CN101067547A - Optical angle gauge test calibrator utilizing mutual orthogonal double-frequency laser interferometer - Google Patents
Optical angle gauge test calibrator utilizing mutual orthogonal double-frequency laser interferometer Download PDFInfo
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Abstract
The invention discloses a high accuracy use mutual orthogonal two double frequencies laser interferometer optics angle gauge testing marking apparatus, which includes controlled computer 1, double frequency laser interferometer A3 and rays direction 2,the static reflector 4 and the motion reflector 7 of placed in turn according to light path direction, double frequency laser interferometer B13 which mutually vertical laying aside with double frequency laser interferometer A3 rays path, the long baseline spectroscope 11, the long baseline reflector 6, the optical path compensate parallel glass plate 5 and the measured photometry angle gauge 9 which in turn placed according to the double frequency laser interferometer B13 light path, and also includes migration precise translation 8, small rotation precise angular displacement 10 and step motor control box 12 of making the measured optic angle gauge 9 along the main section direction move. The invention has the following remarkable merit: through the invention installment survey optics angle gauge angle of deviation in 2'-10'survey scope, the measuring accuracy may achieve 0.02', enormously increased optics angle gauge angle of deviation angular accuracy. Uses the mutual orthogonal double frequency laser interferometer take a bearing, reduced the optical material refractive index and the interference fringe interprets and so on other factors influence to take a bearing precision.
Description
Technical field
The invention belongs to low-angle test and measuring field, is a kind of method and apparatus that monochromatic light is seen through the angle of deviation realization high precision measurement demarcation of optical angle gauge generation.Can be used as standard small-angle generator or low-angle benchmark through the optical angle gauge of demarcating, be used for finishing test calibration autocollimator mircrometer gauge, transit segmentation frame of reference, the angle measuring instrument class error of indication.
Background technology
The low-angle metering is the important component part of measuring science.Along with the update and the industrialized development of photoelectric figure image measurement instrument, increasing to the demand of low-angle metering, also more and more higher to the requirement of its precision.In spaceflight TT﹠C system, the calibrating to the error of indication of the measurement of angle of the angle measurement tracking equipment of aircraft, guidance system all needs high-precision small-angle generator and provides the standard angle value.
In each research institute, manufacturing enterprise, annual all have the error of indication of a large amount of angle measurement quasi-instruments to examine and determine and to calibrate, as the error of indication of autocollimator, the segmentation reading error of transit, second dish error of indication of angular instrument etc.This quasi-instrument all is directly used in the various photoelectricity view instrument device test calibrations, and particularly the high-acruracy survey of optical reflection lens optical parallel error in the calibration instrument of optical system, the optical instrument all relates to the low-angle measurement verification of high precision.Because be not exclusively used in the instrument that optical angle gauge is demarcated, above-mentioned low-angle measurement verification and magnitude tracing work are difficult to carry out.
The method of the measurement optical angle gauge angle of deviation that extensively adopts mainly contains at present: autocollimation method, photoelectricity wedge angular instrument method.
Wherein the autocollimation method measurement is a relatively directly method of measurement standard optical angle gauge angle of deviation, and its shortcoming is: measurement range is subjected to the influence of auto-collimator field angle, and measurement range is little; This method requires to know optical angle gauge material refractive index, and measuring accuracy is subjected to the influence of auto-collimator precision simultaneously, thereby measuring accuracy is not high.
Photoelectricity wedge angular instrument is to utilize the measurement of interfering and surveying rectangular method realization normalized optical angle gauge angle of deviation, and it is to add the laser interference length-measuring system to constitute in the graceful interferometer of Thailand.As long as measure the displacement and the corresponding order of interference variable quantity of wedge respectively, can directly obtain the angle of deviation of tested optical angle gauge, and need not measure the angle of wedge and the refractive index of optical angle gauge respectively.Its shortcoming is: will carry out interpretation to interference fringe in this instrument, and be to adopt light intensity simulating signal zero crossing to realize to the accurate interpretation of interference fringe, just influenced by the interference fringe contrast, parallax error is bigger, and is very big to the influence of measuring optical angle gauge angle of deviation precision.
