CN100533676C - Method for the removal of airborne molecular contaminants using oxygen and/or water gas mixtures - Google Patents

Method for the removal of airborne molecular contaminants using oxygen and/or water gas mixtures Download PDF

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CN100533676C
CN100533676C CNB200480021874XA CN200480021874A CN100533676C CN 100533676 C CN100533676 C CN 100533676C CN B200480021874X A CNB200480021874X A CN B200480021874XA CN 200480021874 A CN200480021874 A CN 200480021874A CN 100533676 C CN100533676 C CN 100533676C
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gas
purgative
purgative gas
oxygen
purification
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CN1830071A (en
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杰弗里·J·施皮格尔曼
小丹尼尔·阿尔瓦雷斯
拉塞尔·J·霍姆斯
艾伦·特拉姆
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Entegris Inc
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Mykrolis Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/72—Organic compounds not provided for in groups B01D53/48 - B01D53/70, e.g. hydrocarbons
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H01L21/02046—Dry cleaning only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching

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  • Chemical & Material Sciences (AREA)
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Abstract

The present invention discloses a method for the removal of a number of molecular contaminants from surfaces within a device. A purge gas containing oxygen and/or water is introduced into the interior of the device, contacting at least a portion of the interior surfaces. A contaminated purge gas is produced by transferring a portion of the contamination from the interior surfaces into the purge gas. The contaminated purge gas is removed from the device and the process is continued until the contaminant concentration in the contaminated purge gas is below a predetermined level.

Description

Use oxygen and/or aqueous vapor body mixture to remove the method for gas-carrying molecule pollutant
Related application
The application is the extendible portion of No. the 10/683rd, 903, the U. S. application submitted on October 10th, 2003, and this patent has required the interests of No. the 60/475th, 145, the U.S. Provisional Application submitted on June 2nd, 2003.The application also is the extendible portion of No. the 10/683rd, 904, the U. S. application submitted on October 10th, 2003, and this patent has required the interests of No. the 60/475th, 145, the U.S. Provisional Application submitted on June 2nd, 2003.Whole instruction contents of above-mentioned application are incorporated herein by reference.
Technical field
The present invention relates to use oxygen and/or air-water mixture to remove the method for gas-carrying molecule pollutant from the surface.
Background technology
For example be intended for use to keep the cleaning of height in the manufacturing of silicon chip of Semiconductor substrate or in the lithography step that semiconductor is made at high purity product.Product self must clean, and its atmosphere on every side must clean in the whole manufacturing process, and each step and the equipment that use in making must be able to not have adverse effect to cleaning.Be known in when being incorporated into minute sized circuit and assembly in the semiconductor chip, deposit on the chip surface or even minimum contaminant particle and also can damage chip.Usually, the loss late of wafer that causes owing to systemic contamination during the manufacturing and chip becomes sizable part of total production.
The manufacturer of wafer and chip has paid the cleaning that a large amount of and lasting effort improves its manufacturing equipment (" fabs "), comprises obtaining highly purified manufacturing and process materials and gas.This effort is normally success in the past, because obtained by the gas purity of pollutant level definition 1,000,000/(ppm) and even high-purity gas in part per billion (ppb) scope.Usually, the reduction of the increase of the component density of the raising of process system cleannes and chip and chip assembly and circuit size is corresponding.
But the size along with chip assembly continues to reduce and component density continuation increase recently, and the corresponding improved ability of this gas of existing techniques in realizing seriously can't bear the heavy load.In the development of 198 nanometers and 157 nanometer semiconductor technology, the ability of product permissible contamination thing greatly reduces, and the process gas of previous enough purity is no longer suitable.Have been found that previous amplification in proportion (Scale-up) technology that has realized this gas purity of abundant raising is invalid in the system (UHP) in these those " ultra-high purities " that produce lower nanoscale technology.In addition, have been found that and thought before on littler IC size that unessential pollutant became main pollutant, and have been found that the gas of prior art is being invalid aspect this contaminant material of removal.
Ultra-high purity product and process equipment are to reducing gas-carrying molecule pollutant (AMC) sensitivity of product quality and productive rate.AMC generally includes, but is not limited to SO x, NO x, siloxanes, organic phosphorus compound, ammonia, moisture, oxygen and 4 carbon atoms of hydrocarbon (〉).For the present invention, think that oxygen and moisture are not AMC.
