CN101026186A - Active organic electroluminescent substrate - Google Patents
Active organic electroluminescent substrate Download PDFInfo
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- CN101026186A CN101026186A CN 200710092232 CN200710092232A CN101026186A CN 101026186 A CN101026186 A CN 101026186A CN 200710092232 CN200710092232 CN 200710092232 CN 200710092232 A CN200710092232 A CN 200710092232A CN 101026186 A CN101026186 A CN 101026186A
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- organic electroluminescent
- protective layer
- active organic
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- electroluminescent substrate
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Abstract
This invention provides an active organic electroluminescent light emission base board including a base with a drive component, a light emission region, a film transistor, a first protection layer, a conduction layer connected with the film transistor and a second protection layer set on the surfaces of the first protection layer and the conduction layer, in which, the second protection layer has an opening in the light emission region exposing part of the conduction layer and has a ladder-like structure at the cross point of the drive component region and the light emission region. This invention is aimed at providing an active organic light emission base board to increase the display effect.
Description
Technical field
The invention relates to a kind of organic electroluminescent substrate and preparation method thereof, refer to that especially the intersection of a kind of protective layer in driven unit district and luminous zone has organic electroluminescent substrate of a step structure and preparation method thereof.
Background technology
Flat-panel screens (Flat Panel Display) has the incomparable advantage of conventional cathode ray tube (CRT:CathodeRay Tube) display, for example power saving, radiationless and compact etc., so flat-panel screens has replaced cathode-ray tube display gradually.Lifting along with the plane Display Technique, the product price of flat-panel screens constantly reduces, make flat-panel screens more universal and towards the development of big display size, and among various flat-panel screens now, organic electro-luminescent display is owing to have advantages such as high contrast and self-luminous, the product of being expected most in the market especially.
Please refer to Fig. 1.Fig. 1 is the generalized section of an existing organic electroluminescent substrate 10.As shown in Figure 1, existing organic electroluminescent substrate 10 includes a substrate 12, and it divides into a driven unit district 14 and a luminous zone 16.Be provided with a thin-film transistor 18 within the driven unit district 14, and be coated with one first protective layer 20 on the thin-film transistor 18 in driven unit district 14 with in the luminous zone 16.In addition, the surface of first protective layer 20 of luminous zone 16 has a conductive layer 22, and is electrically connected with thin-film transistor 18 by an opening 24 of first protective layer 20, and the surface of the surface of first protective layer 20 and conductive layer 22 has one second protective layer 26 in addition.Second protective layer 26 16 has an opening 28 in the luminous zone, exposes partially conductive layer 22.In addition, the surface of conductive layer 22 then includes an organic luminous layer 30 and an electrode layer 32 in regular turn.
Summary of the invention
One of purpose of the present invention is to provide a kind of active organic electroluminescent substrate, to promote display effect.
Another object of the present invention is to provide a kind of method of making active organic electroluminescent substrate.
For reaching above-mentioned purpose, the invention provides a kind of active organic electroluminescent substrate, comprise:
One substrate has a driven unit district and a luminous zone;
One thin-film transistor is arranged in the described driven unit district of described substrate;
One first protective layer is arranged at described driven unit district and described luminous zone, and covers described thin-film transistor substantially;
One conductive layer is electrically connected with described thin-film transistor, is arranged at the surface of described first protective layer in the surface of described first protective layer of described luminous zone and the described driven unit of part district; And
One second protective layer; be arranged at the surface of described first protective layer and the surface of described conductive layer; described second protective layer has an opening in described luminous zone; expose the described conductive layer of part, and the intersection of described second protective layer in described driven unit district and described luminous zone has a step structure.
For reaching above-mentioned purpose, the invention provides a kind of method of making active organic electroluminescent substrate, comprise:
One substrate is provided, and in described substrate, defines a driven unit district and a luminous zone;
In the described driven unit district of described substrate and described luminous zone, form one first protective layer;
On described first protective layer of part, form a conductive layer;
On described first protective layer and described conductive layer, form one second protective layer; And
Removal is positioned at described second protective layer of described luminous zone; to form an opening that exposes described conductive layer; and remove part and be positioned near the described opening described second protective layer, make the intersection of described second protective layer have a step structure in described driven unit district and described luminous zone.
Utilization of the present invention has the organic material of sensing optical activity as second protective layer; can effectively promote the thickness limit of second protective layer; avoid the structure of luminous zone impaired when the evaporation organic luminous layer; and the step structure of second protective layer can be avoided the light leak problem, makes the organic electroluminescence panel demonstration effect of bringing into normal play.
