CN1010532B - Heat-electricity converter and its making method - Google Patents
Heat-electricity converter and its making methodInfo
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- CN1010532B CN1010532B CN88101713.2A CN88101713A CN1010532B CN 1010532 B CN1010532 B CN 1010532B CN 88101713 A CN88101713 A CN 88101713A CN 1010532 B CN1010532 B CN 1010532B
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- 238000000034 method Methods 0.000 title claims description 16
- 239000000758 substrate Substances 0.000 claims abstract description 52
- 238000010438 heat treatment Methods 0.000 claims abstract description 38
- 238000001704 evaporation Methods 0.000 claims abstract description 27
- 230000008020 evaporation Effects 0.000 claims abstract description 26
- 239000004020 conductor Substances 0.000 claims abstract description 25
- 239000010408 film Substances 0.000 claims description 31
- 239000010409 thin film Substances 0.000 claims description 24
- 238000006243 chemical reaction Methods 0.000 claims description 20
- 238000000605 extraction Methods 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 238000007738 vacuum evaporation Methods 0.000 claims description 6
- 239000000956 alloy Substances 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 239000011810 insulating material Substances 0.000 claims description 4
- 238000003754 machining Methods 0.000 claims description 4
- 229910000889 permalloy Inorganic materials 0.000 claims description 3
- 238000009413 insulation Methods 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 2
- 239000010931 gold Substances 0.000 claims 2
- 230000035945 sensitivity Effects 0.000 abstract description 6
- 238000000576 coating method Methods 0.000 abstract description 3
- 239000011248 coating agent Substances 0.000 abstract 2
- 238000005259 measurement Methods 0.000 description 17
- 239000010445 mica Substances 0.000 description 5
- 229910052618 mica group Inorganic materials 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000001771 vacuum deposition Methods 0.000 description 4
- 229920002799 BoPET Polymers 0.000 description 3
- 239000005041 Mylar™ Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 229910001369 Brass Inorganic materials 0.000 description 2
- 239000010951 brass Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 241000237509 Patinopecten sp. Species 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 235000019994 cava Nutrition 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005555 metalworking Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 235000020637 scallop Nutrition 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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Abstract
The present invention relates to a thermoelectric converter, particularly to a wideband source type multivariate thermoelectric converter. The present invention is composed of a heat-electricity converting element and a high frequency base, wherein the heat-electricity converting element comprises an insulating substrate whose centre has a through hole. One side of the substrate is provided with a resistance heating band which is formed by evaporation coating, two fan-shaped outer conductor electrodes and an annular inner conductor electrode which are connected with the heating band. The other side of the substrate is provided with a multivariate thermocouple which is formed by evaporation coating, an annular inner conductor electrode which is connected with the inner conductor electrode of the other side, and two fan-shaped thermocouple leading-out electrodes. The present invention has the advantages of high precision, high sensitivity and convenient operation.
Description
The present invention relates to the ac voltage measurement sensor in a kind of electronic metering test field, i.e. thermoelectric converter more particularly, relates to a kind of broadband (source formula multi-thermal converter of DC～2GHz).
The thermoelectric converter of measuring alternating voltage has low frequency, high frequency and broadband three classes.At present the low frequency thermoelectric converter that generally adopts is polynary thermocouple form, and they are many to adopt thread line manual welding to form to thermocouple.This structure and technology make and manyly can not evenly distribute to thermocouple, thereby have influenced certainty of measurement.As shown in Figure 1, common low frequency multi-thermal converter mainly is made of a mica substrate 1, polynary thermocouple 5, resistance heating wire's (or claiming heating tape) 2 and heater strip extraction electrode 6.Polynary thermocouple 5 is in series by tens pairs of thermocouples, links to each other with external equipment by exit 3,4.Resistance heating wire 2 and polynary thermocouple 5 are bonded in the positive and negative two sides of mica substrate 1 respectively, and many hot junction 5a to thermocouple 5 are corresponding with resistance heating wire 2 position, and its cold junction 5b is fixed with the material of perfect heat-dissipating.The operating frequency range of this multi-thermal converter is 10KHz～20KHz, when frequency is higher than 20KHz, owing to bigger measure error has been introduced in the influence of the distribution parameter of device own.Be limited to 16mv in the thermoelectric potential output of this thermoelectric converter, thereby influenced the sensitivity of measuring.