In the production of semi-conductor industry wafer, three main contamination sources are arranged: the wafer storage container (for example front opening formula wafer handling box (Front-Opening Unified Pod) or FOUP) self, along with wafer in equipment room moves into container the clean room air and during each manufacturing process, may adsorb the wafer self of pollutant.Developed the method that in manufacturing process, fully reduces water and oxygen gas pollution thing.In addition, developed the method for the product (for example oxide of silicon) of removing wafer and water that may on wafer surface, form and oxygen.But, also do not have development effectively to remove a large amount of airborne contaminants and the technology of the product that on wafer, forms.
All contaminations has different effects.For example, simple hydrocarbon may condense on lens subassembly and cause transmission loss in photoetching.Heavy hydrocarbon and significantly the lighter hydrocarbons of concentration irreversibly deposit on the optical surface and by ultraviolet (UV) exposure graphitization.According to similar mode, siliceous organic substance, for example siloxanes reaction under the UV irradiation produces the SiO that can reflect and absorb incident light 2Crystal grain.Other AMC, for example NO xAnd SO x(typically wherein 0＜x≤3), cause optical opacity.The AMC (for example amine) of alkalescence also can quencher light acid (photoacids) except causing optical opacity.Before and after the photoetching, the oxygen G﹠W for production technology be harmful to and typically think AMC in the prior art.Recently, Veillerot etc. reported when wafer when in continuous purge flow, laying between the deposition step of gas cyaniding thing and polysilicon, hydrocarbon pollutant under the atmospheric pressure has injurious effects (Solid State Phenomena for the integrality of 4.5 nanometer gate oxides, the 92nd volume, 2003, the 105-108 page or leaf).
The approach that attempt to reduce this pollutant comprises commercial scale chemistry filter cleaning chamber air, becomes airtight wafer case (cassettes) from opening, and between deposit and transmission period the nitrogen purge wafer.Nitrogen purge UHP assembly, for example valve and air shooter have been carried out manyly year, and are effective for removing oxygen and water.But commercial scale is used the IC process equipment of nitrogen purge large volume and a large amount of wafer case to be expensive and the danger that seriously suffocates is arranged.In addition, suspect that nitrogen purge hydrocarbon surfaces contaminated be not in full force and effect aspect the removal hydrocarbon.
The method of analyzing pollutant in the air-flow is known.Fig. 1 is that (prior art) is the schematic flow diagram with two dilution systems 100 of gas chromatograph gas analysis system 120 couplings.Comprise two dilution systems 100 of mass flow controller 106,108,110 and 112 can enough carrier gas 102 114 to 6 orders of magnitude (10 of dilution standard gas accurately 6).Using system 100 can be diluted to part per trillion (ppt) scope effectively with the standard gas in the 1000000/scope that obtains usually.For the response of calibrate chromatograph 126, be connected with the inlet of chromatograph gas analysis system 120 by outlet 116 dilution system, can make dilution system 100 and gas chromatography system 120 couplings.Before inject gas chromatograph 126, cold hydrazine 124 gathers the hydrocarbon that condenses in the sample.In this manner, chromatographic effective sensitivity can increase and can measure reliably the hydrocarbon concentration of ppt level.
Fig. 2 (prior art) is the calibration curve Figure 200 with the sample hydrocarbon concentration 202 of 204 pairs of multiple hydrocarbon molecules of signal response area of the analytical system 120 of dilution system 100 couplings, wherein said different hydrocarbon molecule comprise benzene 206, toluene 208, ethylbenzene 210,, right-dimethylbenzene 212, ortho-xylene 214, second toluene 216.Data 200 show between peak area 204 and the concentration 202 linear response relation on 6 orders of magnitude almost, and minimum sensitivity is 1ppt.
Fig. 3 (prior art) is for comprising benzene, toluene, ethylbenzene and every kind of sample that is 1ppt of dimethylbenzene, Figure 30 0 of time 302 pairs of gas chromatograph 126 detector signals 304.Herein, the peaks that the concentration of every kind of hydrocarbon 1ppt level causes benzene 306, toluene 308, ethylbenzene 310 and dimethylbenzene 312 obviously to be differentiated in the mixture as can be seen.
