CN100551611C - Processing unit (plant) - Google Patents

Abstract

But the invention provides a kind of on surface of the work in the short time and irregular configuration ground form the processing unit (plant) of many indentures.This processing unit (plant) has: the cutter that is used for processing a plurality of indentures of the degree of depth that has possessed first direction on the surface of workpiece; Can make the relative workpiece of cutter at first direction and the drive unit that moves up with the second party of first direction approximate vertical; And make the relative workpiece of cutter during second party moves up, will with the threshold value comparison frequency of regulation and amplitude be the riser portions of the waveform that relatively obtains of irregular signal (W1) as trigger impulse, the relative workpiece of cutter is moved up with the control device of incision workpiece ground accessory drive in first party.

Description

Processing unit (plant)

Technical field

The present invention relates to the processing unit (plant) of a plurality of indentures of processing on surface of the work, relate in particular to the processing unit (plant) of on the surface of the metal pattern that is used for the processing and forming LGP, processing a plurality of indentures with irregular configuration high-speed.

Background technology

On employed LCD on PC or the mobile phone etc., possessed the LGP that sidelight and resin material by light transmission backlight etc. constitute and be extensive use of as lighting device.Owing to require display surface its brightness on whole of LCD even, therefore, carry out on the surface of LGP, forming the protuberance (dot) of a plurality of small hemispherical or prism-like, and make the light scattering of penetrating from LGP.Therefore, at the metal die for moulding that is used for the processing and forming LGP, use processing unit (plant) to form a plurality of recesses (dimple) with the process tool that has possessed square awl or cone shape end.This processing unit (plant) is for example opened on the 2005-67065 communique on the books the spy.

In general, because if arrange regularly the point be formed on the LGP then because of and colour filter etc. between interference on display surface, produce interference stripes, thereby best collocation point brokenly, therefore, the indenture that requires to arrange corresponding metal die for moulding with point is arranged also irregular.On existing processing unit (plant), specifying the position of the lip-deep indenture of metal die for moulding in procedure singly is coordinate.Also have, in No. 3402138 communique of special permission, disclose for a plurality of points are disposed brokenly content with the coordinate of the function set point that satisfies certain restriction condition.

Diameter or a length of side of above-mentioned point or indenture its each are generally about 10 μ m, are that surface of the work also forms tens thousand of to hundreds thousand of to a metal pattern sometimes.If will in procedure, specify the coordinate of so many indenture as mentioned above like that,, also can become tens thousand of very huge programs to hundreds thousand of row even then in this procedure, only need work out delegation's program to an indenture.Also have, if use specific function in No. 3402138 communique of special permission, putting down in writing, though then can set the coordinate of each indenture effectively, but, so-called in each indenture processing, need to a certain degree time in the method for correctly processing indenture on the coordinate of determining from the viewpoint of process tool or workpiece movement and location etc.When the indenture number is tens thousand of to hundreds thousand of the time, be one second even if required time is gone up in an indenture processing, but need the time more than one day on the whole, therefore, be not suitable for as High-speed machining.

Summary of the invention

So, its purpose of the present invention be to provide a kind of can be at a high speed and be irregularly formed the processing unit (plant) of a plurality of indentures.

In order to achieve the above object, the invention provides a kind of processing unit (plant), this processing unit (plant) has: the cutter that is used for processing a plurality of indentures of the degree of depth that possesses first direction on the surface of workpiece; Can make the above-mentioned relatively workpiece of this cutter at above-mentioned first direction and the drive unit that moves up with the second party of this first direction approximate vertical; And make the above-mentioned relatively workpiece of above-mentioned cutter during above-mentioned second party moves up, the timing that second waveform that uses at least one side with the threshold value comparison frequency of regulation and amplitude to comprise first waveform of means of chaotic signals and obtain is tried to achieve is as trigger impulse, and the above-mentioned relatively workpiece of above-mentioned cutter is moved up to carry out the incision action of above-mentioned workpiece and to dodge the control device of the above-mentioned drive unit of action ground control in above-mentioned first party.

Can constitute above-mentioned drive unit, make it possible to the above-mentioned relatively workpiece of above-mentioned cutter and move up third party with both sides' approximate vertical of above-mentioned first direction and second direction.

The preference of above-mentioned first waveform is the white noise waveform, and in this case, above-mentioned control device is controlled at least one side of the rising of above-mentioned second waveform and decline above-mentioned incision action and above-mentionedly dodged action as trigger impulse.

Utilize the change of above-mentioned threshold value can change the configuration density of above-mentioned a plurality of indentures of on the surface of above-mentioned workpiece, being processed.

Above-mentioned first waveform can be to have the overlapping waveform of white noise waveform on the periodic random waveform, in this case, above-mentioned control device will be in above-mentioned each cycle with periodic random waveform be controlled above-mentioned incision action in initial reverse of magnitude relationship between the value of the threshold value of defined and above-mentioned first waveform and is above-mentionedly dodged action as trigger impulse.

It is above-mentioned that to have periodic random waveform be zig-zag.

Can change the degree of irregularity of the configuration of above-mentioned a plurality of indentures of on the surface of above-mentioned workpiece, being processed by the change of above-mentioned white noise amplitude of wave form.

Above-mentioned drive unit can have the piezoelectric element that the above-mentioned relatively workpiece of above-mentioned cutter is moved up in above-mentioned first party.

Can constitute above-mentioned drive unit, make at the above-mentioned relatively workpiece of above-mentioned cutter during above-mentioned second party moves up, can make the above-mentioned relatively cutter of above-mentioned workpiece comprise the proportional amount of value of the 3rd waveform of irregular signal at least one side with third direction on the micro-displacement of both sides' approximate vertical of above-mentioned first direction and second direction and frequency and amplitude.

In this case, constitute above-mentioned drive unit, make during above-mentioned cutter is cut above-mentioned workpiece, do not carry out the micro-displacement of the above-mentioned relatively cutter of above-mentioned workpiece at third direction.

The preference of above-mentioned the 3rd waveform is the white noise waveform.

Above-mentioned drive unit can have makes the piezoelectric element of the above-mentioned relatively cutter of above-mentioned workpiece at above-mentioned third direction micro-displacement, and in this case, above-mentioned piezoelectric element is worked by the voltage that applies with above-mentioned waveform.

Description of drawings

Above-mentioned or other purpose, feature and advantage of the present invention will be by will be clearer with reference to the preferred implementation below the description of drawings.Among the figure:

Fig. 1 is the figure of schematic configuration that expression relates to the indenture processing unit (plant) of first embodiment of the invention;

Fig. 2 is the enlarged drawing from the A portion of Fig. 1 of top view;

Fig. 3 a～Fig. 3 c represents that respectively the state of cutter before surface of the work processing indenture, the state and the cutter of cutter incision surface of the work dodge the figure that forms the state of indenture at surface of the work;

Fig. 4 is the figure that expression relates to an example of the white noise waveform that processing unit (plant) of the present invention utilizes;

Fig. 5 is that expression compares and the figure of the waveform that obtains with a certain threshold value dialogue noise waveform;

Fig. 6 is that expression is by relating to the figure of processing unit (plant) of the present invention at an example of the formed indenture configuration of surface of the work;

Fig. 7 is that expression compares white noise and the figure of the waveform that obtains with the threshold value also lower than the occasion of Fig. 5.

Fig. 8 is that expression compares white noise and the figure of the waveform that obtains with the threshold value also higher than the occasion of Fig. 5;

Fig. 9 is that expression is by relating to the figure of processing unit (plant) of the present invention in the example application of the formed indenture configuration of surface of the work;

Figure 10 is the figure of replacement example of the waveform of presentation graphs 4;

Figure 11 a is the figure that expression obtains the required zig-zag of the waveform of Figure 10;

Figure 11 b is the figure that indicates to overlap onto the white noise waveform on the waveform of Figure 11 a;

Figure 12 is that expression compares the waveform of Figure 10 with a certain threshold value and the figure of the waveform that obtains;

Figure 13 is in order to make comparisons with Figure 12, the zig-zag of the more underlapped white noise of expression and the figure of the waveform that obtains;

Figure 14 is that expression makes the figure under the also big situation of the occasion of amplitude ratio Figure 12 of white noise;

Figure 15 is that expression is by relating to the figure of processing unit (plant) of the present invention in other example application of the formed indenture configuration of surface of the work;

