CN101000968A - Stack silicon-base miniature fuel celles and manufacturing method - Google Patents
Stack silicon-base miniature fuel celles and manufacturing method Download PDFInfo
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- CN101000968A CN101000968A CNA200710062899XA CN200710062899A CN101000968A CN 101000968 A CN101000968 A CN 101000968A CN A200710062899X A CNA200710062899X A CN A200710062899XA CN 200710062899 A CN200710062899 A CN 200710062899A CN 101000968 A CN101000968 A CN 101000968A
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- 239000000446 fuel Substances 0.000 title claims abstract description 68
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- 210000004027 cell Anatomy 0.000 title 1
- 238000007789 sealing Methods 0.000 claims abstract description 89
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 64
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 64
- 239000010703 silicon Substances 0.000 claims abstract description 64
- 239000012530 fluid Substances 0.000 claims abstract description 54
- 239000012528 membrane Substances 0.000 claims abstract description 42
- 238000012545 processing Methods 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 15
- 238000005530 etching Methods 0.000 claims description 10
- 238000005538 encapsulation Methods 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 5
- 238000005516 engineering process Methods 0.000 claims description 5
- 239000010410 layer Substances 0.000 claims description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 5
- 239000000853 adhesive Substances 0.000 claims description 4
- 230000001070 adhesive effect Effects 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 239000000377 silicon dioxide Substances 0.000 claims description 4
- 238000001459 lithography Methods 0.000 claims description 3
- 230000000873 masking effect Effects 0.000 claims description 3
- 238000012856 packing Methods 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 230000009977 dual effect Effects 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910052697 platinum Inorganic materials 0.000 claims description 2
- 238000003672 processing method Methods 0.000 claims description 2
- 239000002356 single layer Substances 0.000 claims description 2
- 238000003466 welding Methods 0.000 claims description 2
- 238000013461 design Methods 0.000 abstract description 5
- 238000004806 packaging method and process Methods 0.000 abstract 2
- 238000005459 micromachining Methods 0.000 abstract 1
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 12
- 238000010586 diagram Methods 0.000 description 5
- 239000007800 oxidant agent Substances 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 5
- 238000001020 plasma etching Methods 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- 229920005573 silicon-containing polymer Polymers 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 238000003487 electrochemical reaction Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000005518 electrochemistry Effects 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Fuel Cell (AREA)
Abstract
Stacked silicon-based micro fuel cell group and its production method belong to the field of micro-energy and micro-machining areas. It includes the single cell stacking, sealing component, claming component and fluid catheter. Two or more fuel cell single batteries form stack, which order is: the second outer plate (12), the second membrane electrode (22), the inner plate (13), the first membrane electrode (21) and the first outer plate (11), and use the clamping and sealing components to seal package. The production method includes processing silicon plate and seal packaging of different component parts, using silicon micro-machined to produce a drainage channel, packaging the single cell stack. The invention has small resistance of battery, small package size, flexible flow graphic design, various series and parallel forms, which can get a larger output current and voltage when a small increase in the volume of cases.
Description
Technical field
The present invention relates to a kind of stacked silicon-based micro fuel cell group and preparation method thereof, belong to little energy field and micromachined field.
Background technology
Micro fuel cell is the device that the chemical energy of fuel (as methyl alcohol, hydrogen etc.) is directly changed into electric energy, and is big with its energy density, environment friendly and pollution-free, fuel is convenient to store advantages such as transport and working and room temperature, at portable electric appts (as notebook computer, PDA, digital camera), wireless communication networks is (as mobile phone, GPS, sensor network nodes), microsystem is (as SOC (system on a chip), the micro-system that SOC, MEMS device form) etc. the aspect has outstanding advantage.Utilize the silicon-base miniature fuel of ripe MEMS fabrication techniques to have the precision height, good reproducibility, produce the low advantage that waits of cost in batches, and be expected to other MEMS devices and IC circuit integrated, promote from supply with, the realization of low-cost, high performance microsystem.
The performance of fuel-cell single-cell and the demand of actual electronic product also have certain gap at present.With the direct methanol fuel cell is example, and generally about 0.2-0.4V, maximum output current density is approximately 10mA/cm to its output voltage near the maximum power point
2For satisfying the need of work of most of electronic products, necessary Series Sheet battery strengthens the effective area of fuel cell, i.e. the electrochemical reaction region area simultaneously to improve output voltage by methods such as monocells in parallel.
