CN101115664A - Photomask container - Google Patents
Photomask container Download PDFInfo
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- CN101115664A CN101115664A CNA2005800462014A CN200580046201A CN101115664A CN 101115664 A CN101115664 A CN 101115664A CN A2005800462014 A CNA2005800462014 A CN A2005800462014A CN 200580046201 A CN200580046201 A CN 200580046201A CN 101115664 A CN101115664 A CN 101115664A
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- container
- photomask
- outside face
- guide groove
- capping
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Abstract
A container suitable for storing and transporting photomasks and including a container body, a cover, first and second cushions and left and right channels disposed in slots formed in the container body. In one embodiment, the container of this invention is formed in a one-piece design by rotomolding. The cover is subsequently separated from the body and machined so as to provide a slidingly sufficient seal and disposed therein.
Description
Related application
The application's case is advocated the right based on the 60/630th, No. 907 U.S. Provisional Patent Application case, and its name is called " photomask container (Photomask Container) ", files an application on November 24th, 2004, and this case content is incorporated herein fully so that reference to be provided.
Technical field
The present invention relates to container, and particularly, the present invention relates to be used to store and transport such as the easy reusable container of crushing device such as photomask.
Background technology
Usually, be to store and load and transport in prefabricated plastic casing such as bigger photomask fragile base material devices such as (for example length are greater than 24 inches).Because its size is bigger, the plastic casing that these are prefabricated, in particular for the plastic casing of photomask, cost of manufacture is higher relatively and only use once usually.Therefore, providing to be applicable to that photomask or other base materials are cheap for manufacturing cost, but still can protect the not impaired container of product in transportation and shipment, will be helpful for industry.
Summary of the invention
The container that this paper provided is applicable to that storage and transportation major dimension are at least 24 inches big photomask.In one embodiment, carrier essence of the present invention is monomer-type, its rotatable moulding, carries out machine up subsequently and comes to isolate capping from body.Container of the present invention can form by the electrostatically dissipative material is molded, is for example formed by the polyethylene molding that wherein is dispersed with electric conductor.Top and lower pad can be set, firmly to be arranged at photomask wherein and to protect photomask can not be damaged because of mechanical shock in container of the present invention.Top and lower pad can be made by electrostatically dissipative synthetic resin, are for example made by the polyethylene that wherein is dispersed with electric conductor.Can in the inserts of the side of container of the present invention, machine up go out guide groove, photomask is easily slipped into and skid off container of the present invention guaranteeing.
The invention provides a kind of method of making container of the present invention; its be applicable to the photomask protectiveness be anchored on wherein; described method comprises: form a unitary container body; remove some part to form slit from the both sides of described vessel; in described side slot, embed guide groove, and form the capping of described container.Described lid or capping are preferably the part that original molded forms " body preformed member ", and described " body preformed member " cuts into several portions one or more times and form body or container part and the described capping with an open end.Described vessel and/or lid can be by making such as synthetic resin such as polyethylenes, and described polyethylene optionally can comprise the electrostatically dissipative material.Described slit can form by machine up.Described guide groove can be welded in the slit by hot blast.Perhaps, mould can have metal insert, to form guide groove in the molding process process.
The present invention also provides a kind of method that photomask is placed container, wherein said container has one and is roughly holistic body, described body has the guide groove that can be sealed to described body with embedding, described method comprises: photomask is embedded in the cavity of described body, make the described guide groove of photomask edge contact; And use lid to seal described container.
A feature of the present invention provides a kind of molded one-piece container.One advantage of above-mentioned feature is, for example by not using weld seam, makes the manufacturing of the container that provides more cheap and more firm.
A feature of the present invention provides an embodiment who is made by polyethylene.One advantage of above-mentioned feature is that container of the present invention is easier to be recycled.
Another feature of the present invention is that the container that is provided uses the rotational forming synthetic resin of tolerant difference to make, and inserts is to use the machine bar (for example polyethylene) of narrow tolerance to make, to satisfy the functional requirement that is proposed.One advantage of above-mentioned feature is, by utilizing bar, can provide suitable container originally to design significantly lower one-tenth than prior art machining type.
A feature of the present invention is that one embodiment can be formed by electrostatically dissipative material structure in fact fully.One advantage of above-mentioned feature is that static charge can minimize or be eliminated in fact significantly to the damage of article that container holds.
A feature more of the present invention is to use rotational molding technology and design to form the container of an one-dimensional.One advantage of above-mentioned feature is, can cut the container that forms thus and regulate its height, thereby length is carried out customized, to be suitable for the photomask of differing heights and size.
