CN101104272A - Two-degree-of-freedom plane parallel robot mechanism - Google Patents
Two-degree-of-freedom plane parallel robot mechanism Download PDFInfo
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Abstract
Disclosed is a mechanism of two-degree-of-freedom planar parallel connected robots, belonging to the field of industrial robots. The invention comprises a fixed platform, a movable platform, three connecting rod mechanisms and six rotary hinges, wherein the fixed platform is connected with the movable platform though the three connecting rod mechanisms to form a closed-loop parallel connected mechanism. Two linear motors are parallel arranged on the fixed platform. One end of the movable platform is connected with one linear motor through one connecting rod mechanism and two rotary hinges and the other end of the movable platform is connected with the other linear motor through a parallelogram branch chain structure which is parallel to the fixed platform and is formed by two connecting rod mechanisms and four rotary hinges so as to improve the rigidity which is perpendicular to the movable platform as well as to shield the rotary degree of freedom, and then the mechanism of two-degree-of-freedom planar parallel connected robots is formed. The invention has simple structure; driven by the linear motor, the rigidity and the thrust and weight ratio are high and dynamic performance is good; movers of the linear motor mover are supported by the aerostatic slide way and all the connecting hinges are rotary hinges which are designed as the aerostatic rotary joint, so that the drive of non-friction and non- abrasion can be achieved.
Description
Technical field
The present invention relates to a kind of mechanism of industrial robot technical field, be specifically related to a kind of two-degree-of-freedom plane parallel robot mechanism.
Background technology
The robot mechanism of extensive use at present can be divided into two big classes: serial machine robot mechanism and parallel robot mechanism.Parallel robot mechanism is an a kind of closed loop mechanism, last lower platform (fixed platform and motion platform) by two or more independently movement branched chain link to each other, motion platform has two or more frees degree, and with the mechanism that parallel way drives, is called parallel institution.The characteristics of parallel institution are that all branches can both accept the driver input simultaneously, and finally provide output jointly, and parallel institution is multichannel closed loop mechanism on theory of mechanisms.There is the application scenario that needs manipulator in a plane, to finish high speed, high accuracy, high acceleration motion in the large scale integrated circuit manufacturing, as the two degree-of-freedom motion platform of the bonding location that is used to go between, require positioning accuracy less than ± 2.5 μ m, acceleration 10-15G.Traditional motion platform generally adopts the version of X-Y platform, and its X, Y direction of motion quadrature also are superimposed.Because motion platform adopts the version of overlapped in series, the load that has increased subordinate's driver has caused the site error accumulation.
In order to overcome the deficiency that the serial mechanism X-Y platform exists, domestic and international many people propose novel plane parallel robot mechanism.Plane parallel robot mechanism usually by 3 independently kinematic chain and a motion platform constitute, can be divided into RPP, RRP, RRR, RPR, PPR, PRP, seven kinds of possible structures of PRR according to type of drive and hinge form.Compare with traditional serial mechanism, plane parallel mechanism has advantages such as inertia is little, precision is high, rigidity is big, but there is coupled relation in its kinematics, has increased the complexity of kinematics solution, simultaneously, mechanism's working space is less relatively, and has the problem of singularity.When parallel institution was in the singularity position, mechanism can lose or obtain one or more frees degree, and the internal force of hinge increases sharply, and may cause system failure, therefore should avoid the singularity position in system's design and operation as far as possible.
Find through literature search prior art, China Patent No.: CN1589191A, title: two-degree-of-freedom plane parallel robot mechanism, this patent disclosure a kind of linkage that is used for the grasping/releasing robot, comprise two rotatable drive units that are installed on the pedestal and are hinged to by two branches respectively moving platform.Respectively there is a bell crank centre of each branch, two arms of crank are connected respectively to first positioning linkage rod that joins with pedestal and second positioning linkage rod that joins with moving platform, by drive unit in the same way or reverse rotation rotate the two degree-of-freedom motion of realizing moving platform, and keep the attitude of moving platform constant.Yet, in plane parallel mechanism, adopt turning motor to be difficult to eliminate the influence of the return difference, gap, friction etc. of rolling bearing, and limited the raising of end effector acceleration the platform positioning accuracy.
