CN101041425A - Preparation and purification method of hydrogen selenide - Google Patents

Preparation and purification method of hydrogen selenide Download PDF

Info

Publication number
CN101041425A
CN101041425A CN 200710011160 CN200710011160A CN101041425A CN 101041425 A CN101041425 A CN 101041425A CN 200710011160 CN200710011160 CN 200710011160 CN 200710011160 A CN200710011160 A CN 200710011160A CN 101041425 A CN101041425 A CN 101041425A
Authority
CN
China
Prior art keywords
gas
water
steel cylinder
selenium hydride
selenide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN 200710011160
Other languages
Chinese (zh)
Other versions
CN100567140C (en
Inventor
王同文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DALIAN LIFANG CHEMICAL TECHNOLOGY Co Ltd
Original Assignee
DALIAN LIFANG CHEMICAL TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DALIAN LIFANG CHEMICAL TECHNOLOGY Co Ltd filed Critical DALIAN LIFANG CHEMICAL TECHNOLOGY Co Ltd
Priority to CNB2007100111606A priority Critical patent/CN100567140C/en
Publication of CN101041425A publication Critical patent/CN101041425A/en
Application granted granted Critical
Publication of CN100567140C publication Critical patent/CN100567140C/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Drying Of Gases (AREA)

Abstract

The invention discloses a purifying method to prepare hydrogen selenide, which comprises the following steps: reacting Al2Se3 and H2O; getting hydrogen selenide H2Se; removing water of H2Se gas through condensing; using Al2Se3 particle to adsorb remain water; entering into carboy to condense and liquefy; evacuating the carboy under the condition of cool bath; eliminating non-condensable gas impurity of solution in the liquid; closing the valve of carboy; getting purify hydrogen selenide; absorbing water; taking-up active solid of reacting with water as raw material; reacting Al2Se3 and H20; getting H2Se; reaching highly effective dewater effect.

