CN100573843C - Crystal-boat box with intake valve - Google Patents
Crystal-boat box with intake valve Download PDFInfo
- Publication number
- CN100573843C CN100573843C CNB2007101807573A CN200710180757A CN100573843C CN 100573843 C CN100573843 C CN 100573843C CN B2007101807573 A CNB2007101807573 A CN B2007101807573A CN 200710180757 A CN200710180757 A CN 200710180757A CN 100573843 C CN100573843 C CN 100573843C
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- shell
- box
- crystal
- box body
- elastic parts
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Abstract
The present invention is a kind of crystal-boat box with intake valve, comprises a box body, reaches an intake valve.Intake valve is arranged on the shell of box body, and it includes a guide pillar, a seal cover, a seal washer, reaches an elastic parts.Intake valve provides an elasticity pre-power by elastic parts, to promote guide pillar the seal cover correspondence is covered on the through hole of shell, and it is airtight to form that seal washer is pressed between seal cover and the shell.So in desire is opened a box during crystal-boat box of vacuum, as long as with the anti-post of deriving of an external force, make and produce the gap between seal cover and the shell, be so incensed that outside this moment to enter the inner space of box body through through hole with water conservancy diversion via this gap, so can make the inside and outside air pressure of box body reach balance, open easily in order to lid.
Description
Technical field
The present invention relates to a kind of crystal-boat box, refer to a kind of a kind of crystal-boat box that is applicable to especially,, lid is opened easily so that outer conductance is gone in the crystal-boat box to eliminate vacuum in the box and reach air pressure balance with intake valve.
Background technology
Whether the tradition crystal-boat box has the existence of the particle that is enough to pollute the wafer cleaning in more attention boxes in transporting wafer process except the effect that possesses the protection wafer.Therefore, when crystal-boat box was mounted with wafer, regular meeting vacuumized the gas in this crystal-boat box, except that can make fine particle in the box reduce to minimum, the humidity that can intercept outside air again is for the influence that places wafer in the crystal-boat box.
But, when operating personnel desire when crystal-boat box is taken chip, must be earlier with the tamper tool lid opening crystal-boat box, except the lid that will overcome crystal-boat box itself and inlay resultant force that the box body combines, the pull of vacuum that the negative pressure that more will overcome the interior vacuum of crystal-boat box is produced lid and box body.The pull of vacuum that negative pressure produced of the interior vacuum of common crystal-boat box may be that the several times of lid and box body inlay resultant force are big.
So, vacuum causes operating personnel to open the not convenient of crystal-boat box in the box, even, pry open firmly excessive during unlatching, cause crystal-boat box to overturn and cause the mutilator of wafer that it is also arranged, be easier to open in order to make crystal-boat box, the utmost point need improve the problem that vacuum is derived relatively in the crystal-boat box.
Summary of the invention
The objective of the invention is to disclose a kind of crystal-boat box, when opening, INO goes into outer conductance to eliminate vacuum in the box in the crystal-boat box and reach air pressure balance, lid is opened easily, and eliminated the hidden danger of crystal-boat box and wafer damage with intake valve.
For achieving the above object, technical solution of the present invention is a kind of crystal-boat box with intake valve, comprises a box body, an intake valve.Box body includes a shell, reaches an inner space, is equipped with a through hole on the shell, and through hole is to be communicated to the inner space.In addition, box body upper and lower is divided into a lid, an and box body, and lid is that correspondence is covered on this box and is formed with the inner space on one's body and in the two.Intake valve includes a guide pillar or a column spinner, a seal cover, a seal washer, reaches an elastic parts.
One end of guide pillar or column spinner is provided with seal cover, and seal cover is greater than the through hole of box body, and seal washer be located in seal cover, and the box body through hole around shell between.
Elastic parts provides the pre-power of an elasticity or rotates pre-power, and the pre-power of this elasticity is to move or make the column spinner rotation in order to promote guide pillar, is covered on the through hole to impel the seal cover correspondence, and is pressed between seal cover and the shell seal washer airtight to form.
Therefore, with one greater than the pre-power of elasticity or the external force of rotating pre-power removes to promote guide pillar or column spinner moves to impel seal cover to leave through hole, to produce gap between seal cover and the shell this moment, and then with outer gas via this gap with water conservancy diversion through through hole and enter the inner space, so can make negative pressure of vacuum and external pressure in the box body reach balance, open easily in order to lid.
