CN101030043A - Ultraviolet radiation device - Google Patents
Ultraviolet radiation device Download PDFInfo
- Publication number
- CN101030043A CN101030043A CNA2007100876129A CN200710087612A CN101030043A CN 101030043 A CN101030043 A CN 101030043A CN A2007100876129 A CNA2007100876129 A CN A2007100876129A CN 200710087612 A CN200710087612 A CN 200710087612A CN 101030043 A CN101030043 A CN 101030043A
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- China
- Prior art keywords
- rod lens
- lamp
- light
- incidence
- plane
- Prior art date
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
Abstract
An ultraviolet irradiation device is provided, having a claviform lens which would not generates damages on a cetral portion of an incidence face, and by which an outer profile of an irradiation region becomes clear. The ultraviolet irradiation device comprises a lamp for emitting ultraviolet ray, an elliptic reflector, and a cylindrical claviform lens which is arranged in a first cylinder. An end of a long axes direction of the claviform lens is an incidence face, and the other end is an irradiation face. The claviform lens is configured that the incidence face is positioned at a second focus F2 of the elliptic reflector. A subulate portion is formed on an edge of the incidence face of the claviform lens. The incidence face side of the claviform lens is used as a front end, and inserted into the first cylinder and fixed. Light focused by the elliptic reflector is irradiated on plane regions except for subulate portion on the incidence face of the claviform lens.
Description
Technical field
This aspect relates to a kind of in order to make UV cured property sticker sclerosis etc. and to the ultraviolet ultraviolet lamp of certain area illumination of handled object.
Background technology
In the past,, and use ultraviolet lamp for the figure (pattern) with regulation makes seal agent (ink) or etchant resist (resist) exposure that is printed on the UV cured property on the substrate.
For example, engage at the delicate joint of electronic devices and components and optical component, DVD, in the processing of semiconductor liquid crystal flat-panel monitor (panel display) etc., need only shine equably certain zone of irradiated body.As the ultraviolet lamp that is applicable to such purposes, URL:http as the Internet: //www.htl.co.jp/pro/uv/toscure251.html[ultraviolet ray point irradiation unit, Ha リ ソ ン East sesame ラ イ テ ィ Application グ Co., Ltd., (retrieval on February 22nd, 2006)] upward disclosed, generally use rod lens (rod-lens).This rod lens generally is fixed in the metal cylindrical member.
Ultraviolet lamp has a kind of lamp (lamp), and this lamp can be launched and contains ultraviolet light.To focus on the 2nd focus from the light that this lamp is launched by catoptron (reflector).Make on the face of a side of long axis direction end of light incident rod lens of such focusing.The light of incident rod lens carries out total reflection on one side repeatedly in rod lens, along long axis direction advance on one side, penetrate to the outside from another end face again.Similar from the peripheral shape of the shape in the zone that light shone that rod lens penetrates and rod lens.In order to suppress irreflexive generation of the plane of incidence, make the exterior contour of irradiation area clear simultaneously, preferably there are corner angle at the edge of the long axis direction end of rod lens ideally.
But, when the rod lens that the edge is had corner angle inserts cylindrical member, in this operation, because the inside surface of the front end of rod lens and cylindrical member contacts, so lacked this marginal portion sometimes.If damaged in the generation of the shadow surface edge of rod lens like this, then the irradiation area at light also can produce damaged.Therefore, insert in the operation, shadow surface had better not be carried out as front at cylindrical member to rod lens.
To this, considered a kind of method, promptly on the edge of rod lens shadow surface, curvature is set, this shadow surface as front end, is inserted rod lens in the cylindrical member.But in the method, the exterior contour in rayed zone has fogged.In addition, also considered the plane of incidence of rod lens as front end, rod lens is inserted method in the cylindrical member.But, in this this method, also may on the plane of incidence of rod lens, produce damaged and crackle.The so damaged and crackle that produces on rod lens also reaches the core of the plane of incidence sometimes.
Form accuracy at catoptron is high, when the illuminating source of other lamp is pointolite, can make on its very small region that focuses on the rod lens plane of incidence.But in fact focal zone has broadening to a certain degree.Therefore, to the damaged and crackle that its core enlarges, the diffuse reflection of incident light then can take place in this marginal portion if produce not only in this part on the plane of incidence of rod lens.Irreflexive light takes place like this carry out unusual reflection repeatedly in device.Can cause the problem of residual unusual light trace on the shadow surface of light like this.
The purpose of this aspect is to provide a kind of ultraviolet lamp with rod lens, and this rod lens can not produce the damage that extends to this plane of incidence core, and can make the exterior contour of irradiation area become clear.
