CN101022255A - Two-dimensional rotary remote operating method for micro structural components - Google Patents
Two-dimensional rotary remote operating method for micro structural components Download PDFInfo
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- CN101022255A CN101022255A CN 200710066775 CN200710066775A CN101022255A CN 101022255 A CN101022255 A CN 101022255A CN 200710066775 CN200710066775 CN 200710066775 CN 200710066775 A CN200710066775 A CN 200710066775A CN 101022255 A CN101022255 A CN 101022255A
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Abstract
A 2-D rotary remote-controlling method of micro-component includes setting four ultrasonic transverters on the same plane and arranging them to be a square form, setting plane of four ultrasonic transverters to be parallel with rotary plane of object micro-component, setting two adjacent ultrasonic transverters together closely with their distance being two times of their radius and with their radiation wavewidth of 10-40mm as well as with their sound wave frequency of 1.5-2.0Kh2, setting frequency of four ultrasonic wave beams to be the same and adjacent relation of various ultrasonic wave beams to be 90degree delay successively.
Description
Technical field
The invention belongs to the micro-system field, more specifically, relate to distant manipulation technology micron little member to the nanoscale.
Background technology
Microsystems technology (Micro-System Technology) is as a kind of technology of understanding and changing the objective world at microscopic fields, particularly along with developing to integrated hybrid system from unit component production, the manipulation of little member and mounting technology more embody its importance and urgency.Therefore, exploring new theory and mechanism, to develop this technology be basic crucial research topic in the microsystems technology field.
At present, the mechanism of little member manipulation technology mainly comprises:
The first kind is the manipulation technology in the macroscopic view assembling to be extended to microscopic fields use, as micro-clipper, and micro pipette etc.This type of technology has identical principle with the tweezers and the suction pipe in macroscopical field, only is that size microminiaturization, action are more accurate; Because the successful experience in macroscopical field and human thoughtcast of being used to analogize, the research of this respect is carried out early, and has obtained some practicability achievements.
Second class is the novel little member manipulation technology of dimensional effect development of employing power.As adopt liquid adhesion, electrostatic force etc. to make steering force.Because dimensional effect, microscopic fields surface force muscle power relatively becomes leading role power, and the controllability of these steering forces also is in conceptual phase at present.
This two class all is the contact-type manipulation technology, because the bulk of little manipulation process restriction, and there is the microcosmic adhesion between little member and the operating mechanism, the controllability of adding these power also is resolved far away, and causing only how little member to be discharged after extracting has just become very thorny technical barrier.
The 3rd class is the distant manipulation of noncontact that little member is implemented in the application of radiation field of force.As adopt laser optical tweezer to realize that noncontacts such as the moving of microbe, chromosome, cell, rotation and space orientation handle.This technology adopts the distant maneuverability pattern of noncontact, does not have the constraint of bulk, does not also have to contact the influence of the surface force that causes.Therefore, consider the characteristics of microsystems technology, a kind of little member is harmless, the distant manipulation technology of noncontact, should be the main direction of current research and development.
1986, the breadboard scholar Ashikin of Bell introduced high-NA objective to single bundle gauss laser and forms the three-dimensional optical potential well, and has proved that this ligh trap can undamaged manipulation live body material.When the incidence angle of light beam is enough big, perpendicular to the direction of propagation of light with on the direction of propagation of light, can both form strong gradient fields, the transverse gradients power perpendicular to direction of beam propagation that particle is subjected to can make particle gather to optical axis direction, effect along vertical gradient force of direction of beam propagation is moved particle trend beam focus, and particle is moved to gonglion.Here it is single beam gradient force ligh trap.The laser steering technology has been widely used in the biological study field of cell, subcellular fraction level and large biological molecule level, can also realize that the noncontact of colloidal particles, drop is handled.
But this mode also has its intrinsic defective, is not suitable for the manipulation of the less little member of metal or optical refractive index as it; Handle the next laser steering of environment at non-printing opacity and lose its ability fully; Because photo potential trap (optical potential well) width limitations, laser steering needing to be unsuitable for handling continuously occasion etc.
Being similar to light radiation presses, ultrasonic wave also shows its mechanical characteristic with the form of acoustic radiation force (acoustic radiationforce), the letter sorting of biological tissue, cell, capture and acoustic levitation aspect confirmed that noncontact preferably handles potentiality, and ultrasonic wave possesses unexistent penetration capacity of laser and abundant content thereof, also is easy to microminiaturization as the hyperacoustic piezoelectric ceramic of emission.Therefore, utilize ultrasonic wave, develop a kind of manipulation technology, be applied to harmless, the distant manipulation of noncontact of little member, the technical advantage of himself will be arranged, and have with laser and capture the effect that manipulation technology forms complementation as energy delivery, transmission means.
