CN100552909C - 测量外延生长中图形畸变的方法 - Google Patents
测量外延生长中图形畸变的方法 Download PDFInfo
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- CN100552909C CN100552909C CNB2007100939522A CN200710093952A CN100552909C CN 100552909 C CN100552909 C CN 100552909C CN B2007100939522 A CNB2007100939522 A CN B2007100939522A CN 200710093952 A CN200710093952 A CN 200710093952A CN 100552909 C CN100552909 C CN 100552909C
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CNB2007100939522A CN100552909C (zh) | 2007-07-17 | 2007-07-17 | 测量外延生长中图形畸变的方法 |
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CNB2007100939522A CN100552909C (zh) | 2007-07-17 | 2007-07-17 | 测量外延生长中图形畸变的方法 |
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CN101350325A CN101350325A (zh) | 2009-01-21 |
CN100552909C true CN100552909C (zh) | 2009-10-21 |
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CN102931219B (zh) * | 2012-11-08 | 2015-06-10 | 杭州士兰集成电路有限公司 | 半导体器件及其制备方法 |
CN113109997B (zh) * | 2021-03-18 | 2022-08-26 | 上海信及光子集成技术有限公司 | 测量外延前后光刻套刻误差的方法及结构 |
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Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20131218 |
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Free format text: CORRECT: ADDRESS; FROM: 201206 PUDONG NEW AREA, SHANGHAI TO: 201203 PUDONG NEW AREA, SHANGHAI |
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Effective date of registration: 20131218 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Patentee after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201206, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge Patentee before: Shanghai Huahong NEC Electronics Co., Ltd. |