Summary of the invention
The present invention aims to provide the method that molecular contaminants (AMC) carried in the degasification of getting on from the surface in general, this method comprises with the purgative gas contact at least a portion surface that purifies and the peripheral region on described surface, wherein this purgative gas comprises oxygen, water or its combination, and the AMC concentration of the purgative gas of this purification is lower than about part per billion (ppb) volume; Thereby by producing the purgative gas that pollutes in the purgative gas that a part is changed over to described purification from the pollutant on described surface; And the purgative gas of removing described pollution from described surface.
The purpose of this invention is to provide the method that molecular contaminants (AMC) carried in the degasification of getting on from the common surface in device.In one embodiment, this method comprises to introduce to device inside and comprises the purgative gas that oxygen and preferred AMC concentration are lower than part per billion volume; At least a portion surface is contacted with this purgative gas; Thereby by a part is changed over to the purgative gas of generation pollution in the described purgative gas from the molecular contaminants on described surface; And the purgative gas of removing described pollution from described device.Typically continue or the repetition above-mentioned steps, pollutant levels are reduced to predeterminated level in the purgative gas of described pollution, preferably are lower than part per billion volume, more preferably less than 100ppt volume pollutant.In addition, oxygen containing purgative gas also comprises moisture (being water).
In another embodiment of the invention, described method comprise purify contain oxygen and its concentration between 1-25 volume % and preferred molecular contamination substrate concentration less than the purgative gas of 1ppb; The purgative gas that purifies is introduced device inside; At least a portion surface is contacted with the purgative gas of this purification; Thereby by producing the purgative gas that pollutes in the purgative gas that a part is changed over to this purification from the molecular contaminants on described surface; And the purgative gas of removing described pollution from described device.This method typically also comprises the continuation above-mentioned steps, and pollutant levels are reduced to desired level in the purgative gas of described pollution, preferably is lower than about 1ppb, more preferably less than about 100ppt.In addition, oxygen containing purgative gas can comprise concentration between the water of about 100ppm to about 2 volume %.
In the 3rd embodiment of the present invention, described method comprises and purifies molecular contamination substrate concentration in the total mixture less than the moisture purgative gas of 1ppb (for example concentration is between about 100ppm moisture between about 2 volume % extremely); The purgative gas that purifies is introduced device inside; At least a portion surface is contacted with the purgative gas of this purification; Thereby by producing the purgative gas that pollutes in the purgative gas that a part is changed over to this purification from the molecular contaminants on described surface; And the purgative gas of removing described pollution from described device.This method typically also comprises the continuation above-mentioned steps, and pollutant levels are reduced to desired level in the purgative gas of described pollution, preferably is lower than about 1ppb pollutant volume, more preferably less than about 100ppt pollutant.
Method disclosed herein is specially adapted to the inner surface of the valve that for example exists the inner surface of ultra-high purity gas circuit and the gas line from the surface, and stainless steel chamber internal surface (for example being used for making the chamber of silicon chip) is removed pollutant.
Description of drawings
Fig. 1 is the schematic flow diagrams with two dilution pipelines of gas chromatograph gas analysis system coupling.
Fig. 2 is the calibration chart of Fig. 1 equipment, has represented the curve chart of signal response area to the sample hydrocarbon concentration of various hydrocarbon molecules.
Fig. 3 is the gas chromatograph detector signal of the sample of the 1ppt figure to the time for comprising various hydrocarbon components and every kind.
Fig. 4 is the schematic flow diagram of experimental rig according to embodiments of the present invention.
Fig. 5 is the schematic cross-section of wafer chamber according to embodiments of the present invention.
Fig. 6 is the process frame chart of cleaning process for the first time according to embodiments of the present invention.
Fig. 7 is the process frame chart of cleaning process for the second time according to embodiments of the present invention.
Fig. 8 is the process frame chart of cleaning process for the third time according to embodiments of the present invention.
Fig. 9 is according to an embodiment of the present invention, for hydrocarbon concentration in two kinds of purgative gas mixtures of the wafer chamber of leaving Fig. 5 (not having wafer in the chamber) to the figure of time.
Figure 10 is according to an embodiment of the present invention, for hydrocarbon concentration in two kinds of purgative gas mixtures of the wafer chamber of leaving Fig. 5 (silicon chip is arranged in the chamber) to the figure of time.
