CN100587330C - High power lighting source lamp chamber with cooling system - Google Patents
High power lighting source lamp chamber with cooling system Download PDFInfo
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- CN100587330C CN100587330C CN200710173723A CN200710173723A CN100587330C CN 100587330 C CN100587330 C CN 100587330C CN 200710173723 A CN200710173723 A CN 200710173723A CN 200710173723 A CN200710173723 A CN 200710173723A CN 100587330 C CN100587330 C CN 100587330C
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Abstract
A high-power light source house with cooling system comprises a light house outer wall, a mercury lamp to be cooled, an ellipsoidal reflector with a mercury lamp-mount hole at the bottom, and a metalshell with an open at the bottom and a cooling water pipe coiled on the outer surface. The metal shell has the same structure as the ellipsoidal reflector. The ellipsoidal reflector is installed inside the metal shell, with an air duct left therebetween. The opening at the bottom of the metal shell serves as the air inlet. The heat produced inside the light house is dissipated by the air flow of the air inlet and the water flow inside the cooling water pipe, thereby realizing the cooling effect. Based on the combination of air-cooling and water-cooling modes, the invention greatly improves theheat-dissipation performance of the high-power light source house and ensures each part inside the light house to be uniformly cooled.
Description
Technical field
The invention belongs to power light source cooling field, relate in particular to a kind of high power lighting source lamp chamber with cooling system.
Background technology
In semiconductor fabrication, usually need to use to reach kilowatt or more high-power mercury lamp light source, more high-power light source means bigger exposure productive rate, helps improving the manufacturing efficient of semiconductor devices.Integrated circuit for example, liquid crystal display device etc.In order to guarantee the normal working temperature of light source, need cool off lamp house.
In existing high power lamp chamber cooling system, the mode that great majority adopt air-cooled and passive heat radiation to combine, or adopt the liquid cooling mode.So-called air-cooled or liquid cooling is meant and utilizes flow air or liquid to take away heat.So-called passive heat radiation is meant and utilizes fin being dispersed in the middle of the air the heat nature.Lamp house for general power, the mode energy efficiently radiates heat that adopts air-cooled and passive heat radiation to combine, as patent CN183905, US5626416, JP062156 etc. all utilize simple blower fan produce air-flow more in addition simple air channel be provided with and constitute the forced convertion refrigerating function, their heat dissipation is all little, can only be used for the lamp house of general several hectowatts.
In more high-power lamp house, popular cooling technology is that liquid cooling and nozzle are air-cooled.As patent CN1613136, be characterized in having sealed transparent sleeve pipe around bulb, be full of the cooling fluid that circulates, belong to the liquid cooling mode.This patent can be used for 400 watts to 7000 watts high-voltage gas discharging light bubble, good cooling results and cooling are more even, but its shortcoming also clearly: the manufacture difficulty height, mobile cooling fluid may and produce de-stabilising effect to light intensity decreasing, is unfavorable for that exposure dose is accurate.The air-cooled patent CN1788329 of nozzle, US6031320 has air nozzle, and local cooling effect is good, but very low for the cooling effect of whole lamp house.
Summary of the invention
For solving above common defective, improve the heat dispersion of high power lighting source lamp chamber, the invention provides a kind of high power lighting source lamp chamber with cooling system, comprise the lamp house outer wall, the mercury lamp that is cooled; One ellipsoidal reflector, bottom are provided with opening can lay mercury lamp; One bottom opening outer surface is around the metal shell that cooling water pipe is arranged; Ellipsoidal reflector is identical with the metal shell shape, and correspondence is installed in the metal shell, leaves the space between the two and forms the air channel, and bottom opening coincide and forms air inlet; Mercury lamp and ellipsoidal reflector are fixed in the lamp house by base and fixed support; Also be provided with a water supply and a cold mirror refrigerating module that a water-cooling circulating system is used for cooling water pipe in addition.
Bottom opening place between ellipsoidal reflector, the metal shell is provided with the air-cooled branching block by tommy turn control position, can regulate enter ellipsoidal reflector inside with and and metal shell between the air quantity size in gap.
The cold mirror refrigerating module is located at the mercury lamp top, comprises cold mirror, fin and cooling water pipe, have identical angle of inclination with the lamp house outer wall and form the air channel, the top is provided with air outlet, and cooling water pipe is distributed between the heat radiation wing of fin, and is arranged to Qu Huizhuan at top outlet inlet.Fin bottom combines with the cold mirror back, between scribble silica gel, the wing that dispels the heat is provided with along the air channel airflow direction.Cold mirror also has a vernier knob, is used for accurately adjusting optical axis.
Outside the air inlet of lamp house and air outlet, be equipped with blower fan, be used to form cooling airflow.
The present invention combines passive heat radiation and air-cooled, and the mode of water-cooled has improved the heat dispersion of high power lighting source lamp chamber greatly, and each position in the lamp house is evenly cooled off.
