CN100588738C - The method of coating silicon nitride film layer on piston ring surface - Google Patents
The method of coating silicon nitride film layer on piston ring surface Download PDFInfo
- Publication number
- CN100588738C CN100588738C CN200710164825A CN200710164825A CN100588738C CN 100588738 C CN100588738 C CN 100588738C CN 200710164825 A CN200710164825 A CN 200710164825A CN 200710164825 A CN200710164825 A CN 200710164825A CN 100588738 C CN100588738 C CN 100588738C
- Authority
- CN
- China
- Prior art keywords
- piston ring
- silicon nitride
- film layer
- nitride film
- silane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
The invention discloses a kind of method of coating silicon nitride film layer on piston ring surface.Earlier piston ring is carried out electropolishing and ultrasonic cleaning processing; Piston ring after will cleaning is again put into radio-frequency plasma and is strengthened chemical vapor depsotition equipment, and system is evacuated to 5 * 10
-3Pa, with silane and ammonia is reactant gas source, than 1/2～1/4, under the condition of 300～500 ℃ of depositing temperatures, radio frequency power 90～150W, deposition 10～30min stops, and obtains silicon nitride film layer in the upper surface and the side of piston ring at silane flow rate 15～45sccm, silane and ammonia flow; Take out behind the naturally cooling.The surface hardness of gained silicon nitride film layer piston ring can reach 900-1400HV, apparently higher than the hardness of common chromeplated product 800HV.Corrosion-proof wear performance and self-lubricating property that rete is good can effectively improve the use properties of piston ring, improve job stability, prolongs life.This method has overcome drawbacks such as traditional chrome plated piston ring energy consumption is big, seriously polluted, complex process.
Description
Technical field
The present invention relates to the surface modification of piston ring, particularly a kind of method of coating silicon nitride film layer on piston ring surface.
Background technology
Piston ring is the important accessory of oil engine, and its quality quality directly affects technical indicators such as the power output of oil engine, fuel oil consumption, burning and exhausting.The working face of piston ring often is in the semi-dry friction state, and working conditions is abominable, easily weares and teares.Simultaneously, to-and-fro movement and high-temp combustion will make piston ring produce very big mechanical stress and thermal stresses.Therefore, improve the frictional behaviour of piston ring to being of great significance the work-ing life that prolongs piston ring.
In order to improve the performance of piston ring, except changing material, more be the method that adopts surface Hardening Treatment, as coating process, ion nitriding, laser reinforcing etc.Above-mentioned technology respectively has excellent lacking, and the most frequently used is to adopt electric plating method to form chromium coating on its surface.Yet, electroplate chromium coating and must wear no resistance in conjunction with very infirm with the piston ring matrix, be the major cause that causes chrome plated piston ring to lose efficacy easily.And chrome-plated process exists the serious problem of environmental pollution.
Plasma enhanced chemical vapor deposition is that a kind of glow discharge produces the physical process of plasma active and the gas phase deposition technology that chemical reaction combines, and is good around plating property, is usually used in the top coat of complex-shaped workpieces.And have characteristics such as depositing temperature is low, workpiece is indeformable, rate of film build is fast, even film layer densification, prepare one of high performance membrane layer material method the most commonly used so become.Utilize this technology to form pottery, metal, compound and composite film at workpiece surface easily, realize the reinforcement of workpiece surface.
Silicon nitride is a kind of advanced ceramics material, has performances such as high rigidity, wear-resistant, resistance to high temperature oxidation.And silicon nitride ceramics also has self-lubricating property, and the major cause that produces this specific character is that silicon nitride can decompose by trace in friction process, forms very thin air film on the surface, thereby friction resistance is reduced.And along with constantly carrying out of friction, surface of friction is more and more brighter and cleaner, and resistance is more and more littler, has played the effect of lubricated anti-attrition.The applied research of silicon nitride ceramics and coating has been become the focus of material science.
The excellent properties of silicon nitride film layer has satisfied the composite demand of novel piston ring sufacing to hardness, wear resistance, oilness, has a good application prospect.Before this, the domestic and international report that also rarely has at coating silicon nitride film layer on piston ring surface.
Summary of the invention
The method that the purpose of this invention is to provide a kind of coating silicon nitride film layer on piston ring surface.The piston ring of handling through this method has the Wear-resistant performance, can adapt to oil engine and constantly develop to high-power, high-speed, long-life direction.
The technical solution used in the present invention is:
Before the deposition, piston ring is carried out electropolishing and ultrasonic cleaning processing; After pre-treatment is finished, again piston ring is put into the sediment chamber that radio-frequency plasma strengthens chemical vapor depsotition equipment, system is evacuated to vacuum, with silane and ammonia is reactant gas source, at silane flow rate 15～45sccm, silane and ammonia flow than under 1: 2～1: 4, the condition of 300～500 ℃ of depositing temperatures, radio frequency power 90～150W, deposition 10～30min stops, at upper surface and side uniform deposition one deck silicon nitride film layer of piston ring; Take out behind the naturally cooling.