Therefore, the optical angle gauge test marking apparatus that the present invention sets up is the double-frequency laser interference precision length measurement instrument that adopts two quadrature light path arrangement, the change in optical path length amount that light path sees through optical angle gauge to be produced because of variation in thickness when measuring angle gauge and moving, another drive test goes out the method for optical angle gauge amount of movement.According to the optical angle gauge angle of deviation computation model of strictness, survey length by nano-precision, realize the measurement of high precision standard optical angle gauge angle of deviation.This instrument is light harvesting, mechanical, electrical, the integration test calibration system of calculating, be controlled to be automatically one.
Summary of the invention
The object of the present invention is to provide a kind of test calibration instrument that can realize optical angle gauge angle of deviation high-precision calibrating, remedy the deficiency of existing low-angle measuring apparatus, improve the precision of measuring greatly.
Basic thought of the present invention is based on traditional equal thickness interference and measures optical angle gauge angle of deviation theory, adopt two mutually perpendicular two-frequency laser interferometers of light path, the method of using accurate translation guide rail that optical angle gauge is moved a certain distance in the plane of parallel its principal section is measured the optical angle gauge angle of deviation.Measurement range is from 2 " 10 ".
The present invention utilizes the optical angle gauge test marking apparatus of mutually orthogonal double-frequency laser interference horizontal metroscope, comprise main control computer 1, two-frequency laser interferometer A3 and the spectroscope of placing successively by optical path direction 2 thereof, static mirrors 4 and mobile mirror 7, two-frequency laser interferometer B13 with the mutual vertical placement of two-frequency laser interferometer A3 light path, press the long baseline spectroscope 11 that two-frequency laser interferometer B13 light path is placed successively, long baseline catoptron 6, optical path compensation parallel plate 5 and tested optical angle gauge 9, its feature also comprise can make the accurate translation stage 8 that move of tested optical angle gauge 9 along the principal section direction, accurate angular displacement platform 10 of minor rotation when debuging the optical angle gauge principal section and step motor control case 12.
Purpose of the present invention is realized by following technical scheme.
This optical angle gauge test marking apparatus comprises: the device of (1) Data Receiving and processing is mainly finished the control of test calibration instrument and the output of test result.Described conventional data receives and treating apparatus has a CPU (central processing unit), a storer, and an importation, an output and a bus are in order to connect CPU (central processing unit), storer, importation and output; A linear measure longimetry software that matches with two two-frequency laser interferometers is installed on the described storer, and the angle of deviation computation model according to strictness calculates angle value by software programming; Described CPU (central processing unit) receives the received data in importation, after treatment, and to the corresponding two paths of signals of output output.(2) motor control box are control gears main in the test calibration instrument, the minor rotation when controlling the translation of optical angle gauge and debuging the optical angle gauge principal section.Described motor control box signal input part is connected with the output of described multi-purpose computer, accepts the computer control instruction, and to control corresponding unit transmission steering order.(3) two two-frequency laser interferometers, this is the core ingredient of this test calibration instrument.The change in optical path length amount that produces because of variation in thickness when the orthogonal two-frequency laser interferometer of these two light paths one Reuter crosses optical angle gauge and measures angle gauge and move, another drive test goes out the amount of movement in the horizontal direction of optical angle gauge.The long baseline mirror group that (4) one covers are made by the invar material is mainly used to measure light path through the optical angle gauge change in optical path length amount because of the variation in thickness generation when angle gauge moves.This long baseline mirror group comprises a long baseline spectroscope and a long baseline catoptron.The baseline of this long baseline mirror group can be selected to formulate as required, adopts special the forming of the insensitive invar material of temperature variation.The present invention is that example describes with base length 150mm.(5) one covers are used for two-frequency laser interferometer and survey long reflection/spectroscope group, and this mirror group is made up of a spectroscope and two corner cube reflectors, is mainly used to measure the amount of movement in the horizontal direction of optical angle gauge.(6) accurate translation stages are mainly used to make optical angle gauge moving in the horizontal direction.In order to satisfy the requirement of measuring accuracy, consider the size restrictions of long baseline mirror group, adopt the translation stage of stroke 100mm, described translation stage rolls the gearing of spider's thread bar as translation stage with precision, adopts the precision linear slide block guide rail as its mobile device.(7) accurate angular displacement platforms are mainly used to the position, principal section of adjustment optical angle gauge.This precision angular displacement platform adopts the worm and gear transmission, and the arc-shaped guide rail rolling friction is partly adopted in relative motion, closely axle system design.
