CN101044378A - Vibration detecting sensor and pressure sensitive switch using cable-shaped piezo-electric element - Google Patents
Vibration detecting sensor and pressure sensitive switch using cable-shaped piezo-electric element Download PDFInfo
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- CN101044378A CN101044378A CNA2005800360218A CN200580036021A CN101044378A CN 101044378 A CN101044378 A CN 101044378A CN A2005800360218 A CNA2005800360218 A CN A2005800360218A CN 200580036021 A CN200580036021 A CN 200580036021A CN 101044378 A CN101044378 A CN 101044378A
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Abstract
The present invention provides a vibration detecting sensor applicable to various devices and fields which require accurate vibration detection and measurement. A vibration detecting sensor (100) is provided with a board (2), and a cable-shaped piezoelectric element (1) directly connected at least at one end to the board (2). The cable-shaped piezoelectric element (1) is provided with a core electrode (3), a piezoelectric substance (5) arranged on the circumference of the core electrode, an outer electrode (7) arranged on the circumference of the piezoelectric substance and a coat layer (9) arranged on the circumference of the outer electrode, along the diameter direction.
Description
Technical field
The present invention relates to use the vibration detecting sensor of cable-shaped piezoelectric element, and relate to pressure sensitive switch.
Background technology
So far, various vibrating detectors are known as seismoscope or the voltage sensitive sensor that is used for earthquake.In these vibrating detectors, adopt the vibrating detector of predetermined piezoelectric element to be widely known by the people.
For example, patent documentation 1 has been described a kind of vibration transducer, has in swingable mode to be arranged on piezoelectric element on the printed substrates vertically.
When standing external vibration, piezoelectric element is out of shape, and calculates earthquake strength from vertical level of voltage, and this voltage is to produce between two electrodes that are installed on the piezoelectric element outer peripheral face.
For example, the known switch (for example, seeing patent document 2) that can be used as various application scenarios of the micro switch shown in Figure 51.
When pressing force was applied on the bar 1002 of micro switch 1001, this bar 1002 arrived the position of buttons 1003.If the pressing force that is applied on the button 3 by bar 1002 is enough to actuation button 1003, then removable terminal 1004 contact contact 1005, starting switches thus.
And then various vibrating detectors have been known as the seismoscope that is used for earthquake or have been used for the voltage sensitive sensor of electric equipment etc.In these vibrating detectors, use the vibrating detector of predetermined piezoelectric element to be widely known by the people.
For example, patent documentation 3 has been described a kind of seismoscope, is provided with coaxial piezoelectric element spirally, and the one end is fixed and its other end setting has the vibration induction element,
When the power of bearing from exterior object, such as shrink/expanded, bending etc., the piezoelectric element distortion is to produce predetermined voltage (piezoelectric effect) thus.Especially, this piezoelectric element detects the acceleration of the effect of the power that comes from this object, and responds this acceleration generation output.By utilizing this feature, piezoelectric element can be used for seismoscope, or is used to be used for detecting the sensor (as pressure-active element) of predetermined stress or pressure or is used for responding the switch that detects and be activated/stop.
Use the pressure-active element of this existing piezoelectric element to have rebound resilience, and can be placed on the precalculated position regularly and can be out of shape simultaneously with required shape.The method that, screw thread bonding by using, flexible member, resin etc. mechanically are fixed to element the installation position is used to fix.
Patent documentation 1:JP-A-2001-108516
Patent documentation 2:JP-A-2000-215751
Patent documentation 3:JP-A-11-064096
Patent documentation 4:JP-A-11-160169
Summary of the invention
Yet in the vibration sensing sensor, piezoelectric element erectly is arranged on the printed substrates, or piezoelectric element hangs from printed substrates.With this structure, the degree of freedom of sensor installation direction is restricted.And then, in order to keep predetermined height, must guarantee and highly corresponding space.And the detection degree of accuracy aspect of vibration has problems in the horizontal direction.
In the micro switch of in patent documentation 2, describing, make the enough pushing forces of removable terminal 1004 and contact point 1005 contact needs come pressing lever 1002 and button 1003, and need enough stroke S to come catch bar 1002.If it is very little to be used for the pressure of catch bar 1002 and button 1003, or it is very short to be used for the stroke S of catch bar 1002, and then switch can not be activated.
And, because the pressure sensitivity element itself has screen resilience,, even when element has been fixed and has been deformed into required form, also be so (remaining recovery of shape) so element has the performance of attempting to reply its original-shape.Therefore, when from the external world when element applies predetermined power, the output that distortion produced (proofreading and correct output) that can produce the output that obtains from recovery of shape and cause owing to the effect of power.The output that comes from recovery of shape presents different value according to shape of being out of shape or fixing means, and the problem that therefore exists is that the output of element is fixedly laid in acquisition that can not be stable.
The invention provides a kind of vibration detecting sensor, can detect vibration, guarantee the degree of freedom of installing simultaneously with high degree of accuracy.
The length of the strong and weak or promotion stroke of this pushing force the present invention is directed to above defective and designs, and the purpose of this invention is to provide a kind of pressure sensitive switch, no matter can both respond the acceleration that applies pushing force and come output signal.
The present invention also provides a kind of cable-shaped piezoelectric element, can obtain stable output, realizes required shape simultaneously, and a kind of vibration detecting sensor that adopts this element is provided.
The means of dealing with problems
Vibration detecting sensor of the present invention comprises, substrate and cable-shaped piezoelectric element, and at least one end of itself and this substrate is linked in sequence.Cable-shaped piezoelectric element has core electrode in the radial direction at it; Piezoelectric member, it is around the core electrode setting; External electrode, it is around the piezoelectric element setting; And clad, it is around the external electrode setting.
Cable-shaped piezoelectric element forms has sweep, and weights is affixed at least a portion of piezoelectric element.
Cable-shaped piezoelectric element bending, so that become general toroidal in the plane of the principal plane that is roughly parallel to substrate, and weights is affixed to the open end of piezoelectric element, it is relative that this open end and piezoelectric element are fixed to a suprabasil end.
Cable-shaped piezoelectric element can be crooked, so that become circular in the plane that is roughly parallel to the substrate principal plane, and weights is affixed to the open end of piezoelectric element, and it is relative that this open end and piezoelectric element are fixed to a suprabasil end.
Cable-shaped piezoelectric element is connected with substrate, and the two ends of cable-shaped piezoelectric element are configured to almost parallel each other simultaneously, and the center section between the two ends forms circular.
Cable-shaped piezoelectric element forms coil shape and is provided with roughly to meet at right angles with substrate.Simultaneously, cable-shaped piezoelectric element forms coil shape, and stretches out from substrate, so that the diameter of coil increases with the increase of distance substrate distance.
Simultaneously, can in described substrate, form through hole, cable-shaped piezoelectric element is connected with substrate, so that this cable-shaped piezoelectric element is roughly parallel with the principal plane of substrate in through hole, and a weight can be fastened to the open end of cable-shaped piezoelectric element, and it is opposite that this open end and cable-shaped piezoelectric element are fixed to a suprabasil end.Interchangeable, cable-shaped piezoelectric element is bent into roughly U-shaped, and cable-shaped piezoelectric element two ends all are fixed in the substrate.
Substrate and cable-shaped piezoelectric element can be contained in the predetermined outer cover.
Cable-shaped piezoelectric element can be connected with substrate, so that cable-shaped piezoelectric element hangs from the lower surface of substrate, so that stretch out downwards.
Cable-shaped piezoelectric element can be endowed shape retention properties.Piezoelectric member comprises resin and piezoelectric ceramics.
Vibration detecting sensor of the present invention can be used for seismoscope, fluid-velocity survey instrument, electronic carriage for children, electric wheelchair etc.
The invention still further relates to a kind of pressure sensitive switch, comprising: the piezoelectricity cable, it has the piezoelectric element structure that is formed by piezoelectric ceramics fine particle and resin-based materials.At least a portion of piezoelectricity cable is outstanding from carrying plane, and this outshot is bent into sweep, and control circuit is connected with the bottom part of piezoelectricity cable.
Feature of the present invention also is, between the sweep of piezoelectricity cable and carrying plane the gap is set.
Feature of the present invention is that also the sweep of piezoelectricity cable is with single curvature bending.
Feature of the present invention also is, further comprises: the stationary installation that is used for fixing piezoelectricity cable exit.
A kind of cable-shaped piezoelectric element of the present invention has shape retention properties, and comprises at least along its radial direction: core electrode; Piezoelectric member, it is around the core electrode setting; External electrode, it is around the piezoelectric element setting; And clad, it is around the external electrode setting.。
A kind of cable-shaped piezoelectric element of the present invention comprises along its radial direction: core electrode; Piezoelectric member, it is around the core electrode setting; External electrode, it is around the piezoelectric element setting; And clad, it is around the external electrode setting.This element further comprises the shape retaining member, and it is being inserted between external electrode and the clad in the radial direction, and cable-shaped piezoelectric element is remained reservation shape.
The shape retaining member is at least a kind of in flat spring and the volute spring.
A kind of cable-shaped piezoelectric element of the present invention comprises in its radial direction: core electrode; Piezoelectric member, it is around the core electrode setting; External electrode, it is around the piezoelectric element setting; And clad, it is around the external electrode setting.Core electrode has the shape retention properties that is used for cable-shaped piezoelectric element is remained reservation shape.Core electrode is formed by marmem.
A kind of cable-shaped piezoelectric element of the present invention comprises along its radial direction: core electrode; Piezoelectric member, it is around the core electrode setting; External electrode, it is around the piezoelectric element setting; And clad, it is around the external electrode setting.Clad has the shape retention properties that is used for cable-shaped piezoelectric element is remained reservation shape.Clad is formed by heat-shrinkable tube.
In cable-shaped piezoelectric element, piezoelectric member is formed by resin and piezoelectric ceramics.Reservation shape is at least a in coiled type, circle, section shape, corrugated and the whirlpool shape.
A kind of vibration detecting sensor can combine above-mentioned cable-shaped piezoelectric element and control circuit and make, and this control circuit is used to detect the signal output from cable-shaped piezoelectric element.
A kind of crime protective fence or nurse call station switch can be made by above-mentioned cable-shaped piezoelectric element.
Advantage of the present invention
Vibration detecting sensor of the present invention uses cable-shaped piezoelectric element predetermined, that can adopt different shape.Therefore, can guarantee not to be subjected to restrictions such as installation direction, installation site, installing space and have high-freedom degree.As a result, can strengthen the design freedom of the equipment that uses this sensor.And vibration detecting sensor of the present invention needn't be specified direction of vibration arduously in advance, just can carry out the detection of pinpoint accuracy.
According to the present invention, at least a portion of the piezoelectricity cable that stretches out from carrying plane is bent.Thereby the mechanical bend amount of piezoelectric member increases.By to this sweep imposed stress, in addition in pushing force very weak or stroke very in short-term, the fluctuation that also can respond pushing force or promote length of stroke comes with high-sensitivity detection can to export the signal of response pushing force acceleration to the pushing force that is acted on.
Between the carrying plane of the sweep of piezoelectricity cable and piezoelectricity cable, the gap is set, makes that thus the displacement in the piezoelectricity cable that obtains broadens in pushing course.Thus, can guarantee wide sensing range.
And the sweep of piezoelectricity cable can guarantee as one man to strengthen sensitivity thus with identical curvature bending on whole sweep.
