Embodiment to exactly controlling output quantity of piezoelectric pump controlling method of the present invention describes in conjunction with the accompanying drawings.
Fig. 1 adopts sine wave that piezoelectric pump is driven for waveform number control schematic representation of the present invention, can carry out single drive waveform, i.e. complete sine waveform of driving control unit output also can carry out a plurality of waveforms and carry out composite control.Fig. 2 is control principle figure of the present invention, controlling component 1 by input output wait interface equipment to form, can accept the control signal of upper-position unit, perhaps manual input control signal; MCU single-chip microcomputer 3 is the core component of this control system, finishes tasks such as waveform generation, signal processing, can realize the control and the control of waveform beginning and ending time of sine-shaped generation, output waveform number according to the control signal of controlling component 1 input; Display unit 2 can show running parameters such as voltage magnitude, frequency of okperation, waveform numbers; D/A converter 4 carries out the conversion of digital quantity to analog amount with the waveform output signal in the MCU single-chip microcomputer 3; Signal after 5 pairs of conversions of drive circuit carries out power amplification and then drive pressure electric pump 6; Conversion circuit 7 is transformed to the reference potential that MCU single-chip microcomputer 3, D/A change-over circuit, drive circuit can be used with the output signal of power supply 8.
Fig. 3 controls a work cycle of single chamber piezoelectric pump for exactly controlling output quantity of piezoelectric pump controlling method of the present invention.The working principle of this list chamber pump is as follows: when piezoelectric vibrator 9 is subjected to the sinusoidal drive voltage excitation, voltage is raised to the B point by the A point of waveform among Fig. 4, piezoelectric vibrator 1 upwards vibrates maximum position, working fluid is by entering the mouth 12 in the middle of inlet valve 11 enters into pump chamber 10, this moment, outlet valve 14 cut out, and had realized the suction process of pump; When drive signal waveform voltage by the B point when the C point is reduced to the D point, piezoelectric vibrator 9 vibrates reverse maximum position downwards, this moment inlet valve 11 close, outlet valve 14 opens, fluid pumps through exporting 13, has realized the process that pumps of pump; When drive signal waveform voltage is got back to the E point by the D point, piezoelectric vibrator is returned to dead-center position, has finished a work cycle of pump suction-pump.A work cycle of a complete sine wave drive signal respective pump, the pump output of a unit of realization pump, the i.e. minimum pump output V of whole pumping system
MinThe size of this pump output is corresponding with the pumping resolution of whole system, and its big I is adjusted by variablees such as driver frequency, voltage magnitudes as required.With minimum pump output V
MinBe unit, can carry out the pump output control of n waveform combination, it adds up to output quantity is nV
Min
The sinusoidal drive voltage waveform that the present invention relates to can be repeatedly the pumping control waveform of different pump outputs.Repeatedly be meant as required to begin the outputting drive voltage waveform at a plurality of start times of setting, the number pump output as required of each output waveform is determined.Fig. 5 is the pumping control waveform of three different pump outputs: be n for the first time
1Individual waveform combination drives; Be output as for the second time n
2Individual waveform; Be n for the third time
3Individual waveform.The corresponding pump output first time is n
1V
Min, secondary pump output is n
2V
Min, pump output for the third time is n
3V
Min, add up to pump output to be: (n
1+ n
2+ n
3) V
Min
Exactly controlling output quantity of piezoelectric pump controlling method of the present invention is not only applicable to single chamber piezoelectric pump, also is applicable to two chamber piezoelectric pumps and multi-cavity piezoelectric pump shown in Figure 6.
Claims (4)
1. the method for an exactly controlling output quantity of piezoelectric pump, it is characterized in that: utilize the mode of controlling sinusoidal drive voltage waveform number accurately to control the pump output of piezoelectric pump, wherein single waveform is a minimum period of sinusoidal drive voltage waveform, corresponding a vibrational period of piezoelectric vibrator, promptly one of pump sucks-pumps process.