Preferably; the bottom of the optical angle gauge test marking apparatus among the present invention can also comprise an air supporting grouan platform; each part mentioned above all places on the described air supporting grouan platform; the outside also comprises an organic glass environmental protection cover, to play effect shockproof and minimizing air turbulence stably measured environment.
The present invention has following remarkable advantage: utilize two-frequency laser interferometer can realize nano level high precision length measurement, add the long baseline mirror group that adopts 150mm, make it in the measurement range of 2 " 10 ", optical angle gauge angle of deviation measuring accuracy can reach 0.02 ", greatly improved the low-angle precision of measurement of existing method.Adopt mutually orthogonal two-frequency laser interferometer to measure the optical angle gauge angle of deviation, reduced of the influence of other factors such as optical material refractive index and interference fringe interpretation tested optical angle gauge angle of deviation angle measurement accuracy.
Below in conjunction with example and accompanying drawing the present invention is elaborated.
Description of drawings
Fig. 1 utilizes the optical angle gauge test marking apparatus one-piece construction figure of mutually orthogonal two-frequency laser interferometer
Fig. 2 utilizes the local figure of the optical angle gauge test marking apparatus of mutually orthogonal two-frequency laser interferometer
Among the figure, 1-main control computer, 2-two-frequency laser interferometer A spectroscope, 3-two-frequency laser interferometer A, 4-two-frequency laser interferometer A static mirrors, 5-optical path compensation parallel plate, the long baseline catoptron of 6-, 7-two-frequency laser interferometer A mobile mirror, the accurate translation stage of 8-, the tested optical angle gauge of 9-, the accurate angular displacement platform of 10-, the long baseline spectroscope of 11-, 12-step motor control case, 13-two-frequency laser interferometer B.
Embodiment
As shown in Figure 1, the present invention utilizes the optical angle gauge test marking apparatus of mutually orthogonal two-frequency laser interferometer to comprise two mutually perpendicular light paths, one of them optical routing two-frequency laser interferometer A3, two-frequency laser interferometer A spectroscope 2, two-frequency laser interferometer A static mirrors 4, two-frequency laser interferometer A mobile mirror 7 and accurate translation stage 8 constitute, and are used for measuring the actual range that optical angle gauge moves in the plane of parallel and its principal section.Another optical routing two-frequency laser interferometer B13, long baseline spectroscope 11, optical path compensation parallel plate 5, long baseline catoptron 6 and accurate angular displacement platform 10 constitute, and are used for measuring the optical angle gauge change in optical path length amount that variation in thickness is introduced in moving process.Calculate machine 1 and the control that step motor control case 12 is realized whole instrument by a main control computer.
Whole test calibration instrument places an air supporting grouan platform, and the outside is covered with an organic glass environmental protection cover, to play the effect of shock insulation and minimizing air turbulence, stably measured environment.
When measuring, the front surface that requires optical angle gauge is vertical with the system primary optical axis, the requirement of assurance measuring principle.
The course of work of the described optical angle gauge test marking apparatus that utilizes mutually orthogonal two-frequency laser interferometer is as follows: measure initial, guaranteeing under the measurement environment stable condition, open two-frequency laser interferometer A, two-frequency laser interferometer B and subsidiary ambient compensation device thereof, make two the two-frequency laser interferometer elder generation's times of preheating about 15 minutes; Open main control computer 1 and step motor control case.On main control computer 1, open the Survey Software and the step motor control software interface of two two-frequency laser interferometers respectively, wait to be measured.
Optical angle gauge is positioned on the accurate angular displacement platform 10, utilize the computer measurement Control Software, in the light path that constitutes by two-frequency laser interferometer B13, long baseline spectroscope 11, optical path compensation parallel plate 5, long baseline catoptron 6 and accurate angular displacement platform 10, control accurate angular displacement platform 10 and rotate different angles, meanwhile write down the registration variation that two-frequency laser interferometer B13 Survey Software shows, when showing that number is changed to maximal value, just think that the position of this moment is the position at place, optical angle gauge principal section.
