CN101029817A - 二维位移传感器及应用的大量程表面形貌测量装置 - Google Patents
二维位移传感器及应用的大量程表面形貌测量装置 Download PDFInfo
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- CN101029817A CN101029817A CN 200610201125 CN200610201125A CN101029817A CN 101029817 A CN101029817 A CN 101029817A CN 200610201125 CN200610201125 CN 200610201125 CN 200610201125 A CN200610201125 A CN 200610201125A CN 101029817 A CN101029817 A CN 101029817A
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 72
- 239000000919 ceramic Substances 0.000 claims description 14
- 235000014676 Phragmites communis Nutrition 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 5
- 238000005070 sampling Methods 0.000 description 3
- 238000012876 topography Methods 0.000 description 2
- 244000089486 Phragmites australis subsp australis Species 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004441 surface measurement Methods 0.000 description 1
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CNB2006102011256A CN100432618C (zh) | 2006-11-21 | 2006-11-21 | 二维位移传感器及应用的大量程表面形貌测量装置 |
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CN101029817A true CN101029817A (zh) | 2007-09-05 |
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Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009132509A1 (zh) * | 2008-04-28 | 2009-11-05 | Chen Wei | 大型储液罐减震与隔震基础结构及其表面校准装置 |
CN102155896A (zh) * | 2011-03-11 | 2011-08-17 | 天津大学 | 基于齿轮测量的单传感器二维接触式测头 |
CN107289872A (zh) * | 2017-06-28 | 2017-10-24 | 京东方科技集团股份有限公司 | 测高装置 |
CN107883835A (zh) * | 2017-12-07 | 2018-04-06 | 华中科技大学 | 磁悬浮触针位移传感器 |
CN108088359A (zh) * | 2016-11-21 | 2018-05-29 | 清华大学 | 便携式轮廓仪及轮廓扫描显微镜和系统 |
CN109141334A (zh) * | 2018-08-31 | 2019-01-04 | 北京万高众业科技股份有限公司 | 一种弧度检测装置 |
CN109470136A (zh) * | 2018-12-13 | 2019-03-15 | 何永明 | 一种用于冷轧带钢的平面度检测装置 |
CN113884231A (zh) * | 2021-09-29 | 2022-01-04 | 中国科学院光电技术研究所 | 一种测试压电陶瓷驱动器输出力的装置 |
CN114018145A (zh) * | 2021-11-09 | 2022-02-08 | 清远职业技术学院 | 一种大量程二维微位移传感器 |
CN117066139A (zh) * | 2023-10-18 | 2023-11-17 | 四川辰宇微视科技有限公司 | 一种高效检测微通道板同心度的装置及方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0065360A3 (en) * | 1981-05-12 | 1983-08-10 | Schlumberger Electronics (U.K.) Limited | Parallel motion displacement transducers |
JPH09297149A (ja) * | 1996-05-08 | 1997-11-18 | Olympus Optical Co Ltd | 探針位置決め機構 |
US20030009898A1 (en) * | 2001-01-19 | 2003-01-16 | Massachusetts Institute Of Technology | Characterization of compliant structure force-displacement behavior |
CN2786552Y (zh) * | 2004-03-23 | 2006-06-07 | 淮阴工学院 | 触针式三维粗糙度测量仪 |
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2006
- 2006-11-21 CN CNB2006102011256A patent/CN100432618C/zh not_active Expired - Fee Related
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009132509A1 (zh) * | 2008-04-28 | 2009-11-05 | Chen Wei | 大型储液罐减震与隔震基础结构及其表面校准装置 |
CN102155896A (zh) * | 2011-03-11 | 2011-08-17 | 天津大学 | 基于齿轮测量的单传感器二维接触式测头 |
CN102155896B (zh) * | 2011-03-11 | 2012-07-25 | 天津大学 | 基于齿轮测量的单传感器二维接触式测头 |
CN108088359B (zh) * | 2016-11-21 | 2019-07-26 | 清华大学 | 便携式轮廓仪及轮廓扫描显微镜和系统 |
CN108088359A (zh) * | 2016-11-21 | 2018-05-29 | 清华大学 | 便携式轮廓仪及轮廓扫描显微镜和系统 |
CN107289872A (zh) * | 2017-06-28 | 2017-10-24 | 京东方科技集团股份有限公司 | 测高装置 |
US10775155B2 (en) | 2017-06-28 | 2020-09-15 | Boe Technology Group Co., Ltd. | Height measurement apparatus |
CN107883835A (zh) * | 2017-12-07 | 2018-04-06 | 华中科技大学 | 磁悬浮触针位移传感器 |
CN107883835B (zh) * | 2017-12-07 | 2024-02-06 | 华中科技大学 | 磁悬浮触针位移传感器 |
CN109141334A (zh) * | 2018-08-31 | 2019-01-04 | 北京万高众业科技股份有限公司 | 一种弧度检测装置 |
CN109470136A (zh) * | 2018-12-13 | 2019-03-15 | 何永明 | 一种用于冷轧带钢的平面度检测装置 |
CN113884231A (zh) * | 2021-09-29 | 2022-01-04 | 中国科学院光电技术研究所 | 一种测试压电陶瓷驱动器输出力的装置 |
CN113884231B (zh) * | 2021-09-29 | 2023-05-30 | 中国科学院光电技术研究所 | 一种测试压电陶瓷驱动器输出力的装置 |
CN114018145A (zh) * | 2021-11-09 | 2022-02-08 | 清远职业技术学院 | 一种大量程二维微位移传感器 |
CN117066139A (zh) * | 2023-10-18 | 2023-11-17 | 四川辰宇微视科技有限公司 | 一种高效检测微通道板同心度的装置及方法 |
CN117066139B (zh) * | 2023-10-18 | 2023-12-26 | 四川辰宇微视科技有限公司 | 一种高效检测微通道板同心度的装置及方法 |
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