CN101008494A - Exhaust pressure controller and exhaust system using the same - Google Patents

Exhaust pressure controller and exhaust system using the same Download PDF

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Publication number
CN101008494A
CN101008494A CNA2006101011460A CN200610101146A CN101008494A CN 101008494 A CN101008494 A CN 101008494A CN A2006101011460 A CNA2006101011460 A CN A2006101011460A CN 200610101146 A CN200610101146 A CN 200610101146A CN 101008494 A CN101008494 A CN 101008494A
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CN
China
Prior art keywords
main body
pressure
space
expulsion
blast pipe
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Pending
Application number
CNA2006101011460A
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Chinese (zh)
Inventor
姜求永
金镇汉
李永燮
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Samsung Electronics Co Ltd
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Samsung Electronics Co Ltd
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Publication of CN101008494A publication Critical patent/CN101008494A/en
Pending legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/70—Control systems characterised by their outputs; Constructional details thereof
    • F24F11/72—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/02—Ducting arrangements
    • F24F13/0218—Flexible soft ducts, e.g. ducts made of permeable textiles

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Exhaust Silencers (AREA)
  • Control Of Fluid Pressure (AREA)

Abstract

An exhaust pressure controller is mounted on the connecting room and exhaust pipe of the exhaust device and controls the pressure in the exhaust pipe. The exhaust pressure controller includes a guide conditioner having a lower main body with an inner sidewall and an outer sidewall and a lower channel for connecting the exhaust pipe to the upper space inside of the inner sidewall, and supplying the compressed gas to the lower main body by the upper space between the inner sidewall and the outer sidewall; an upper main body connecting to the lower main body with a lower space and an upper channel for connecting the exhaust pipe to the lower space; an elastic diaphragm located between the upper main body and the lower main body to separate the lower space of the upper main body and the upper space of the lower main body, and the pressure exerted on its surface deforms to protuberance shape; and an elastomer mounted on the upper space of the upper main body, and exerting pressure to the upper surface of the elastic diaphragm.

