CN101060231A - BST Fabry-Perot micro-cavity and manufacture method - Google Patents
BST Fabry-Perot micro-cavity and manufacture method Download PDFInfo
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- CN101060231A CN101060231A CN 200710038665 CN200710038665A CN101060231A CN 101060231 A CN101060231 A CN 101060231A CN 200710038665 CN200710038665 CN 200710038665 CN 200710038665 A CN200710038665 A CN 200710038665A CN 101060231 A CN101060231 A CN 101060231A
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Abstract
The disclosed barium strontium titanate FP optical micro-cavity comprises a ferro-electric Prague reflection film layer and a defect layer, wherein the chemical growing solution uses glacial acetic acid as solvent, acylacetone as stabilizer, polyvinylpyrrolidone (PVP) as thickener, and all of BaAC, SrAC, and titanium n-butylalcohol as the solute, wherein there is no PVP in solution for preparing the defect layer. This invention is simple and convenient to operate.
Description
Technical field
The present invention relates to a kind of Fabry of forming by multilayer ferroelectric media film-Perot optical microcavity.Specifically be meant a kind of Fabry-Perot (FP) optical microcavity and preparation method who forms by barium strontium titanate (BST) multilayer ferroelectric media film.
Background technology
In the past few decades, the FP optical microcavity is mainly used on the interferometric filter.In recent years, it is widely applied to again in vertical cavity surface emitting laser and the resonance luminescence diode, and main cause is exactly that the FP optical microcavity has amplification to electromagnetic field, can improve the coupling efficiency of laser so widely, and the integrated level of laser is improved, the light output angle of divergence is little.Utilize the FP optical microcavity can improve the luminous intensity of rare earth luminescent material widely equally and subtract narrow luminous live width.The Bragg mirror of high reflectance is to form a very important member of FP optical microcavity.Traditional Bragg mirror mainly is to have the refractive index difference materials arranged in alternating by two kinds to form, and mainly comprises semi-conducting material, inorganic oxide and organic substance.Since be used for making up the traditional material of Bragg mirror do not have ferroelectric, electric light, piezoelectricity and acousto-optic equivalence should.Therefore, only under single wavelength, obtain optimumly based on the service behaviour of the FP optical microcavity of these material, and can't realize the dynamic tuning of device operating frequency.And our patent No. of application is: 200610026936.7, name be called barium strontium titanate material in " strontium barium titanate Bragg mirror and preparation method " have ferroelectric, electric light, piezoelectricity and acousto-optic equivalence should.We find that in experiment the appropriate location in the ferroelectric multilayer film of barium strontium titanate adds single mode FP optical microcavity or the coupling FP optical microcavity that defect layer just can form high-quality-factor.The chamber membrane resonance frequency of this FP optical microcavity can be controlled by the thickness or the extra electric field that change defect layer.The ferroelectric basic FP optical microcavity of this class will play a significant role in fields such as integrated opto-electronic device, optical communications.
Summary of the invention
But purpose of the present invention is exactly the barium strontium titanate FP optical microcavity that will propose a kind of operating frequency dynamic tuning.
Barium strontium titanate FP optical microcavity of the present invention comprises two kinds of structures, and a kind of is the single mode optical microcavity, and another kind is the coupling optical microcavity.
The single mode optical microcavity comprises: the strontium titanate monocrystal substrate, on substrate by chemical solution method be arranged in order the growth following structure rete:
Substrate BST DBRs BST
ZmBST DBRs;
The coupling optical microcavity comprises: the strontium titanate monocrystal substrate, on substrate by chemical solution method be arranged in order the growth following structure rete:
Substrate BST DBRs BST
ZmBST DBRs BST
ZmBST DBRs;
BST DBRs in the above-mentioned rete is the ferroelectric Bragg reflection rete of FP optical microcavity, and its thickness is 0.5-3 μ m, BST
ZmBe the defect layer of FP optical microcavity, its thickness is 10-100nm.
Barium strontium titanate FP optical microcavity of the present invention adopts the chemical solution method growth, and its process is as follows:
1. the preparation of precursor solution
A. be used to prepare the preparation of the precursor solution of ferroelectric Bragg reflection rete:
Solvent is a glacial acetic acid, and stabilizer is a hexanoyl acetone, and thickener is a polyvinylpyrrolidone, and their mol ratio is 25～35: 0.5～1.5: 0.5～1.5.