According to the present invention, provide a kind of and can stably guarantee required form and produce the cable-shaped piezoelectric element of stable output, a kind of vibration detecting sensor that uses this cable-shaped piezoelectric element, and other products that use this cable-shaped piezoelectric sensor.
Description of drawings
Fig. 1 is the view of example cable shape piezoelectric element, uses volute spring as the shape retaining member.
Fig. 2 is the view of example cable shape piezoelectric element, uses flat spring as the shape retaining member.
Fig. 3 is the view of example cable shape piezoelectric element, and wherein core electrode and/or clad are endowed shape retention properties.
Fig. 4 is the synoptic diagram of the vibration detecting sensor system of the cable-shaped piezoelectric element of use.
Fig. 5 is the vibration detecting sensor view according to first embodiment of the invention.
Fig. 6 is the vibration detecting sensor view according to second embodiment of the invention.
Fig. 7 is the vibration detecting sensor view according to third embodiment of the invention.
Fig. 8 is the vibration detecting sensor view according to fourth embodiment of the invention.
Fig. 9 is the vibration detecting sensor view according to fifth embodiment of the invention.
Figure 10 is the vibration detecting sensor view according to sixth embodiment of the invention.
Figure 11 is the vibration detecting sensor view according to seventh embodiment of the invention.
Figure 12 is the vibration detecting sensor view according to eighth embodiment of the invention.
Figure 13 is the vibration detecting sensor view according to ninth embodiment of the invention.
Figure 14 is the vibration detecting sensor view according to tenth embodiment of the invention.
Figure 15 is the vibration detecting sensor view according to eleventh embodiment of the invention.
Figure 16 is the vibration detecting sensor view according to twelveth embodiment of the invention.
Figure 17 is the vibration detecting sensor view according to thriteenth embodiment of the invention.
Figure 18 is for being applied to vibration detecting sensor of the present invention on the exemplary application view of flow rate measuring device.
Figure 19 is for being applied to vibration detecting sensor of the present invention on the exemplary application view of motor driven carriage for children.
Figure 20 is the view of the example of the cable-shaped piezoelectric element of process end processing.
Figure 21 is the view that is bearing in the various examples of suprabasil keeper, and this keeper is used to support cable-shaped piezoelectric element.
Figure 22 is the view that is used for cable-shaped piezoelectric element is connected to the method for substrate.
Figure 23 is the view that is used for cable-shaped piezoelectric element is connected to the other method of substrate.
Figure 24 is applied to the load on the cable-shaped piezoelectric element and the chart of sensor output characteristics.
Figure 25 is the pressure sensitive switch viewgraph of cross-section according to fourteenth embodiment of the invention.
Figure 26 is the skeleton view of the pressure sensitive switch that shows among Figure 25.
Figure 27 is the skeleton view that is used to describe the piezoelectricity cable.
Figure 28 is the cross-sectional perspective view that is used for the piezoelectric element structure.
Figure 29 is applied to the load on the pressure sensitive switch and the chart of signal output characteristics.
Figure 30 is the cross sectional view of pressure sensitive switch modification of the present invention.
Figure 31 is a pressure sensitive switch skeleton view shown in Figure 30.
Figure 32 is the cross sectional view of another modification of pressure sensitive switch of the present invention.
Figure 33 is the cross sectional view of the another modification of pressure sensitive switch of the present invention.
Figure 34 is the pressure sensitive switch of the present invention cross sectional view of a modification again.
Figure 35 is the pressure sensitive switch of the present invention cross sectional view of a modification again.
Figure 36 is the pressure sensitive switch of the present invention cross sectional view of a modification again.
Figure 37 is the skeleton view of the pressure sensitive switch of Figure 36 demonstration.
Figure 38 is the skeleton view of the modification of pressure sensitive switch of the present invention.
Figure 39 is the skeleton view of another modification of pressure sensitive switch of the present invention.
Figure 40 is the side view at main interface of the another modification of pressure sensitive switch of the present invention.
Figure 41 is an example cable shape piezoelectric element view of the present invention, uses volute spring as the shape retaining member.
Figure 42 is an example cable shape piezoelectric element view of the present invention, uses flat spring as the shape retaining member.
Figure 43 is the view of example cable shape piezoelectric element of the present invention, and wherein core electrode and/or clad are endowed shape retention properties.
Figure 44 is deformed into different shape for cable-shaped piezoelectric element of the present invention, and be used for the view of the example of vibration detecting sensor, wherein (a) is the example of coiled type piezoelectric element, (b) be the example of annular piezoelectric element, (c) be the example of circular-arc piezoelectric element, (d) be the example of corrugated piezoelectric element, and (e) be the example of spiral fashion piezoelectric element.
Figure 45 is for using the vibration detecting sensor system schematic of cable-shaped piezoelectric element of the present invention.
Figure 46 is for being applied to cable-shaped piezoelectric element of the present invention on the view of the example at crime protective fence top.
Figure 47 is for being applied to cable-shaped piezoelectric element of the present invention on the view of example of the decorative parts of crime protective fence.
Figure 48 is for being applied to cable-shaped piezoelectric element of the present invention on the view of the example of nurse call station switch.
Figure 49 is for being applied to cable-shaped piezoelectric element of the present invention on the view of another example of nurse call station switch.
Figure 50 is applied to the load on the cable-shaped piezoelectric element and the figure of sensor output characteristics.
Figure 51 represents the synoptic diagram of exemplary micro switch for summary.
The reference number explanation
1 cable-shaped piezoelectric element
2 substrates
3 core electrodes
4 weights
5 composite piezoelectric layers
7 external electrodes
9 clads
11 volute springs
13 flat springs
15 control circuits
100,110,120,130,140,150,160,170,170,190,200,210,220 vibration detecting sensors
1010 pressure sensitive switch
1012 carrying planes
1013 knees
1014 control circuits
1016 gaps
1020 piezoelectricity cables
The structure of 1023 piezoelectric elements
1025 piezoelectric ceramics fine particles
1026 resin-based materials
2001 cable-shaped piezoelectric elements
2003 core electrodes
2005 composite piezoelectric layers
2007 external electrodes
2009 clads
2011 volute springs
2012 flat springs
2015 control circuits
2017 vibration detecting sensors
2019 crime protective fences
2021 crime protective fences
2027 nurse call station switches
Embodiment
With reference to the accompanying drawings, below embodiments of the invention are described.In the description to embodiment, these component labellings that have same structure and can produce identical work effect are identical reference number, and omission is to their repetition of explanation.
(first embodiment)
Fig. 5 has shown according to vibration detecting sensor of the present invention.The vibration detecting sensor 100 of this embodiment is formed by substrate 2 and the cable-shaped piezoelectric element 1 that is installed in the substrate 2.At least one end (stiff end) of cable-shaped piezoelectric sensor 1 directly is connected with substrate 2, and its other end (open end) is open.
Cable-shaped piezoelectric element 1 has structure as shown in Figure 1.Cable-shaped piezoelectric element 1 has the core electrode (central electrode) 3 of the radial center of placing.The piezoelectric element material of being made by piezoelectric ceramics (composite piezoelectric layer) 5 is arranged on around the core electrode 3, to constitute piezoelectric member thus.And external electrode 7 is arranged on around the composite piezoelectric layer 5, and the volute spring 11 with shape retention properties is arranged on around the external electrode 7.The most peripheral of volute spring 11 is coated with clad 9, as PVC (Polyvinylchloride) etc., to constitute cable-shaped piezoelectric element 1 thus.Ascribe volute spring 11 to, cable-shaped piezoelectric element 1 has excellent shape retention properties, and the distortion acceleration that can respond generation when cable-shaped piezoelectric element 1 is out of shape forms output signal.For example, the sintering fine particle of lead titanates or lead titanate-zirconate, or, all can be used as piezoelectric ceramics as the sintering fine particle of leadless piezoelectric ceramicss such as sodium niobate.The cable-shaped piezoelectric element 1 of present embodiment has flexible as the piezoelectricity cable, and can be deformed into Any shape thus.This cable also has shape retention properties, therefore, can be out of shape and remain different shape.In view of this, when as the situation of first embodiment under, cable-shaped piezoelectric element 1 is not made amendment and when using point-blank, shape retention properties is not necessary, and volute spring 11 neither be requisite thus.
In cable-shaped piezoelectric element 1, by the special exploitation of the applicant, can be used for temperature and have stable on heating resin-based materials up to 120 ℃, be used for composite piezoelectric layer 5.Cable-shaped piezoelectric element 1 can use (120 ℃ or still less) in certain temperature range, this temperature range is higher than the maximum operating temperature of typical polymers piezoelectric element material in the correlation technique (single shaft elongation polyvinylidene fluoride) or piezoelectric element material (the piezoelectric element material that is formed by chlorbutadiene fine particle and piezoelectric ceramics fine particle), promptly 90 ℃.Composite piezoelectric layer 5 is made by having flexible resin and piezoelectric ceramics, and it forms by using the dangler formed by coiled type metal center electrode and film like external electrode, and this composite piezoelectric layer 5 has identical with common vinyl cable flexible.
The composite component that is formed by resin-based materials and 10 μ m or littler piezoelectric ceramics fine particle forms composite piezoelectric layer 5.The vibration detection performance realizes by piezoelectric ceramics, and flexiblely realizes by resin.Composite piezoelectric layer 5 uses the chloro tygon as resin-based materials, realizes high thermotolerance (120 ℃), flexible and simple manufacture process that can be easily deformable thus, does not need crosslinked.
If composite piezoelectric layer 5 keeps the state of its shaping, so the cable-shaped piezoelectric element 1 that obtains does not have piezoelectric property.Thereby, the high dc voltage of every millimeter volt magnitude need be applied to the processing (polarization is handled) on the composite piezoelectric layer 5, to give piezoelectric property to composite piezoelectric layer 5 thus.When existing in the composite piezoelectric layer 5 such as the such trickle defective of crackle, be tending towards producing discharge at fault location, make electrode short circuit probably.Thereby, can not on the composite piezoelectric layer, apply enough polarizing voltages.Yet, in the present invention, use auxiliary electrode to set up unique polarization step, this auxiliary electrode can closely contact with composite piezoelectric layer 5 with given length, consequently can detect and avoid defective, to implement stable polarization thus.Thus, it is long or longer that the composite piezoelectric layer also can be fabricated onto tens of rice.
In cable-shaped piezoelectric element 1, the coiled type central electrode is used for core electrode 3, and film like electrode (the three ironed layer by layer films that are made of aluminium, polyethylene terephthalate, aluminium) is used for external electrode 7.Thus, guarantee bonding between composite piezoelectric layer 5 and the electrode, thereby help the connection of outside lead.Therefore, flexible cable-shaped mounting structure becomes possibility.
In cable-shaped piezoelectric element 1 of the present invention, volute spring 11 is around the outside of external electrode 7.Volute spring 11 upwards is inserted between external electrode 7 and the clad 9 in cable-shaped piezoelectric element 1 footpath.This volute spring 11 is formed for cable-shaped piezoelectric element 1 is remained the shape retaining member of reservation shape.
Although the following tinsel that provides can be used as the material of volute spring 11, material is not limited to this tinsel.
WC (80C) (hard steel wire); SWPA, SWPB (musical instrument line);
SWOSM-B (silicomanganese steel wire); SWOSC-V (silicochromium steel wire);
SUS304-WPB, SUS316-WPA (stainless steel wire);
BsW (brass wire); PBW (phosphor bronze wire).