The body that a feature more of the present invention is the container that provides can form by same instrument is molded with lid.One advantage of above-mentioned feature is that the manufacturing cost of the container that provides reduces greatly.
Another being characterised in that of the present invention can be made container by a kind of agreement by hot blast welding synthetic resin.One advantage of above-mentioned feature is, by the made container that is used for such as objects such as photomask and semiconductor wafers of this kind welding agreement, its cost is more cheap, and compare the container of otherwise making can be more firm.
In certain embodiments, can be before implementing rotational molding technology, the guide groove that can provide support the groove of photomask or other base materials embeds in the mould.These inserts can have metal blank, are used to protect a preforming guide groove that after this removes, and can be higher than the plastics or other compatible materials that form the used resin of vessel by fusion temperature and make.
Read hereinafter explanation with reference to accompanying drawing, these and other feature of the present invention and advantage will become very clear.
Description of drawings
Figure 1A is the transparent view of container of the present invention;
Figure 1B is the front elevation of container shown in Figure 1A;
Fig. 2 is the front elevation that is used to make the body preformed member of container described herein;
Fig. 3 is the side elevation view of container shown in Figure 1;
Fig. 3 A is the lateral plan of the body preformed member of container shown in Figure 1A;
Fig. 3 B is a lateral plan, and its demonstration will be cut a plurality of parts of the body preformed member that forms container of the present invention;
Fig. 3 C is the lateral plan of container of the present invention;
Fig. 3 D is a lateral plan, and the myopia of capping is dissectd part among its displayed map 3C;
Fig. 4 is the cutaway view of container shown in Figure 3 4-4 along the line;
Fig. 5 A is the cutaway view of the 5A-5A along the line of container shown in Figure 1B;
Fig. 5 B is the birds-eye view of the capping of container of the present invention;
Fig. 6 is the profile perspective of described container, and it is similar to the view among Fig. 4;
Fig. 7 is the exploded drawings of container shown in Figure 1; And
Fig. 8 is the transparent view that is used for the mould of molded body preformed member.
Should be appreciated that above-mentioned graphic just illustration the present invention but not plan to limit scope of the present invention.
The main element description of symbols
10: container 104: body
106: capping 107: the osed top bottom
108: liner 109: diapire
110: liner 112: inserts
113: guide groove 114: inserts
116: photomask 120: antetheca
121: outside face 122: rear wall
123: outside face 124: left side wall
125: outside face 126: right side wall
127: outside face 128: slit
130: slit 131: weld nugget
132: pedestal 133: the body preformed member
142: body part 144: enclosure portion
148: base part 150: line
152: line arrow 154
160: mould 162: half
163: half 165: inside face
166: cavity 170: the cavity part
172: cavity centre portion 180: surface
182: guide groove 200: figure
The specific embodiment
For example top of being mentioned herein and bottom, positive and similar terms such as the back side, left side and right side just describe for convenience, but not are used to limit the present invention or its assembly is arbitrary locality or particular orientation.All sizes that illustrated in the accompanying drawing all can be in not deviating from scope of the present invention, according to the potential design of the specific embodiment of the invention and draft purposes and different.Although container is illustrated to upright as major dimension with height among the figure, yet in use, can mainly under major dimension and photomask wherein are in the situation of horizontal direction, use described container.
The container that each annexed drawings disclosed herein and method both can be individually, also can be used to provide improvement in combination with other features and method with and the using method of manufacture method and described container.Therefore, the feature disclosed herein and the combination of method may not be to be essential to the invention for implementing on the widest meaning, and just disclose in order to specifically describe representativeness of the present invention and preferred embodiment.
It is 10 that an embodiment of container of the present invention illustrates in the accompanying drawings generally, and it can comprise that a body 104 or container part, a capping 106, have the closed bottom 107 of diapire 109, are configured to first (top) and second (bottom) strut member, first (left side) that has guide groove 113 and second (right side) inserts 112 and 114 of liner 108 and 110 respectively.Above-mentioned each element cooperation provides a container that is used for safety and stores and transport photomask 116 securely.Described container has a height h, a depth d and a width w.