At present about the pertinent literature of micro fuel cell group research seldom, mainly consider the planar structure battery pack, soon each monocell level is put the formation array.The said structure area occupied is equivalent to the stack of each monocell cross-sectional area, and especially for micro fuel cell, its anchor clamps thickness is much larger than the gross thickness of pole plate and membrane electrode usually, so that construction packages takies volume is very big.
The key issue of stack fuel cell group is that raw material is carried and encapsulation.General fuel battery pole board can be made through hole with the flowfield channels two ends, inserts conduit transmission raw material from the back side.To the laminated battery group,, can't adopt above-mentioned form to transport raw material because each pole plate effective area is overlapped.Adopt the additive method drainage to must be noted that the reliability that guarantees encapsulation, guarantee that packaged fuel cell raw material does not take place leaks.In addition, cell package also need consider to provide homogeneous mechanical pressure and electrochemistry corrosion resistance.
Summary of the invention
Low in order to solve above-mentioned micro fuel cell monocell output voltage, the output current density range is little, and encapsulation volume the present invention proposes a kind of stack micro fuel cell group and preparation method thereof than problem such as big.
Technical scheme of the present invention is as follows:
Stacked silicon-based micro fuel cell group comprises that the monocell that two or more fuel-cell single-cells are formed piles up black box, clamp assembly and fluid conduit systems.Described two fuel-cell single-cells comprise three silicon pole plates and two membrane electrodes, external polar plate (11), internal polar plate (13) and membrane electrode (21) are formed monocell (01), external polar plate (12), internal polar plate (13) and membrane electrode (22) are formed monocell (02), wherein, internal polar plate (13) is shared by two fuel-cell single-cells.Described black box comprises sealing ring (31), sealing film (32) and sealing block (33).Described clamp assembly comprises anchor clamps carrier (41) and anchor clamps loam cake (42).
Described monocell (01) is formed monocell with monocell (02) and is piled up (0), and its assembly stacks order and is followed successively by external polar plate (12), membrane electrode (22), internal polar plate (13), membrane electrode (21) and external polar plate (11).Make in the front of described silicon pole plate flow field structure, and wherein the flow field structure of external polar plate (11) and (12) comprises fluid inlet and outlet (111) and flowfield channels (112); Internal polar plate (13) two sides all has flow field structure, comprise drainage raceway groove (131), flowfield channels (132) and through hole (133), wherein, through hole (133) is that two sides flow field structure pattern overlaps mutually and forms the part of break-through, drainage raceway groove (131a) and flowfield channels (132a) are the flow field structure figure in internal polar plate front, and drainage raceway groove (131b) and flowfield channels (132b) are the flow field structure figure at the internal polar plate back side.The size of membrane electrode (21) and (22) satisfies: cover fluid inlet and outlet (111) and flowfield channels (112) on described external polar plate (11) and (12) fully, with the flowfield channels (132) on the described internal polar plate (13), but only cover the part of the drainage raceway groove (131) on the described internal polar plate (13), the length that is exposed to membrane electrode and external polar plate drainage raceway groove (131) in addition needs greater than the fluid conduit systems diameter.The part that is not covered between external polar plate (11) and the internal polar plate (13) by membrane electrode (21), and the part that is not covered by membrane electrode (22) between external polar plate (12) and the internal polar plate (13) is covered fully by circle sealing together (31) respectively.The back side of external polar plate (11) and (12) is covered fully by film sealing together (32) respectively.Described anchor clamps carrier (41) and anchor clamps loam cake (42) are separately fixed at the outside that described monocell piles up (0) and sealing film (32), and have opening (43) in the position corresponding with fluid inlet and outlet and drainage raceway groove.With fluid inlet and outlet (111) contact position back side corresponding opening (43) sealing together (33) are arranged respectively at sealing ring (31) and drainage raceway groove (131) contact position and sealing film (32).One end of fluid conduit systems (51) passes sealing block (33) and links to each other with fluid inlet and outlet (111) with sealing film (32), and an end of fluid conduit systems (52) passes sealing block (33) and links to each other with drainage raceway groove (131) with sealing ring (31).The supply of the other end of fluid conduit systems and external fuel or oxidant with loop back receiving unit and link to each other.