About the measuring element of high-frequency ac voltage, it is worth mentioning bolometer voltage, current standard (being called for short Bolovac) that NBS develops.Bolovac mainly uses a kind of film thermistor (seeing the research magazine Vol.72c No.1 of NBS 1968) shown in Fig. 2 A, 2B.Fig. 2 A, 2B are respectively the floor map of Bolovac film thermistor and along the profile of A-A ' direction among Fig. 2 A.By Fig. 2 A as seen, plating has highly purified Pt or Ni on mylar or the mica substrate 1, constitute two film resistor 2a, 2b thus, the inner wire electrode 6a, the 6b that are formed by Au or Ag vacuum evaporation link to each other with the inside and outside both sides of resistance 2a, 2b respectively, and the center of substrate 1 has a hole 12 directly to contact with external measured signal source for this device.This film thermistor is contained in the high frequency seat of a diameter greater than 110 millimeters of φ, inserts a bridge circuit, can measure the voltage of input exchange signal.Use Bolovac to measure the above high frequency voltage of 10MHz, its certainty of measurement is within ± 1%.Fig. 3 simply shows the fundamental diagram of measuring alternating voltage with Bolovac.Among the figure, 10 representatives are connected to the film thermistor of high frequency seat, R
2a, R
2bPromptly corresponding to two film thermistor 2a and 2b, C/2 is the structure capacitive of high frequency seat.Adopt this device to carry out the measurement of alternating voltage, be not to use thermoelectric conversion elements, but calculate according to the AC and DC method of substitution, promptly obtain alternating voltage by the caused variable power of resistance variations of two film thermistors under two kinds of situations of AC and DC.So the method for measurement more complicated, equipment is also huger.In addition, also exist the shortcoming high to the requirement on machining accuracy of film thermistor.Because when measuring, the outer conductor of film thermistor will be coupled by structure capacitive, so limited the frequency range of certainty of measurement, the following 10MHz that is limited to of its operating frequency.When the survey power frequency was low, the structure capacitive of high frequency seat was big inadequately, thereby will introduce bigger error, and for example, when frequency was 1MHz, error was promptly more than 1%.Moreover this device sensitivity is not high enough, can only measure the above voltage of 0.3v, as measuring the alternating voltage below the 0.3v, then will make complicated operating processization, thereby can not satisfy general operational requirement by repeatedly measuring.
In order to measure alternating voltage more conveniently, multiple metallic film thermoelectric conversion elements and semiconductive thin film thermoelectric conversion elements have been developed, the thermoelectric conversion elements of using as the AL-59 standard level meter and the more accurate receiver of ME-642 precision of the production of the upright company of day intrinsic safety is the semiconductive thin film thermoelectric conversion elements, Fig. 4 promptly is the generalized section of the thermoelectric converter that is made of this thermoelectric conversion elements, wherein, label 10 is represented the used thin film thermoelectric inverting element of thermoelectric converter.By Fig. 5 A as seen the concrete structure that Fig. 5 A, 5B and 5C have illustrated above-mentioned thin film thermoelectric inverting element has resistance heating band 2a and 2b, inner wire electrode 11 and outer conductor electrode 6a, 6b on the side surface (front) of mylar substrate 1.They form with method microfabrication such as vacuum evaporation and photoetching, and each resistance heating band is the middle strip that caves inward; The inner wire electrode is circular, and it is positioned at the substrate center and joins with two resistance heating bands; The outer conductor electrode is fan-shaped, and they are positioned at the resistance heating band outside and are attached thereto.Go up formed two couples of thermocouple 5a of semi-conducting material and 5b that useful direct current glow discharge method obtains on the opposite side surface of substrate 1 (reverse side), and the thermocouple extraction electrode 7a, the 7b that form with vacuum vapour deposition.Hot junction 5a ', the 5b ' of two pairs of thermocouples all is positioned at resistance heating band central fovea with the substrate opposite side corresponding place, position of contracting.This thermoelectric converter has a coaxial cavity body 21, when carrying out voltage measurement, measured signal needs to see Fig. 4 by the inner wire 22(in the coaxial cavity 21) be input to inner wire 11 places of connection resistance heating tape, return through resistance heating band 2a, 2b and outer conductor electrode 6a, 6b again.The hot junction of two couples of thermocouple 5a, 5b of substrate opposite side is heated and produces measured signal, draws the alternating voltage numerical value of tested electric current thus easily.