During fabrication, container 100 is integrally to form, then the remainder of capping 106 from container 100 separated, and carry out machine up as required so that be adjacent to, optionally bubble-tight mode sliding sleeve on body part.The other end of body 104 comprises a pedestal 132 that enlarges.Pedestal 132 makes container have stability and aseismicity between transportation and used life.With illustration but not limiting mode, referring to Fig. 2 and Fig. 3 A-Fig. 3 D, by molded to make a body preformed member 133.As shown in Fig. 2 and the 3A, the body preformed member has other body, capping and base part 142,144 and 148.Then, along by two plane cutting body preformed members shown in line 150 and 152, has the container of the present invention 100 of body 104, capping 106 and pedestal 132 with formation.Can determine the position of 152 place's otch, so that the container with Len req size to be provided.Abandon the part (between plane 150 and 152) of downcutting from remainder fully in the body part 142.Then, can shown in arrow 154 capping 106 be placed on the body 104, described capping 106 can optionally be processed into has the inclined-plane.Referring now to Fig. 3 D,, capping 106 is when putting as shown in the figure, and subsides are placed on the body 104 ideally, thereby provide an airtight sealing to protect institute's osed top photomask not to be subjected to environmental pollution, and institute's osed top photomask is immobilizated in the container 100.
Because adopt molded one-piece design, thereby compare with the container of many prior aries, the manufacturing cost of container of the present invention is cheaper and firmer.The reason that container of the present invention is firmer and more durable is that container of the present invention has weld seam.In addition, all component of container of the present invention all can be made by synthetic resin such as for example polyethylenes.If utilize polyethylene, easier the recycling of container then of the present invention.The manufacturing of container of the present invention will use the rotational forming of tolerant difference to combine with narrow tolerance machine up polyethylene bar, thereby to satisfy the functional requirement of guide groove 112,114 originally than the significantly reduced one-tenth of design of independent molded guide groove wherein.In addition, existing as required molded figure is more favourable, because compare with using easier other labels of being wiped off or disposing, it is not easy to be eliminated or to wipe off.In addition, entire container can be made by the electrostatically dissipative material, thereby prevents to damage the photomask of storing therein and transporting.
Referring to Fig. 8, its demonstration one is applicable to body preformed member 133 is rotated forming mould 160.Described mould has two halves 162,163 inside faces 165, and it defines a cavity 166, and cavity 166 has a cavity part 170 and an adjacent cavity centre portion 172.
The resin that for example is bead form is put into the mould of opening.Closed die also heats and rotates, thereby the resin of fusing is scattered to cover inside face.Remove heating then, make mold cools down, open mould then, and shift out the body preformed member.After this, cut out top closure, container part is cut to required size, and can cut out the slit in the sidewall.With top have place with machine up or other modes that the inserts of guide groove is preferable to be attached in the slit by welding manner.
(for example in Fig. 8 180 on) arranges suitable figure 200 in addition on can one of them surface in cavity, the figure on the film substrate for example, and above it is adhered to.Then, the resin of fusing can be to the injection moulding that overlaps of described film, and figure is fixed on the original position firmly.In addition, inserts can be anchored in the mould, for example in 182 places that wherein have guide groove, as being welded in wherein alternative to the cutting slit and with inserts.In this option, inserts is formed by a poly-mer or other materials preferable, and it has the higher fusion temperature of resin that is used to form the body preformed member in the mould than being added into.In addition, during molded, may need to hide guide groove with blank.This can remove after plastic hardening.
Owing to can under the situation that does not deviate from spirit of the present invention, make all multiple modifications, thereby scope of the present invention is not limited in the illustrated and described embodiment of this paper to the present invention.But scope of the present invention should be determined by enclose claims and equivalent scope thereof.
Claims (according to the modification of the 19th of treaty)
1. combination that is used to transport the container and a photomask of photomask, described photomask is rectangular and smooth substantially, and has two ends, two sides, an and thickness, and described container comprises:
One elongated polymer container part, it has a sealing roof that has an outside face, one has the closed bottom end wall of an outside face, one closed end and an open front face, the a pair of opposing sidewalls that has an outside face respectively, in the described pair of sidewalls each all comprises an elongate polymer inserts that has a guide groove, it extends along its length, and be anchored in the described sidewall by welding, in the described elongated poly-mer inserts each forms by a poly-mer, described poly-mer be different from the described inserts each be anchored on the poly-mer of described side wherein by described welding, the described sidewall that described inserts is embedded in it wherein forms one, and described photomask is positioned in the described guide groove;
One capping, it seals described open end, and extend through partly, and meshes the outside face of the outside face of described roof, described diapire and the outside face of described two sidewalls; And
The pair of end portions strut member, it is positioned each end place of photomask described in the described container, and when described open end was sealed in described capping, described end supports meshed described photomask, and described photomask is fastening in place.
2. combination as claimed in claim 1 is characterized in that described container part and described sidewall inserts are to be made of polyethylene.
3. combination as claimed in claim 1 is characterized in that described end supports is to be made of a foamable polymer.
4. combination as claimed in claim 1 is characterized in that described photomask has one at least 24 inch length.