As example, above-mentioned cable-shaped piezoelectric element 1 is by following process manufacturing.In outermost, by the roll-in technology, polychlorovinyl sheet material and by volume account for 40% to 70% piezoelectric ceramics (being lead zirconate titanate in the present embodiment) fine particle and as one man be mixed into sheet.After this sheet material slightly was divided into particle, these particles were extruded continuously with core electrode 3, to form composite piezoelectric layer 5 (the piezoelectric element material before the experience polarization is handled) thus.Auxiliary electrode contacts with the periphery of composite piezoelectric layer, and high voltage is applied between auxiliary electrode and the core electrode 3, realizes the polarization processing thus.External electrode 7 is subsequently on the composite piezoelectric layer.After volute spring 11 was on external electrode 7, clad 9 was extruded continuously, coated external electrode 7 and volute spring 11 simultaneously.Like this cable-shaped piezoelectric element of making 1 even can under linear state shown in Figure 5, use, but of being treated in the different shape shown in Fig. 7 waits at cable-shaped piezoelectric element is particularly preferred.
When the piezoelectric ceramics fine particle adds in the Polyvinylchloride, preferably, in advance the piezoelectric ceramics fine particle is immersed in the titanium crosslinkers aqueous solution and the piezoelectric ceramics fine particle of immersion like this is carried out drying.By this processing, hydrophilic group and hydrophobic group on the surface applied of piezoelectric ceramics fine particle, the both is included in the titanium crosslinkers.Hydrophilic group prevents that the piezoelectric ceramics fine particle from condensing, and hydrophobic group increases the wettability of Polyvinylchloride and the wettability of piezoelectric ceramics fine particle.As a result, a large amount of piezoelectric ceramics fine particles can be added in the Polyvinylchloride equably, and maximum reaches and accounts for 70% of volume.Replacement is immersed the piezoelectric ceramics fine particle in the titanium crosslinkers aqueous solution, and adds titanium crosslinkers when roll-in Polyvinylchloride and piezoelectric ceramics fine particle, can obtain identical effect.This is handled superior part and is, does not need to be used for the piezoelectric ceramics fine particle is immersed the special processing of titanium crosslinkers aqueous solution.As above, Polyvinylchloride also can play the effect of the binder resin that uses when mixing the piezoelectric ceramics fine particle.
In the present embodiment, the single metal wire that is formed by copper base metal is used for core electrode 3.And then band electrode is as external electrode 7, and external electrode 7 parcels form this band electrode around piezoelectric element material 5 by the aluminum metal film is sticked on the polymeric layer.Polyethylene terephthalate (PET) is as this polymeric layer.Owing to can manufacture and cheapness commercial by the aluminum metal film being sticked to the last electrode that forms of PET, so kind electrode can preferably be used as external electrode 7.When this electrode was connected with external control circuit etc., electrode can connect by the mode of for example joint filling (caulking) or eyelet (eyelet).Also can adopt the structure that an independent wire or metal braided wire are carried out soldering around the aluminium film of external electrode 7, with in use when control circuit etc. is connected.Owing to can carry out soldering, so it is very effective to work together.For the electric noise of cable-shaped piezoelectric element 1 from external environment condition shielded, external electrode 7 is wrapped on the composite piezoelectric layer by the coiled type of expectation, so that they partly overlap each other.
Elastomeric material also can be used as clad 9, and elastomeric material is being better than Polyvinylchloride aspect thermal insulation and the water proofing property.In order to make composite piezoelectric layer 5 be easy to be out of shape by the thrust of the object that contacts with composite piezoelectric layer 5, the elastomeric material of preferably softer and easier deflection than composite piezoelectric layer 5.Select to be installed in assembly on the vehicle based on the consideration of thermotolerance and low temperature resistance, and wish that the assembly of selecting is that flexible reduction is less between-30 ℃ to 85 ℃.For example, preferably use ethylene-propylene-diene rubber (EPDM), chloroprene rubber (CR), butyl rubber (IIR), silicon rubber (Si), thermoplastic plastics elastic bodies etc. are as elastomeric material.By this structure, it is 5mm that the minimum curvature of cable-shaped piezoelectric element 1 can be reduced to radius.Compare with vinyl chloride, these materials provide superior especially thermotolerance and water proofing property.
As mentioned above, the composite piezoelectric member of cable-shaped piezoelectric element 1 had not only had the flexible of Polyvinylchloride but also had had the high-fire resistance of piezoelectric ceramics.Thus, the situation that the sensitivity that at high temperature can take place as the piezoelectric sensor of piezoelectric member as the middle use polyvinylidene fluoride of correlation technique reduces can not take place in cable-shaped piezoelectric element 2001.And then except having superior high-fire resistance, cable-shaped piezoelectric element 1 does not need vulcanizing treatment, and under the situation of using such rubber such as EPDM, in molded operating process, need this vulcanizing treatment.Therefore, produced advantage with superior production efficiency.
Fig. 2 has shown the modification of cable-shaped piezoelectric element 1.In the present embodiment, flat spring 13 is placed as and closes on external electrode 7, is positioned at the position of volute spring shown in Figure 11.Thereby, with respect to the radial direction of cable-shaped piezoelectric element 1, flat spring 13 is inserted between external electrode 7 and the clad 9.Flat spring 13 has the shape retaining member, is used for cable-shaped piezoelectric element 1 is remained reservation shape, and produces the identical advantage that is produced as volute spring 11.
For example, the flat spring that below provides can be used as the material of flat spring 13.Yet its material is not limited to these flat springs.
SK5 (ordinary tablet spring);
SUS301-CSP3/4H, SUS304-CSP3/4H (stainless steel)
Fig. 3 has shown another modification of cable-shaped spring 1.In the present embodiment, there are not to be provided with as shown in Figure 1 volute spring 11 and the so independently shape retaining member of flat spring as shown in Figure 2 13.Substitute these shape retaining members, use core electrode 3a and/or clad 9a with shape retention properties.Core electrode 3a and/or clad 9a produce the identical advantage that is produced as by volute spring 11 and flat spring 13.
Especially, under the situation of using the simple member such, because the distortion that stress application produces and work as member and replied the distortion that the shape that kept produces is constant to a certain extent such as flat spring 13.Thus, can obtain stable output.And, as long as shape is replied by stress application next time, then can obtain to have the output of repeatability.
Even in the present embodiment, core electrode 3a can be formed by for example marmem.As long as when being deformed, be heated to a certain temperature or more the higher position can reply its original-shape, such alloy is called marmem.As the result who increases alloy temperature, when the cryocrystal structure was replaced by the high temperature crystal structure, shape was replied.The temperature (tr pt) that crystal structure is replaced is 20 ℃ to 100 ℃ scope normally.The alloy that is made of nickel and titanium can be used as the material of this alloy.Yet, the type of metal is not done concrete the qualification.
In the present embodiment, clad 9a can be formed by for example heat-shrinkable tube.Polyolefin or material hard, that collapsible vinyl chloride can be used as heat-shrinkable tube.Yet, material is not done concrete the qualification.
Can give shape retention properties for one among core electrode 3a and the clad 9a.Replacedly, they the two all can give shape retention properties.
As shown in Figure 4, being used for detecting control circuit 15 that the signal output vibration from cable-shaped piezoelectric element 1 has or not is provided with and has: be used to the calling set 51 of notifying the user to have vibration and the calling set control section 53 that is used for controlling call device 51, constitute the vibration detecting sensor system thus.This control circuit 15 carries out patterning usually and forms in substrate 2, as shown in Figure 4.
Control circuit 15 comprises: voltage grading resistor 55 is used for detecting 1 wiry opening circuit of cable-shaped piezoelectric element; Filtering part 57, the preset frequency part that only allows to export from the signal of cable-shaped piezoelectric element 1 can be passed through; Judge part 59, be used for according to from filtering part 57 and the signal that comes exports the generation that contacts of judgment object and cable-shaped piezoelectric element 1; With abnormality juding part 61, be used for by by being used for the magnitude of voltage that resistor 33 that detection line opens circuit and voltage grading resistor 55 judged, judge the opening circuit unusually of metal wire of core electrode 3 or external electrode 7, these two electrodes all belong to cable-shaped piezoelectric element 1.In control circuit 15 and simultaneously signalization importation 63 and segment signal output 65 adjacent to each other, this stimulus part 63 is connected to core electrode 3 and external electrode 7 control circuit 15 and will exports input control circuit 15 from the signal of cable-shaped piezoelectric element 1, and this segment signal output 65 is used for and will be exported by the judgement signal of judging part 59 generations.Segment signal output 65 also is connected with the power lead that is used for control circuit 15, and is connected with ground wire.And control circuit 15 has by-passing part 67, and as electric capacity etc., this by-passing part 67 inserts between stimulus parts 63 and the segment signal output 65 and makes the high-frequency signal bypass.And then segment signal output 65 is provided with has power supply 73, is used for powering to cable-shaped piezoelectric element via control circuit 15.Calling set control section 53 and power supply 73 are connected in the segment signal output 65 of control circuit 15 by connector 39.
In order to eliminate the external electric noise, the integral body of control circuit 15 is hidden by shield member, and thus by electric shield.External electrode 7 keeps the shield member conduction with control circuit 15, and cable-shaped piezoelectric element 1 is also by electric shield.The input and output part of circuit also is equipped with feedthrough electric capacity, EMI filtrator etc. extraly, as the counter-measure of highfield.
Common printed circuit board (PCB) etc. can be used for substrate 2, and concrete qualification is not done in substrate.And, not to concrete the qualification done in the substrate 2 and the method for attachment of cable-shaped piezoelectric element 1.Various common printed circuit board etc. can be used for substrate 2.
Figure 24 (a) and 24 (b) are for showing the load be applied on the cable-shaped piezoelectric element 1 and from the chart of the output of sensor.The application has carried out the load on the cable-shaped piezoelectric element 1 and from the phenomenon that the test of relation between the output (hereinafter being referred to as " sensor output ") of sensor shows has been: when the bending load shown in Figure 24 (a) was applied on the cable-shaped piezoelectric element 1, the output of sensor presented the waveform shown in Figure 24 (b).
(1) particularly, when not having load to be applied to cable-shaped piezoelectric element 1 at moment t0, sensor output presents 2 (V).(2) when when moment t1 bending load is applied to cable-shaped piezoelectric element 1 with assigned direction, sensor output increases to 4 (V) but transfers 0 (V) immediately to, and gets back to 2 (V) once more.(3) subsequently, even when cable-shaped piezoelectric element kept crooked, sensor output still presented 2 (V).(4) when cable-shaped piezoelectric element 1 when moment t3 replys its original-shape, sensor output drops to 0.8 (V) in moment in this, but transfers 2.2 (V) immediately to, and gets back to 2 (V) once more.
When with the identical condition of test (2) under, cable-shaped piezoelectric element 1 is crooked on the direction opposite with bending direction in the test (2) crosses 180 when spending, sensor output is reduced to 0 (V), but transfers 4 (V) immediately to, and gets back to 2 (V) once more.
When under identical condition, when cable-shaped piezoelectric element 1 was crooked fast in test (2), sensor output was greater than the value that is presented in test (2).When cable-shaped piezoelectric element 1 was crooked at a slow speed, sensor output diminished.
When crooked piezoelectric element 1 is spent through 180 on the direction opposite with above-mentioned bending direction, can produce identical result.Particularly, when cable-shaped piezoelectric element 1 is crooked fast, big fluctuation can appear.When cable-shaped piezoelectric element 1 was crooked at a slow speed, less fluctuation can appear.From these results, can obtain the longitudinal bending direction of single cable-shaped piezoelectric element 1 and the acceleration of flexure operation.Thereby, can obtain analogue output unit by using cable-shaped piezoelectric element 1.
