CN101112007A - Systeme und verfahren zur abstimmung von filtern - Google Patents
Systeme und verfahren zur abstimmung von filtern Download PDFInfo
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- CN101112007A CN101112007A CNA2005800474670A CN200580047467A CN101112007A CN 101112007 A CN101112007 A CN 101112007A CN A2005800474670 A CNA2005800474670 A CN A2005800474670A CN 200580047467 A CN200580047467 A CN 200580047467A CN 101112007 A CN101112007 A CN 101112007A
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- H04—ELECTRIC COMMUNICATION TECHNIQUE
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Abstract
Methods, systems and apparatus for filter design, analysis and adjustment are provided. Various embodiments may include, for example, methods, systems and apparatus for electric signal filter tuning. Embodiments may also include design techniques for planar electric signal (e.g., RF signals) filter tuning. In at least an embodiment of the present invention a technique for filter tuning is provided which may include parameter extraction, optimization and tuning recipes techniques that may require only a single permanent filter tuning. In at least another embodiment a system and method of filter design, analysis and adjustment according to the present invention includes use of tuning that may be set using a mechanical scribing tool or a laser trimming device. In at least one other embodiment, a filter tuning technique may be provided and include providing trimming tabs on a resonator edge that may be disconnected or trimmed for filter tuning.
Description
The application advocates that in the rights and interests of the U.S. Provisional Application 60/632,084 of submission on November 30th, 2004, it all discloses combination by reference therewith, and intactly illustrates at this.Statement of government interest
Obtain under contract MDA972-00-C-0010 support at least in part in this present invention who provides by the Totally Agile RF Sensor System of DARPA/CMD issue.U.S. government has for paid permission of the present invention and the right under limited situation, thereby requires the title to patent based on the reasonable clause that clause provided among the contract MDA972-00-C-0010 that is issued by Defense Advanced Research Project Agency, Defense Sciences Office (sequence number J607 (DARPA/CMD)) it to be permitted to other people.
Technical field
The present invention relates to the field of filter analysis and design, and, more specifically, relate to the system and method for relevant tuned filter.
Background technology
In the past few decades witness the huge progress of electronics and radio communication aspect.The continuous development of more highdensity integrated circuit and improvement cheaply makes a large amount of mobile devices, and concrete, it is very universal, almost ubiquitous that portable radio device becomes in the whole world.For example, has radio function and the very universal in the world mobile device in today comprises, mobile phone, PDA(Personal Digital Assistant), laptop computer, gps sensor (GPS) device.The work in radio frequency (RF) and microwave wireless signal frequency range usually of these devices.
The described electronic installation of communicating by letter with microwave frequency at RF need have the transmitter and the receiver of electronic signal filter, signal and the undesired signal wanted with assist in generating and/or district office.Yet, be difficult to radio communication and set up and can come the signal that the district office wants and the electronic signal filter of undesired signal according to expectation.Therefore, after making, tuning described electronic signal filter, thus make them can produce better and/or district office signal and the undesired signal frequency wanted.
For example, the electronic filter that is used for radio communication comprises chamber mode filter and plane filter.Electronic filter such as flat filter can comprise a series of resonators that are coupled.Developed high performance flat filter, for example, high temperature superconduction wave filter (HTS) is to provide extremely filtering accurately, thereby improve the quality of radio communication, especially in zone with high-density wireless device or RF or microwave signal can not fine propagation the zone.For example, referring to u.s. patent application serial number 10/944,339 " Stripline Filter Utilizing One or More Inter-resonatorCoupling Members ", by reference it is incorporated into this.
Flat filter is shaped in the high-k substrate usually, and is designed to very compact dimensionally.Be utilized as the accurate photoetching technique of semiconductor processes exploitation, can produce the coupler (coupling) that can be good at repetition within the acceptable range.Different with the chamber mode filter, flat filter does not require that usually coupler is tuning, because, to compare resonance frequency and change, filter response changes more insensitive to coupler.Yet substrate thickness changes and/or may cause the unacceptable resonance frequency of flat filter to change such as the processing variation of etching condition, thereby needs tuning flat filter.
Flat filter is used several tunable technologies, for example, developed the high-performance super conductive filter.Keep high-performance to need stable tuning processing in the Design of Filter stage or in making.Two kinds of tuning approach of main flat filter are arranged.First kind of approach is mechanical tuning, is used widely in industry.By near the electromagnetic field of resonator, moving such as the element of dielectric rod or conducting probe tuned filter mechanically.For example, can use tuning screw above resonator, to move up and down dielectric rod or conducting probe.For super conductive filter, can on tuning screw, use the probe of blue sapphire bar or superconduction coating.Can place the sapphire bar by the high electromagnetic field above resonator, and by direct capacitance (shunt capacitance) ground connection is come tuning resonance frequency.The superconduction probe can be used for magnetic and/or electric field is tuning, still, usually they be used for electromagnetic field, because it can more effectively carry out tuning.Described probe changes the electromagnetic field around the resonator, and changes the inductance of resonator.Sochor is at United States Patent (USP) 5,968, described a kind of illustrative methods that mechanical tuning is provided in 876, and it is incorporated herein by reference.
An advantage of described mechanical tuning approach is invertibity.Come tuned filter by moving up and down described tuned cell or screw via test and Error processing.After a while, can also adjust if desired tuning.A shortcoming of mechanical tuning is, when adopting between other resonator or resonator coupler, especially when with their during near circuit placement, described tuned cell or screw can influence its resonance frequency potentially.In fact, this is recurrent.Variation in the coupler has finally limited the tuning range of filter.By during Design of Filter, considering this influence to be minimized this situation.The tuning setting that the designer can arrange resonator mutually away from, and away from coupler, to avoid described influence.This consideration and approach have limited the design freedom of flat filter.Have mechanical part and also may cause other problem.For example, at stand-by period and afterwards, may fall down metal or media sheet from mechanical organ or screw.These thin slices can influence the Q factor of filter, and because they freely move on circuit, also will change tuning everywhere.Also need after tuning fixing or lock the position of described tuned cell finishing, constant with the performance that keeps filter.
Make second kind of approach by processing, it does not need mechanical part.Report several method, arranged thin dielectric layer such as laser reconditioning part filter paths or on filter paths.Parker, Ellis and Humphreys are at Tuning Superconducting Microwave FiltersBy Laser Trimming by Goodyear, IEEE MTT-S Digest, a kind of exemplary laser reconditioning technology has been shown in 2002 this piece papers, it is incorporated herein by reference.Tsuzuki, Suzuki and Sakakibara are at Superconducting Filter for IMT-2000 Band, IEEETransaction on Microwave Theory and Techniques, vol.48, No.12, a kind of exemplary medium placement technique has been described in December 2000 this piece papers, it is incorporated herein by reference.These approach will cause permanent tuning change, in case can not change after being provided with again.Therefore, can not be tuning once more or readjust described filter.Thereby, must carry out tuningly very carefully, make and can forever not damage described filter.
Usually, although mainly use first kind of approach, described second kind of approach is better than described first method.Yet,, must solve two subject matters in order to realize described second kind of approach.At first, must the reproducible tuning processing of exploitation.The second, the method for the robust of tuning scheme (tuning recipe) need be provided.Since described tuning irreversible usually, require the two all very accurate.If can provide finishing accuracy insensitive Design of Filter, this will be very beneficial, thus can be often tuned filter exactly.The invention provides the method for some filter tuners and design, it satisfies these demands.