Existing patent application situation has two applications for a patent for invention of application number 200410044194.1 and 200510028687.0, all relates to ultrasonic manipulation technology.Present theoretical research and practical application fail to break through the restriction of small spheroid, all be that the hypothesis object is under equilbrium position vibration prerequisite, provide with the multiple integral is form, broad sense acoustic radiation force theoretical expression at the spherical border of floating, thereby it is main according to capturing on using, functions such as suspension and letter sorting are launched, as for handling at little member and MEMS (micro electro mechanical system) is integrated is assembled into the theory of background and application study is also rare sets foot in, the key of tracing it to its cause is that the sound wave back scattering characteristic of the little member of arbitrary shape is very complicated, and the radioactive force size and Orientation that is difficult to reach acting on it is controlled effectively.And with the integrated relevant little assembling of MEMS (micro electro mechanical system) and little manipulation technology, at little component object shape various, involve multiple functions such as letter sorting, extracting, transmission, pose adjustment, location and assembling.As seen, little member not only may vibrate around the equilbrium position, and may break through the equilbrium position and carry out free movement with different speed and mode, and for the latter, existing theoretical and methods for using them just is difficult to be suitable for.Therefore, be necessary in the MEMS (micro electro mechanical system) field and successfully implement, ultrasonic manipulation technology must be according to the characteristics such as material, shape, size, moving situation and manipulation environment of little member, conduct a research from starting with the mechanism of action between the sound wave, seeking breakthrough aspect acoustic irradiation power and moment controllability takes the lead in.Based on this, can not only finish the application that little member is handled, but also be expected to have wide application space at aspects such as harmless, the non-contact detecting of micro mechanics amounts such as micro-power, little rigidity and ultrasonic noncontact drivings.
The inventor applied for the patent of invention of " two-dimensional translational remote operating method of little member " by name before this, this application relates to the method for utilizing the ultrasonic wave radioactive force to make little member generation two-dimension translational, but obviously, only can finish translation motion and be difficult to use in practice, the routine action of member generally is made up of translation and rotation combination.
Summary of the invention
Purpose of the present invention will provide a kind of scope of application wider just, based on the two-dimentional slewing maneuver method of little member of ultrasonic wave radioactive force.
The present invention has adopted following technical scheme: the two-dimensional rotary remote operating method of little member, with the ultrasonic transducer is power source, it is characterized in that: ultrasonic transducer is four, in the same plane, be square arrangement, and ultrasonic transducer plane parallel of living in is in the Plane of rotation of the little member of target; Is distance between adjacent two ultrasonic transducers?-? mm, the radiated wave width of each ultrasonic transducer is 10-40mm, frequency of sound wave is at 1.5-2.0Khz, and four bundle frequency of ultrasonic are identical; Each is restrainted hyperacoustic phase place and postpones 90 ° successively according to its neighbouring relations.
Further, the rotation of the little member of target is positioned at the center of ultrasound transducer array.Is distance between adjacent two ultrasonic transducers? mm, the radiated wave width of ultrasonic transducer is 20mm, frequency of sound wave is 1.75Khz.
When four ultrasonic transducers are arranged as previously mentioned, to constitute the ultrasonic travelling wave field of helicon wave front at interference region, if this plane is X-axis, Y-axis, its vertical direction is the Z axle, since the same frequency ultrasonic wave is interfered mutually and 4 transducers between specific phase relation, form the ultrasonic travelling wave of helicon wave front in the paraxial zone of Z axle, the corresponding sound ray direction of propagation is a helix.
In Z axle paraxial zone, the velocity potential of synthetic sound field can be similar to by Laguerre-Gaussian type acoustic beam and describe, as shown in the formula (I).
In the formula (I), A is an amplitude, Z
RBe the Rayleigh distance, w is the beam width at z place, and R is the radius of curvature of wave surface, and Ψ is broad sense Guoy phase shift, L
0 1Be the Laguerre multinomial.
Because velocity potential has a factor e relevant with deflection θ
I θ, ultrasonic wave has the time average angular momentum stream along the Z axle of non-zero, and when ultrasonic wave was reflected or absorbs by micro-member, hyperacoustic Z axial angular momentum spreads passed little member, thereby caused that little member rotates around the Z axle.
Every the spirality sound ray all has infinitesimal momentum dP, and has a Z axial momentum square r * dP of non-zero, when ultrasonic wave is reflected or absorbs by little member, hyperacoustic radiation moment causes the rotation of little member around the Z axle, direction of rotation is consistent with the hand of spiral of sound ray, press the right-handed helix rule, the initial phase angle relation of 4 ultrasonic transducers of control can make the rotation of little member generation along Z axle forward or negative sense; When the initial phase angle of 4 transducers equated, the angular velocity of rotation of little member then was zero.In addition, just can control the size of the angular velocity of rotation of little member by the power output size of adjusting transducer.
Method of the present invention can not be subjected to the restriction of the shape and the optical characteristics of little member, realizes its two dimension rotation by non-contacting mode, and through experiment, it handles precision less than 0.5 μ m, can realize goal of the invention, and obtain industrialized application in the micro-system field.
Description of drawings
Fig. 1 is the geometrical arrangements schematic diagram of ultrasonic transducer among the present invention.
Fig. 2 is the schematic diagram of the present invention at the spirality sound ray of Z axle paraxial zone formation.