Wherein, shell comprises an inner surface, an outer surface, and is provided with a plurality of stop blocks, an and inward flange.Elastic parts then can be supported between guide pillar and the inward flange, the elasticity that elastic parts provided is made every effort to promote in advance makes guide pillar also be made its driving fit on the inner surface of shell the seal cover packing seal washer of intake valve by block in a plurality of stop blocks, while; Or elastic parts is supported between a plurality of stop blocks and the seal cover, impel the seal cover packing seal washer of intake valve and driving fit on the outer surface of shell; Can also be supported between the groove and column spinner of shell by elastic parts, the rotation that elastic parts provided make every effort to promote seal cover packing one seal washer that makes intake valve in advance and driving fit on this through hole of shell, to reach airtight effect.
Effect of the present invention is: when opening, INO goes into outer conductance to eliminate vacuum in the box in the crystal-boat box and reach air pressure balance, lid is opened easily, and eliminated the hidden danger of crystal-boat box and wafer damage.
Description of drawings
Fig. 1 is the exploded view of the present invention's first preferred embodiment;
Fig. 2 is the cutaway view of the present invention's first preferred embodiment;
Fig. 3 is the cutaway view of the present invention's second preferred embodiment;
Fig. 4 is the action schematic diagram of the present invention's the 3rd preferred embodiment.
The primary clustering symbol description
Box body 1 lid 101 box bodies 102
Stop block 113 inward flanges 114 outer surfaces 115
Stop block 116 inward flanges 117 PURs 118
Refer to draw ring 311 column spinners 41 rotation keys 412
The pre-power F1 of pivot 42 elastic partss, 5 elasticity
External force F2 rotates pre-power F3
Embodiment
See also Fig. 1, it is the exploded view of the present invention's first preferred embodiment.As shown in the figure, the present invention is the crystal-boat box that has intake valve for a kind of, and it mainly includes a box body 1, reaches an intake valve 2.
As shown in Figure 1, the box body 1 of present embodiment includes a shell 11 and interior inner space 12 thereof.Wherein, the box body 1 of present embodiment is separated into lid 101, and box body 102, lid 101 be can open or corresponding box body 102 tops that are covered on around forming airtight inner space 12.For ease of signal and explanation, this routine shell 11 is that the last open type crystal-boat box of using with 6 o'clock or 8 o'clock wafers is an example, and with its shell 11 that is positioned at place, lid 101 tops is that example is illustrated, but not as limit, even all can in the bottom surface, side of whole box body 1 shown in Figure 1 such as; Even be that top, the side of the front open type crystal-boat box used of ten two o'clock wafers or the shell of bottom surface also can.
Among please detailed again ginseng Fig. 1, be equipped with a through hole 111 on the shell 11 of lid 101.This through hole 111 is to be communicated to inner space 12.Intake valve 2 includes a guide pillar 21, a seal cover 23, a seal washer 24, reaches an elastic parts 22.The upper end of guide pillar 21 is provided with a finger pressure groove 211, in order to the operator during with finger presses guide pillar 21, can be conveniently the fixing application of force, the lower end of guide pillar 21 is provided with seal cover 23, seal cover 23 medial surfaces are provided with a holddown groove 231, and 24 of seal washers can be fixedly arranged in the holddown groove 231.In addition, seal cover 23 should be greater than the through hole 111 of box body 1, so that can clog through hole 111.
See also Fig. 2, it is the cutaway view of the present invention's first preferred embodiment.As shown in Figure 2, shell 11 comprises an inner surface 112, two stop blocks 113, reaches an inward flange 114.Elastic parts 22 then is supported between guide pillar 21 and the inward flange 114, this elastic parts 22 provides the pre-power F1 of an elasticity upwards, impel guide pillar 21 to move up and by block on two stop blocks 113 and the seal cover 23 that drives intake valve 2 upwards be packed in shell 11, in this example, elastic parts 22 is to be a compression spring.
As Fig. 2 and since seal washer 24 be located in seal cover 23, with through hole 111 inner surface 112 on every side between.Therefore, after the pre-power F1 of this elasticity promotes guide pillar 21 and moves up, seal cover 23 correspondences upwards are covered on the through hole 111, and seal washer 24 are pressed on the inner surface 112 of seal cover 23 and shell 11 airtightly, and reach best airtight effect to form.