Summary of the invention
The present invention mainly is devoted to be provided for the mthods, systems and devices of Design of Filter, analysis and/or adjustment.More specifically, embodiment can comprise that relating to electronic filter designs and tuning system, method and apparatus.
Such embodiment for example comprises a plurality of steps, and it will bring improved filter tuner.Can be at the working temperature operation filter of expectation, to determine various initial or preset adjustment performance characteristics.Then, can carry out parameter extraction by for example network analyser and computer.For example, can use the S parameter response (for example, return loss) that has measured to come various parameters definite and described filter association.Next, can optimize filter response by for example computer.In various embodiments, coupler (for example, between the resonator of filter) can be remained unchanged, and, can adjust frequency to optimize the S parameter response of filter.Then, can determine the difference between filter characteristic of being extracted and the filter characteristic of having optimized, and be used to provide tuning scheme.Can come tuning described filter according to this tuning scheme then.In various embodiments, can by cutting or repair described filter a part, be coupled to the tuning fork (tuning fork) of the part of described filter, and/or be coupled to the part of described filter trim piece (trimming tab) carry out that this is tuning.In case described filter has been carried out tuning, then can check.For example, described filter can be worked under its working temperature once more, and can measure to determine the new capability feature of described filter.If new tuned performance characteristic is acceptable, then can encapsulates described filter and be used for operation.If new tuned performance characteristic is unacceptable, then can tuning once more described filter, perhaps that it is discarded.Yet, it is noted that to the invention enables most filters suitably to carry out tuning in for the first time tuning.
In at least one embodiment, can use described parameter extracting method to diagnose " unlatching " state of described filter.Can be considered as the cross couplings of each resonator of multi-resmator filter during milking constant.In various embodiments, can only use main parasitic couplings (dominant parasitic coupling), to obtain result more accurately with main coupling.Further, for fear of since parasitic couplings and/or " dirty window (dirty window) " (for example, needed when filter being connected to the instrument that is used to measure performance of filter, connector (connector), welding, transmission line, cable etc.) the local minimal solution that existence caused, can use a plurality of data sets.Then, can carry out the optimization of filter response based on the diagnostic message that obtains from parameter extraction.For example, can optimize described return loss, obtain narrower bandwidth with the coupling that allows utilization to be extracted, but only change described resonator.Further, also can optimize refusal response (rejection response) by making described return loss reduce a little.
In at least one embodiment, the present invention can comprise a kind of high-performance plane Filter Design technology and Design of Filter of being used for.Described technology provides one or more tuned cells, and it can carry out filter tuner by for example manual delineation (hand scribing), and provides a kind of in order to determine to delineate and so on the technology based on parameter extraction.In the multi-resmator flat filter, each resonator has tuned cell, for example, tuning fork, it provides ground connection shunt capacitance (shuntcapacitance to ground).Can described tuning fork be coupled to described resonator by series capacitor, perhaps it be directly coupled to described resonator.Yet if described tuning fork is directly coupled to described resonator, the error suseptibility when delineating reduces.Can design described series capacitor, with described tuning susceptibility is reduced to be about seen when tuning fork is directly coupled to described resonator 10%.The susceptibility of this reduction makes and can for example, utilize the mechanical device such as Buddha's warrior attendant stone inscription pen to carry out tuning by manual.Utilize Buddha's warrior attendant stone inscription pen to carry out described manual delineation at microscopically.Also can use such as other means of laser grooving and scribing instrument and delineate tuning fork.Under any circumstance, can disconnecting (for example, delineation) by the parts with tuning fork or shunt capacitor (shunt capacitor) physically to carry out tuning to described resonator.For tuning accurate and convenience, described tuning fork can also comprise convergent-divergent and/or numbering (numbering).Further, can provide the tuning fork of different electric capacity, to carry out rough and fine tuning.Can use and diagnose filter coupled and resonance frequency, and provide scheme for delineating described tuning fork based on the technology of parameter extraction.Like this, provide a kind of Design of Filter, its instrument that need not any costliness can be realized tuning very accurately.Yet, in a kind of modification, can use the laser reconditioning machine physically to disconnect the part of described tuning fork or shunt capacitor.
In at least one embodiment, the present invention can comprise a kind of tuning flow process that has comprised the flat filter of plane tuned cell that is used for.A kind of flat filter that comprises the plane tuned cell can be provided.Can analyze various filter characteristic, for example, frequency and return loss, tuning to determine whether needs.Tuning if desired, then calculate with definite how correctly tuning described flat filter.For example, can carry out filter response optimization, and develop tuning scheme.Then, can adjust one or more tuned cells, thus at least a portion of tuning described filter correctly.
In at least one other embodiment, the one or more trim piece that provide on the resonator edge can be provided in the present invention, for example, can be filter tuner finishing (that is, disconnecting from described circuit) described resonator edge.Described trim piece can have centrifugal pump, the known quantity that they are different with the resonance frequency shift of described filter, and in binary system progression, dispose described amount.For example, described filter can have four trim piece on each resonator, and it can be with the binary system progression skew resonance frequency such as 800kHz, 400kHz, 200kHz and 100kHz.Can be for other sheet be provided such as 1500kHz sheet and/or other 100kHz sheet rough and/or meticulous tuning.(for example, on working temperature) described filter can be tested with definite its feature, and parameter extraction can be carried out.Can carry out parameter optimization then, thereby be the definite for example frequency shift (FS) of each resonator in the filter.From then on information can generate tuning scheme, and indication should disconnect from described resonator edge or repair which trim piece, thereby produces suitable tuned filter.Can utilize laser or mechanical scratching device to cut off described trim piece from described resonator.
The tuning flat filter that uses in RF and microwave applications is provided at these mthods, systems and devices that provide.In various embodiments, described flat filter is made by high temperature superconducting materia (HTS).
Parameter extraction of the present invention and optimisation technique are not limited to the Design of Filter such as trim piece resonator and the design of tuning fork resonator filter in order to our exploitation.These technology can also be applied to the mechanical tuning such as dielectric tuning filter and HTS probe tuned filter.Yet as said, they are especially effective for trim piece resonator and the design of tuning fork resonator filter.
Some advantages in this processing approach that provides are that (1) has the filter of better simply structure and lower cost, because, there is not needed mechanical part when tuning, (2) because described tuning be nonvolatil, filter is more reliable, and (3) owing to lack the mechanical tuning element or the screw of required consideration during the layout of flat filter, and filter can have layout more freely.
Based on the research to following discloses content and accompanying drawing thereof, the further aspect that various embodiment comprised is conspicuous for those skilled in the art.