In the present invention, described stacked silicon-based micro fuel cell group structure is applicable to that also a plurality of fuel-cell single-cells are combined to form battery pack with the electrical interconnection form of serial or parallel connection.In the monocell that a plurality of fuel-cell single-cells form piles up, the adjacent shared internal polar plates of two monocells (13).The two sides of described internal polar plate all has flow field structure, and drainage raceway groove (131) is exposed to membrane electrode and links to each other with fluid conduit systems with adjacent silicon pole plate part in addition, realizes the supply and the discharging of fuel.
The manufacture method of stacked silicon-based micro fuel cell group comprises the processing of silicon pole plate and the encapsulation of silicon-base miniature fuel group.The processing method of silicon pole plate, step is as follows:
1) at the two-sided generation silica membrane of silicon chip, and thereon deposit silicon nitride as the etching masking layer.
2) adopt the dual surface lithography technology to make flow field structure figure and etching on silicon pole plate two sides, the etching direction is that tow sides are inside simultaneously.The flow field structure that etching forms comprises drainage raceway groove (131), through hole (133), flowfield channels (112), (132) and fluid inlet and outlet (111).
3) at two-sided sputter successively of silicon chip or electroplated metal layer.Above-mentioned metal level can be a single-layer metal, also can be made of the multiple layers of different materials metal level, and material can be a platinum, gold, copper etc.
4) directly adhesion or welding lead in zone that silicon chip surface does not have a flow field structure are realized electrical interconnection.
The method for packing of silicon-base miniature fuel group, step is as follows:
1) stack external polar plate (12) successively, membrane electrode (22), sealing ring (31), internal polar plate (13), sealing ring (31), membrane electrode (21) and external polar plate (11), the monocell of forming the band sealing ring piles up (0).
2) stack sealing film (32) successively on anchor clamps carrier (41), monocell piles up (0), and sealing film (32) covers anchor clamps loam cake (42) and fixing.
3) locate to put into sealing block (33) at opening (43), and with adhesive that itself and sealing film (32) or sealing ring (31) is bonding.
4) 4 fluid conduit systems (51) are passed sealing block (33) and sealing film (32) respectively, link to each other with fluid inlet and outlet (111) on the external polar plate (12) with external polar plate (11); 2 fluid conduit systems are passed sealing block (33) and sealing ring (31) respectively, link to each other with drainage raceway groove (131) on the internal polar plate (13).Use the space between adhesive fill fluid conduit and the sealing block (33) at last.
In the present invention, described stacked silicon-based micro fuel cell group manufacture method also is applicable to the micro fuel cell group that a plurality of fuel-cell single-cells are formed.In the fuel battery that a plurality of monocells are formed, be placed with sealing ring between adjacent two silicon pole plates, fluid conduit systems passes sealing ring and links to each other with drainage raceway groove on the silicon pole plate.Fuel and oxidant can flow into each fuel-cell single-cell by fluid conduit systems serial successively, also can walk abreast simultaneously to flow into each fuel-cell single-cell, or the comprehensive use of above two kinds of supply modes.
In the present invention, described sealing ring, sealing film and sealing block adopt the dimethyl silicone polymer material.
The stack micro fuel cell group of the present invention's design adopts the drainage raceway groove as hydrogen; fuel and air such as methyl alcohol; oxidants such as oxygen from fluid conduit systems flow into flow out the path of fuel cell; factors such as electric current collection, sealing and mechanical protection have been considered simultaneously, and have been applicable to a plurality of monocell series parallel structures that it is little to have an internal resistance of cell; encapsulation volume is little; advantages such as flow field figure flexible design under the very little situation of volume increase, are expected to obtain bigger performance and improve.
Description of drawings
Fig. 1 is the silicon-base miniature fuel cross-sectional view.
Fig. 2 is a silicon-base miniature fuel group STRUCTURE DECOMPOSITION schematic diagram.
Fig. 3 is for assembling the appearance assumption diagram of the silicon-base miniature fuel group that finishes.
Fig. 4 (a) is an internal polar plate preparation technology flow chart;
(b) be external polar plate preparation technology flow chart.
Fig. 5 is silicon-base miniature fuel group encapsulation schematic diagram.