5. container that is used to transport photomask, described photomask is rectangular and smooth substantially, and has two ends, two sides, an and thickness, and described container comprises:
One elongated polymer container part, it has closed bottom end wall, a closed end and an open front face, a pair of opposing sidewalls that has an outside face respectively that a sealing roof, that has an outside face has an outside face, in the described pair of sidewalls each all comprises an elongate polymer inserts that has a guide groove, it extends along its length, and be anchored in the described sidewall by welding, described photomask is positioned in the described guide groove;
One capping, it seals described open end, and extend through partly, and meshes the outside face of the outside face of described roof, described diapire and the outside face of described two sidewalls; And
The pair of end portions strut member, it is positioned each end place of photomask described in the described container, and when described open end was sealed in described capping, described end supports meshed described photomask, and described photomask is fastening in place.
6. container as claimed in claim 1 is characterized in that described container part and described sidewall inserts are to be made of polyethylene.
7. container as claimed in claim 1 is characterized in that described end supports is to be made of a foamable polymer.
8. container as claimed in claim 1 is characterized in that described photomask has one at least 24 inch length.
9. one kind is to comprise that the base material manufacturing of photomask has the method for the container of a length, a width and an optional height, described container has a roof, a diapire, pair of sidewalls, a closed end, reaches the capping of open end and the described open end of an extend through, and described method comprises the steps:
A) provide a rotary die, its medial surface defines a mould cavity, described mould cavity has the end portion cavity part greater than an adjacent cavities centre portion, described end portion cavity partly is used to form the end on the body preformed member, and described cavity centre portion is used to form the centre portion on the described body preformed member;
B) molded as follows described body preformed member:
I) resin is put into described mould;
Ii) described mould is heated, to melt described resin;
Iii) rotate described mould, so that the resin of described fusing scatters along described medial surface;
Iv) make the hardening of resin of described fusing become described body preformed member, the one end has a height and the width greater than an adjacent centre portion;
V) described body preformed member is shifted out from described mould; And
C) cut described body preformed member, thereby downcut at least a portion of described end;
D) remove in the described sidewall elongated portion in each, with in wherein forming opening; And
E) the plastics inserts is welded in the described opening.
10. method as claimed in claim 9, it is characterized in that further comprising the steps: to provide the resin of q.s, so that described body preformed member will have the uniform wall of a thickness essence, and the described inboard degree of depth of described end and its size of width are suitable for meshing slidably the outside face of described centre portion.
11. method as claimed in claim 9 before it is characterized in that further comprising the steps: to heat described mould, embeds the figure on the base material on the surface in the described mould.
12. a manufacturing is used for the method for a container of a photomask, it comprises:
Form a unitary container body, it has a top, a bottom, a front, a back side and two sides;
Remove the described vessel of part from described two sides, to define side slot;
Guide groove is embedded in the described side slot;
The plastics inserts is welded in the described side slot; And
Form a capping, described capping just is fit to described container.
13. method as claimed in claim 12, it is characterized in that described vessel by injection moulding, blow molding, and rotational forming one of them form.
14. method as claimed in claim 12 is characterized in that forming described vessel by a synthetic resin.
15. method as claimed in claim 12 is characterized in that forming described vessel by polyethylene.
16. method as claimed in claim 12 is characterized in that forming described vessel by polyethylene, an electric conductor is scattered in the described polyethylene.
17. method as claimed in claim 12 is characterized in that removing the described vessel of part by machine up.
18. method as claimed in claim 12 is characterized in that further comprising described guide groove is anchored in the described side slot.
19. method as claimed in claim 18 is characterized in that by the adjacent portions that melts described vessel and the guide groove fastening described guide groove of assigning to.
20. method as claimed in claim 14 is characterized in that described capping forms by separating with described vessel.
Claims (21)
1. combination that is used to transport the container and a photomask of photomask, described photomask is rectangular and smooth substantially, and has two ends, two sides, an and thickness, and described container comprises:
One elongated polymer container part, it has closed bottom end wall, a closed end and an open front face, a pair of opposing sidewalls that has an outside face respectively that a sealing roof, that has an outside face has an outside face, in the described pair of sidewalls each all comprises an elongate polymer inserts that has a guide groove, it extends along its length, and be anchored in the described sidewall by welding, described photomask is positioned in the described guide groove;
One capping, it seals described open end, and extend through partly, and meshes the outside face of the outside face of described roof, described diapire and the outside face of described two sidewalls; And
The pair of end portions strut member, it is positioned each end place of photomask described in the described container, and when described open end was sealed in described capping, described end supports meshed described photomask, and described photomask is fastening in place.
2. combination as claimed in claim 1 is characterized in that described container part and described sidewall inserts are to be made of polyethylene.
