CN100561147C - Be used for the electron probe that superhigh temperature gas jet radial dynamic electronic temp is levied - Google Patents
Be used for the electron probe that superhigh temperature gas jet radial dynamic electronic temp is levied Download PDFInfo
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- CN100561147C CN100561147C CNB2004100984401A CN200410098440A CN100561147C CN 100561147 C CN100561147 C CN 100561147C CN B2004100984401 A CNB2004100984401 A CN B2004100984401A CN 200410098440 A CN200410098440 A CN 200410098440A CN 100561147 C CN100561147 C CN 100561147C
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Abstract
The present invention relates to be used for the electron probe that superhigh temperature gas jet radial dynamic electronic temp is levied, comprise electronic probe and glass bushing sintering together, electronic probe one end flushes with the glass bushing cross section, and the other end exposes glass bushing and connects lead, constitutes a cylindrical probe thus; Electronic probe is in line places cooling jacket, by high-temp glue with its two-port fixed be one, advancing and outlet pipeline of one chilled water is set in cooling jacket 14, the coated electronic probe of glass tube of the affixed below of high-temp glue directly is immersed in the cooling water cavity, the outlet of water-fast glue 18 sealings and affixed cooling jacket and glass bushing 11, water collar 14 and probe integral body are wedge shape.This electron probe can be used in the superhigh temperature gas of temperature up to 18000K, because a plurality of probes of line spread, working simultaneously to obtain the data of multiple spot in the short time of spot measurement, the key groove design reduces probe disturbance to the high temperature and high speed gas flowfield when measuring.
Description
Technical field
The present invention relates to the electron probe design of the qualitative sign of a kind of dynamic asymmetry of radially electron temperature that is used for superhigh temperature flowing gas jet and Changing Pattern thereof, particularly relate to the multi-measuring point wedge shape electron probe design of the qualitative sign of a kind of dynamic asymmetry of radially electron temperature that is used for superhigh temperature flowing gas jet and Changing Pattern thereof.
Background technology
Cold plasma is widely used with relevant every field such as lithographic techniques in the function film manufacturing, under the non-equilibrium cold plasma condition of infrabar, gas temperature generally is not higher than hundreds of degree, electron temperature wherein then may surpass tens thousand of degree, the energy of electronics and distribute and change technological process and decisive role as a result just, electrostatic probe are to be used for measuring a kind of simple of plasma electron temperature under this condition and the method for practicality.Plasma gas temperature under this condition is not high, and the spatial variations gradient is little, and the structure of electrostatic probe is therefore very simple.In addition, the hot plasma gases temperature is generally at 3000-20000K, be widely used in spraying coating process, prepare wear-resistant at component surface, anticorrosive or heat insulating coat, be applied to Aero-Space, machining, metallurgical, field such as chemical industry and bioengineering, this plasma is extreme temperatures not only, gas velocity generally surpasses the hundreds of rice of per second, and the variable gradient of temperature and speed is also very big, exist the various complicated factors that cause the irregular in time and non-uniform change of plasma flow field and temperature simultaneously, conventional temp measuring method can't use in this case, and the instability of temperature here and distribution thereof is the key factor that causes the uncontrollable and poor repeatability of technologies such as spraying, even also can provide significant information to the control of technological process to the time or the characterizing qualitatively of space wave of temperature.Under the condition of this superhigh temperature, according to the difference of pressure, temperature and the gaseous species of gas, its degree of ionization and the population density that is in various excited state be respective change also, therefore, to the temperature and the distribution thereof of this plasma jet, often adopt the method for spectroscopic diagnostics to measure.Spectral measurement method does not produce any external disturbance to gas jet itself, but equipment is relatively more expensive, and state difference according to measurand, select corresponding the measurement and data analysing method, otherwise be difficult to judge the accuracy of measurement result, carry out three-dimensional instantaneous kinetic measurement with the method for spectrum, technical is very difficult.
There are some disputes in theory in the electron temperature measurement that electrostatic probe is used for plasma under the atmospheric pressure, but more existing simple practical application examples, the result who shows measurement basically can the correct response plasma jet actual electron temperature and distribution situation thereof.The electron probe that is used for the measurement of hot plasma jet needs water-cooled, and simultaneously, in order not disturb the spatial discrimination that flows and obtain of plasma, the size of probe should be as far as possible little.At present, the electron probe that is applied to the hot plasma electron temperature measurement is few, and the probe of fine satisfied cooling and small size condition can not find out basically; Simultaneously, the electron probe of using all is single measuring point structure (promptly adopting single metal wire as probe) now, just to the plasma of stable state, record the curve that one group of probe current changes with the circuit impressed voltage at fixing measurement point, derive the electron temperature of this point thus, the electron temperature that does not have to measure a plurality of measuring points simultaneously maybe can compare the electron probe that instantaneous state changes relatively between the multiple spot position.
Summary of the invention
The object of the present invention is to provide a kind of electron probe, can be used in temperature up to 18000K, temperature spatial variations gradient, reach the dynamic asymmetry of radially electron temperature of superhigh temperature flowing gas jet of every millimeter thousands of degree and the qualitative sign of Changing Pattern thereof along the jet diameter direction.
Provided by the inventionly be used for the electron probe that superhigh temperature gas jet radial dynamic electronic temp is levied, comprise the electronic probe 12 that 1 or 2-30 root are made of high temperature resistant conductive material, glass bushing 11 of electronic probe 12 overcoats, the outer wall of electronic probe 12 and glass bushing 11 inwall sintering are together, every electronic probe 12 1 ends flush with glass bushing 11 cross sections, the other end exposes glass bushing 11 and connects lead, constitutes a cylindrical probe thus, can make 10 electronic probes 12 equally; One cooling jacket, 14 the place aheads are designed to key groove, less with to flow perturbation; Again one or 10 probes are in line and place cooling jacket 14, by high-temp glue with its two-port fixed be one, as shown in Figure 3; Establish an opening 17 in the lower end of cooling jacket 14, the inlet pipeline 16 of one chilled water is set in this opening 17, the height of water inlet pipe 16 is high as far as possible, general and cylindrical probe is same high, its diameter is less than opening 17 (adopting the mode that goes out on advancing below the water), the coated electronic probe of glass tube of the affixed below of high-temp glue directly is immersed in the cooling water cavity 15, adopts the outlet of general water-fast glue 18 sealings and affixed cooling jacket and glass bushing 11, and water collar 14 and probe integral body are wedge shape.
In above-mentioned technical scheme, electronic probe 12 adopts ni-al alloyed wire, nickel nobelium alloy silk or other oxidation resistant conductive material to make, and the xsect of its single electronic probe 12 (measuring point area just) can select diameter in the scope of 0.1-0.5mm.
In above-mentioned technical scheme, can select different key grooves to adjust the influence of probe according to the cooling jacket 14 that requires of measuring accuracy to flow perturbation, under the condition of being convenient to process, can be taken as 6 ° of-30 ° of sizes to the less key groove of flow perturbation.
In above-mentioned technical scheme, the material of probe cooling jacket and water inlet pipe and water outlet pipe is all selected red copper or the good exotic material of other heat conduction for use, to guarantee heat radiation efficiently.
In above-mentioned technical scheme, the pipe thickness of glass bushing (11) is in the scope of 0.1-1mm.
The invention has the advantages that
1) the head line spread of probe a plurality of (1 or greater than 1) can be simultaneously and the electronic probe of separate work, each probe is worked simultaneously and can obtain the data of multiple spot or whole diameter range in single electronic probe is measured short time of data of a locus point.Guaranteed that from structural design probe can be used in the dynamic asymmetry of radially electron temperature of superhigh temperature flowing gas jet and the qualitative sign of Changing Pattern thereof.
2) because favorable cooling effect is arranged, the high temperature resistant tungsten filament alloy that the replaceable probe of electrostatic probe in the past of electronic probe material is selected for use, and employing ni-al alloyed wire, nickel nobelium alloy silk or other oxidation resistant conductive material, can effectively relax the oxidation of detecting head surface when in atmospheric environment, using like this, be not only in order to improve serviceable life, also can improve the reliability and the repeatability of measurement data, because the progress of electronic probe surface oxidation will change the microscopic appearance on surface, it is long-pending just can to change actual detecting head surface, thereby produces the error that is difficult to accurate estimation.
3) the uniform glass capillary of the externally sintered coated thickness of electronic probe, not only the gauge error range of coating is little, can improve the precision of arranging of electronic probe, just improve the bearing accuracy of sensing point position, simultaneously, because the coated gap that can eliminate between insulation course and the electronic probe of sintering avoids the side of electronic probe also to participate in the electronics collection, can guarantee the accuracy of detection area, thereby improve measuring accuracy.
4) high-temp glue can be born the temperature suitable with nickel alumin(i)um alloy, and has excellent water tolerance, play the effect of affixed electronic probe and probe cooling jacket and sealing water simultaneously, rationally reduce the use amount and the thickness of high-temp glue, it is not produced under the thermal shock effect of the high temperature gas flows that surpass 10,000 degree burst apart and reduces erosion, prolongation probe serviceable life.
Wedge point place also can obtain good cooling when 5) appropriate design of chilled water was used probe straight up, the profile of probe integral body adopts wedge-shaped design, can reduce probe disturbance to the high temperature and high speed gas flowfield when measuring, so that obtain as far as possible measurement result near the jet truth.
Description of drawings
Figure 1 shows that the electron probe fundamental diagram
Fig. 2 is the longitudinal section cut-open view of wedge shape electron probe of the present invention
Fig. 3 is the cross section view of wedge shape electron probe of the present invention
Fig. 4 is the vertical view that wedge shape electron probe of the present invention is looked up from the probe bottom.
Embodiment
Embodiment 1
With reference to Fig. 2, make one and be used for the electron probe that superhigh temperature gas jet radial dynamic electronic temp is levied, select for use single xsect (measuring point area just) diameter ni-al alloyed wire (or other oxidation resistant conductive material) in the scope of 0.1mm to place wall thickness 0.15mm capillary glass bushing 11 as electronic probe 12, adopt the way of sintering fixed both.Ni-al alloyed wire 12 1 ends flush with capillary glass bushing 11 cross sections, and the other end exposes glass bushing 11 and connects lead, constitutes a cylindrical probe thus; Similar way can be made 10 probes (as shown in Figure 4).One probe cooling jacket 14 is made through machine work by red copper, under the condition of being convenient to process, can be taken as 9 ° of sizes to the less key groove of flow perturbation; A cylindrical probe to making again, or 10 cylindrical probe are in line and place cooling jacket 14 is filled in high-temp glue 13 and fixedly between cooling jacket 14 and glass bushing 11 upper port is one.As shown in Figure 3, can see the situation of arranging of a plurality of electronic probes, the side of every electronic probe 12 all sintering glass bushing 11, be connected with probe cooling jacket 14 with high-temp glue 13 on every side.The cylindrical probe of the affixed below of high-temp glue directly is immersed in the cooling water cavity 15, have several openings 17 in the bottom of cooling jacket 14, this opening 17 also (is opened what water delivering orifices 17 according to how many root cylindrical probe are arranged as water delivering orifice, when being in line, 10 cylindrical probe place cooling jacket 14, need open 10 water delivering orifices 17), insert the water inlet pipe 16 of chilled water in its split shed 17, the length of this water inlet pipe 16 is consistent with the length of cylindrical probe; Adopt the outlet of water-fast glue 18 sealing cooling jackets and cylindrical probe.The diameter that cooling water pipe route market can be buied is that the copper pipe of 2mm grinds and forms, and implants in the water collar, adopts the type of cooling that goes out on advancing down.All bonding firm after, whole polishing probe wedge shaped tip, consistent to guarantee that electronic probe is collected the surface direction size of electronics, guarantee the precision of measuring.
The head line spread of this electron probe a plurality of can work simultaneously and separate probe, adopt the good nickel-chrome of antioxygenic property to do the probe material, the detecting head surface sintering glass tube play electrical isolation, water-stop, eliminate probe and the effect of insulation gap with accurate control detection area, the probe of coated glass light wall pipe directly is dipped in the chilled water, therefore can be used for the electron temperature measurement of temperature up to the superhigh temperature gas of 18000K, since line spread a plurality of probe measuring points, work simultaneously and can in the short time of spot measurement, obtain the data of multiple spot, the profile of probe adopts wedge-shaped design, can reduce probe disturbance to the high temperature and high speed gas flowfield when measuring, in addition, this probe design most important character is to can be used in the dynamic change that measuring point arranges in the spatial dimension to compare and measure.
Embodiment 2
With reference to Fig. 2, make one and be used for the electron probe that superhigh temperature gas jet radial dynamic electronic temp is levied, select for use single xsect (measuring point area just) diameter nickel nobelium alloy silk (or other oxidation resistant conductive material) in the scope of 0.5mm to place wall thickness 0.2mm capillary glass bushing 11 as electronic probe 12, adopt the way of sintering fixed both.Ni-al alloyed wire 12 1 ends flush with glass bushing 11 cross sections, the other end exposes glass bushing 11 and connects lead, constitute a cylindrical probe thus, similar way can be made 20 cylindrical probe, 20 cylindrical probe is in line to place cooling jacket 14 fixed for one by high-temp glue again.As shown in Figure 3, can see the situation of arranging of 20 electronic probes, the side of every electronic probe 12 all sintering glass bushing 11, be connected with probe cooling jacket 14 with high-temp glue 13 on every side.Probe cooling jacket 14 is made by machine work, under the condition of being convenient to process, can be taken as 12 ° of sizes to the less key groove of flow perturbation.The cylindrical probe of the affixed below of high-temp glue directly is immersed in the cooling water cavity 15, have some water delivering orifices 17 in the bottom of cooling jacket 14, wherein can insert the inlet pipeline 16 of chilled water, the diameter that cooling water pipe route market can be buied is that the copper pipe of 2mm grinds and forms, implant in the water collar, adopt the type of cooling that goes out on advancing down.Adopt the outlet of water-fast glue sealing cooling jacket and cylindrical probe.All bonding firm after, consistent to guarantee that electronic probe is collected the surface direction size of electronics, guarantee the precision of measuring.
Embodiment 3
With reference to Fig. 1, the using method of the electron probe that present embodiment is made is as follows, between plasma generator anode 1 and probe 8, connect adjustable direct supply 4 and resistance 2, at the two ends of resistance 2 and connect the data acquisition line, import the voltage drop at resistance two ends into data acquisition system (DAS) 3, data acquisition system (DAS) mainly is made up of the computing machine that capture card has been installed, 5 and 6 are respectively the water inlet and the outlet pipeline of probe cooling, probe stationary is about energy, about and on the bearing 7 that moves forward and backward, state change when plasma 10, or the position change of the sensing point 9 of probe in plasma, or the voltage setting value of change regulated power supply 4, flowing through circuit 1-2-4-8-9-10-1 current in loop value will change, therefore corresponding the change also will take place in the voltage drop at resistance 2 two ends, when the sensing point stationkeeping, when supposing that plasma jet is in steady state (SS), change the supply voltage setting value, record in the loop electric current thus with the change curve of setting voltage, and derive the electron temperature of place, measuring point position plasma.
Actual hot plasma jet is not strict steady state (SS), and therefore, the curve that records is the variation relation of the time average of electric current with setting voltage.Simultaneously, in the measurement loop of routine, be that the serial connection galvanometer directly obtains current value, in the design system, use general capture card to carry out instantaneous computer data acquiring and record for convenience, galvanometer is replaced with resistance 2 and data acquisition system (DAS) 3.
Claims (5)
1. one kind is used for the electron probe that superhigh temperature gas jet radial dynamic electronic temp is levied, and comprises electronic probe (12), glass bushing (11), probe cooling jacket (14); It is characterized in that: electronic probe (a 12) glass bushing of overcoat (11), the outer wall of electronic probe (12) and glass bushing (11) inwall sintering are together, one end of electronic probe (12) flushes with glass bushing (11) cross section, the other end exposes glass bushing (11) and connects lead, constitutes a cylindrical probe thus; A cylindrical probe that will make again places cooling jacket (14), be filled in by high-temp glue between the upper end medial surface of the upper end outer circumference face of cylindrical probe and cooling jacket, make that the upper end of cooling jacket and glass bushing (11) is fixed to be one, cooling jacket (14) global design that inside is equipped with cylindrical probe is a key groove; Establish a water delivering orifice (17) in the lower end of cooling jacket (14), the water inlet pipe (16) of a chilled water is set in this water delivering orifice (17); Water inlet pipe (16) is high as far as possible in cooling water cavity (15), and its diameter is less than water delivering orifice (17); The coated electronic probe of glass tube of the affixed below of high-temp glue directly is immersed in the cooling water cavity (15), adopt between the lower end outer circumference face of lower end inner side that water-fast glue (18) sealing fills cooling jacket (14) and glass bushing (11), to seal the outlet between cooling jacket (14) and glass bushing (11) lower end.