Figure 11 is the enlarged drawing of Figure 10, has represented in more detail from 10 hours to 25 hours the time interval according to an embodiment of the present invention.
Figure 12 is according to an embodiment of the present invention, and for meta-xylene and paraxylene concentration are to the figure of time in three kinds of purgative gas mixtures of the wafer chamber of leaving Fig. 5 (silicon chip is arranged in the chamber), wherein purgative gas comprises 0%, 1% and 20% oxygen.
Figure 13 is the enlarged drawing of Figure 12, has represented in more detail from 5 hours to 25 hours the time interval according to an embodiment of the present invention.
Figure 14 is according to an embodiment of the present invention, and for hydrocarbon concentration is to the figure of time in five kinds of purgative gas mixtures of the wafer chamber of leaving Fig. 5 (silicon chip is arranged in the chamber), wherein purgative gas comprises 0%, 0.001%, 0.01%, 0.1% and 1.0% oxygen.
Figure 15 is the enlarged drawing of Figure 12, has represented in more detail from 10 hours to 24 hours the time interval according to an embodiment of the present invention.
Figure 16 uses N at various temperatures 2Perhaps XCDA is reduced to the 10ppt figure of required time with the ethylbenzene level.
Figure 17 uses N at various temperatures 2Perhaps XCDA is reduced to the 10ppt figure of required time with meta-xylene and paraxylene level.
Figure 18 uses N at various temperatures 2Perhaps XCDA is reduced to the 10ppt figure of required time with the ortho-xylene level.
Figure 19 is reduced to the ethylbenzene level 10ppt figure of required time under various oxygen concentrations.
Figure 20 is reduced to the 10ppt figure of required time with meta-xylene and paraxylene level under various oxygen concentrations.
Figure 21 is reduced to the ortho-xylene level 10ppt figure of required time under various oxygen concentrations.
Figure 22 is the schematic flow diagram of the moisture cleaning experiment described in the embodiment 5.
Figure 23 be for ethylbenzene concentration in four kinds of purgative gas mixtures of the wafer chamber of leaving Fig. 5 to the figure of time, wherein purgative gas comprises the nitrogen, 100% nitrogen that contain 20% oxygen, contains the nitrogen of 0.5% water and contains the nitrogen of 100ppm water.
Figure 24 is the ortho-xylene concentration that makes up in four kinds of purgative gas mixtures for the wafer chamber of leaving Fig. 5 to the figure of time, and wherein purgative gas comprises the nitrogen, 100% nitrogen that contain 20% oxygen, contains the nitrogen of 0.5% water and contains the nitrogen of 100ppm water.
Figure 25 be for meta-xylene and paraxylene concentration in four kinds of purgative gas mixtures of the wafer chamber of leaving Fig. 5 to the figure of time, wherein purgative gas comprises the nitrogen, 100% nitrogen that contain 20% oxygen, contains the nitrogen of 0.5% water and contains the nitrogen of 100ppm water.
Figure 26 is at N 2When perhaps using various moisture concentration among the XCDA ethylbenzene level is reduced to the 10ppt figure of required time.
Figure 27 is at N 2When perhaps using various moisture concentration among the XCDA meta-xylene and paraxylene level are reduced to the 10ppt figure of required time.
Figure 28 is at N 2When perhaps using various moisture concentration among the XCDA ortho-xylene level is reduced to the 10ppt figure of required time.
Figure 29 is the schematic flow diagram of experimental provision according to embodiments of the present invention.
Figure 30 is the chromatogram of typical valve degasification immediately after installation.
Figure 31 is the chromatogram of typical valve 80 ℃ of degasification.
Embodiment
In many application, need clean contaminants.For example, the way of UHP assembly in the cleaning manufacturing equipment and gas delivery system was carried out many years.In many other fields,, for example need the cleaning and the cleaning of equipment and substrate in LCD substrate, nanostructured surface, wafer, standard film and the optical module including, but not limited to the optical module of microelectronics, space flight, cleaning equipment.Method disclosed by the invention is applicable to usually in these fields and uses.In history, during " the dry removal " of these assemblies, used high-purity nitrogen and argon gas (to be lower than 1ppb oxygen, steam, CO, CO 2And hydrocarbon) as purgative gas.So name " the dry removal " process is because the main purpose of cleaning with nitrogen or argon gas is to remove to be adsorbed on lip-deep impurity, for example water and oxygen.
Purgative gas is inertia typically.Purgative gas is removed pollutant and can be carried out according to different mechanism.During cleaning process, Pollutants Diffusion go in the purgative gas and the concentration by the pollutant from the teeth outwards of neutralizing at purgative gas between reach balance and be written in the air-flow.This just needs the UHP gas of a large amount of clean enoughs to absorb the pollutant of very low-level typically ppb level.
The pollutant kind that is adsorbed onto on the surface (for example silicon or stainless steel) also can pass through the kinetic effect desorb.This thing happens in meeting when purgative gas collides with high flow rate flushing surface and with the kind of absorption.Kinetic energy shifts during the collision that causes desorb.In the superincumbent process, can not stop pollutant to be adsorbed onto on the surface again.
Under the situation of bound by theory not, believe to the invention provides the new example that from the positive surface of electricity (for example some plastics, silicon and stainless steel) goes up clean contaminants.Someone advises that except kinetic effect for example the non-inert molecule of oxygen G﹠W can show chemical effect.This is just at the interlayer that respectively the electric front surface on surface is had strong affinity and forms weak absorption thin layer because of the electronegativity of oxygen G﹠W and polarization characteristic.In addition, the collision of oxygen and hydrocarbon may cause the intermediate product that polarizes, and wherein hydrocarbon dies down to the affinity of metal surface and hydrocarbon becomes easier and is cleaned.In case collision causes desorption, oxygen thin layer to hinder the absorption again of pollutant kind.For water, when forming more the firm surface layer, described thin layer is more tough and tensile and has stoped absorption again.Because its electronegativity than oxygen a little less than, nitrogen not too has this protection behavior, and the combination of described thin layer is very weak and not too effective.In addition, N 2Compare O 2Gently, therefore under identical speed, has littler kinetic effect.The present invention without limits of the mechanism of this suggestion.
In the present invention, as described below, the valid density of oxygen can change in wide scope.Described effective concentration range comprises that nominal concentration is the oxygen (corresponding with the airborne oxygen of routine) of 17-21%, and this has just solved the problem of cost and asphyxiation hazard.In addition, these contain oxygen purgative gas mixture and can purify to high level very, make pollutant level in low ppt scope.At present known purification process goes for the purification that cleaning is done absolutely empty gas (CDA) or other oxygen mixture in the technology (being generally used for purified oxygen), and clean dry air is the common reagent in most of industrial manufacturing equipment factory.Being used for of the present invention purifying air (promptly comprises and is lower than about 1ppb pollutant, particularly be lower than the 100ppt pollutant, for example be lower than about 10ppt pollutant, be lower than about 1ppt pollutant for instance) be known as the XCDA (dry air of special cleaning, XCDA is the registered trade mark of Mykrolis Corporation), thus obviously distinguish with CDA, and CDA is this area term commonly used, has the 100ppm of being not more than pollutant, typically the air of 10-20ppm pollutant.The clarifier used of preparation XCDA is for instance by San Diego, the Aeronex of CA, and Inc. makes (promptly The OPTICS of clarifier TMGas purifier series; O-series specifically), the said firm belongs to Billerica now, the MykrolisCorporation of MA..Preparing the oxygen of enough purity level and the method for oxygen-containing gas is to well known to a person skilled in the art (for example consult United States Patent (USP) 6,391,090, this patent is incorporated herein for referencial use).If the purgative gas of commercial source does not need to use clarifier and original position to purify for estimating that it is enough pure using so.The concentration of pollutant can be measured by the appropriate sensitivity technology in the purgative gas, for example the PAC of Aeronex sale TMPart per trillion analyzer car.Typically, this technology relates in cold hydrazine or collects the sufficiently long time of pollutant the air-flow, thereby allows to accumulate the pollutant of trace to the level that can use the instrument accurate quantification that is purchased after gas volatilizees again.
Contain oxygen purgative gas mixture and comprise that concentration is between 99 volume % and 0.0001 volume %, between preferred 25 volume % and the 0.1 volume % (for example between 25 volume % and 1 volume %), and the more preferably oxygen between 21 volume % and 1.0 volume %.In addition, optional 100ppm to the 2 volume % that comprises of purgative gas, the aqueous vapor of preferred 100ppm to 0.5 volume %.Remaining mixture should be the inert gas that is selected from nitrogen, argon gas, rare gas, carbon dioxide and methane.Preferably, main inert component is a nitrogen, and all other inert composition is lower than about 1 volume %.Preferably, the level of non-methane hydrocarbon, volatility alkali, volatile acid, infusible compound and volatile metal compounds should be lower than 1ppb.Preferably, the level of pollutant should be lower than 100ppt, more preferably less than 10ppt, most preferably is lower than 1ppt.Concrete purification method is known for those skilled in the art.
The valid density of water can typically be not more than variation in the 0.5 volume % at about 100ppm to about 2 volume % in the purgative gas of the present invention in equipment to be cleaned when existing.Other component of purgative gas (for example oxygen, inert gas) contains described in the oxygen purgative gas as top.In theory, can use higher water concentration, be unpractical but remove so high concentration in the slave unit before use.Because the oxygen G﹠W originally was considered to impurity, be beyond thought so use them to remove pollutant.Show to have more than that to be oxygen can equally with UHP nitrogen remove hydrocarbon from the surface effectively with/aqueous mixtures, in fact they show improved performance.
Cleaning method disclosed by the invention can implemented under the temperature widely.Typically, this method can be implemented in ambient temperature (about 20 ℃) with between 50 ℃.But, described method randomly be not more than about 100 ℃ or or even 150 ℃ temperature under implement.Typically select temperature: the thermal endurance of assembly to be cleaned, pollutant volatility at various temperatures and the temperature that assembly (for example silicon chip) will be accepted during the later step of manufacturing process according to following standard.
Fig. 4 is the schematic flow diagram of experimental rig according to embodiments of the present invention.Use the two dilution systems 100 that illustrate previously to produce known hydrocarbon concentration by calibrating gas 114.Use well known to a person skilled in the art the similarly concentration curve of definite other pollutant of method.With nitrogen, XCDA, perhaps other oxygen-containing mixture is fed to carrier gas input 102.When producing hydrocarbon mixture and come test for contamination device surperficial, select nitrogen at input 102, the hydrocarbon component concentrations is determined by the concentration of hydrocarbon in mass flow controller 108-110 and the calibrating gas 114.When estimating the cleaning performance of purgative gas, under valve 109 cuts out the situation of opening with valve 107 and/or 111, select the mixture of nitrogen or nitrogen and oxygen at input 102 places.Clarifier 104 nitrogen purge gas or nitrogen-oxygen mixture.The admixture of gas that system 100 produces is directed in test the device (DUT) 402.The hydrocarbon concentrate that leaves DUT402 is introduced in the inlet 122 of gas chromatograph gas analysis system 400, measured the concentration of hydrocarbon there according to noted earlier and those skilled in the art's known method.
Usually, by using the hydrocarbon mixture elder generation washing test device in the nitrogen, make the surface saturated with hydrocarbon, remove the hydrocarbon in the gas then, and continue cleaning process with the oxygen mixture of UHP nitrogen or purification, and the concentration method of measuring hydrocarbon in the gas that leaves DUT is determined the cleaning validity of oxygen mixture.Leave that the hydrocarbon lowering of concentration must be fast more in the gas of DUT, cleaning process is effective more.
Fig. 5 is the schematic cross-section of wafer chamber 500 according to embodiments of the present invention.Wafer chamber is used to estimate the validity of cleaning hydrocarbon on stainless steel and the silicon face.Wafer chamber has inlet 506, outlet 508 and at the carriage 512 of the silicon substrate 510 of 100 millimeters of purgative gas environment lower support diameters.The inner surface of wafer chamber is the stainless steel 316 of electropolishing.The diameter D of wafer chamber (mark 502) is 6.0 inches, and height H (mark 504) is 3.9 inches.In the system as shown in Figure 4, wafer chamber 500 connects as DUT.