Figure 16 is the figure of schematic configuration that expression relates to the indenture processing unit (plant) of second embodiment of the invention;

Figure 17 a is the part amplification plan view of the E part of Figure 16, is the figure of the state of expression piezoelectric element when not making the workpiece displacement;

Figure 17 b is the figure of the state of expression piezoelectric element when making workpiece along the displacement of Y direction;

Figure 18 is the figure that expression should be applied to an example of the voltage waveform on the piezoelectric element of the 4th linear axis movable part;

Figure 19 is expression to voltage waveform makes the example that applies voltage waveform that workpiece do not process with displacement along the Y direction during cutter incision the image that applies of Figure 18.

The specific embodiment

At first explain the present invention in conjunction with figure.Fig. 1 is the figure of schematic configuration that expression relates to the indenture processing unit (plant) 10 of first embodiment of the invention.But processing unit (plant) 10 has the i.e. bottom 14 of fixed part that workpiece 12 ground of mounting metal die for moulding etc. constitute.Cutter 16 remain on along the direction with the surperficial 12a approximate vertical of workpiece 12 be first direction (being the Z direction among Fig. 1) but on the first linear axis movable part 18 that straight line moves.The concrete example of the preferred first linear axis movable part 18 as shown in Figure 2, has the piezoelectric element 18a that cutter 16 is installed and constitutes along Z direction telescopically and towards the elastomer 18b as leaf spring of initial position to cutter 16 reinforcings.

The first linear axis movable part 18 remain on along the second direction vertical (being directions X among Fig. 1) with first direction but on the second linear axis movable part 20 that straight line moves, have, the second linear axis movable part 20 remains on along the third direction vertical with first direction and second direction both sides (being the Y direction among Fig. 1) but the 3rd linear axis movable part 22 that straight line moves again.In first embodiment, first～the 3rd movable part 18,20 and 22 co-operatings and constitute the drive unit of cutter 16.Therefore, cutter 16 can form the indenture of any degree of depth on the position arbitrarily of the surperficial 12a of workpiece 12.

Each linear axis movable part is controlled as follows by being installed on the processing unit (plant) 10 inner or outside control device 24 that connect (being equipped with for inside in the illustrated example): at first, make on one side an end of the directions X of the second linear axis movable part 20 move to the other end along directions X speed (preferably constant speed) in accordance with regulations from the surface of the work 12a that answers indenture processing, the first linear axis movable part 18 is moved up and down off and on one side along the Z direction, form indenture with surperficial 12a at workpiece 12.Be that cutter 16 repeats following action: Yi Bian the timing that an edge directions X moves is in accordance with regulations carried out the incision of workpiece is moved along the decline of Z direction, after forming an indenture on the surface of the work 12a, rising along the Z direction immediately is that what is called is dodged action.Perhaps, cutter 16 also can stop moving along directions X during moving up and down along the Z direction.

Fig. 3 a～Fig. 3 c is illustrated in the detailed process that surface of the work 12a goes up the action that forms indenture.That is, shown in Fig. 3 a, the state that moves along the directions X constant speed from cutter 16, shown in Fig. 3 b, piezoelectric element 18a makes cutter 16 only cut given depth to workpiece 12 with a certain timing elongation, then, shown in Fig. 3 c, piezoelectric element 18a is retracted to original state so that cutter 16 is dodged.On surface of the work, form an indenture d by this a series of action.Usually till the second linear axis movable part 20 moves to the other end from the end on the directions X of surface of the work 12a during in repeatedly repeat this a series of action.In addition, in present specification, the second linear axis movable part 20 is called " interval " from time or its displacement that the end on the directions X of surface of the work 12a moves to till the other end.

If the release in an above-mentioned interval, then the 3rd linear axis movable part 22 makes the second linear axis movable part 20 move to set a distance (for example being the average diameter of indenture or on one side about 1.5～5 times) along the Y direction, and then the second linear axis movable part 20 carries out the action in an interval once more.By repeating this operation successively, can form the indenture that to process on the whole at surface of the work.

In order to dispose indenture brokenly on surface of the work 12a, control device 24 uses the waveform that obtains for irregular first signal or waveform with at least one side of the threshold value comparison process frequency of regulation and amplitude to generate the starting order of the first linear axis movable part 18.Though the waveform that is compared is so long as at least one side of frequency and amplitude is irregular signal or waveform gets final product, preferred concrete example is white noise waveform W1 as shown in Figure 4.White noise also can be well-knownly all to become the noise of same intensity in all frequencies, and the noise that can be generated by the normal distribution number.White noise also can be generated by control device 24, also can send on the control device 24 from miscellaneous equipment.By utilizing white noise, can easily obtain frequency and the irregular waveform of amplitude.Also have, comparison process can be undertaken by control device 24, also can use suitable comparator.

Fig. 5 is that explanation is the key diagram that indenture forms with the moving up and down of cutter 16 which kind of regularly utilizes white noise to carry out by the first linear axis movable part 18.As shown in the figure, at first the suitable threshold Y1 of set amplitude comparison first waveform is white noise waveform W1, obtains the second stair-stepping square wave C1.Relatively itself can be identical with general way.Then, the riser portions R1a～R1f with waveform C1 forms the instruction that moves up and down that instruction is the first linear axis movable part 18 as trigger impulse generation indenture.That is, white noise waveform W1 shown in Figure 4 is equivalent to part or all of an interval of the second linear axis movable part 20, and each riser portions of the waveform C1 after making comparisons is equivalent to form the timing or the position of indenture in an interval.In square wave C1, obviously, riser portions R1a～R1f forms with irregular time intervals, thereby these also are formed on the surface of the work with irregular interval for indenture that trigger impulse forms.Repeat the action in a this interval successively by on one side workpiece 12 being transferred on one side along the Y direction, as shown in Figure 6, can access the surperficial 12a that a lot of indenture d have disposed brokenly.

Because in above-mentioned a series of operation, needn't ask the coordinate of a lot of indentures singly, thereby each indenture processing required time shortens obviously than the occasion that needs setting coordinate, its result also can shorten the process time of whole workpiece significantly.In addition, though in Fig. 5, used the riser portions of square wave, also can make the both sides of the only falling portion of square wave or riser portions and falling portion certainly and then be trigger impulse according to the various timings of these calculating (for example the centre of riser portions and falling portion etc.) as the trigger impulse of indenture processing.

Utilize and compare the waveform that white noise obtains, not only need not to set coordinate and just can easily and realize irregular indenture configuration in the short time, also have the tangible benefit of the configuration density that can easily change indenture.For example, as shown in Figure 7, the threshold value by will compare the first white noise waveform W1 time is set at the threshold value Y2 also littler than the threshold value Y1 of Fig. 5, can access the second square wave C2 of the quantity of riser portions than the occasion many (in the illustrated example being 10) of Fig. 5.Thus, each interval number that formed indenture increases, and therefore, can more closely dispose indenture.

Conversely, as shown in Figure 8, the threshold value by will compare the first white noise waveform W1 time is set at the threshold value Y3 also bigger than the threshold value Y1 of Fig. 5, and the quantity that also can access riser portions is lacked the second square wave C3 of (being 3 in the illustrated example) than the occasion of Fig. 5.Thus, each interval number that formed indenture reduces, and therefore, can more sparsely dispose indenture.

Fig. 9 is that expression utilizes the figure that makes the example application that the configuration density of indenture changed according to Fig. 5, Fig. 7 and the illustrated consideration method of Fig. 8 in a surface of the work 12a.In the example of Fig. 9, past more lower threshold value is high more and the number of trigger impulse is reduced, and makes the configuration density of indenture d diminish.Like this, the simple process of the change by so-called threshold value can at random change the configuration density of indenture.Obviously, the configuration density of indenture can change in a surface of the work as shown in Figure 9, also can change on each workpiece.

Figure 10 is that expression is as the replacement example of the waveform W1 of Fig. 4, as the figure that is used to relate to the available waveform W2 of first waveform on the processing unit (plant) of the present invention.Obtain the first waveform W2 by additional (overlapping) average period and the little white noise waveform W2b (referring to Figure 11 b) of maximum amplitude ratio waveform W2a on the waveform W2a as zig-zag shown in Figure 11 a with roughly certain period T and amplitude B.

Figure 12 is that explanation is by using waveform W2 shown in Figure 10 can dispose the figure of indenture brokenly.Figure 13 is as the figure with reference to its comparative example of expression.In addition, the comparison process of being carried out among Figure 12 and Figure 13 is: the square wave that only strides across the moment generation Rack of threshold value (size of waveform and the magnitude relationship between the threshold value reverse) in zig-zag in each cycle at first.Be that square wave only produced once in each cycle.In this case, as the waveform that is used for comparison, using the underlapped as shown in figure 13 occasion that the zig-zag W2a of white noise is arranged same as before, with certain threshold value Y4 make comparisons and riser portions R5a, the R5b of the square wave C5 that obtains, R5c ... the interval become period T uniformly-spaced, with these occasions as trigger impulse, the indenture of being processed becomes the configuration of rule.

On the one hand, overlapping white noise waveform W2b on waveform W2a and the occasion of the waveform W2 (Figure 12) that obtains, under the situation of similarly making comparisons with Figure 13 with threshold value Y4, in interval getable square wave C4 riser portions R4a, R4b, R4c ... the interval do not become uniformly-spaced, for example become T+ α 1, T-α 2 ... the discrete value of (α n is a positive number).Thereby with these occasions as trigger impulse, the indenture of being processed on the workpiece becomes irregular arrangement.During the waveform that obtains when utilizing overlapping white noise on this zig-zag, therefore the indenture of each cycle processing in zig-zag, is suitable for the sum of regulation indenture and the occasion that these indentures will be disposed randomly.

Also have, the occasion of the waveform that obtains comparing overlapping white noise on the zig-zag by the amplitude of change white noise waveform, can change the degree of irregularity of the indenture configuration of being processed.For example, as shown in figure 14, if waveform W2 ' that will overlapping mean amplitude of tide obtains than the also big white noise waveform of the white noise waveform W2b of Figure 12 on waveform W2a uses as first waveform, the discreteness increasing when then the magnitude relationship between threshold value Y4 and the waveform values reverses in each cycle.Therefore, second waveform through relatively obtaining is that the discreteness at the interval of its each riser portions of square wave C6 will be bigger than the square wave C4 of Figure 12.That is, in interval getable square wave C6 riser portions R6a, R6b, R6c ... the interval for example become T+ β 1, T-β 2 ... the discrete value of (β n is a positive number), and the mean value of β n is also bigger than the mean value of α n.Therefore, in this case, can further strengthen the degree of irregularity of indenture configuration.

Figure 15 is that expression utilizes the figure that makes the example application that the configuration density of indenture changed according to the illustrated consideration method of Figure 10～Figure 14 in a surface of the work 12a.In the example of Figure 15, just overlap onto the amplitude of the white noise waveform on the same zig-zag all the more greatly by more down (Y direction), thereby more down the discreteness at the interval of all the more big riser portions so that indenture d dispose more brokenly.Like this, the simple process of the change by so-called amplitude of wave form can change the degree of irregularity of indenture configuration on the basis of the sum of having stipulated indenture.With regard to the degree of irregularity of indenture configuration, obviously, also can in a surface of the work, change as shown in Figure 15, also can on each workpiece, change.

In the first illustrated in the above embodiment, though can process indenture brokenly to second direction (directions X),, transfer to set a distance because workpiece is pressed on each interval for third direction (Y direction), therefore, workpiece can not be configured to irregular to the Y direction.So, even below just also can dispose indenture brokenly to the Y direction second embodiment describe.

Figure 16 is the summary construction diagram that expression relates to the processing unit (plant) 110 of second embodiment of the invention.In processing unit (plant) 110, for the corresponding inscape of each inscape of the processing unit (plant) 10 of first embodiment, represent on the reference marks of the inscape of processing unit (plant) 10, to have added 100 reference marks.The difference of second embodiment and first embodiment is further have in the process in an interval, can make the mechanism of workpiece 112 along Y direction micro-displacement.

As shown in figure 16, processing unit (plant) 110 have first block 126 of mounting workpiece 112 and on being fixed in bottom 114 in second block 128 that cooperates slidably with first block 126.As shown in the figure, second block 128 has groove 130, the first blocks 126 that extend along the Y direction and has the protuberance 132 that is fitted in the groove 130.

Also have, shown in Figure 17 a and Figure 17 b, processing unit (plant) 110 has makes first block 126 can be along the 4th linear axis movable part 134 of Y direction micro-displacement.The first linear axis movable part 18 of the concrete example of preferred the 4th linear axis movable part 134 and processing unit (plant) 10 is similar, has the piezoelectric element 134a that first block 126 is installed and constitutes to Y direction telescopically and towards the elastomer 134b as leaf spring of initial position to 126 reinforcings of first block.

Figure 18 is the i.e. figure of the 3rd waveform W3 of an example that expression is applied to the voltage waveform on the piezoelectric element 134a.Voltage waveform W3 from as above-mentioned white noise waveform, at least one side of frequency and amplitude is the waveform that irregular signal obtains.Since piezoelectric element with apply the proportional and displacement (stretching) of voltage, therefore, if the voltage of irregular waveform is applied on the above-mentioned piezoelectric element 134a as shown in figure 18, then piezoelectric element 134a only stretches and the proportional amount of above-mentioned voltage brokenly along the Y direction in the process in an interval.Because expanding-contracting action with this piezoelectric element 134a, first block 126 and workpiece 112 are also to Y direction micro-displacement, therefore, not only also on the Y direction, can access the indenture of configuration brokenly on the workpiece 112, thereby can further improve the scrambling of indenture configuration at directions X.

But this moment, if when cutter 116 is just in time cut on workpiece 112, move first block 126 (workpiece 112), then there is the destroyed and danger of distortion of the indenture shape of being processed along the Y direction.Therefore, during cutter 116 is just in time cut workpiece 112, preferably stop first block 126.What be used to realize this process applies voltage waveform as shown in figure 19.The epimere of Figure 19 represents to represent the square wave C7 of cutter 116 in incision and in dodging, square wave C7 value for V1 during expression cutter 116 be in the state of dodging, square wave C7 value for V2 during expression cutter 116 be in the interior state of incision workpiece 112.So, shown in the hypomere of Figure 19, by use apply voltage during square wave C7 value is as V2 with changing processing waveform W3 form apply voltage waveform W3 ', thereby cutter can make workpiece not along the displacement of Y direction during being in the incision workpiece.Therefore, can access to directions X and Y direction both sides dispose brokenly and each be shaped as uniform indenture.

According to relating to processing unit (plant) of the present invention, needn't ask the coordinate of a plurality of indentures just can carry out the indenture processing of irregular configuration singly.Therefore, each indenture processing required time can be cut down significantly, and process time on the whole can be shortened significantly.

Also have,, therefore, can form the indenture of irregular arrangement on the whole at the surface of the work that should process because the relative workpiece of cutter also can be transferred along third direction.

Owing to utilize the white noise waveform, therefore, can easily obtain frequency and amplitude and be at random waveform as first waveform.Also have, in this case, at random change by the configuration density that suitably changes threshold value, can make the indenture that has disposed brokenly.Specifically, not only can more thickly or dispose indenture on the whole thinly, can also more thickly dispose indenture, dispose indenture thinly in other parts in the part of surface of the work on the surface of the workpiece that should process.

On the one hand, can use as first waveform as zig-zag, to have the overlapping waveform of white noise on the periodic waveform, and then in each cycle of zig-zag, also can carry out once comparison by the threshold value of regulation.Thus, on the basis of the sum of having stipulated indenture, can dispose indenture to a certain extent randomly.Also have, in this case, the simple process of the change by the overlapping white noise amplitude of what is called can change the degree of irregularity of indenture configuration.

Have again since at cutter during workpiece moves along second direction, make the relative cutter of workpiece along the third direction micro-displacement, therefore, not only also can obtain the configuration of irregular indenture on the second direction but also on third direction.Also have, in this case,, during the cutter incision is in workpiece, be advisable with the micro-displacement that does not carry out the relative cutter of workpiece to third direction in order to prevent the warpage of each indenture.

Though with reference to the present invention will be described in order to describe the specific embodiment of selecting, obviously those skilled in the art can carry out numerous variations under the situation that does not exceed basic conception of the present invention and scope.

Claims (12)

1. a processing unit (plant) (10) has: the cutter (16) that is used for processing a plurality of indentures (d) of the degree of depth that possesses first direction (Z) on the surface of workpiece (12); Can make this cutter (16) relative to above-mentioned workpiece (12) above-mentioned first direction (Z) and with the second direction (X) of this first direction (Z) approximate vertical on the drive unit (18,20) that moves; And above-mentioned cutter (16) is moved on above-mentioned first direction (Z) to carry out the incision of above-mentioned workpiece (12) is moved and controlled with dodging action the control device (24) of above-mentioned drive unit (18,20) relative to above-mentioned workpiece (12), it is characterized in that,

Above-mentioned control device (24) is controlled above-mentioned drive unit (18,20), make make above-mentioned cutter (16) relative to above-mentioned workpiece (12) during moving on the above-mentioned second direction (X), as trigger impulse, above-mentioned cutter (16) is moved on above-mentioned first direction (Z) relative to above-mentioned workpiece (12) at least one side of the riser portions of second waveform that uses at least one side with the threshold value comparison frequency of regulation and amplitude to comprise first waveform of means of chaotic signals and obtain and falling portion.

2. processing unit (plant) according to claim 1 is characterized in that,

Constitute above-mentioned drive unit (18,20,22), make it possible to above-mentioned cutter (16) relative to above-mentioned workpiece (12) with the third direction (Y) of both sides' approximate vertical of above-mentioned first direction (Z) and second direction (X) on move.

3. processing unit (plant) according to claim 1 is characterized in that,

Above-mentioned first waveform is the white noise waveform, and above-mentioned control device (24) is controlled at least one side of the rising of above-mentioned second waveform and decline above-mentioned incision action and above-mentionedly dodged action as trigger impulse.

4. processing unit (plant) according to claim 3 is characterized in that,

Utilize the change of above-mentioned threshold value can change the configuration density of above-mentioned a plurality of indentures (d) of on the surface of above-mentioned workpiece (12), being processed.

5. processing unit (plant) according to claim 1 is characterized in that,

Above-mentioned first waveform is to have the overlapping waveform of white noise waveform on the periodic random waveform, and above-mentioned control device (24) will be in initial reverse of magnitude relationship between the above-mentioned value with the threshold value stipulated in each cycle of periodic random waveform and above-mentioned first waveform be controlled above-mentioned incision action and above-mentionedly dodged action as trigger impulse.

6. processing unit (plant) according to claim 5 is characterized in that,

It is above-mentioned that to have periodic random waveform be zig-zag.

7. processing unit (plant) according to claim 5 is characterized in that,

Utilize the change of the amplitude of above-mentioned white noise waveform can change the degree of irregularity of the configuration of above-mentioned a plurality of indentures (d) of on the surface of above-mentioned workpiece (12), being processed.

8. processing unit (plant) according to claim 1 is characterized in that,

Above-mentioned drive unit (18,20) has the piezoelectric element (18a) that above-mentioned cutter (16) is moved on above-mentioned first direction (Z) relative to above-mentioned workpiece (12).

9. processing unit (plant) according to claim 2 is characterized in that,

Constitute above-mentioned drive unit (18,20,22), make above-mentioned cutter (16) relative to above-mentioned workpiece (12) during moving on the above-mentioned second direction (X), can make the above-mentioned relatively cutter of above-mentioned workpiece (12) (16) comprise the proportional amount of value of the 3rd waveform of means of chaotic signals at least one side with third direction (Y) Shang the micro-displacement of both sides' approximate vertical of above-mentioned first direction (Z) and second direction (X) and frequency and amplitude.

10. processing unit (plant) according to claim 9 is characterized in that,

Constitute above-mentioned drive unit (18,20,22), make during above-mentioned cutter (16) is cut above-mentioned workpiece (12), do not carry out the micro-displacement of the above-mentioned relatively cutter of above-mentioned workpiece (12) (16) at above-mentioned third direction (Y).

11. processing unit (plant) according to claim 9 is characterized in that,

Above-mentioned the 3rd waveform is the white noise waveform.

12. processing unit (plant) according to claim 9 is characterized in that,

Above-mentioned drive unit (18,20,22) has makes the piezoelectric element (134a) of the above-mentioned relatively cutter of above-mentioned workpiece (12) (16) at above-mentioned third direction (Y) micro-displacement, and above-mentioned piezoelectric element (134a) is worked by the voltage that applies with above-mentioned the 3rd waveform.

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