CN100540203C - Laser oscillation apparatus - Google Patents
Laser oscillation apparatus Download PDFInfo
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- CN100540203C CN100540203C CNB2006101630634A CN200610163063A CN100540203C CN 100540203 C CN100540203 C CN 100540203C CN B2006101630634 A CNB2006101630634 A CN B2006101630634A CN 200610163063 A CN200610163063 A CN 200610163063A CN 100540203 C CN100540203 C CN 100540203C
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
- G02B7/1815—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation with cooling or heating systems
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0071—Beam steering, e.g. whereby a mirror outside the cavity is present to change the beam direction
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention provides the laser oscillation apparatus of the distortion of the speculum supporting member that a kind of thermal deformation that has suppressed laser oscillator causes.This laser oscillation apparatus has casing, has lasing laser oscillator in the inside of this casing, the 1st speculum of the laser that guiding is produced by this laser oscillator, and dispose, further guide the 2nd speculum abreast from the laser of the 1st speculum with the 1st speculum; The 1st speculum and the 2nd speculum all are installed on shared speculum supporting member, and the casing of the relative laser oscillator of this speculum supporting member is mechanically engaged by only 3 fixed components that are positioned at leg-of-mutton each summit.
Description
Technical field
The present invention relates to a kind of laser oscillation apparatus that is used for laser machine etc.
Background technology
In the laser machine of machined object being processed by laser beam, use laser oscillation apparatus with laser oscillator and a plurality of speculums.Laser oscillator has casing, produces laser in the inside of this casing.This laser is sent to by a plurality of speculums as laser beam and adds the Ministry of worker to what machined object was processed.
Laser machine for example is disclosed in Fig. 1 of TOHKEMY 2002-316291 communique (patent documentation 1).In the laser oscillation apparatus of the laser machine that is disclosed in this patent documentation 1, be folded to speculum from the laser beam of the straight line polarization of laser oscillator output by the 1st and carry out circular polarization, this is subjected to circularly polarized laser beam and is folded to speculum (convex mirror) and the 3rd by the 2nd and is folded to speculum (concave mirror) expanded light beam diameter, be corrected into substantially parallel light beam simultaneously, pass out to and add the Ministry of worker.Generally speaking, comprise the rectilinearly polarized light composition from the laser of laser oscillator output, the rectilinearly polarized light composition of this laser makes absorptivity relative machined object, laser different on machine direction, and crudy produces anisotropy.For this reason, make the laser of exporting from laser oscillator become circularly polarized light.The 1st of patent documentation 1 is folded to the laser beam transformation that speculum constitutes rectilinearly polarized light and becomes circular polarization circular polarization of light speculum.
In addition, in Fig. 1 of Japanese kokai publication hei 11-163442 communique (patent documentation 2), the YAG laser oscillation apparatus that is used for laser machine is disclosed.In this YAG laser oscillation apparatus, configuration fundamental oscillation portion, second harmonic generating unit, triple-frequency harmonics generating unit, and 2 dichroscopes of the light of reflection specific wavelength on shared base plate.The fundamental oscillation portion of this patent documentation 2 constitutes laser oscillator.
[patent documentation 1] TOHKEMY 2002-316291 communique, particularly Fig. 1
[patent documentation 2] Japanese kokai publication hei 11-163442 communique, particularly Fig. 1
In the laser oscillation apparatus of the use circular polarization speculum that is disclosed in patent documentation 1, the circular polarization speculum is installed on the casing of laser oscillator.For this reason, along with the thermal deformation of the casing of laser oscillator, the angle of circular polarization speculum changes, and produces deviation at laser axis.Longer from the circular polarization speculum to the distance that adds the Ministry of worker, be generally more than the 10m, the very little angle of circular polarization speculum changes, and all can make Working position produce big variation.In addition, even in the laser oscillation apparatus of 2 dichroscopes of use that are disclosed in patent documentation 2, each dichroscope also is installed on the shared base plate.For this reason, the heat of laser oscillator makes the base plate distortion, and the collimation of each dichroscope is destroyed, and the optical axis of laser produces deviation, exists Working position to produce the problem of deviation.