Solute is strontium acetate, barium acetate, n-butanol titanium, and their mol ratio is (1-x): x: 1, and 0＜x＜1 wherein.Earlier strontium acetate, barium acetate are dissolved in 40-80 ℃ the glacial acetic acid, treat successively hexanoyl acetone, n-butanol titanium, polyvinylpyrrolidone to be added lasting stirring the in the above-mentioned solution behind the solution cool to room temperature, be adjusted into 0.2-0.8M/L by the concentration of diluting or distill, and filter the precursor solution that obtains clear solution.This solution underwent no deterioration in 1 year.
B. be used to prepare the preparation of the precursor solution of defect layer:
Solvent is a glacial acetic acid, and stabilizer is a hexanoyl acetone, and their mol ratio is 25～35: 0.5～1.5.
Solute is strontium acetate, barium acetate, n-butanol titanium, and their mol ratio is (1-x): x: 1, and 0＜x＜1 wherein.
The solution mixed method is the same, by dilution or evaporation, obtains the precursor solution that concentration is 0.3M/L at last.
2. the preparation of optical microcavity rete:
The microcavity rete adopts conventional spin coating coating process, prepares on the strontium titanates substrate successively by above-mentioned film layer structure.
Advantage of the present invention is: device therefor is simple, and is easy to operate.Simultaneously, can control the working frequency range of FP optical microcavity by selecting means such as technological parameter, adjustment solution concentration, the different polymer of employing.
Description of drawings
Fig. 1 is the structural representation of FP optical microcavity of the present invention, and a figure is the structural representation of single mode optical microcavity, and b figure is the structural representation of coupling optical microcavity.
Fig. 2 is the reflectance spectrum of embodiment 1 single mode optical microcavity, and spectrum 1 is BST among the figure
ZmThe whirl coating speed of defect layer is the reflectance spectrum that per minute 3500 changes the single mode optical microcavity that records, and the defect layer thickness of formation is 60nm; Spectrum 2 is BST
ZmThe whirl coating speed of defect layer is the reflectance spectrum that per minute 3000 changes the single mode optical microcavity that records, and the defect layer thickness of formation is 50nm.
Fig. 3 is the reflectance spectrum of embodiment 2 coupling optical microcavitys.
Embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail:
Embodiment 1: the preparation of single mode optical microcavity:
§ 1. is used to prepare the preparation of the precursor solution of ferroelectric Bragg reflection rete:
Solvent is a glacial acetic acid, and stabilizer is a hexanoyl acetone, and thickener is a polyvinylpyrrolidone.
Solute is strontium acetate, barium acetate, n-butanol titanium, and their mol ratio is 0.9: 0.1: 1.With the 2.7864g barium acetate, 0.2603g strontium acetate, 0.65g polyvinylpyrrolidone is dissolved in the glacial acetic acid of 30ml heating, heating-up temperature is 40-80 ℃, adds the hexanoyl acetone of about 2ml then, stirs and make its cooling, add 4.1670ml n-butanol titanium at last and continued to stir 2-3 individual hour, add a small amount of distilled water diluting, and filter and to obtain as clear as crystally, molar concentration is about the BST precursor solution of 0.3M/L.This solution underwent no deterioration in 1 year.
§ 2. is used to prepare the preparation of the precursor solution of defect layer:
The preparation of solution is identical with step § 1, does not just add polyvinylpyrrolidone in the solvent.
Being coated with of § 3. retes:
Utilizing the spin coating coating process, is the rotating speed that per minute 3500 changes with whirl coating speed, the precursor solution that step § 1 is prepared drip in the rotation on strontium titanate monocrystal substrate 1, the spin coating time is 30 seconds; Then the good slice, thin piece of spin coating is put into quick anneal oven, under 180 ℃-240 ℃, 350 ℃-400 ℃ and 700 ℃-750 ℃ temperature heat treatment 3-8 minute respectively, 3-8 minute and 5-10 minute, repeat above-mentioned steps 10 times, obtain the ferroelectric Bragg reflection rete 2 of lower floor, the thickness of rete 2 is 1.5 μ m.