Many cell stacks formula battery pack structure schematic diagram that Fig. 6 (a) supplies with for the fuel serial;
(b) be the parallel many cell stacks formula battery pack structure schematic diagram supplied with of fuel.
Embodiment
Further specify the present invention below in conjunction with specific embodiments and the drawings.
Under the present invention the cross-section structure of an exemplary embodiments of silicon-base miniature fuel group as shown in Figure 1, its each assembly splits structure as shown in Figure 2.Stacked silicon-based micro fuel cell group comprises that the monocell that two fuel-cell single-cells are formed piles up black box, clamp assembly and fluid conduit systems.Described two fuel-cell single-cells comprise three silicon pole plates and two membrane electrodes, external polar plate (11), internal polar plate (13) and membrane electrode (21) are formed monocell (01), external polar plate (12), internal polar plate (13) and membrane electrode (22) are formed monocell (02), wherein, internal polar plate (13) is shared by two fuel-cell single-cells, and described monocell (01) is formed monocell with monocell (02) and piled up (0).Described black box comprises sealing ring (31), sealing film (32) and sealing block (33).Described clamp assembly comprises anchor clamps carrier (41) and anchor clamps loam cake (42).
Monocell piles up (0), and its assembly stacks order and is followed successively by external polar plate (12), membrane electrode (22), internal polar plate (13), membrane electrode (21) and external polar plate (11).Make in the front of described silicon pole plate flow field structure, and wherein the flow field structure of external polar plate (11) and (12) comprises fluid inlet and outlet (111) and flowfield channels (112); Internal polar plate (13) two sides all has flow field structure, comprise drainage raceway groove (131), flowfield channels (132) and through hole (133), wherein, through hole (133) is that two sides flow field structure pattern overlaps mutually and forms the part of break-through, drainage raceway groove (131a) and flowfield channels (132a) are the flow field structure figure in internal polar plate front, and drainage raceway groove (131b) and flowfield channels (132b) are the flow field structure figure at the internal polar plate back side.The size of membrane electrode (21) and (22) satisfies: cover fluid inlet and outlet (111) and flowfield channels (112) on described external polar plate (11) and (12) fully, with the flowfield channels (132) on the described internal polar plate (13), but only cover the part of the drainage raceway groove (131) on the described internal polar plate (13), the length that is exposed to the outer drainage raceway groove (131) of membrane electrode and external polar plate needs greater than the fluid conduit systems diameter.The part that is not covered between external polar plate (11) and the internal polar plate (13) by membrane electrode (21), and the part that is not covered by membrane electrode (22) between external polar plate (12) and the internal polar plate (13) is covered fully by circle sealing together (31) respectively.The back side of external polar plate (11) and (12) is covered fully by film sealing together (32) respectively.Described anchor clamps carrier (41) and anchor clamps loam cake (42) are separately fixed at the outside that described monocell piles up (0) and sealing film (32), and have opening (43) in the position corresponding with fluid inlet and outlet and drainage raceway groove.Locate respectively to have sealing together (33) at sealing ring (31) and drainage raceway groove (131) contact position and sealing film (32) with fluid inlet and outlet (111) contact position back side corresponding opening (43).One end of fluid conduit systems (51) passes sealing block (33) and links to each other with fluid inlet and outlet (111) with sealing film (32), and an end of fluid conduit systems (52) passes sealing block (33) and links to each other with drainage raceway groove (131) with sealing ring (31).The supply of the other end of fluid conduit systems and external fuel or oxidant with loop back receiving unit and link to each other.Fig. 3 has shown the surface structure of the silicon-base miniature fuel group that assembling finishes.