(second embodiment)
Except having structure shown in Figure 5, the vibration detecting sensor 110 of present embodiment shown in Figure 6 has weight 4 in the top of cable-shaped piezoelectric element 1 setting.By this structure, can strengthen the sensitivity of 110 pairs of cable-shaped piezoelectric element 1 vibrations of vibration detecting sensor.Weight 4 can be formed by for example any resin material, and can be fixed to the method for heat on the cable-shaped piezoelectric element.The cable-shaped piezoelectric element 1 predetermined end of experience is usually handled.Can seal by line broken circuit being detected resistor (corresponding to line broken circuit detection resistor 33 as shown in Figure 4), realize the end processing with predetermined molded resin.Figure 20 has shown the example that this end is handled.Predetermined resistor 10 is connected to core electrode 3a by tinsel 16, and core electrode 3 and resistor 10 are coated by another heat-shrinkable tube 21.Come out from heat-shrinkable tube 21 in the end 23 of tinsel 16.And then, this end, specifically the zone from the periphery of heat-shrinkable tube 21 to cable is molded resin 12 and seals.Molded resin 12 is formed by the electroconductive resin material, and plays the effect that the end 23 that makes tinsel 16 and external electrode 7 electrically contact.If molded resin 12 does not have any electric conductivity, then the end 23 of tinsel 16 can with external electrode 7 conductivity, simultaneously heat-shrinkable tube 21 around coats with conductive strips.
(the 3rd embodiment)
In the vibration detecting sensor 120 of as shown in Figure 7 present embodiment, cable-shaped piezoelectric element 1 integral body is bent into roughly U-shaped, and the two ends of cable-shaped piezoelectric element 1 are connected with substrate 2 regularly.At least an enterprising line bend of point in cable-shaped piezoelectric element 1.In the knee, predetermined tension force still is applied on the piezoelectric member, strengthens the vibration detection sensitivity of vibration detecting sensor 120 thus.And, being bent and deformed, the length of piezoelectric member can guarantee to be in the form of saving the space.Piezoelectric member is long more, and then the twist angle of the whole piezoelectric member that is produced by vibration detection is just big more.The amount of electromotive force correspondingly increases, and improves signal output.In the present embodiment, the knee presents roughly U-shaped, just, and curve shape and contained the notion of " case of bending (flexion) " that describe subsequently.
Figure 21 has shown that the cable-shaped piezoelectric element 1 with flexed portion is arranged on the various examples in the substrate 2, and this sweep is as the knee.In the embodiment shown, keeper 14 closely contacts and is installed in the substrate 2 with cable-shaped piezoelectric element 1, supports cable-shaped piezoelectric element simultaneously.Keeper 14 helps to keep the shape of cable-shaped piezoelectric element 1, and keeps piezoelectric element 1 to stretch out from substrate 2.In this case, always be not necessary for cable-shaped piezoelectric element 1 and give shape retention properties.
In the embodiment shown in Figure 21 (a) and 21 (b), cable-shaped piezoelectric element 1 and keeper 14 are provided with the sweep that has in correspondence with each other respectively.In Figure 21 (a), sweep presents the obtuse angle.In Figure 21 (b), sweep presents the right angle.In the embodiment shown in Figure 21 (c), keeper 14 is not provided with has sweep, and cable-shaped piezoelectric element 1 is with right-angle bending.In the embodiment shown in Figure 21 (d), cable-shaped piezoelectric element 1 is not provided with has sweep, and keeper 14 bendings.Cable-shaped piezoelectric element 1 remains in the substrate 2 with the predetermined angular corresponding to angle of bend.
The piezoelectric element of correlation technique, different with Fig. 1 to those piezoelectric elements shown in Figure 3, do not have the Any shape retention performance and itself has elasticity.Thereby, even when element was fixed and is out of shape with required form simultaneously, element had still kept attempting to reply the performance (remaining recovery of shape) of original-shape.Therefore, when from the external world when element applies predetermined power, also can produce output that obtains from recovery of shape and the output that distortion produced that causes by the effect of power (proofread and correct output).The output that is produced by the recovery of shape performance presents the various values corresponding to the deformed shape or the method that is connected, and shows the problem of the unstable output of element of fixed placement thus.
After single treatment was reservation shape, the volute spring 11 of the cable-shaped piezoelectric element 1 of present embodiment had the shape retention properties that keeps its shape.Thereby this causes cable-shaped piezoelectric element 1 itself to have shape retention properties.Even when cable-shaped piezoelectric element 1 had been deformed into as shown in Figure 7 roughly U-shaped, the performance (remaining recovery of shape) of attempting to reply its original-shape became and is roughly 0.As a result, when from the external world when element applies predetermined force, cause to be output as 0 or become and be roughly 0 by recovery of shape.In other words, can stably obtain only by applying the correction output that power causes.Herein, " " expression is because to have the output that recovery of shape causes insignificant, makes it possible to obtain to proofread and correct export and can be with the problem of reality to be roughly 0 for term.
(the 4th embodiment)
Except having structure as shown in Figure 7, the vibration detecting sensor 130 of present embodiment as shown in Figure 8 has weight 4, and this weight 4 is fixed to the knee of cable-shaped piezoelectric element 1; Particularly, be fixed to the top in knee.With this structure, can strengthen the sensitivity of 1 pair of vibration of cable-shaped piezoelectric element.
(the 5th embodiment)
In the vibration detecting sensor system 140 of as shown in Figure 9 embodiment, weight 4 is fixed to the open end of the cable-shaped piezoelectric element 1 of U-shaped, and this open end is opposite with the end that described element is fixed to substrate 2.The position of the curvature of whole cable-shaped piezoelectric element 1 and through hole 2a is adjusted into, and makes in the oscillating action process, and weight 4 is relevant to the distortion of cable-shaped piezoelectric element 1 and vibrates in through hole 2a, and this through hole 2a forms and penetrates substrate 2.With this structure, can strengthen the detection sensitivity of 1 pair of vibration of cable-shaped piezoelectric element.
(the 6th embodiment)
In the vibration detecting sensor 150 of embodiment as shown in figure 10, weight 4 is fixed to the open end of cable-shaped piezoelectric element 1, and this open end is opposite with the end that described element is fixed to substrate 2.Cable-shaped piezoelectric element 1 is bent into the roughly form of annular in the plane of the principal plane that is roughly parallel to substrate 2.With this structure, can strengthen the detection sensitivity of 1 pair of vibration of cable-shaped piezoelectric element.
(the 7th embodiment)
In the vibration detecting sensor 160 of embodiment as shown in figure 11, cable-shaped piezoelectric element 1 comprises: 1) end 1b is fixed in the substrate 2 and is configured to parallel each other; With 2) central circular part 1a, it is between two end 1b and form the roughly form of annular.
(the 8th embodiment)
In the vibration detecting sensor 170 of as shown in figure 12 present embodiment, cable-shaped piezoelectric element 1 forms coil shape, and is set in substrate 2 roughly upright.With this structure, can strengthen the sensitivity of 1 pair of vibration of cable-shaped piezoelectric element.
(the 9th embodiment)
In the vibration detecting sensor 180 of as shown in figure 13 present embodiment, cable-shaped piezoelectric element 1 forms coil shape, and the diameter of coil increases with the increase of distance substrate 2 distances.Weight 4 is fixed to the open end of cable-shaped piezoelectric element 1, and this open end is opposite with the end that described element is fixed in the substrate 2.Under situation, can strengthen the sensitivity of 1 pair of vibration of cable-shaped piezoelectric element with this structure.
(the tenth embodiment)
In the vibration detecting sensor 190 of as shown in figure 14 present embodiment, in substrate 2, form the through hole 2b of essentially rectangular, and cable-shaped piezoelectric element 1 is fixed in the substrate 2, so that can in through hole 2b, vibrate.Cable-shaped piezoelectric element 1 is arranged among the through hole 2b in the mode of stretching out, so that roughly parallel with the principal plane of substrate 2.Weight 4 is fixed to the open end of cable-shaped piezoelectric element 1, and this open end is opposite with the end that described element is fixed in the substrate 2.Under situation, can strengthen the sensitivity of 1 pair of vibration of cable-shaped piezoelectric element with this structure.
(the 11 embodiment)
Under the situation of as shown in figure 14 embodiment, form the through hole 2b of essentially rectangular in the substrate 2 in the vibration detecting sensor 200 of present embodiment, shown in Fig. 15, and cable-shaped piezoelectric element 1 is fixed in the substrate 2, so that can vibrate in through hole 2b.Cable-shaped piezoelectric element 1 is arranged on through hole 2b in the mode of extending, so as with the principal plane almost parallel of substrate 2.Cable-shaped piezoelectric element 1 is bent into roughly U-shaped form, and the two ends of cable-shaped piezoelectric element 1 all are fixed in the substrate 2.
(the 12 embodiment)
The vibration detecting sensor 210 of the present embodiment that vibration detecting sensor 120 mode in the outer cover 195 that is contained in by will be as shown in Figure 7 forms, as shown in figure 16.Because cable-shaped piezoelectric element 1 deformable, outer cover 195 also can be the outer cover of compact dimensions.On the wall on each axis that piezoelectric element 1 is installed to the three-dimensional axis of outer cover, can more strictly detect the vibration on three-dimensional respectively.And then, eliminate noise in the sensor by the mode that on shield shell, forms outer cover.Every other vibration detecting sensor also can be arranged in the outer cover.
(the 13 embodiment)
In the vibration detecting sensor 220 of basis present embodiment as shown in figure 17, cable-shaped piezoelectric element 1 as shown in Figure 8 hangs downwards and is fixed thereon from substrate 2.As a result, vibration detecting sensor presents the shape that forms owing to vibration detecting sensor 13 reversings of inciting somebody to action as shown in Figure 8.Other vibration detecting sensors also can be used for the reversing state.
(application)
Figure 18 has shown the of the present invention exemplary vibration detecting sensor that is applied in the fluid-velocity survey instrument.In the present embodiment, vibration detecting sensor 100 as shown in Figure 5 is arranged in the flow channel 230.Such as flowing and cable-shaped piezoelectric element 1 collision of the such medium of water, and can come measurement flow rate based on the collision degree.
Figure 19 has shown the of the present invention exemplary vibration detecting sensor that is used for the motor driven carriage for children.In the present embodiment, any one of above-mentioned vibration detecting sensor all can be arranged in the space 245 towards the bottom of motor driven carriage for children 240.Vibration detecting sensor detects when the driver touches motor driven carriage for children 240 and takes this car and the vibration that produces, to start or stop the primary power of motor driven carriage for children 240 thus.
There is effectively control in the vibrative while in the driver behavior process, so that start or stop the various ligthing paraphernalias of carriage for children, as the head lamp of vehicle body or driving monitor.Thus, can reduce battery consumption, realizing saving of power thus, and can prevent also that the driver from forgetting and turn off ligthing paraphernalia.Even do not detecting when vibration, vibration detecting sensor also at the fixed time in the section (for example suspending an equal time section) keep starting state or holding state.As a result, even under situation about suspending, vibration detecting sensor also can detect vibration immediately when vehicle continues to drive.