Description

The preparation purification process of Selenium hydride
Technical field
The present invention relates to the preparation purifying, particularly aluminum selenide of chemical gas Selenium hydride and the Selenium hydride of water reaction generation and prepare purifying, be characterized in the water content height, its purifying emphasis is dehydration.
Background technology
Selenium hydride is a kind of liquable serious toxic gas, fills with steel cylinder.Hydrogen selenide gas is mainly used in synthesizing inorganic or organic selenium-containing compound, the preparation metallic selenium.High-purity Selenium hydride is semiconductor doping gas and copper indium diselenide solar cell precursor.
Several methods that prepare Selenium hydride are arranged, as: 1., can directly synthesize Selenium hydride more than 350 ℃ by hydrogen and simple substance selenium; 2., metal selenide and water or diluted acid effect; 3., selenium reacts with carbon monoxide and water in the presence of triethylamine.Usually adopt preceding two kinds of methods.
Metal selenide is easier to control with the method reaction process ratio that Selenium hydride is produced in water or diluted acid effect, and cost is lower, also compares safety.Particularly, the scope that this method is fit to use is wider, can prepare voluntarily in common laboratory.Metal selenide adopts aluminum selenide usually.
But the gas of this prepared in laboratory can only instant generating and using, and both purifying not can not store and forward, has influenced its applicability.The hydrogen selenide gas that this aluminum selenide hydrolysis takes place fills steel cylinder as through appropriate purifying, just may store, transport and use as product.
So far, also not about this aluminum selenide hydrolysis hydrogen selenide gas purifying that takes place and the public technology that fills.EP 0 470936 A1, WO 00/20330 are the patents of binomial hydrogen-containing gas purifying, and SiH mainly is discussed 4, GeH 4, NH 3, AsH 3, PH 3, B 2H 6High-purity purification technique of electron gas, and do not relate to H 2Se does not relate to the general purifying of status nascendi gas yet.
For the dehydration of special gas purifying, generally adopt dew point condensation method, absorption process, absorption method, rectification method, membrane separation process etc.Dew point condensation method, absorption method are more convenient.When adopting absorption method, when shallow degree dehydration and dehydrating amount are big, adopt calcium chloride more; When middle deep dehydration and dehydrating amount are little, adopt silica gel more; Deep dehydration and when taking off trace water adopts molecular sieve.
Summary of the invention
The present invention will solve the issues of purification that Selenium hydride is produced, and a kind of preparation purification process of Selenium hydride of aluminum selenide hydrolysis generation is provided.
The preparation purification process of Selenium hydride of the present invention is raw material aluminum selenide Al 2Se 3With water H 2Selenium hydride H takes place in the O reaction 2Behind the Se, H 2Water in the Se gas is removed through condensation; It is characterized in that: continue to adsorb residual H with containing aluminum selenide particulate adsorber 2Moisture content in the Se gas makes H 2Behind the Se gas depth drying, H 2Se gas enters the steel cylinder inner condensat liquidization; Liquid H is housed 2The steel cylinder of Se vacuumizes under cryostat, gets rid of the noncondensable gas impurity that is dissolved in the liquid; Close cylinder valve and directly be contained in the interior purifying Selenium hydride of steel cylinder.Purifying to hydrogen selenide gas with the technological method that fills employing is: aluminum selenide Al 2Se 3With water H 2Selenium hydride H takes place in the O reaction 2Behind the Se, H 2Se gas anhydrates in the following condensation of the dew-point temperature of water; Continue to make the gas depth drying with aluminum selenide particle absorption residual moisture; Subsequently, H 2Se is low-temperature liquefaction in steel cylinder; Finish one batch fill after, liquid H is housed 2The gas bomb of Se is light and slow vacuumizing under the low temperature cryostat, gets rid of the noncondensable gas that is dissolved in the liquid; At last, close cylinder valve, finish the whole purifying of this batch and fill operation.Absorption moisture content also takes out with the sorbent material of water reaction and to be re-used as raw material aluminum selenide Al 2Se 3With water H 2Selenium hydride H takes place in the O reaction 2Se.
The present invention's adsorption method that dewaters is directly to adopt aluminum selenide as sorbent material.The present invention preferably directly gets the fresh Al of high reaction activity 2Se 3, be broken into small-particle, as H 2The dehydrated adsorbent of Se purifying can not produce new impurity, obtains efficient adsorption effect.The present invention makes H 2The Se liquefaction of gases charges into to vacuumize behind the steel cylinder to be got rid of non-condensable gas and is equivalent to flash distillation.Put it briefly, the present invention finishes simultaneously in purge process and fills, and purge process comprises the dew point condensation-Al of water 2Se 3Absorption-liquid H 2The Se flash distillation.The characteristics of aluminum selenide are strong with the water reactive behavior.Adopt the aluminum selenide particle of high reaction activity to do the sorbent material dehydration, reach the high-efficiency dehydration effect.After the aluminum selenide particle absorption moisture content reduction as sorbent material, also be directly used in the raw material of preparation Selenium hydride, make full use of resource, and reduced of the pollution of discarded sorbent material environment.Through handling like this, make Selenium hydride become a kind of liquefied gas product of packing with steel cylinder that 99.95% above purity is arranged.