But the current delivery distance of this tabular form structure is big, thereby has limited its high frequency frequency response.When operating frequency reached 1GHz, error promptly reached 5～10%, therefore far can not satisfy the use of high frequency measurement.Another problem that this tabular form structure exists is when detecting other voltage measuring apparatus with it as standard, the essential three-way device that uses a kind of complexity, thereby make not only that operation is cumbersome, device is complicated, but also introduced very important mismatch error and transmission error, influenced the certainty of measurement of tested table.In addition,, not only increased requirement, but also caused the forward and reverse difference of direct current big (＞10 machining accuracy owing to used the resistance heating band of two shapes shown in Fig. 5 A
-3) and the bigger shortcoming of AC-DC conversion error.This film thermocouple element has only two pairs of thermocouples, and thermoelectric potential output maximum only can reach 10mv, so influenced the sensitivity of this thermoelectric converter.
The present invention proposes for the shortcoming that overcomes above-mentioned several ac voltage measurement devices of the prior art.
First purpose of the present invention provides a kind of high sensitivity that all can be measured in the broad frequency range of 2GHz by direct current, the thermoelectric converter of high measurement accuracy;
Second purpose of the present invention provides a kind of being convenient to and processes, is widely used, and can detect the thermoelectric converter of multiple voltage metering device easily.
The 3rd purpose of the present invention provides a kind of method of making above-mentioned thermoelectric converter.
In order to achieve the above object, the invention provides a kind of thermoelectric converter, it comprises the high frequency seat of a thermoelectric conversion elements and this element of placement.Described thermoelectric conversion elements has two location holes that are symmetrical in the center by the edge, the center has insulating material (as mylar or the mica) substrate of a through hole to form, useful temperature coefficient of resistance is little on one side surface of this substrate, two rectangular strip resistance heating bands that the alloy material evaporation that Thomson coefficient is little forms, be positioned at the ring-type inner wire electrode (this electrode links to each other with the ring-type inner wire electrode of substrate opposite side by central through hole) in the resistance heating band inboard and the center via outside, and two fan-shaped outer conductor electrodes that are positioned at the resistance heating band outside and are attached thereto; The aduncate arc thermocouple that the mask evaporation that utilizes on the opposite side surface of substrate is formed with at least 6 pairs of substrate centers of connecting mutually and be symmetrical in respectively is positioned at many fan-shaped thermocouple extraction electrodes that the thermocouple outside is also linked to each other with series connection thermocouple exit respectively with two; Each hot junction to thermocouple all be positioned at the corresponding position of resistance heating band on.Base, two fan-shaped middle pole plates, inner wire, inner wire pin and pressure rings etc. that described high frequency seat is made by the nonmagnetic metal (as electroplating the brass of Au or Ag) of a center break-through are formed.Pressure ring is screwed into base by screw thread, and thermoelectric conversion elements is fixed in the middle of the base.One side of base has the negative input port of a L16 type, opposite side has the hole of a diameter greater than the thin film thermoelectric inverting element, the internal thread that this hole has the voltage supply ring to be screwed at the inner wall section car near the outer end, have the through hole that pole plate connection lead-in wire passes through in supplying on the sidewall in hole, the L16 type feminine gender input port of base opposite side is arrived in the cylindrical hole break-through that the inner bottom in this hole has an aperture to equal thermocouple element