CN100573329C - Coating machine nozzle cleaning module and device thereof - Google Patents
Coating machine nozzle cleaning module and device thereof Download PDFInfo
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- CN100573329C CN100573329C CNB200710122760XA CN200710122760A CN100573329C CN 100573329 C CN100573329 C CN 100573329C CN B200710122760X A CNB200710122760X A CN B200710122760XA CN 200710122760 A CN200710122760 A CN 200710122760A CN 100573329 C CN100573329 C CN 100573329C
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- cleaning
- coating machine
- machine nozzle
- nozzle
- face
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Abstract
The invention discloses a kind of coating machine nozzle cleaning module and device thereof, be used with coating machine nozzle, comprise cleaning section and feed part, cleaning section has a portion, and seat portion is provided with the cleaning face; Feed part has propulsion plant, for presenting cleaning material to the cleaning face, wherein work as coating machine nozzle by the cleaning face, the tip of coating machine nozzle contacts cleaning material and offsets with seat portion, this cleaning material is along pressing from both sides an angle by this cleaning face with level, and this angle is between 1 degree is spent to 7.
Description
Technical field
The present invention relates to a kind of coating machine cleaning module, particularly relate to the coating machine nozzle cleaning device in a kind of optical technology flow process (photoprocess), clean coater nozzle in technological process.
Background technology
Display is made the problem of photoresist coating machine platform (slit coater) ubiquity gel (gel) in the flow process, does coating under the uncleanly situation and can form defective (defect) when nozzle (nozzle) tip is in, and have a strong impact on the finished product rate.Generally before the photoresist coating of carrying out every flake products, the cleaning material of rubber (rubber) can be used, yet, therefore photoetching rubber coating stage nozzle tip can't be effectively cleaned because the precision of rubber can't fit like a glove with nozzle as nozzle tip; In addition, the water absorptivity of rubber is poor, unnecessary photoresist liquid can't be removed with the rubber cleaning nozzle, remains on the contrary at last on the nozzle, and the cleaning to nozzle when producing is to wipe dirtier and dirtier on the contrary.Multiple analogue all causes the defective of product easily.
Present solution has near one or more layers nano thin-film of the finedraw inside of nozzle or nozzle tip coating increasing the mobility of jet hole, so coating material is difficult for being deposited near the nozzle and then keeps nozzle cleaning; Also have and use cleaning wiping cloth wiping nozzle, with the cleaning of keeping nozzle etc.Fig. 1 a is depicted as an embodiment of No. 7073886 disclosed use cleaning wiping cloth cleaning nozzle of United States Patent (USP).Shown in Fig. 1 a and Fig. 1 b, sprayer cleaning mechanism 30 comprises cleaning wiping cloth supplying unit 32 and roller 31, and cleaning wiping cloth supplying unit 32 is in order to presenting cleaning wiping cloth 40 to roller 31, and 31 on roller is from bottom to top along the direction wiping nozzle 20 of parallel nozzle face 21.But this cleaning mode still has the problem of cleaning nozzle fully.
Summary of the invention
The object of the present invention is to provide a kind of coating machine nozzle cleaning module and device thereof,, and promote the making yield rate for of the generation of thorough clean coater nozzle with the minimizing problem.
Another object of the present invention is to provide a kind of coating machine nozzle cleaning module and device thereof, solve the ubiquitous gel problem of coating machine, with the raising rate that manufactures a finished product.
Another object of the present invention is to provide a kind of coating machine nozzle cleaning module and device thereof, the cleaning material that possesses high resiliency, flexibility and adsorbability is used in collocation, when cleaning material is in the middle of nozzle tip and cleaning section, can absorb because of elasticity meet the shape of the nozzle tip photoresist that nozzle tip is unnecessary automatically, can strengthen the cleaning effect of nozzle and reduce the probability of gel formation.
To achieve these goals, the invention provides a kind of coating machine nozzle cleaning module and device thereof, be used, comprise cleaning section and feed part with coating machine nozzle.Cleaning section has a portion and is provided with the cleaning face, feed part has propulsion plant, for presenting cleaning material to the cleaning face, wherein work as coating machine nozzle by the cleaning face, the tip of coating machine nozzle contacts cleaning material and offsets with seat portion, this cleaning material is along pressing from both sides an angle by this cleaning face with level, and this angle is between 1 degree is spent to 7.In preferred embodiment, propulsion plant further comprises propulsion system and rotating shaft is arranged at feed part, and propulsion system outputting power turn rotating shaft is to present cleaning material.Preferable recoverer and the steering axle of also comprising of feed part, steering axle is arranged between recoverer and the cleaning section, propulsion plant is in conjunction with being arranged at recoverer with the turn recoverer, and wherein after coating machine nozzle was the cleaning material cleaning, propulsion plant drove cleaning material and is recycled to recoverer by steering axle.