Description

Pressure at expulsion controller and the gas extraction system of using the pressure at expulsion controller
Technical field
The present invention relates to a kind of gas extraction system that is used for gas is discharged to from the inside of chamber the outside, more particularly, relate to a kind of gas extraction system with pressure at expulsion controller.
Background technology
Fig. 1 for example understands a kind of typical gas extraction system.Gas extraction system 110 comprises: exhaust apparatus 120, and described exhaust apparatus 120 is connected with the inside 102 of cylindrical chamber 100 by the blast pipe 130 of ring section; With the air door (damper) 140 in the passage 132 that is installed in blast pipe 130.Chamber 100 can be common deposition chamber (deposition chamber), for example the chamber of using when carrying out the cigarette ash deposit in vapor axial deposition (VAD) method.100 inside 102 sucks gases and gas is discharged exhaust apparatus 120 from the chamber.As exhaust apparatus 120, can typically use to have a plurality of fans that center on the blade of rotating shaft rotation.In addition, as air door 140, can use around the single blade of rotating shaft rotation.The pressure at expulsion of blast pipe 130 is adjusted according to the opening degree or the aperture opening ratio of air door 140.When the opening degree of air door 140 was 0 °, air door 140 was parallel on the gas flow direction.When the opening degree of air door 140 was 90 °, air door 140 was perpendicular on the gas flow direction.At this, the increase of the opening degree of air door 140 refers to reducing of air door 140 and gas flow direction angle, the increase that reduces to refer to air door 140 and gas flow direction angle of the opening degree of air door 140.In addition, the opening degree of air door 140 can be expressed as percentage.For increasing pressure at expulsion, the opening degree of air door 140 reduces.On the contrary, for reducing pressure at expulsion, the opening degree of air door 140 increases.
Yet above-mentioned typical exhaust system 110 has following problem.
The first, pressure at expulsion can be adjusted by the opening degree of air door 140, but the variation of the pressure at expulsion that the fault of gas extraction system 110 causes applies direct influence to the pressure of chamber 100.
The second, be installed on the bar that air door 140 in the passage 132 of blast pipe 130 is taken on gas stream, and therefore the particle (for example soot particle) in the gas becomes and is adhered to air door 140.Therefore, the ventilation cross section of blast pipe 130 narrows down and hinders gas stream.
Summary of the invention
So, make the present invention in order to solve the problems referred to above that occur in the prior art, the gas extraction system that the purpose of this invention is to provide the pressure at expulsion controller and use the pressure at expulsion controller, the gas extraction system of this pressure at expulsion controller and use pressure at expulsion controller can automatically be adjusted pressure at expulsion, minimize the variation of pressure at expulsion, and minimize resistance gas stream.
In order to realize this purpose, according to an aspect of the present invention, provide a kind of pressure at expulsion controller, described pressure at expulsion controller is installed on the blast pipe of junction chamber and exhaust apparatus, and the pressure in the control blast pipe.The pressure at expulsion controller comprises guide's adjuster.Guide's adjuster comprises: following main body, described down main body have madial wall and lateral wall and are used for the lower channel that last space and blast pipe with madial wall inside communicate with each other, and are supplied Compressed Gas by the last space between madial wall and the lateral wall; Last main body, described last main body is connected with following main body, and has following space and the upper channel that is used for descending space and blast pipe to communicate with each other; Elastic diaphragm, described elastic diaphragm be between separating with the last space that will descend main body and the following space of last main body between main body and the last main body down, and the pressure distortion that is applied to its surface is a convex shape; And elastomer, described elastomer is installed in the last space of main body, and pressure is applied on the upper surface of elastic diaphragm.