2. one kind is used for the electron probe that superhigh temperature gas jet radial dynamic electronic temp is levied, it is characterized in that: comprise 2-30 root electronic probe (12), every electronic probe (a 12) glass bushing of overcoat (11), the outer wall of electronic probe (12) and a glass bushing (11) inwall sintering are together, every electronic probe (12) one ends flush with glass bushing (11) cross section, the other end exposes glass bushing (11) and connects lead, constitutes a cylindrical probe thus; One cooling jacket (14), the 2-30 root cylindrical probe that will make again is in line and places cooling jacket (14), be filled in by high-temp glue between the upper end medial surface of the upper end outer circumference face of cylindrical probe and cooling jacket, making cooling jacket and glass bushing (11) upper end fixed is one, and cooling jacket (14) global design that inside is equipped with cylindrical probe is a key groove; Have water delivering orifice (17) with the same number of chilled water of above-mentioned electronic probe in the lower end of cooling jacket (14), each water delivering orifice inserts the water inlet pipe (16) of a described chilled water, this water inlet pipe (16) is high as far as possible in cooling water cavity (15), and its diameter is less than water delivering orifice (17); The coated electronic probe of glass tube of the affixed below of high-temp glue directly is immersed in the cooling water cavity (15), adopt between the lower end outer circumference face of lower end inner side that water-fast glue (18) sealing fills cooling jacket (14) and glass bushing (11), to seal the outlet between cooling jacket (14) and glass bushing (11) lower end.
3. describedly be used for the electron probe that superhigh temperature gas jet radial dynamic electronic temp is levied by claim 1 or 2, it is characterized in that: the angular dimension of key groove is at 6 °-30 °.
4. describedly be used for the electron probe that superhigh temperature gas jet radial dynamic electronic temp is levied by claim 1 or 2, it is characterized in that: described electronic probe (12) selects for use the oxidation resistant conductive material of nickel alumin(i)um alloy or nickel-chrome to make, and its cross-sectional diameter is in the scope of 0.1-0.5mm.
5. describedly be used for the electron probe that superhigh temperature gas jet radial dynamic electronic temp is levied by claim 1 or 2, it is characterized in that: described glass bushing (11) pipe thickness is in the scope of 0.1-1mm.
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2004100984401A CN100561147C (en) | 2004-12-10 | 2004-12-10 | Be used for the electron probe that superhigh temperature gas jet radial dynamic electronic temp is levied |
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| CNB2004100984401A CN100561147C (en) | 2004-12-10 | 2004-12-10 | Be used for the electron probe that superhigh temperature gas jet radial dynamic electronic temp is levied |
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| CN1786678A CN1786678A (en) | 2006-06-14 |
| CN100561147C true CN100561147C (en) | 2009-11-18 |
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| CN106199355B (en) * | 2016-07-05 | 2018-11-27 | 西安石油大学 | Electrostatic probe differential measurement method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2431561Y (en) * | 2000-07-07 | 2001-05-23 | 中国科学院力学研究所 | Probe for plasma diagnostic device in glow discharge surface treatment |
| JP2003217897A (en) * | 2002-01-25 | 2003-07-31 | Iwasaki Electric Co Ltd | Plasma measuring device and method, and sensor probe |
| CN2564992Y (en) * | 2002-08-06 | 2003-08-06 | 哈尔滨工业大学博思特仪器仪表有限公司 | Capacitance probe for vortex street flow sensor |
| CN1138979C (en) * | 2000-07-07 | 2004-02-18 | 中国科学院力学研究所 | Plasma probe diagnosing device based on glow discharge and surface treatment |
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2004
- 2004-12-10 CN CNB2004100984401A patent/CN100561147C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2431561Y (en) * | 2000-07-07 | 2001-05-23 | 中国科学院力学研究所 | Probe for plasma diagnostic device in glow discharge surface treatment |
| CN1138979C (en) * | 2000-07-07 | 2004-02-18 | 中国科学院力学研究所 | Plasma probe diagnosing device based on glow discharge and surface treatment |
| JP2003217897A (en) * | 2002-01-25 | 2003-07-31 | Iwasaki Electric Co Ltd | Plasma measuring device and method, and sensor probe |
| CN2564992Y (en) * | 2002-08-06 | 2003-08-06 | 哈尔滨工业大学博思特仪器仪表有限公司 | Capacitance probe for vortex street flow sensor |
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