Description of drawings
Fig. 1 is adsorber and Al 2Se 3The granule adsorbent structural representation; Wherein, 1-Al 2Se 3Granular filler, 2-adsorber, 3-man-made fiber filtering layer, 4-H 2The Se gas inlet, 5-H 2The Se pneumatic outlet.Al 2Se 3The size 3-8mm of granular filler 1.
Fig. 2 is H 2Se purification for gas and fill schematic flow sheet; Wherein, the nascent H of 6- 2The Se gas introduction port, 7-ice bath thermometer, 8-ice bath groove, 9-saturation vapour condenser, 1-Al 2Se 3Granular filler, 2-adsorber, 3-man-made fiber filtering layer, 4-H 2Se gas is at the inlet of adsorber, 5-H 2Se gas is in the outlet of adsorber, 10-liquid H 2The Se steel cylinder, 11-low-reading thermometer, 12-low temperature bath, 13-cascade refrigeration machine, 14-tail gas absorber, 15-solid KOH particle, 16-man-made fiber filtering layer, 17-gas buffer jar, 18-tail gas blow-down pipe, 19-vacuum pump, 20~24-stopping valve.
Embodiment
A kind of example of preparation purification process of Selenium hydride of the present invention, the flow process of its process is as follows:
(Al 2Se 3+ H 2O) → wet H 2Se gas → (0 ℃) removes H 2O → use Al 2Se 3Absorption H 2H in O → (50 ℃) steel cylinder 2Se liquefaction → (50 ℃) liquid H 2The Se steel cylinder is light and slow to vacuumize → closes steel cylinder valve complete operation
Contrast Fig. 2:
Nascent H 2Se gas 6 feeds saturation vapour condensers 9, a part of saturation water ice bath groove 8 in below 0 ℃ under the cooling condensation remove, then entering the mouth by adsorber 4 enters adsorber 2, residual moisture content wherein and adsorbent A l 2Se 3 Granular filler 1 contact reacts is fallen H 2After the man-made fiber filtering layer 3 that Se gas finish-drying, the particulate of gas entrainment are adsorbed device filters out, enter H by steel cylinder valve 21 by the outlet 5 of adsorber 2 2 Se steel cylinder 10, H 2 Se steel cylinder 10 is positioned at-55 ℃ of low temperature baths 12, and low-temperature receiver provides H by superposition type small-sized refrigerating unit 13 2The Se boiling point is-42 ℃, H 2Se is condensed, and non-condensable gases is via steel cylinder valve 22, through tail gas absorber 14, gas buffer jar 17, by 18 emptying of tail gas blow-down pipe.Finish one batch fill after, close steel cylinder valve 21, liquid H is housed 2The gas bomb 10 of Se by vacuum pump 19 light and slow vacuumizing, by steel cylinder valve 22, is got rid of the noncondensable gas that is dissolved in the liquid low temperature cryostat 12 times.At last, close steel cylinder valve 22, take off steel cylinder 10.
The following describes the concrete grammar of each operation steps.
The present invention is the unstripped gas access port with the outlet that the producer gas generator of hydrogen selenide gas takes place for aluminum selenide and water reaction.No matter the hydrogen selenide gas that the hydrogen selenide gas producer takes place has or not stream of nitrogen gas to follow, all be applicable to technology provided by the present invention.
H 2Major impurity is H among the Se 2O, H 2S, N 2, O 2, and THC (total hydrocarbon).
Al 2Se 3With H 2The H that the O reaction takes place 2Be full of H among the Se 2O steam is wet H 2Se in order to obtain dry gas, must thoroughly take off contained humidity.The present invention adopts the cryosel water-bath with saturated H earlier 2The condensation of O vapour.Then, use chemiadsorption, with Al 2Se 3As sorbent material, compare Al with other drying means 2Se 3Has the most convenient advantage efficiently.H 2O steam runs into the Al as sorbent material 2Se 3, upright both with its reaction, be converted into H 2Se.Can make adsorbent A l forever 2Se 3Keep fresh,, just can take off it and go to use as into H takes place because do not wait it to die down 2The raw material A l of Se 2Se 3And use, again with fresher Al 2Se 3It is substituted.Make Al 2Se 3The method of sorbent material is exactly with Al 2Se 3Piece is broken into pieces, and the particle of screening diameter 3-8mm scope is loaded in the adsorber.For the gas that treating lab takes place, gas volume is little, adsorber diameter 20-30mm, and the long 300-500mm of gas path just can produce a desired effect.Such treating processes, H 2Contain H among the Se 2The O amount can drop to below the 100ppm.
H 2The cryogenic condensation process of Se is that the 2L twoport gas bomb in the low temperature cryostat carries out.Low-temperature receiver is provided by a superposition type small-sized refrigerating unit, and the unit refrigeration temperature is controlled at-56 ℃.Raw spirit will be delivered to the low temperature cryostat as cold carrier by the alcohol of refrigeration with pump.
H 2The boiling point of Se is-42 ℃, under-50 °~56 ℃ envrionment temperature, and H 2Se is condensed, and foreign gas H 2S, N 2, O 2, and THC (THC is with CH 4Be representative) then be non-condensable gas, with H 2Se separates.
Finish one batch fill after, also need to concentrate and deviate to be dissolved in liquid H 2The non-condensable gas of Se.Be dissolved in liquid H 2The non-condensable gas of Se removes under negative pressure.Because the dissolved non-condensable gas is to shift out liquid phase by diffusion way, process is slower, vacuumize with under the low temperature, low pressure reduction, little free air delivery is advisable, the pumpdown time is lasting a little longer, 20~40 minutes, light and slow operation, more appropriate.Foreign gas content can drop to below the 50ppm.2L gas bomb H 2The filling weight of Se must not surpass 2800g.