Summary of the invention
The invention provides a kind of laser oscillation apparatus that improves the optical axis deviation of above such laser.
Laser oscillation apparatus of the present invention has casing, has lasing laser oscillator in the inside of this casing, guiding is by the 1st speculum of the above-mentioned laser of above-mentioned laser oscillator generation, and dispose abreast with above-mentioned the 1st speculum, further guiding is from the 2nd speculum of the above-mentioned laser of above-mentioned the 1st speculum, it is characterized in that: above-mentioned the 1st speculum and above-mentioned the 2nd speculum all are installed on shared speculum supporting member, and the casing of the above-mentioned relatively laser oscillator of this speculum supporting member is mechanically engaged by only 3 fixed components that are positioned at vertex of a triangle.
In laser oscillation apparatus of the present invention, the 1st speculum and the 2nd speculum all are installed on shared speculum supporting member, the casing of the relative laser oscillator of this speculum supporting member is mechanically engaged by only 3 fixed components that are positioned at leg-of-mutton each summit, so, even the casing of laser oscillator produces thermal deformation, also can suppress the distortion of speculum supporting member enough little, can suppress the optical axis deviation of the laser of the 1st, the 2nd speculum enough little.
Description of drawings
Fig. 1 is the perspective view that the form of implementation 1 of laser oscillation apparatus of the present invention is shown.
Fig. 2 is the key diagram of the distortion of the speculum supporting member of explanation form of implementation 1.
Fig. 3 is the key diagram of the distortion of the speculum supporting member of 4 structures of explanation.
Fig. 4 is the key diagram of collimation that the speculum of this form of implementation 1 is shown.
Fig. 5 is the perspective view that the form of implementation 2 of laser oscillation apparatus of the present invention is shown.
Fig. 6 is the perspective view that the form of implementation 3 of laser oscillation apparatus of the present invention is shown.
Fig. 7 is the perspective view that the box-shaped speculum supporting mass of form of implementation 3 is shown.
The specific embodiment
Below, with reference to description of drawings several forms of implementation of the present invention.
Form of implementation 1
Fig. 1 is the perspective view that the form of implementation 1 of laser oscillation apparatus of the present invention is shown.The laser oscillation apparatus 100 of this form of implementation 1 for example is used for laser machine.
The laser oscillation apparatus 100 of form of implementation 1 has laser oscillator 10 and optical unit 20.Laser oscillator 10 has casing 11, produces laser in the inside of this casing 11.Casing 11 by metal for example steel plate form the box-shaped of cuboid, have face wall 11A, back face wall 11B, perisporium 11C.The laser that is produced by laser oscillator 10 becomes laser beam LB, and the direction from face wall 11A towards perpendicular intersection is drawn.Form 3 erecting bed 12A, 12B, 12C at face wall 11A.
In Figure 25 of Japanese kokai publication hei 8-192283 communique, the method that becomes circularly polarized light from the laser of the rectilinearly polarized light of laser oscillator output that makes is disclosed.Press the reflecting surface of the speculum of 45 ° of uses of incidence angle relatively, form the dielectric multilayer film, the many plasma membranes of this dielectric are with the plane of polarization and the incident configuration (45 ° at azimuth) at 45 of S polarizing axis (or P polarizing axis) structure of the laser of straight line polarization, the phase difference ground that produces 90 ° (λ/4) between two compositions of the S of laser light reflected polarised light and P polarised light has carried out the blooming design, thereby rectilinearly polarized light can be transformed into circularly polarized light, such speculum is called the circular polarization speculum.Here, the S polarised light is the composition with plane of polarization vertical with the plane of incidence, and the P polarised light is to have the perpendicular composition that promptly is parallel to the plane of polarization of the plane of incidence.Circular polarization speculum 22 is identical with the circular polarization speculum that is disclosed in this Japanese kokai publication hei 8-192283.
