CN100549812C - Light supply apparatus - Google Patents

Light supply apparatus Download PDF

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Publication number
CN100549812C
CN100549812C CNB200410077127XA CN200410077127A CN100549812C CN 100549812 C CN100549812 C CN 100549812C CN B200410077127X A CNB200410077127X A CN B200410077127XA CN 200410077127 A CN200410077127 A CN 200410077127A CN 100549812 C CN100549812 C CN 100549812C
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CN
China
Prior art keywords
catoptron
supply apparatus
discharge lamp
concave mirror
radiator
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Expired - Fee Related
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CNB200410077127XA
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Chinese (zh)
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CN1605931A (en
Inventor
岩林弘久
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Ushio Denki KK
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Ushio Denki KK
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  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Projection Apparatus (AREA)

Abstract

A kind of light supply apparatus is provided, and this light supply apparatus can be covered the visible light reflectance coating and not produce distortion when improving its physical strength.This light supply apparatus is made of the concave mirror (20) of high-pressure discharge lamp (10) and this high-pressure discharge lamp of encirclement (10), it is characterized in that concave mirror (20) is made of matrix, middle layer (30) and visible light reflecting layer (40), wherein matrix is to be made of copper, iron or their alloy; Middle layer (30) is arranged on the surface, inside of above-mentioned matrix, has heat absorption function and reflecting surface smoothing function; Visible light reflecting layer (40) is arranged on the above-mentioned middle layer, is made of the dielectric multilayer film.