From the above mentioned, coating machine nozzle cleaning module of the present invention and device thereof, thoroughly the clean coater nozzle solves the ubiquitous gel problem of coating machine, with the raising rate that manufactures a finished product.
Describe the present invention below in conjunction with the drawings and specific embodiments, but not as a limitation of the invention.
Description of drawings
Fig. 1 a is depicted as the known nozzle cleaning device;
Fig. 1 b is depicted as the shop drawing of nozzle cleaning device shown in Fig. 1 a;
Fig. 2 a is depicted as the side view of coating machine nozzle cleaning module of the present invention;
Fig. 2 b is depicted as the shop drawing of Fig. 2 a illustrated embodiment;
Figure 3 shows that the vertical view of coating machine nozzle cleaning module of the present invention.
Wherein, Reference numeral:
20 nozzles
21 nozzle face
30 nozzle cleaning mechanisms
31 rollers
32 cleaning wiping cloth supplying units
40 cleaning wiping cloth
200 coating machine nozzles
210 nozzle face
300 coating machine nozzle cleaning modules, coating machine nozzle cleaning device
310 cleaning sections
311 portions, cleaning substructure
3111 lack hole, shrinkage pool
312 cleaning faces, clean upper surface
313 roller bearings
320 feed part, cleaning material delivery end
321 propulsion plants
3211 rotating shafts
3212 propulsion system
322 recoverers, recovery rotating shaft
3221 cylinders, propulsion plant
323 steering axles
400 cleaning materials
500 non-directional routes, on-plane surface path
Embodiment
The invention provides a kind of coating machine nozzle cleaning module and device thereof,, and promote the making yield rate for of the generation of thorough clean coater nozzle with the minimizing problem.Coating machine nozzle cleaning module of the present invention and device thereof can solve the ubiquitous gel problem of coating machine, with the raising rate that manufactures a finished product.Coating machine nozzle cleaning module of the present invention and device thereof, preferablely be used with the cleaning material that possesses high resiliency, flexibility and adsorbability, when cleaning material is in the middle of nozzle tip and cleaning section, can absorb because of elasticity meet the shape of the nozzle tip photoresist that nozzle tip is unnecessary automatically, can strengthen the cleaning effect of nozzle and reduce the probability of gel generation.
The employed cleaning material of coating machine nozzle cleaning module of the present invention, be preferably the compound fabric material of tool high adsorption, comprise the following fiber of fineness 0.55dtex, for example polyester fiber, rayon fibers, acid polyethylene fiber, polyamide fibre, mekralon, nylon fiber, cotton fiber etc.Yet in other preferred embodiment, the employed cleaning material of coating machine nozzle cleaning module of the present invention also comprises use non-dust cloth (100%polyester or 100%polypropylene) and nozzle is cleaned.Coating machine nozzle cleaning module of the present invention and device thereof, the photoresist coating machine platform of preferred application in the technological process of cleaning film transistor liquid crystal display (TFT-LCD) (TFT-LCD) technological process leading portion gold-tinted; In different embodiment, also can be applicable to as semiconductor or other similar high-accuracy technological process, or other need get rid of the technological process that gel forms.
Fig. 2 a is depicted as a preferred embodiment of coating machine nozzle cleaning module of the present invention and device thereof.Shown in Fig. 2 a, coating machine nozzle cleaning module of the present invention and install preferable and coating machine nozzle 200 and be used.Coating machine nozzle 200 has nozzle face 210, and 300 of coating machine nozzle cleaning modules comprise cleaning section 310 and feed part 320.Shown in the preferred embodiment of Fig. 2 a, cleaning section 310 has a portion 311, which is provided with cleaning face 312,320 of feed part have propulsion plant 321, for presenting cleaning material 400 to cleaning face 312, wherein work as coating machine nozzle 200 by cleaning face 312, coating machine nozzle 200 contacts cleaning materials 400 and offsets with seat portion 311.
Shown in the preferred embodiment of Fig. 2 a and Fig. 2 b, the seat portion 311 preferable cleaning substructures that form have clean upper surface and form cleaning face 312 on it, be laid on the cleaning face 312 for cleaning material 400, treat to clean when nozzle 200 is fallen.Shown in the preferred embodiment of Fig. 2 a, cleaning material 400 is along pressing from both sides an angle direction by cleaning face 312 with level, and just cleaning material 400 is along pressing from both sides an angular way wiping nozzle face 210 with level.Shown in Fig. 2 a, the folded angle of cleaning material 400 and level is preferable a little more than surface level, between 1 degree between 7 degree, and the conveying of material convenient for cleaning 400 with advance.