Otherwise, if the operator imposes finger pressure groove 211 1 on the guide pillar 21 and goes to promote that guide pillar 21 moves down so that seal cover 23 leaves through hole 111 greater than the pressure F2 of the pre-power F1 of elasticity, to produce gap between seal cover 23 and the shell 11 this moment, and then with outer gas via this gap with water conservancy diversion through through hole 111 and enter inner space 12, event can make the negative pressure of vacuum in the box body 1 reach balance with outside air pressure, in order to lid 101 and easily from 102 unlatchings of box body.
See also Fig. 3, it is the cutaway view of the present invention's second preferred embodiment.As shown in Figure 3, shell 11 comprises an outer surface 115, two stop blocks 116, reaches an inward flange 117.Elastic parts 22 is supported between the seal cover 32 of two stop blocks 116 and guide pillar 31 its lower ends, by the elastic parts 22 downward pre-power F1 of elasticity that provides, impels the seal cover 32 of intake valve 3 to be packed in inward flange 117.In this example, elastic parts 22 is to be a compression spring.
Since seal washer 24 be located in seal cover 32, with through hole 111 outer surface 115 on every side between.In this example, seal cover 32 should be greater than the through hole 111 of box body 1, so that can clog through hole 111.Therefore, after the pre-power F1 of this elasticity promotes guide pillar 31 and moves down, seal cover 32 correspondences are covered on the through hole 111 downwards, and seal washer 24 are pressed on the outer surface 115 of seal cover 32 and shell 11 airtightly, and reach best airtight effect to form.
As Fig. 3, the upper end of guide pillar 31 is provided with one and refers to draw ring 311, forces on the guide pillar 31 to make things convenient for the user.In this example, two stop blocks 116 are with two stop blocks, 116 molten being located on the outer surface 115 of shell 11 with PUR 118.Therefore, when imposing, the operator refers to the tensile force f 2 of draw ring 311 1 greater than the pre-power F1 of elasticity, move up so that seal cover 32 leaves through hole 111 with pulling guide pillar 31, to produce gap between seal cover 32 and the shell 11 this moment, and then with outer gas via this gap with water conservancy diversion through through hole 111 and enter inner space 12, so can make the negative pressure of vacuum in the box body 1 reach balance, open easily in order to lid 101 with outside air pressure.
See also Fig. 4, it is the action schematic diagram of the present invention's the 3rd preferred embodiment.As shown in Figure 4, intake valve 4 includes a column spinner 41, a seal washer 24, reaches an elastic parts 5, and in this example, elastic parts 5 is meant a torque spring.Shell 11 includes a groove 119, and 41 of column spinners are located in this groove 119.Groove 119 is provided with a pivot 42, and an end of this column spinner 41 is hubbed on the pivot 42, and the other end of column spinner 41 then is provided with seal cover 411.Seal cover 411 is greater than the through hole 111 of box body 1, so that can clog through hole 111.Again, seal washer 24 be located in seal cover 411, and its through hole 111 of box body 1 around shell 11 between.
Because elastic parts 5 is supported between groove 119 and the column spinner 41, impel the seal cover 411 packing seal washers 24 of intake valve 4 and driving fit on the through hole 111 of shell 11.Elastic parts 5 also provides a rotation pre-power F3, rotates to promote column spinner 41, and then impels seal cover 411 correspondences to be covered on the through hole 111.Therefore, seal washer 24 can be pressed between seal cover 411 and the shell 11 airtight to form.
Otherwise, the operator is to remove to promote the rotation key 412 on the column spinner 41 greater than the external force of the pre-power F3 of rotation, can impel seal cover 411 to leave through hole 111, to produce gap between seal cover 411 and the shell 11 this moment, and then with outer gas via this gap with water conservancy diversion through through hole 111 and enter inner space 12, so can make box body 1 inside and outside air pressure reach balance, open easily in order to lid.
The foregoing description only is to give an example for convenience of description, and the interest field that the present invention advocated should be as the criterion so that the protection range of claims is described certainly, but not only limits to the foregoing description.