According to a further aspect in the invention, provide a kind of being used for that gas is discharged to outside gas extraction system from chamber interior.Gas extraction system comprises: exhaust apparatus, and described exhaust apparatus is connected in the inside of chamber by blast pipe, from the inside draw gas of chamber, and discharges the gas of suction; With the pressure at expulsion controller, described pressure at expulsion controller is installed on the blast pipe, and the pressure in the control blast pipe, wherein the pressure at expulsion controller comprises guide's adjuster, described guide's adjuster comprises: following main body, described down main body has madial wall and lateral wall and is used for the lower channel that last space and blast pipe with madial wall inside communicate with each other, and by the last space between madial wall and the lateral wall to described time main body compressed gas supplying; Last main body, described last main body is connected with following main body, and has following space and the upper channel that is used for descending space and blast pipe to communicate with each other; Elastic diaphragm, described elastic diaphragm be between separating with the last space that will descend main body and the following space of last main body between main body and the last main body down, and the pressure distortion that is applied to its surface is a convex shape; And elastomer, described elastomer is installed in the last space of main body, and pressure is applied on the upper surface of elastic diaphragm.
Description of drawings
Above and other purpose of the present invention, feature and advantage will be more obvious from the detailed description of carrying out below in conjunction with accompanying drawing, wherein:
Fig. 1 for example understands typical exhaust system;
Fig. 2 is the side sectional view of explanation according to the gas extraction system of one exemplary embodiment of the present invention;
Fig. 3 is the side sectional view of amplification of the pressure at expulsion controller of key diagram 2;
Fig. 4 is the stereogram of the pressure at expulsion controller of key diagram 2; With
Fig. 5 and Fig. 6 are the diagrammatic sketch of the process adjusted of the pressure at expulsion of guide's adjuster of key-drawing 2.
The specific embodiment
Hereinafter, the preferred embodiments of the present invention are described with reference to the accompanying drawings.In the explanation, the known function that is herein incorporated and the detailed description of configuration will be omitted when it may make theme of the present invention very not know below of the present invention.
Fig. 2 is the side sectional view of explanation according to the gas extraction system of one exemplary embodiment of the present invention, and Fig. 3 is the side sectional view of amplification of the pressure at expulsion controller of key diagram 2, and Fig. 4 is the stereogram of the pressure at expulsion controller of key diagram 2.Gas extraction system 210 comprises: the exhaust apparatus 220 that is connected with the inside 202 of chamber 200 by blast pipe 230; Be installed in the pressure at expulsion controller 300 on the blast pipe 230; With the air door 250 that is installed in from the inflow pipe 240 of blast pipe 230 branches.
Chamber 200 is provided with exhaust outlet 204 in its side.Chamber 200 can be common deposition chamber, for example carries out the employed chamber of cigarette ash deposit in vapor axial deposition (VAD) method.
Exhaust apparatus 220 is 200 inside 202 draw gas and they are discharged from the chamber.Exhaust apparatus 220 can comprise having a plurality of fans that center on the blade of rotating shaft rotation.
The air door 250 that is installed in from the passage 242 of the inflow pipe 240 of blast pipe 230 branches provides extraneous gas to blast pipe 230, thereby relaxes the variation of pressure at expulsion.Air door 250 can comprise around the single blade of rotating shaft rotation.
Pressure at expulsion controller 300 comprises main part 310, cap portion 340, coupling part 350 and guide's adjuster 360.Main part 310, thus cap portion 340 and coupling part 350 communicate with each other and coaxial being connected in series with blast pipe 230 is communicated with.
Main part 310 comprises: the cylinder side wall 320 with the passage 321 that connects in the vertical; With the annular lip 330 of on direction laterally outwardly, extending from first end of sidewall 320.Sidewall 320 has the consistent internal diameter and the shape of ring-shaped step (annular step).The external diameter of sidewall 320 reduces to second end that is positioned at the first end relative position gradually from first end, and sidewall 320 has integrally formed first end section 322, mid portion 324 and second end section 326, wherein second end section 326 has first sloping portion 328, and the external diameter of described first sloping portion 328 reduces gradually towards second end.The exhaust outlet 204 of flange 330 surrounded chamber 200 connects.
