CN100543472C - A kind of method for simulating complex environment in low earth orbit space and equipment therefor - Google Patents
A kind of method for simulating complex environment in low earth orbit space and equipment therefor Download PDFInfo
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- CN100543472C CN100543472C CN 200610047021 CN200610047021A CN100543472C CN 100543472 C CN100543472 C CN 100543472C CN 200610047021 CN200610047021 CN 200610047021 CN 200610047021 A CN200610047021 A CN 200610047021A CN 100543472 C CN100543472 C CN 100543472C
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Abstract
The present invention discloses a kind of method for simulating complex environment in low earth orbit space and equipment therefor.Under vacuum environment, produce highdensity oxygen plasma by microwave electron cyclotron resonance method coupling oxygen discharge, plasma that is produced and electronegative metallic target collision neutrality turn to oxygen atom, use the ultraviolet source irradiation sample stage, by heating arrangement and cooling device control sample stage temperature, thereby produce elemental oxygen+ultraviolet+temperature cycles three factor combinational environments; Specifically: vacuum chamber vacuumized carry out vacuum and give vent to anger in advance; Aerating oxygen then; By the oxygen plasma that magnetic field and microwave coupling oxygen discharge produce, oxygen plasma clashes into the target that applies negative bias under magnetically confined, change oxygen plasma into neutral oxygen atom, produces environment in the sample stage position.Adopt the present invention can simulate elemental oxygen+temperature cycles, ultraviolet+temperature cycles, elemental oxygen+ultraviolet+space compound environment such as temperature cycles.
Description
Technical field
The invention belongs to the particular surroundings analogue technique, specifically is a kind of simulation near-earth orbit space (low earthorbit, LEO) combinational environment method and equipment therefor.
Background technology
Since the LEO steric effect was found, various LEO environment simulators emerged in an endless stream.On the one hand, verified the existence of LEO space environment effect; On the other hand, open up the new way of research LEO steric effect, significantly reduced the spending of steric effect research expenditure.
The LEO factor of environmental comprise elemental oxygen (atomic oxygen, AO), ultraviolet, temperature cycles, micrometeorite etc.Wherein elemental oxygen is a topmost factor in the LEO environment.Recent years, elemental oxygen+ultraviolet irradiation complex effect is proved to be certain existence.The research of complex effect comes into one's own.Since combinational environment can be more real the actual environment state of reflection LEO, most of researchists come up the research that the emphasis of research has been put into combinational environment.The key of research near earth space environment complex effect is to simulate the ground simulation environment that matches with space environment.Be subjected to orbit altitude, the influence of factors such as variation, solar cycle round the clock, the maximal value of the ultraviolet radiation intensity in the space environment is three times of minimum value approximately, and the temperature cycles wide ranges reaches-150～200 ℃.
Early stage ground simulation method utilizes oxonium ion to replace oxygen atom to carry out oxidation test, is not inconsistent with the LEO environment.Present ground simulation method has solved simulation and has produced the problem of atomic oxygen environment, and begins to develop towards the direction of analog composite environment.The main path of simulation is: indoor by ion gun and oxygen effect generation ion beam at vacuum chamber, reach suitable speed by the static accelerated ion beam, the method of passing through charge exchange or colliding with electronegative sheet metal makes oxygen ion beam change neutral oxygen atom bundle into again.Wherein, ionogenic type comprises that thermal plasma source, low-temperature plasma source, electron beam desorb oxide source, LASER HEATING is decomposed atomic beam source etc.
Though present ground simulation method has had than much progress with comparing in the past, still has certain problem: at first, can only simulate the environment of one or both factors, as elemental oxygen, elemental oxygen+ultraviolet etc.; Secondly, (AO flux) is lower for the atomic oxygen beam circulation that various ground simulation methods obtain, and is generally 10
14-10
15Atomscm
-2s
-1, than required atomic oxygen beam circulation 10
16Atomscm
-2s
-1Low 1-2 order of magnitude; Once more, the elemental oxygen energy of generation is lower, and the oxygen atom energy is generally less than 1eV, i.e. the energy of atomic thermal motion does not reach energy--the 5eV of elemental oxygen in the LEO environment.In general, the ground simulation of terrestrial space combinational environment research just just begins.From the degree of depth of research, the conclusion of complex effect research mostly is qualitatively, and non-quantitation.People still are in the starting stage to the research of space environment complex effect.Simulating the combinational environment close with the LEO environment is the key of research LEO environmental effect.