It is home-made HQ-2 type RF-PECVD equipment that described radio-frequency plasma strengthens chemical vapor depsotition equipment.
The beneficial effect that the present invention has is:
, firm with the method for chemical vapour deposition with matrix bond at the sedimentary silicon nitride film layer even compact of piston ring upper surface and side.The surface hardness of gained silicon nitride film layer piston ring can reach 900-1400HV, apparently higher than the hardness of common chromeplated product 800HV.Corrosion-proof wear performance and self-lubricating property that rete is good can effectively improve the use properties of piston ring, improve job stability, prolongs life.This method has overcome drawbacks such as traditional chrome plated piston ring energy consumption is big, seriously polluted, complex process, has promotional value and application prospect widely.
Description of drawings
Accompanying drawing is the structural representation of the surfaces nitrided silicon film of piston ring of the present invention.
Embodiment
The invention will be further described below in conjunction with drawings and Examples.
Accompanying drawing is the structural representation of the surfaces nitrided silicon film of piston ring.As shown in drawings, uniform deposition one deck silicon nitride film layer 2 on piston ring upper surface and side 1.
In the present embodiment, adopt radio-frequency plasma to strengthen chemical vapour deposition technique (RF-PECVD) and deposit on surface that one deck hardness height, wear resistance are good, the silicon nitride film layer of self-lubricating through the pot type piston ring of polishing and ultrasonic cleaning pre-treatment.The main technologic parameters of RF-PECVD comprises the flow of depositing temperature, depositing time, radio frequency power, reactant gas source and ratio etc.
The present invention selects for use through nitrogen (N
2) concentration of dilution is 10% silane (SiH
4) and high-purity ammonia (NH
3) as the source of the gas of deposited silicon nitride rete.
Embodiment 1:
The pot type piston ring is polished with DJP-II type electropolisher,, and purpose is to improve the oxide skin of waiting to deposit the surface smoothness of piston ring and removing the top layer.Piston ring after the polishing is put into Ultrasonic Cleaners clean 15min, take out the back and use the acetone clean surface.Subsequently piston ring is put into the sediment chamber of HQ-2 type RF-PECVD equipment, system is evacuated to 5 * 10
-3Pa.Design temperature is 300 ℃, opens well heater, treats that sediment chamber's temperature-stable begins deposition when set(ting)value.The radio frequency power of selecting for use is 150W, makes the flow of silane and ammonia be respectively 45sccm and 90sccm by quality of regulation under meter (MFC).After depositing time reached 20min, off-response source of the gas, radio frequency source and well heater stopped deposition, treated piston ring cooling back taking-up, and upper surface and side have obtained the silicon nitride film layer of even compact, and thickness is 210nm.
Embodiment 2:
The pot type piston ring is polished with DJP-II type electropolisher,, and purpose is to improve the oxide skin of waiting to deposit the surface smoothness of piston ring and removing the top layer.Piston ring after the polishing is put into Ultrasonic Cleaners clean 15min, take out the back and use the acetone clean surface.Subsequently piston ring is put into the sediment chamber of HQ-2 type RF-PECVD equipment, system is evacuated to 5 * 10
-3Pa.Design temperature is 400 ℃, opens well heater, treats that sediment chamber's temperature-stable begins deposition when set(ting)value.The radio frequency power of selecting for use is 90W, makes the flow of silane and ammonia be respectively 15sccm and 60sccm by quality of regulation under meter (MFC).After depositing time reached 30min, off-response source of the gas, radio frequency source and well heater stopped deposition, treated piston ring cooling back taking-up, and upper surface and side have obtained the silicon nitride film layer of even compact, and thickness is 300nm.
Embodiment 3:
The pot type piston ring is polished with DJP-II type electropolisher,, and purpose is to improve the oxide skin of waiting to deposit the surface smoothness of piston ring and removing the top layer.Piston ring after the polishing is put into Ultrasonic Cleaners clean 15min, take out the back and use the acetone clean surface.Subsequently piston ring is put into the sediment chamber of HQ-2 type RF-PECVD equipment, system is evacuated to 5 * 10
-3Pa.Design temperature is 500 ℃, opens well heater, treats that sediment chamber's temperature-stable begins deposition when set(ting)value.The radio frequency power of selecting for use is 120W, makes the flow of silane and ammonia be respectively 30sccm and 90sccm by quality of regulation under meter (MFC).After depositing time reached 10min, off-response source of the gas, radio frequency source and well heater stopped deposition, treated piston ring cooling back taking-up, and upper surface and side have obtained the silicon nitride film layer of even compact, and thickness is 120nm.