Description

Light supply apparatus
Technical field
The present invention relates to a kind of light supply apparatus that constitutes by high-pressure discharge lamp and its concave mirror.Specially refer to employed light supply apparatus in the DLP projection arrangements such as (digital light processor) that has used LCD device, DMD (digital mirror device), and LCD device, DMD there is 0.25mg/mm to enclose in the luminotron 3Above mercury, mercury steam pressure becomes the extra-high-pressure mercury vapour lamp of UHV (ultra-high voltage) as light source when lighting a lamp.
Background technology
The illumination that the requirement of porjection type projection arrangement averages image on the screen of rectangle, and require that color rendering is highly arranged.Therefore, use the metal halide lamp of inclosure mercury, metal halide as light source.And along with development of times, all further now miniaturization of metal halide lamp, pointolite change, the extremely little product of distance has also occurred in actual applications between the electrode.
Under this background, new scheme has appearred recently: before using unworn higher mercury steam pressure, for example the lamp of 150 air pressure comes the substituted metal halide lamp.Can suppress the expansion of (compression) electric arc by improving the vapor pressure of mercury, the output that can further improve light simultaneously like this.
Such ultra-high pressure discharge lamp, such as, the spy open flat 2-148561 number, special flat open in No. the 2980882nd, 6-52830 number, special permission open.
On the other hand, employed light supply apparatus needs and will reflect efficiently along optical axis direction from the radiating light of illuminator in the projection arrangement, and shines in the irradiated area such as display panels.Light supply apparatus adopts short arc discharge lamp usually and is used for the light of above-mentioned short arc discharge lamp radiation is transformed to the concave mirror of directional light.
In the last few years, strong demand was appearred in the miniaturization of the DLP device that uses liquid crystal projection apparatus, DMD, corresponding with it, also require light supply apparatus to realize miniaturization.And,, also be a reason of requirement light supply apparatus miniaturization as the miniaturization of the display panels self of shone thing.
Light supply apparatus has very high requirement to following function.
At first, require catoptron itself to have higher intensity.This is because the interior pressure of discharge lamp when lighting a lamp is UHV (ultra-high voltage) (for example more than 150 air pressure), under the situation that discharge lamp contingency is damaged, make it not have influence on the outside of light supply apparatus.
Secondly, require catoptron and inner discharge lamp thereof to cool off well.Because the temperature of discharge lamp when lighting a lamp is very high, so it is also extremely high to be configured in the temperature of the catoptron around it.Therefore, need apply cooling air by outside in the heat conducting while of improving catoptron, so that its inner space is easy to cooling to catoptron.
The 3rd, require the dielectric multilayer film of the visible light reflection usefulness of catoptron inside surface lining to form smoothly, and do not distort, phenomenon such as concavo-convex.
Patent documentation 1: the spy opens flat 2-148561 number
Patent documentation 2: the spy opens flat 6-52830 number
Patent documentation 3: specially permit No. 2980882
Summary of the invention
The technical task that the present invention will solve is that a kind of light supply apparatus that can all satisfy above three requirements is provided.
In order to solve above-mentioned technical task, light supply apparatus of the present invention is made of the concave mirror of high-pressure discharge lamp and this high-pressure discharge lamp of encirclement, it is characterized in that: above-mentioned concave mirror is made of matrix, middle layer and visible light reflecting layer, and wherein matrix is to be made of copper, iron or their alloy; The middle layer is arranged on the surface, inside of above-mentioned matrix, has heat absorption function and reflecting surface smoothing function; Visible light reflecting layer is arranged on the above-mentioned middle layer, is made of the dielectric multilayer film.
Further, its feature also is: radiator is installed with almost being integral on the outer surface of concave mirror, and this radiator is made of aluminium or its alloy or magnesium or its alloy.
Further, its feature also is: high-pressure discharge lamp is enclosed 0.25mg/mm in discharge vessel 3Above mercury.
Further, its feature also is: be formed with heat radiator at radiator.
Further, its feature also is: the middle layer is made of heat-sink shell and vitreous layer, and wherein heat-sink shell contains the oxide of copper, and vitreous layer overlaps to form on above-mentioned heat-sink shell.
In the light supply apparatus among the present invention, the parent metal of catoptron is made of copper, iron or their alloy, thereby can improve its physical strength, strengthens breakage resistance, even the inside with catoptron constitutes the roughly structure of sealing simultaneously, also can cool off efficiently.
And, by being the middle layer of principal ingredient inner setting of catoptron with silicon dioxide, can be to the parent metal of catoptron with the visible light reflecting layer driving fit.Thereby, even adopt reflection characteristic be not very strong copper, iron or their alloy as parent metal, also can radiate sufficient visible light, thereby can apply to projection arrangement well.
Further, because the parent metal of catoptron uses high copper, iron or their alloy of fusing point, thereby the sintering processes in middle layer can be undertaken by high temperature.So, be not arranged on the matrix of catoptron with the middle layer smoothly, can being produced distortion, consequently, can equally with visible light reflecting layer be provided with.
And,, can provide the light supply apparatus of good cooling effect by the radiator that is made of aluminium etc. is installed in the outside of the concave mirror that constitutes by copper, iron or their alloy.Particularly,, can be close to driving fit, almost be integrally formed into concave mirror because radiator is made by casting die.And,, therefore can not destroy the character of concave mirror or film because the fusing point of the metal material of manufacturing radiator is lower than the fusing point of the material (copper, iron or their alloy) that constitutes concave mirror.
Description of drawings
Fig. 1 represents light supply apparatus of the present invention.
Fig. 2 represents the employed discharge lamp of light supply apparatus of the present invention.
Fig. 3 represents light supply apparatus of the present invention.
Embodiment
Fig. 1 represents to be used to illustrate the summary pie graph of light supply apparatus of the present invention.
Light supply apparatus is made of the concave mirror 20 of short arc super high voltage discharge lamp 10 (following also abbreviate as " discharge lamp ") and this discharge lamp 10 of encirclement, the electric arc direction of the optical axis L of concave mirror 20 and discharge lamp 10 is roughly consistent, and 20 first focus with the electric arc bright spot of discharge lamp 10 and concave mirror disposes consistently simultaneously.
The discharge vessel of discharge lamp 10 is made of illuminating part roughly spherical in shape 11 and the bar-shaped sealing 12a, the 12b that extend along the two ends of this illuminating part 11, disposes a pair of electrode of opposite in illuminating part 11.The sealing 12a of discharge lamp 10 is inserted into the opening at the top 21 of concave mirror 20, and the lamp socket on the top of sealing 12a (mouthful gold) is installed on the top 21 of concave mirror 20 by bonding agent 13.On the top of sealing 12a outstanding power supply lead-in wire 14a is arranged, it is electrically connected by electric power conductor 15a and not shown electric supply installation.In addition, also there is outstanding power supply lead-in wire 14b on the top of sealing 12b one side, and the opening of electric power conductor 15b by concave mirror 20 extends to outside and be connected with electric supply installation.
The outside at the top 21 of concave mirror 20 disposes support unit 16, and this support unit is made of materials such as potteries, concave mirror 20 by adhesive on support unit 16.
Concave mirror 20 is roughly to be bowl-shape elliptical condenser mirror on the whole, is made of top 21 and reflecting part 22 and front openings portion 23.The inside surface of reflecting part 22 is formed with middle layer 30 described later and visible light reflecting layer 40, in the light of the required visible wavelength area of reflection, other light, for example infrared ray etc. is penetrated, and is absorbed by reflecting part 22.
In the front openings portion 23, the front glass 24 of the light transmission that is made of pyrex etc. is installed by members of frame 25.
By the structure that inside that front glass 24 can concave mirror is set to almost seal is set.When therefore contingency discharge lamp 10 damages, can prevent separation of fragments.
In addition, front glass 24 is for preventing that separation of fragments from being effectively, but is not necessary.Particularly, have when cooling under the situation of higher requirement, also front glass may be set discharge lamp.As the outside of concave mirror, in the former configuration of catoptron under suitable with the front glass in fact situations such as parts, also need not this catoptron is installed front glass.
Further, under the situation that front glass 24 is installed, the inside of catoptron 20 is not made as the structure of sealing fully, the opening that can be provided for cooling off in certain part.This cooling can be formed on the members of frame 25 with opening, also can be as the otch setting on the part of reflecting part 22.
Concave mirror 20 can be made of copper (Cu), iron (Fe) or their alloy.Different with employed catoptron in the common projection arrangement, be not to constitute by pyrex, glass ceramics, stupalith.
And the inside surface of the reflecting part 22 of concave mirror 20 is coated with visible light reflecting layer 40, is provided with middle layer 30 between visible light reflecting layer 40 and reflecting part 22.
When the needs radiating effect and the iron phase ratio, preferably copper constitutes concave mirror.
Why concave mirror 20 usefulness copper, iron or their alloy are constituted, its first cause is in order to improve the intensity of catoptron.By concave mirror 20 is made of these metals, when the contingency discharge lamp is damaged, can prevent the linksystem breakage of catoptron self.And, fragment, the remains of discharge lamp can be remained on catoptron inside, prevent that simultaneously it from producing bad influence to other peripherals that are configured in the catoptron outside.Particularly, in the aforesaid closed type light supply apparatus that is provided with front glass, because the inner high temperature that forms easily of concave mirror,, very large meaning is arranged so, strengthen the countermeasure damaged by improving the physical strength of catoptron.
About aldary, for example can adopt copper-zinc (Cu-Zn) alloy, copper-nickel (Cu-Ni) alloy, copper-nickel-zinc (Cu-Ni-Zn) alloy.
About ferroalloy, for example can adopt stainless steel (austenite, ferrite, martensite), chrome-molybdenum steel etc.
In the general characteristic of copper, iron or their alloy, its reflection characteristic is outstanding, and directly to apply reflectance coating and implement tunicle be difficult.Therefore, people generally believe: perhaps can use in general illumination and other fields, but show in the employed projection arrangement as reflecting mirror material it is unaccommodated at image.
But, in the light supply apparatus of the present invention, by using the middle layer with heat absorption function and reflecting surface smoothing function described later, can solve the unaccommodated problem in the conventional art, and the visible light reflecting layer with good reflection characteristic very accurately can be covered.
That is to say, the light supply apparatus of the present application is the new invention of having adopted middle layer described later, also be to have improved reflecting mirror material in the lump simultaneously, so, diminished reflex characteristic and light output efficiency is maintained on the existing level not can improve simultaneously the physical strength of catoptron epoch-makingly.
The middle layer is made of the material that with silicon dioxide etc. is principal ingredient, is formed on the inside surface of concave mirror 20.The effect of bonding agent is played in this middle layer, with the parent metal of the catoptron implementing to be made of copper, iron or their alloy and the combination of visible light reflecting layer.