Summary of the invention
The object of the present invention is to provide a kind of simulation LEO combinational environment method and equipment therefor, this method can simulate elemental oxygen+temperature cycles, ultraviolet+temperature cycles, elemental oxygen+ultraviolet+space compound environment such as temperature cycles.
Technical scheme of the present invention: produce highdensity oxygen plasma by microwave electron cyclotron resonance method coupling oxygen discharge under vacuum environment, plasma that is produced and electronegative metallic target collision neutrality turn to oxygen atom, use the oxygen atom oxidised samples; Specifically: vacuum chamber is evacuated to 1.2 * 10
-3～1.2 * 10
-4Pa carries out vacuum and gives vent to anger in advance; Aerating oxygen is regulated oxygen flow and evacuation rate and is made the working vacuum degree 1.5 * 10 then
-2～3 * 10
-1Pa; By the oxygen plasma that magnetic field and microwave coupling oxygen discharge produce, oxygen plasma clashes into the target that applies negative bias under magnetically confined, change oxygen plasma into neutral oxygen atom, produces environment in the sample stage position; Wherein: described microwave power is 500～2000W, and microwave frequency is 2.45GHz; The temperature range of sample stage is-150 ℃～200 ℃; Oxygen flow is 0.5-5.0SCCM; Magnetic field intensity is 0.7～2.0mT;
Described sample stage is carried out circulating temperature control, be specially: adopt logical cooled with liquid nitrogen method to regulate temperature between below the room temperature, more than or equal to-150 ℃, regulate temperature in more than or equal between the room temperature to 200 ℃ with type of heating, liquid nitrogen pressure is 0.01～0.075MPa, output power 30W～the 210W of heating, regulating the sample stage temperature, is a cycle period with-150～200 ℃, 200 ℃～-150 ℃ continuous temperature variation; After changing oxygen plasma into neutral oxygen atom, add ultraviolet source, the irradiation sample; The light source of ultraviolet light and the distance between sample stage are 5～9cm; The negative bias that applies is 15-30V on the target;
Equipment therefor comprises vacuum chamber, target, ultraviolet source, magnetic field and sample stage, wherein vacuum chamber middle part be provided with under sample stage be the target of 45, link to each other with microwave source, link to each other with oxygen generator by waveguide on the vacuum chamber sidewall by pipeline, magnetic coil is located on the sidewall of vacuum chamber, and the magnetic line of force that is produced passes the target surface setting; Ultraviolet source is installed in the sample stage top, is 45 with horizontal line; Sample stage is a hollow cylindrical, and its middle part connects cooling device, and sidewall is provided with heating arrangement; Described target is metal molybdenum sheet and stainless steel stacked structure; Dc power anode connects the housing of vacuum chamber, and negative pole connects target;
Described heating arrangement is a resistance wire, and cooling device is the liquid nitrogen generator; Described sample stage links to each other with motor by screw rod; Vacuum chamber integral body is cross.
The principle of the invention is as follows:
The present invention produces highdensity oxygen plasma by microwave electron cyclotron resonance (ECR) technology coupling oxygen discharge under vacuum environment, then plasma of Chan Shenging and electronegative metallic target collision neutrality turns to oxygen atom, simulates elemental oxygen among the LEO with this; The ultraviolet irradiation that is produced by deuterium lamp is simulated among the LEO ultraviolet radiation from the sun; By the temperature of heating of platinum resistance wire and cooled with liquid nitrogen control sample stage, can regulate working vacuum degree and atomic oxygen beam circulation by the flow and the speed of exhaust of control oxygen; Can obtain suitable atomic oxygen beam circulation and ultraviolet irradiation intensity by the position of regulating sample stage, the speed and the heating power that feed liquid nitrogen by control are regulated the cold cycling process.Use the present invention can simulate the multiple combinational environment close with the LEO environment.
Advantage of the present invention is:
1, the present invention can simulate three kinds of environmental factors among the LEO, elemental oxygen, ultraviolet and temperature cycles simultaneously.Wherein simulate high atomic oxygen beam circulation and the temperature cycles curve close with LEO.Solar radiation among ultraviolet irradiation and the LEO has the property of analogy.