Claims (1)
1. the method for a coating silicon nitride film layer on piston ring surface before the deposition, is carried out electropolishing and ultrasonic cleaning processing to piston ring; After pre-treatment is finished, piston ring is put into the sediment chamber that radio-frequency plasma strengthens chemical vapor depsotition equipment, it is characterized in that: system is evacuated to 5 * 10 again
-3Pa, with silane and ammonia is reactant gas source, at silane flow rate 15sccm, silane and ammonia flow than 1: 4, under the condition of 400 ℃ of depositing temperatures, radio frequency power 90W, deposition 30min stops, at upper surface and side uniform deposition one deck silicon nitride film layer of piston ring; Take out behind the naturally cooling.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710164825A CN100588738C (en) | 2007-12-25 | 2007-12-25 | The method of coating silicon nitride film layer on piston ring surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710164825A CN100588738C (en) | 2007-12-25 | 2007-12-25 | The method of coating silicon nitride film layer on piston ring surface |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101210318A CN101210318A (en) | 2008-07-02 |
| CN100588738C true CN100588738C (en) | 2010-02-10 |
Family
ID=39610570
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200710164825A Expired - Fee Related CN100588738C (en) | 2007-12-25 | 2007-12-25 | The method of coating silicon nitride film layer on piston ring surface |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100588738C (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101781755B (en) * | 2010-03-09 | 2011-08-17 | 浙江理工大学 | Method for preparing aluminum-based alloy with Al-Si-O-N wearproof anticorrosive layer |
| CN102127761B (en) * | 2010-12-25 | 2012-08-08 | 福建东亚机械有限公司 | Silane treatment process on surface of piston ring of internal combustion engine |
| CN103696943B (en) * | 2013-12-17 | 2016-03-02 | 成都展望能源机械有限公司 | Combined type compressor silicon nitride film layer piston ring |
| CN112088051A (en) * | 2018-05-22 | 2020-12-15 | 康明斯公司 | Plasma electrolyte polished diesel engine parts |
-
2007
- 2007-12-25 CN CN200710164825A patent/CN100588738C/en not_active Expired - Fee Related
Non-Patent Citations (2)
| Title |
|---|
| 等离子增强型化学气相沉积条件对氮化硅薄膜性能的影响. 李新贝，张方辉，牟强.材料保护，第39卷第7期. 2006 |
| 等离子增强型化学气相沉积条件对氮化硅薄膜性能的影响. 李新贝，张方辉，牟强.材料保护，第39卷第7期. 2006 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101210318A (en) | 2008-07-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11215283B2 (en) | Diamond-like coating for piston ring surfaces, piston ring and processes for preparing the same | |
| CN100588738C (en) | The method of coating silicon nitride film layer on piston ring surface | |
| CN102994967B (en) | Ultra high speed preparation method for ultra thick diamond-like coating | |
| CN104480478B (en) | A kind of nitriding PVD composite coatings and preparation method thereof | |
| WO2019119646A1 (en) | Method for improving binding force and tribological property of fullerene-like thin film | |
| CN102383092A (en) | Coating, coated part with same and preparation of coated part | |
| CN108977766B (en) | Multilayer composite diamond-like carbon film material and preparation method thereof | |
| CN101871086A (en) | Preparation method for catalytic plasma nitrocarburized and diamond-like carbon composite film | |
| CN105132876A (en) | Surface compound treatment method for steel gear | |
| CN103695843A (en) | Preparation technology of diamond-like film coated spheroidal graphite cast iron piston ring | |
| CN106083203B (en) | Surface nitriding method of ternary layered ceramic | |
| CN103628036B (en) | The preparation method of cubic boron nitride coated cutting tool | |
| CN105220120A (en) | The method of a kind of MULTILAYER COMPOSITE fullerene film industrialization in motor car engine | |
| CN109306445A (en) | The preparation method of titanium or titanium alloy surface Ti-Al-C system MAX phase coating | |
| CN102978569A (en) | Method for preparing alloy thin plate with Fe, 5.5-6.5% by weight of Si and 0.3-1.0% by weight of Al by adopting continuous multi-arc ion plating physical vapor deposition | |
| CN110616401B (en) | Preparation method of wear-resistant hydraulic pump part | |
| CN116288141A (en) | Complex-surface gradient ceramic layer similar to valve disc and preparation method thereof | |
| JP2009185336A (en) | Amorphous carbon film and method for forming the same | |
| CN111500998A (en) | AlTiN/TiAlSiN gradient nano composite structure coating and integrated preparation method and application thereof | |
| CN105088129A (en) | Preparation method for micro-nano textured titanium nitride solid lubricant film | |
| CN102383093A (en) | Coating, covered element having coating and preparation method of covered element | |
| JP4612147B2 (en) | Amorphous hard carbon film and method for producing the same | |
| CN113564558B (en) | Chemical vapor deposition and annealing continuous processing device, method and application | |
| CN204591516U (en) | A kind of PVD piston ring | |
| CN111962036B (en) | Nano multilayer coating, preparation method thereof and cutter with nano multilayer coating coated on surface |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100210 Termination date: 20121225 |