outer conductor electrode internal diameter.The inner wire that is used to insert the measured signal source is supported in the through hole at base center by dielectric (as polytetrafluoroethylene).The slightly larger in diameter of inner wire in the diameter of thermoelectric conversion elements central through hole and less than, equal the external diameter of its inner wire electrode.The inner face of inner wire will be placed to such an extent that locate in one plane with the outer face of middle pole plate, this end face has a diameter to equal the screwed hole of thermoelectric conversion elements central through hole, be screwed into or insert for the inner wire pin, the diameter of inner wire pin less than, equal the diameter of central through hole, but one end car has screw thread or for cylindric.The base inner wire reaches good electricity by means of this pin and the inner wire electrode of resistance heating band and is connected.The annular dielectric insulating film of pole plate internal diameter separated middle pole plate and base during the internal diameter of two fan-shaped middle pole plates and internal diameter and the external diameter that external diameter equals fan-shaped thermocouple extraction electrode in the thin film thermoelectric inverting element respectively, an external diameter equaled greater than middle pole plate external diameter, internal diameter.Two thermocouple extraction electrodes of thin film thermoelectric inverting element are crimped on two middle pole plates respectively.Thin film thermoelectric inverting element evaporation has a side of resistance heating band to place towards tested apparent bearing (being the side that base is installed pressure ring).Pressure ring is a cylindrical shape, and its outer sidecar has the screw thread that matches with the base inboard, and interior sidecar has internal thread, uses for changing various forms of connectors, and the probe of the various tables that so just can be easily detect with need links to each other.
Below in conjunction with accompanying drawing and embodiment thermoelectric converter of the present invention is elaborated.
Figure 1A is the floor map of the low frequency thermoelectric converter of prior art;
Figure 1B is that element shown in Figure 1A is along the generalized section of A-A ' direction;
Fig. 2 A is the floor map of Bolovac film thermistor;
Fig. 2 B is that element shown in Fig. 2 A is along the generalized section of A-A ' direction;
Fig. 3 has been the schematic illustration schematic diagram of Bolovac operation principle;
Fig. 4 is the generalized section of another kind of thermoelectric converter in the prior art;
Fig. 5 A, 5B are the floor map on the positive and negative two sides of the used thin film thermoelectric inverting element of thermoelectric converter shown in Figure 4;
Fig. 5 C is the profile along A-A ' direction among Fig. 5 A;
Fig. 6 A is the generalized section of thermoelectric converter of the present invention;
Fig. 6 B is the floor map of middle pole plate shown in Fig. 6 A and dielectric insulating film;
Fig. 7 A, 7B are the floor map on the positive and negative two sides of the thin film thermoelectric inverting element in the thermoelectric converter shown in Fig. 6 A;
Fig. 7 C is the profile along A-A ' direction of Fig. 7 A;
Fig. 8 is the floor map of inner and outer conductor electrode mask plate;
Fig. 9 is the floor map of resistance heating band mask plate;
Figure 10 is the floor map of polynary thermocouple mask plate.
Shown in Fig. 7 A, film thermocouple element of the present invention is made of an insulating material (cloudlike not) substrate 1.Substrate 1 is the disk shape, and there are two location holes 9 that are symmetrical in the disk center at its edge, and there is a through hole 12 at the center.11, two the fan-shaped outer conductor electrode 6a of annular internal conductor electrode that formed by golden vacuum evaporation are being arranged around the front of substrate 1, the through hole 12 and 6b uses the same method and material is formed at outside the substrate.And symmetrically.Be approximately the film resistor 2a of rectangular strip and 2b between inner wire electrode 11 and outer conductor electrode 6a, 6b, and be attached thereto.