Fig. 6 is the process frame chart 1900 of first cleaning process according to an embodiment of the present invention.Technology contains the step 1902 of oxygen purgative gas mixture from purification.If add, typically use passage to purify after the oxygen-containing gas mixture interpolation moisture of step 1928 by humidifying device 1930.Alternatively, purgative gas comprises moisture, but oxygen-free gas.Can add moisture (for example bubbler) by well known to a person skilled in the art any method.But it is preferred allowing the careful method of controlling institute's humidification tolerance.The calibration tube with regulation seepage of water of a large amount of types is that those skilled in the art are known and can be purchased.Pipe by nylon, silicon,
Figure C200480021874D0018133515QIETU
(polytetrafluoroethylene; PTFE) and
Figure C200480021874D0018133533QIETU
(Dupont) make.The purgative gas that purifies passes through wafer chamber by comprising the mobile pipeline of pure water (being lower than the 1ppb pollutant).Enter the amount that purifies the moisture in the purgative gas can water and the flow velocity of purgative gas recently determine.This method is that those skilled in the art are known.Purgative gas with humidification in step 1932 is transported in the device.
In step 1904, will comprise oxygen and/or the water purification purgative gas is fed in the device to be cleaned.Randomly, in step 1908, heat this device to reduce scavenging period.If use heating, technology 1906 and 1910 proceeds to step 1912 along the path.In step 1912, a part of inner surface contacts with the purgative gas that comprises oxygen and/or water.In step 1914, last minute pollutant of device inner surface is transferred in the purgative gas, produces the purgative gas that pollutes.The surface that comprises in the device to be cleaned can be oxide, pottery, nitride and/or the plastics of metal, metal oxide, interphase, silicon, silicon.Preferably, described surface is the oxide of stainless steel, silicon and the silicon of electropolishing.In addition, in step 1914, from device, remove the purgative gas that depollutes.In step 1916, continue cleaning process, the pollutant levels in purgative gas are lower than predetermined boundary.This boundary can be to be lower than 1ppb, preferably is lower than 100ppt, more preferably less than 10ppt, most preferably is lower than 1ppt.In preferred optional step 1918, comprise by use that the dry gas of oxygen, nitrogen or other inert gas cleans and remove the purgative gas or the moisture purgative gas that comprise the oxygen G﹠W and remove and the afoul water of a large amount of high-purity application.In another preferred optional step 1918,, contain the oxygen purgative gas by using nitrogen or other inert gas purge to remove if device will use under the unwanted situation of oxygen thinking.This optional step 1918 is preferably carried out when heater element.If heated device, then device should cool off in step 1922 and continue to use in step 1926 by path 1920 and 1924.
Fig. 7 is the process frame chart 2000 of second cleaning process according to an embodiment of the present invention.Technology contains the step 2002 of oxygen purge gas mixture from purification.The requirement of inert gas as mentioned above.The purification method that obtains this high-pure gas is that those skilled in the art are known.In step 2004, the purification purgative gas that comprises oxygen randomly is fed in the humidifying device 2032 and in step 2034 in step 2030 and returns and be fed in the device to be cleaned.Alternatively, the purgative gas that humidification purifies, but oxygen-free gas.Randomly, heater element in step 2008 reduces scavenging period.If use heating, technology 2006 and 2010 proceeds to step 2012 along the path.In step 2012, a part of inner surface contacts with the purgative gas that comprises oxygen and/or water.In step 2016, last minute pollutant of device inner surface is transferred in the purgative gas, produces the purgative gas that pollutes.The surface that comprises in the device to be cleaned can be oxide, pottery, nitride and/or the plastics of metal, metal oxide, interphase, silicon, silicon.Preferably, described surface is the oxide of stainless steel, silicon and the silicon of electropolishing.In addition, in step 2016, from device, remove the purgative gas that depollutes.In step 2018, continue the cleaning process preset time.This determines that than measuring pollutant levels based on the complicated and sensitive analytical equipment of needs scavenging period is more convenient.In preferred optional step 2020, comprise by use that the dry gas of oxygen, nitrogen or other inert gas cleans and remove the purgative gas that comprises the oxygen G﹠W or moisture purgative gas and remove and anhydrate.If device will use under the unwanted situation of oxygen thinking, should use nitrogen or inert gas to carry out the back cleaning and clean.If heated device, then device should cool off in step 2024 and continue to use in step 2028 by path 2022 and 2026.