2, decapacitation is simulated outside elemental oxygen, ultraviolet irradiation and three kinds of space factors of temperature cycles simultaneously, and the present invention can also simulate elemental oxygen+ultraviolet, elemental oxygen+thermal cycle, and ultraviolet+thermal cycle combinational environment has both the characteristics in face mould near-ring border usually.
3, adopt the available atomic oxygen beam circulation of the present invention higher, be 1.1 * 10 to the maximum
17Atomscm
-2s
-1The oxygen atom energy is adjustable, can be controlled at about 5eV.
4, technology is easy to realize that simple to operate, environmental factor can be regulated.Compare with general analogue technique, the present invention just can obtain different simulated environments by control sample stage position.
5, the present invention has potential use value in research LEO space environment aspect the etching effect of material.
Description of drawings
Fig. 1 is the structural representation of an embodiment equipment therefor of the inventive method.
Fig. 2 a is the mass loss curve of the embodiment of the invention 1 sample stage polyimide during apart from the target diverse location.
Fig. 2 b is the surface electronic scanned photograph after the embodiment of the invention 1 polyimide corrodes 1h.
The temperature cycles curve of Fig. 3 for obtaining in the embodiment of the invention 4 simulated environments.
Fig. 4 is the radiation spectrum of the ultraviolet deuterium lamp that adopts in the embodiment of the invention 2 simulated environments.
Fig. 5 is the embodiment of the invention 5 magnetron sputtering SiO
2Coating obtains after the oxidation in elemental oxygen+temperature cycles combinational environment contains micro-crack surface electronic scanned photograph (amplifying 1000 times).
Fig. 6 a is the surface atom power microphoto that obtains after polyimide exposes in the atomic oxygen environment in the prior art.
Fig. 6 b is the surface atom power microphoto that obtains after the one embodiment of the invention polyimide exposes in elemental oxygen+ultraviolet+temperature cycles combinational environment.
Fig. 7 a is that the polyimide of the embodiment of the invention 1 is 3 * 10
16Atomscm
-2s
-1Expose 1 hour with the detected volatility gas-phase product of mass spectrometer in the atomic oxygen environment.
Fig. 7 b is that the polyimide of the embodiment of the invention 1 is 5 * 10
16Atomscm
-2s
-1The mass loss curve that obtains with the QCM (Quartz Crystal Microbalance) in site measurement in the atomic oxygen environment process-exposed.
Embodiment
Below by embodiment in detail the present invention is described in detail.
As shown in Figure 1, the inventive method equipment therefor is made up of vacuum chamber 2, target 1, magnetic coil and sample stage 7, and wherein vacuum chamber 2 integral body are cross, the middle part be provided with under sample stage 7 be the target of 45; The vacuum chamber sidewall links to each other with microwave source, links to each other with oxygen generator by pipeline by quartz window 9, waveguide; Magnetic coil is located on the sidewall of vacuum chamber 2, and the magnetic line of force of its generation passes 1 setting of target, and magnetic field is horizontal magnetic field; Described target 1 is metal molybdenum sheet and stainless steel stacked structure, the housing of the positive termination vacuum chamber 2 of the direct supply that a voltage is adjustable, and negative terminal connects target 1.Ultraviolet source 3 is installed in sample stage 7 tops, is 45 (present embodiment is not opened ultraviolet source 3) with horizontal line; Described sample stage 7 links to each other with motor 6 by screw rod 8, can move up and down.
During work: vacuum chamber adopts mechanical pump, molecular pump is compound vacuumizes, receive the microwave and the oxygen of microwave generator, oxygen generator emission, produce highdensity oxygen plasma by microwave coupling oxygen discharge, the plasma that produces collides with the target that plays the neutralisation function under magnetically confined, thereby is turned to highdensity elemental oxygen line by neutrality.
