CN101091865A

CN101091865A - Air-drying unit in air-drying machine

Info

Publication number: CN101091865A
Application number: CN 200610082896
Authority: CN
Inventors: 吴进明
Original assignee: BAOSHIMEN Co Ltd
Current assignee: BAOSHIMEN Co Ltd
Priority date: 2006-06-19
Filing date: 2006-06-19
Publication date: 2007-12-26
Anticipated expiration: 2026-06-19
Also published as: CN100540115C

Abstract

The invention relates to an air dry-set of the air-drying machine, it uses the compression/decompression endless set to compress the first body which is filled up the drying agent, producing dry air after a period of time, the dry air outputtes and in use for the airtight cabinet placing the wafer in wafer factory, the decompress which causes to compress the inside space of the second body before closeing the valve of the two filled up drying body, again openes another second body with the drying agent and compressed, the dry air outputtes and in use for the airtight cabinet placing the wafer in wafer factory, when the pressure of the decompression space through the path of the one-way valve and the first body becomes equal, after the second body space is decompressed,and then compresses the first body again, through the trade off of the first and second tube body, the dry air without intermission sends to the airtight cabinet which places the wafer for using.

Description

The air dry-set of dried-air drier

Technical field

The invention relates to a kind of air dry-set of dried-air drier, it is the air desiccation can be exported to airtight cabinet and the general moisture-resistant cabinet of placing wafer by air dry-set again and uses for a kind of being used in.

Background technology

Taiwan belongs to the fabric of island-in-sea type weather, can have more moisture content in air, adds impurity such as the oil of minority and dust, can make wafer produce the fraction defective of certain degree when making integrated circuit.

In order to address the above problem, the method that two kinds of solutions are arranged at present, first kind is the container of filling drier one, squeeze into compressed air by air inlet pipeline, moisture content in the compressed air is clamp-oned drier, dry air enters airtight cabinet through outlet pipe, to be dried dose of moisture content is saturated, and closed electromagnetic valve advances/outlet pipe, opens relief valve, moment is taken away the saturated moisture content of drier, use so that drier can be done dry air again, but this kind way is a general industry usefulness that volume is big, part is many, control circuit complexity and cost height, it is slow to produce dry air speed, so how general wafer factory does not use.

Second kind is constantly to squeeze into nitrogen at the airtight cabinet of placing wafer to be commonly called as the nitrogen cabinet, and the air that has moisture content in the script cabinet is extruded, and general wafer factory all uses, but also has the high shortcoming of cost, and the necessity that is improved is arranged in fact.

Summary of the invention

Because the shortcoming that existing structure is produced, purpose of the present invention promptly in that a kind of air dry-set of dried-air drier is provided, mainly can reach the purpose that part is few, cost is low.

Based on aforementioned purpose, the technological means that the present invention used is the air dry-set that is to provide a kind of dried-air drier, includes:

Pressurization/pressure release EGR wherein has one group of first, second body arranged side by side, and the lower and upper of first, second body inside are respectively equipped with filtration members, is positioned to be provided with most drier between one group of relative filtration members;

Triple valve is arranged at first, second body downside, and triple valve is provided with an air inlet pipe and communicates with triple valve inside, establishes passage in the triple valve and can communicate with first, second body respectively;

One steel ball is set near the passage with respect to air inlet pipe, and the passage both sides also are positioned at the screw that the steel ball side is provided with sealing ring and inner tool through hole;

Valve seat is located at first, second body upside, and its inside has the channel that communicates with first, second body, and is provided with an appendix;

The check valve that one hollow is arranged respectively, its upside and valve seat set firmly, and the check valve downside is provided with filtration members, in the check valve side bypass is set.

Innovative design provided by the present invention, the concrete effect enhancement that can obtain includes:

Part is few low with cost: owing to the air dry-set among the present invention, its part that must will use few, thereby can reach the low purpose of cost.

Description of drawings

Fig. 1: be stereo appearance figure of the present invention.

Fig. 2: be three-dimensional exploded view of the present invention.

Fig. 3: be that the present invention is when the side plan view that is used on the dried-air drier.

Fig. 4: be that the present invention is when the plan view from above that is used on the dried-air drier.

Fig. 5: the profile that is use embodiment of the present invention.

Fig. 6: another profile that is use embodiment of the present invention.

[primary clustering symbol description]

The 10--first body 11--filtration members

The 12--filtration members

20--second body

The 30--drier

40--triple valve 41--air inlet pipe

42--channel 43--steel ball

44--sealing ring 45--screw

The 50--first valve 60--second valve

The 61--drainpipe

70--valve seat 71--channel

The 72--appendix

80--check valve 81--bypass

82--spring 83--pearl body

The 84--sealing ring

90--filter 91--air inlet switch

92--filter 901--drainpipe

The specific embodiment

The present invention be air dry-set for a kind of dried-air drier as shown in Fig. 1 to Fig. 4, employed air dry-set is to use in a dried-air drier in the present invention, includes:

Pressurization/pressure release EGR, wherein has first, second body 10/20 of one group of hollow cylindrical arranged side by side, the lower and upper of first, second body 10/20 inside are respectively equipped with and are hemispheric filtration members 11/12, wherein the direction of one group of relative filtration members 11/12 oppositely is provided with each other, and is positioned at 11/12 of one group of relative filtration members and is provided with most drier 30 as Fig. 5;

Triple valve 40 is arranged at first, second body 10/20 downside, and triple valve 40 is provided with an air inlet pipe 41 and communicates with triple valve 40 inside, establishes passage 42 in the triple valve 40 and can communicate with first, second body 10/20 respectively;