Shown in Fig. 2 a and Fig. 2 b, seat portion 311 preferable being formed with lack hole 3111, for offseting with coating machine nozzle 200.In this preferred embodiment, the shape in scarce hole 3111 is preferable to match with coating machine nozzle 200, and seat portion 311 is preferable made by the flexible material of tools such as rubber.But in different embodiment, seat portion 311 also can be made by plastics, other petrochemical industry material or metal.Shown in the preferred embodiment of Fig. 2 a and Fig. 2 b, lack hole 3111 and aim at coating machine nozzles 200,400 of cleaning materials are covered in and lack on the hole 3111, for butt with it behind the coating machine nozzle 200 contact cleaning materials 400, and cleaning nozzle face 210.Shown in Fig. 2 a and Fig. 2 b, seat portion 311 is preferable further to comprise the side that roller bearing 313 is arranged at a portion 311, by after the seat portion 311, oppositely passes through cleaning face 312 for cleaning material 400.But in different embodiment, cleaning material 400 also can be in cleaning nozzle face 210 backs directly by roller bearing 313, and the same side of present portion 311 reclaims.
Shown in the preferred embodiment of Fig. 2 a and Fig. 2 b, the feed part 320 preferable propulsion plants 321 that are provided with are for presenting cleaning material 400 to cleaning face 312.In this preferred embodiment, the feed part 320 preferable cleaning material delivery ends that form are for carrying cleaning material 400 to cleaning face 312 and wiping nozzle face 210.Shown in Fig. 2 a and Fig. 2 b, the propulsion plant 321 preferable rotating shafts 3211 that comprise propulsion system 3212 and be arranged at feed part 320, wherein propulsion system 3212 supply outputting power turn rotating shaft 3211 to present cleaning material 400.Therefore, shown in Fig. 2 b, propulsion system 3212 preferable drive rotating shafts 3211 clockwise rotate, and after pulling cleaning material 400 cleans to cleaning face 312 and to nozzle face 210, are collected in the rotating shaft 3211 by roller bearing 313.As Fig. 2 b and shown in Figure 3, in this preferred embodiment, propulsion system 3212 can be exportable power turn rotating shafts 3211 such as automatic control motor, semiautomatic control motor, step motor.But in different embodiment, also can use devices such as hand joystick to control presenting of cleaning material 400 with manpower turn rotating shaft 3211.Shown in the preferred embodiment of Fig. 2 b, cleaning material 400 preferable rotating shafts 3211 around feed part 320 are rolled into the roller shape, and positioned opposite to each other in two sides of coating machine platform body with seat portion 311 and coating machine nozzle 200.Shown in Fig. 2 b, cleaning material 400 height is set, the preferable coating machine nozzle 200 that is not higher than, but in different embodiment, cleaning material 400 also can be arranged at the place higher than coating machine nozzle 200, and cleaning material 400 is fed to cleaning face 312.
In as Fig. 2 b and preferred embodiment shown in Figure 3, feed part 320 also includes recoverer 322.Shown in the preferred embodiment of Fig. 2 b, recoverer 322 is arranged at the top of feed part 320.Shown in Fig. 2 a and Fig. 2 b, the recoverer 322 preferable propulsion plants 3221 that further are provided with are with turn recoverer 322, wherein clean when coating machine nozzle 200 material 400 that is cleaned, and propulsion plant 3221 turn recoverers 322, and with cleaning material 400 recovery.In this preferred embodiment, cleaning material 400 is subjected to the drive of propulsion plant 3221, rotates counterclockwise along rotating shaft 3211 from feed part 320, after being cleaned by roller bearing 313 to 312 pairs of nozzle face 210 of cleaning face, and is recycled to recoverer 322.As Fig. 2 b and shown in Figure 3, propulsion plant 3221 is preferable to be comprised as the roller devices of cylinder etc. and forms the recovery rotating shaft, but in different embodiment, propulsion plant 3221 also can be the device of exportable power such as automatic control motor, semiautomatic control motor, step motor with turn recoverer 322.Shown in the preferred embodiment of Fig. 2 a and Fig. 2 b, recoverer 322 also can be exchanged mutually with the relative position and the interaction relationship of feed part 320, just cleaning material 400 can be arranged at recoverer 322 and form the cleaning material delivery end, and be collected by 320 pairs of cleaning materials 400 of the feed part that is arranged at recoverer 322 belows.In this preferred embodiment, can drive rotating shaft 3211 by propulsion system 3212 clockwise rotates, after pulling cleaning material 400 to 312 pairs of nozzle face 210 of cleaning face are cleaned, be collected in the rotating shaft 3211 by roller bearing 313,3211 of rotating shafts this moment are with respect to recoverer 322 formed cleaning material delivery ends, and become the recovery rotating shaft.Shown in the preferred embodiment of Fig. 2 b and Fig. 3, recoverer 322 is preferable to be arranged at tossing about of cleaning section 310 and to link to each other with cleaning material 400.But in different embodiment, recoverer 322 also can be arranged at the same side of cleaning section 310 and reclaim cleaning material 400.Finish cleaning to nozzle face 210 when cleaning material 400, recoverer 322 is rolled into the roller shape with cleaning material 400, makes things convenient for substituting and upgrading of production line personnel.