Speculum supporting member 41 by metal for example steel plate form rectangular tabular.This speculum supporting member 41 has in opposite directions a pair of interarea 41A, 41B, in opposite directions a pair of long limit 42A, 42B, pair of short edges 42C in opposite directions, 42D, and 4 bight 43A～43D.Interarea 41A, 41B are the plane that is parallel to each other.Bight 43A is formed between long limit 42A in a left side and last minor face 42C, and bight 43B is formed between right long limit 42B and last minor face 42C, and bight 43C is formed between right long limit 42B and following minor face 42D, and bight 43D is formed between long limit 42A in a left side and following minor face 42D.
The 1st speculum 22 is installed on mirror block 23, and this mirror block 23 directly is installed on the center upper portion of the interarea 41A of speculum supporting member 41.The 2nd speculum 24 is installed on mirror block 25, and this mirror block 25 directly is installed on the lower central of the interarea 41A of speculum supporting member 41. Mirror block 23,25 forms right angled isosceles triangle with its both ends of the surface respectively, forms the triangular column.Speculum 22,24 is with the interarea 41A of the relative speculum supporting member 41 of median plane of separately speculum tilt 45 °, the state that is parallel to each other, by mirror block 23,25 supportings.Laser beam LB incides the plane of incidence of the 1st speculum 22 by 45 ° angle, from of the angle reflection of this plane of incidence, after this, incide the plane of incidence of the 2nd speculum 24 with 45 ° incidence angles with 45 °, from of the angle reflection of this plane of incidence, guide to the Ministry of worker that adds of laser machine with 45 °.
Speculum supporting member 41 is directly installed on erecting bed 12A, 12B, the 12C of the face wall 11A of the casing 11 that is formed at laser oscillator 10 by 3 fixture constructions that only comprise 3 fixture 45A, 45B, 45C.Fixture 45A is fixed in face wall 11A with the bight 43A of speculum supporting member 41.Fixture 45B is fixed in face wall 11A with the bight 43B of speculum supporting member 41.Fixture 45C is fixed in face wall 11A with the bight 43C of speculum supporting member 41.43D does not dispose fixture in the bight, and this bight 43D is not fixed in face wall 11A, is free state.Like this, only 3 bight 45A, 45B, 45C are fixed in face wall 11A with 3 fixture 45A, 45B, 45C, the result, 3 fixture 45A, 45B, 45C are positioned at leg-of-mutton each summit.These fixtures 45A, 45B, 45C for example are made of the bolt with identical appearance size.
Fig. 2, Fig. 3 are the key diagram of the distortion of the thermal deformation of the face wall 11A of the casing 11 of explanation laser oscillator 10 and the speculum supporting member 41 that this thermal deformation causes.Fig. 2 illustrates the thermal deformation of face wall 11A of 3 fixture constructions of form of implementation 1 and the distortion of the speculum supporting member 41 that this thermal deformation causes, in addition, Fig. 3 for Fig. 2 relatively, the thermal deformation of face wall 11A of 4 fixture constructions and the distortion of the speculum supporting member 41 that this thermal deformation causes are shown.3 fixture constructions of Fig. 2 are fixed in the bight 43A～43C of speculum supporting member 41 by fixture 45A～45C erecting bed 12A～12C of face wall 11A.4 fixture constructions of Fig. 3 also are provided with fixture 45D at the bight of speculum supporting member 41 43D, and speculum supporting member 41 is fixed in erecting bed 12A～12D of face wall 11A by 4 fixture 45A～45D.
In 3 fixture constructions of form of implementation 1, as shown in Figure 2, even face wall 11A produces thermal deformation, do not deform substantially at speculum supporting member 41 yet, but in 4 fixture constructions, as shown in Figure 3, along with the thermal deformation of face wall 11A, produce big distortion at speculum supporting member 41.Specifically, imagine such occasion, that is, erecting bed 12A～12D of face wall 11A is based on the thermal deformation of face wall 11A, by different mutually protuberance amount protuberances.In 4 fixture constructions, because 4 fixture 45A～45D produce superfluous constraint, so based on the mutual different protuberance amount of each erecting bed 12A～12D, on each limit of long limit 42A, 42B and minor face 42C, 42D, collimation changes.Like this, because the variation of the flatness of speculum supporting member 41, so the relative angle of speculum 22,24 changes, its decollimation.As adopt multiple spot fixture construction more than 4, and then producing than 4 constraints that fixture construction is superfluous, the relative angle of speculum 22,24 changes.