2. the method for exactly controlling output quantity of piezoelectric pump according to claim 1, it is characterized in that: single sinusoidal waveform correspondence of pump and is sucked-pump process, piezoelectric vibrator (9) is encouraged by sinusoidal drive voltage, when voltage is raised to the B point by the A point of waveform, piezoelectric vibrator (1) upwards vibrates maximum position, in the middle of inlet valve (11) entered into pump chamber (10), outlet valve this moment (14) cut out working fluid, has realized the suction process of pump by inlet (12); When drive signal waveform voltage by the B point when the C point is reduced to the D point, piezoelectric vibrator (9) vibrates reverse maximum position downwards, inlet valve this moment (11) cuts out, outlet valve (14) opens, fluid pumps through outlet (13), has realized the process that pumps of pump; When drive signal waveform voltage is got back to the E point by the D point, piezoelectric vibrator is returned to dead-center position, has finished a work cycle of pump suction-pump.
3. the method for exactly controlling output quantity of piezoelectric pump according to claim 1, it is characterized in that: the piezoelectric pump of control is single cavity piezoelectric pump, or multi-cavity body piezoelectric pump or multiple pressure electric tachometer indicator piezoelectric pump.
4. the method for exactly controlling output quantity of piezoelectric pump according to claim 1 is characterized in that: utilize single waveform to carry out drive controlling, or utilize a plurality of waveform combination, realize once or the control of pumping repeatedly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100559720A CN101126384A (en) | 2007-08-17 | 2007-08-17 | Method for exactly controlling output quantity of piezoelectric pump |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100559720A CN101126384A (en) | 2007-08-17 | 2007-08-17 | Method for exactly controlling output quantity of piezoelectric pump |
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| CN101126384A true CN101126384A (en) | 2008-02-20 |
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| CNA2007100559720A Pending CN101126384A (en) | 2007-08-17 | 2007-08-17 | Method for exactly controlling output quantity of piezoelectric pump |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102374158A (en) * | 2011-06-21 | 2012-03-14 | 浙江师范大学 | Self-sensing piezoelectric diaphragm pump |
| CN107080878A (en) * | 2017-04-17 | 2017-08-22 | 深圳市体太赫兹科技有限公司 | Infusion pump and infusion device based on Piezoelectric Driving |
| CN107126591A (en) * | 2017-04-17 | 2017-09-05 | 深圳市体太赫兹科技有限公司 | Dual chamber infusion pump and infusion device based on piezoelectricity |
| CN109578253A (en) * | 2018-09-12 | 2019-04-05 | 国网江苏省电力有限公司泰州供电分公司 | Multi-stage high-frequency piezoelectric pump and its control system |
| TWI697200B (en) * | 2019-04-03 | 2020-06-21 | 研能科技股份有限公司 | Micro piezoelectric pump module |
| CN113339246A (en) * | 2020-03-03 | 2021-09-03 | 深圳市美好创亿医疗科技股份有限公司 | Flow calibration method and flow calibration system of piezoelectric pump |
-
2007
- 2007-08-17 CN CNA2007100559720A patent/CN101126384A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102374158A (en) * | 2011-06-21 | 2012-03-14 | 浙江师范大学 | Self-sensing piezoelectric diaphragm pump |
| CN107080878A (en) * | 2017-04-17 | 2017-08-22 | 深圳市体太赫兹科技有限公司 | Infusion pump and infusion device based on Piezoelectric Driving |
| CN107126591A (en) * | 2017-04-17 | 2017-09-05 | 深圳市体太赫兹科技有限公司 | Dual chamber infusion pump and infusion device based on piezoelectricity |
| CN109578253A (en) * | 2018-09-12 | 2019-04-05 | 国网江苏省电力有限公司泰州供电分公司 | Multi-stage high-frequency piezoelectric pump and its control system |
| CN111536024A (en) * | 2018-09-12 | 2020-08-14 | 国网江苏省电力有限公司泰州供电分公司 | Multistage high-frequency piezoelectric pump control system |
| TWI697200B (en) * | 2019-04-03 | 2020-06-21 | 研能科技股份有限公司 | Micro piezoelectric pump module |
| CN113339246A (en) * | 2020-03-03 | 2021-09-03 | 深圳市美好创亿医疗科技股份有限公司 | Flow calibration method and flow calibration system of piezoelectric pump |
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