Being shaped as of cap portion 340 has the cylindric of the first passage 341 that connects in the vertical, and cap portion 340 has the shape of circular step.More particularly, cap portion 340 have the first end section 342 of the first distolateral big external diameter and large diameter and with the second end section 348 of the little external diameter and the little internal diameter of the first end second opposed end side.In addition, cap portion 340 has the mid portion 344 between first end section 342 and second end section 348.Mid portion 344 is included in the second channel 345 that transversely connects; With second sloping portion 346, the internal diameter of described second sloping portion 346 towards second end reduce gradually and described second sloping portion 346 relative at a distance of ground with first sloping portion 328 of main part 310.First end section 342, mid portion 344 and second end section 348 are integrally formed.The Compressed Gas that second channel 345 by cap portion 340 imports enters the first passage 341 of cap portion 340 by the passage that forms between first sloping portion 328 and second sloping portion 346.The internal diameter of the first end section 342 of cap portion 340 equals the external diameter of the mid portion 324 of main part 310 substantially, and the first end section 342 of cap portion 340 closely is connected in the mid portion 324 of main part 310.
Being shaped as of coupling part 350 has the cylindric of the first passage 351 that connects in the vertical, described coupling part 350 comprises having consistent internal diameter and external diameter and first end section 352 that is positioned toward each other and second end section 356, and the mid portion 354 between first end section 352 and second end section 356.First end section 352, mid portion 354 and second end section 356 are integrally formed.Mid portion 354 has the bellows form that can be shortened in the vertical and enlarge.The internal diameter of first end section 352 equals the external diameter of the second end section 348 of cap portion 340 substantially, and first end section 352 closely is connected in the second end section 348 of cap portion 340.In addition, the internal diameter of second end section 356 equals the external diameter of blast pipe 230 substantially, and second end section 356 closely is connected in blast pipe 230.
Guide's adjuster 360 shapes are roughly cylindric, and guide's adjuster 360 comprises main body 361 down, last main body 370, elastic diaphragm (diaphragm) 380 and elastic body 390.
Following main body 361 shapes are roughly the cylindrical chamber in upper end open, and following main body 361 comprises discoid down substrate 362 and madial wall 366 and lateral wall 364, and described madial wall 366 and lateral wall 364 vertically extend and located coaxially from the inner surface of substrate 362 down.In madial wall 366 and the lateral wall 364 each all has toroidal.Following substrate 362 has lower channel 369, and described lower channel 369 is communicated with madial wall 366 volume inside 367, and substrate 362 is formed with exhaust outlet 368 down, the outstanding and extension of the outer surface of described exhaust outlet 368 around lower channel 369 from substrate 362 down.Exhaust outlet 368 is inserted and secured in the second channel 345 of cap portion 340.Lateral wall 364 is provided with first hole and second hole, is inserted into and fixes second pipe the 410 and the 3rd pipe 420 in described first hole and second hole respectively.Be limited to madial wall 366 volume inside 367 and the space between madial wall 366 and lateral wall 364 365 as following space.
Last main body 370 shapes are roughly the chamber at lower ending opening, and upward main body 370 comprises: discoid upward substrate 372; Sidewall 374, described sidewall 374 vertically extends and to have an annulus poroid from the inner surface of last substrate 372; With outward extending annular lip 376 from the end of sidewall 374.Last substrate 372 has upper channel 373, and described upper channel 373 is communicated with the last space 371 of last main body 370 inside and first pipe 400 is inserted and secured in the upper channel 373.
The upper end of lateral wall 364 and the lower end of flange 376 closely contact each other thereby following main body 361 and last main body 370 are connected to each other.
Elastic diaphragm 380 shape video discs, thus elastic diaphragm 380 between will descend between main body 361 and the last main body 370 down space 365 and 367 and last space 371 separate.In other words, the edge of elastic diaphragm 380 is clamped by the lower end of the upper end of lateral wall 364 and flange 376.Elastic diaphragm 380 is applied to its upper surface and the pressure distortion of lower surface is spill or convex, and when pressure removes, revert to plate shaped, i.e. original shape.
Elastomer 390 is disposed in the space 371, and has first end, and described first end group contacts in the inner surface of telescopic direction with last substrate 372; With second end, described second end is relative with first end and contact with the upper surface of elastic diaphragm 380.As elastomer 390, can use typical helical spring.
First pipe 400 has first end that inserts in the upper channel 373, with second end relative with first end and that be connected with blast pipe 230.First pipe 400 makes space 371 be communicated with blast pipe 230, thereby applies the upper surface of pressure at expulsion to elastic diaphragm 380.
