CN101097274A

CN101097274A - Integrable multiple channels color dispersion compensator

Info

Publication number: CN101097274A
Application number: CNA2006100894461A
Authority: CN
Inventors: 刘育梁; 耿敏明; 程振杰
Original assignee: Institute of Semiconductors of CAS
Current assignee: Institute of Semiconductors of CAS
Priority date: 2006-06-28
Filing date: 2006-06-28
Publication date: 2008-01-02
Anticipated expiration: 2026-06-28
Also published as: CN100451701C

Abstract

The invention is an integrated multiple channel dispersion compensator that characterized in that it includes a underlay; a first nanometer line wave-guide which is produced on the underlay; a second nanometer line wave-guide which is is produced on the underlay; a first raster which is produced on the first nanometer line wave-guide, optical signal is coupled to the first nanometer line wave-guide; a second raster which is produced on the second nanometer line wave-guide, optical signal coupled from the first raster is coupled by the second raster to the second nanometer line wave-guide; thereinto the first nanometer line wave-guide and the second nanometer line wave-guide are parallel on the underlay.

Description

Integrable multiple channels color dispersion compensator

Technical field

The present invention design a kind of adopt nano wire waveguide sampled-grating structure realize can integrated multichannel dispersion compensation technical scheme, that wherein adopts makes that to the grid coupled structure nano wire waveguide sampled-grating can to carry out monolithic integrated with other photonic devices.

Background technology

In the high-capacity optical fiber communication system of transmission capacity greater than 10Gb/s, CHROMATIC DISPERSION IN FIBER OPTICS becomes the principal element of restriction transmission range and transmission capacity.In the long-distance optical fiber communication system, need the signal that distorts owing to chromatic dispersion is carried out dispersion compensation, to guarantee normally carrying out of communication.The dispersion compensator that is usually used in wdm system at present is a fibre-optical grating compensator with dispersion, utilizes sampling optical-fiber grating to carry out dispersion compensation simultaneously to a plurality of channels of wdm system.Raising along with optical network band width, the optical node function is complicated more, in order to realize the intellectuality of optical network node, necessary integrated a large amount of optically functional device, as wave filter, photoswitch, directional coupler etc., wherein also comprise dispersion compensator, but sampling optical-fiber grating belongs to the optical-fiber type device, can't realize that chip-scale is integrated, can not satisfy the requirement of ASON (Automatically Switched Optical Network) the device high integration.

The key one that realizes Integrable multiple channels color dispersion compensator is to select suitable material, not only can realize dispersion compensation device, also can easily be integrated with other devices; The 2nd, how to realize importing, the separation of output signal, grating is the reflection-type device, from same port input, output signal, usually adopt in the sampling optical-fiber grating dispersion compensator that optical circulator will be imported, output signal is separated, because optical circulator is based on the device of magneto-optic effect, it is integrated to carry out chip, influences the integrated level of device.

Summary of the invention

The objective of the invention is to propose a kind of Integrable multiple channels color dispersion compensator, its realization can integrated multichannel dispersion compensation.

A kind of Integrable multiple channels color dispersion compensator of the present invention is characterized in that, comprising:

One substrate;

One first nano wire waveguide, this first nano wire waveguide fabrication is on substrate;

One second nano wire waveguide, this second nano wire waveguide fabrication is on substrate;

One first grating, this first preparing grating are in the first nano wire waveguide, and light signal is coupled out the first nano wire waveguide by first grating;

One second grating, this second preparing grating are in the second nano wire waveguide, and the light signal that is coupled out from first grating is coupled into the second nano wire waveguide by second grating;

Wherein this first nano wire waveguide, the second nano wire waveguide is parallel and be listed on the substrate.

Wherein this first grating is an oblique raster.

Wherein this second grating is an oblique raster.

Wherein this substrate is the substrate of SOI material, and the refringence of this substrate is more than 50%.

Wherein the output terminal in the second nano wire waveguide is manufactured with an optical add-drop multiplexer.

Wherein the sample period P of this first grating, second grating is 500um～750um.