In 3 fixture constructions of form of implementation 1, when the face wall 11A of casing 11 has produced thermal deformation, the line that is connected and fixed part 45A and fixture 45B moves with the line that is connected and fixed part 45B and fixture 45C, but bight 43D freedom, the result, the plane that comprises both sides determines that uniquely flatness can not change.Therefore, the flatness of speculum supporting member 41 also is certain, and circular polarization speculum 22 also can keep certain with the relative angle that is folded to speculum 24.
Fig. 4 is the key diagram about the collimation of speculum 22,24.Speculum supporting member 41 is fixed in the face wall 11A of the casing 11 of laser oscillator 10, so, the posture change of the speculum supporting member 41 that the thermal deformation of face wall 11A causes can not be avoided, but in 3 fixture constructions of form of implementation 1, the posture change of speculum supporting member 41 is a monotone variation, and this posture change becomes can keep circular polarization speculum 22 and the posture change that is folded to the collimation of speculum 24 in fact.For example as shown in Figure 4, such dull posture change that the 1st speculum 22 to the 2 speculums 24 more leave from face wall 11A, the collimation of speculum 22,24 is maintained in fact.In this occasion, the angle of the optical axis of speculum 22,24 from Fig. 4 with such variation the shown in dotted line of state shown in the solid line, but changing with the optical axis angle variation of the 2nd speculum 24, the optical axis angle of the 1st speculum 22 cancels out each other in fact, so, change from the optical axis angle of the laser beam LB of the 2nd speculum 24 output and not produce in fact, can keep certain in fact, the variation of Working position also can be eliminated in fact, can obtain good crudy.
Like this in form of implementation 1, the 1st speculum 22 and the 2nd speculum 24 all are installed on speculum supporting member 41, this speculum supporting member 41 is installed by the casing 11 of only 3 the relative laser oscillators 10 of fixture 45A～45C that are positioned at leg-of-mutton each summit, so, the distortion of the speculum supporting member 41 that the thermal deformation of casing 10 can be caused suppresses enough for a short time, and the optical axis that can suppress laser changes.
Form of implementation 2
Fig. 5 is the perspective view that the form of implementation 2 of laser oscillation apparatus of the present invention is shown.The laser oscillation apparatus 100A of this form of implementation 2 uses optical unit 20A to replace the optical unit 20 of form of implementation 1.This optical unit 20A has mirror system 21, speculum supporting construction 30, reaches speculum supporting member 411.Mirror system 21 similarly has the 1st speculum 22 and the 2nd speculum 24 with form of implementation 1.Speculum supporting construction 30 jointly supports these speculums 22,24.This speculum supporting construction 30 forms speculum supporting mass 31 cylindraceous in form of implementation 2.Speculum supporting member 411 is additional a pair of hold-down arm 46 on the speculum supporting member 41 that form of implementation 1 is used.This hold-down arm 46 is integrally formed at the interarea 41A of speculum supporting member 411, by this hold-down arm 46 speculum supporting mass 31 is installed on speculum supporting member 411.The mirror block 25A that the mirror block 23A of the 1st speculum 22 is installed and the 2nd speculum 24 is installed be screwed into speculum supporting mass 31 cylindraceous both ends constitute cylindric.Other and form of implementation 1 constitute in the same manner.
In this form of implementation 2, speculum supporting member 411 is fixed in 3 bight 43A～43C among its 4 bight 43A～43D by 3 fixture constructions that only comprise 3 fixture 45A～45C the face wall 11A of the casing 11 of laser oscillator 10, at bight 43D fixture is not set, bight 43D freedom.
Speculum supporting mass 31 by metal for example steel plate constitute cylindricly, compare with flat board, have higher rigidity.The face wall 11A of this speculum supporting mass 31 and casing 11 in opposite directions, its central shaft extends the ground configuration along vertical direction.The mirror block 23A of the 1st speculum 22 is installed in the upper end of this speculum supporting mass 31, the mirror block 25A of the 2nd speculum 24 is installed in the bottom of speculum supporting mass 31.In this form of implementation 2, the 1st speculum 22 is the circular polarization speculum, and the 2nd speculum 24 is for being folded to speculum.Incide the plane of incidence of circular polarization speculum 22 by 45 ° incidence angle from the laser beam LB of laser oscillator 10, in of the angle reflection of this plane of incidence by 45 °, then, inside by speculum supporting mass 31, incide the plane of incidence by 45 ° incidence angles being folded to speculum 24, in of the angle reflection of this plane of incidence, guide to the Ministry of worker that adds of laser machine by 45 °.