Fig. 7 B has illustrated the structure situation of substrate 1 opposite side (reverse side), around the through hole 12 inner wire electrode 11 is arranged, and this electrode links to each other with the inner wire electrode 11 of substrate front surface through central through hole 12.Two fan-shaped thermocouple extraction electrode 7a, 7b are corresponding with positive outer conductor electrode 6a, 6b position, and they are symmetrical in the center of substrate mutually.Between thermocouple extraction electrode 7a, 7b and inner wire electrode 11, form at least 6 pairs of thermocouples that are connected in series mutually with evaporation coating method, the position of the hot junction 5a of thermocouple is corresponding with the position of the resistance heating band of substrate opposite side, the cold junction of thermocouple is symmetrical in the on line that the hot junction is unified into substantially, every pair of thermocouple is aduncate arc, and two-end-point 8a, the 8b of the thermocouple of these a plurality of mutual series connection links to each other with thermocouple extraction electrode 7a, 7b.Each side many to thermocouple be evenly distributed, equal in length, and be symmetrical in mid point on each rectangle resistance heating strip length direction respectively.It is right that a plurality of thermocouples of each side are preferably odd number, so that make the hot junction of a pair of thermocouple in the middle of it be positioned at the corresponding place of mid point with each side resistance heating tape length direction just.
Among Fig. 7, the thermoelectric conversion elements shown in the 7B is by means of the preparation of the mask plate of particular design.Fig. 8,9 is respectively the schematic diagram of inner and outer conductor electrode mask 15, resistance heating band mask 16.Mask 16 has a manhole and two fan-shaped pylones on the position corresponding to inner and outer conductor electrode shown in Fig. 7 A.Mask 16 has an approximate rectangular through hole in the position corresponding to two resistance heating bands shown in Fig. 7 A and inner wire electrode, the two ends of the rectangle of this through hole are aduncate arc, and rectangle length is slightly larger than the internal diameter of fan-shaped outer conductor electrode in the mask plate 15.Fig. 9 is the schematic diagram of polynary thermocouple mask plate 17.Mask 17 has a plurality of elongated arcuate apertures in the corresponding place of a kind of bonding jumper with the thermocouple centering shown in Fig. 7 B, the hole corresponding to the end in thermocouple hot junction along arc slightly extend hole, 0.1～0.2mm left and right sides corresponding to that end of thermocouple cold junction along about horizontal expansion 0.1～0.2mm.Wherein, the distance of two outermost through holes and outer conductor electrode internal circle is about 0.3mm.The distance of two interior side through hole and inner wire electrode excircle also is about 0.3mm.Serves as 180 ° of mask plates that are corresponding to the another kind of bonding jumper of thermocouple of axle upset with the aforementioned mask plate of same shape with two location hole lines, and the arcuate socket on these two masks combines, and can form the many shapes to thermocouple shown in Fig. 7 B.Each mask plate 15～17 all has same location hole in the location hole 9 corresponding positions with the thin film thermoelectric inverting element, is convenient to alignment function man-hour so that add.Mask plate of the present invention can be made by the permalloy film material, and its thickness is 10～15 μ m.
Fig. 6 A is the generalized section of thermoelectric converter of the present invention.Thin film thermoelectric inverting element 10 is crimped in the high frequency seat by pressure ring 25, its inner wire electrode 11 contacts with inner wire 22, two fan-shaped thermocouple extraction electrode 7a, 7b contact with two fan-shaped middle pole plates 24 respectively, inner wire pin 29 passes film thermocouple element 10 and is screwed into or inserts in the hole of inner wire 22 the inners, be connected with a lead on two middle pole plates 24 respectively and lead to outside the high frequency seat, the signal on the thermocouple is delivered to external measurement devices by the through hole 28 of base side.Middle pole plate 24 is separated by dielectric insulating film 23 with base 21, reaches electric insulation.The shape of pole plate 24 and dielectric insulating film 23 is shown in Fig. 6 B in fan-shaped.Measured signal enters inner wire 22 by the input port of base 21, table to be checked inserts by the joint (not drawing among the figure) that is threaded with pressure ring 25, directly contact with the inner wire electrode of thin film thermoelectric inverting element, can carry out the measuring operation of tested table and voltage.
Below in conjunction with embodiments of the invention the manufacturing process of thermoelectric converter of the present invention and used thermoelectric conversion elements thereof is described, so that further specify the present invention.