Description of drawings
Fig. 1 is the generalized section of an existing organic electroluminescent substrate.
Fig. 2 to Fig. 8 makes the method schematic diagram of an active organic electroluminescent substrate for a preferred embodiment of the present invention.
Fig. 9 makes the method schematic diagram of an active organic electroluminescent substrate for another preferred embodiment of the present invention.
Drawing reference numeral
12 substrates of 10 organic electroluminescent substrates
16 luminous zones, 14 driven unit districts
18 thin-film transistors, 20 first protective layers
22 conductive layers, 24 openings
26 second protective layers, 28 openings
30 organic luminous layers, 32 electrode layers
50 substrates, 52 driven unit districts
54 luminous zones, 56 thin-film transistors
56a 58 first protective layers that drain
60 openings, 62 conductive layers
64 second protective layers, 66 first light shields
68 openings, 69 second light shields
70 step structure 70a, first tabular surface
The 70b first inclined plane 70c second tabular surface
70d second inclined plane 72 organic luminous layers
74 electrode layers, 76 loam cakes
78 sealings, 80 active organic electroluminescent panels
90 half light modulation covers
Embodiment
Below be about detailed description of the present invention and accompanying drawing.Yet accompanying drawing only for reference with aid illustration usefulness, be not to be used for to the present invention's limitr in addition.
Second protective layer 26 of existing organic electroluminescent substrate 10 is 14 excessive with the intersection angle of luminous zone 16 in the driven unit district; cause organic luminous layer 30 thickness and the tabular surface difference in thickness on inclined plane of second protective layer 26 excessive, and this difference in thickness will cause existing organic electroluminescent substrate 10 14 to produce the light leak problem with the intersection of luminous zone 16 in the driven unit district.Moreover second protective layer 26 of existing organic electroluminescent substrate 10 be an inorganic material, for example silica or silicon nitride etc., and the limit of the thickness of second protective layer 26 that is made of inorganic material owing to restrictions such as manufacture craft times only is 3000 dusts.The thickness deficiency of second protective layer 26 can make when the follow-up organic luminous layer 30 of evaporation; the employed shadow mask in order to definition organic luminous layer 30 of evaporation manufacture craft is expressed to the existing structure of luminous zone 16; cause structural damage and can produce more particulate, and make luminous efficiency unclear.
Please refer to Fig. 2 to Fig. 8.Fig. 2 to Fig. 8 makes the method schematic diagram of an active organic electroluminescent substrate for a preferred embodiment of the present invention.As shown in Figure 2, at first provide a substrate 50, for example a substrate of glass or a quartz substrate, and in substrate 50, define a driven unit district 52 and a luminous zone 54.Then among the driven unit district 52 of substrate 50, form a thin-film transistor 56, wherein thin-film transistor 56 can be various transistors such as amorphous silicon film transistor, low-temperature polysilicon film transistor or high temperature polysilicon thin-film transistor, and the step of making thin-film transistor 56 is known by industry, no longer adds to give unnecessary details at this.
As shown in Figure 3, formation one first protective layer 58 in the driven unit district 52 of substrate 50 and luminous zone 54 subsequently, and form an opening 60 in the position of first protective layer, 58 corresponding thin-film transistors 56, to expose the drain electrode 56a of thin-film transistor 56.Then on part first protective layer 58, form a conductive layer 62, and conductive layer 62 is electrically connected with the drain electrode 56a of thin-film transistor 56 by opening 60.Conductive layer 62 can be used as the usefulness of the anode of active organic electroluminescent substrate of the present invention, and the material selection of conductive layer 62 then has difference according to the display type difference of active organic electroluminescent substrate.For instance, if desire is made the organic electroluminescent substrate of end light emitting-type (bottom emission type), then the material of conductive layer 62 uses transparent conductive material, for example tin indium oxide (ITO), indium zinc oxide (IZO), aluminum zinc oxide (AZO) or combinations thereof, and if desire is made the organic electroluminescent substrate of top light emitting-type (top emission type), then the material of conductive layer 62 should use metal material, for example aluminium, silver or combinations thereof.
As shown in Figure 4, on first protective layer 58 and conductive layer 62, form one second protective layer 64.In present embodiment; second protective layer 64 is selected an organic material for use; for example Polyimide resin (polyimideresin), acryl resin (acrylic resin) or organic silicide (organic silica) etc.; and the advantage of selecting organic material for use is that above-mentioned organic material can utilize coating method; for example the rotary coating mode is formed; compared to the existing step of utilizing the evaporation manufacture craft to make protective layer; can significantly save the manufacture craft time, and then promote the thickness limit of second protective layer 64.In present embodiment, the thickness of second protective layer 64 is 3 microns to 5 microns, but is not limited thereto.In addition, the organic material of present embodiment adds can directly utilize in addition patterning of exposure technique behind the photosensitive material, and need not carry out the etching manufacture craft.