The making of silicon-base miniature fuel group comprises the making of silicon pole plate and two key steps of encapsulation of each assembly.Fig. 4 a and Fig. 4 b have shown the making flow chart that has the internal polar plate (13) of two-sided flow field structure and have the external polar plate (11) (12) of uniplanar flow field structure of the present invention respectively.Described silicon pole plate processing process is specific as follows:
1)＜100〉crystal orientation is two throws on the silicon chip with the thermal oxidation process two sides 0.05 μ m silicon dioxide of growing, and low-pressure vapor phase deposit again (LPCVD) 0.1 μ m silicon nitride is as the bulk silicon etching masking layer;
2) in a side of silicon chip, light list silicon pole plate one to the flow field structure pattern; Use reactive ion etching (RIE) to remove the silicon nitride that photoetching exposes then; Remove photoresist;
3), make the flow field structure pattern of silicon pole plate another side by lithography at the opposite side of silicon chip; Use reactive ion etching (RIE) to remove the silicon nitride that photoetching exposes then; Remove photoresist, and float the silicon dioxide that exposes with hydrofluoric acid;
4) under 70 ° ~ 80 ℃ solution temperatures, add ultrasonic bulk silicon etching silicon chip with KOH solution.Erosional surface meets when both sides, stops behind the import and export (111) of formation break-through and the through hole (133);
5) at the Ti of two surface sputtering 0.02 μ m of silicon chip and the Pt of 0.18 μ m.
6) do not have the part of flow field structure pattern at silicon chip surface, lead and silicon chip are bondd, the electrical connection of formation silicon pole plate with the silver slurry.
Fig. 5 has shown the method for packing of silicon-base miniature fuel group, and concrete steps are as follows:
1) stacks external polar plate (12) successively, membrane electrode (22), dimethyl silicone polymer (PDMS) sealing ring (31), internal polar plate (13), dimethyl silicone polymer (PDMS) sealing ring (31), membrane electrode (21), and external polar plate (11), the monocell of forming the band sealing ring piles up (0);
2) stack the PDMS sealing film (32) that thickness is about 300 μ m successively on anchor clamps carrier (41), monocell piles up (0), and sealing film (32) covers anchor clamps loam cake (42) and fixing;
3) on the silicon pole plate, put into PDMS sealing block (33) in the opening (43) of fluid inlet and outlet (111) and drainage raceway groove (131) correspondence position, coat liquid PDMS at it with the one side that sealing film (32) or sealing ring (31) contact, and with the slit between liquid PDMS filling opening (43) and the sealing block (33), and be heating and curing;
4) fluid conduit systems (51) is passed sealing block (33) and sealing film (32) respectively, link to each other with fluid inlet and outlet (111) on the external polar plate (11) (12); Fluid conduit systems (52) is passed sealing block (33) and sealing ring (31) respectively, link to each other with drainage raceway groove (131) on the internal polar plate (13).With the space between liquid PDMS fill fluid conduit and the sealing block, and be heating and curing.
Described laminated battery group structure also is applicable to a plurality of fuel-cell single-cell combinations, in the monocell that a plurality of fuel-cell single-cells form piles up, and the adjacent shared internal polar plates of two fuel-cell single-cells (13).The two sides of described internal polar plate all has flow field structure, comprise drainage raceway groove (131) and flowfield channels (132), be placed with sealing ring (31) between adjacent two silicon pole plates, fluid conduit systems passes sealing ring (31) and links to each other with drainage raceway groove (131), realizes the supply and the discharging of fuel.Fig. 6 has shown the structural representation of the battery pack of cell stacks formula more than two kinds, and wherein Fig. 6 a is the serial fuel supply, and Fig. 6 b is parallel fuel supply.
The stack micro fuel cell group of the present invention's design feeds oxidants such as fuel and air such as hydrogen, methyl alcohol, oxygen respectively in each membrane electrode both sides, and then the electronic current of electrochemical reaction generation can lead to the external circuit generating by the lead that connects on the silicon chip.Described lead can serial or parallel connection form interconnect.Described stacked silicon-based micro fuel cell group has that the internal resistance of cell is little, and encapsulation volume is little, and advantages such as flow field figure flexible design under the very little situation of volume increase, are expected to obtain bigger performance and improve.