Summary of the invention
The invention provides a kind of ultraviolet lamp, have: emission contains the lamp of ultraviolet light; The elliptic reflector of the light that focusing is launched from above-mentioned lamp; End with columnar shape and long axis direction is that the plane of incidence other end of light is the rod lens of the shadow surface of light; And the cylindrical body of placing above-mentioned rod lens, the light source of the above-mentioned lamp of this ultraviolet lamp is positioned on the 1st focus of above-mentioned elliptic reflector, the light of launching from above-mentioned lamp focuses on the 2nd focus of above-mentioned elliptic reflector, the plane of incidence of above-mentioned rod lens is positioned on the 2nd focus of above-mentioned elliptic reflector, be characterized in: the plane of incidence edge of above-mentioned rod lens has cone portion, and the light that is focused on by above-mentioned elliptic reflector is incident on the plane domain except the above-mentioned plane of incidence this taper portion.
In this ultraviolet lamp, the shadow surface lateral edges of rod lens preferably has corner angle.Lamp preferably uses pointolite type discharge lamp.
In ultraviolet lamp of the present invention, the taper part of regulation is set in the plane of incidence marginal portion of rod lens.Then, make light inject the inboard flat site of this taper part.By such structure, when packing rod lens into cylindrical body, can avoid extending to the damage of rod lens plane of incidence core.By like this, can prevent the diffuse reflection of the incident light that the plane of incidence at rod lens produces.As a result, can make on the irradiation area of light and do not produce unusual light trace.In addition, because do not produce damage, and can keep having the shape of corner angle, so the exterior contour of irradiation area becomes clear at the edge of rod lens shadow surface.Like this, for example when on uv-hardening resin, carrying out the ultraviolet ray irradiation, can in irradiation area, obtain uniform hardening state.
Description of drawings
Fig. 1 is the concise and to the point pie graph of ultraviolet lamp.
Fig. 2 is front view, side view and the rear view of expression rod lens shape.
Fig. 3 A is the incident constitutional diagram that expression light is injected rod lens.
Fig. 3 B is other the incident constitutional diagram that expression light is injected rod lens.
Fig. 3 C is the alternative incident constitutional diagram that expression light is injected rod lens.
Fig. 4 A is the stereographic map that is illustrated in other form of the taper portion that forms on the rod lens.
Fig. 4 B is the stereographic map that is illustrated in the another kind of form of the taper portion that forms on the rod lens.
Fig. 5 is the figure that produces damaged form on the plane of incidence of the rod lens of being illustrated in over.
Label declaration
10 ultraviolet lamps
12 lamps
The 12a light source
14 elliptic reflector
16,32,34 rod lenss
16a, 32a, 34a taper portion
18 lens combination
20a the 1st cylindrical body
20b the 2nd cylindrical body
22 rotary-type diaphragms
22a light modulation plectane
22b, 24b stepping motor
24 rotary-type optical gates
24b optical gate plectane
28 irradiated bodies
30 frameworks
92 rod lenss
94 damaged parts
Embodiment
Below, describe example of the present invention in detail with reference to accompanying drawing.Fig. 1 represents the brief configuration of ultraviolet lamp.
This ultraviolet lamp 10 has: emission comprises the lamp 12 of ultraviolet light, the elliptic reflector 14 (reflector) of the light that focusing is launched from lamp 12, be used for to be mapped to the rod lens 16 in the regulation zone of irradiated body 28 by the illumination that elliptic reflector 14 focuses on, be used for to expand the lens combination 18 of certain width to from the light that rod lens 16 penetrates, be used to place the 1st cylindrical body 20a of rod lens 16, be used to place the 2nd cylindrical body 20b of lens combination 18, be used to adjust the rotary-type diaphragm 22 of the luminous flux of the incident light of injecting rod lens 16, and be used for shining/the rotary-type optical gate (shutter) 24 of shading to irradiated body 28 from rod lens 16.These lamps 12, elliptic reflector the 14, the 1st cylindrical body 20a, rotary-type diaphragm 22, rotary-type optical gate 24 remain in the framework (frame) 30.
Configured light 12 is positioned on the 1st focal point F 1 of elliptic reflector 14 this light source 12a.As lamp 12, for example adopt high-pressure sodium lamp.Lamp 12 is pointolite type (so-called short-arc type (short-arc type)) preferably.At this moment, because can be, so corresponding with the little rod lens of diameter easily in the enterprising line focusing in narrow and small zone of the 2nd focal point F 2 of elliptic reflector 14.In addition, as described below, even focal area condition of enlarged on the 2nd focal point F 2 also this expansion can be suppressed to minimum value because of lamp 12 causes.
