CN101071084B - 多层梁结构的电容式微机械温度传感器 - Google Patents
多层梁结构的电容式微机械温度传感器 Download PDFInfo
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- CN101071084B CN101071084B CN2007100244947A CN200710024494A CN101071084B CN 101071084 B CN101071084 B CN 101071084B CN 2007100244947 A CN2007100244947 A CN 2007100244947A CN 200710024494 A CN200710024494 A CN 200710024494A CN 101071084 B CN101071084 B CN 101071084B
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CN2007100244947A CN101071084B (zh) | 2007-06-19 | 2007-06-19 | 多层梁结构的电容式微机械温度传感器 |
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CN2007100244947A CN101071084B (zh) | 2007-06-19 | 2007-06-19 | 多层梁结构的电容式微机械温度传感器 |
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CN101071084A CN101071084A (zh) | 2007-11-14 |
CN101071084B true CN101071084B (zh) | 2010-11-24 |
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CN2007100244947A Expired - Fee Related CN101071084B (zh) | 2007-06-19 | 2007-06-19 | 多层梁结构的电容式微机械温度传感器 |
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Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101400215A (zh) * | 2007-09-29 | 2009-04-01 | 光诠科技股份有限公司 | 电路板的制造方法 |
CN103424208B (zh) * | 2013-09-02 | 2015-06-17 | 东南大学 | 一种高灵敏度电容式微机械温度传感器 |
CN103434999B (zh) * | 2013-09-02 | 2016-01-20 | 东南大学 | 一种温度、湿度、气压和加速度传感器的集成制造方法 |
DE102014201640A1 (de) * | 2014-01-30 | 2015-07-30 | BSH Hausgeräte GmbH | Temperaturmessung an einer Flächenheizung für ein Haushaltsgerät |
CN106017718B (zh) * | 2016-07-28 | 2018-04-06 | 国网山西省电力公司忻州供电公司 | 柔性温度传感器 |
CN107036739A (zh) * | 2017-06-01 | 2017-08-11 | 东南大学 | 一种利用压电原理测量压力的压力传感器及其工作方法 |
CN112179517B (zh) * | 2020-09-30 | 2023-09-15 | 厦门天马微电子有限公司 | 温度传感器以及温度检测方法 |
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