CN100557389C - Flow sensor - Google Patents
Flow sensor Download PDFInfo
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- CN100557389C CN100557389C CNB2005800264973A CN200580026497A CN100557389C CN 100557389 C CN100557389 C CN 100557389C CN B2005800264973 A CNB2005800264973 A CN B2005800264973A CN 200580026497 A CN200580026497 A CN 200580026497A CN 100557389 C CN100557389 C CN 100557389C
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Abstract
The invention discloses a kind of disposable flow sensor, this flow sensor generally includes the circulation road assembly, and this circulation road assembly comprises the circulation deferent that partly is connected with disposable circulation road.Sensor chip is positioned at and approaches the thin surface of contact that partly formed by disposable circulation road or the position of film, so that sensor chip is measured fluid flow, this fluid flows through the described disposable circulation road part of described circulation deferent and described circulation road assembly.In addition, also can provide a kind of substrate, sensor chip is forming on this substrate and is being positioned on this substrate.A kind of seal also is provided, and the sealing part is used for disposable circulation road partly is sealed to the circulation deferent.This flow sensor can be realized in the environment of " non-isolation " sensor chip method, in " non-isolation " sensor chip method, sensor chip, substrate and fluid flow tube are assembled together to constitute complete disposable use assembly, in this disposable use assembly, thin surface of contact is the covering sensor chip not.Flow sensor can realize in the environment of " isolation " sensor chip method that also in " isolation " sensor chip method, membraneous material or thin surface of contact stop the surface of fluid feeler chip.In the structure of this " isolation ", in fact sensor chip is not the part of disposable fluid flow tube assembly.In this method, disposable use part only is a fluid flow tube self.
Description
The cross reference of related application
Present patent application is advocated the temporary patent application No.60/578 according to the 35th 119 (e) money of United States code, 280 right of priority, the denomination of invention of this patented claim is " a disposable flow sensor ", submit on June 8th, 2004, and its disclosure is combined among the present invention by reference.
Technical field
Embodiment relates generally to flow sensor and technology.Embodiment also relates to disposable flow sensor packages.Embodiment also relates to sensor chip (die) and electronic processing device thereof.
Background technology
Many Application in Sensing require to use liquid flow sensor.For example, various commerce, industry with the application of medical science in, flow sensor can be used for measurement flow rate.Scope requires the use traffic sensor from supplying various medical science, processing and the commercial Application of the large-scale refinery of narcotic transportable respirators A to the chemical plant.In these were used, flow control was the inherent aspect of proper handling, and proper handling can partly obtain by utilizing flow sensor to measure the flow velocity of fluid in flow system.For example, in medical application, require usually accurately to measure and introduce the intravenous flow rate of fluid of medical patient and therefore control such flow rate of fluid.
In many flow systems, for example the inflammable gas system that flows comprises the two-component mixture of first alcohol and water, and the chemical constitution of fluid can change continually.Also can require special flow system to flow more than a kind of fluid, these fluids have different chemical and thermophysical property.For example, according to the needs of handling, transmitting N
2In the semiconductor processing system of gas, N
2Gas sometimes can be by H
2Gas or helium replace; Perhaps in the rock gas measuring system, the composition of rock gas can change owing to the uneven concentration profile of gas.Like this, measure flow rate of fluid, comprise that (for example, different densities, thermal conductivity, specific heat etc.) flow velocity requires accurate and effective flow sensor apparatus to different chemical composition.
In many flow sensings are used, need a kind of disposable flow sensor apparatus.The advantage of disposable operative installations is to make in large quantities and is with low cost.These devices are highly suitable for limited use.One of problem of conventional flow sensor packages is to be difficult to these device construction are become not only to be suitable for limited use but also can be with cheapness and effective and efficient manner manufacturing.Can believe that flow sensor apparatus disclosed in this specification has overcome the limitation of conventional flow sensor apparatus.
Summary of the invention
Provide following summary of the present invention so that to the understanding of unique character of innovation more of the present invention, and this summary does not mean that comprehensive description.Complete understanding to different aspect of the present invention can obtain by understanding whole instructionss, claim, accompanying drawing and summary generally.
Therefore, one aspect of the present invention provides a kind of improved flow sensor.