Set up cooling tubing 33 at mirror block 23A, 25A.Supply with cooling water 34 to this cooling tubing 33, cooling speculum 22,24.The output height that is used for the laser oscillator 10 of laser machine, speculum 22,24 absorbs the part of the laser beam LB of its high output, so, cool off very important by 33 pairs of speculums of cooling tubing 22,24.
Speculum supporting mass 31 before laser oscillator 10 operation, become with outside the temperature that equates of temperature degree, speculum supporting mass 31 its all parts all become with outside the temperature that equates of temperature degree, but along with the operation of laser oscillator 10 begins, during by cooling tubing 33 cooling mirror block 23A, 23B, periphery at the connecting portion of the periphery of speculum 22,24 and cooling tubing 33, temperature descends partly, so, produce local variations in temperature at speculum supporting mass 31, produce thermal stress at speculum supporting mass 31.Yet it is high more cylindric than dull and stereotyped that speculum supporting mass 31 is constituted as rigidity, so even speculum supporting mass 31 is subjected to its thermal stress effect, crooked and torsional deflection also is suppressed lessly.Therefore, even cooled off by cooling tubing 33, the distortion of speculum supporting mass 31 is also less, can substantially keep the collimation of speculum 22,24, the optical axis of laser beam LB can be changed to suppress enough for a short time.
In form of implementation 2, can obtain the effect same with form of implementation 1, in addition, speculum supporting mass 31 is constituted high cylindric of rigidity, so, even cool off by 33 pairs of speculums of cooling tubing 22,24, the distortion of speculum supporting mass 31 is also less, can keep the collimation of speculum 22,24 in fact, can suppress the variation of the optical axis of laser beam LB enough little, can carry out good processing.
Form of implementation 3
Fig. 6 is the perspective view that the form of implementation 3 of laser oscillation apparatus of the present invention is shown, and Fig. 7 is for seeing the perspective view of the box-shaped speculum supporting mass 35 of form of implementation 3 from laser oscillator 10 sides.
The laser oscillation apparatus 100B of this form of implementation 3 comprises laser oscillator 10, supporting substrates 17, reaches optical unit 20B.Supporting substrates 17 is configuration flatly for example.Laser oscillator 10 and optical unit 20B are installed in devices spaced apart ground on this supporting substrates 17, and laser oscillator 10 carries out mechanical engagement mutually with optical unit 20B on shared supporting substrates 17.Laser oscillator 10 is engaged in supporting substrates 17 with the diapire 13 among its perisporium 11C, is installed on the supporting substrates 17 by fixture 15.Diapire 13 has rectangular shape, has 4 bights 14, but supporting substrates 17 is fixed in by fixture 15 in these all bights 14.Fixture 15 for example is a bolt.
Speculum supporting construction 30 constitutes box-shaped speculum supporting mass 35 in this form of implementation 3.This box-shaped speculum supporting mass 35 by metal for example steel plate constitute the box-shaped of cuboid.This box-shaped speculum supporting mass 35 have speculum supporting member 412, pair of sidewalls 36A in opposite directions, 36B, with in opposite directions upper wall 37 of speculum supporting member 412, face wall 38, and a pair of diagonal ribs 39A, 39B.These speculum supporting members 412, pair of sidewalls 36A, 36B, upper wall 37, face wall 38, a pair of diagonal ribs 39A, 39B are integrally formed mutually.