Also be used to detect the vibration that when carriage for children is taken in person attempt, produces; For example, when the driver touches handle or is sitting in the vibration that the seat produces when first-class, open various ligthing paraphernalias thus.Also can obtain the further convenience of enhancing.
Aforesaid flow rate detection instrument and motor driven carriage for children all only are the examples of using.Needless to say, vibration detecting sensor of the present invention can be applicable to other product, is used to detect vibration, pressure and stress, and is applied to the motor driven carriage for children.
Figure 22 has shown and has been used for cable-shaped piezoelectric element is installed to illustrative methods in the substrate 2.Shown in Figure 22 (a), metal fixture 18 comprises pressing section 18a, following pressing section 18b and bottom 18c.Shown in Figure 22 (b), metal fixture 18 is arranged in the substrate 2 via bottom 18c.Shown in Figure 22 (c), clad 9 compresses by last pressing section 18a, and external electrode 7 compresses by following pressing section 18b.Like this, cable-shaped piezoelectric element 1 is fixed in the substrate 2.
Figure 23 has shown and has been used for cable-shaped piezoelectric element 1 is fixed to another illustrative methods in the substrate 2.Shown in Figure 23 (a), antenna mounted connector 20 is installed to the end of cable-shaped piezoelectric element 1.Shown in Figure 22 (b), cable-shaped piezoelectric element 1 is fixed in the substrate 2.Particularly, also can adopt common connector, it is as the parts that fix up an aerial wire.When antenna mounted connector 20 was formed by metal, connector contacted with external electrode 7 but does not contact with core electrode 3.
Vibration detecting sensor of the present invention adopts predetermined cable-shaped piezoelectric element, and this piezoelectric element can adopt different shape.Thereby, a kind of piezoelectric detection sensor is provided, it also can be guaranteed in miniaturization the high-freedom degree in the height detection of vibration and the design.This vibration detecting sensor can provide unrestricted installation method, said being restricted to such as installation direction, installation site, installing space etc., and can guarantee high installation degree of freedom.Can obtain to use the increase of design freedom of the equipment of sensor.And vibration detecting sensor of the present invention can detect with height installation degree of accuracy and any installment state that need not prior direction initialization.
(the 14 embodiment)
Referring to accompanying drawing the 14th embodiment of the present invention is described.Figure 25 is for showing the viewgraph of cross-section of pressure sensitive switch, and this pressure sensitive switch is the 14th embodiment of the present invention; Figure 26 is the skeleton view of the pressure sensitive switch of Figure 25 demonstration; Figure 27 is the skeleton view that is used to describe the piezoelectricity cable; Figure 28 is the perspective cross-sectional view that is used to describe the piezoelectric element structure; With Figure 29 to 237 be the pressure sensitive switch of other embodiment of the present invention.
At first, be described referring to Figure 27 to 28 pair of piezoelectricity cable that is used for pressure sensitive switch, this piezoelectricity cable is the 14th embodiment of the present invention.
As shown in figure 27, piezoelectricity cable 1020 comprises core line 1021, and this core line 1021 plays the effect of central electrode and covered by piezoelectric element material 1023.External electrode 1022 coiling piezoelectric element materials 1023.External electrode 1022 is covered by epitheca 1024, and this epitheca 1024 is formed by thermoplastic resin PVC (Polyvinylchloride) etc.Piezoelectricity cable 1020 has superior flexible and can respond the distortion acceleration that obtains in the deformation process and produce output signal.
For example, the chloro tygon can be used as the resin-based materials 1026 of piezoelectric element material 1023.Thus, piezoelectric element material 1023 can be used on the temperature range that is higher than 90 ℃ (120 ℃ or still less), the maximum operating temperature of these 90 ℃ typical polymers piezoelectric element materials (uniaxial extension polyvinylidene fluoride) that are correlation technique or piezoelectric element material (the piezoelectric element material that is formed by chlorbutadiene fine particle and piezoelectric ceramics fine particle).And then, can realize can be easily deformable flexible, and do not need can guarantee crosslinked simple manufacture process.
For example, the sintering fine particle of lead titanates or lead titanate-zirconate, or can be used as the piezoelectric ceramics fine particle 1025 of piezoelectric element material 1023 such as leadless piezoelectric ceramics sintering fine particles such as sodium nitrate.
Film like electrode (the three ironed layer by layer films that are made of aluminium, polyethylene terephthalate, aluminium) is used for external electrode 1022.Thus, can guarantee bonding between piezoelectric element material 1023 and the external electrode 1022.
So the piezoelectricity cable 1020 that obtains presents: specific inductive capacity is 55, electric charge is that 10 to 13C (coulomb)/gf and maximum operation temperature are 120 ℃.Yet, under the state that piezoelectric element material 1023 keeps being shaped, can not obtain piezoelectric property.Thus, must carry out the processing (polarization is handled) that is used for piezoelectric element material 1023 is given piezoelectric property by high dc voltage from thousands of V/mm to piezoelectric element material 1023 that use.
When in piezoelectric element material 1023, existing such as the such tiny flaw of crackle, produce discharge at fault location, can make electrode tend to short circuit thus.Thus, can not apply enough polarizing voltages.Yet, in the present embodiment, can set up the polarization of using auxiliary electrode and handle, this auxiliary electrode closely contacts with the piezoelectric element material 1023 of given length, detects or avoids defective thus and produce polarization.Thus, also can realize the piezoelectric element material of tens of meters length magnitudes is polarized.
Shown in Figure 25 and 26, comprise piezoelectricity cable 1020 as 14th embodiment of the present invention pressure sensitive switch 1010.Make at least a portion of piezoelectricity cable 1020 outstanding from the upper support face of rectangular parallelepiped Sensor box 1011.So outstanding part is bent into sweep 1013, and control circuit 1014 is connected with the bottom part of piezoelectricity cable 1020.
Thus, be bent from least a portion of the outstanding piezoelectricity cable 1020 of carrying plane 1012, thus, the intensive interval of generation between the piezoelectric ceramics fine particle 1025 sweep 1013 on week, and help to produce electromotive force.
Insert in another cable patchhole 1015 piezoelectricity cable 1020 exits parts by such as bolt, bonding, in Sensor box 1011, fill fastener means such as colloid and carry out fastening.
The bottom part of piezoelectricity cable 1020 inserts the cable patchhole 1017 that is formed on Sensor box 1,011 one sides; Guide to the outside of Sensor box 1011; And be connected with control circuit 1014.Control circuit 1014 is connected with cable 1018.Control circuit 1014 can amplified analog signal and is exported amplifying signal like this, maybe can change and export digital signal to the simulating signal of amplifying by the analog-digital conversion part.Replacedly, filtering part etc. can select the frequency range that predetermined frequency range and output are so chosen from digital signal.
The cable 1018 that is connected with control circuit 1014 is used to supply electric power and output detection signal.Cable 1018 is connected with power supply or such as the such terminal of computing machine by the connector (not shown) that is installed in cable ends.
Be applied to result on the piezoelectricity cable 1012 as power, pressure sensitive switch 10 responds the distortion acceleration that obtains as described above and produces output signal between piezoelectricity cable 1020 deformation phases, this power makes sweep 1013 be out of shape in the direction of arrow of for example Figure 25 and 26 or on the direction of the carrying plane 1012 of Sensor box 1011.
Figure 29 (a) and 29 (b) are for showing the load be applied on the pressure sensitive switch 1010 and the figure of output signal feature.As the applicant to the result that tests of relation between load on the pressure sensitive switch 1010 and the output signal, when the bending load shown in Figure 29 (a) is applied on the pressure sensitive switch 1010, can learn that output signal presents the phenomenon shown in Figure 29 (b).(1) particularly, when not having load to be applied on the pressure sensitive switch 1010 at moment t0, output signal presents voltage 2 (V).
(2) when being applied on the pressure sensitive switch 1010 with assigned direction in moment t1 bending load, output signal increases to 4 (V) in loading, but forwards 0 (V) immediately to, and gets back to 2 (V) once more.
(3) subsequently, when pressure sensitive switch kept crooked, output signal kept presenting 2 (V).
(4) when when moment t3 pressure sensitive switch 1010 is got back to virgin state, output signal drops to 0.8 (V) at this moment, but forwards 2.2 (V) immediately to, and gets back to 2 (V) once more.
Pressure sensitive switch is crooked under the same terms of being taked on the direction opposite with the bending direction of test in (2), with test (2) crosses 180 when spending, and output signal is reduced to 0 (V), but forwards 4 (V) immediately to, and gets back to 2 (V) once more.
When pressure sensitive switch under the identical condition in test (2) when fast crooked, the output signal that presents in the output signal ratio test (2) is bigger.When pressure sensitive switch was crooked at a slow speed, output signal was less.
When pressure sensitive switch is crooked on the direction opposite with above-mentioned bending direction, can produce identical effect.Particularly, when pressure sensitive switch is crooked fast, big fluctuation can appear.When the pressure sensitivity element was crooked at a slow speed, little fluctuation can appear.
Sort signal is not the output with square waveform.When load is applied on the pressure sensitive switch 1010, or when load was removed, signal was the output as simulating signal, and this simulating signal has the corresponding waveform of material that applies the position with loading mode (speed and stroke) and load.
Thereby, relevant with pressure sensitive switch 1010, be easy to by adjusting the characteristic of output signal according to using size, curvature and the material of suitably selecting sweep 1013.
As mentioned above, in the present embodiment, the part from the outstanding piezoelectricity cable 1020 of carrying plane 1012 is crooked at least.Thereby pressure sensitive switch presents the structure of the mechanical bend amount increase of piezoelectric.Be applied to result on the sweep 1013 as stress, very weak or pushing force stroke very in short-term when pushing force, fluctuation according to pushing intensity of force and length of stroke aspect can detect the pushing force that is acted on high sensitivity, so that can export the signal corresponding to the pushing force acceleration.
Especially, pressure sensitive switch 1010 needs to make the minimum stroke of piezoelectric material deforms.Yet, even respond small distortion (dislocation) also can output signal.Even respond minimum stroke also can output signal, this minimum stroke can make the user can think mistakenly that he has touched switch.
Thereby pressure sensitive switch 1010 can be used as the touching switch.
Because control circuit 1014 can amplify output signal, so pressure sensitive switch 1010 can change the sensitivity of switch by the replacement circuit structure.
In addition, because pressure sensitive switch 1010 does not have the Mechanical Contact point, so can obtain water proofing property, permanance and reliability, these are all than the obtainable height of micro switch by correlation technique.
Interval in sweep 1013 between the particle of the piezoelectric ceramics fine particle 1025 in week is more intensive, and therefore, electromotive force is easy to increase.Thus, piezoelectricity cable 1020 can be with the pushing force that high-sensitivity detection was acted on, and the acceleration output signal of response pushing force, needn't consider pushing force and promote the fluctuation of length of stroke aspect.
And then, between the carrying plane 1012 of sweep 1013 and piezoelectricity cable 1020, gap 1016 is set.Thus, the torsional deformation amount that obtains when piezoelectricity cable 1020 is pushed can increase, and guarantees wide sensing range thus.
And the sweep 1013 of piezoelectricity cable 1020 is with single curvature bending, and can as one man strengthen sensitivity on whole sweep 1013 thus.
Piezoelectric switches of the present invention is not limited to this embodiment, and they can be through suitable replacement, improvement etc.
For example, the present invention has shown that control circuit 1013 is arranged on the pressure sensitive switch 1010 of Sensor box 1011 outsides.Yet, shown in Figure 30 and 31, also implemented a kind of pressure sensitive switch 1030 of alternative pressure sensitive switch 1010, wherein control circuit 1014 is arranged in the Sensor box 1011.