Another aspect of the present invention provides a kind of disposable flow sensor.
Another aspect of the present invention provides a kind of sensor chip and electronic processing device thereof.
The aspect that the present invention is above-mentioned and other purpose and advantage can realize as described.The invention discloses a kind of disposable flow sensor, this disposable flow sensor generally includes the circulation road assembly, and this circulation road assembly comprises the circulation deferent that partly is connected with disposable circulation road.Sensor chip also can be positioned at and approach thin surface of contact or film place, and this thin surface of contact or film are partly formed by disposable circulation road.Sensor chip measurable flow body flow, the circulation deferent of this fluid flows channel components and disposable circulation road part.
Preferably, thin surface of contact can be realized in the sensor chip tectonic setting of isolating, the sensor chip structure of this isolation of this description details.In this " isolation " sensor chip method, membraneous material or thin surface of contact stop the surface of fluid feeler chip.In this " isolation " system, in fact sensor chip is not the part of disposable stream pipe assembly, and in the method, disposable use part only is a stream pipe itself.
In addition, can also provide a kind of substrate, sensor chip is forming on this substrate and is being positioned on this substrate.Can also provide a kind of seal, so that disposable circulation road partly is sealed to the circulation deferent.For example, thin surface of contact can comprise polyester.In addition, circulation deferent and disposable circulation road part can form continuous circulation road together, and fluid passes this circulation road and flows.Circulation road itself can be configured to D shape circulation road or three surface current passages.In addition, also can provide signal processing electronic device, this signal processing electronic device is communicated by letter with flow sensor.
Description of drawings
Accompanying drawing illustrates the present invention, and be used for explaining principle of the present invention together with detailed description of the present invention, in these accompanying drawings, identical reference number whole independent view middle finger identical or on function similar elements, these accompanying drawings are combined in the instructions and constitute the part of instructions.
Fig. 1 shows the skeleton view of disposable flow sensor, can realize disposable flow sensor according to a preferred embodiment of the invention;
Fig. 2 shows according to side view alternate embodiment of the present invention, that be shown in the flow sensor among Fig. 1;
Fig. 3 shows can be according to the D shape circulation road of alternate embodiment realization of the present invention;
Fig. 4 shows according to three circulation road alternate embodiment of the present invention, that contact with the thin-wall face of flow sensor;
Fig. 5 shows according to alternate embodiment of the present invention flow sensor structure that can realize, non-isolation side cross-sectional view; And
Fig. 6 shows according to alternate embodiment of the present invention D shape that can realize, that be used for flow sensor circulation road and constructs.
Embodiment
Can change and quote the special value in these unrestriced examples, discussed and structure just at least one embodiment of the present invention is shown, and not be intended to limit scope of the present invention.
Fig. 1 shows the skeleton view of disposable flow sensor 100, can realize this flow sensor 100 according to a preferred embodiment of the invention.Flow sensor 100 generally includes circulation deferent 102, and this circulation deferent 102 comprises inlet part 104 and exit portion 106.Usually represent that with arrow 107 fluid flows into inlet part 104 and flows out exit portion 106.In the structure shown in Fig. 1, circulation road assembly 108 surrounds circulation deferent 102 usually and can be connected to substrate 101, and a plurality of electron devices 112,114,116,118,120,124,126 and 128 can form on the substrate 101 and be positioned on the substrate 101.Notice that electron device 112,114,116,118,120,124,126 and 128 can be, for example, electronic contact, electric wire is connected with these electronic contacts with other electric contact, electric signal to be provided and to communicate by letter with flow sensor 100.
Notice that Fig. 1 shows preferred embodiment, Fig. 2 shows alternate embodiment, but utilizes similar parts and reference number to be used to refer to similar or identical device in two kinds of structures.The disclosed embodiments are often referred to a kind of layout in Fig. 1, and in this arranged, sensor chip, substrate and stream pipe can be assembled together became a complete disposable assembly, as circulation road assembly 108.Method shown in Fig. 1 shows " non-isolation " sensor chip method, and in " non-isolation " sensor chip method, thin surface of contact does not cover its sensor chip.In " non-isolation " method, medium flows through exposed sensor chip 110 usually.
On the other hand, the structure that is shown in Fig. 2 shows and substitutes disposable flow sensor structure, and this structure can be described as " isolation " method.In structure shown in Figure 2, can realize film or surface of contact, this film or surface of contact stop the surface (promptly referring to Fig. 2) of fluid feeler chip.In this structure, sensor chip is not the part of disposable stream pipe assembly, that is, disposable use part only is the stream pipe.Attention is under the situation of the assembly of isolating, and as shown in Figure 2, sensor chip 110 can be positioned on the part of durable side of disposable use face or circulation road.
Therefore, Fig. 2 shows the alternative form of flow sensor shown in Figure 1 100.In being shown in the alternate embodiment of Fig. 2, sensor chip 110 is provided, this sensor chip 110 is positioned at the position of approaching film or thin surface of contact 111.Notice that thin surface of contact 111 can be formed by a kind of material, such as, for example, 001 inch polyester material.
Thin surface of contact 111 is the key characters that are used to obtain minimum power dissipation and peak response.Fluid flow by disposable circulation road part 121 is often represented by arrow 107.Attention is in Fig. 1 to Fig. 4, and identical or similar part or device are represented by identical reference number usually.Seal 131 can be between disposable circulation road part 121 and circulation deferent 102.In the structure shown in Fig. 2, sensor chip 110 is usually located at and film or thin surface of contact 111 tight position contacting.
In general, embodiment shown in Figure 1 is made of several sections or element, comprises sensor chip 110, substrate 101, seal 131 and circulation road assembly 108.Consider that according to design sensor chip 110 not only can utilize open-wire line (front wire) combination but also can utilize the wafer interconnect technology that connects.Substrate 101 both can be rigidity also can be flexible or their combination.Consider that according to design seal 131 can be epoxy preformed member, O type ring and/or elastic body.The circulation road that is formed by circulation deferent 102 and/or disposable circulation road part 121 can be with finished plastics and/or finished glass-chip system or shaping.
Like this, these four elements---sensor chip 110, substrate 101, seal 131 and circulation road assembly 108 gathers together in the mode that forms waterproof sealing, and guarantees aliging and guaranteeing suitable electrical connection between sensor chip 110 and the substrate 101 of suitable circulation road and sensor chip 110 simultaneously.Therefore, this package design is considered at sensor chip 110 and the quick and smooth surface of contact between following any signal processing electronic device.
Fig. 3 shows D shape circulation road 120, can alternate embodiment according to the present invention realize this D shape circulation road 120.In Fig. 3, sensor chip 110 is positioned at the position of approaching thin surface of contact 111, the part of the wall of the D shape circulation road 120 of these thin surface of contact 111 formation D shape pipes 109.Therefore, D shape pipe 109 illustrated in fig. 3 is similar to Fig. 1 to circulation deferent 102 and/or disposable circulation road part 121 shown in Figure 2.
According to alternate embodiment of the present invention, Fig. 4 shows the three surface current passages 122 that are connected by the interface with the thin-walled 111 of flow sensor.In Fig. 3, sensor 110 is positioned at the position of approaching thin-walled or surface of contact 111, and this thin-walled or surface of contact 111 forms in the wall of three surface current passages 122 of rectangular tubes 113.Notice that rectangular tube 112 shown in Figure 4 is similar to Fig. 1 usually to circulation deferent 102 and/or disposable circulation road part 121 shown in Figure 2.
According to alternate embodiment of the present invention, Fig. 5 shows the skeleton view of Fig. 1 to disposable flow sensor 100 shown in Figure 2.In Fig. 1 to Fig. 2 and Fig. 5, same or analogous part or element illustrate with identical reference number usually.But, note figure 5 illustrates the square frame that representation signal is handled electronic installation 134, can communicate by letter with such signal processing electronic device 134 to show flow sensor 100.
Consider that according to design flow sensor 100 can have flow range and about 2% to 4% the precision of 5uL/min to 500mL/min usually.In addition, sensor chip 110 can be used as the chip of non-isolation and realizes, the chip of this non-isolation and biocompatible materials and low cost, disposable encapsulation and durable electronic installation are connected.The application of flow sensor 100 comprises that for example, volumetric infusion pump, syringe pump, peritoneal dialysis device, insulin are inculcated pump and lab-on-chip devices.
Under the situation of the flow sensor 100 that this instructions is described, feeler chip 110 is (promptly actually for fluid, non-isolation sensor chip) surperficial and surface plane therefore sensor chip 110 can be in line with the plane of tube wall, any " bag " or " chamber " with eliminate fluid, this fluid is from the flow path by plastic tube (that is, circulation deferent 102 and/or disposable circulation road part 121).
Therefore just can realize " D " shape channels designs of the flow path that is used for sensor chip 110 tops as shown in Figure 3.In addition, consider, notice that the term " fluid " that the present invention uses can refer to liquid and/or gas according to design.Like this, in one embodiment, flow sensor 100 can be used for the flow of sensing liquid, and in another embodiment, but the flow of flow sensor 100 sense gasses.And in another embodiment, flow sensor 100 can be used for the flow of sense gasses and liquid.
Fig. 6 shows the side cross-sectional view of the flow sensor structure of non-isolation; The flow sensor structure of can alternate embodiment according to the present invention realizing this non-isolation.Attention is in Fig. 1 and Fig. 5, and similar or identical part or element are represented by identical reference number usually.Fig. 6 shows flow sensor 160, and this flow sensor 160 comprises sensor chip 110, substrate 101 and circulation road assembly 108.The flow sensor 160 of Fig. 6 is similar to the shown flow sensor 100 of this instructions.But, in the structure of Fig. 6, sensor chip 110 is positioned on the tangent line of radius of circulation deferent 102.
On the other hand, Fig. 7 shows the D shape circulation road structure that is used for flow sensor 170, can alternate embodiment according to the present invention realize this flow sensor 170.Flow sensor 170 is similar to flow sensor 160 and flow sensor 100, and difference is that in structure shown in Figure 7, sensor chip 110 is charged in the stream, and produces D shape circulation road above sensor chip 110.Like this, the structure among Fig. 7 is similar to the D shape structure among Fig. 3.
In front on the basis of the description of being carried out, be appreciated that disclosed disposable flow sensor, this disposable flow sensor generally includes the circulation road assembly, and this circulation road assembly comprises the circulation deferent that partly is connected with disposable circulation road.Sensor chip is positioned at and approaches the thin surface of contact that partly formed by disposable circulation road or the position of film, so that the flow of fluid of the disposable circulation road part of circulation deferent and circulation road assembly is flow through in the sensor chip measurement.In addition, also can provide substrate, sensor chip is forming on this substrate and is being positioned on this substrate.Also can provide seal, this seal is used for disposable circulation road partly is sealed to the circulation deferent.
Such flow sensor can be realized in the environment of " non-isolation " sensor chip method, in this " non-isolation " sensor chip method, sensor chip, substrate and stream pipe are assembled together becomes complete disposable assembly, in this assembly, thin surface of contact is the covering sensor chip not.Perhaps, flow sensor can realize in the environment of " isolation " sensor chip method that in " isolation " sensor chip method, membraneous material or thin surface of contact stop the surface of fluid feeler chip.In this " isolation " structure, in fact sensor chip is not the part of disposable use assembly.In this method, disposable use part only is a stream pipe self.
Embodiment that this instructions is listed and example to the present invention and and practical application carried out best explanation, therefore and make those of skill in the art can make and utilize the present invention.But, those of skill in the art will appreciate that the description of front and example only propose for the purpose of diagram and example.Those of skill in the art can understand that other difference changes and modification, and appending claims is intended to comprise these variations and modification.
Listed description is not intended to that at large present invention is described or limits the invention.Can carry out numerous modifications and variations according to above-mentioned instruction, and not deviate from the scope of following claims.Expect that use of the present invention can relate to the device with different characteristic.Scope of the present invention is intended to be limited by appending claims, and recognizes the equivalent of all aspects.
Define in the desired exclusive authority claim hereinafter in the embodiment of the invention.Claim of the present invention is as follows.
Claims (17)
1. flow sensor comprises:
The circulation deferent;
Disposable circulation road part;
Seal, described seal are used for described disposable circulation road partly is sealed to described circulation deferent;
Sensor chip, described sensor chip forms and is positioned on the substrate;
Wherein, described sensor chip, described substrate and described disposable circulation road partly fit together and form complete disposable assembly; Described disposable assembly can discard from described circulation deferent; And
Wherein, the flow of the fluid of described circulation deferent and described disposable circulation road part is flow through in described sensor chip measurement;
Described sensor chip contacts with described fluid but not isolates with it.