Summary of the invention
The objective of the invention is to overcome deficiency of the prior art, a kind of two-degree-of-freedom plane parallel robot mechanism is provided, drive by adopting linear electric motors, air-float guide rail supports, and realizes high-speed, high acceleration and high-precision two dimensional surface location and handles.
The present invention is achieved by the following technical solutions, the present invention includes: fixed platform, moving platform, three linkages are connected hinge with six, and fixed platform links to each other with moving platform by connecting hinge and three linkages, constitutes the closed loop parallel institution.Having two on the fixed platform is arranged in parallel and can realizes the straight-line driving mechanism of high accuracy, moving platform one end is connected the moving sets that hinge connects straight line driving mechanism by a linkage with two, the other end then is connected the moving sets that hinge connects another straight line driving mechanism by two identical linkages with four, these two linkage physical dimensions are identical, pass through to connect the hinge driven in synchronism by straight line driving mechanism, and these two linkages constitute the parallelogram branched structure that is parallel to fixed platform between moving platform and driving mechanism moving sets, to keep moving platform in motion process, to have only translational motion, and it is parallel with fixed platform all the time, thereby when improving perpendicular to moving platform direction rigidity, the revolution free degree of shielding moving platform constitutes two-degree-of-freedom plane parallel robot mechanism.
Described straight-line driving mechanism, adopt two linear electric motors to realize, two linear motor stator electrics are fixed on the fixed platform abreast, linear motor rotor is as the moving sets of parallel institution, the motion of mechanism quality is little, inertia is little, because directly there is not intermediate gearing in driving, have high driving rigidity and thrust-weight ratio, eliminated the influence that the non-linear factor such as friction, backhaul gap of transmission link brings, higher acceleration and positioning accuracy be can obtain, high-precision location and manipulation helped realizing.
Described linear motor rotor adopts air-float guide rail to support, and air-float guide rail comprises left air-float guide rail and right air-float guide rail, left air-float guide rail and the parallel placement of right air-float guide rail, and the mode that all adopts the four sides to support.
Described air-float guide rail comprises air-float guide rail jig, air-float guide rail bearing, air supporting pad and left and right sides air supporting pad up and down.Air-float guide rail jig two ends are fixed on the fixed platform by base, and air-float guide rail bearing one end connects linear motor rotor by the motor gusset piece, and the other end then connects linkage by connecting hinge.The air-float guide rail bearing adopts hollow structure, about the air-float guide rail bearing, front and back adopt air supporting advance expenditure support on four sides, is supported on the air-float guide rail jig by last air supporting pad, therapeutic method to keep the adverse qi flowing downward camel, left air supporting pad and right air supporting pad.Air-float guide rail adopts the aerostatic bearing of orifice restriction, can move under high and extremely low speed, and operation is level and smooth, precision is high, and low speed does not have creeps, and can improve rigidity, separating vibration effectively.
Described moving platform and linear motor rotor by linkage be connected hinge and be connected, all connect hinges and are turning joint, and the axis of rotation keeping parallelism of all turning joints, and vertical with fixed platform.
Described turning joint all is designed to the air supporting rotary joint, the air supporting rotary joint comprises air supporting joint bearing, last thrust air supporting pad, following thrust air supporting pad, shangguan nodal axisn, ShiShimonoseki nodal axisn, intrinsic articulation axle and extrinsic articulation axle, shangguan nodal axisn, ShiShimonoseki nodal axisn wherein radially by air supporting articular branches seat supports, axially by last thrust air supporting pad and following thrust air supporting advance expenditure support, the intrinsic articulation axle connects shangguan nodal axisn, ShiShimonoseki nodal axisn and extrinsic articulation axle, and the extrinsic articulation axle connects linkage.
Synchronously driven two linkages of described two-degree-of-freedom plane parallel robot mechanism linear electric motors adopt identical physical dimension, two linkages constitute the parallelogram branched structure that is parallel to fixed platform between moving platform and turning joint that the air-float guide rail bearing links to each other, because the parallelogram branched structure can keep end effector attitude in motion process constant, so direction is constant in the moving platform motion process, can only translation in being parallel to the plane of fixed platform, thereby when improving perpendicular to moving platform direction rigidity, a revolution free degree of shielding moving platform, realization is parallel to the two-degrees-of-freedom plane motion of fixed platform.