The foregoing description has shown the situation outside the sweep 1013 of the outstanding piezoelectricity cable 1020 of the carrying plane 1012 of Sensor box 1011 is exposed to.Shown in figure 32, replace this situation, also can implement a kind of pressure sensitive switch 1040, wherein be placed on the top of Sensor box 1011 by the cover 1041 that forms such as the rubber elastomeric material, the top of sweep 1013 can be highlighted part 1042 and push, and lid outshot 1042 is arranged on the inside surface center of cover 1041.And, as shown in figure 33, also implemented a kind of pressure sensitive switch 1050, wherein the sweep 1013 of piezoelectricity cable 1020 is covered by coating material 1051, replace cover 1041, so that cover sweep with the form of the part that stayed gap 1016, this cladding material 1051 is formed by the resilient material such as rubber etc.And then, as shown in figure 34, also implemented a kind of pressure sensitive switch 1060, wherein the sweep 1013 of piezoelectricity cable 1020 covers consistent thickness with cladding material 1061, so that sweep covers and leaving gap 1016 in smooth mode, this cladding material is by forming such as the rubber elastomeric material.
And present embodiment has also shown gap 1016 has been arranged on the carrying plane 1012 of Sensor box 1011 and the situation between the sweep 1013.Yet the present invention is not limited to this embodiment.For example, as shown in figure 35, also implemented a kind of pressure sensitive switch 1070, wherein piezoelectricity cable 1020 is so grown from carrying plane 1012 outstanding parts and is contacted with carrying plane 1012 so that have the piezoelectricity cable of sweep 1013.In the present embodiment, the sweep 1013 of piezoelectricity cable 1020 is capped material 1071 in smooth mode and is covered, and this cladding material is by forming such as the rubber elastomeric material.
Present embodiment has also shown a kind of situation: sweep 1013 is formed on some place on Sensor box 1011 carrying planes 1012 with stretching out.Yet the present invention is not limited to this situation.Shown in Figure 36 and 37, still implemented a kind of pressure sensitive switch 1080, wherein by making piezoelectricity cable 1020 present ripple, on carrying plane 1012, form two or more sweeps 1013 (having shown two) in outstanding mode.Replacedly, as shown in figure 38, also implemented a kind of pressure sensitive switch 1090, wherein the piezoelectricity cable is crooked and twine in the mode of coiled type, to form two or more sweeps 1013 (among the figure being 4) thus, so that outstanding from carrying plane 1012.
In pressure sensitive switch 1040 shown in figure 32, be placed on cover 1041 on the Sensor box 1011 by forming such as the rubber elastomeric material.Yet,, also adopted a kind of hardcoat part 1101 as the situation of the Piezoelectric switches shown in Figure 39 1100.One end of cover 1101 is connected with the top of Sensor box 1011 by the mode of hinge 1102.When not having load to be applied on the cover, cover 1041 is placed on the sweep 1013 by himself weight.
In pressure sensitive switch 1100, the load that is acted on is passed to sweep 1013 by cover 1101, and pressure sensitive switch 1100 output signals, and this cover pivots around hinge 1102 with respect to Sensor box 1011.When the load that is acted on discharged, cover 1101 promoted by elasticity, and this can cause sweep 1013 to attempt to get back to original shape, gets back to reference position thus.
Under the situation of as shown in figure 40 pressure sensitive switch 1110, the space between the carrying plane 1012 of sweep 1013 and Sensor box 1011 can be filled by elastic body 1111; For example, colloid etc.
The shape that can keep sweep 1013, and can protect sweep 1013 to avoid the influence of excess impact.
To the mode of sweep 1013 used loads and be not only direction, and be radial direction from the flexural center of sweep 1013 towards carrying plane 1012, or direction (the internal depth directions in Figure 25 and 26) parallel with axis of bending or that intersect.In brief, loading direction is any, as long as piezoelectricity cable 1020 can be from its reference position distortion.
In other respects, the shape of the piezoelectric ceramics fine particle that all these are illustrated in the aforementioned embodiment, size, pattern, quantity, position etc., resin-based materials, the structure of piezoelectric element, piezoelectricity cable, carrying plane, sweep, control circuit, gap, fastener meanses etc. all are arbitrarily and unrestricted, as long as can realize the present invention.
(the 15 embodiment)
Referring to accompanying drawing, hereinafter will be described the 15th embodiment of the present invention.In the description of present embodiment, have element identical with the component structure of describing before and that produce identical work effect and represent, and omit its detailed description with identical reference number.
Cable-shaped piezoelectric element 2001 of the present invention has structure as shown in figure 41.Place the core electrode (central electrode) 2003 of radial center to be covered by piezoelectric element material (composite piezoelectric layer) 2005, this piezoelectric element material 2005 is made of piezoelectric member and is made by piezoelectric ceramics.External electrode 2007 is provided with around composite piezoelectric layer 2005, and the volute spring 2011 with shape retention properties is provided with around external electrode 2007.The most peripheral of volute spring 2011 is by covering such as PVC clads such as (Polyvinylchloride) 2009, to constitute cable-shaped piezoelectric element 2001 thus.For example, the sintering fine particle of lead titanates or lead titanate-zirconate or such as the sintering fine particle of leadless piezoelectric ceramicss such as sodium nitrate can be used as piezoelectric ceramics.Cable-shaped piezoelectric element 2001 of the present invention has flexible as the piezoelectricity cable, and can form Any shape thus.This cable also is endowed shape retention properties, and therefore can be shaped and maintenance with different shape.
In cable-shaped piezoelectric element 2001, can use under up to 120 ℃ temperature and be by the special exploitation of the applicant and have stable on heating resin-based materials, can be used for composite piezoelectric layer 2005.Cable-shaped piezoelectric element 1 can use (120 ℃ or still less) in certain temperature range, this temperature range is higher than the maximum operating temperature of typical polymers piezoelectric element material (uniaxial extension polyvinylidene fluoride) in the correlation technique or piezoelectric element material (the piezoelectric element material that is formed by chlorbutadiene fine particle and piezoelectric ceramics fine particle), promptly 90 ℃.Composite piezoelectric layer 2005 is made by having flexible and resin piezoelectric ceramics, it forms by using the dangler formed by coiled type metal center electrode and film like external electrode, and this composite piezoelectric layer 2005 has identical with common vinyl cable flexible.
So the cable-shaped piezoelectric element 2001 that obtains does not have piezoelectric property when composite piezoelectric layer 2005 maintains the original state (intact).Thereby, need carry out DC high voltage with every millimeter volt and be applied to processing (polarization is handled) on the composite piezoelectric layer 2005, to give piezoelectric property to composite piezoelectric layer 2005 thus.When existing such as the such trickle defective of crackle in the composite piezoelectric layer 2005, electric charge is tending towards producing at fault location, makes electrode cause short circuit probably.Thereby, can not on the composite piezoelectric layer, apply enough polarizing voltages.Yet, in the present invention, use auxiliary electrode to set up unique polarization step, this auxiliary electrode can closely contact with composite piezoelectric layer 5 with given length, consequently can detect and avoid defective, to implement stable polarization thus.Thus, it is long or longer that the composite piezoelectric layer also can be fabricated onto tens of rice.
In cable-shaped piezoelectric element 2001, the coiled type central electrode is used for core electrode 2003, and film like electrode (the three ironed layer by layer films that are made of aluminium, polyethylene terephthalate, aluminium) is used for external electrode 2007.Thus, guarantee bonding between composite piezoelectric layer 2005 and the electrode to help the connection of outside lead thus.Thus, flexible cable-shaped mounting structure becomes possibility.
In cable-shaped piezoelectric element 2001 of the present invention, volute spring 2011 is around the outside of external electrode 2007.Volute spring 2011 is inserted in external electrode 2007 and between cable-shaped piezoelectric element 2001 clad 2009 radially.This volute spring 2011 is formed for cable-shaped piezoelectric element 2001 is remained the shape retaining member of reservation shape.
Although the following tinsel that provides can be used as the material of volute spring 2011, material is not limited to this tinsel.
WC (80C) (hard steel wire); SWPA, SWPB (musical instrument line);
SWOSM-B (silicomanganese steel wire); SWOSC-V (silicochromium steel wire);
SUS304-WPB, SUS316-WPA (stainless steel wire);
BsW (brass wire); PBW (phosphor bronze wire).
As example, above-mentioned cable-shaped piezoelectric element 2001 is by following process manufacturing.In outermost, by the roll-in technology, polychlorovinyl sheet material and by volume account for 40% to 70% piezoelectric ceramics (in the present embodiment for lead zirconate titanate) fine particle and as one man be mixed into sheet.After this sheet material slightly was divided into particle, particle was extruded continuously with core electrode 2003, to form composite piezoelectric layer 2005 (the piezoelectric element material before the experience polarization is handled) thus.Auxiliary electrode contacts with the periphery of composite piezoelectric layer, and high voltage is applied between auxiliary electrode and the core electrode 2003, realizes the polarization processing thus.External electrode 2007 is subsequently on the composite piezoelectric layer.After volute spring 2011 was on external electrode 2007, clad 2009 pushed continuously, coated external electrode 2007 and volute spring 2011 simultaneously.So the cable-shaped piezoelectric element of making 2001 can be treated to different shape arbitrarily such as shown in figure 44 shape.
After being treated to reservation shape with this, volute spring 2011 has the shape retention properties that is used to keep shape.Thereby this causes cable-shaped piezoelectric element 2001 itself to have shape retention properties.Even when cable-shaped piezoelectric element 2001 had been out of shape required form, the performance (remaining recovery of shape) of still attempting to reply its original-shape became and is roughly 0.As a result, when from the external world when element applies predetermined force, cause to be output as 0 or become and be roughly 0 by recovery of shape.In other words, can stably obtain only by applying the correction output that power causes.Herein, " " expression is because to have the output that recovery of shape causes insignificant, makes it possible to obtain to proofread and correct export and can be with the problem of reality to be roughly 0 for term.
When the piezoelectric ceramics fine particle is added to Polyvinylchloride, preferably, in advance the piezoelectric ceramics fine particle is immersed in the titanium crosslinkers solution and the piezoelectric ceramics fine particle of immersion like this is carried out drying.By this processing, hydrophilic group and hydrophobic group on the surface applied of piezoelectric ceramics fine particle.Hydrophilic group prevents that the piezoelectric ceramics fine particle from condensing, and hydrophobic group increases the wettability of Polyvinylchloride and the wettability of piezoelectric ceramics fine particle.As a result, a large amount of piezoelectric ceramics fine particles can be added in the Polyvinylchloride equably, by volume reach maximum 70%.It is found that, replace the piezoelectric ceramics fine particle is immersed in the titanium crosslinkers aqueous solution, and when roll-in Polyvinylchloride and piezoelectric ceramics fine particle, add titanium crosslinkers, at this moment, produce the effect identical with above-mentioned effect.This is handled superior part and is, does not need to be used for the piezoelectric ceramics fine particle is immersed the special processing of titanium crosslinkers aqueous solution.As above, Polyvinylchloride also can play the effect of binder resin, uses when mixing the piezoelectric ceramics fine particle.