Description of drawings
Fig. 1 is the overall structure figure of the high power lighting source lamp chamber of band cooling system;
Fig. 2 is the partial schematic diagram of lamp house mercury lamp electrode cooling;
Fig. 3 is the structural representation of cold mirror refrigerating module;
The specific embodiment
Introduce the structure of a specific embodiment of the present invention earlier in conjunction with Figure of description:
As Fig. 1, opening 1 is arranged at lamp house bottom, and base 2 has circular hole 3 over against opening part, is used to lay mercury lamp 4 and as air inlet, air inlet is provided with blower fan 23 outward.Base 2 is used for fixing with ellipsoidal reflector 5 identical shaped metal shell 6, and the gap forms air channel 7,8 between metal shell 6 and the ellipsoidal reflector 5.XYZ position control 9 is fixed in base 2 times, and is connected with an electrode 10 of mercury lamp 4.Utilize XYZ position control 9 can finely tune the position of mercury lamp 4 in ellipsoidal reflector 5.Support 11 is used for fixing ellipsoidal reflector 5.Cold mirror 12 has a vernier knob 13, is used for accurately adjusting optical axis.The lamp house outer wall 14 corresponding with the cold mirror module has identical angle of inclination, between form an air channel 15.Air outlet 16 is positioned at cold mirror 12 tops, and the end in air channel 15, cooling water pipe herein are bent back-shaped setting.The outside is provided with blower fan 29.
As Fig. 2, the air-cooled branching block 30 of ellipsoidal reflector bottom, its shape is that two ends have sharp shape up and down round the annulus of electrode 10, helps reducing the resistance to air-flow in minute air-flow, material can be with good conductive metal or adiabatic rubber.Tommy 31 is connected with branching block, drives branching block 30 by turn tommy 31 and moves up and down.By moving up and down of branching block can change throughput in the air channel 7,8 and 24,25 allocation proportion.
As Fig. 3, cold mirror 12 backs combine with the bottom of an aluminum thermal fin 20, because two surfaces can not fully contact, must be coated with between them with one deck silica gel 21, and cold mirror 12 and fin 20 heat transfer areas are increased greatly, improve radiating effect.The heat radiation wing 22 of fin 20 is consistent with the airflow direction in air channel 15, and cooling water pipe 18 is distributed between the heat radiation wing.
Elaborate the cooling principle of lamp house of the present invention below:
As Fig. 1, label 17 structure of confining is the ellipsoidal reflector cooling segment, and pressure fan 23 is sent into air-flow from air inlet 1, enters lamp house by base perforate 2.Air-flow was opened by the air channel in 7,8,24,25 minutes.Air channel 7, air-flow in 8 is taken away the heat and aluminium shell 6 inner surfaces of ellipsoidal reflector 5 and is accepted the heat (5 of ellipsoidal reflectors reflect specific ultraviolet bands and see through its all band, and aluminium shell 6 has been accepted the wave band heat that ellipsoidal reflector sees through) that ellipsoidal reflector 5 sees through wave band.
Simultaneously, aluminium shell 6 outer surfaces are around a few water-cooled water pipes 18, peripheral water-cooling circulating system 26 flows into cold water stream from water inlet 27, cold water stream flows back to water-cooling circulating system 26 from delivery port 28 at last in aluminium shell 6 outer surface flow process aluminium shell 6 outer surface heats being taken away.
Air channel 7,8 has the surface of comparison slyness, and the shape smoothness, so air channel 7,8 are streamlined structure, can reduce the resistance to cooling blast, and cooling blast is in the air channel 7,8 mainly show as the laminar flow heat release, and cooling blast is taken away the speed of heat and is not obstructed, and strengthen cooling effect.
Air-flow in the air channel 24,25 cools off 4 liang of electrodes of mercury lamp.Can with mobile branching block the throughput ratio of air channel 7,8 and 24,25 be changed by turn tommy 31.When needs are strengthened mercury lamp two electrodes 10 and 32 coolings, can move down branching block and make it block air channel 7 and 8 fully, allow cold airflow all by air channel 24,25, mercury lamp electrode cooling effect is strengthened.When needs were strengthened cooling to aluminium shell 6, the branching block that can move up made air channel 7,8 obtain bigger cooling gas flow.
The air-flow in air channel 7 enters air channel 15, and cold mirror fin 20 is dispelled the heat.Traditional fin can not make the fin bottom fully contact with the cold mirror back with the cold mirror combination, and the centre is full of the air of thermal conductance difference, and the heat transmission area does not make full use of, and radiating effect is limited.So be coated with the silicone grease 21 of the good thermal conductance of one deck earlier at the cold mirror back, combine with fin 20 bottoms again, silicone grease can mix good conductive metal such as aluminium or copper, and such silicone grease heat transfer coefficient generally can reach 2.4W/m*K, and air has only about 0.08W/m*K.Like this, cold mirror strengthens greatly to the efficient that fin transmits heat, and cooling effect is strengthened.So design is necessary, because need under most of duty the mercury lamp electrode is strengthened cooling, air channel 24,25 are blocked by branching block, thereby air channel 15 do not have cold airflow, if be not coated with silicone grease between fin and the cold mirror, and be the air of free convection, exothermal effect can't satisfy the demands.