Second manages in the first passage of main body 361 under 410 insertions, and compressed gas supplying arrives space 365 and 367 down.Therefore, the pressure that causes of Compressed Gas is applied to the lower surface of elastic diaphragm 380.
The 3rd pipe 420 has first end in the second channel that inserts following main body 361, and second end relative with first end and that be connected with chamber 200.The 3rd pipe 420 makes down space 365 and 367 be communicated with the inside 202 of chamber 200, thereby applies the lower surface of the pressure of chamber 200 to elastic diaphragm 380.
Guide's adjuster 360 reduces the compressed gas scale of construction that is fed to blast pipe 230 offsetting reducing of pressure at expulsion when pressure at expulsion is lower than reference pressure, and guide's adjuster 360 is had additional supply of the increase of the compressed gas scale of construction of blast pipe 230 with the counteracting pressure at expulsion when pressure at expulsion is higher than reference pressure.More particularly, the Compressed Gas of guide's adjuster 360 supply benchmark quantity is to blast pipe 230 when pressure at expulsion equals reference pressure, 360 supplies of guide's adjuster are more than the compressed gas scale of construction of benchmark quantity when pressure at expulsion is lower than reference pressure, and 360 supplies of guide's adjuster are less than the compressed gas scale of construction of benchmark quantity when pressure at expulsion is higher than reference pressure.
Fig. 5 and Fig. 6 are the diagrammatic sketch of the process of explaining that the pressure at expulsion of guide's adjuster 360 is adjusted.Fig. 5 has illustrated the situation that pressure at expulsion reduces of offsetting, and Fig. 6 has illustrated the situation that pressure at expulsion increases of offsetting.When pressure at expulsion equaled reference pressure, elastic diaphragm 380 was writing board shape, and thereby the Compressed Gas of benchmark quantity be supplied to blast pipe 230.
With reference to Fig. 5, the pressure F that causes by elastomer 390 SWith pressure at expulsion P EBoth all are applied in the upper surface of elastic diaphragm 380, and the pressure P of chamber 200 CWith Compressed Gas P ABoth all are applied in the lower surface of elastic diaphragm 380.Along with pressure at expulsion P EReduce, elastic diaphragm 380 is deformed into downward inflated configuration.Therefore, the gap between the upper end of elastic diaphragm 380 and madial wall 366 reduces, and the amount that therefore is fed to the Compressed Gas of blast pipe 230 by the passage between the upper end of elastic diaphragm 380 and madial wall 366 is reduced.Thereby the amount that is fed to the Compressed Gas of blast pipe 230 is reduced, and offsets pressure at expulsion P EReduce (that is, cause pressure at expulsion P EIncrease).
With reference to Fig. 6, along with pressure at expulsion P EIncrease, elastic diaphragm 380 is deformed into upwards inflated configuration.Therefore, gap between the upper end of elastic diaphragm 380 and madial wall 366 increases, and the amount that therefore is fed to the Compressed Gas of blast pipe 230 by the passage between the upper end of elastic diaphragm 380 and madial wall 366 is increased.Thereby the amount that is fed to the Compressed Gas of blast pipe 230 is increased, and the increase of offsetting pressure at expulsion PE (that is, causes pressure at expulsion P EReduce).
The pressure of chamber 200 can increase to blast pipe 230 by compressed gas supplying, thereby the ventilation cross section that forms between first sloping portion 328 and second sloping portion 346 is adjusted to optimum range.
The pressure that puts on the chamber 200 of elastic diaphragm 380 can be adjusted by the opening degree that is installed in the valve 430 on the 3rd pipe 420.The pressure that applies chamber 200 to elastic diaphragm 380 be for based on the variation of the pressure of chamber 200 with the gap between the upper end of adjusting elastic diaphragm 380 and madial wall 366.
When Compressed Gas during, in blast pipe 230, produce negative pressure slightly at a high speed by the passage between the upper end of elastic diaphragm 380 and madial wall 366.This negative pressure is used to prevent that the pressure of caused chamber 200 when pressure at expulsion reduces from reducing.
As mentioned above, gas extraction system according to pressure at expulsion controller of the present invention and use pressure at expulsion controller is provided with guide's adjuster, thereby pressure at expulsion can be adjusted automatically, and the variation of pressure at expulsion can be minimized, and the resistance of gas stream can be minimized.
Although shown and the present invention be described with reference to some preferred embodiment of the present invention, but can understand under the spirit and scope of the present invention that do not deviate from claim and limited, those of ordinary skill in the art can make the various changes of form and details in the present invention.