Description of drawings

In order more clearly to introduce above-mentioned purpose of the present invention and advantage, this explanation will be described further in conjunction with the accompanying drawing of a certain embodiments and this embodiment, wherein:

Fig. 1 is the vertical view of the nano wire waveguide sampled-grating structural representation of off working state.

Fig. 2 is a nano wire waveguide sampled-grating work synoptic diagram.

Embodiment

See also Figure 1 and Figure 2, a kind of Integrable multiple channels color dispersion compensator of the present invention comprises:

One substrate 8, this substrate 8 is the substrate of SOI material, the refringence of this substrate is more than 50%;

One first nano wire waveguide 1, this first nano wire waveguide 1 is produced on the substrate 8;

One second nano wire waveguide 2, this second nano wire waveguide 2 is produced on the substrate 8;

One first grating 101, this first grating 101 are produced in the first nano wire waveguide 1, and light signal is coupled out the first nano wire waveguide 1 by first grating 101, and this first grating 101 is an oblique raster;

One second grating 201, this second grating 201 are produced in the second nano wire waveguide 2, and the light signal that is coupled out from first grating 101 is coupled into the second nano wire waveguide 2 by second grating 201, and this second grating 201 is an oblique raster; Wherein the output terminal in the second nano wire waveguide 2 is manufactured with an optical add-drop multiplexer 7

Wherein this first nano wire waveguide 1, the second nano wire waveguide 2 is parallel and be listed on the substrate 8.

Wherein the sample period P of this first grating 101, second grating 201 is 500um～750um.

Introduce the present invention in detail in conjunction with Fig. 1-Fig. 2 more below:

As shown in Figure 1, on substrate 8SOI material, make the first nano wire waveguide 1 and the second nano wire waveguide 2, and in the first nano wire waveguide 1 and the second nano wire waveguide 2, made first grating 101 and second grating 201 respectively.First grating 101 and second grating 201 are by the refractive index of two parallel waveguides is modulated formation, and the method for this modulation can be by etching waveguide side, utilize the modulation duct width to come refraction index modulation; Perhaps come refraction index modulation by mixing impurity.

First grating 101, second grating 201 have the identical sample period, and this sample period is 500um～750um, utilize sampling to realize the effect of a plurality of channels of grating pair; Has identical angle of inclination between the grating axle of first grating 101, second grating 201 and the waveguide axis, this angle of inclination is 45 degree～60 degree, the guided mode that utilizes the angle of inclination will meet Bragg condition and phase-matching condition in first grating 101 changes radiation mode into, changes radiation mode into guided mode in second grating 201; First grating 101, second grating 201 also have identical grating dutycycle, centre wavelength and the parameter of warbling, and this parameter of warbling is 1.5 * 10-4～4 * 10-4, and utilizing warbles carries out dispersion compensation to the channel with certain bandwidth.Consult and be respectively three embodiment shown in table 1, table 2 and the table 3.

Table 1

	Sample period	The angle of inclination	The parameter of warbling
	Sample period	The angle of inclination	The parameter of warbling	First grating	500um	45 degree	1.5×10-4
Second grating	500um	45 degree	1.5×10-4	First grating	500um	45 degree	1.5×10-4

Table 2

	Sample period	The angle of inclination	The parameter of warbling
	Sample period	The angle of inclination	The parameter of warbling	First grating	625um	?52.5	?2.75×10-4
Second grating	625um	?52.5	?2.75×10-4	First grating	625um	?52.5	?2.75×10-4

Table 3

	Sample period	The angle of inclination	The parameter of warbling
	Sample period	The angle of inclination	The parameter of warbling	First grating	750um	60 degree	4×10-4

Second grating

750um

60 degree

4×10-4

First grating 101, second grating 201 is parallel and be listed on the backing material 8, constitutes and tilts to the grid structure, realizes separating of input signal and output signal, thus realize can be integrated the multichannel dispersion compensator.

To the grid coupled structure, it is characterized in that in grating axle and waveguide axis, introducing certain angle, make the light signal that satisfies Bragg's condition of reflection and phase-matching condition in the light signal enter first grating 101 not be reflected, but be coupled out the first nano wire waveguide 1 by first grating 101, transmission through free space or low-index material, be coupled in second grating 201 with first grating, 101 structural symmetry, be coupled into through second grating 201 and continue transmission in the second nano wire waveguide 2.Employing has been avoided the appearance of optical circulator to the grid structure, can be implemented in the integrated of dispersion compensator and other optical devices on the SOI material.