One steel ball 43 is set near the passage 42 with respect to air inlet pipe 41, and passage 42 both sides also are positioned at the screw 45 that steel ball 43 sides are provided with sealing ring 44 and inner tool through hole, and steel ball 43 can be subjected to the backstop of sealing ring 44, and air can't be led to an effluent;

First valve 50, second valve 60 are located at triple valve 40 downsides respectively, it communicates with triple valve 40 downsides respectively, first valve 50, second valve, 60 downsides are provided with the discharge pipe line 61 that communicates, can supply in the usefulness of draining, and can be for the muffler of noise reduction in the outboard end setting of discharge pipe line 61;

Valve seat 70 is to be located at first, second body 10/20 upside, and its inside has the passage 71 that communicates with first, second body 10/20, and is provided with the airtight cabinet use that an appendix 72 can export dried air to wafer factory placement wafer;

The check valve 80 that one hollow is arranged respectively, its upside and valve seat 70 set firmly, and check valve 80 downsides are provided with filtration members 12, in check valve 80 sides bypass 81 are set, and check valve 80 inside are established spring 82 and pearl body 83 and sealing ring 84 from top to bottom in regular turn;

As shown in Figure 4, air was via filter 90 before pressurization, air inlet switch 91 is connected to air inlet pipe 41 again, through the air after filter 90 filtrations, and can the drainpipe 901 through being connected airborne moisture content be done preliminary draining after filtering with filter 90, when air is squeezed into air inlet pipe 41 with compressor, produce dry air, can show by flowmeter and pressure gauge, simultaneously, on instrument board, can demonstrate relevant temperature and moisture readings, when dry air behind appendix 72, can be again after the filtration of a filter 92, be input into again in the airtight cabinet of placing wafer.

The present invention when using shown in Fig. 1,5, because the present invention is to use pressurization/pressure release EGR, mainly be to be provided with inductor in the airtight cabinet place of placing wafer, to detect the humidity in the airtight cabinet, if humidity is too high, dry air input is placed in the airtight cabinet of wafer, and be positioned at airtight cabinet and be provided with Xelminator, in the dry air input simultaneously can for eliminate enter airtight cabinet after the dry air static that flows and produced;

In the present invention, work as air and squeeze into air inlet pipe 41 with compressor, and can pass in the triple valve 40, air is pushed steel ball 43 to left side or right side, block the channel of second body, but air channel 42, have in screw 45 inputs first body 10 of through hole, air can be filtered part 11 and do preliminary filtration, and can make first body 10 of filling drier 30 be pressurized state, with in the script forced air with moisture content be squeezed into drier inside, air thereby drying, part 12 after filtration again, check valve 80, valve seat 70 internal channel 71 are again by appendix 72 outputs, the airtight cabinet of placing wafer for wafer factory uses, partly air slowly enters second body through the bypass 81 of check valve 80, makes that the pressure in second body is identical with pressure in first body gradually.

Shown in Fig. 1,6, when first valve 50 carries out pressure release, pressure sharp fall in first body, the saturated moisture content of body internal desiccant is taken away, to be dried dose live again after, first valve 50 stops pressure release, treat to pressurize next time and can absorb the function of air moisture content again, the moisture content of taking away is discharged through drainpipe, because the pressure release meeting produces noise, therefore can add a silencing means at the drainpipe end again; When the pressure of first body descends because of pressure release, the former steel ball 43 of blocking the second body channel, the pressure of cause second body 20 is greater than first body, steel ball 43 is pushed to opposite side, block the channel 42 of first body, the air of air inlet pipe can enter second body 20 of filling drier 30 by the channel 42 of second body and pressurize, and can make dry air by check valve 80 and channel 71 and appendix 72 outputs, the airtight cabinet of placing wafer for wafer factory uses, when the first body pressure release when drier is lived again, first valve 50 had both stopped pressure release, partly air becomes again with second body, 10 inner space pressure through bypass 81 effects of check valve 80 and equates, when second body, 20 inner spaces after pressure release, can make the pressurization of first body 10 again.

Therefore, the present invention can pressurize on one side via first, second body 10/20: produce dry air, pressure release on one side: evacuate drying prescription moisture content constantly is used alternatingly, dry air constantly can be delivered to the airtight cabinet of placing wafer and use, the present invention can reach the few and low purpose of cost of part.

In sum, the present invention utilizes under the aforesaid space structure kenel, by the setting of said structure, can reach the purpose that employed part is few and reduce cost, and the present invention has met the patent of invention important document, and application is mentioned in the whence in accordance with the law.

Claims

1. the air dry-set of a dried-air drier, dried-air drier has a filter, air inlet switch, be connected with filter and establish drainpipe, dried-air drier is provided with flowmeter and pressure gauge, can show relevant reading on the set instrument board of dried-air drier, dry air can be input into the airtight cabinet of placing wafer through a filter more again; It is characterized in that:

Triple valve is arranged at first, second body downside, and triple valve is provided with an air inlet pipe and communicates with triple valve inside, establishes channel in the triple valve and can communicate with first, second body respectively;

One steel ball is set near the channel with respect to air inlet pipe, and the channel both sides also are positioned at the screw that the steel ball side is provided with sealing ring and inner tool hole;

2. as the air dry-set of 1 described dried-air drier of claim the, it is characterized in that filtration members wherein is hemispherical, one group of relative filtration members oppositely is provided with each other.

3. as the air dry-set of claim the 1 or 2 described dried-air driers, it is characterized in that, comprise that further first valve, second valve be located at the triple valve downside respectively, it communicates with the triple valve downside respectively, and first valve, the second valve downside are provided with the discharge pipe line that communicates.

4. as the air dry-set of 3 described dried-air driers of claim the, it is characterized in that, wherein establish spring and pearl body and sealing ring from top to bottom in regular turn in check valve inside.