Is the cleaned thickness of processing that the circular polyimide film substrate of 15～25 μ m is contained on the end template of stainless steel, basal diameter is 30mm, have two location holes and a centre bore on it, also have the location hole identical with substrate on the end template, the location hole diameter is about 1mm.The end template size needs only the size greater than film substrate.
To be placed on by the mask plate 16 that the permalloy film material is made in the substrate to be deposited; make the location hole alignment of mask plate, substrate and end template; and by location hole substrate is fixed in mask plate with securing member; then it is packed into and carry out vacuum evaporation in the vacuum coating equipment; evaporation source in the plating mould machine is the alloy material that temperature coefficient of resistance is little, Thomson coefficient is little (as a card sign indicating number alloy), and evaporation finishes to obtain the rectangular strip resistance heating band of about thick 1000A ° of wide 0.1～0.2mm, the long 8mm left and right sides.The heating tape resistance is controlled by sampling as required.
Take off heating tape mask plate 16 from the substrate of the good resistance heating band of evaporation, substrate turned make its another side be placed on the end template up and put polynary thermocouple mask 17, respectively there are 7 bar shaped thermocouple through holes on the upper and lower both sides of mask plate 17, the through hole arc length is 2.5～3mm, wide is 0.1～0.2mm, and the two through hole spacing is 0.2～0.3mm.The location hole alignment of mask plate 17, substrate, pressuring template is tightened up; put into the vacuum coating equipment that Bi, Sb two evaporation sources are housed then; a kind of evaporation source of vacuum evaporation (Ri) at first; making it is 1～1.5K Ω along the resistance on the thermocouple bar length direction; shut down the back and take out mould; mask plate 17 is tightened up it by after 180 ° of the rotational of two location holes again; this mould is reinstalled the another kind of metal (as Sb) of evaporation in the vacuum coating equipment; making it equally is 1～1.5K Ω along the resistance on the thermocouple bar length direction, has obtained 14 pairs of Bi-Sb thermocouples like this.
Stop to take out mould behind the evaporation, fall mask plate 17 and change electrode mask plate 15 again, diameter of inner wire electrode hole is 3.04mm on it, and the internal diameter in two sector electrode holes is that 7mm, external diameter are that 28mm, two fan-shaped ends are at a distance of about 1.5mm.Pack into after mask plate 15 and substrate, pressuring template alignment tightened up in the vacuum coating equipment, by au evaporating source figure inner wire electrode and thermocouple extraction electrode identical with the shape of through holes of mask plate 15 on evaporation in the substrate of existing polynary thermocouple, its THICKNESS CONTROL is at 5000 ° of A～1 μ m.The one side substrate of the good electrode of evaporation is turned over one of resistance heating band is faced up, put mask plate 15 again, alignment tightens up, with and top same method evaporation on the inner and outer conductor electrode.
Be the thin film thermoelectric inverting element of shaping through the substrate of above-mentioned operation.The element that so obtains is screened by outward appearance, and then be 10 in vacuum degree
4Torr is above, temperature is to place natural cooling after 6 hours continuously in 150 ℃ the vacuum furnace.Thin film thermoelectric inverting element through above-mentioned ageing process is tested, removed the substrate that resistance does not meet the requirements, just obtained 14 yuan of used film thermoelectric converters of thermoelectric converter of the present invention.
Embodiment 2
Be contained on the end template with same location hole processing cleaned mica film substrate with two location holes and a central through hole, basal diameter is 30mm, thickness is 2.5 μ mm, use has the mask plate 15,16,17 of corresponding size, wherein respectively there are 15 bar shaped thermocouple through holes the upper and lower both sides of mask plate 17, clear size of opening is identical with embodiment 1, and the two through hole spacing is about 0.2mm.The scallop hole internal diameter of mask plate 15 is 14mm.