The SOI material is an ideal platform of realizing the high integration photonic device, in this example, adopt semiconductor fabrication process, utilize electron-beam direct writing and dry method or wet etching, nano wire waveguide oblique raster dispersion compensator and optical device 7 optical add-drop multiplexers are integrated on the silicon chip, the monolithic of having realized dispersion compensator and optical add-drop multiplexer is integrated, utilizes a chip to finish dispersion compensation and last download function to signal.

As shown in Figure 2, on SOI backing material 8, make the first nano wire waveguide 1 and the second nano wire waveguide 2, and in the first nano wire waveguide 1 and the second nano wire waveguide 2, made first grating 101 and second grating 201 respectively.First grating 101, second grating 201 have identical sample period, angle of inclination, grating dutycycle, centre wavelength and the parameter of warbling, and constitute to tilt to the grid structure.The waveguide importation spot-size converter 3 of the first nano wire waveguide 1, the output spot-size converter 4 of optical function device 7 optical add-drop multiplexers have all adopted the spot-size converter structure, with the efficient coupling of realization with optical fiber.

Describe its course of work below in detail:

Light signal with wavelength-division multiplex system of a plurality of channels is input to spot-size converter 3 from input optical fibre 5, through template converter 3 light signal is coupled in the first nano wire waveguide 1.Transfer to first grating 101 through straight wave guide 9 and curved waveguide 12, the light signal that 101 pairs of wavelength of first grating satisfy grating Bragg condition and phase-matching condition is had an effect, the long light of wavelength is coupled out the first nano wire waveguide at the front end of first grating 101 in all channels, and the short light of wavelength is coupled out the first nano wire waveguide in all channels in the rear end of first grating 101.These are transmitted through free space or low refractive index dielectric by the light signal that first grating 101 is coupled out, the light that wavelength is grown is received and is coupled in the second nano wire waveguide 2 at the front end of second grating 201, and the light that wavelength is lacked is in the rear end of second grating 201 is received and is coupled to the second nano wire waveguide 2.Here utilize different wave length that the different optical path differences that produce in position of coupling take place, make through after the long-distance optical fiber transmission, the long light of the wavelength that lags behind in each channel is caught up with the short light of leading wavelength, thereby realizes a plurality of dispersion compensation of channels functions.

The light signal that is coupled into the second nano wire waveguide 2 enters in optical device 7 optical add-drop multiplexers and handles through straight wave guide 10.Transfer to spot-size converter 4 through the signal after the processing of device 7 optical add-drop multiplexers through straight wave guide 11, be coupled to output optical fibre 6 outputs by spot-size converter 4.

Adopt conventional silicon manufacturing process in this example, dispersion compensator and optical add-drop multiplexer be integrated on the SOI wafer, realized can with the integrated dispersion compensator of other optical devices, to improving the integrated level of optical chip, it is very favourable to reduce chip cost.

Though described the present invention in detail with reference to the foregoing description, should be appreciated that the present invention is not limited to the disclosed embodiments, for the technician of this professional domain, can carry out various changes to its form and details.This invention is intended to contain the interior various distortion of spirit and scope of appended claims.

Claims

1, a kind of Integrable multiple channels color dispersion compensator is characterized in that, comprising:

One substrate;

2, Integrable multiple channels color dispersion compensator according to claim 1 is characterized in that, wherein this first grating is an oblique raster.

3, Integrable multiple channels color dispersion compensator according to claim 1 is characterized in that, wherein this second grating is an oblique raster.

4, Integrable multiple channels color dispersion compensator according to claim 1 is characterized in that, wherein this substrate is the substrate of SOI material, and the refringence of this substrate is more than 50%.

5, Integrable multiple channels color dispersion compensator according to claim 1 is characterized in that, wherein the output terminal in the second nano wire waveguide is manufactured with an optical add-drop multiplexer.

6, Integrable multiple channels color dispersion compensator according to claim 1 is characterized in that, wherein the sample period P of this first grating, second grating is 500um～750um.