Description of drawings
With reference to the accompanying drawings, consider following detailed description to the embodiment of the invention, can understand and understand purposes of the present invention, purpose, feature and advantage easily, wherein, the element that has marked same numbers in the described accompanying drawing is identical, and:
Fig. 1 is the flow chart according to the tuned filter method of at least one embodiment;
Fig. 2 is a block diagram, and it has illustrated the system that is used for filter tuner according to embodiment;
Fig. 3 is according to the filter of embodiment and the circuit diagram of tuned cell;
Fig. 4 is the end view that has according to the plane filtering apparatus of the tuned cell of at least one embodiment;
Fig. 5 is the top view layouts that has according to the plane filtering apparatus of the tuned cell of at least one embodiment;
Fig. 6 is according at least one embodiment, at the tuning range of one of tuning fork shown in Fig. 5 and the figure of susceptibility;
Fig. 7 is according at least one embodiment, at the figure of the tuning range of two tuning forks shown in Fig. 5;
Fig. 8 is the flow chart according to the tuned filter method of at least one embodiment;
Fig. 9 is the top view layouts that has according to the multi-resmator plane filtering apparatus of the tuning fork tuned cell of at least one embodiment;
Figure 10 is according at least one embodiment, the figure of initial measurement data before tuning filter as shown in Figure 9;
Figure 11 is according at least one embodiment, as shown in Figure 9 the coupling matrix that has extracted of filter;
Figure 12 is according to the figure of the frequency of extracting and having optimized of each resonator at least one embodiment, as shown in Figure 9 the filter;
Figure 13 is according at least one embodiment, as shown in Figure 9 the figure of the initial return loss of having measured and having optimized of filter;
Figure 14 according at least one embodiment, be used for the form of scheme of the resonator 1-10 of tuning filter as shown in Figure 9;
Figure 15 is a diagrammatic sketch, and it shows according to the actual delineation line on the tuning fork of the resonator 7,8 of filter at least one embodiment, as shown in Figure 9 and 9, and the relevant portion of described scheme form;
Figure 16 according at least one embodiment, as shown in Figure 9 the modulated of filter and the figure of the return loss optimized;
Figure 17 carries out the figure of tuning measurement data afterwards according at least one embodiment, to filter as shown in Figure 9;
Figure 18 is the top view layouts according to the multi-resmator plane filtering apparatus with trim piece tuned cell of at least one embodiment;
Figure 19 amplifies it so that described trim piece tuned cell to be shown better according at least one embodiment, as shown in figure 18 the part of top view layouts of multi-resmator plane filtering apparatus;
Figure 20 is the diagrammatic sketch according to the physical layout of the typical imperfect filters to test environment of at least one embodiment;
Figure 21 is according at least one embodiment, as shown in figure 20 the block diagram of equivalent electric circuit of layout;
Figure 22 is according to the block diagram of the further simple equivalent circuit model of at least one embodiment, imperfect filter environment.
Embodiment
The present invention mainly is devoted to Design of Filter, analysis and adjustment.Various embodiment can comprise, for example, and the mthods, systems and devices that electronic filter is tuning.Embodiment can also comprise the designing technique that is used for the plane electronics filter tuner.Mthods, systems and devices of the present invention are particularly useful for being tuned at employed flat filter in RF and the microwave applications.In various embodiments, for example, can use such as YBa
2Cu
3O
7-δ(YBCO) high-temperature superconductor (HTS) material is made described flat filter.Embodiments of the invention can also comprise parameter extraction, optimization and tuning scheme technology.These technology are not limited to have the application of Design of Filter (such as trim piece resonator and the design of tuning fork resonator filter) as used herein.These technology can also be applied to the mechanical tuning such as dielectric tuning filter and HTS probe tuned filter.Yet technology described here is especially effective to trim piece resonator and the design of tuning fork resonator filter.
In at least one embodiment of the present invention, provide a kind of technology that is used for filter tuner, it can comprise parameter extraction, optimization and tuning scheme technology, and this technology can only require single permanent filter tuner.In another embodiment at least, comprise that according to the system and method for Design of Filter of the present invention, analysis and adjustment use is tuning by what utilize mechanical scratching instrument or laser reconditioning device to be provided with.In at least one other embodiment, the filter tuner technology can be provided, this technology is included on the resonator edge trim piece is provided, and it can disconnect or finishing for filter tuner.
With reference to figure 1, provide a kind of method of tuned filter.This embodiment can comprise a plurality of step 110-140, and it will bring improved filter tuner.110, filter can be worked under the working temperature of expectation, to determine various initial or tuning in advance performance characteristics.For example, the HTS filter can be worked down at 77 degree (K), and measures.115, can carry out parameter extraction by for example network analyser (among Fig. 2 shown in the clauses and subclauses 235).For example, can use the S parameter response of having measured (for example, return loss) to determine the various parameters relevant with described filter.Next, 120, can optimize filter response by for example computer (among Fig. 2 shown in the clauses and subclauses 205).In various embodiments, can keep (for example, between the resonator of filter) described coupling constant, and adjust described frequency, to optimize the S parameter response of filter.Then, 125, determine the difference between filter characteristic of having extracted and the filter characteristic optimized, and it is used to provide tuning scheme.130, then can be according to the tuning described filter of described tuning scheme.In various embodiments, can by for example cut off or or repair described filter a part, be coupled to the tuning fork of a part of described filter and/or the trim piece that is coupled to the part of described filter carries out that this is tuning.In case described filter has been carried out tuning, then can check.For example,, described filter is worked once more under its working temperature, and measure to determine the new capability feature of described filter 135.If such as frequency response and/or the new tuned performance characteristic of S parameter response is acceptable, then can encapsulates described filter and be used for operation.After the single iteration of aforementioned tuning process, will obtain acceptable performance of filter in this method that provides, and, will finish described tuning methods 145.Yet, if be unacceptable in 140 described new performance characteristics, can tuning once more described filter, perhaps it is struck off.It is noted that use this parameter extraction that provides, performance of filter optimization and tuning scheme process can make most of filters can be in the described first time tuning in by suitably tuning.
With reference to figure 2, block diagram is provided, it has illustrated the system that is used for filter tuner according to the embodiment of the invention.In this example, computer 205 is coupled to network analyser 235, and network analyser 235 is coupled to tested and tuning filter.Filter 240 utilizes the RF cable to be coupled to network analyser 235.Computer 205 can be personal computer (PC) or the computer that can carry out any other type of needed analysis of filter tuner and calculating.Computer 205 can comprise controller and processor 210 and memory 215.Memory can comprise parameter extraction 220, filter response optimization 225 and tuning scheme 230 information.In operation, network analyser 235 can carry out parameter extraction, and described parameter extraction information 220 can be stored in the memory 215.Then, computer 205 controllers and processor 210 can service routine generate filter response optimization information 225, and it is stored in the memory 215.Next, controller and processor 210 can service routine generate tuning scheme information 230, and it helps operator or automatic tuning system filter 240 to be tuned to the performance characteristic of expectation.In various embodiments, filter 240 can be set to the device working temperature.For example, can use the cryostat (not shown), lay described filter therein, thereby the temperature of HTS filter is reduced to working temperature, for example, 77K.
With reference now to Fig. 3,,, provides the equivalent electric circuit of exemplary filters and tuned cell according to the embodiment of the invention.In this example, can simply filter resonator be modeled as capacitor C
0305 and inductor L310.Tuned cell is modeled as variable shunt capacitor C
s320, and by gap capacitor (gap capacitor) C
gIt is coupled to described resonator (305 and 310).Yet in a kind of modification, described tuned cell is variable shunt capacitor C
s320, it can be directly connected to resonator (305 and 310).Can be by changing ground connection shunt capacitor C
s320 tuning described resonators.
With reference to figure 4,, provide the end view of plane filtering apparatus with tuned cell according at least one embodiment.In this example, can form filter construction 405 by one or more resonators of formation and tuner 420 in substrate, wherein, described substrate can comprise medium substrate or material 410 and ground plane 415.Usually, by make resonator and tuner 420 and ground plane 415 such as the electric conducting material of gold or copper.Under the situation of microwave filter structure, can be by such as YBa
2Cu
3O
7-δ(YBCO) high-temperature superconductor (HTS) material is made resonator and tuner 420 and ground plane 415.