Claims (9)
1, a kind of crystal-boat box with intake valve is characterized in that, comprising:
One box body includes a shell, reaches an inner space, is equipped with a through hole on this shell, and this through hole is communicated to this inner space; And
One intake valve, include a guide pillar, a seal cover, at least one seal washer, reach an elastic parts, one end of this guide pillar is provided with sealing lid, and the sealing lid is greater than this through hole of this box body, this at least one seal washer be located in the sealing lid, and the shell of this box body between;
Wherein, this elastic parts also provides an elasticity pre-power, and this elasticity is tried hard to recommend moving this guide pillar in advance and moved to impel sealing lid correspondence to be covered on this through hole, and this at least one seal washer also is pressed between sealing lid and this shell airtight to form.
2, crystal-boat box as claimed in claim 1, it is characterized in that, this shell comprises an inner surface, this shell comprises a plurality of stop blocks, reaches an inward flange, this elastic parts is supported between this guide pillar and this inward flange, the pre-power of this elasticity that this elastic parts provided more impel this guide pillar by block in these a plurality of stop blocks and make sealing lid this at least one seal washer of packing and driving fit on this inner surface of this shell.
3, crystal-boat box as claimed in claim 1, it is characterized in that, this shell comprises an outer surface, this shell comprises a plurality of stop blocks, reaches an inward flange, this elastic parts is supported between these a plurality of stop blocks and the sealing lid, this elasticity that this elastic parts provided make every effort to promote in advance make sealing lid this at least one seal washer of packing and driving fit on this outer surface of this shell.
4, crystal-boat box as claimed in claim 1 is characterized in that, this box body comprises a lid, an and box body, and this lid correspondence is covered on this box on one's body and in this inner space of the two formation.
5, crystal-boat box as claimed in claim 1 is characterized in that, this elastic parts is a compression spring.
6, a kind of crystal-boat box with intake valve is characterized in that, comprising:
One box body comprises a shell, reaches an inner space, is equipped with a through hole on this shell, and this through hole is communicated to this inner space; And
One intake valve, include a column spinner, a seal cover, at least one seal washer, reach an elastic parts, one end of this column spinner is provided with the sealing lid, the other end is hubbed on this shell, sealing lid is greater than this through hole of this box body, this at least one seal washer be located in the sealing lid, and the shell of this box body between;
Wherein, this elastic parts provides a rotation pre-power, and this rotation is tried hard to recommend moving this column spinner in advance and rotated to impel sealing lid correspondence to be covered on this through hole, and this at least one seal washer also is pressed between sealing lid and this shell airtight to form.
7, crystal-boat box as claimed in claim 6 is characterized in that, this shell includes a groove, is provided with a pivot in this groove, and this other end of this column spinner is hubbed on this pivot, and this elastic parts is supported between this groove and this column spinner.
8, crystal-boat box as claimed in claim 6 is characterized in that, this box body includes a lid, reaches a box body, and this lid correspondence is covered on this box and is formed with this inner space on one's body and in the two.
9, crystal-boat box as claimed in claim 6 is characterized in that, this elastic parts is a torque spring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007101807573A CN100573843C (en) | 2007-10-11 | 2007-10-11 | Crystal-boat box with intake valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007101807573A CN100573843C (en) | 2007-10-11 | 2007-10-11 | Crystal-boat box with intake valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101409246A CN101409246A (en) | 2009-04-15 |
| CN100573843C true CN100573843C (en) | 2009-12-23 |
Family
ID=40572170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007101807573A Expired - Fee Related CN100573843C (en) | 2007-10-11 | 2007-10-11 | Crystal-boat box with intake valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100573843C (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018019016A (en) * | 2016-07-29 | 2018-02-01 | 株式会社Ｓｃｒｅｅｎホールディングス | Substrate processing apparatus |
| CN208233726U (en) * | 2018-05-14 | 2018-12-14 | 吴长馨 | A kind of novel telescopic hermetically sealed can |
| CN110203541A (en) * | 2019-05-31 | 2019-09-06 | 灵璧县童师傅食品有限公司 | A kind of dairy products packing jar that sealing effect is good |
-
2007
- 2007-10-11 CN CNB2007101807573A patent/CN100573843C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN101409246A (en) | 2009-04-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20091223 Termination date: 20121011 |