3. combination as claimed in claim 1 is characterized in that described end supports is to be made of a foamable polymer.
4. combination as claimed in claim 1 is characterized in that described photomask has one at least 24 inch length.
5. container that is used to transport photomask, described photomask is rectangular and smooth substantially, and has two ends, two sides, an and thickness, and described container comprises:
One elongated polymer container part, it has closed bottom end wall, a closed end and an open front face, a pair of opposing sidewalls that has an outside face respectively that a sealing roof, that has an outside face has an outside face, in the described pair of sidewalls each all comprises an elongate polymer inserts that has a guide groove, it extends along its length, and be anchored in the described sidewall by welding, described photomask is positioned in the described guide groove;
One capping, it seals described open end, and extend through partly, and meshes the outside face of the outside face of described roof, described diapire and the outside face of described two sidewalls; And
The pair of end portions strut member, it is positioned each end place of photomask described in the described container, and when described open end was sealed in described capping, described end supports meshed described photomask, and described photomask is fastening in place.
6. container as claimed in claim 1 is characterized in that described container part and described sidewall inserts are to be made of polyethylene.
7. container as claimed in claim 1 is characterized in that described end supports is to be made of a foamable polymer.
8. container as claimed in claim 1 is characterized in that described photomask has one at least 24 inch length.
9. one kind is to comprise that the base material manufacturing of photomask has the method for the container of a length, a width and an optional height, described container has a roof, a diapire, pair of sidewalls, a closed end, reaches the capping of open end and the described open end of an extend through, and described method comprises the steps:
A) provide a rotary die, its medial surface defines a mould cavity, described mould cavity has the end portion cavity part greater than an adjacent cavities centre portion, described end portion cavity partly is used to form the end on the body preformed member, and described cavity centre portion is used to form the centre portion on the described body preformed member;
B) molded as follows described body preformed member:
I) resin is put into described mould;
Ii) described mould is heated, to melt described resin;
Iii) rotate described mould, so that the resin of described fusing scatters along described medial surface;
Iv) make the hardening of resin of described fusing become described body preformed member, the one end has a height and the width greater than an adjacent centre portion;
V) described body preformed member is shifted out from described mould; And
C) cut described body preformed member, thereby downcut at least a portion of described end.
10. method as claimed in claim 9, it is characterized in that further comprising the steps: to provide the resin of q.s, so that described body preformed member will have the uniform wall of a thickness essence, and the described inboard degree of depth of described end and its size of width are suitable for meshing slidably the outside face of described centre portion.
11. method as claimed in claim 9 is characterized in that further comprising the steps:
Remove in the described sidewall elongated portion in each, to form opening therein; And
The plastics inserts is welded in the described opening.
12. method as claimed in claim 11 before it is characterized in that further comprising the steps: to heat described mould, embeds the figure on the base material on the surface in the described mould.
13. a manufacturing is used for the method for a container of a photomask, it comprises:
Form a unitary container body, it has a top, a bottom, a front, a back side and two sides;
Remove the described vessel of part from described two sides, to define side slot;
Guide groove is embedded in the described side slot; And
Form a capping, described capping just is fit to described container.
14. method as claimed in claim 13, it is characterized in that described vessel by injection moulding, blow molding, and rotational forming one of them form.
15. method as claimed in claim 13 is characterized in that forming described vessel by a synthetic resin.
16. method as claimed in claim 13 is characterized in that forming described vessel by polyethylene.
17. method as claimed in claim 13 is characterized in that forming described vessel by polyethylene, an electric conductor is scattered in the described polyethylene.
18. method as claimed in claim 13 is characterized in that removing the described vessel of part by machine up.
19. method as claimed in claim 13 is characterized in that further comprising described guide groove is anchored in the described side slot.
20. method as claimed in claim 19 is characterized in that by the adjacent portions that melts described vessel and the guide groove fastening described guide groove of assigning to.
21. method as claimed in claim 15 is characterized in that described capping forms by separating with described vessel.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US63090704P | 2004-11-24 | 2004-11-24 | |
| US60/630,907 | 2004-11-24 | ||
| US11/286,696 | 2005-11-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101115664A true CN101115664A (en) | 2008-01-30 |
Family
ID=39023420
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2005800462014A Pending CN101115664A (en) | 2004-11-24 | 2005-11-25 | Photomask container |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN101115664A (en) |
| TW (1) | TW200700925A (en) |
-
2005
- 2005-11-23 TW TW094141156A patent/TW200700925A/en unknown
- 2005-11-25 CN CNA2005800462014A patent/CN101115664A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| TW200700925A (en) | 2007-01-01 |
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Open date: 20080130 |