That more than introduces only is based on a preferred embodiment of the present invention, can not limit scope of the present invention with this.Any mechanism of the present invention is done replacement, the combination, discrete of parts well know in the art, and the invention process step is done well know in the art being equal to change or replace and all do not exceed exposure of the present invention and protection domain.
Claims (9)
1, a kind of high power lighting source lamp chamber with cooling system comprises the lamp house outer wall; One mercury lamp that is cooled; One bottom opening is used to lay the ellipsoidal reflector of mercury lamp; One bottom opening outer surface is around the metal shell of cooling water pipe; It is characterized in that: described metal shell shape is identical with ellipsoidal reflector, described ellipsoidal reflector is installed in the metal shell, leave the space between the two and form the air channel, the bottom coincide and forms air inlet, bottom opening place between described ellipsoidal reflector, the metal shell is provided with air-cooled branching block, and described air-cooled branching block is used to regulate the air quantity that enters described ellipsoidal reflector inside and described ellipsoidal reflector and air channel, described metal shell gap.
2, the high power lighting source lamp chamber of band cooling system as claimed in claim 1 is characterized in that described branching block is by tommy turn control position.
3, the high power lighting source lamp chamber of band cooling system as claimed in claim 1 is characterized in that being provided with the water supply that a water-cooling circulating system is used for cooling water pipe.
4, the high power lighting source lamp chamber of band cooling system as claimed in claim 1 is characterized in that comprising that base and fixed support are used for the fixing of mercury lamp and ellipsoidal reflector.
5, the high power lighting source lamp chamber of band cooling system as claimed in claim 1, it is characterized in that above mercury lamp, also being provided with a cold mirror refrigerating module, comprise cold mirror, fin and cooling water pipe, form the air channel with the lamp house outer wall with same tilt angle, the top is provided with air outlet.
6, the high power lighting source lamp chamber of band cooling system as claimed in claim 5 is characterized in that cooling water pipe is distributed between the heat radiation wing of fin, and is Qu Huizhuan at the air outlet place.
7, the high power lighting source lamp chamber of band cooling system as claimed in claim 5 is characterized in that fin bottom combines with the cold mirror back, between scribble silica gel, the wing that dispels the heat is along the air channel airflow direction.
8, the high power lighting source lamp chamber of band cooling system as claimed in claim 5 is characterized in that described cold mirror has a vernier knob, is used for accurately adjusting optical axis.
9,, it is characterized in that air inlet and air outlet are provided with blower fan outward as the high power lighting source lamp chamber of claim 1 or 5 described band cooling systems.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710173723A CN100587330C (en) | 2007-12-28 | 2007-12-28 | High power lighting source lamp chamber with cooling system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710173723A CN100587330C (en) | 2007-12-28 | 2007-12-28 | High power lighting source lamp chamber with cooling system |
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| Publication Number | Publication Date |
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| CN101216162A CN101216162A (en) | 2008-07-09 |
| CN100587330C true CN100587330C (en) | 2010-02-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN200710173723A Active CN100587330C (en) | 2007-12-28 | 2007-12-28 | High power lighting source lamp chamber with cooling system |
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Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101576436B (en) * | 2008-11-05 | 2010-12-08 | 上海微电子装备有限公司 | Optical character testing device for mercury lamp case and testing method thereof |
| CN101988660B (en) | 2009-08-07 | 2014-03-26 | 扬光绿能股份有限公司 | Lamp source module and projection system thereof |
| CN102129952B (en) * | 2010-01-12 | 2013-07-17 | 上海微电子装备有限公司 | Cooling device of high-pressure gas discharge lamp and condenser |
| CN102809139A (en) * | 2011-05-31 | 2012-12-05 | 上海微电子装备有限公司 | Mercury lamp room with cooling system |
| CN105226487A (en) * | 2015-10-26 | 2016-01-06 | 惠州市杰普特电子技术有限公司 | Laser scanning device |
| CN106200228B (en) * | 2016-08-31 | 2017-11-03 | 常州玉宇电光器件有限公司 | The heat abstractor of high pressure mercury lamp of projector |
| CN107351533B (en) * | 2017-08-17 | 2023-03-14 | 厦门富莱仕影视器材有限公司 | Special air-cooled low-temperature UV light source for printing machine |
| CN111578231A (en) * | 2020-04-03 | 2020-08-25 | 浙江零跑科技有限公司 | Active uniform heat dissipation equipment and method for LED far and near light module |
| CN116699791A (en) * | 2023-08-01 | 2023-09-05 | 长春长光智欧科技有限公司 | Actively-cooled ellipsoidal reflector and manufacturing method thereof |
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- 2007-12-28 CN CN200710173723A patent/CN100587330C/en active Active
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| Publication number | Publication date |
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| CN101216162A (en) | 2008-07-09 |
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Address after: No. 1525 Zhangjiang Road, Zhangjiang, Shanghai, Shanghai Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: No. 1525 Zhangjiang Road, Zhangjiang, Shanghai, Shanghai Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |