CN100561199C - Reflectance measurement systems - Google Patents

Reflectance measurement systems Download PDF

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Publication number
CN100561199C
CN100561199C CN 200410051485 CN200410051485A CN100561199C CN 100561199 C CN100561199 C CN 100561199C CN 200410051485 CN200410051485 CN 200410051485 CN 200410051485 A CN200410051485 A CN 200410051485A CN 100561199 C CN100561199 C CN 100561199C
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China
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polarization
maintaining fiber
links
light
detecting device
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CN 200410051485
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CN1746662A (en
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林志泉
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Hongfujin Precision Industry Shenzhen Co Ltd
Hon Hai Precision Industry Co Ltd
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Hongfujin Precision Industry Shenzhen Co Ltd
Hon Hai Precision Industry Co Ltd
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Abstract

A kind of reflectance measurement systems, be used to measure the reflectivity on a determinand surface, it comprises a light source, a polarization-maintaining fiber, a polarization-maintaining fiber directional coupler, one first spectrometer, one second spectrometer, one first detecting device, one second detecting device and a signal processing unit, this light source is no polarized light source, this polarization-maintaining fiber directional coupler comprises a light incident side, a light exit side, a measuring junction and a reference light output terminal, and this light incident side links to each other with this polarization-maintaining fiber.Wherein, an end of this first spectrometer links to each other with the light exit side of this polarization-maintaining fiber directional coupler, and the end that the other end links to each other with second detecting device links to each other; One end of this second spectrometer links to each other with the reference light output terminal of polarization-maintaining fiber directional coupler, the other end links to each other with an end of this first detecting device, the other end of this first detecting device and second detecting device all links to each other with signal processing unit, and this measuring junction aligns the determinand surface.This reflectance measurement systems can accurately be measured the reflectivity on determinand surface, especially camber reflection rate.

Description

Reflectance measurement systems
[technical field]
The invention relates to a kind of reflectance measurement systems, is the reflectance measurement systems of curved surface about a kind of determinand surface especially.
[background technology]
One existing reflectance measurement systems, as announced the 4th of on May 16th, 1989,831, No. 276 United States Patent (USP) discloses, the light that is sent by light source is via a series of lens and shrink aperture and be focused into a branch of directional light, again by eyeglass reflection and via lens focus to any after, the arrival measured surface, pass through again behind some optical modules to signal processing unit by measured surface reflection, promptly draw the reflectivity of this measured surface thus.The shortcoming of this measuring system is that it comprises more optical module, and structure is comparatively complicated; The light path of employing separate type assembly is assembled and is carried out optically focused, the assembling difficulty, and be difficult for light; In addition, because the polarization of incident light interdependence easily causes measuring error; The light path of separate type assembly assembling optically focused can't contract to very little the spot definition of incident light, makes its directive cause different incidence angles when being the measured surface of curved surface, produces measuring error; This system does not have compensation system, can not compensate, reduce error to systematic error.
In view of this, provide a kind of structure comparatively simple, make that incident light polarization is less, spot definition is less, and can compensate error, reflectance measurement systems is real in necessary comparatively accurately to make albedo measurement.
[summary of the invention]
The object of the present invention is to provide a kind of structure comparatively simple, make albedo measurement reflectance measurement systems comparatively accurately.
Reflectance measurement systems of the present invention, be used to measure the reflectivity on a determinand surface, it comprises a light source, a polarization-maintaining fiber, a polarization-maintaining fiber directional coupler, a condenser lens, collimation lens, one first spectrometer, one second spectrometer, one first detecting device, one second detecting device and a signal processing unit, this light source is no polarized light source, this polarization-maintaining fiber directional coupler comprises a light incident side, a light exit side, a measuring junction and a reference light output terminal, and this light incident side links to each other with this polarization-maintaining fiber.Wherein, an end of this first spectrometer links to each other with the light exit side of this polarization-maintaining fiber directional coupler, and the other end links to each other with an end of second detecting device; One end of this second spectrometer links to each other with the reference light output terminal of polarization-maintaining fiber directional coupler, and the other end links to each other with an end of this first detecting device, and the other end of this two detecting device all links to each other with signal processing unit, and this measuring junction aligns the determinand surface.This condenser lens is between this light source and this polarization-maintaining fiber, and an end of this collimation lens links to each other with the measuring junction of polarization-maintaining fiber directional coupler, and the other end is aimed at the determinand surface.
Compare prior art, reflectance measurement systems structure of the present invention is comparatively simple, can reduce the polarization interdependence of albedo measurement, and owing to see through fibre system, its spot definition is less, thereby makes albedo measurement comparatively accurate, in addition, use optical fiber to guide, score is from the light path assembling of assembly and easy to light.
[description of drawings]
Fig. 1 is a reflectance measurement systems Organization Chart of the present invention.
[embodiment]
Reflectance measurement systems of the present invention is applicable to the measurement of various optical module surface reflectivities, and especially being suitable for surface to be measured is the measurement of the optical module surface reflectivity of curved surface.
See also Fig. 1, this reflectance measurement systems comprises a light source 1, a polarization-maintaining fiber 2, one first spectrometer 3 (spectrometer), a polarization-maintaining fiber directional coupler 4, collimation lens 5, one first detecting device 6 (detector), a signal processing unit 7, one second spectrometer 9 and one second detecting device 10, and this reflectance measurement systems is in order to carry out albedo measurement to determinand 8 surfaces.
This light source 1 is a white light source, as Halogen lamp LED, its light 99.9% is no polarized light, light source 1 utilizes AC (Alternating Current) modulation to drive, the light that light source 1 is penetrated is an ac modulation light, so, and when signal Processing backward, can avoid DC (Direct Current) noise, improve measuring accuracy.
This polarization-maintaining fiber 2 is made up of two polarization-maintaining fiber sections, and the length ratio of this two polarization-maintaining fibers section is 1: 2, and continues for 45 ° with the polarization axle angle and to form, and this polarization-maintaining fiber 2 is connected with polarization fiber coupling mechanism 4.Certainly, preferably be coupled into polarization-maintaining fiber 2, a condenser lens (figure does not show) can be set between polarization-maintaining fiber 2 and polarization fiber coupling mechanism 4 for making light source 1.
This polarization-maintaining fiber directional coupler 4 comprises a light incident side 41, a light exit side 42, a measuring junction 43 and a reference light output terminal 44, when light when light incident side 41 is incident to polarization-maintaining fiber directional coupler 4, it can penetrate from photo measure end 43 and reference light output terminal 44 according to a certain special ratios, and when light when photo measure end 43 is incident to polarization-maintaining fiber directional coupler 4, then this light can penetrate from light exit side 42.
First spectrometer 3 and second spectrometer 9 are all in order to leach the light of specific wavelength, to measure the reflectivity of this special wavelength light.One end of this first spectrometer 3 links to each other with the light exit side 42 of this polarization-maintaining fiber directional coupler 4, the other end links to each other with second detecting device 10, one end of this second spectrometer 9 links to each other with the reference light output terminal 44 of this polarization-maintaining fiber directional coupler 4, and the other end links to each other with first detecting device 6.
One end of this collimation lens 5 links to each other with the measuring junction 43 of polarization-maintaining fiber directional coupler, and the other end is aimed at the surface of determinand 8.
The AC light signal that first detecting device 6 and second detecting device 10 are respectively applied for reflected light and reference light is converted to the AC electric signal.One end of this first detecting device 6 links to each other with signal processing unit 7, and the other end links to each other with second spectrometer 9, and an end of this second detecting device 10 links to each other with signal processing unit 7, and the other end links to each other with first spectrometer 3.
This signal processing unit 7 comprises hardware components and software section.This hardware components comprises artificial circuit part and digital circuit part again, and this hardware components is the DC electric signal with the AC electrical signal conversion of detecting device output, is digital signal with the DC electrical signal conversion again; The splitting ratio of the polarization-maintaining fiber directional coupler 4 that the software section input is in advance known, be that light is after 41 inputs of incident end, from the light of measuring junction 43 outputs and the splitting ratio of reference light output terminal 44, add the digital signal value of reflected light and reference light, can calculate the straight reflectivity in determinand 8 surfaces under a certain wavelength.In addition, when reference optical signal changes, can reflect the instability of light source 1 indirectly and add that a compensating circuit is eliminated labile factor, with the raising measurement accuracy.
During measurement, enter polarization-maintaining fiber 2 after the light line focus lens focus of sending by light source 1, in light input end 41 input polarizations kept fiber directional coupler 4, after its beam split, this light was exported from measuring junction 43 and reference light output terminal 44 respectively by a certain special ratios then; The output light of measuring junction 43 is behind collimation lens 5 collimations, the light spot definition reaches below the 10 μ m, vertical directive determinand 8 surfaces, and reflect, enter polarization-maintaining fiber directional coupler 4, then from 42 outputs of its light exit side, enter signal processing unit 7 leach the reflected light of a certain specific wavelength through first spectrometer 3 after; The output light of reference light output terminal 44 forms reference signal entering signal processing unit 7 behind second spectrometer 9 and first detecting device 6, wherein second spectrometer 9 leaches light wavelength and first spectrometer 3 to leach light wavelength identical; Like this, because the splitting ratio of polarization-maintaining fiber directional coupler 4 is certain, then can be drawn the output light of measuring junction 43 indirectly by reference signal, signal processing unit 7 can draw determinand 8 surface reflectivities with the output light contrast of light exit side 42 with measuring junction 43.
The light source 1 that is appreciated that reflectance measurement systems of the present invention is not limited to halogen light source, can be other no polarizability light source; Determinand 8 surfaces can be curved surface, also can be the plane.

Claims (4)

1. reflectance measurement systems, be used to measure the reflectivity on a determinand surface, it is characterized in that: this reflectance measurement systems comprises a no polarized light source, one polarization-maintaining fiber, one polarization-maintaining fiber directional coupler, one condenser lens, one collimation lens, one first spectrometer, one second spectrometer, one first detecting device, one second detecting device and a signal processing unit, wherein, this polarization-maintaining fiber and this no polarized light source align, this polarization-maintaining fiber directional coupler comprises a light incident side, one light exit side, one measuring junction and a reference light output terminal, this light incident side links to each other with this polarization-maintaining fiber, and this measuring junction aligns the determinand surface; This condenser lens is between this light source and this polarization-maintaining fiber, and an end of this collimation lens links to each other with the measuring junction of polarization-maintaining fiber directional coupler, and the other end is aimed at the determinand surface; One end of this first spectrometer links to each other with the light exit side of this polarization-maintaining fiber directional coupler, and the other end links to each other with an end of second detecting device; One end of this second spectrometer links to each other with the reference light output terminal of this polarization-maintaining fiber directional coupler, and the other end links to each other with an end of this first detecting device, and the other end of this first detecting device and second detecting device all links to each other with signal processing unit.
2. reflectance measurement systems as claimed in claim 1 is characterized in that: this light source is a halogen light source, and it is to be driven the output AC light modulated by ac modulation.
3. reflectance measurement systems as claimed in claim 1 is characterized in that: this polarization-maintaining fiber comprises two polarization-maintaining fiber sections, and the length ratio of this two polarization-maintaining fibers section is 1: 2, and this two polarization-maintaining fiber continues for 45 ° with the polarization axle angle and forms.
4. reflectance measurement systems as claimed in claim 1, it is characterized in that: this signal processing unit comprises a hardware components and a software section, this hardware components comprises a mimic channel and a digital circuit, this hardware components is a digital signal with the electrical signal conversion of detecting device output, and this software section calculates determinand surface reflectivity under a certain specific wavelength according to the digital signal value of splitting ratio, reflected light and the reference light of polarization-maintaining fiber directional coupler.
CN 200410051485 2004-09-10 2004-09-10 Reflectance measurement systems Expired - Fee Related CN100561199C (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2372191B1 (en) * 2010-02-25 2012-09-06 Abengoa Solar New Technologies, S.A. PORTABLE SPECTROPHOTOMETER AND METHOD OF CHARACTERIZATION OF SOLAR COLLECTOR TUBES.
CN106996922B (en) * 2016-01-25 2019-08-23 杭州海康威视数字技术股份有限公司 A kind of target object infrared reflectivity measurement method and device
CN110646169B (en) * 2019-10-28 2022-03-08 沈阳仪表科学研究院有限公司 Method for measuring reflectivity of curved surface optical film element

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4831276A (en) * 1985-04-25 1989-05-16 Olympus Optical Co., Ltd. Apparatus for measuring reflectivity
EP0491235A2 (en) * 1990-12-18 1992-06-24 BASF Aktiengesellschaft Fibre optical differential refractometer
EP0546921A1 (en) * 1991-12-13 1993-06-16 France Telecom Gas photonanograph for fabrication and optical analysis of nanometer scale patterns
CN1193740A (en) * 1996-02-09 1998-09-23 福建师范大学 Method and apparatus for full reflection measurement of material refractive index
CN1405549A (en) * 2002-11-07 2003-03-26 上海交通大学 Detection method of semiconductor film plasma wave-filter

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4831276A (en) * 1985-04-25 1989-05-16 Olympus Optical Co., Ltd. Apparatus for measuring reflectivity
EP0491235A2 (en) * 1990-12-18 1992-06-24 BASF Aktiengesellschaft Fibre optical differential refractometer
EP0546921A1 (en) * 1991-12-13 1993-06-16 France Telecom Gas photonanograph for fabrication and optical analysis of nanometer scale patterns
CN1193740A (en) * 1996-02-09 1998-09-23 福建师范大学 Method and apparatus for full reflection measurement of material refractive index
CN1405549A (en) * 2002-11-07 2003-03-26 上海交通大学 Detection method of semiconductor film plasma wave-filter

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