Carry out evaporation with step similarly to Example 1, can obtain 30 yuan of thin film thermoelectric inverting elements that thermoelectric converter of the present invention is used with 30 pairs of thermocouples.This element is placed in the brass base that obtains with metalworking, it is pressed in the high frequency seat by pressure ring, middle pole plate, dielectric insulating film.The size of base, pressure ring, middle pole plate, dielectric insulating film is all corresponding with thermoelectric conversion elements.The thermoelectric converter that obtains thus can be measured in the frequency range of 2GHz at direct current, and certainty of measurement is 10 when 30MHz
-6, be 0.2% during 1GHz, during 2GHz still＜1%.Its heat outputting electromotive force is 80mv.
Thermoelectric converter of the present invention has overcome in the prior art that several ac voltage measurement devices can not accurately be measured, measure error is big, sensitivity is low, use shortcomings such as inconvenience and thermoelectric conversion elements processing technology complexity on broadband.
Thermoelectric converter of the present invention is the thermocouple form, does not need the coupling of structure capacitive and external circuit, substitutes but directly carry out AC and DC, so can accurately measure in the frequency range of DC～2GHz.Owing to used rectangle heating tape and polynary thermocouple, so the forward and reverse difference of its direct current is less than 10
-4In addition, reduced the current delivery distance owing to there is the thin film thermoelectric inverting element of via at the use center, so the certainty of measurement height of source of the present invention formula thermoelectric converter, for example, certainty of measurement is 10 when low frequency (below the 30MHz)
-6, (certainty of measurement is 0.2% during 30MHz～1GHz) at high frequency.Owing to use polynary thermocouple, so thermoelectric converter of the present invention is highly sensitive, its thermoelectric potential output can reach 60～100mv.In addition, therefore easy to use when detecting A.C. voltmeter because thermoelectric converter of the present invention uses the thin film thermoelectric inverting element and the pressure ring that can be connected tested table easily with central through hole, and be widely used.The method of thermoelectric conversion elements that the present invention is used to make thermoelectric converter is simple: only need to utilize a mask plate that has required shape through hole to carry out the screen type evaporation.Thereby overcome the shortcoming of fine machining methods such as manual welding method or first evaporation, back photoetching, can produce the metallic film thermoelectric conversion elements of micron order line thickness expediently.
Claims (11)
1, a kind of thermoelectric converter, it comprises the high frequency seat of a thin film thermoelectric inverting element and this element of placement; The circular-base that described thermoelectric conversion elements is made by an insulating material is formed, the resistance heating band that the alloy material evaporation that the useful resistance coefficient of one side is little, Thomson coefficient is little of described substrate forms, and the annular internal conductor electrode that links to each other with the resistance heating band and two fan-shaped outer conductor electrodes, metallic film thermocouple and two that link to each other with the thermocouple exit fan-shaped thermocouple extraction electrodes that the opposite side of substrate has evaporation to form; Described high frequency seat is by the nonmagnetic metal system base of a center break-through, pole plate during two nonmagnetic metal systems are fan-shaped, car neutralizes ring by externally threaded nonmagnetic metal and a dielectric insulating film is formed, one side of described base has the negative input port of L16 type, opposite side has the hole of diameter greater than the thin film thermoelectric inverting element, the internal thread that the inner wall section car of this outer end of hole has the voltage supply ring to be screwed into, inner bottom has an aperture to equal the cylindrical hole break-through of thermoelectric conversion elements outer conductor electrode internal diameter to the base opposite side, one through hole is arranged on the sidewall in this hole, for in pole plate connect lead-in wire and pass through, have one to be supported on nonmagnetic metal system inner wire in the central through hole in the base by dielectric; It is characterized in that:
Basal edge at described thin film thermoelectric inverting element has two location holes that are symmetrical in the center, and the heart has a through hole therein.
2, a kind of thermoelectric converter as claimed in claim 1 is characterized in that: described substrate one side is formed with 6 pairs of aduncate thermocouples of connecting mutually and being symmetrical in the substrate center respectively at least.
3, a kind of thermoelectric converter as claimed in claim 2 is characterized in that: this is rectangle described resistance heating tape base.