Method: under vacuum environment, produce highdensity oxygen plasma by microwave electron cyclotron resonance (ECR) method coupling oxygen discharge, plasma that is produced and electronegative metallic target collision neutrality turn to oxygen atom, produce atomic oxygen environment, use the oxygen atom oxidised samples; Concrete operations are as follows: will through the acetone ultrasonic cleaning, be of a size of 30 * 30 * 0.5mm
3Polyimide be put on the sample stage, by mechanical pump with molecular pump is compound that vacuum chamber is evacuated to 1.2 * 10
-3The vacuum of carrying out 30 minutes is given vent to anger in advance, and (final vacuum of present embodiment is 6.6 * 10
-4～6.6 * 10
-5Pa).Be 1000W at microwave power subsequently, microwave frequency is 2.45GHz; Oxygen flow is under the condition of 3.0SCCM (standard cubic centimeter per minute), 600 liters/second of evacuation rate, and the working vacuum degree is 4.5 * 10
-2Pa; Regulate the sample stage temperature and be 45 ℃, with the distance with target of neutralisation function be 3cm, 9cm, 11cm, 13cm, 15cm, 17cm and 25cm, connect magnetic coil (generation magnetic field) and open microwave source (microwave is provided), and on target, apply the 15V negative bias, oxygen plasma by magnetic field (magnetic field intensity is 0.95mT) and the generation of microwave coupling oxygen discharge, oxygen plasma clashes into the target that applies negative bias under magnetically confined, change oxygen plasma into neutral oxygen atom, produce the oxygen atom stream of 5eV this moment in the vacuum chamber.The elemental oxygen that the sample polyimide is carried out 1h, 2h, 3h exposes.
Its result is shown in Fig. 2 a.The atomic oxygen beam circulation that produces apart from target 3cm, 9cm, 11cm, 13cm, 15cm, 17cm and 25cm place is for being respectively 11,4.8,2.9,1.5,1.2,0.67 * 10
16Atomscm
-2s
-1The atomic oxygen beam flow diameter is greater than 80mm.Its electron scanning photo and atomic force micrograph are respectively shown in Fig. 2 b and Fig. 6 a.Mass Spectrometer Method and in site measurement result are referring to Fig. 7 a, Fig. 7 b.Fig. 2 b shows that the surface that exposes the back polyimide is the carpet-like pattern.The result of this and LEO environment relatively coincide.It is more real that above presentation of results the present invention obtains simulated environment, and the atomic oxygen beam circulation that obtains has wide variation range.
The simulated environment that the present invention obtains can be monitored gas componant in real time with gaseous mass analyzer.Can also unite use with QCM (Quartz Crystal Microbalance), process-exposed is carried out in site measurement.Mass spectrometric useful vacuum degree is 10
-5～10
-1Pa, accuracy of detection is 1,000,000/; The measuring accuracy of in site measurement is 10
-9G.
Difference from Example 1 is:
Device (referring to Fig. 1): open ultraviolet source 3 (present embodiment adopts the ultraviolet deuterium lamp); Sample stage 7 is a hollow cylindrical, and its middle part is connected with liquid nitrogen (establish liquid nitrogen and feed mouth 5), and sidewall is provided with heating arrangement 4 (platinum resistance wire); Sample stage is simultaneously as small-sized temperature control platform.
Method: the SiO that plating one layer thickness on the polyimide is about 1 μ m with magnetically controlled sputter method
2Film, and this sample is put on the sample stage, vacuum chamber is evacuated to 1.2 * 10
-4Carrying out 30 minutes vacuum gives vent to anger in advance.Be 2000W at microwave power subsequently, oxygen flow is under the condition of 5SCCM, regulate sample stage to apart from target 9cm, locate, open magnetic field (intensity is 0.7mT) and microwave source, and on target, apply the 30V negative bias, produce the oxygen atom stream of 15eV this moment in the vacuum chamber.Described sample stage adopts temperature control, be specially: adopt logical liquid nitrogen method to regulate temperature between below the room temperature, more than or equal to-150 ℃, regulate temperature in more than or equal between the room temperature to 200 ℃ with type of heating, liquid nitrogen pressure is 0.075MPa, the output power 210W of heating, regulating the sample stage temperature, is a cycle period with-150 ℃～200 ℃, 200 ℃～-150 ℃ continuous temperature variation; Under elemental oxygen+temperature cycles condition, sample is exposed.Present embodiment working vacuum degree is 3.0 * 10
-1Pa.