Described linkage all adopts the high aluminum matrix composite of elastic modelling quantity, under the condition that guarantees mechanism's rigidity, reduces the quality of connecting rod, and all linkages employing hollow structure, to reduce moving-mass, improves the acceleration of mechanism.
Among the present invention, two turning joints that the moving platform two ends can also respectively adopt two linkages to link to each other with linear motor rotor respectively are connected, moving platform is connected with fixed platform by two parallelogram branched structures that are parallel to fixed platform that four linkages constitute, constitute the two-degree-of-freedom plane parallel robot mechanism of redundant drive, adopt redundant drive to help the dynamic equilibrium of mechanism, improve mechanism rigidity, improve the dynamic performance of mechanism.
Compared with prior art, the present invention is simple in structure, and employing linear electric motors driving rigidity is big, thrust-weight ratio is high, dynamic property good, and linear motor rotor adopts air-float guide rail to support, connect hinge and all be turning joint and be designed to the air supporting rotary joint, real realization does not have friction, does not have the wearing and tearing driving.The present invention can be used for large scale integrated circuit manufacturing equipment, realizes the location and the manipulation of high-speed (0.8-1m/s), high acceleration (10-15G), high accuracy (positioning accuracy ± 2.5 μ m, repetitive positioning accuracy ± 2.5 μ m).
Description of drawings
Fig. 1 is the structural representation of the embodiment of the invention 1;
Fig. 2 is the structure vertical view of the embodiment of the invention 1;
Fig. 3 is left air-float guide rail bearing of the present invention and air supporting rotary joint structure chart;
Fig. 4 is the sectional structure chart of air-float guide rail bearing of the present invention and air supporting rotary joint;
Fig. 5 is right air-float guide rail bearing of the present invention and air supporting rotary joint structure chart;
Fig. 6 is the sectional structure chart of moving platform of the present invention and air supporting rotary joint;
Fig. 7 is a linkage sectional structure chart of the present invention;
Fig. 8 is the structural representation of the embodiment of the invention 2;
Fig. 9 is the structure vertical view of the embodiment of the invention 2.
Among the figure: fixed platform 1, first linear electric motors 2, left side motor gusset piece 3, left side air-float guide rail bearing 4, first turning joint 5, second turning joint 6, left side air-float guide rail jig 7, right air-float guide rail jig 8, second linear electric motors 9, right motor gusset piece 10, right air-float guide rail bearing 11, the 3rd turning joint 12, first connecting rod mechanism 13, second connecting rod mechanism 14, the 4th turning joint 15, the 5th turning joint 16, moving platform 17, the 6th turning joint 18, third connecting rod mechanism 19, therapeutic method to keep the adverse qi flowing downward camel 20, right air supporting pad 21, following thrust air supporting pad 22, extrinsic articulation axle 23, air supporting joint bearing 24, last thrust air supporting pad 25, first linear motor rotor 26, ShiShimonoseki nodal axisn 27, intrinsic articulation axle 28, shangguan nodal axisn 29, last air supporting pad 30, left side air supporting pad 31, second linear motor rotor 32, linkage connector 33, connecting rod 34, the 7th turning joint 35, quadric chain 36, the 8th turning joint 37, symmetry moving platform 38.