Claims (2)

1, a kind of preparation purification process of Selenium hydride, raw material aluminum selenide Al 2Se 3With water H 2Selenium hydride H takes place in the O reaction 2Behind the Se, H 2Water in the Se gas is removed through condensation; It is characterized in that: continue to adsorb residual H with containing aluminum selenide particulate adsorber 2Moisture content in the Se gas makes H 2Behind the Se gas depth drying, H 2Se gas enters the steel cylinder inner condensat liquidization; Liquid H is housed 2The steel cylinder of Se vacuumizes under cryostat, gets rid of to be dissolved in and does not coagulate foreign gas in the liquid; Close cylinder valve and directly be contained in the interior purifying Selenium hydride of steel cylinder.
2, as the preparation purification process of the said Selenium hydride of claim 1, it is characterized in that: absorption moisture content also takes out with the sorbent material of water reaction and to be re-used as raw material aluminum selenide Al 2Se 3With water H 2Selenium hydride H takes place in the O reaction 2Se.
CNB2007100111606A 2007-04-26 2007-04-26 The preparation purification process of Selenium hydride Expired - Fee Related CN100567140C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNB2007100111606A CN100567140C (en) 2007-04-26 2007-04-26 The preparation purification process of Selenium hydride

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNB2007100111606A CN100567140C (en) 2007-04-26 2007-04-26 The preparation purification process of Selenium hydride

Publications (2)

Publication Number Publication Date
CN101041425A true CN101041425A (en) 2007-09-26
CN100567140C CN100567140C (en) 2009-12-09

Family

ID=38807257

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2007100111606A Expired - Fee Related CN100567140C (en) 2007-04-26 2007-04-26 The preparation purification process of Selenium hydride

Country Status (1)

Country Link
CN (1) CN100567140C (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101811676A (en) * 2010-05-21 2010-08-25 光明化工研究设计院 Preparation method of hydrogen selenide
CN102267690A (en) * 2011-06-03 2011-12-07 光明化工研究设计院 Preparation method of hydrogen selenide
CN102471062A (en) * 2009-10-14 2012-05-23 大阳日酸株式会社 Method and apparatus for supplying hydrogen selenide mixed gas for solar cells
TWI474968B (en) * 2011-01-27 2015-03-01 Taiyo Nippon Sanso Corp Hydrogen selenium production plant
CN112142015A (en) * 2020-09-30 2020-12-29 苏州金宏气体股份有限公司 High-purity hydrogen selenide purification process using carbon nano tube
CN113800481A (en) * 2021-08-30 2021-12-17 苏州金宏气体股份有限公司 Synthesis process of hydrogen selenide
CN113816346A (en) * 2021-08-30 2021-12-21 苏州金宏气体股份有限公司 Process for purifying hydrogen selenide by using modified metal organic framework

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100255834B1 (en) * 1997-10-31 2000-05-01 박호군 Spherical ice particle product device and method
US6453924B1 (en) * 2000-07-24 2002-09-24 Advanced Technology Materials, Inc. Fluid distribution system and process, and semiconductor fabrication facility utilizing same
US20060057766A1 (en) * 2003-07-08 2006-03-16 Quanxi Jia Method for preparation of semiconductive films