In the present embodiment, the tinsel that is formed by copper base metal is used for core electrode 2003.And then band electrode is wrapped on the piezoelectric element material 2005 as external electrode 2007 and external electrode 2007, forms this band electrode on the polymeric layer by the aluminum metal film is sticked to.Polyethylene terephthalate (PET) is as this polymeric layer.Owing to can manufacture and cheapness commercial by the aluminum metal film being sticked to the last electrode that forms of PET, so kind electrode can preferably be used as external electrode 2007.When this electrode was connected with external control circuit etc., electrode can connect by the mode of for example joint filling or eyelet.Also can adopt the structure that an independent wire or metal braided wire are carried out soldering around the aluminium film of external electrode 2007, with in use when control circuit etc. is connected.Owing to can carry out soldering, so it is very effective to work together.For cable-shaped piezoelectric element 2001 and electric noise in the external environment condition are shielded, external electrode 2007 by the coiled type of expectation be wrapped on the composite piezoelectric layer so that they partly overlap each other.
Elastomeric material also can be used as clad 2009, and this elastomeric material is being better than Polyvinylchloride aspect thermal insulation and the water proofing property.In order to make composite piezoelectric layer 2005 be easy to be out of shape by the thrust of the object that contacts with composite piezoelectric layer 2005, the elastomeric material of preferably softer and easier deflection than composite piezoelectric layer 2005.Select to be installed in assembly on the vehicle based on the consideration of thermotolerance and low temperature resistance, and wish that the assembly of selecting is that flexible reduction is less between-30 ℃ to 85 ℃.For example, preferably use ethylene-propylene-diene rubber (EPDM), chloroprene rubber (CR), butyl rubber (IIR), silicon rubber (Si), thermoplastic plastics elastic bodies etc. are as elastomeric material.By this structure, it is 5mm that the minimum curvature of cable-shaped piezoelectric element 1 can be reduced to radius.When comparing, can guarantee extremely superior thermotolerance and water proofing property with vinyl chloride.
As mentioned above, the composite piezoelectric member of cable-shaped piezoelectric element 2001 had not only had the flexible of Polyvinylchloride but also had had the high-fire resistance of piezoelectric ceramics.Thus, as correlation technique, use polyvinylidene fluoride this sensitivity at high temperature can take place to reduce, the situation that such sensitivity reduces can not take place in cable-shaped piezoelectric element 2001 as the piezoelectric sensor of piezoelectric member.And then except having superior high-fire resistance, cable-shaped piezoelectric element 2001 does not need vulcanizing treatment, and under the situation of using such rubber such as EPDM, in molded operating process, need this vulcanizing treatment.Therefore, has superior production efficiency.
Figure 42 has shown the modification of cable-shaped piezoelectric element 2001.In this modification, flat spring 2013 is placed as and closes on external electrode 2007, is positioned at the position of volute spring shown in Figure 41 2011.Thereby, with respect to the radial direction of cable-shaped piezoelectric element 2001, flat spring 2011 is inserted between external electrode 2007 and the clad 2009.Flat spring 2013 has the shape retaining member, is used for cable-shaped piezoelectric element 2001 is remained reservation shape, and produces the identical advantage that is produced as volute spring 2011.
For example, the flat spring that below provides can be used as the material of flat spring 2013.Yet its material is not limited to these flat springs.
SK5 (ordinary tablet spring);
SUS301-CSP3/4H, SUS304-CSP3/4H (stainless steel)
Figure 43 has shown another modification of cable-shaped spring 2001.In this modification, there are not to be provided with as shown in figure 41 volute spring 2011 and the so independently shape retaining member of flat spring as shown in figure 42 2013.Substitute these shape retaining members, use core electrode 2003a and/or clad 2009a, they have shape retention properties.Core electrode 2003a and/or clad 2009a produce the identical advantage that is produced as by volute spring 2011 and flat spring 2013.
Especially, under the situation of using the simple member such, because the distortion that stress application produces and work as member and replied the distortion that the shape that kept produces is constant to a certain extent such as flat spring 2013.Thus, can obtain stable output.And, as long as shape is replied by stress application next time, then can obtain to have the output of repeatability.
In the present embodiment, core electrode 2003a can be formed by for example marmem.As long as when being deformed, be heated to a certain temperature or more the higher position can reply its original-shape, such alloy is called marmem.As the result who increases alloy temperature, when the cryocrystal structure was replaced by the high temperature crystal structure, shape was replied.The temperature (tr pt) that crystal structure is replaced is 20 ℃ to 200 ℃ scope normally.The alloy that is made of nickel and titanium can be used as the material of this alloy.Yet, the type of metal is not done concrete the qualification.
In the present embodiment, clad 2009a can be formed by for example heat-shrinkable tube.Polyolefin or material hard, that collapsible vinyl chloride can be used as heat-shrinkable tube.Yet, material is not done concrete the qualification.
Can give shape retention properties for one among core electrode 2003a and the clad 2009a.Replacedly, they the two all can give shape retention properties.
Figure 44 (a) has shown modification to 44 (e), and wherein above-mentioned cable-shaped piezoelectric element 2001 is deformed into different shape by utilizing its shape retention properties.So the cable-shaped piezoelectric element 2001 of distortion and maintenance is connected with expectant control circuit 2015, to constitute vibration detecting sensor 2017 thus.Figure 45 (a) is exemplary coiled type piezoelectric element; Figure 45 (b) is the example annular piezoelectric element; Figure 45 (c) is an exemplary segment shape piezoelectric element; Figure 45 (d) is exemplary corrugated piezoelectric element; Figure 45 (e) is exemplary spiral piezoelectric element.Example shown in shape is not limited to, and can adopt other shape.
As shown in figure 45, being used for detecting control circuit 2015 settings that whether contact with object in the signal output from cable-shaped piezoelectric element 2001 has: be used to the calling set 2051 of notifying the user to have the object contact and the calling set control section 2053 that is used for controlling call device 2051, constitute the vibration detecting sensor system thus.
Control circuit 2015 comprises: voltage grading resistor 2055 is used for detecting 2001 wiry opening circuit of cable-shaped piezoelectric element; Filtering part 2057, the only preset frequency part that allows to export from the signal of cable-shaped piezoelectric element 2001 can be passed through; Judge part 2059, be used for according to the generation that contacts of exporting judgment object from the signal of filtering part 2057 with cable-shaped piezoelectric element 2001; With abnormality juding part 2061, be used for by by being used for the magnitude of voltage that resistor 2033 that detection line opens circuit and voltage grading resistor 2055 produced, judge the opening circuit unusually of metal wire of core electrode 2003 or external electrode 2007, these two electrodes all belong to cable-shaped piezoelectric element 2001.Signalization importation 2063 and segment signal output 2065 adjacent to each other in control circuit 2017, this stimulus part 2063 is connected to core electrode 2003 and external electrode 2007 control circuit 2015 and will inputs to control circuit 2015 from the signal of cable-shaped piezoelectric element 2001, and this segment signal output 2065 is used for judging the judgement signal output of part 2059 generations.Segment signal output 2065 also is connected with the power lead that is used for control circuit 2015, and is connected with ground wire.And control circuit 2015 has by-passing part 2067, and as electric capacity etc., this by-passing part 2067 inserts between stimulus parts 2063 and the segment signal output 2065 and makes the high-frequency signal bypass.And then segment signal output 2065 is provided with has power supply 2073, is used for powering to cable-shaped piezoelectric element via control circuit 2015.Calling set control section 2053 and power supply 2073 are connected in the segment signal output 2065 of control circuit 2015 by connector 2039.
In order to eliminate the external electric noise, the integral body of control circuit 2015 is hidden by shield member, and is able to electric shield thus.External electrode 2007 keeps the shield member conduction with control circuit 2015, and also electric shield of cable-shaped piezoelectric element 2001.The input and output part of circuit also is equipped with feedthrough electric capacity, EMI filtrator etc. extraly, as the counter-measure of highfield.
Figure 50 (a) and 50 (b) are for showing the load be applied on the cable-shaped piezoelectric element 2001 and from the figure of the output of sensor.Load on the cable-shaped piezoelectric element 2001 that is undertaken by the applicant and be from the shown phenomenon of the test of relation between the output (hereinafter being referred to as " sensor output ") of sensor: when the bending load shown in Figure 50 (a) was applied on the cable-shaped piezoelectric element 2001, the output of sensor presented the waveform shown in Figure 50 (b).
(1) particularly, when not having load to be applied to cable-shaped piezoelectric element 2001 at moment t0, sensor output presents 2 (V).(2) when when moment t1 bending load is applied to cable-shaped piezoelectric element 2001 with assigned direction, sensor output increases to 4 (V) but transfers 0 (V) immediately to, and gets back to 2 (V) once more.(3) subsequently, even when cable-shaped piezoelectric element kept crooked, sensor output still presented 2 (V).(4) when cable-shaped piezoelectric element 2001 when moment t3 replys its original-shape, sensor output drops to 0.8 (V) in moment in this, but transfers 2.2 (V) immediately to, and gets back to 2 (V) once more.
When with test 2 identical conditions under, cable-shaped piezoelectric element 2001 is crooked on the direction opposite with bending direction in the test (2) crosses 180 when spending, sensor output is reduced to 0 (V), but transfers 4 (V) immediately to, and gets back to 2 (V) once more.
When under identical condition, when cable-shaped piezoelectric element 2001 was crooked fast in test (2), sensor output was greater than the value that is presented in test (2).When cable-shaped piezoelectric element 2001 was crooked at a slow speed, sensor output diminished.
When crooked piezoelectric element 2001 is spent through 180 on the direction opposite with above-mentioned bending direction, can produce identical result.Particularly, when cable-shaped piezoelectric element 2001 is crooked fast, big fluctuation can appear.When cable-shaped piezoelectric element 2001 was crooked at a slow speed, less fluctuation can appear.From these results, can obtain the longitudinal bending direction of single cable-shaped piezoelectric element 2001 and the acceleration of flexure operation.Thereby, can obtain analogue output unit by using cable-shaped piezoelectric element 2001.
Figure 46 has shown that cable-shaped piezoelectric element 2001 and vibration detecting sensor 2017 are used for the example of crime protective fence 2019, and this piezoelectric element 2001 and vibration detecting sensor 2017 all belong to the present invention.In the present embodiment, cable-shaped piezoelectric element 2001 stretches at crime protective fence 2019 tops.When the invador touches cable-shaped piezoelectric element 2001, will detect vibration, and the alarm meeting that indication has the invador to exist is reported to the user by calling set 2051.
Figure 47 has shown that cable-shaped piezoelectric element 2001 and vibration detecting sensor 2017 are used for the example of crime protective fence 2021, and this piezoelectric element 2001 and vibration detecting sensor 2017 all belong to the present invention.In the present embodiment, cable-shaped piezoelectric element 2001 is used for the decorative parts at crime protective fence 2021 tops.Particularly, cable-shaped piezoelectric element 2001 is treated to the reservation shape of sweep 2023 and straight line portion 2025 formations, and is used as decorative parts with its original-shape.When the invador touches this decorative parts, will detect vibration, and the alarm meeting that indication has the invador to exist is reported to the user by calling set 2051.
In the present embodiment, the cable-shaped piezoelectric element 2001 of vibration can be accurately detected, when being treated to reservation shape, the building block of scope protective fence 2021 can be used to constitute.Can constitute the parts and the Sensor section of crime protective fence 2021 with the normal elements manufacturing.Therefore, can attempt to simplify manufacture process.