The specific embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment is being to implement under the prerequisite with the technical solution of the present invention, provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As Fig. 1, shown in 2, present embodiment comprises: fixed platform 1, moving platform 17, three linkages that connect fixed platform 1 and moving platform 17: first connecting rod mechanism 13, second connecting rod mechanism 14, third connecting rod mechanism 19 and six turning joints, install two on the fixed platform 1 and can realize the straight-line linear electric motors of high accuracy: first linear electric motors 2 and second linear electric motors 9, first linear electric motors 2 and second linear electric motors, 9 symmetrical parallel are placed, moving platform 17 1 ends pass through a movement branched chain: the 5th turning joint 16, first connecting rod mechanism 13, the 3rd turning joint 12 connects second linear electric motors 9, the other end is then respectively by two movement branched chain: the 4th turning joint 15, movement branched chain and the 6th turning joint 18 that the second connecting rod mechanism 14 and second turning joint 6 constitute, third connecting rod mechanism 19 is connected first linear electric motors 2 with the movement branched chain that first turning joint 5 constitutes, second connecting rod mechanism 14 is identical with third connecting rod mechanism 19 physical dimensions, by first linear electric motors, 2 driven in synchronism, second connecting rod mechanism 14, third connecting rod mechanism 19 is at second turning joint 6, the 4th turning joint 15 of first turning joint 5 and moving platform 17, constitute the parallelogram branched structure that is parallel to fixed platform 1 between the 6th turning joint 18, to keep having only translational motion in moving platform 17 motion processes, and it is parallel with fixed platform 1 all the time, when improving perpendicular to moving platform 17 direction rigidity, the revolution free degree of shielding moving platform 17 constitutes two-degree-of-freedom plane parallel robot mechanism.
Shown in Fig. 3,4,5, first linear motor rotor 26 and second linear motor rotor 32 all adopt air-float guide rail to support, air-float guide rail comprises left air-float guide rail and two parts of right air-float guide rail, left side air-float guide rail and the parallel placement of right air-float guide rail, the mode that air-float guide rail adopts the four sides to support, to improve support stiffness to greatest extent, improve the dynamics of mechanism.
Left side air-float guide rail comprises left air-float guide rail jig 7, left air-float guide rail bearing 4, goes up air supporting pad 30, therapeutic method to keep the adverse qi flowing downward camel 20, left air supporting pad 31 and right air supporting pad 21.Air-float guide rail jig 7 two ends, a left side are fixed on the fixed platform 1 by base.Left side air-float guide rail bearing 4 adopts hollow structure, and is supported on the left air-float guide rail jig 7 by last air supporting pad 30, therapeutic method to keep the adverse qi flowing downward camel 20, left air supporting pad 31 and right air supporting pad 21.The top and bottom of left side air-float guide rail bearing 4 are supported by last air supporting pad 30 and therapeutic method to keep the adverse qi flowing downward camel 20 respectively, and face is supported by left air supporting pad 31 and right air supporting pad 21 respectively about left air-float guide rail bearing 4.
Right air-float guide rail comprises right air-float guide rail jig 8 and right air-float guide rail bearing 11, right air-float guide rail jig 8 two ends are fixed on the fixed platform 1 by base, right air-float guide rail bearing 11 also adopts hollow structure, and is supported on the right air-float guide rail jig 8 by last air supporting pad 30, therapeutic method to keep the adverse qi flowing downward camel 20, left air supporting pad 31 and right air supporting pad 21.The top and bottom of right air-float guide rail bearing 11 are supported by last air supporting pad 30 and therapeutic method to keep the adverse qi flowing downward camel 20 respectively, and face is supported by left air supporting pad 31 and right air supporting pad 21 respectively about right air-float guide rail bearing 11.
Linear motor rotor is connected by the motor gusset piece with air-float guide rail, first linear motor rotor 26 connects the right air-float guide rail bearing 11 of left air-float guide rail bearing 4, the second linear motor rotors 32 of left air-float guide rail by the right air-float guide rail of right motor gusset piece 10 connections by left motor gusset piece 3.
Moving platform 17 is connected with turning joint by linkage with left air-float guide rail bearing 4, right air-float guide rail bearing 11, and the axis of rotation of all turning joints is parallel to each other, and vertical with fixed platform 1.
When first linear motor rotor 26 and second linear motor rotor 32 in the same way or during the reverse linear motion, said mechanism makes moving platform 17 realize two dimensional motion in the different range keeping moving platform 17 attitudes constant simultaneously under the driving of first connecting rod mechanism 13, second connecting rod mechanism 14 and third connecting rod mechanism 19.