2. sensor according to claim 1 is characterized in that: described circulation deferent and the formed circulation road of disposable circulation road part align with described sensor chip.
3. sensor according to claim 1 is characterized in that: described circulation deferent and described disposable circulation road part form continuous circulation road together, and fluid can flow by described circulation road.
4. sensor according to claim 3 is characterized in that: described circulation road comprises D shape circulation road.
5. sensor according to claim 3 is characterized in that: described circulation road comprises three surface current passages.
6. sensor according to claim 1 is characterized in that: also comprise signal processing electronic device, described signal processing electronic device is communicated by letter with described sensor chip.
7. sensor according to claim 1 is characterized in that: described sensor chip is charged in the described fluid stream.
8. sensor according to claim 1 is characterized in that: described sensor chip is positioned on the tangent line of radius of described circulation deferent.
9. sensor according to claim 1 is characterized in that: described seal comprises O type ring.
10. sensor according to claim 1 is characterized in that: described seal comprises elastic body.
11. a flow sensor comprises:
Circulation road assembly, described circulation road assembly comprise the D shape circulation deferent with disposable D shape circulation road part correlation connection; Wherein, described D shape circulation deferent and described disposable D shape circulation road part form continuous circulation road together, and fluid can flow by described circulation road;
The sensor chip of isolating, described sensor chip is located and is spaced near thin surface of contact, described thin surface of contact is formed by at least a portion of the wall of described disposable circulation road part, described thin surface of contact stops fluid to contact the surface of described sensor chip, wherein, described sensor chip is measured fluid flow, and described fluid flows through the described circulation deferent and the described disposable circulation road part of described circulation road assembly; And
Substrate and seal, described sensor chip forms and is positioned on the described substrate, and described seal comprises O type ring, and described O type ring is used for described disposable circulation road partly is sealed to described circulation deferent; And
Signal processing electronic device, described signal processing electronic device is communicated by letter with described sensor chip.
12. the method for a flow sensor comprises the steps:
Deferent and disposable circulation road part correlation connection will circulate;
On substrate, form and the alignment sensor chip;
Described sensor chip, described substrate and described disposable circulation road are partly fitted together and form complete disposable assembly; Described disposable assembly can discard from described circulation deferent; Wherein, described sensor chip is measured the flow of fluid, and described fluid flows through described circulation deferent and described disposable circulation road part; Described sensor chip contacts with described fluid but not isolates with it; And
Seal is provided, and described seal is used for described disposable circulation road partly is sealed to described circulation deferent.
13. method according to claim 12 is characterized in that: also comprise the step that described circulation deferent and the formed circulation road of disposable circulation road part are alignd with described sensor chip.
14. method according to claim 12 is characterized in that: comprise also described circulation deferent and described disposable circulation road partly are arranged together to form the step of continuous circulation road that fluid can flow by described circulation road.
15. method according to claim 14 is characterized in that: also comprise the step that described circulation road is configured to comprise D shape circulation road.
16. method according to claim 14 is characterized in that: also comprise the step that described circulation road is configured to comprise three surface current passages.
17. method according to claim 12 is characterized in that: also comprise the step that signal processing electronic device is provided, described signal processing electronic device is communicated by letter with described sensor chip.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US57828004P | 2004-06-08 | 2004-06-08 | |
| US60/578,280 | 2004-06-08 | ||
| US10/879,223 | 2004-06-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1993605A CN1993605A (en) | 2007-07-04 |
| CN100557389C true CN100557389C (en) | 2009-11-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005800264973A Active CN100557389C (en) | 2004-06-08 | 2005-06-08 | Flow sensor |
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| CN (1) | CN100557389C (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102620780A (en) * | 2011-12-27 | 2012-08-01 | 郑州炜盛电子科技有限公司 | MEMS (micro-electromechanical system) thermal-type flow sensor |
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| Publication number | Publication date |
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| CN1993605A (en) | 2007-07-04 |
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