Particularly, the middle layer is made of heat-sink shell and vitreous layer, and wherein heat-sink shell directly contacts with catoptron, and vitreous layer is set at above the above-mentioned heat-sink shell.Heat-sink shell is made of the silica matter oxide of the metal oxide that contains the parent metal that constitutes catoptron, and this heat-sink shell has the function that absorbs heat ray, and vitreous layer is made of the layer that with silicon dioxide is Main Ingredients and Appearance, has the function that makes reflecting surface level and smooth.At this visible light reflecting layer 40 that formation is made of the dielectric multilayer film above vitreous layer.
The effect of heat-sink shell is, improves the cohesive with the parent metal that constitutes catoptron, though when parent metal because thermal distortion has caused expansion, contraction, bear its influence at formed each layer of catoptron inside surface, equally can projection or peel off yet.And, have the function that absorbs heat by containing metal oxide, so, can be by blowing cooling air to catoptron, and can carry out good cooling to this catoptron.
The effect of vitreous layer is, can consider to be used to apply visible light reflecting layer substrate parent metal kind and carry out the coating of visible light reflecting layer.
The thickness of the film in middle layer is such as being below the 1mm, below the preferred 500 μ m, and 200-300 μ m the best.
If the thickness in middle layer surpasses 1mm, can cause the danger that the crack in this middle layer, occurs owing to the difference of the material that constitutes the middle layer and the coefficient of thermal expansion of the metal that constitutes parent metal.
After the stoste with the middle layer is coated to the catoptron inside surface, can carry out heat treated and installation.Stoste is with silicon dioxide (SiO 2) be Main Ingredients and Appearance, constitute by potpourris such as feldspar, lime carbonate, sodium nitrate, cobalt oxide, nickel oxide.By with this potpourri fusion, curing, can generate vitreous frit, should be vitreous after frit pulverizes, its powder is adjusted among water etc.
Application job to the catoptron inside surface is undertaken by gunite, infusion process (dipping) etc.
The stoste that is coated to the catoptron inside surface is applied heat treated.Heating-up temperature is to make the parent metal of catoptron not produce the following temperature of temperature of distortion, and is different because the kind of corresponding described parent metal is different, but can be set at about 1083 ℃ of the fusing points of copper, aldary.Particularly, 800-900 ℃ of heating down.And, under the situation of iron or ferroalloy, also can be set at about 1535 ℃ of its fusing points, particularly, can be 1200-1400 ℃ of heating down.
The middle layer is by such high-temperature heating treatment, can be on the smooth interior surfaces ground of catoptron, do not produce and do not apply with distorting or be covered.
Heat time heating time is different because the kind of the parent metal of catoptron and thickness are different, can be 1-5 minute.
As the alternatives of basal body of reflector metal, also can consider to select for use aluminium here with better reflection characteristic.But the fusing point of aluminium is about 660 ℃, and is lower than very with copper, iron or their alloy phase.Therefore, when surpassing this temperature, the heating-up temperature in middle layer may cause the distortion of catoptron itself, so heating-up temperature is subjected to very large restriction.Just because of the restriction of this heating-up temperature, hinder catoptron to apply completely to the middle layer, cause distortion such as distortion.
The invention is characterized in that the parent metal material of catoptron adopts copper, iron or their alloy of high temperature resistant heat treated, do not distort and the middle layer that is shaped glossily thereby can not produce at the inside surface of catoptron.So, can when guaranteeing higher reflection characteristic,, can significantly improve the cooling effect of catoptron inside by the wind flow of catoptron external refrigeration by the high heat conductivity of copper, iron or their alloy.
Visible light reflecting layer is by for example silicon dioxide (SiO 2) layer and titania (TiO 2) mutual lamination constitute, integral thickness is that the dielectric multilayer film of 0.5-10 μ m constitutes, mainly have the light of infrared spectral range and ultraviolet range is seen through, simultaneously the function of reflect visible light.The thickness of each layer can be 100-200nm, for example can form 30 layers.
Aforesaid light supply apparatus of the present invention, at first, owing to constitute the parent metal of catoptron, thereby improve its physical strength and improve anti-damageability, also can cool off efficiently when making catoptron inside be roughly the structure of sealing simultaneously by copper, iron or their alloy.Secondly, by being the middle layer of Main Ingredients and Appearance, can make the parent metal closely combination of visible light reflecting layer with catoptron inner setting of catoptron with silicon dioxide.Even thereby adopt reflection characteristic not too high copper, iron or their alloy as parent metal, also can reflect enough visible lights, can be applicable to projection arrangement well.The 3rd, adopt higher copper, iron or their alloy of fusing point by parent metal to catoptron, the sintering processes in middle layer at high temperature can be carried out.So, can on the parent metal of catoptron, smoothly, not produce and distort formation middle layer, ground, consequently, equally can carry out the setting of visible light reflecting layer yet.
Fig. 2 represents the unitary construction of the employed high-pressure discharge lamp of light supply apparatus of the present invention.
Discharge lamp 10 has by what the discharge vessel that is made of quartz glass formed and roughly is spherical illuminating part 11, disposes anode 2 and negative electrode 3 in this illuminating part 11 in opposite directions.And be formed with the sealing 12 that extends from two ends of illuminating part 11 respectively, in these sealings 12, generally bury the conduction metal forming 4 that constitutes by molybdenum airtightly underground by collapsed seal.An end of metal forming 4 is connected with anode 2 or negative electrode 3, and another end of metal forming 4 is connected with outside lead 16.
The top of negative electrode 3 is wound with coil 31.This coil 31 is made of tungsten, twines securely or constitutes by fusion.Coil 31 is being lit a lamp when starting, and the concave-convex effect by the surface plays the effect of heat radiation as starting point (startup starting position) effect that starts the time by concave-convex surface effect and thermal capacity in the back that lights a lamp.
Enclose in the luminous component 11 mercury, rare gas and halogen gas are arranged.
For obtaining necessary visible wavelength, for example the ray of wavelength 360-780nm is enclosed 0.25mg/mm 3Above mercury.This enclosed volume is different along with the temperature conditions variation, but is more than 150 air pressure when lighting a lamp, and becomes very high vapor pressure.In addition, by enclose mercury morely, can produce that mercury vapour air pressure when lighting a lamp reaches that 200 air pressure are above, the discharge lamp of the above such high mercury vapour air pressure of 300 air pressure, mercury vapour air pressure is high more, just can realize the light source that adapts with projection arrangement more.
Enclose rare gas, for example the argon gas of about 13kPa can be used to improve the startability when lighting a lamp.
Halogen is enclosed with the form of compound with iodine, chlorine, bromine etc. and other metals such as mercury.The enclosed volume of halogen can be from 10 -6~10 -2μ mol/mm 3Scope in select, its effect is to have utilized halogen cycle, realizes long serviceable life, but the lamp that has high interior pressure of the such minimal type of discharge lamp among the present invention, the fundamental purpose of enclosing halogen is the damage that prevents discharge vessel, and it is transparent to prevent that it from losing.
Illustrate the correlation values of discharge lamp: the external diameter of luminous component is selected from the scope of Φ 6.0-15.0mm, for example is 9.5mm, and distance is selected from the scope of 0.5-2.0mm between the electrode, for example is 1.5mm, and the luminotron internal volume is from 40-300mm 3Scope select, for example be 75mm 3, the condition of lighting a lamp is from the tube wall 0.8-2.0W/mm that loads 2Scope select, for example be 1.5W/mm 2, rated voltage 80V, rated power 200W.
In addition, this discharge lamp is built in the projection arrangement of miniaturization, because the whole size of device is very little, but requires higher luminous quantity again simultaneously, so the requirement of the thermal conditions in the luminotron is very strict.
Discharge lamp is installed in projection arrangement, and the such equipment that is used for showing of overhead projector, and the radiating light with good color rendering can be provided.
Numerical value to concave mirror 20 exemplifies: internal capacity is from 10 3-10 6Mm 3Scope select, for example be 9 * 10 4Mm 3The thickness of the parent metal of reflecting part is selected from the scope of 1-3mm, for example is 2mm; The front openings diameter is selected from the scope of Φ 10-150mm, for example is 50mm; Axial length from front openings to the top front end is selected from the scope of 10-150mm, for example is 35mm.
The numerical example of front glass 24: thickness is selected from the scope of 1-5mm, for example is 3mm.
Fig. 3 has represented to install the light supply apparatus of radiator.
The radiator 50 that is made of aluminium is installed on the outer surface of concave mirror 20.
This radiator 50 is shaped by casting die, forms the inner surface configuration that the external surface shape with concave mirror 20 equates substantially, thereby makes both almost closely combinations.
Why radiator 50 is set, and is in order to cool off concave mirror 20 and inner discharge lamp 10 thereof better.
Further, in the outside of radiator 50, be formed with an a plurality of heat transmission heat radiator 51 that extend in parallel with discharge lamp 10.Heat transmission heat radiator 51 and radiator 50 one are made with casting die.That is to say that both closely link to make concave mirror 20 and radiator 50, almost be and form that radiator 50 and heat transmission heat radiator 51 form as one physically by casting die.
And radiator 50 is not limited to constructed of aluminium, also can use aluminium alloy, magnesium, magnesium alloy.And, the bearing of trend of heat radiator 51 can basis and the relations such as position of cold sink, peripherals adopt optimum form.
Why radiator 50 adopts the casting die manufacturing, is to form high-precision suitable shape because of the shape of the complexity of corresponding concave mirror 20.
And why radiator 50 is made of aluminium, aluminium alloy, magnesium, magnesium alloy, is because its fusing point and copper, iron and their alloy phase are lower frequently, makes these materials that constitute catoptron not produce melting deformation.
Below to the explanation of casting die manufacture method example.
Thereby casting die be meant will fusing motlten metal be injected into the method that manufactures a product in the mold with making such as sand.Apply bigger pressure when generally speaking, motlten metal is pressed in the mould.
In the present invention, copper, iron or their alloy formed above-mentioned middle layer as parent metal and in the catoptron inside surface after, with this mirror arrangement among mould.Should in melting furnace, form molten condition separately as the metals such as aluminium of radiator, and in mould, apply bigger pressure and make.Particularly the outside surface at catoptron passes through to inject motlten metal, and when taking out from mould after solidifying, catoptron and radiator almost are one.That is to say the catoptron that constitutes by copper, iron or their alloy and can be shaped as parts by the radiator that magnesium or its alloy constitute.
By above-mentioned casting die, can with have heat radiator complicated form radiator accurately, closely form one with the catoptron that constitutes by different metal material.And, also can carry out a large amount of production by fairly simple manufacture method, also can produce radiator frivolous, miniaturization.This advantage is highly suitable for the light supply apparatus of the intensive projection arrangement of device interior fittings.
And,, the middle layer is at high temperature formed, thereby can form the catoptron of better reflection characteristic because the fusing point of copper, iron or their alloy of the constituent material of catoptron is higher.On the other hand, radiator is by copper, iron or their alloy manufacturing, so be not easy to make owing to be difficult to form molten condition, but, make even the radiator of complicated form also can be integratedly fully with catoptron by with the casting die manufacturing of metal materials such as magnesium.
By the foregoing description the light a lamp discharge lamp of type of direct current is illustrated, but also is applicable to and exchanges the type discharge lamp of lighting a lamp.
Discharge lamp is not limited to adopt extra-high-pressure mercury vapour lamp, also can adopt metal halide mercury vapor lamp, xenon lamp, low-pressure discharge lamp, electrodeless discharge lamp etc.

Claims (3)

1, a kind of light supply apparatus is made of high-pressure discharge lamp and the concave mirror that surrounds this high-pressure discharge lamp, it is characterized in that:
Above-mentioned concave mirror is made of matrix, middle layer and visible light reflecting layer, and wherein matrix is to be made of copper or its alloy; The middle layer is made of heat-sink shell and vitreous layer, and wherein heat-sink shell contains the oxide of copper, and vitreous layer overlaps to form on above-mentioned heat-sink shell; Visible light reflecting layer is arranged on the above-mentioned middle layer, constitutes by the dielectric multilayer film,
The integrated radiator that is equipped with of the outer surface driving fit of above-mentioned concave mirror, this radiator is made of aluminium or its alloy.
2, light supply apparatus according to claim 1 is characterized in that: above-mentioned high-pressure discharge lamp is enclosed 0.25mg/mm in discharge vessel 3Above mercury.
3, light supply apparatus according to claim 1 is characterized in that: be formed with heat radiator at above-mentioned radiator.
CNB200410077127XA 2003-09-11 2004-09-10 Light supply apparatus Expired - Fee Related CN100549812C (en)

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JP2003319398A JP4300950B2 (en) 2003-09-11 2003-09-11 Light source device
JP319398/2003 2003-09-11

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CN100549812C true CN100549812C (en) 2009-10-14

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JP2007012777A (en) * 2005-06-29 2007-01-18 Ushio Inc Light irradiation apparatus
US10384238B2 (en) 2007-09-17 2019-08-20 Rave Llc Debris removal in high aspect structures
TW200934986A (en) * 2008-02-01 2009-08-16 jia-cheng Zhang Structure of lamp with low-temperature characteristics
JP5620598B1 (en) * 2014-03-10 2014-11-05 パナソニック株式会社 Light source unit and projector including the light source unit

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