When cable-shaped piezoelectric element 2001 during, shown in Figure 46 and 47, must eliminate the signal of not expecting that when contact fences such as bird, causes as this crime protective fence.For this reason, filtering part 2057 shown in Figure 45 preferably is set, when cable-shaped piezoelectric element 2001 is out of shape by pushing force, and being contact owing to the people, this pushing force produces, this moment, this filtering part 2057 had from eliminating the not filtering characteristic of wanted signal in the output of the signal of cable-shaped piezoelectric element 2001, and can extract the unique frequencies part from the signal output from cable-shaped piezoelectric element 2001.Requisite needs are features of analyzing vibration for determining filtering characteristic, and the feature of this vibration produces when human body contact piezoelectric element, and this vibration performance is optimized.
Need to use material, be used for cable-shaped piezoelectric element to be remained the member or the element of reservation shape with redetermined rigidity.Therefore, shape is destroyed when the people applies power on cable-shaped piezoelectric element.Yet this shape can't be by by vibration that birds or spontaneous phenomenon caused or physical impact and destroy.Like this, can in signal output, create a difference, can distinguish invador and other incidents thus.Like this, can obtain the accuracy enhancing of criminal's protection.
Figure 48 has shown that cable-shaped piezoelectric element 2001 of the present invention is used for the situation of nurse call station switch 2027.Cable-shaped piezoelectric element 2001 is treated to reservation shape, such as whirlpool shape etc., and is housed in the Switch main body 2029.In case of emergency, the patient gently grasp Switch main body 2029, can send signal to the call center thus, this signal can be reported abnormal conditions, and nurse call station switch highly reliably can be provided thus.
Still have the situation that the patient can not grasp switch or press the button; The shape of switch can freely form according to this situation.For example, cable-shaped piezoelectric element 2001 can embed in the smooth body 2029, shown in Figure 49 (a).Cable-shaped piezoelectric element 2001 also can embed in the tubular body 2029, shown in Figure 49 (c).In this case, the patient is easy to send signal by beaing switch 2027 lightly.Cable-shaped piezoelectric element 2001 also can embed in the rod shape body 2029 that is placed on the mount pad 2030, shown in Figure 49 (c).In this case, the patient is easy to by knocking or rocker switch 2027 sends signal.
Above-mentioned crime protective fence and nurse call station switch only are the examples that cable-shaped piezoelectric element is used.Needless to say, except being applied to above-mentioned example, cable-shaped piezoelectric element of the present invention also can be used for detecting the product of vibration, pressure and stress.
The foregoing description illustrated the situation that volute spring 2011 and flat spring 2013 and core electrode 2003 and/or clad 2009 are endowed shape retention properties has been set for cable-shaped piezoelectric element 2001 is remained reservation shape, and all piezoelectric elements that presented the cable shape and had a predetermined shape retention properties all belong to the present invention.
Although so described various embodiment of the present invention, the present invention is not limited to the project described in the embodiment.Those skilled in the art are that the present invention institute is foresighted based on the scope of claim, instructions description and replacement or the application that known technology can be made; And fall in the scope that the present invention seeks to protect.
Describe the present invention in detail with reference to specific embodiment, yet, it will be apparent to one skilled in the art that and can under situation about not departing from the scope of the present invention with spirit, carry out substitutions and modifications the present invention.
The present invention requires the Japanese patent application No.2004-263973 that submits on September 10th, 2004; The Japanese patent application No.2004-263974 that submits on September 10th, 2004; Right of priority with the Japanese patent application No.2004-264179 that submits on September 10th, 2004; All these is herein incorporated with for referencial use with its full content.
Industrial applicability
As above, vibration detecting sensor of the present invention can needing be used for the equipment of Precision Test and measuring vibrations And field.
Claims (29)
1, a kind of vibration detecting sensor comprises:
Substrate; With
Cable-shaped piezoelectric element is linked in sequence with at least one end of described substrate,
Wherein, described cable-shaped piezoelectric element comprises in the radial direction at it:
Core electrode;
Piezoelectric member, it is around described core electrode setting;
External electrode, it is around described piezoelectric element setting; With
Clad, it is around described external electrode setting.
2, vibration detecting sensor according to claim 1, wherein said cable-shaped piezoelectric element has sweep.
3, vibration detecting sensor according to claim 1 and 2, wherein weights is affixed at least a portion of described piezoelectric element.
4, vibration detecting sensor according to claim 1, wherein said cable-shaped piezoelectric element bending, so that in the plane of the principal plane that is roughly parallel to described substrate, become circular, and weights is affixed to the open end of described piezoelectric element, and it is relative that this open end and described piezoelectric element are fixed to a described suprabasil end.
5, vibration detecting sensor according to claim 1, wherein said cable-shaped piezoelectric element is connected with described substrate, and the two ends of described cable-shaped piezoelectric element are configured to almost parallel each other, and the center section between the two ends forms circular.
6, vibration detecting sensor according to claim 1, wherein said cable-shaped piezoelectric element form coil shape and are provided with roughly to meet at right angles with described substrate.
7, vibration detecting sensor according to claim 1, wherein said cable-shaped piezoelectric element forms coil shape, and stretches out from described substrate, so that the diameter of coil increases with the increase apart from the distance in described base.
8, vibration detecting sensor according to claim 1,
Wherein in described substrate, form through hole,
Wherein said cable-shaped piezoelectric element is connected with described substrate, so as in described through hole roughly parallel with the principal plane of described substrate and
Wherein weights is affixed to the open end of described cable-shaped piezoelectric element, and it is relative that this open end and described cable-shaped piezoelectric element are fixed to a described suprabasil end.
9, vibration detecting sensor according to claim 1,
Wherein in described substrate, form through hole,
Wherein said cable-shaped piezoelectric element is connected with described substrate, so as roughly parallel in described through hole with the principal plane of described substrate,
Wherein said cable-shaped piezoelectric element be bent into roughly U-shaped and
Wherein said cable-shaped piezoelectric element two ends all are fixed in the described substrate.
10, according to any one described vibration detecting sensor in the claim 1 to 9, further comprise the outer cover that is used to hold described substrate and described cable-shaped piezoelectric element.
11, according to any one described vibration detecting sensor in the claim 1 to 9, wherein said cable-shaped piezoelectric element is connected with described substrate, so that described cable-shaped piezoelectric element hangs from the lower surface of described substrate, so that stretch out downwards.
12, vibration detecting sensor according to claim 1, wherein said cable-shaped piezoelectric element has shape retention properties.
13, according to any one described vibration detecting sensor in the claim 1 to 12, wherein said piezoelectric member comprises resin and piezoelectric ceramics.
14, a kind of pressure sensitive switch comprises: the piezoelectricity cable, and it has the piezoelectric element structure that is formed by piezoelectric ceramics fine particle and resin-based materials,
At least a portion of wherein said piezoelectricity cable is outstanding from carrying plane,
This outshot be bent into sweep and
Control circuit is connected with the bottom part of described piezoelectricity cable.
15, pressure sensitive switch according to claim 14 wherein is provided with the gap between the sweep of described piezoelectricity cable and described carrying plane.
16, according to claim 14 or 15 described pressure sensitive switch, the sweep of wherein said piezoelectricity cable is with single curvature bending.
17,, further comprise the stationary installation that is used for fixing described piezoelectricity cable exit part according to any one described pressure sensitive switch of claim 14 to 17.
18, a kind of cable-shaped piezoelectric element has shape retention properties, and comprises at least along its radial direction:
Core electrode;
Piezoelectric member, it is around described core electrode setting;
External electrode, it is around described piezoelectric element setting; With
Clad, it is around described external electrode setting.
19, a kind of cable-shaped piezoelectric element comprises along its radial direction:
Core electrode;
Piezoelectric member, it is around described core electrode setting;
External electrode, it is around described piezoelectric element setting; With
Clad, it is around described external electrode setting; With
The shape retaining member, it is inserted between described external electrode and the described clad in the radial direction described, and described cable-shaped piezoelectric element is remained reservation shape.
20, cable-shaped piezoelectric element according to claim 19, wherein said shape retaining member are at least a kind of in flat spring and the volute spring.
21, a kind of cable-shaped piezoelectric element comprises in its radial direction:
Core electrode;
Piezoelectric member, it is around described core electrode setting;
External electrode, it is around described piezoelectric element setting; With
Clad, it centers on described external electrode setting,
Wherein said core electrode has the shape retention properties that is used for described cable-shaped piezoelectric element is remained reservation shape.
22, cable-shaped piezoelectric element according to claim 21, wherein said core electrode is formed by marmem.
23, a kind of cable-shaped piezoelectric element has shape retention properties, comprises along its radial direction:
Core electrode;
Piezoelectric member, it is around described core electrode setting;
External electrode, it is around described piezoelectric element; With
Clad, it centers on described external electrode setting,
Wherein said clad has the shape retention properties that is used for described cable-shaped piezoelectric element is remained reservation shape.
24, cable-shaped piezoelectric element according to claim 23, wherein said clad is formed by heat-shrinkable tube.
25, according to any one described cable-shaped piezoelectric element in the claim 19 to 24, wherein said piezoelectric member is formed by resin and piezoelectric ceramics.
26, according to any one described cable-shaped piezoelectric element in the claim 19 to 25, wherein said reservation shape is at least a in coiled type, circle, section shape, corrugated and the whirlpool shape.
27, a kind of vibration detecting sensor comprises:
According to any one described cable-shaped piezoelectric element in the claim 18 to 26; With
Control circuit, it is used to detect the signal output from described cable-shaped piezoelectric element.
28, a kind of crime protective fence comprises:
According to any one described cable-shaped piezoelectric element in the claim 18 to 26.
29, a kind of nurse call station switch comprises:
According to any one described cable-shaped piezoelectric element in the claim 18 to 26.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP263974/2004 | 2004-09-10 | ||
| JP264179/2004 | 2004-09-10 | ||
| JP2004264179A JP2006079995A (en) | 2004-09-10 | 2004-09-10 | Pressure sensitive switch |
| JP263973/2004 | 2004-09-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101044378A true CN101044378A (en) | 2007-09-26 |
Family
ID=36159262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2005800360218A Pending CN101044378A (en) | 2004-09-10 | 2005-09-09 | Vibration detecting sensor and pressure sensitive switch using cable-shaped piezo-electric element |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2006079995A (en) |
| CN (1) | CN101044378A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105633270A (en) * | 2016-02-24 | 2016-06-01 | 南京邮电大学 | Helix tube type piezoelectric spring and preparation method therefor |
| CN114993525A (en) * | 2022-07-01 | 2022-09-02 | 西安交通大学 | Deformable immersion pressure sensor based on conduction characteristics of ultrasonic waves on particle materials |
-
2004
- 2004-09-10 JP JP2004264179A patent/JP2006079995A/en not_active Withdrawn
-
2005
- 2005-09-09 CN CNA2005800360218A patent/CN101044378A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105633270A (en) * | 2016-02-24 | 2016-06-01 | 南京邮电大学 | Helix tube type piezoelectric spring and preparation method therefor |
| CN105633270B (en) * | 2016-02-24 | 2018-08-21 | 南京邮电大学 | A kind of helix tube type piezoelectric spring and preparation method thereof |
| CN114993525A (en) * | 2022-07-01 | 2022-09-02 | 西安交通大学 | Deformable immersion pressure sensor based on conduction characteristics of ultrasonic waves on particle materials |
| CN114993525B (en) * | 2022-07-01 | 2023-04-07 | 西安交通大学 | Deformable immersion pressure sensor based on conduction characteristics of ultrasonic waves on particle materials |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2006079995A (en) | 2006-03-23 |
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