As Fig. 2 b and shown in Figure 3, the feed part 320 preferable steering axles 323 that also include are arranged between recoverer 322 and the cleaning section 310, wherein clean when coating machine nozzle 200 material 400 that is cleaned, propulsion plant 3221 drives cleaning material 400 by steering axle 323, and cleaning material 400 is recycled to recoverer 322.As Fig. 2 b and shown in Figure 3, cleaning material 400 is preferable to form on-plane surface path 500 linking to each other with recoverer 322 by steering axle 323 backs.Said herein on-plane surface path 500 refers to that cleaning materials 400 link to each other with recoverer 322 by cleaning face 312 and steering axle 323 along a non-directional route, just cleans between face 312, steering axle 323 and recoverer 322 threes not have same linear relation.Shown in the preferred embodiment of Fig. 2 b and Fig. 3, when cleaning material 400 passes through cleaning section along cleaning face 312, steering axle 323 and recoverer 322 formed on-plane surface paths 500, coating machine nozzle 200 contact cleaning materials 400 offset and wiping nozzle face 210 with the scarce hole 3111 of seat portion 311, and by recoverer 322 turns with recovery cleaning material 400.As Fig. 2 b and shown in Figure 3, coating machine nozzle cleaning module of the present invention and install and preferablely before the coating of every sheet glass, cleaning material 400 is fed to cleaning face 312 with propulsion system 3212, resilient flexible and high adsorption by cleaning material 400 clean nozzle 200 tips, and after cleaning is finished, substitute cleaning material 400, so that the cleaning when making next flake products.
Certainly; the present invention also can have other various embodiments; under the situation that does not deviate from spirit of the present invention and essence thereof; those of ordinary skill in the art can make various corresponding changes and distortion according to the present invention, but these corresponding changes and distortion all should belong to the protection domain of the appended claim of the present invention.
Claims (17)
1, a kind of coating machine nozzle cleaning module for being used with a coating machine nozzle, is characterized in that, comprises:
One cleaning section, this cleaning section have a portion, and this one is provided with a cleaning face; And
One feed part, this feed part has a propulsion plant, supplies to present a cleaning material to this cleaning face,
This mask cdm has a shrinkage pool to aim at this coating machine nozzle, the shape of this shrinkage pool and this coating machine nozzle match, this cleaning material covers this shrinkage pool, contact the inside face butt of this cleaning material and this shrinkage pool for the tip of this coating machine nozzle, and this nozzle face of wiping, this cleaning material is along pressing from both sides an angle by this cleaning face with level, and this angle is between 1 degree is spent to 7.
2, coating machine nozzle cleaning module according to claim 1 is characterized in that, this propulsion plant comprises a rotating shaft and propulsion system, and these propulsion system are exported this rotating shaft of power turn to present this cleaning material.
3, coating machine nozzle cleaning module according to claim 1, it is characterized in that, this feed part comprises a recoverer and a steering axle, this propulsion plant is arranged at this recoverer with this recoverer of turn, this steering axle is arranged between this recoverer and this cleaning section, wherein after this coating machine nozzle was by this cleaning material cleaning, this propulsion plant drove this cleaning material by this steering axle, is recycled to this recoverer.
4, coating machine nozzle cleaning module according to claim 3 is characterized in that, this propulsion plant comprises a cylinder.
5, coating machine nozzle cleaning module according to claim 4 is characterized in that, this cleaning material along a non-directional route by this cleaning face and this steering axle and be connected with this cylinder.