With reference to figure 5,, provide the top view layouts of plane filtering apparatus with tuned cell according at least one embodiment.Fig. 5 shows and utilizes spinning in and out (spiral-in and spiral-out, SISO) exemplary resonators 505 that forms of the half-wavelength structure of shape wherein utilizes the circuit diagram of Fig. 3 to represent described half-wavelength structure.Complete filter can comprise a plurality of resonators 505, for example, and eight or ten resonators 505 of series connection.SISO track 505 can be made of metal, as described to resonator shown in Figure 4 and tuner 420.For example, can be at the article " Efficient Computer Design Of Compact Planar Band-pass FiltersUsing Electrically Short Multiple Coupled Lines " of Gregory L.Hey-Shipton, 1999 IEEE MTT-S Int.Microwave Symp.Dig., find some details of these devices among the June 1999, by reference it is incorporated into this.Present invention should not be construed as the resonator that only limits to SISO and similar SISO, it can be widely used in large-scale resonator types, such as United States Patent (USP) 6,895,262, its High Temperature Superconducting Structures and Methods for HighQ by name, Reduced Intermodulation Structures, u.s. patent application serial number 10/480,743, its Resonator and Filter Comprising the Same by name, u.s. patent application serial number 10/391,667, its Narrow-Band Filters with Zig-Zag Hairpin Resonatorand the article Highly-Selective Electronically-Tunable Cryogenic FiltersUsing Monolithic by name, Discretely-Switchable MEMS Capacitor Arrays, E.M.Prophet, J.Musolf, B.F.Zuck, S.Jimenez, K.E.Kihlstrom and B.A.Willemsen, IEEE Transactions on Applied.Superconductivity, 15,956-959 (2005), with these all by reference in conjunction with therewith.Device in this example 500 can be called " tuning fork resonator " design, and, can use for example manual delineation or laser grooving and scribing to carry out tuning.One or more " tuning fork " tuned cell 520 and 525 that can will be made by metal material at resonator one end is via structure 515, by a series of interdigitated capacitor C
g315 are connected to resonator 505.Although show two tuning fork elements 520 and 525, depend on that needed tuning range and tuning scheme also can use one or more tuning forks at this.Described tuning fork element 520 and 525 can be floating from described resonator 505 electricity.Further, tuning fork element 520 and 525 can comprise scale 530 and 535 respectively, for delineation is provided convenience.Described scale can be relevant with tuning scheme (below be described in detail).Notice,, also can comprise the structure 510 that allows the interdigitated coupling at the other end of resonator 505.As will be discussed in detail, can use structure 510, the two or more resonators 505 that comprise in the flat filter are coupled.
Can for example, delineate the frequency tuning of realizing resonator 505 on the part of tuning fork 530 by at one or more floating tuning forks.This has the shunt capacitor c that reduces floating part (between 315 and 320)
s320 effect is shown in the equivalent electric circuit among Fig. 3.In this case, total capacitance that can following description resonator:
C
0→C＝C
0+H
By comprising the tuning fork structure, can be with original frequency f
0Change into f.
Can pass through Δ f C
sThe susceptibility of frequency shift (FS) is estimated in differentiate:
The described susceptibility factor
Expression is just delineated susceptibility ratio under the situation of a resonator part when described fork is directly connected to resonator and need not the uncoupling structure.
Fig. 6 shows and is example shown in Figure 5, the frequency shift (FS) that tuning fork element 520 calculates and to the susceptibility factor of delineation length L.Can utilize computer program to carry out described calculating, for example, the Momentum that provides by Agilent Technology.Shown in curve 610, can design this concrete exemplary tuning fork element 520, make that when delineating described fork can carry out tuningly with about 1MHz as maximal increment, wherein, it is the total length of described tuning fork that described about 2mm is similar to about 2mm.On scope shown in Figure 6, the described susceptibility factor is changed into 0.3 from about 0.05, indicated as curve 605.Therefore, indicated as curve 610, in this example, state susceptibility in the L=0 place and be about 12kHz/50 μ m, and be about 46kHz/50 μ m at the L=2.0mm place.If in another embodiment, tuning fork 520 can be directly connected to resonator 505, and when at 2.0mm place delineation tuning fork 520, the amount of frequency shift (FS) 610 can be about 9.2MHz.With respect to tuning fork 525, this can be defined as fine tuning tuning fork 520.Further, be directly connected at tuning fork 520 under the situation of resonator 505, the susceptibility that obtains from curve 610 can be about 230kHz/50 μ m, and will remain constant (straight line) in described scope, and this example with the described tuning fork of uncoupling shown in the drawings is different.Provide the susceptibility that reduces for tuning fork 520 and 525 uses capacitive couplings, and can promote to use more inaccurate mechanical scratching technology for tuned resonator 505.For example, in this case, it is tuning that described design can utilize craft to delineate, utilize the mechanical scratching device to carry out.Be directly connected among the embodiment of resonator 505 at tuned cell 520, the most sensitive factor H in the tuning range that Fig. 6 provides can be less than 30%.In one embodiment, for example, can utilize Buddha's warrior attendant stone inscription pen to realize the precision of 50 (+/-25) μ m at microscopically.In this case, even the tuning described device of babe in the wood also can be realized tuning single tuning fork 520, and cause on the 1MHz scope in about 50kHz precision with interior tuning to resonator 505.Can be by changing the series capacitor C between resonator 505 and tuned cell 520 and 525
gAdjust susceptibility and tuning range.By reducing described series capacitance C
g315, tuningly become more insensitive, but also need more ground connection shunt capacitance C
s320, to keep the tuning range of same amount, this will cause longer tuning fork.Under any circumstance, should determine various design parameters for tuning range, acceptable susceptibility and the attainable physical size of the needs of described tuning fork.
Fig. 7 is according at least one embodiment, as shown in Figure 5 tuning fork 520 and 525 the tuning range and the figure of frequency shift (FS).In this figure, because extra surface area and shunt capacitance coupling, engineer's scale is greater than the adjustment curve 710 of more rough tuning fork 525.Second tuning fork 525 can provide that about 2.5MHz's is tuning.The tuning capability of the 2.5MHz of tuning fork 525 can be added to the ability of the 1MHz of first tuning fork 520, thereby total tuning range is expanded to 3.5MHz.Yet because it has wideer tuning range, the susceptibility of second tuning fork 525 is not as the susceptibility of first tuning fork 520.In a kind of modification, if the tuning of 2.0MHz is enough for tuning most of resonators 505, we can use the tuning fork of two same sizes and type, and keep described tuning susceptibility.As mentioned above, and following will being described in more detail, can come mark scale 530 and 535 and numeral (below illustrate), make manual delineation be more prone to along described fork.