Then carry out two-stage exposure manufacture craft.As shown in Figure 5, at first, utilize one first light shield 66 to carry out one first exposure manufacture craft, remove small part second protective layer 64 that is positioned at luminous zone 54, to form an opening 68.As shown in Figure 6, utilize one second light shield 69 to carry out one second exposure manufacture craft subsequently again, remove part and be positioned near the opening 68 second protective layer 64,52 to form a step structure 70 with the intersection of luminous zone 54 in the driven unit district.In method of the present invention; the purpose of two-stage exposure manufacture craft is to make second protective layer 64 to have step structure 70; wherein when the first exposure manufacture craft, need form darker opening 68; therefore need higher exposure energy; and when the second exposure manufacture craft; the thickness of second protective layer 64 that institute's desire is removed is more shallow, so exposure energy is low than the exposure energy of the first exposure manufacture craft.In the present embodiment; the exposure energy of the exposure energy of the first exposure manufacture craft and the second exposure manufacture craft differs 10 millijoules (mJ) approximately to 60 millijoules, but the thickness difference of visual second protective layer 64 of exposure energy of two-stage exposure manufacture craft adjusts and is not limited thereto.
In present embodiment; the step structure 70 of second protective layer 64 has one first tabular surface 70a, one first inclined plane 70b, one second tabular surface 70c and one second inclined plane 70d; wherein the difference in height on the surface of the first tabular surface 70a and conductive layer 62 is about 3 microns to 5 microns; that is the thickness of second protective layer 64, the difference in height on the surface of the second tabular surface 70c and conductive layer 62 then is about 3000 dusts to 2 micron.In addition, the surface of the second inclined plane 70d and conductive layer 62 forms an angle, and about slightly 10 degree of this angle are to 40 degree.Angle that what deserves to be explained is the second inclined plane 70d and conductive layer 62 is except relevant with exposure energy; relevant with second protective layer 64 with the adhesive force of conductive layer 62; therefore parameters such as composition that also can be by adjusting second protective layer 64 when setting this angle or viscosity, and cooperate the scope of suitable exposure energy with accurate this angle of control.
As shown in Figure 7; then on the conductive layer 62 and second protective layer 64, form an organic luminous layer 72 and an electrode layer 74 in regular turn; wherein the pixel color that shows of organic luminous layer 72 visual institutes desires is different and select different organic light emission materials for use; for example be ruddiness organic light emission material, green glow organic light emission material, blue light organic light emission material or white-light organic light-emitting material; and electrode layer 74 is as the negative electrode of organic electroluminescent substrate, and it is different and can be transparent conductive material or metallic conduction material that the material of electrode layer 74 is looked the pattern of organic electroluminescent substrate.The step structure 70 of second protective layer 64 makes the organic luminous layer 72 of follow-up formation 52 less in the difference in thickness of vertical direction with the intersection of luminous zone 54 in the driven unit district, therefore can avoid the light leak problem.It is impaired that employed shadow mask caused luminous zone 54 when in addition, the thickness of second protective layer 64 can be avoided making organic luminous layer 70.
By above-mentioned manufacture craft, can produce active organic electroluminescent substrate of the present invention, this substrate is the infrabasal plate of active organic electroluminescent panel, and if desire to produce the active organic electroluminescent panel, then need carry out following manufacture craft.As shown in Figure 8, provide a loam cake 76, a glass loam cake for example, and utilize sealing 78 with substrate 50 involutions of loam cake 76 with active organic electroluminescent substrate, promptly produce active organic electroluminescent panel 80.
The step structure 70 of the foregoing description utilizes two-stage exposure manufacture craft to make, yet method of the present invention is not limited to this and can utilizes gray-level mask (greytone mask) or half light modulation cover (halftonemask) to be made.Please continue with reference to figure 9.Fig. 9 makes the method schematic diagram of an active organic electroluminescent substrate for another preferred embodiment of the present invention, wherein for ease of comparing the similarities and differences of the present invention two embodiment, identical assembly uses identical label mark, and implement step hookup 4 backs of present embodiment, and identical step no longer repeats to give unnecessary details.As shown in Figure 9, utilize half light modulation cover 90 to carry out an exposure manufacture craft, variation by logical light quantity mouth rate (Aperture Ratio) in the light shield control illumination, thereby can access different exposure energies at diverse location, make the predetermined zone that forms opening 68 obtain higher exposure energy, then obtain lower exposure energy corresponding to the predetermined zone that forms step structure 70, can form opening 68 equally even only carry out single exposure manufacture craft thus, and 52 form step structure 70 with the intersection of luminous zone 54 in the driven unit district.