Preferably use the structure that on the inside surface of metal or glass base materials such as (glass), forms the emanative many inteferometer coatings of ultraviolet ray as elliptic reflector 14.
Here be example with four prisms cylinder as rod lens 16.Fig. 2 is front view, side view and the rear view of expression rod lens shape.One end of the long axis direction of rod lens 16 is the plane of incidence, and the other end is a shadow surface.Left figure (front view) the expression plane of incidence of Fig. 2, right figure (rear view) the expression shadow surface of Fig. 2.Configuration rod lens 16 is positioned on the 2nd focal point F 2 of elliptic reflector 14 its plane of incidence.
As shown in Figure 2, implement taper in the marginal portion of the plane of incidence of rod lens 16 and handle (tapermachining) (chamfering (chamfering)), form the 16a of taper portion (taper).By like this, as following detailed description, when rod lens 16 is inserted the 1st cylindrical body 20a, produce damaged and crackle in the plane domain S that can prevent (diagonal line hatches of the left figure of Fig. 2 (hatching) zone) at the plane of incidence of rod lens 16.
Different therewith is that the edge of the shadow surface of rod lens 16 has corner angle.Not carrying out taper at the edge of the shadow surface of rod lens 16 handles.By like this, make the exterior contour of the irradiation area on the irradiated body 28 become clear.In addition, can be to the light of certain area illumination uniform strength.When using this rod lens, the profile of the irradiation area of the light on the irradiated body 28 is a square.This square is similar to the shape perpendicular to the cross section of the long axis direction of rod lens 16.Its magnification is regulated by the structure of lens combination 18.In addition, the shape in rayed zone is circular under the situation of cylindrical lens, is hexagon under the situation of hexagonal prism lens.
When placing rod lens 16 in the 1st cylindrical body 20a, the external diameter that is positioned at the opening diameter of end face of the plane of incidence one side of rod lens 16 and rod lens 16 in the long axis direction end face of the 1st cylindrical body 20a about equally.
As shown in Figure 1, in ultraviolet lamp 10, make the shadow surface of rod lens 16 outstanding from the 1st cylindrical body 20a.Under the state that the 2nd cylindrical body 20b is installed on the 1st cylindrical body 20a, the edges maintain of the shadow surface of rod lens 16 is at state freely.This is to become clear for the exterior contour that makes irradiation area.When making the 1st cylindrical body 20a, hope to need only the external diameter length of the opening diameter of the end face that on the 1st cylindrical body 20a, makes shadow surface one side that is positioned at rod lens 16 in short-term than rod lens 16 than rod lens 16.
The example of structure that rod lens 16 is remained on the 1st cylindrical body 20a is as described below.The fixedly screw hole of usefulness (screw hole) promptly is set in the side of the 1st cylindrical body 20a.Make screw (screw) screw in this screw hole, rod lens 16 is pushed the inside surface of the 1st cylindrical body 20a.By like this rod lens 16 being remained in the 1st cylindrical body 20a.At this moment, be preferably between the front end of rod lens 16 and screw snotter is set, thereby make the front end of screw can not hurt rod lens 16.
The 1st cylindrical body 20a and the 2nd cylindrical body 20b have can free chimeric structure.The 2nd cylindrical body 20b of chimeric maintenance lens combination 18 on the 1st cylindrical body 20a that keeps rod lens 16.The 1st cylindrical body 20a and the 2nd cylindrical body 20b form the screw hole that is communicated with respectively under the state that they are chimeric.With screw means the 1st cylindrical body 20a and the 2nd cylindrical body 20b, keep connection status at this screw hole place.
In order to adjust the incident flux of injecting rod lens 16, rotary-type diaphragm 22 has the light modulation plectane 22a in a plurality of hole portion that circumferencial direction forms that numerical aperture changes.Rotary-type optical gate 24 is used to carry out the adjustment of time shutter.Rotary-type optical gate 24 has the optical gate plectane 24a that forms hole portion at assigned position, makes to control incident/shading to rod lens 16 when 45 ° of every rotations for example.In addition, label 22b, 24b represent stepping motor (stepping motor) respectively among Fig. 1.
In the ultraviolet lamp 10 of structure as mentioned above, make from containing on the 2nd focal point F 2 that ultraviolet light focuses on elliptic reflector 14 that lamp 12 penetrates.Make the light of focusing inject the plane of incidence certain hour of rod lens 16.At this moment, adjust its luminous flux as required.The light of injecting rod lens 16 carries out total reflection on one side repeatedly in rod lens 16, along long axis direction advance on one side, penetrate from shadow surface then.Utilize lens combination 18, make the light of ejaculation expand the size of hope to, shine again on the regulation zone of irradiated body 28.