4, a kind of thermoelectric converter as claimed in claim 3 is characterized in that: described many hot junctions to thermocouple all be positioned at the corresponding position of resistance heating band on.
5, a kind of thermoelectric converter as claimed in claim 4 is characterized in that: described substrate is formed with a side of thermocouple, and an annular internal conductor electrode is arranged in the centre, and this electrode links to each other with the inner wire electrode of substrate opposite side by the substrate central through hole.
6, a kind of thermoelectric converter as claimed in claim 5, it is characterized in that: the inner face of the inner wire in the described base is in a plane with the outer face that places the pole plate in base one side opening, and has a diameter to equal the screwed hole of described thin film thermoelectric inverting element central through hole diameter on this end face.
7, a kind of thermoelectric converter as claimed in claim 6 is characterized in that: described thin film thermoelectric inverting element and the inner wire inner wire pin by a nonmagnetic metal system reaches and is electrically connected.
8, a kind of thermoelectric converter as claimed in claim 7 is characterized in that: there is the internal thread of using for the connector of changing tested table described pressure ring inboard.
9, a kind of manufacture method of thermoelectric converter, it comprises the following steps:
(1) produces base, pressure ring, middle pole plate, dielectric insulating film, inner wire, inner wire pin and the circular-base made of insulating material of high frequency seat with machining process;
(2) a rectangular strip resistance heating band in a side vacuum evaporation of cleaned substrate;
(3) a kind of bonding jumper of at least 6 pairs of thermocouples on substrate opposite side evaporation;
(4) at the another kind of bonding jumper of this side evaporation thermocouple of substrate;
(5) steam the inner wire electrode and the thermocouple extraction electrode of plated with gold in this side of substrate;
(6) there is a side evaporation of heating tape to form the inner and outer conductor electrode of gold in substrate;
(7) side that thermocouple will be arranged through the substrate evaporation of (2)～(6) operation is characterized in that towards upcountry being screwed into base by pressure ring and being installed in the high frequency seat:
Substrate two thermocouple extraction electrodes correspond respectively to pole plate in two, make it under the pole plate during dielectric insulating film is placed on and the base insulation, and the inner wire pin passes the thin-film component central through hole and enters in the screwed hole on the inner wire end face.
10, a kind of manufacture method of thermoelectric converter as claimed in claim 9 is characterized in that: the evaporation step of wherein (2)～(6) utilizes the mask plate that is processed with the required form through hole above a kind of to do to cover to finish.
11, a kind of manufacture method of thermoelectric converter as claimed in claim 9 is characterized in that: described mask plate prepares with permalloy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN88101713.2A CN1010532B (en) | 1988-04-01 | 1988-04-01 | Heat-electricity converter and its making method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN88101713.2A CN1010532B (en) | 1988-04-01 | 1988-04-01 | Heat-electricity converter and its making method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1036299A CN1036299A (en) | 1989-10-11 |
| CN1010532B true CN1010532B (en) | 1990-11-21 |
Family
ID=4831855
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN88101713.2A Expired CN1010532B (en) | 1988-04-01 | 1988-04-01 | Heat-electricity converter and its making method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1010532B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101515002B (en) * | 2009-03-18 | 2011-01-05 | 中国计量科学研究院 | Thin film type thermoelectric converter and a measuring method |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005036768A1 (en) * | 2005-06-23 | 2006-12-28 | Webasto Ag | Heating device e.g. air heater, for motor vehicle, has thermoelectric device with leg that with end regions attached at contact section and heat exchanger by layers, where exchanger and wall are made of ceramic having high heat conductivity |
| CN111162050B (en) * | 2019-12-31 | 2021-09-07 | 中国电子科技集团公司第十三研究所 | Micro-coaxial bonding interface |
-
1988
- 1988-04-01 CN CN88101713.2A patent/CN1010532B/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101515002B (en) * | 2009-03-18 | 2011-01-05 | 中国计量科学研究院 | Thin film type thermoelectric converter and a measuring method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1036299A (en) | 1989-10-11 |
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