From the above; utilization of the present invention has the organic material of sensing optical activity as second protective layer; can effectively promote the thickness limit of second protective layer; avoid the structure of luminous zone impaired when the evaporation organic luminous layer; and the step structure of second protective layer can be avoided the light leak problem, makes the organic electroluminescence panel demonstration effect of bringing into normal play.
The above only is preferred embodiment of the present invention, and all equalizations of being done according to the present patent application claim change and modify, and all should belong to covering scope of the present invention.
Claims (10)
1. an active organic electroluminescent substrate is characterized in that, described active organic electroluminescent substrate comprises:
One substrate has a driven unit district and a luminous zone;
One thin-film transistor is arranged in the described drive circuit area of described substrate;
One first protective layer is arranged at described drive circuit area and described luminous zone, and covers described thin-film transistor;
One conductive layer is electrically connected with described thin-film transistor, is arranged at the surface of described first protective layer of the surface of described first protective layer of described luminous zone and the described drive circuit area of part; And
One second protective layer; be arranged at the surface of described first protective layer and the surface of described conductive layer; described second protective layer has an opening in described luminous zone; expose the described conductive layer of part, and the intersection of described second protective layer in described drive circuit area and described luminous zone has a step structure.
2. active organic electroluminescent substrate according to claim 1 is characterized in that the material of wherein said conductive layer comprises tin indium oxide, indium zinc oxide, aluminium, silver or combinations thereof.
3. active organic electroluminescent substrate according to claim 1 is characterized in that, wherein said second protective layer comprises an organic material.
4. active organic electroluminescent substrate according to claim 3 is characterized in that, wherein said organic material comprises Polyimide resin, acryl resin, organic silicide or combinations thereof.
5. active organic electroluminescent substrate according to claim 1, it is characterized in that, described active organic electroluminescent substrate also comprises the surface that an organic luminous layer is covered in described conductive layer, and an electrode layer is arranged on the described organic luminous layer.
6. active organic electroluminescent substrate according to claim 5 is characterized in that wherein said organic luminous layer also is covered in the surface of described second protective layer.
7. active organic electroluminescent substrate according to claim 1 is characterized in that, the described step structure of wherein said second protective layer has one first tabular surface, one first inclined plane, one second tabular surface and one second inclined plane.
8. active organic electroluminescent substrate according to claim 7 is characterized in that, the difference in height on the surface of wherein said second tabular surface and described conductive layer is about 3000 dusts to 2 micron.
9. active organic electroluminescent substrate according to claim 7 is characterized in that, the difference in height on the surface of wherein said first tabular surface and described conductive layer is about 3 microns to 5 microns.
10. active organic electroluminescent substrate according to claim 7 is characterized in that the surface of wherein said second inclined plane and described conductive layer forms an angle, and described angle is about 10 degree to 40 degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200710092232 CN101026186A (en) | 2007-04-02 | 2007-04-02 | Active organic electroluminescent substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200710092232 CN101026186A (en) | 2007-04-02 | 2007-04-02 | Active organic electroluminescent substrate |
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| Publication Number | Publication Date |
|---|---|
| CN101026186A true CN101026186A (en) | 2007-08-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200710092232 Pending CN101026186A (en) | 2007-04-02 | 2007-04-02 | Active organic electroluminescent substrate |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019037520A1 (en) * | 2017-08-24 | 2019-02-28 | 京东方科技集团股份有限公司 | Display substrate and display apparatus |
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2007
- 2007-04-02 CN CN 200710092232 patent/CN101026186A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019037520A1 (en) * | 2017-08-24 | 2019-02-28 | 京东方科技集团股份有限公司 | Display substrate and display apparatus |
| US20200043996A1 (en) * | 2017-08-24 | 2020-02-06 | Boe Technology Group Co., Ltd. | Display substrate and display apparatus |
| JP2020532044A (en) * | 2017-08-24 | 2020-11-05 | 京東方科技集團股▲ふん▼有限公司Ｂｏｅ Ｔｅｃｈｎｏｌｏｇｙ Ｇｒｏｕｐ Ｃｏ．，Ｌｔｄ． | Display board and display device |
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