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102471062A (en) * 2009-10-14 2012-05-23 大阳日酸株式会社 Method and apparatus for supplying hydrogen selenide mixed gas for solar cells
CN102471062B (en) * 2009-10-14 2014-04-16 大阳日酸株式会社 Method and apparatus for supplying hydrogen selenide mixed gas for solar cells
CN101811676A (en) * 2010-05-21 2010-08-25 光明化工研究设计院 Preparation method of hydrogen selenide
TWI474968B (en) * 2011-01-27 2015-03-01 Taiyo Nippon Sanso Corp Hydrogen selenium production plant
CN102267690A (en) * 2011-06-03 2011-12-07 光明化工研究设计院 Preparation method of hydrogen selenide
CN102267690B (en) * 2011-06-03 2013-01-30 中昊光明化工研究设计院有限公司 Preparation method of hydrogen selenide
CN112142015A (en) * 2020-09-30 2020-12-29 苏州金宏气体股份有限公司 High-purity hydrogen selenide purification process using carbon nano tube
CN113800481A (en) * 2021-08-30 2021-12-17 苏州金宏气体股份有限公司 Synthesis process of hydrogen selenide
CN113816346A (en) * 2021-08-30 2021-12-21 苏州金宏气体股份有限公司 Process for purifying hydrogen selenide by using modified metal organic framework

Also Published As

Publication number Publication date
CN100567140C (en) 2009-12-09

Similar Documents

Publication Publication Date Title
CN100567140C (en) The preparation purification process of Selenium hydride
TWI707718B (en) Full-temperature pressure swing adsorption full-component recovery and reuse method of exhaust gas from LED metal oxide chemical vapor deposition (MOCVD) process
TWI776056B (en) A method for full temperature pressure swing adsorption ammonia extraction and reuse of LED-MOCVD process waste gas
CN103920365B (en) Nitrogen in variable-frequency variable-voltage absorption recovery roasting pyrite furnace gas and the method for sulfur dioxide
CN106145037B (en) The method that the device and High Purity Hydrogen processed of hydrogen are recycled from silicon epitaxial furnace emptying end gas
CN105032113B (en) Process for capturing carbon dioxide in flue gas based on wet reclamation technology
CN101530726A (en) Method for processing waste gas from the production of viscose chemical fiber
CN104944393B (en) A kind of apparatus and method of concentrate purifying high-purity helium
CN102249259A (en) Purification process of high-purity ammonia
CN109097121A (en) A kind of gas dehydration demercuration and mercury recyclable device and method
CN108821253A (en) A kind of purification system and processing method of electron level phosphine
CN104399353A (en) Methane-carbon dioxide-nitrogen gas or hydrogen gas multi-component separation method and device
CN113336225B (en) Production device and process for preparing electronic grade carbon monoxide from synthetic ammonia tail gas
CN104140085B (en) The apparatus and method of water and carbon dioxide in a kind of deep removal nitrous oxide
CN108163868A (en) A kind of boron chloride purification devices
CN205084580U (en) Toluene recovery unit
CN106119091A (en) A kind of methane purification and canned system and technique
CN209259696U (en) A kind of continuous uninterrupted high-purity hydrogen phosphide process units
CN212024774U (en) System for preparing 4N-purity hydrogen sulfide gas
CN106044710A (en) Method for purifying electron-grade hydrogen chloride
CN1704336A (en) Method and apparatus for purification treatment of ammonia
CN113262628A (en) Production device and process for preparing electronic-grade high-purity methane from synthetic ammonia tail gas
CN1465523A (en) Method for refining mixed gas at least containing carbon monoxide, carbon dioxide, nitrogen and hydrogen
CN111333037A (en) System and method for preparing high-purity hydrogen sulfide gas
CN208667111U (en) A kind of purification system of carbonyl sulfur

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20091209

Termination date: 20150426

EXPY Termination of patent right or utility model