Box-shaped speculum supporting mass 35 has 4 bight 35A～35D.Bight 35A is formed at 37 of sidewall 36A and upper walls.Bight 35B is formed at 37 of sidewall 36B and upper walls.Bight 35C is formed at 412 of sidewall 36A and speculum supporting members.Bight 35D is formed at 412 of sidewall 36B and speculum supporting members.Diagonal ribs 39A is formed extended at both sides between bight 35A and bight 36D, and diagonal ribs 39B is formed extended at both sides between bight 35B and bight 36C. Diagonal ribs 39A, 39B intersect mutually in their centre position.
Speculum supporting member 412 constitutes rectangular shape.This speculum supporting member 412 is same with the speculum supporting member 41 of form of implementation 1, has 4 bight 43A～43D, is fixed in supporting substrates 17 by 3 fixture constructions.In 4 bight 43A～43D, dispose fixture 45A～45C respectively at 3 bight 43A～43C, bight 43A～43C is fixed on the supporting substrates 17 by fixture 45A～45C respectively.Fixture 45A～45C is being formed on the erecting bed 12A～12C of supporting substrates 17 fixedly bight 43A～43C.Do not dispose fixture at bight 43D, this bight 43D freedom.Speculum supporting member 412 forms 3 fixture constructions that only comprise 3 fixture 45A～45C.Supporting substrates 17 is subjected to thermal deformation and is out of shape from laser oscillator 10, but because speculum supporting member 412 is fixed in supporting substrates 17 by 3 fixture constructions, so the distortion of the box-shaped speculum supporting mass 35 that the distortion of supporting substrates 17 brings is suppressed enough for a short time.
Box-shaped speculum supporting mass 35 before laser oscillator 10 operation, become with outside the temperature that equates of temperature degree, all parts of speculum supporting mass 35 all become the temperature that equates with outer temperature degree, but when the operation along with laser oscillator 10 begins and during by cooling tubing 33 cooling mirror block 23,25, in face wall 38, the temperature of the periphery of mirror block 23,25 is local to descend, so, produce local variations in temperature in face wall 38, produce thermal stress at box-shaped speculum supporting mass 35.Yet box-shaped speculum supporting mass 35 is owing to constitute the high box-shaped of rigidity that comprises diagonal ribs 39A, 39B, so even be subjected to the effect of its thermal stress in the face wall 38 of box-shaped speculum supporting mass 35, crooked and torsional deflection also is suppressed enough for a short time.Therefore, even cooled off by cooling tubing 33, the distortion of box-shaped speculum supporting mass 35 is also less, can keep the collimation of speculum 22,24 in fact, and the variation of the optical axis of laser beam LB can suppress enough for a short time.
In form of implementation 3, can obtain the effect same with form of implementation 1, in addition, box-shaped speculum supporting mass 35 is the structure that comprises the high rigidity of diagonal ribs 39A, 39B, so, even by cooling tubing 33 cooling speculums 22,24, the distortion of speculum supporting mass 35 is also little, can keep the collimation of speculum 22,24 substantially, the optical axis of laser beam LB can be changed and suppress enough for a short time, can carry out good processing.
Form of implementation 1,2,3 all forms the circular polarization speculum with the 1st speculum 22, the 2nd speculum 24 is formed be folded to speculum, but in the occasion of the oscillation wavelength of selecting laser, all change the 1st, the 2nd speculum 22,24 into dichroscope.In this occasion, also can obtain the effect same with form of implementation 1,2,3.
Laser oscillation apparatus of the present invention can be used in the equipment that laser machine etc. uses the laser of high output.
Claims (6)
1. laser oscillation apparatus has:
Casing has lasing laser oscillator in the inside of this casing;
Guiding is by the 1st speculum of the above-mentioned laser of above-mentioned laser oscillator generation;
Dispose, further guide the 2nd speculum abreast from the laser of above-mentioned the 1st speculum with above-mentioned the 1st speculum; And
Jointly support the speculum supporting member of above-mentioned the 1st speculum and above-mentioned the 2nd speculum;
It is characterized in that:
By 3 fixture constructions that comprise only 3 fixed components that are positioned at leg-of-mutton each summit, above-mentioned speculum supporting member is fixed in the casing of above-mentioned laser oscillator.