As Fig. 3,4, shown in 5, all turning joints are designed to the air supporting rotary joint, each air supporting rotary joint comprises air supporting joint bearing 24, last thrust air supporting pad 25, following thrust air supporting pad 22, shangguan nodal axisn 29, ShiShimonoseki nodal axisn 27, intrinsic articulation axle 28, extrinsic articulation axle 23, wherein the shangguan nodal axisn 29, ShiShimonoseki nodal axisn 27 is radially supported by air supporting joint bearing 24, axially by last thrust air supporting pad 25 and thrust air supporting pad 22 supports down, when rotating, the joint do not have the influence in friction and backhaul gap, intrinsic articulation axle 28 connects shangguan nodal axisn 29 ShiShimonoseki nodal axisns 27 and extrinsic articulation axle 23, and extrinsic articulation axle 23 connects linkage.
As shown in Figure 6, linkage is formed by connecting by linkage connector 33 and connecting rod 34, three linkages all adopt the high aluminum matrix composite of elastic modelling quantity, under the condition that guarantees mechanism's rigidity, reduce the quality of connecting rod, and all linkages adopt hollow structure, to reduce moving-mass, improve the acceleration of mechanism.
Shown in Fig. 7,8, on the basis of embodiment 1, can increase a quadric chain 36 and two turning joints under the prerequisite that does not change the mechanism kinematic form: the 7th turning joint 35, the 8th turning joint 37 constitute the two-degree-of-freedom plane parallel robot mechanism of redundant drive, comprising: four linkages of fixed platform 1, symmetrical moving platform 38 (being the moving platform 17 among the embodiment 1) and connection fixed platform 1 and symmetrical moving platform 38: first connecting rod mechanism 13, second connecting rod mechanism 14, third connecting rod mechanism 19 and quadric chain 36 and eight turning joints.Symmetry moving platform 38 1 ends pass through two movement branched chain: the movement branched chain that the 4th turning joint 15, second connecting rod mechanism 14, second turning joint 6 constitute; The movement branched chain that the 6th turning joint 18, third connecting rod mechanism 19, first turning joint 5 constitute connects first linear electric motors 2, and the other end is also by two movement branched chain: the movement branched chain that the 5th turning joint 16, first connecting rod mechanism 13 and the 3rd turning joint 12 constitute; The 8th turning joint 37, quadric chain 36 and the movement branched chain that the 7th turning joint 35 constitutes are connected second linear electric motors 9.Second connecting rod mechanism 14 is identical with third connecting rod mechanism 19 physical dimensions, by first linear electric motors, 2 driven in synchronism, second connecting rod mechanism 14, third connecting rod mechanism 19 is at second turning joint 6, the 4th turning joint 15 of first turning joint 5 and symmetrical moving platform 38, constitute the parallelogram branched structure that is parallel to fixed platform 1 between the 6th turning joint 18, simultaneously, first connecting rod mechanism 13 is identical with quadric chain 36 physical dimensions, by second linear electric motors, 9 driven in synchronism, first connecting rod mechanism 13, quadric chain 36 is at the 3rd turning joint 12, the 5th turning joint 16 of the 7th turning joint 35 and symmetrical moving platform 38, also constitute the parallelogram branched structure that is parallel to fixed platform 1 between the 8th turning joint 37, constitute the two-degree-of-freedom plane parallel robot mechanism of redundant drive.Adopt redundant drive to help the dynamic equilibrium of mechanism, improve mechanism rigidity, improve the dynamic performance of mechanism.
Claims (10)
1. two-degree-of-freedom plane parallel robot mechanism, comprise: fixed platform, three linkages and six turning joints of moving platform and connection fixed platform and moving platform, it is characterized in that, two straight line driving mechanisms that are arranged in parallel are arranged on the fixed platform, moving platform one end is connected the moving sets of straight line driving mechanism with two turning joints by a linkage, the other end then is connected the moving sets of another straight line driving mechanism with four turning joints by two other identical linkage, these two linkage physical dimensions identical and by straight line driving mechanism by the turning joint driven in synchronism, and these two linkages constitute the parallelogram branched structure that is parallel to fixed platform between moving platform and driving mechanism moving sets, to keep moving platform in motion process, to have only translational motion, and it is parallel with fixed platform all the time, when improving perpendicular to moving platform direction rigidity, the revolution free degree of shielding moving platform constitutes two-degree-of-freedom plane parallel robot mechanism.