Fig. 8 is the flow chart according to the illustrative methods of the tuned filter of at least one embodiment.810, it is tuning to provide flat filter to carry out.Can make this flat filter according to processing well-known to those skilled in the art and designing technique and technology described here.Described flat filter can comprise one or more resonators (for example, resonator 505).815, plane tuned cell (for example, tuning fork 520 and/or 525) can be provided, and the coupling or be connected to described filter, thereby can tuning described filter.820, can analyze described filter assembling, and measure various filter characteristic, need be thereby determine whether with the performance of filter of described filter tuner to expectation.Can provide these measurements by network analyser or other measurement mechanism.Can the extraction filter performance parameter.For example can utilize computer that desired performance of filter feature is programmed, perhaps derive this feature.This can comprise and carries out filter response optimization.825, desired pre-really performance of filter feature can be compared with the filter characteristic that measures, thereby determine whether to carry out filter tuner.Carry out filter tuner if desired, then 830, how correctly calculating tuning described flat filter.In this case, can generate the filter tuner scheme.835, can regulate one of a plurality of flat filter elements then by for example delineation, thus at least a portion or the resonator of correct tuning described filter.In case after tuning, can analyze described performance of filter once more, any further tuning whether need to determine in step 820 and 825.Alternatively, can need not to confirm that performance is just with described filter package use.
With reference to figure 9, according at least one embodiment, provide a kind of top view layouts of exemplary filters design, described Design of Filter comprises that each resonator has the multi-resmator plane filtering apparatus of two tuning fork tuned cells.Example as the exemplary filters design shows 800MHz honeycomb B band filter 900 from top view.This filter topologies for example can be 10 utmost point AMPS-B filters 900.Like this, can connect is provided with ten resonators 901 to 910 (901-910), and with its cross-couplings together.Thereby the size of described filter chip for example can be 34mm * 18mm can for example make two filters on 2 inches the MgO wafer.Can design described design passband and be 834.8MHz to 849.7MHz, it has the return loss of 22dB.Certainly, can be different expectation passbands and return loss designing filter 900, perhaps it is designed to the filter of typical any other type in band gap filter or this area.In this example, filter 900 can comprise three family of four cross-couplings, 915,916 and 917, and this will refuse side at each and produce three transmission null values.Can design these values, make at three recoils of 70dB place generation peak levels (bounceback peak level).Can realize cross-couplings 915,916 and 917 in resonator array one side (for example, described top view) by extra transmission line, perhaps it capacitively is coupled to resonator 901-910 via coupling element 510.Can hang tuning fork 921A at the opposite side of resonator array 901-910 to 930B.Although in this example, two tuning forks are coupled to each resonator, it will be understood by those skilled in the art that also and can be coupled to each resonator with a tuning fork or more than two tuning forks.In this example, two tuning forks (for example, 921A and 921B) that will have different tuning ranges are coupled to separately resonator in each resonator bottom.About resonator 505 as mentioned above, can numeral and scale be set, so that manual delineation is easier on the tuning fork next door.Can use the feasible position that can more easily discern concrete resonator of digital 1-9 and X (that is, 10) at the delineation stand-by period.Further, the scale along tuning fork 921A-930B side makes and can more easily cut tuning fork in position.
Cross-couplings part 915-917 and tuning fork 921A-930B and main coupling stream can be separated physically, wherein, by core along realizing described main coupling stream from importing 911 directions to output 912.In addition, the main coupling between adjacent resonators (for example, 901 to 902 or 902 to 903 etc.) mainly is inductive, by contrast, all is capacitive via the coupling of cross-couplings 915-917 and to the coupling of tuning fork 921A-930B.Design described filter, with will be in the minimum interference between three kinds of different types of couplings (main coupling, cross-couplings and tuning fork coupling).As above reference resonator 505 is described, and the tuning fork 921A-930B that " A " can be indicated is used for tuned resonator 901-910 subtly, and the tuning fork 921B-930B that " B " can be indicated is used for tuned resonator 901-910 roughly.Below will describe tuning processing in detail to filter 900.
In a kind of modification, can followingly carry out tuning processing to filter 900.Utilize network analyser (for example, 235) to measure filter 900, and can image data, and it is kept in the memory (for example, 215) of computer (for example, 205).Can utilize the described data of computer program analysis via controller/processor then.Can followingly carry out described computer program.At first, can know the electrical structure of described filter, such as the numeral of resonator 901-910 and cross coupling structure 915-917, but do not know numeral such as the factor of the resonance frequency of resonator 901-910 and the coupling between the major part of resonator 901-910.In case you know the frequency of resonator 901-910 and the numeral of the coupling between the major part of resonator 901-910, you just can determine on the filter 900 what is that right what is wrong, thereby can place under repair.Then, computer program can extract those numerals for you from measurement data.For example, for B band filter 900 with 10 resonator 901-910 and three cross coupling structure 915-917.In this example, from mathematics, can use 10 to take advantage of 10 matrixes and several extra parameter to represent filter 900 and environment thereof.These parameters can be represented the feature of filter, such as resonance frequency (diagonal element 1105) and coupling (main coupling 1110, the cross-couplings 1120 of expectation, and the parasitic couplings of not expecting 1115).Extra parameters R 1 and R10 have described the filter termination, with and environment.By changing these parameters, the indicatrix that computer program can attempt calculating is fitted to the measurement features curve.If the match success, the described parameter of being determined by computer program is to have measured the parameter of filter 900.In case extracted the feature of filter by this iterative processing, next step is exactly tuning.In an example, can suppose that coupling value is a constant, and can come tuned frequency by utilizing tuned cell such as tuning fork 921A-930B.After described parameter extraction is handled, can generate matrix shown in Figure 11, it comprises all information of relevant described filter.Then, in order to optimize filter response, not to change (tuning) all parameters, you only need to change resonant frequency, that is, and the diagonal element of matrix.Have benefited from photoetching technique accurately, all off-diagonal elements are reasonably stable in the mill from the beginning to the end, and therefore, this is possible.Before finishing final Design of Filter, determined described off-diagonal element (coupling value) by several redesign iteration, therefore, from a filter to another filter and different processing and making batch, described coupling is designed well usually and is reasonably stable.Yet resonant frequency shows more the variation in the mill usually, and need be corrected (tuning).Identical by the coupling value that changes described frequency and keep described coupling to extract, can and/or insert loss by the described return loss of optimization for program.Can use then extracted and through the difference between the frequency values of optimizing for to come tuned filter 900 by for example delineating or repair one or more tuned cells, the generation scheme.Can be by for example carrying out laser reconditioning or delineating by hand and realize described filter tuner based on described scheme.
Temporarily jump to Figure 20-22 now in advance, will describe such technology, it has considered to comprise the exemplary imperfect filters to test environment of " dirty window " in described tuning process.Figure 20 shows the physical layout of exemplary imperfect filters to test environment.In this example, at test shell or encapsulate and lay filter chip 2005 in 2010.Under the situation of HTS device, before the measurement of carrying out performance of filter, shell 2010 will allow the temperature of filter chip 2005 to be cooled to working temperature, for example, and 77K.Also filter chip 2005 shells 2010 can be used as real filter apparatus.Filter chip 2005 comprises tested filter 2015.The two ends of filter chip 2005 have 50 ohm transmission line 2030 usually, and its input and output with filter 2015 extend to the edge of filter chip 2005.Can depend on the design of filter 2015 and the electrical length that its layout changes transmission line 2030.Described filter housing or encapsulate 2010 and can also comprise extra transmission line chip 2030.RF connector 2040 is linked described filter housing or is encapsulated 2010 side.RF connector 2040 can be connected with filter chip 2005 and/or transmission line chip 2030 with 2035 by welding band or line 2025.Those R welding 2025 and 2035 will be the transition (transition) (or discontinuous) that is far from desired ideal 50 ohm characteristic impedance usually.Usually under real world conditions, with the circuit that do not match of these types, measure, analyze and arrange filter 2015.Under these circumstances, because these " dirty windows ", that is, and the existence of described nonideal filter package and JA(junction ambient), the matrix among Figure 11 can not closely be represented described truth well.In order in filter tuner is analyzed, to consider this nonideal encapsulation and JA(junction ambient), can in analysis, introduce more multi-parameter.