2. laser oscillation apparatus according to claim 1 is characterized in that: at above-mentioned speculum supporting member speculum supporting mass cylindraceous is installed also,
Jointly by above-mentioned speculum supporting mass supporting, above-mentioned speculum supporting member jointly supports above-mentioned the 1st speculum and above-mentioned the 2nd speculum by above-mentioned speculum supporting mass for above-mentioned the 1st speculum and above-mentioned the 2nd speculum.
3. laser oscillation apparatus according to claim 2 is characterized in that: also set up the cooling tubing that they are cooled off at above-mentioned the 1st speculum and above-mentioned the 2nd speculum.
4. laser oscillation apparatus has:
Casing has lasing laser oscillator in the inside of this casing;
Guiding is by the 1st speculum of the above-mentioned laser of above-mentioned laser oscillator generation;
Dispose, further guide the 2nd speculum abreast from the laser of above-mentioned the 1st speculum with above-mentioned the 1st speculum; And
Jointly support the speculum supporting construction of above-mentioned the 1st speculum and above-mentioned the 2nd speculum;
It is characterized in that:
Above-mentioned laser oscillation apparatus also has the supporting substrates of the casing that above-mentioned laser oscillator is installed,
3 fixture constructions by comprising only 3 fixed components that are positioned at leg-of-mutton each summit are fixed in above-mentioned supporting substrates with above-mentioned speculum supporting construction.
5. laser oscillation apparatus according to claim 4, it is characterized in that: above-mentioned speculum supporting construction has box-shaped speculum supporting mass, this box-shaped speculum supporting mass comprises 4 bights and the diagonal ribs that is connected this each bight, jointly supports above-mentioned the 1st speculum and above-mentioned the 2nd speculum by above-mentioned box-shaped speculum supporting mass.
6. laser oscillation apparatus according to claim 4 is characterized in that: above-mentioned the 1st speculum and above-mentioned the 2nd speculum are set up the cooling tubing that they are cooled off.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006158646 | 2006-06-07 | ||
| JP2006158646A JP4979277B2 (en) | 2006-06-07 | 2006-06-07 | Laser oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101085493A CN101085493A (en) | 2007-12-12 |
| CN100540203C true CN100540203C (en) | 2009-09-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006101630634A Active CN100540203C (en) | 2006-06-07 | 2006-11-30 | Laser oscillation apparatus |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP4979277B2 (en) |
| CN (1) | CN100540203C (en) |
| DE (1) | DE102006056406B4 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4965466B2 (en) * | 2008-01-10 | 2012-07-04 | 三菱電機株式会社 | Laser oscillator |
| WO2017075738A1 (en) * | 2015-11-03 | 2017-05-11 | 徐海军 | Three-support fixed radio frequency laser |
| CN108701960A (en) * | 2016-02-15 | 2018-10-23 | 三菱电机株式会社 | Semiconductor laser light resource device |
| FR3072512B1 (en) * | 2017-10-17 | 2021-06-11 | Thales Sa | IMPROVED RADIOFREQUENCY OSCILLATOR |
| JP7023573B2 (en) * | 2018-02-02 | 2022-02-22 | 住友重機械工業株式会社 | Laser oscillator |
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| CN1227150A (en) * | 1998-02-27 | 1999-09-01 | 三菱电机株式会社 | Laser processing device |
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- 2006-06-07 JP JP2006158646A patent/JP4979277B2/en active Active
- 2006-11-29 DE DE102006056406A patent/DE102006056406B4/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1227150A (en) * | 1998-02-27 | 1999-09-01 | 三菱电机株式会社 | Laser processing device |
| CN1388771A (en) * | 2000-08-29 | 2003-01-01 | 三菱电机株式会社 | Laser machining apparatus |
| CN2519499Y (en) * | 2001-12-20 | 2002-10-30 | 华中科技大学 | Hole boring coupling laser mirrow frame |
| CN1777489A (en) * | 2004-06-01 | 2006-05-24 | 三菱电机株式会社 | Laser processing device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2007329260A (en) | 2007-12-20 |
| DE102006056406A1 (en) | 2007-12-13 |
| DE102006056406B4 (en) | 2010-07-22 |
| JP4979277B2 (en) | 2012-07-18 |
| CN101085493A (en) | 2007-12-12 |
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