Then, illustrate rod lens 16 pack into the laying method of the 1st cylindrical body 20a and the incident state of injecting the light of rod lens 16.As front end,, rod lens 16 is inserted the 1st cylindrical body 20a with the plane of incidence one side of rod lens 16 from the lower ending opening face of as shown in Figure 1 the 1st cylindrical body 20a the opening surface of the chimeric side of the 2nd cylindrical body 20b (promptly with).By like this, rod lens is placed among the 1st cylindrical body 20a.In the method,, or contact, also can prevent at the damaged and crackle of this part generation with inwall even as the open end collision of the front end and the 1st cylindrical body 20a of the plane of incidence of rod lens 16.Particularly, can prevent to arrive the such damage of core of rod lens 16 planes of incidence.In addition, if adopt this method, because the shadow surface of rod lens 16 does not contact with the 1st cylindrical body 20a, so can protect its edge.
Fig. 3 A～Fig. 3 C represents to inject the incident state of the light of rod lens 16.According to the shape of elliptic reflector 14, determine the 2nd focal point F 2.In the manufacturing process of ultraviolet lamp 10,, make the plane of incidence of rod lens 16 be positioned on the 2nd focal point F 2 with keeping the 1st cylindrical body 20a of rod lens 16 to be installed on the framework 30.
Fig. 3 A represents to inject the desirable incident state of rod lens 16.Focus on comprise the 2nd focal point F 2 than on the zonule.Such state needs: (a) light source of lamp 12 comes down to pointolite, (b) this pointolite is positioned at the 1st focal point F 1 place of elliptic reflector 14 really, (c) shape of elliptic reflector 14 does not have crookedly, (d) extremely correctly is configured (optical axis does not have deviation) according to the optical design of each member.Realize that these might not be easy.
When the condition of these (a)～(d) can not satisfy simultaneously, for example shown in Fig. 3 B, the situation about previously focusing on of light beam at the plane of incidence of rod lens 16 takes place.Thereby the burnt diameter of the optically focused of the plane of incidence is elongated.In addition, crooked if elliptic reflector 14 has, then shown in Fig. 3 C, focus takes place depart from the situation in the axle center of rod lens 16.
Do not form taper portion on the plane of incidence of the rod lens that ultraviolet lamp in the past has.By guaranteeing to enlarge the plane domain on the rod lens plane of incidence, adapt to the incident light shown in Fig. 3 B, the 3C like this.But in such structure, when rod lens was inserted the 1st cylindrical body 20a, the edge of its plane of incidence produced damaged sometimes, or cracked to the core extension of the plane of incidence.Fig. 5 represents such situation.In Fig. 5, label 92 expression rod lenss, the damaged part of label 94 expressions.In addition, in Fig. 5, the incident state of light of injecting rod lens 92 is identical with the state shown in Fig. 3 B.
If light is injected damaged part 94, diffuse reflection then takes place herein.This diffuse reflection produces harmful effect for the uniform irradiation to this irradiated body.In order not make light inject so damaged part 94, must make incident area become extremely narrow and small by adjusting optical system.Such adjustment is very difficult.When rod lens was tiny lens, this rod lens then can not use as a result.
Different therewith is in rod lens 16, if incident light shines on the 16a of taper portion, then to reflect on this part.When this reflected light carries out unusual reflex time repeatedly in ultraviolet lamp 10, might residual unusual light trace down on the shadow surface of irradiated body 28.For fear of this problem, make the light utilize elliptic reflector 14 to focus on be incident in the medial region of the 16a of taper portion, promptly on the plane of incidence, not carry out in the plane domain S that taper handles.
Owing to formed the 16a of taper portion, so the plane domain S of rod lens 16 ratio is little perpendicular to the area in the cross section of the major axis of rod lens 16.But, when rod lens 16 is inserted the 1st cylindrical body 20a, can prevent from rod lens 16, to produce damaged.The danger that can take place in the manufacturing process of ultraviolet lamp in the past had been described just now.By using rod lens 16, can avoid this danger.
The 16a of taper portion preferably is set, makes, then guarantee big plane domain S as far as possible as long as when rod lens 16 is inserted the 1st cylindrical body 20a, on the plane of incidence of rod lens 16, do not produce damaged and crackle.This is exactly a content recited above.