6, coating machine nozzle cleaning module according to claim 1 is characterized in that, this cleaning section further comprises the side that a roller bearing is arranged at this one, through after this one, oppositely passes through this cleaning face for this cleaning material.
7, coating machine nozzle cleaning module according to claim 1 is characterized in that, this one comprises one and lacks the hole, for offseting with this coating machine nozzle.
8, coating machine nozzle cleaning module according to claim 7 is characterized in that, this one comprises a rubber material.
9, coating machine nozzle cleaning module according to claim 1 is characterized in that, this cleaning material is a fabric.
10, coating machine nozzle cleaning module according to claim 9 is characterized in that, this cleaning material comprises a non-dust cloth.
11, a kind of coating machine nozzle cleaning device, for cleaning one coating machine nozzle, this coating machine nozzle has a nozzle face, it is characterized in that, and this coating machine nozzle cleaning device comprises:
One cleaning substructure has a clean upper surface;
One cleaning material delivery end, for carrying a cleaning material by this clean upper surface and this nozzle face of wiping, this mask cdm has a shrinkage pool to aim at this coating machine nozzle, the shape of this shrinkage pool and this coating machine nozzle match, this cleaning material covers this shrinkage pool, and the tip of this coating machine nozzle of confession contacts the inside face butt of this cleaning material and this shrinkage pool, and this nozzle face of wiping, this cleaning material is along pressing from both sides an angle by this cleaning face with level, and this angle is between 1 degree is spent to 7; And
One reclaims rotating shaft, is arranged at tossing about and linking to each other with this cleaning material of this cleaning substructure, wherein passes through this clean upper surface and this nozzle face of wiping when this cleaning material, and this recovery rotating shaft turn is to reclaim this cleaning material.
12, coating machine nozzle cleaning device according to claim 11 is characterized in that, also comprises a steering axle and is arranged between this recovery rotating shaft and this cleaning substructure, and this cleaning material links to each other with this recovery rotating shaft by this steering axle and forms an on-plane surface path.
13, coating machine nozzle cleaning device according to claim 11 is characterized in that, this cleaning substructure further comprises the side that a roller bearing is arranged at this cleaning substructure,, oppositely links to each other with this recovery rotating shaft by behind this cleaning substructure for this cleaning material.
14, coating machine nozzle cleaning device according to claim 11 is characterized in that, this cleaning substructure comprises a rubber material.
15, coating machine nozzle cleaning device according to claim 11 is characterized in that, this cleaning material is a fabric.
16, coating machine nozzle cleaning device according to claim 15 is characterized in that, this cleaning material comprises a non-dust cloth.
17, coating machine nozzle cleaning device according to claim 11 is characterized in that, this cleaning material delivery end comprises propulsion system, and these propulsion system are exported a power to carry this cleaning material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200710122760XA CN100573329C (en) | 2007-07-04 | 2007-07-04 | Coating machine nozzle cleaning module and device thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200710122760XA CN100573329C (en) | 2007-07-04 | 2007-07-04 | Coating machine nozzle cleaning module and device thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101071271A CN101071271A (en) | 2007-11-14 |
| CN100573329C true CN100573329C (en) | 2009-12-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200710122760XA Expired - Fee Related CN100573329C (en) | 2007-07-04 | 2007-07-04 | Coating machine nozzle cleaning module and device thereof |
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| Country | Link |
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| CN (1) | CN100573329C (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101271277B (en) * | 2008-05-06 | 2010-12-22 | 友达光电股份有限公司 | Nozzle cleaning device |
| JP5036664B2 (en) * | 2008-09-04 | 2012-09-26 | 東京エレクトロン株式会社 | Nozzle cleaning in liquid treatment, treatment liquid drying prevention method and apparatus |
| CN102601084B (en) * | 2012-03-09 | 2016-09-28 | 上海华虹宏力半导体制造有限公司 | Discharge duct automatic cleaning apparatus and gelatinizing developer |
| CN105665206A (en) * | 2016-01-04 | 2016-06-15 | 京东方科技集团股份有限公司 | Cleaning plate and manufacturing method thereof |
| CN106935225B (en) * | 2017-04-28 | 2023-08-18 | 苏州佳世达电通有限公司 | Color correction device |
| JP7070503B2 (en) * | 2019-05-21 | 2022-05-18 | 株式会社ダイフク | Coating robot |
-
2007
- 2007-07-04 CN CNB200710122760XA patent/CN100573329C/en not_active Expired - Fee Related
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| Publication number | Publication date |
|---|---|
| CN101071271A (en) | 2007-11-14 |
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Granted publication date: 20091223 Termination date: 20200704 |