The precursor solution that step § 2 is prepared drips on the ferroelectric Bragg reflection rete of lower floor in the above-mentioned rotation for preparing again, is the rotating speed that per minute 3500 changes with whirl coating speed, and the spin coating time is 30 seconds; Then the good slice, thin piece of spin coating is put into quick anneal oven, under 180 ℃-240 ℃, 350 ℃-400 ℃ and 700 ℃-750 ℃ temperature heat treatment 3-8 minute respectively, 3-8 minute and 5-10 minute, obtain BST
ZmDefect layer 3, its thickness are 50nm.。
The precursor solution that step § 1 is prepared drips to the BST in the above-mentioned rotation for preparing again
ZmOn the defect layer, be the rotating speed that per minute 3500 changes with whirl coating speed, the spin coating time is 30 seconds; Then the good slice, thin piece of spin coating is put into quick anneal oven, under 180 ℃-240 ℃, 350 ℃-400 ℃ and 700 ℃-750 ℃ temperature heat treatment 3-8 minute respectively, 3-8 minute and 5-10 minute, repeat above-mentioned growth step 10 times, obtain the ferroelectric Bragg reflection rete 4 in upper strata, the ferroelectric Bragg reflection thicknesses of layers in upper strata is similarly 1.5 μ m.Obtaining structure at last is: the ferroelectric Bragg reflection rete 2 BST of 10 cycle BST of strontium titanates substrate 1 lower floor
ZmThe ferroelectric Bragg reflection rete 4 in defect layer 3 10 cycle BST upper strata.
Embodiment 2: the preparation of coupling optical microcavity
The preparation method is identical with embodiment 1, obtains structure at last to be: the ferroelectric Bragg reflection rete 2 BST of 8 cycle BST of strontium titanates substrate 1 lower floor
ZmThe ferroelectric Bragg reflection rete 5 BST in 6 cycle BST of defect layer 3 middle level
ZmThe coupling optical microcavity of the ferroelectric Bragg reflection rete 4 in defect layer 38 cycle BST upper strata.
The thickness of wherein upper and lower two ferroelectric Bragg reflection retes is 1.2 μ m, and the thickness of middle ferroelectric Bragg reflection rete is 0.8 μ m, and the thickness of two defect layers is 50nm.Fig. 3 has provided the reflectance spectrum of embodiment 2 coupling optical microcavitys.
For the operating frequency of explanation optical microcavity can obtain regulation and control by changing technological parameter, we have provided the reflectance spectrum of the single mode optical microcavity of the defect layer that two different whirl coating speed form in Fig. 2.
The ferroelectric Bragg reflection rete of BST of the present invention, be to utilize the polyvinyl pyrrolidone polymers in the solvent from solution, to separate, and near the bottom of gel rete, be condensed into the particulate of nanoscale automatically, behind high temperature sintering, polymer particles decomposes, form hole, be embedded in the film, thereby spontaneous formation obviously can divide in a growth cycle, chemically stable fine and close ferroelectric film and porous ferroelectric film.The film system for preparing through a plurality of growth cycles, from the Free Surface of film to substrate, its refractive index by high/low/high/low/... rule distribute.Whole multilayer film system has just become to have the 1-D photon crystal of forbidden photon band.We have successfully made the Bragg mirror with high reflectance with current collection light, piezoelectricity and acoustooptical effect for the first time in the ferroelectric material of one in the world.Utilize extra electric field, realized the dynamic regulation of ferroelectric base cloth glug mirror reflects band position.
BST of the present invention
ZmIn the defect layer, owing to do not have polyvinylpyrrolidone in the solvent, therefore last formation is fine and close defect layer, introduces single defect layer or a plurality of defect layer in the periodic ferroelectric bragg reflection film of BST multilayer, can effectively make up single mode optical microcavity or coupling optical microcavity.By the thickness of change defect layer, and then regulate microcavity resonance frequency position, thereby obtain the Fabry-Perot resonator cavity of different operating frequency range.