Difference from Example 2 is:
To be of a size of 30 * 30 * 0.5mm after the acetone ultrasonic cleaning
3Polyimide be put on the sample stage, vacuum chamber is evacuated to 1.2 * 10
-4Carrying out 60 minutes vacuum gives vent to anger in advance.Be 500W at microwave power subsequently, oxygen flow is under the condition of 0.5SCCM, regulate sample stage to apart from target 9cm, locate, open magnetic field (the adjusting magnetic field intensity is 0.9mT) and microwave source, and on target, apply the 20V negative bias, produce the oxygen atom stream of 6.5eV this moment in the vacuum chamber.Regulating and feeding liquid nitrogen pressure is 0.01MPa, and heating power is 30W; Open ultraviolet source (ultraviolet deuterium lamp, wavelength are 115-400nm) power supply, the irradiation sample stage, the distance of regulating ultraviolet source and sample stage is 7cm, radiation intensity is about 5 sun numbers; Under elemental oxygen+ultraviolet+temperature cycles condition, sample is exposed.Present embodiment working vacuum degree is 1.5 * 10
-2Pa.
SiO
2Electron scanning photo after film exposes as shown in Figure 5.Atomic force photo after polyimide exposes is shown in Fig. 6 b.SiO
2The film surface has produced micro-crack, and this is that general inorganic coating exposes the total surface characteristics in back at LEO, is to cause owing to coating is different with the thermal expansivity of matrix.
Difference from Example 1 is: do not open microwave source, by mechanical pump with molecular pump is compound that vacuum chamber is evacuated to 5 * 10
-4Pa.Oxygen flow is 1.0SCCM (a standard cubic centimeter per minute), and magnetic field intensity is 2.0mT, is 0.04MPa feeding liquid nitrogen pressure, and heating power is the temperature cycles curve of working sample platform under the condition of 100W.Under this vacuum tightness, open ultraviolet source, measure spectrum apart from ultraviolet source 5cm, 9cm place.
Temperature cycles curve result as shown in Figure 3.As can be seen from the figure finish a temperature cycles and need 105min approximately.Apart from the radiation spectrum at ultraviolet source 5cm place as shown in Figure 4.Consider swept area and homogeneity etc., the radiation intensity of ultraviolet source is 7 sun numbers.
Open ultraviolet source on embodiment 1 basis, simulate the combinational environment that elemental oxygen adds ultraviolet, the result approaches three factor combinational environments among the embodiment 3.
What deserves to be explained is: the atomic force photo after polyimide among embodiment 1 and the embodiment 3 is exposed in elemental oxygen and elemental oxygen+ultraviolet+temperature cycles, Fig. 6 a is the surface topography atomic force photo that atomic oxygen environment exposes the back polyimide, Fig. 6 b is the surface topography atomic force photo that exposes the back polyimide under elemental oxygen+ultraviolet+temperature cycles combinational environment, two figure contrast as can be seen, surface topography after combinational environment exposes down is more coarse, the complex effect that elemental oxygen+ultraviolet+temperature cycles is described exists, and the present invention can simulate the complex effect of three kinds of factors among the LEO.
Claims (8)
1. method for simulating complex environment in low earth orbit space, comprise: under vacuum environment, produce highdensity oxygen plasma by microwave electron cyclotron resonance method coupling oxygen discharge, plasma that is produced and electronegative metallic target collision neutrality turn to oxygen atom, use the oxygen atom oxidised samples; Specifically: vacuum chamber is evacuated to 1.2 * 10
-3～1.2 * 10
-4Pa carries out vacuum and gives vent to anger in advance; Aerating oxygen is regulated oxygen flow and evacuation rate and is made the working vacuum degree 1.5 * 10 then
-2～3 * 10
-1Pa; Produce oxygen plasma by microwave electron cyclotron resonance method coupling oxygen discharge, oxygen plasma clashes into the target that applies negative bias under magnetically confined, change oxygen plasma into neutral oxygen atom, produces environment in the sample stage position; Wherein: described microwave power is 500～2000W, and microwave frequency is 2.45GHz; The temperature range of sample stage is-150 ℃～200 ℃; Oxygen flow is 0.5-5.0SCCM; Magnetic field intensity is 0.7～2.0mT, it is characterized in that: described sample stage is carried out circulating temperature control, be specially: adopt logical cooled with liquid nitrogen method to regulate temperature between below the room temperature, more than or equal to-150 ℃, regulate temperature in more than or equal between the room temperature to 200 ℃ with type of heating, liquid nitrogen pressure is 0.01～0.075MPa, output power 30W～the 210W of heating regulates the sample stage temperature, is a cycle period with-150～200 ℃, 200 ℃～-150 ℃ continuous temperature variation.