The relative position of the in the vertical direction of maintenance optical angle gauge is constant, utilize the computer measurement Control Software, by two-frequency laser interferometer A3, two-frequency laser interferometer A spectroscope 2, two-frequency laser interferometer A static mirrors 4, in the light path that two-frequency laser interferometer A mobile mirror 7 and accurate translation stage 8 constitute, control accurate translation stage 8, optical angle gauge is moved in the horizontal direction, guarantee that the end that optical angle gauge contacts with two-frequency laser interferometer A mobile mirror 7 is positioned at the right side light hole position of long baseline catoptron 6 on optical path direction just, make light as much as possible near the optical angle gauge edge, make full use of its clear aperture.
The Survey Software of two two-frequency laser interferometers is shown the number zero clearing, cover organic glass environmental protection cover to guarantee the relatively stable of measurement environment.Just can begin this moment to measure.Control accurate translation stage 8, make optical angle gauge move about 100mm, read the actual distance L that moves of optical angle gauge by the Survey Software of two-frequency laser interferometer A, Survey Software by two-frequency laser interferometer B reads out in the change in optical path length amount Δ l that produces because of the optical angle gauge variation in thickness in this moving process, will finish the calculating of optical angle gauge angle of deviation in the measurement software for calculation of these two numerical value inputs according to the angle of deviation computation model establishment of strictness.
By above method, finish three demarcation to the angle of deviation of same optical angle gauge.Finish the output of final measurement calibration result by software, obtain the calibration value of optical angle gauge angle of deviation under the standard environment condition.
Major parameter in the embodiment of the invention is as follows:
Adopt the translation stage of stroke 100mm, step motor drive.Its mesa dimensions is 120mm * 120mm, screw rod helical pitch 4mm, and resolution is 0.00032mm, repetitive positioning accuracy＜0.005mm, end play＜0.02mm;
Accurate angular displacement platform stroke range ± 10 °, step motor drive.Its mesa dimensions 65mm * 65mm, ratio of gear are 352: 1, and resolution is 0.00032 °, and repetitive positioning accuracy is 0.0043 °, maximum static torque 42Ncm.
Through experimental verification: the present invention utilizes the optical angle gauge test marking apparatus of mutually orthogonal double-frequency laser interference horizontal metroscope, and in the measurement range of 2 " 10 ", measuring accuracy can reach 0.02 ", improved the precision of measuring the optical angle gauge angle of deviation greatly.
Below in conjunction with the accompanying drawings the specific embodiment of the present invention and experimental result are described; but these explanations can not be understood that to have limited scope of the present invention; protection scope of the present invention is limited by the claims of enclosing, and any change of carrying out on claim of the present invention basis all is protection scope of the present invention.
Claims (5)
1, a kind of optical angle gauge test marking apparatus that utilizes mutually orthogonal double-frequency laser interference horizontal metroscope comprises: main control computer
(1); Two-frequency laser interferometer A and the spectroscope of placing successively by optical path direction (2), static mirrors (4) and mobile mirror (7); With the two-frequency laser interferometer B (13) of the mutual vertical placement of two-frequency laser interferometer A light path, and press long baseline spectroscope (11), long baseline catoptron (6), optical path compensation parallel plate (5) and the tested optical angle gauge (9) that two-frequency laser interferometer B optical path direction is placed;
Described tested optical angle gauge places on the accurate adjusting mechanism, by the adjustment of the accurate adjusting mechanism realization of control box control step driven by motor to tested optical angle gauge horizontal direction and principal section.
2, optical angle gauge test marking apparatus according to claim 1, it is characterized in that: with the double-frequency laser interference horizontal metroscope of two orthogonal placements of light path, the change in optical path length amount that produces because of variation in thickness when one Reuter crosses optical angle gauge and measures angle gauge and move, another drive test goes out the method for optical angle gauge amount of movement, optical angle gauge angle of deviation computation model according to strictness, survey length by nano-precision, realize high-precision optical angle gauge angle of deviation test calibration.