As a kind of exemplary approach of the described dirty window feature of expression, can be as illustrated among Figure 21, as the equivalent electric circuit of simplifying.In this case, on filter chip 2105, transmission line function (transmission linefunction) 2120A in filter 2115 left sides is equipped with for filter chip 2105, and it is connected with filter 2115, and the transmission line function 2120B that arrives filter 2115 right sides, and it is connected with filter 2115.Further, utilize identical about towards convention, will weld function 2125A and be connected to transmission line function 2120A left, be connected to transmission line function 2120B to the right and will weld function 2125B.Next, transmission line function 2130A is coupled to welding function 2125A left, and transmission line function 2130B is coupled to welding function 2125B to the right.Then, welding function 2135A can be coupled to transmission line function 2130A left, and will weld function 2135B and be coupled to transmission line function 2130B to the right.At last, connector function 2140A is coupled to welding function 2135A left, and connector function 2140b is coupled to welding function 2135B to the right.Each of these functions can be introduced tuning process, as for example, constant, variable or linear or complicated function.This extra factor considers to help to improve the accuracy of filter tuner.
Figure 22 is that the another kind of exemplary reduced circuit of Figure 21 is represented.By introducing Z
Eff1, θ
1(DW2205) and Z
Eff2And θ
2(DW 2215) are as additional parameter, together with coupling matrix element and input and output coupling (1100), described analyzing and processing can reflect real filter apparatus better more accurately, and for filter apparatus 2210 provides better tuning, comprises their imperfect encapsulation and JA(junction ambient).By returning example shown in Figure 9, referring now to tuned filter 900 described filter tuner is discussed more specifically and is handled, as providing by experiment.
At first, utilize the YBCO thin slice of on 2 inches MgO wafers for example, placing and being shaped to make the HTS microwave filter, as filter 900.Then, filter 900 is placed in the typical working temperature, for example, 77K.The exemplary operation scope of HTS microwave filter for example is the scope of about 60-100K.
With reference now to Figure 10,, at the initial measurement generation signal 1005 of 77K filter operating 900.Return loss S11 during initial measurement is about 17dB, and the initial filter centre frequency that measures is about 450kHz, is lower than the frequency 842.37MHz of its target's center.Therefore, can see that generally speaking, the frequency of the resonator 901-910 of the device that the tuning test that need make progress obtains realizing desired passband, and is improved return loss.
Such as before proposition, described tuning process can be made up of three key steps.The first step is the described filter of diagnosis, and this can comprise parameter extraction.In this example, by parameter extraction technical Analysis measurement data.The article of S.Amari " Synthesis of cross-coupled resonator filters usingan analytical gradient-based optimization technique ", IEEE Trans.Microwave Theory ﹠amp; Tech., vol.48, no.9, pp1559-1564, September 2000 and P.Harscher, the article of R.Vahldieck and S.Amari " Automated filter tuningusing generalized low-pass prototype networks and gradient-basedparameter extraction ", IEEE Trans.Microwave Theory ﹠amp; Tech., vol.49, no.12, pp2532-2538, December, 2001, in some exemplary parameter extractive techniques have been shown, by reference with it in conjunction with therewith.Various curve fit as known in the art and optimisation technique can be applicable to our invention usually.For example, MathWork company provides a large amount of such subprograms in their MATLAB optimization tool case.Needed certain optimisation subprogram will depend primarily on specific Design of Filter.Information thus, computer program can generate coupling matrix.
The coupling matrix 1100 that is extracted has been shown among Figure 11.The frequency shift (FS) of solid box (1105) expression resonator, frame of broken lines (1115) are illustrated in the main coupling between the contiguous resonator, and dotted line and the desired cross-couplings of dot-dash wire frame (1120) expression.Those are the parameters of having a mind to design.Point line frame (1110) is illustrated in the parasitic couplings between the next contiguous resonator of not expecting to exist (but still existing).Shown in extraction in considered described next contiguous resonator parasitic couplings (1110).In this embodiment, because the concrete Design of Filter of being chosen can be ignored further parasitic couplings.Yet, it is noted that the contribution of these couplings depends primarily on each concrete Design of Filter, and sometimes need it is taken into account.For example, the arrangement of resonator topology, resonator and cross-couplings realize influencing the parasitic couplings value.Further parasitic couplings can be comprised into described coupling matrix, as the nonzero element of the certain situation that depends on design.The parasitic couplings matrix element of those non-expectations mainly will influence desired cross coupling structure.Even their value is much smaller than main coupling value or cross-couplings numerical value, because they have produced the shortcut that is unsuitable for desired topology, these couplings may influence filter response.It is worthy of note, the existence of parasitic couplings may make the parameter extraction process complicated more, especially when the Q factor of coupled structure complexity of described Design of Filter (for example, a plurality of cross-couplings designs) and resonator is very high, such as the filter that utilizes superconductor to make.Reason is that the existence of parasitic couplings can increase the number of parameters optimization, and produces a lot of local minimal solutions for described optimization.Also it is noted that in nonideal microwave packaging and other discontinuity (discontinuity) to have encapsulated a lot of filters, this will influence the performance of filter of seeing by described encapsulation.For example, microwave filter encapsulation can comprise one or more in the following element that can influence performance of filter: little band discontinuity, transmission line, microwave cable, closing line, arrive strip line, hyperconductive cable, multiplexer, switch, limiter, low noise amplifier, matching network, directional coupler, splitter, the microwave connector of microstrip transition.
Second step of described tuning processing is a filter response optimization, and it comprises the adjustment of return loss S11.In this case, in computer, optimize return loss S11, simultaneously, keep described coupling identical with the value that during diagnosis algorithm, obtains for filter 900 by adjusting resonance frequency.Because slight change may take place with respect to the ideal design coupling value in the true coupling value of filter 900, and there is parasitic couplings, in order to compensate the couple variations that these are not expected, and realize balanced return loss S, need make of the design off resonance of described resonance frequency consciously with respect to them.In fact, filter tuner device technical staff knows these, and can make the filter off resonance consciously to a certain extent, although they may not know how many concrete amounts is.
With reference now to Figure 12,, illustrated and be resulting Figure 120 0 that has extracted frequency and optimized frequency of each resonator 901-910 of filter shown in Figure 9.Below provide some example frequency differences.The 1201A of extraction frequency that determines resonator 901 is just less than 840MHz, and the optimization frequency of definite resonator 901 1201B is about 842.25MHz.The 1205A of extraction frequency that determines resonator 905 is about 841.2MHz, and the optimization frequency of definite resonator 905 1205B is about 842.2MHz.The 1210A of extraction frequency that determines resonator 910 is about 841.2MHz, and the optimization frequency of definite resonator 910 1210B is about 842.2MHz.Frequency of having extracted in the first step and the difference between the frequency of having optimized in second step can be converted into and be used for carrying out the tuning scheme of physics at third step.