Claims (8)
1, stacked silicon-based micro fuel cell group is characterized in that, this micro fuel cell group comprises that monocell piles up, black box, clamp assembly and fluid conduit systems;
Described monocell piles up by two fuel-cell single-cells, i.e. first fuel-cell single-cell (01) and the second fuel cell list
Battery (02) is formed; Two fuel-cell single-cells have three silicon pole plates and two membrane electrodes: first external polar plate (11), internal polar plate (13) and first membrane electrode (21) are formed first fuel-cell single-cell (01), second external polar plate (12), internal polar plate (13) and second membrane electrode (22) are formed second fuel-cell single-cell (02), wherein, internal polar plate (13) is shared by two fuel-cell single-cells;
Fluid inlet and outlet (111) and flowfield channels (112) are arranged on first external polar plate (11) and second external polar plate (12); Drainage raceway groove (131) is arranged, flowfield channels (132) and through hole (133) on the internal polar plate (13);
Described black box comprises sealing ring (31), sealing film (32) and sealing block (33);
Described clamp assembly comprises anchor clamps carrier (41) and anchor clamps loam cake (42);
Stack second external polar plate (12) in order successively, second membrane electrode (22), internal polar plate (13), first membrane electrode (21) and first external polar plate (11) are formed monocell and are piled up;
The part that is not covered between first external polar plate (11) and the internal polar plate (13) by first membrane electrode (21), and the part sealed circle of difference (31) that is not covered by second membrane electrode (22) between second external polar plate (12) and the internal polar plate (13) covers fully; The back side of first external polar plate (11) and the second external electrode (12) sealed film (32) respectively covers fully;
Described anchor clamps carrier (41) and anchor clamps loam cake (42) are separately fixed at the outside that described monocell piles up (0) and sealing film (32), and have opening (43) in the position corresponding with described fluid inlet and outlet and drainage raceway groove;
With fluid inlet and outlet (111) contact position back side corresponding opening (43) sealing block (33) is arranged respectively at sealing ring (31) and drainage raceway groove (131) contact position and sealing film (32);
One end of fluid conduit systems (51) passes sealing block (33) and links to each other with fluid inlet and outlet (111) with sealing film (32), and an end of another fluid conduit systems (52) passes sealing block (33) and links to each other with drainage raceway groove (131) with sealing ring (31).
2, stacked silicon-based micro fuel cell group according to claim 1, it is characterized in that, the front of described three silicon pole plates is fabricated to flow field structure, and wherein the flow field structure of first external polar plate (11) and the second external electrode (12) comprises fluid inlet and outlet (111) and flowfield channels (112); Internal polar plate (13) two sides is a flow field structure all, comprises drainage raceway groove (131), flowfield channels (132) and through hole (133).
3, stacked silicon-based micro fuel cell group according to claim 1, it is characterized in that, described first membrane electrode (21) and second membrane electrode (22) cover the flowfield channels (132) on fluid inlet and outlet (111), flowfield channels (112) and the described internal polar plate (13) on described first external polar plate (11) and the second external electrode (12) fully, but only cover the part of the drainage raceway groove (131) on the described internal polar plate (13), the length that is exposed to membrane electrode and external polar plate drainage raceway groove (131) in addition is greater than the fluid conduit systems diameter.
4, stacked silicon-based micro fuel cell group is characterized in that, this micro fuel cell group comprises that monocell piles up, black box, clamp assembly and fluid conduit systems; Itself and claim 1 difference only are, the monocell of this stacked silicon-based micro fuel cell group piles up by two above fuel-cell single-cells to be formed with the form of serial or parallel connection electrical interconnection, the shared internal polar plate of adjacent two fuel-cell single-cells, making on the internal polar plate has the drainage raceway groove, and it is exposed to membrane electrode and links to each other with fluid conduit systems with adjacent silicon pole plate part in addition.
5, a kind of manufacture method of stacked silicon-based micro fuel cell group is characterized in that, the manufacture method of this stacked silicon-based micro fuel cell group comprises the processing of silicon pole plate and the encapsulation of each building block of silicon-base miniature fuel group;
The processing method of silicon pole plate,
1) at the two-sided generation silica membrane of silicon chip, and thereon deposit silicon nitride as the etching masking layer;
2) adopt the dual surface lithography technology to make flow field structure figure and etching on silicon pole plate two sides, the etching direction is that tow sides are inside simultaneously; The flow field structure that etching forms comprises drainage raceway groove (131), through hole (133), flowfield channels (112), (132) and fluid inlet and outlet (111);
3) at two-sided sputter successively of silicon chip or electroplated metal layer;
4) directly adhesion or welding lead in zone that silicon chip surface does not have a flow field structure are realized electrical interconnection;
The method for packing of silicon-base miniature fuel group,
1) stack second external polar plate (12) successively, second membrane electrode (22), sealing ring (31), internal polar plate (13), sealing ring (31), first membrane electrode (21) and first external polar plate (11), the monocell of forming the band sealing ring piles up (0);
2) stack sealing film (32) successively on anchor clamps carrier (41), monocell piles up (0), and sealing film (32) covers anchor clamps loam cake (42) and fixing;
3) locate to put into sealing block (33) at opening (43), and with adhesive that itself and sealing film (32) or sealing ring (31) is bonding;
4) 4 fluid conduit systems (51) are passed sealing block (33) and sealing film (32) respectively, link to each other with fluid inlet and outlet (111) on the external polar plate (12) with external polar plate (11); 2 fluid conduit systems are passed sealing block (33) and sealing ring (31) respectively, link to each other with drainage raceway groove (131) on the internal polar plate (13); Use the space between adhesive fill fluid conduit and the sealing block (33) at last;
Like this, promptly obtain a kind of stacked silicon-based micro fuel cell group.