Claims (2)
1. a barium strontium titanate FP optical microcavity comprises two kinds of structures, and a kind of is the single mode optical microcavity, and another kind is the coupling optical microcavity; It is characterized in that:
The single mode optical microcavity comprises: the strontium titanate monocrystal substrate, on substrate by chemical solution method be arranged in order the growth following structure rete:
Substrate BST DBRs BST
ZmBST DBRs;
The coupling optical microcavity comprises: the strontium titanate monocrystal substrate, on substrate by chemical solution method be arranged in order the growth following structure rete:
Substrate BST DBRs BST
ZmBST DBRs BST
ZmBST DBRs;
BST DBRs in the above-mentioned rete is the ferroelectric Bragg reflection rete of FP optical microcavity, and its thickness is 0.5-3 μ m, BST
ZmBe the defect layer of FP optical microcavity, its thickness is 10-100nm.
2. the preparation method of a barium strontium titanate FP optical microcavity, its process is as follows:
The preparation of § A. precursor solution
A). be used to prepare the preparation of the precursor solution of ferroelectric Bragg reflection rete:
Solvent is a glacial acetic acid, and stabilizer is acyl acetone, and thickener is a polyvinylpyrrolidone, and their mol ratio is 25～35: 0.5～1.5: 0.5～1.5;
Solute is strontium acetate, barium acetate, n-butanol titanium, and their mol ratio is (1-x): x: 1, and 0＜x＜1 wherein;
Earlier strontium acetate, barium acetate are dissolved in 40-80 ℃ the glacial acetic acid, treat successively hexanoyl acetone, n-butanol titanium, polyvinylpyrrolidone to be added lasting stirring the in the above-mentioned solution behind the solution cool to room temperature, be adjusted into 0.2-0.8M/L by the concentration of diluting or distill, and filter the precursor solution that obtains clear solution;
B). be used to prepare the preparation of the precursor solution of defect layer:
Be made up of solvent and solute, the solution mixed method is the same, and the concentration that obtains at last by dilution or distillation is the precursor solution of 0.3M/L;
The preparation of § B. optical microcavity rete:
The microcavity rete adopts conventional spin coating coating process, prepares on the strontium titanates substrate successively by above-mentioned film layer structure;
It is characterized in that: the solvent in the step b) is a glacial acetic acid, and stabilizer is acyl acetone, and their mol ratio is 25～35: 0.5～1.5;
Solute is strontium acetate, barium acetate, n-butanol titanium, and their mol ratio is (1-x): x: 1, and 0＜x＜1 wherein.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101382604B (en) * | 2008-10-22 | 2010-06-02 | 中国科学院上海技术物理研究所 | Single-component strontium barium titanate optical micro-cavity and building method |
| CN102229265A (en) * | 2011-04-29 | 2011-11-02 | 中国科学院合肥物质科学研究院 | Barium strontium titanate multilayered film, and preparation method thereof |
| CN110044846A (en) * | 2019-03-29 | 2019-07-23 | 中国科学院上海技术物理研究所 | A kind of low-dimensional materials detecting refractive index sample and measuring method based on optical microcavity |
| CN113156671A (en) * | 2021-04-25 | 2021-07-23 | 南京邮电大学 | Fully-tunable acousto-optic filter device and acousto-optic filter tuning method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100401109C (en) * | 2005-03-18 | 2008-07-09 | 中国科学院上海技术物理研究所 | Strontium-barium titanate reflective membrane and process for preparing same |
| CN100385263C (en) * | 2006-05-26 | 2008-04-30 | 中国科学院上海技术物理研究所 | Strontium barium titanate Bragg mirror and its preparing method |
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2007
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101382604B (en) * | 2008-10-22 | 2010-06-02 | 中国科学院上海技术物理研究所 | Single-component strontium barium titanate optical micro-cavity and building method |
| CN102229265A (en) * | 2011-04-29 | 2011-11-02 | 中国科学院合肥物质科学研究院 | Barium strontium titanate multilayered film, and preparation method thereof |
| CN102229265B (en) * | 2011-04-29 | 2013-09-25 | 中国科学院合肥物质科学研究院 | Barium strontium titanate multilayered film, and preparation method thereof |
| CN110044846A (en) * | 2019-03-29 | 2019-07-23 | 中国科学院上海技术物理研究所 | A kind of low-dimensional materials detecting refractive index sample and measuring method based on optical microcavity |
| CN113156671A (en) * | 2021-04-25 | 2021-07-23 | 南京邮电大学 | Fully-tunable acousto-optic filter device and acousto-optic filter tuning method |
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