Figure 13 be filter 900 shown in Figure 9 initial measurement return loss 1305 and through the figure of the return loss 1310 optimized.In this case, computer can generate from the analysis of carrying out before through the return loss signal of optimizing 1310, and wherein, described analysis comprises the frequency through optimizing to each resonator 901-910 exploitation.Described accurately approximate through the return loss signal of optimizing 1310, to produce the return loss of expectation at the target's center frequency place of filter 900 passbands.
Figure 14 is a form, and it has illustrated the tuned resonator 1-10 (901-910) that is used for filter 900 shown in Figure 9 to produce the scheme 1400 of target filter response.One row's resonator number 1405 and the corresponding frequency increment 1410 of a row are provided.For example, by to resonator 9 (909) with the less increment of the about 673kHz of resonance frequency shift and to the big increment of the about 2322kHz of resonator 1 (901) skew, will expect that filter 900 realizes the return loss of 20dB on target's center's frequency.From Figure 12 and 14 as can be seen, the difference between the frequency that extracted and that optimized is relevant with the needed frequency offset of each resonator 901-910.Can generate this information by computer, and, offer the tunable technology personnel as scheme for the purpose of tuned filter 900.For example, can or on paper, print tuning scheme 1400 in demonstration on the screen.
Then, come tuned filter 900 based on scheme 1400 by utilizing diamond pen to carry out the craft delineation at microscopically.Although, also can use other method as mentioned above such as laser grooving and scribing, and can the described laser grooving and scribing of automation.The part of described tuning fork when Figure 15 shows and utilizes diamond pen to delineate according to tuning scheme 1400.As described, by the delineation tuning fork 927A of point 1505 places between the 8th and the 9th scale striped (scale hash mark) and by come the tuning fork of tuned resonator 7 (907) at the 5th scale striped place delineation tuning fork 927B.According to described scheme, the 7th resonator R7 needs the 742kHz skew tuning to carry out.Tuning fork 927A is designed to provide by a scale increment skew of 100kHz, and 927B is designed to provide by a scale increment skew of 500kHz.In order to realize needed 742kHz skew, for 500kHz is 1510 with the scale scored part way of tuning fork 927B, and for another 250kHz be 1505 with the delineation of the position between second scale and the 3rd scale.Because in order to satisfy its specification, this filter requires to have the resolution of 100kHz when tuning each resonator, so the design of tuning fork 927A makes and can delineate between scale, and for tuning+/-50kHz provides enough good accuracy.Further, by at the delineation tuning fork 928A of point 1515 places of the 7th scale striped and by come the tuning fork of tuned resonator 8 (908) at the 5th scale striped place delineation tuning fork 928B.As the situation of the 7th resonator, the scale part 1520 of the tuning fork 928B that is associated with the 8th resonator for 500kHz delineation, and three scale parts 1515 of delineating tuning fork 928A for another 300kHz.
Figure 16 shows after having delineated filter 900 according to tuning scheme 1400, tuned response 1610 and 1605 predictions through optimizing.Once more described filter is placed working temperature, for example, 77K, and measure described performance of filter.In this case, thus Figure 16 show tuning 1610 with through the very consistent performance of filter of optimizing that obtains expecting of return loss S 1605 after, band pass filter 900 actual return loss S performances.This also can as can be seen from Figure 17 come, and it shows tuning performance of filter signal 1705 afterwards.
Figure 18 and 19 shows an alternative embodiment of the invention.In this embodiment, tuned cell can comprise finishing in a plurality of.Figure 18 is the top view layouts with multi-resmator plane filtering apparatus 1800 of trim piece tuned cell.In this example, series connection is provided with ten resonators 1801 to 1810 (1801-1810) in substrate, and this is similar with embodiment before.Yet in this embodiment, described tuned cell can be one or more trim piece, for example, and 1820-1826 and 1840-1846.Can repair these trim piece by cutting off described according to tuning scheme to generate with the similar mode of embodiment before from resonator.For the ease of understanding, Figure 19 provides the enlarged view 1900 of the trim piece 1840-1846 shown in the dashed region 1900 of Figure 18.
For example, as the output of the Computer Analysis after the optimization process, can calculate the needed frequency shift (FS) of each resonator 1801-1810.Depend on will by tuning filter in advance the investigation susceptibility, for example, the needed frequency shift (FS) of digitlization.Because in order to satisfy specified operating characteristic, this example filter may need for example 100kHz precision, can be with the step-length digitization frequencies skew of 100kHz.For example, can design trim piece 1840-1846 as smallest offset with the binary system increment of 100kHz frequency.Be similar to described tuning fork design, the correct tuner that will be trimmed can be easily discerned in this design.Example provides filter 1800 for this reason, wherein has seven trim piece on each resonator 1801-1810, and it can be with resonance frequency shift, for example, and 1500kHz, 800kHz, 400kHz, 200kHz and 100kHz.Three sheets are arranged, and it can be offset 100kHz.Therefore, be denoted as R4-8, indicate it to be associated, and when finishing, cause resonator 4 is had the frequency shift (FS) of 800kHz with resonator 4 (1804) with trim piece 1840.Trim piece 1841 is denoted as R4-15, indicates it to be associated with resonator 4 (1804), and causes resonator 4 is had the frequency shift (FS) of 1500kHz when finishing.Trim piece 1842 is denoted as R4-4, indicates it to be associated with resonator 4 (1804), and causes resonator 4 is had the frequency shift (FS) of 400kHz when finishing.Trim piece 1843 is denoted as R4-2, indicates it to be associated with resonator 4 (1804), and, when finishing, cause resonator 4 is had the frequency shift (FS) of 200kHz.Trim piece 1844 is denoted as R4-1, indicates it to be associated with resonator 4 (1804), and causes resonator 4 is had the frequency shift (FS) of 100kHz when finishing.Trim piece 1845 is denoted as R4-1, indicates it to be associated with resonator 4 (1804), and causes resonator 4 is had the frequency shift (FS) of 100kHz when finishing.Trim piece 1846 is denoted as R4-1, indicates it to be associated with resonator 4 (1804), and causes resonator 4 is had the frequency shift (FS) of 100kHz when finishing.Therefore, utilize this example,, need the 670kHz frequency shift (FS), so, can repair, disconnect or remove 400kHz sheet, 200kHz sheet and 100kHz sheet by laser reconditioning such as the resonator of R4 1804 if according to tuning scheme.The processing of determining the tuning scheme of this embodiment can be same or similar with the one or more processing among the tuning fork embodiment that describes before.
To be rounded to described discrete patch value through the skew of optimizing simply, will cause the skew of non-expectation (although very little) of centre frequency and the relevant deterioration of filter response.A kind of mode that overcomes this problem is further to optimize described discrete patch value.A kind of method of doing like this is to allow target frequency is changed into half of positive smallest pieces step-length from half of negative smallest pieces step-length, that is, and and for the smallest pieces step-length of 100kHz, from-50 to+50kHz.Like this, a limited discrete tuning state family will be arranged, wherein each state all is one group of sheet that will be trimmed.Then, by checking a plurality of features of tuning state, from this group tuning state, select one group of sheet repairing.At first, can attempt being minimized in the average residual that disperses tuning state and pass through between the frequency shift (FS) of optimizing and be offset, it will contribute to final frequency shift (FS).The second, can also attempt minimizing the quadratic sum of these surplus values, to determine best to present discrete tuning state through the frequency shift (FS) of optimizing.The 3rd, people can check performance of filter (for example, return loss S11) for discrete tuning state family, and select to produce the tuning state that approaches desired performance most.The 4th, people can check the stability of given tuning state by the band width of checking the frequency shift (FS) of describing process optimization thereon, because this will tend to provide more separating of robust.