Claims (10)

1. pressure at expulsion controller, described pressure at expulsion controller is installed on the blast pipe of junction chamber and exhaust apparatus, and the pressure in the control blast pipe, and this pressure at expulsion controller comprises guide's adjuster,
Wherein said guide's adjuster comprises:
Following main body, described down main body have madial wall and lateral wall and are used for the lower channel that last space and blast pipe with madial wall inside communicate with each other, and are supplied Compressed Gas by the last space between madial wall and the lateral wall;
Last main body, described last main body is connected with following main body, and has following space and the upper channel that is used for descending space and blast pipe to communicate with each other;
Elastic diaphragm, described elastic diaphragm be between separating with the last space that will descend main body and the following space of last main body between main body and the last main body down, and the lip-deep pressure distortion that is applied to it is a convex shape; With
Elastomer, described elastomer are installed in the last space of main body, and pressure are applied on the upper surface of elastic diaphragm.
2. pressure at expulsion controller according to claim 1 also comprises main part, cap portion and coupling part, and described main part, cap portion and coupling part communicate with each other all, and polyphone connects coaxially, thereby is connected with described chamber and blast pipe,
Wherein cap portion comprises the passage that blast pipe is communicated with the following space of following main body.
3. pressure at expulsion controller according to claim 2, wherein main part comprises:
Sidewall, described sidewall have the passage that connects in the vertical; With
Annular lip, described annular lip first end from sidewall on direction laterally outwardly extends, and is connected in described chamber.
4. pressure at expulsion controller according to claim 2, wherein cap portion is shaped as the cylindrical shape that has in the vertical the first passage that connects, and this cap portion second channel of being included in lateral direction penetrating and being communicated with the following space of following main body.
5. pressure at expulsion controller according to claim 2, wherein being shaped as of coupling part has the cylindrical shape of the passage of perforation in the vertical, and this coupling part comprises the part with the bellows form that can stretch in the vertical.
6. gas extraction system that is used for gas is discharged to from the inside of chamber the outside of this chamber, this gas extraction system comprises:
Exhaust apparatus, described row institute device is connected with the inside of described chamber by blast pipe, from the inside draw gas of this chamber, and the gas of drawing is discharged to the outside; With
The pressure at expulsion controller, described pressure at expulsion controller is installed on the blast pipe, and the pressure in the control blast pipe,
Wherein this pressure at expulsion controller comprises guide's adjuster, and this guide's adjuster comprises:
Following main body, described down main body have madial wall and lateral wall and are used for the lower channel that last space and blast pipe with madial wall inside communicate with each other, and are supplied Compressed Gas by the last space between madial wall and the lateral wall;
Last main body, described last main body is connected with following main body, and has following space and the upper channel that is used for descending space and blast pipe to communicate with each other;
Elastic diaphragm, described elastic diaphragm be between separating with the last space that will descend main body and the following space of last main body between main body and the last main body down, and the lip-deep pressure distortion that is applied to it is a convex shape; With
Elastomer, described elastomer are installed in the last space of main body, and pressure are applied on the upper surface of elastic diaphragm.
7. gas extraction system according to claim 6 also comprises main part, cap portion and coupling part, and described main part, cap portion and coupling part all communicate with each other, and are connected in series coaxially, thereby is connected with described chamber and blast pipe,
Wherein said cap portion comprises the passage that blast pipe is communicated with the following space of following main body.
8. gas extraction system according to claim 7, wherein said main part comprises:
Sidewall, described sidewall have the passage that connects in the vertical; With
Annular lip, described annular lip first end from sidewall on direction laterally outwardly extends, and is connected in described chamber.
9. gas extraction system according to claim 7, wherein cap portion is shaped as the cylindrical shape that has in the vertical the first passage that connects, and this cap portion second channel of being included in lateral direction penetrating and being communicated with the following space of following main body.
10. gas extraction system according to claim 7, wherein being shaped as of coupling part has the cylindrical shape of the passage of perforation in the vertical, and this coupling part comprises the part with the bellows form that can stretch in the vertical.
CNA2006101011460A 2006-01-25 2006-07-03 Exhaust pressure controller and exhaust system using the same Pending CN101008494A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020060007970A KR100713439B1 (en) 2006-01-25 2006-01-25 Exhaust pressure controller and exhaust system
KR20060007970 2006-01-25

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CN101008494A true CN101008494A (en) 2007-08-01

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101459042B (en) * 2007-12-13 2010-08-11 中芯国际集成电路制造(上海)有限公司 Exhaust system and wafer heat treatment apparatus
CN107373794A (en) * 2017-07-25 2017-11-24 福建锐翔体育科技股份有限公司 A kind of new energy Intelligent thermal-protection gym suit

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002026397A (en) * 2000-06-30 2002-01-25 Seiko Epson Corp Element-packaging method and optical transmitter

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101459042B (en) * 2007-12-13 2010-08-11 中芯国际集成电路制造(上海)有限公司 Exhaust system and wafer heat treatment apparatus
CN107373794A (en) * 2017-07-25 2017-11-24 福建锐翔体育科技股份有限公司 A kind of new energy Intelligent thermal-protection gym suit

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Open date: 20070801