2. two-degree-of-freedom plane parallel robot mechanism as claimed in claim 1, it is characterized in that, also comprise a quadric chain and two turning joints, the moving platform two ends all connect the moving sets of straight line driving mechanism respectively by two identical linkages and eight turning joints, moving platform is connected with fixed platform by two parallelogram branched structures that are parallel to fixed platform, constitutes the two-degree-of-freedom plane parallel robot mechanism of redundant drive.
3. two-degree-of-freedom plane parallel robot mechanism as claimed in claim 1 is characterized in that, described straight line driving mechanism is linear electric motors, and two linear motor stator electric symmetrical parallel are placed.
4. two-degree-of-freedom plane parallel robot mechanism as claimed in claim 3, it is characterized in that, described linear electric motors, its mover supports by air-float guide rail, air-float guide rail comprises left air-float guide rail and right air-float guide rail, left side air-float guide rail and the parallel placement of right air-float guide rail, and the mode that all adopts the four sides to support.
5. two-degree-of-freedom plane parallel robot mechanism as claimed in claim 4, it is characterized in that, described left air-float guide rail comprises left air-float guide rail jig, left side air-float guide rail bearing, last air supporting pad, therapeutic method to keep the adverse qi flowing downward camel, left side air supporting pad and right air supporting pad, air-float guide rail jig two ends, a left side are fixed on the fixed platform by base, left side air-float guide rail bearing adopts hollow structure, and by last air supporting pad, therapeutic method to keep the adverse qi flowing downward camel, left side air supporting pad and right air supporting pad are supported on the left air-float guide rail jig, the top and bottom of left side air-float guide rail bearing are supported by last air supporting pad and therapeutic method to keep the adverse qi flowing downward camel respectively, about face respectively by left air supporting pad and right air supporting advance expenditure support.
6. two-degree-of-freedom plane parallel robot mechanism as claimed in claim 4, it is characterized in that, described right air-float guide rail comprises right air-float guide rail jig, right air-float guide rail bearing, last air supporting pad, therapeutic method to keep the adverse qi flowing downward camel, left side air supporting pad and right air supporting pad, right air-float guide rail jig two ends are fixed on the fixed platform by base, right air-float guide rail bearing also adopts hollow structure, and by last air supporting pad, therapeutic method to keep the adverse qi flowing downward camel, left side air supporting pad and right air supporting pad are supported on the right air-float guide rail jig, the top and bottom of right air-float guide rail bearing are supported by last air supporting pad and therapeutic method to keep the adverse qi flowing downward camel respectively, about face respectively by left air supporting pad and right air supporting advance expenditure support.
7. two-degree-of-freedom plane parallel robot mechanism as claimed in claim 4, it is characterized in that, described linear motor rotor is connected by the motor gusset piece with air-float guide rail, and two linear electric motors connect the bearing of left air-float guide rail and right air-float guide rail respectively by left motor gusset piece, right motor gusset piece.
8. two-degree-of-freedom plane parallel robot mechanism as claimed in claim 1 or 2 is characterized in that, described connection hinge is turning joint, and the axis of rotation keeping parallelism of all turning joints, and vertical with fixed platform.
9. two-degree-of-freedom plane parallel robot mechanism as claimed in claim 8, it is characterized in that, described turning joint is the air supporting rotary joint, each rotary joint comprises air supporting joint bearing, last thrust air supporting pad, following thrust air supporting pad, shangguan nodal axisn, ShiShimonoseki nodal axisn, intrinsic articulation axle and extrinsic articulation axle, shangguan nodal axisn, ShiShimonoseki nodal axisn wherein radially by air supporting articular branches seat supports, axially by last thrust air supporting pad and following thrust air supporting advance expenditure support, the intrinsic articulation axle connects shangguan nodal axisn, ShiShimonoseki nodal axisn and extrinsic articulation axle, and the extrinsic articulation axle connects linkage.
10. two-degree-of-freedom plane parallel robot mechanism as claimed in claim 1 or 2 is characterized in that described linkage is hollow structure.
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