6, a kind of stacked silicon-based micro fuel cell group manufacture method according to claim 5 is characterized in that, described metal level is single-layer metal or is made of the multiple layers of different materials metal level.
7, a kind of stacked silicon-based micro fuel cell group manufacture method according to claim 6 is characterized in that, described material is platinum, gold or copper.
8, a kind of stacked silicon-based micro fuel cell group manufacture method according to claim 5, it is characterized in that, the micro fuel cell group of stacked silicon-based micro fuel cell group form to(for) a plurality of fuel-cell single-cells, it places sealing ring between adjacent two silicon pole plates, fluid conduit systems passes sealing ring and links to each other with drainage raceway groove on the silicon pole plate.
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| CNB200710062899XA CN100483829C (en) | 2007-01-19 | 2007-01-19 | Stack silicon-base miniature fuel celles and manufacturing method |
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| CN101867054A (en) * | 2010-07-08 | 2010-10-20 | 华中科技大学 | Solid oxide fuel cell and preparation method thereof |
| CN102848118A (en) * | 2012-08-23 | 2013-01-02 | 东莞成电精工自动化技术有限公司 | Double-side automatic clamp for welding |
| CN108235203A (en) * | 2017-12-11 | 2018-06-29 | 钰太芯微电子科技（上海）有限公司 | A kind of method and microphone apparatus of adaptive tracing bias voltage |
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| WO2019232835A1 (en) * | 2018-06-07 | 2019-12-12 | 上海尚理投资有限公司 | Silicon pole plate and preparation method therefor, use of silicon in fuel cell, fuel cell stack structure, fuel cell and use thereof |
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| CN101867054A (en) * | 2010-07-08 | 2010-10-20 | 华中科技大学 | Solid oxide fuel cell and preparation method thereof |
| CN102848118A (en) * | 2012-08-23 | 2013-01-02 | 东莞成电精工自动化技术有限公司 | Double-side automatic clamp for welding |
| CN108235203A (en) * | 2017-12-11 | 2018-06-29 | 钰太芯微电子科技（上海）有限公司 | A kind of method and microphone apparatus of adaptive tracing bias voltage |
| WO2019232835A1 (en) * | 2018-06-07 | 2019-12-12 | 上海尚理投资有限公司 | Silicon pole plate and preparation method therefor, use of silicon in fuel cell, fuel cell stack structure, fuel cell and use thereof |
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| CN110581288A (en) * | 2018-06-07 | 2019-12-17 | 上海尚理投资有限公司 | fuel cell stack structure and fuel cell and application thereof |
| CN110581288B (en) * | 2018-06-07 | 2021-02-12 | 上海尚理投资有限公司 | Fuel cell stack structure and fuel cell and application thereof |
| JP2021518989A (en) * | 2018-06-07 | 2021-08-05 | 上海尚理投資有限公司 | Silicon electrode plate, application of silicon to fuel cells, and fuel cell stack structure |
| CN110581291B (en) * | 2018-06-07 | 2021-12-03 | 上海尚理投资有限公司 | Use of silicon in fuel cells |
| JP7268136B2 (en) | 2018-06-07 | 2023-05-02 | 上海尚理投資有限公司 | Silicon electrode plates, application of silicon in fuel cells, and fuel cell stack structures |
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| CN109894171A (en) * | 2019-04-03 | 2019-06-18 | 大连理工大学 | A kind of method of reversible keying micro-fluidic chip |
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| CN100483829C (en) | 2009-04-29 |
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