Though below described embodiments of the invention, obviously, to those skilled in the art, much substitute, modification and modification all be clearly.For example, for the tuned cell of tuning fork or trim piece type, except laser or diamond pen delineation, it is also conceivable that other material removes method, the standard that includes but not limited to wet or dried photoetching technique, perhaps focused ion beam (FIB).In another kind of modification of the present invention, described tuned cell can be the electronic variable capacitor, such as semiconductor variable capacitance diode, switched capacitor bank or MEMS capacitor.In the present invention, can be used in combination United States Patent (USP) 6,898,450 " High Temperature Superconducting TunableFilter ", United States Patent (USP) 6,727,702 " Tunable Superconducting Resonator andMethods of Tuning Thereof " and U.S. Patent applications 10/162, any resonator tuning methods of describing among 531 " the VaractorTuning for a Narrow Band Filter " is incorporated into this with these references.So as previously mentioned, embodiments of the invention are illustrative with being intended to, it should be interpreted as to limit the scope of the present invention.Need not to break away from the spirit and scope of the present invention and can obtain various changes.So, should not determine scope of the present invention by the above embodiment that illustrates, determine and should and be equal to by appended claim.
Claims (20)
1. method may further comprise the steps:
Filter is provided, and it comprises at least one resonator and at least one tuned cell;
Measure the response of described filter, thereby generate one group of measurement data;
Analyze described group of measurement data, to extract one or more filter parameters;
Optimize the subclass of filter parameter, to realize desired filter response; And
Tuning described tuned cell, thereby corresponding to the subclass of described filter parameter.
2. method according to claim 1, wherein, described filter is the plane.
3. method according to claim 1, wherein, described filter comprises the resonator that at least one is made by superconductor.
4. method according to claim 3, wherein, described superconductor is high-temperature superconductor (HTS).
5. method according to claim 3 wherein, is carried out described filter response and is measured under the standard operation temperature of described filter.
6. method according to claim 1, wherein, described group of measurement data is made up of more than a measured value the filter response of given filter, and, described filter has been carried out known modification.
7. method according to claim 6, wherein, described known modification is a resonance frequency of adjusting at least one resonator.
8. method according to claim 1, wherein, described filter has more than four resonators, and is included in the cross-couplings element between the non-conterminous resonator.
9. method according to claim 1 wherein, realizes described tuned cell by removing material, so that electric capacity in the described filter circuit or inductance are carried out the modification of known quantity.
10. method according to claim 9 wherein, realizes that by laser, diamond delineation, focused ion beam or photoetching described material removes.
11. method according to claim 9, wherein, described tuned cell comprises one or more, and it can be removed, to reduce the shunt capacitance in the described circuit.
12. method according to claim 9, wherein, described tuned cell is made up of a screening, and described size and position can be set, thereby the binary array of the variable-sized shunt capacitance element with definition tuning range and minimum tuning resolution is provided.
13. method according to claim 9, wherein, described tuned cell comprises one or more tuning forks that capacitively are coupled to described filter.
14. method according to claim 1, wherein, described tuned cell is the electronic variable capacitor such as semiconductor variable capacitance diode, switched capacitor bank or MEMS capacitor.
15. method according to claim 1 wherein, is further optimized through optimum parameters described, utilizes the attainable I of described tuned cell to realize parameter change with solution.
16. a filter tuner device comprises:
The filter of off resonance, it comprises at least one resonator and at least one tuned cell;
The filter response measuring unit;
Regulate the unit of described tuned cell, thereby in the corresponding electric capacity of described filter or inductance, realize known change; And
Such unit, it indicates the unit of described adjusting tuned cell, thereby realizes desired performance of filter.
17. filter tuner device according to claim 16 further comprises: cryostat, when its being operated property when being coupled to described filter response measuring unit, arrange described filter therein.
18. filter tuner device according to claim 16 further comprises: imperfect filter package and other discontinuity, this can influence the described performance of filter of seeing from described imperfect encapsulation and other discontinuity.
19. a filter regulating system comprises:
Electronic filter; And
The plane tuned cell, it is coupled to described filter, and wherein, described plane tuned cell is in size or can be changed in shape, thereby regulates the desired character of described electronic filter.
20. system according to claim 19, wherein, described plane tuned cell is the vestige of suprabasil electric conducting material, and has desired shape and length, is used in correctly tuning described filter in the desired scope.
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| US6720186B1 (en) * | 1998-04-03 | 2004-04-13 | Symyx Technologies, Inc. | Method of research for creating and testing novel catalysts, reactions and polymers |
| US6347237B1 (en) * | 1999-03-16 | 2002-02-12 | Superconductor Technologies, Inc. | High temperature superconductor tunable filter |
| US6791430B2 (en) * | 2001-12-31 | 2004-09-14 | Conductus, Inc. | Resonator tuning assembly and method |
-
2005
- 2005-11-30 CN CNA2005800474670A patent/CN101112007A/en active Pending
-
2007
- 2007-06-28 GB GB0712572A patent/GB2435990B/en not_active Expired - Fee Related
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| CN103546112A (en) * | 2007-06-27 | 2014-01-29 | 超导技术公司 | Low-loss tunable radio frequency filter |
| CN103546112B (en) * | 2007-06-27 | 2016-05-18 | 谐振公司 | Low-loss tunable radio frequency filter |
| CN101706362B (en) * | 2009-11-26 | 2012-06-20 | 北京航空航天大学 | Parameter calibration method of acousto-optic tunable filter |
| CN101718621B (en) * | 2009-11-26 | 2011-12-14 | 北京航空航天大学 | Parameter calibration system of acousto-optic tunable filter |
| CN107563032A (en) * | 2013-03-15 | 2018-01-09 | 谐振公司 | Computerization wave filter design system |
| CN104852117A (en) * | 2015-05-27 | 2015-08-19 | 华为技术有限公司 | Filter tuning method, device and system |
| CN104852117B (en) * | 2015-05-27 | 2017-11-24 | 华为技术有限公司 | Filter tuning methods, apparatus and system |
| CN106979804A (en) * | 2015-09-21 | 2017-07-25 | Abb有限公司 | Reduce the method and apparatus of interference |
| CN108140717A (en) * | 2015-10-02 | 2018-06-08 | 国际商业机器公司 | Chamber filters quantum bit |
| CN108140717B (en) * | 2015-10-02 | 2021-06-29 | 国际商业机器公司 | Cavity filter qubit |
| CN107306120A (en) * | 2016-04-25 | 2017-10-31 | 英飞凌科技股份有限公司 | Tunable resonator element, filter circuit and method |
| CN107306120B (en) * | 2016-04-25 | 2020-10-16 | 英飞凌科技股份有限公司 | Tunable resonator element, filter circuit and method |
| CN107688692A (en) * | 2016-08-03 | 2018-02-13 | 诺基亚通信公司 | Filter assembly tuning methods |
Also Published As
| Publication number | Publication date |
|---|---|
| GB2435990B (en) | 2009-02-18 |
| GB0712572D0 (en) | 2007-08-08 |
| GB2435990A (en) | 2007-09-12 |
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