Fig. 3 is a schematic diagram of the present invention.
Fig. 4 is a sound ray schematic diagram around little member.
Embodiment
Referring to Fig. 1.The radiant power of 4 ultrasonic transducers 1,2,3,4 equates, frequency is 1.75MHz, radius is 10mm, and in the ultrasonic travelling wave field of interference region formation helicon wave front, it is arranged as shown in the figure, lays respectively in four quadrants of X-axis and Y-axis formation.The initial phase of 4 transducers of control makes 2 all to postpone 90 ° with respect to 2,4 with respect to 3 with respect to 1,3.
As shown in Figure 2 since the same frequency ultrasonic wave is interfered mutually and 4 transducers between specific phase relation, form the ultrasonic travelling wave of helicon wave front in the paraxial zone of Z axle, the corresponding sound ray direction of propagation is a helix.
The little member 5 of target is a rectangular shape, as shown in Figure 3, is placed on the z axis symmetrically.Sound ray around little member 5 distributes as shown in Figure 5.
When ultrasonic wave was reflected or absorbs by little member, hyperacoustic radiation moment caused the rotation of little member around the Z axle, and direction of rotation is consistent with the hand of spiral of sound ray.Closing as the initial phase angle of 4 ultrasonic transducers is 1＞2＞3＞4 o'clock, presses the right-handed helix rule, and little member angular velocity of rotation direction is along Z axle forward; Closing as the initial phase angle of 4 ultrasonic transducers is 1＜2＜3＜4 o'clock, and little member angular velocity of rotation direction is along Z axle negative sense; When the initial phase angle of 4 transducers equated, the angular velocity of rotation of little member was zero.
Claims (3)
1. the two-dimensional rotary remote operating method of little member is a power source with the ultrasonic transducer, and it is characterized in that: ultrasonic transducer is four, and is in the same plane, is square arrangement, and ultrasonic transducer plane parallel of living in is in the Plane of rotation of the little member of target; Is distance between adjacent two ultrasonic transducers?-? mm, the radiated wave width of each ultrasonic transducer is 10-40mm, frequency of sound wave is at 1.5-2.0Khz, and four bundle frequency of ultrasonic are identical; Each is restrainted hyperacoustic phase place and postpones 90 ° successively according to its neighbouring relations.
2. the method for claim 1, it is characterized in that: the rotation of the little member of target is positioned at the center of ultrasound transducer array.
Is 3. method as claimed in claim 2 is characterized in that: the distance between adjacent two ultrasonic transducers? mm, the radiated wave width of ultrasonic transducer is 20mm, frequency of sound wave is 1.75Khz.
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| Application Number | Priority Date | Filing Date | Title |
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| CN200710066775A CN101022255B (en) | 2007-01-19 | 2007-01-19 | Two-dimensional rotary remote operating method for micro structural components |
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| CN200710066775A CN101022255B (en) | 2007-01-19 | 2007-01-19 | Two-dimensional rotary remote operating method for micro structural components |
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| CN101022255B CN101022255B (en) | 2010-05-26 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101202519B (en) * | 2007-10-17 | 2010-12-08 | 南京航空航天大学 | Ultrasound electric machine with two degrees of freedom |
| CN101602482B (en) * | 2009-07-13 | 2011-09-07 | 浙江大学 | Method for three-dimensionally capturing and rotating micromechanical member by using ultrasonic radiation force |
| CN103043598A (en) * | 2012-11-28 | 2013-04-17 | 浙江大学 | Method for compositely controlling micro-mechanical component by ultrasonic radiation force and moment |
| CN103754820A (en) * | 2013-12-27 | 2014-04-30 | 浙江大学 | Ultrasonic transducer ring array based sound field synthesis and parallel operation device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5630417A (en) * | 1995-09-08 | 1997-05-20 | Acuson Corporation | Method and apparatus for automated control of an ultrasound transducer |
| CN1068683C (en) * | 1997-06-20 | 2001-07-18 | 华阳实业集团公司 | Two-dimensional light-movable platform driven precisely by piezoelectric supersonic miniature motor |
-
2007
- 2007-01-19 CN CN200710066775A patent/CN101022255B/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101202519B (en) * | 2007-10-17 | 2010-12-08 | 南京航空航天大学 | Ultrasound electric machine with two degrees of freedom |
| CN101602482B (en) * | 2009-07-13 | 2011-09-07 | 浙江大学 | Method for three-dimensionally capturing and rotating micromechanical member by using ultrasonic radiation force |
| CN103043598A (en) * | 2012-11-28 | 2013-04-17 | 浙江大学 | Method for compositely controlling micro-mechanical component by ultrasonic radiation force and moment |
| CN103754820A (en) * | 2013-12-27 | 2014-04-30 | 浙江大学 | Ultrasonic transducer ring array based sound field synthesis and parallel operation device |
| CN103754820B (en) * | 2013-12-27 | 2015-11-25 | 浙江大学 | Based on sound field synthesis and the parallel operation device of ultrasonic transducer annular array |
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| CN101022255B (en) | 2010-05-26 |
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