3, optical angle gauge test marking apparatus according to claim 1, its feature also is: described two-frequency laser interferometer A is a common two-frequency laser interferometer, is mainly used in the amount of movement of measuring optical angle gauge.
4, optical angle gauge test marking apparatus according to claim 1, it is characterized in that: described two-frequency laser interferometer B is the two-frequency laser interferometer that has ambient compensation, and it surveys long baseline spectroscope (11) and catoptron formation that long assembly is made by the invar material.Be mainly used to measure the transmission light path variable quantity that produces because of optical angle gauge (9) variation in thickness.
5, optical angle gauge test marking apparatus according to claim 4, it is characterized in that: described two-frequency laser interferometer B, in another beam split light path of its long baseline mirror group, place an optical path compensation parallel plate, the uniform thickness of thickness and tested optical angle gauge is suitable, is used for the compensation of light path.
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101738160B (en) * | 2009-12-25 | 2011-07-13 | 中国科学院上海光学精密机械研究所 | Double light source sinusoidal phase-modulation displacement measurement interferometer |
| CN101888230B (en) * | 2009-05-11 | 2012-07-18 | 株式会社山武 | Reflection-type optoelectronic switch and object detection method |
| CN102679947A (en) * | 2012-05-23 | 2012-09-19 | 北京理工大学 | Device for calibrating spatial azimuth angle of light collimation system |
| CN102809346A (en) * | 2011-05-31 | 2012-12-05 | 上海微电子装备有限公司 | Position measuring device of motion platform and measuring method of position measuring device |
| CN102066887B (en) * | 2008-06-20 | 2013-01-23 | 西门子公司 | Method for reducing fringe interference of light |
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| CN104819827A (en) * | 2015-05-18 | 2015-08-05 | 西安工业大学 | Device and method for detecting tracking precision of panoramic observation and scanning instrument of bilateral symmetry type |
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- 2007-06-06 CN CNB2007101002220A patent/CN100470189C/en not_active Expired - Fee Related
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| CN102066887B (en) * | 2008-06-20 | 2013-01-23 | 西门子公司 | Method for reducing fringe interference of light |
| CN101888230B (en) * | 2009-05-11 | 2012-07-18 | 株式会社山武 | Reflection-type optoelectronic switch and object detection method |
| CN101738160B (en) * | 2009-12-25 | 2011-07-13 | 中国科学院上海光学精密机械研究所 | Double light source sinusoidal phase-modulation displacement measurement interferometer |
| CN102809346A (en) * | 2011-05-31 | 2012-12-05 | 上海微电子装备有限公司 | Position measuring device of motion platform and measuring method of position measuring device |
| CN102809346B (en) * | 2011-05-31 | 2014-12-17 | 上海微电子装备有限公司 | Position measuring device of motion platform and measuring method of position measuring device |
| CN102679947A (en) * | 2012-05-23 | 2012-09-19 | 北京理工大学 | Device for calibrating spatial azimuth angle of light collimation system |
| CN104567733A (en) * | 2013-10-16 | 2015-04-29 | 北京航天计量测试技术研究所 | Zero adjustment device and method for small-angle laser measuring device |
| CN104819827A (en) * | 2015-05-18 | 2015-08-05 | 西安工业大学 | Device and method for detecting tracking precision of panoramic observation and scanning instrument of bilateral symmetry type |
| CN110440693A (en) * | 2019-08-27 | 2019-11-12 | 上海航天计算机技术研究所 | A kind of quasi-optical feeding network system and error testing method |
| CN111609997A (en) * | 2020-05-07 | 2020-09-01 | 中国科学院光电技术研究所 | Detection apparatus suitable for transmission-type optical element optical path uniformity measurement |
| CN113654457A (en) * | 2021-07-22 | 2021-11-16 | 太原理工大学 | Spectrum confocal measuring head wavelength and displacement mapping relation calibration device and fitting method |
| CN115325944A (en) * | 2022-07-27 | 2022-11-11 | 山西大学 | Multipath interferometer system for measuring thickness of material |
| CN115325944B (en) * | 2022-07-27 | 2024-04-12 | 山西大学 | Multipath interferometer system for measuring thickness of material |
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