More than, be that example of the present invention has been described, but the invention is not restricted to such form.For example, lamp 12 is being used under the situation of long arc (long-arc) lamps, if compare with the situation of using short-arc lamp, then the focal zone at the 2nd focal point F 2 places of elliptic reflector 14 becomes big.But, as mentioned above,, then can use long arc lamp as long as can make light inject the plane domain S of the plane of incidence of rod lens 16.
In addition, as shown in Figure 2, preferably there is the smooth surface of curvature in the taper portion that forms on the plane of incidence of rod lens 16.But such processing is often not necessarily easy.
Fig. 4 A, Fig. 4 B are the stereographic maps that is illustrated in other form of the taper portion that forms on the rod lens.The 32a of taper portion that forms on the columniform rod lens 32 shown in Fig. 4 A has certain angle of inclination with respect to long axis direction.By combination angle different inclined-plane, can make the 32a of taper portion near to the similar form of the taper 16a of portion as shown in Figure 2, that have certain curvature.On the rod lens 34 of the hexagonal prism shown in Fig. 4 B, form the taper 34a of portion, make the circle that is shaped as of flat site S on the plane of incidence.Like this, it not is to form along its edge that the taper that carries out on the edge of the rod lens plane of incidence is handled.Grind by tubular and to cut processing, can form among Fig. 4 A, Fig. 4 B 32a of taper portion, the 32b of expression respectively easily.
Claims (4)
1. ultraviolet lamp is characterized in that having:
Emission contains the lamp of ultraviolet light;
The elliptic reflector that will focus on from the light that described lamp is launched;
End with columnar shape and long axis direction is the rod lens of the shadow surface of light for the plane of incidence other end of light; And
Take in the cylindrical body of described rod lens,
The light source of the described lamp of this ultraviolet lamp is positioned on the 1st focus of described elliptic reflector, the light of launching from described lamp focuses on the 2nd focus of described elliptic reflector, the plane of incidence of described rod lens is positioned on the 2nd focus of described elliptic reflector, in the described ultraviolet lamp
The edge of the described rod lens plane of incidence has taper portion, and the light of being assembled by described elliptic reflector is injected the plane domain except the described plane of incidence this taper portion.
2. the ultraviolet lamp described in claim 1 is characterized in that,
The edge of described rod lens shadow surface has corner angle.
3. the ultraviolet lamp described in claim 1 is characterized in that,
Described lamp is a kind of pointolite type discharge lamp.
4. the ultraviolet lamp described in claim 2 is characterized in that,
Described lamp is a kind of pointolite type discharge lamp.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006057799A JP2007229682A (en) | 2006-03-03 | 2006-03-03 | Irradiation apparatus of ultraviolet ray |
| JP2006057799 | 2006-03-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101030043A true CN101030043A (en) | 2007-09-05 |
Family
ID=38550804
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007100876129A Pending CN101030043A (en) | 2006-03-03 | 2007-03-01 | Ultraviolet radiation device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2007229682A (en) |
| KR (1) | KR20070090790A (en) |
| CN (1) | CN101030043A (en) |
| TW (1) | TW200736536A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101769478B (en) * | 2008-12-27 | 2013-09-25 | 优志旺电机株式会社 | Light source device |
| CN110879199A (en) * | 2019-11-25 | 2020-03-13 | 中国科学院微电子研究所 | System for testing hydrogen brittleness of material under irradiation of extreme ultraviolet light |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10541159B2 (en) * | 2016-05-26 | 2020-01-21 | Applied Materials, Inc. | Processing chamber with irradiance curing lens |
| JP7085083B2 (en) * | 2017-09-07 | 2022-06-16 | 株式会社アイテックシステム | Light irradiation device |
-
2006
- 2006-03-03 JP JP2006057799A patent/JP2007229682A/en active Pending
-
2007
- 2007-02-09 TW TW096104859A patent/TW200736536A/en unknown
- 2007-03-01 CN CNA2007100876129A patent/CN101030043A/en active Pending
- 2007-03-02 KR KR1020070020687A patent/KR20070090790A/en not_active Application Discontinuation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101769478B (en) * | 2008-12-27 | 2013-09-25 | 优志旺电机株式会社 | Light source device |
| CN110879199A (en) * | 2019-11-25 | 2020-03-13 | 中国科学院微电子研究所 | System for testing hydrogen brittleness of material under irradiation of extreme ultraviolet light |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2007229682A (en) | 2007-09-13 |
| KR20070090790A (en) | 2007-09-06 |
| TW200736536A (en) | 2007-10-01 |
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Open date: 20070905 |