2. according to the described method of claim 1, it is characterized in that: after changing oxygen plasma into neutral oxygen atom, add ultraviolet source, the irradiation sample.
3. according to the described method of claim 2, it is characterized in that: the light source of ultraviolet light and the distance between sample stage are 5～9cm.
4. according to the described method of one of claim 1～3, it is characterized in that: apply negative bias 15-30V on the target.
5. equipment therefor according to the described method of claim 1, it is characterized in that: comprise vacuum chamber, target, ultraviolet source, magnetic field and sample stage, wherein vacuum chamber middle part be provided with under sample stage be the target of 45, link to each other with microwave source, link to each other with oxygen generator by waveguide on the vacuum chamber sidewall by pipeline, magnetic coil is located on the sidewall of vacuum chamber, and the magnetic line of force that is produced passes the target surface setting; Ultraviolet source is installed in the sample stage top, is 45 with horizontal line; Sample stage is a hollow cylindrical, and its middle part connects cooling device, and sidewall is provided with heating arrangement; Described target is metal molybdenum sheet and stainless steel stacked structure; Dc power anode connects the housing of vacuum chamber, and negative pole connects target.
6. according to the equipment therefor of the described method of claim 5, it is characterized in that: described heating arrangement is a resistance wire, and cooling device is the liquid nitrogen generator.
7. according to the equipment therefor of the described method of claim 5, it is characterized in that: described sample stage links to each other with motor by screw rod.
8. according to the equipment therefor of the described method of claim 5, it is characterized in that: vacuum chamber integral body is cross.
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| CN102085920B (en) * | 2009-12-04 | 2013-06-19 | 北京卫星环境工程研究所 | Atomic oxygen, ultraviolet and electronic integrated environment ground simulation system of low earth orbit space |
| CN102116732B (en) * | 2009-12-31 | 2013-03-20 | 北京卫星环境工程研究所 | Large-irradiation-area atomic oxygen beam simulation system |
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| CN102494917A (en) * | 2011-12-13 | 2012-06-13 | 江苏达胜加速器制造有限公司 | Space environment radiation simulation device |
| CN102706791A (en) * | 2012-05-10 | 2012-10-03 | 清华大学 | Stimulated device for small low earth orbit space environment |
| DE102012103777A1 (en) * | 2012-05-22 | 2013-11-28 | Reinhausen Plasma Gmbh | METHOD AND DEVICE FOR RESISTANCE TESTING OF A MATERIAL |
| CN102829947A (en) * | 2012-08-17 | 2012-12-19 | 中国航天空气动力技术研究院 | Simulation method based on spatial rarefied flow environment |
| CN102830315B (en) * | 2012-09-05 | 2015-07-08 | 清华大学 | Device and method for simulating electronic component failure in aerospace environment |
| CN102967688A (en) * | 2012-11-12 | 2013-03-13 | 中国航天科技集团公司第五研究院第五一〇研究所 | Method for analyzing failure of electric conductive black polyimide film in spatial environment |
| CN103415134A (en) * | 2013-07-18 | 2013-11-27 | 北京东方计量测试研究所 | Double-source ECR plasma source device |
| CN104375161B (en) * | 2014-11-05 | 2017-02-15 | 北京卫星环境工程研究所 | atomic oxygen beam energy testing system |
| CN106553775B (en) * | 2015-09-28 | 2024-02-23 | 深圳光启空间技术有限公司 | Environmental simulation test box and environmental simulation method thereof |
| CN109142924A (en) * | 2015-10-01 | 2019-01-04 | 景祝强 | A kind of charge and discharge analogy method induced based on electronics |
| CN107024496A (en) * | 2017-03-29 | 2017-08-08 | 北京卫星环境工程研究所 | Spacecraft Material elemental oxygen and heat cycle effect test method |
| CN109580884A (en) * | 2018-12-18 | 2019-04-05 | 哈尔滨工业大学 | The multifactor environmental grounds simulation in space and in-situ study test cabin device |
| CN115228514A (en) * | 2022-08-25 | 2022-10-25 | 中国科学院地球化学研究所 | Planetary high-low temperature vacuum environment simulation experiment system |
| CN116075033B (en) * | 2023-03-17 | 2023-09-26 | 佛山巧鸾科技有限公司 | Method for generating oxygen atom beam pulse and application thereof |
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