Fig. 8 is the process frame chart 2100 of the 3rd cleaning process according to embodiments of the present invention.In step 2102, supplying inert gas.The requirement of inert gas as mentioned above.In step 2104, purify inert gas by the known technology of those skilled in the art.In step 2106, supply pure basically oxygen or oxygen-containing mixture.In step 2108, by known technology purified oxygen of those skilled in the art or oxygen mixture.In step 2110, from the oxygen of the purification of step 2108 or oxygen mixture and from the inert gas combination of the purification of step 2104.Randomly, in step 2110, implement cleansing phase after the combination of gases.After step 2110, optional being fed in the humidifying device 2138 and in step 2140 of oxygen purgative gas that contain that will purify in step 2136 returned, thereby will comprise oxygen and/or the water purification purgative gas is fed in the device to be cleaned.Randomly, in step 2116 heater element to reduce scavenging period.If use heating, technology 2114 and 2118 proceeds to step 2120 along the path.In step 2120, a part of inner surface contacts with the purgative gas that comprises oxygen.In step 2122, last minute of device inner surface pollutant (for example hydrocarbon) is transferred in the purgative gas, produces the purgative gas that pollutes.The surface that comprises in the device to be cleaned can be oxide, pottery, nitride and/or the plastics of metal, metal oxide, interphase, silicon, silicon.Preferably, described surface is the oxide of stainless steel, silicon and the silicon of electropolishing.In addition, in step 2122, from device, remove the dealkylation purgative gas.In step 2124, continue cleaning process to preset time, perhaps to predetermined hydrocarbon level.This level is typically less than 100ppt, still preferably less than 10ppt.In preferred optional step 2126, comprise by use that the dry gas of oxygen, nitrogen or other inert gas cleans and remove the purgative gas that comprises the oxygen G﹠W and remove and anhydrate.If device will use under the unwanted situation of oxygen thinking, should use nitrogen or inert gas to carry out the back cleaning and clean.If heated device, then device should cool off in step 2130 and continue to use in step 2134 by path 2128 and 2132.
Embodiment 1
Shown the validity of using oxygen mixture to remove dealkylation from 316 Electrochemical polishing of stainless steel surfaces in the present embodiment.Being extensive use of in mass flow controller, pressure regulator and the interconnection pipeline and the pipeline of 316 Electrochemical polishing of stainless steel surfaces in the UHP gas distributing system.They also are widely used as the process chamber material in the semiconductor manufacturing facility.At first be benzene, toluene, ethylbenzene, meta-xylene and the paraxylene of 10ppb and the nitrogen-hydrocarbon mixture of ortho-xylene cleaned empty wafer chamber (not having silicon chip 510) about 3.5 hours with comprising about every kind.After in being exposed to hydrocarbon, leave the hydrocarbon concentration in the purgative gas of wafer chamber with UHP nitrogen purge wafer chamber and measurement.Then, repeat in hydrocarbon, to expose.After being exposed in the hydrocarbon for the second time, use the purification XCDA clean wafers chamber that comprises about 20 volume % oxygen.
Fig. 9 is according to an embodiment of the present invention, for the Figure 60 0 of 604 pairs of times 602 of hydrocarbon concentration in two kinds of purgative gas mixtures of the wafer chamber of leaving Fig. 5 (not having wafer in the chamber).Dotted line 606 is illustrated in the total concentration convergent response of all six kinds of hydrocarbon in the purgative gas that leaves wafer chamber under the pure nitrogen gas purgative gas situation.Solid line 608 is illustrated in the total concentration convergent response of all six kinds of hydrocarbon in the purgative gas that leaves wafer chamber under the XCDA purgative gas situation of purification.Mark 610 expression hydrocarbonaceous purgative gas are by the point of nitrogen or XCDA replacement.
Be approximately 1.5 liters and to clean flow velocity be under 0.75 liter/minute the situation for hypothesis wafer chamber volume, with the elution time of hydrocarbon in curve 606 and 608 with the hydrocarbon concentration dilution of the initial 60ppb time to the required cost of 10ppt is compared.For mixed uniformly system, the hydrocarbon concentration that reduces initial 60ppb will spend about 8.7 time constants to 10ppt.Time constant is defined as the wafer chamber volume divided by cleaning flow velocity.Under about 2 minutes time constant, simple dilution reaches 10ppt from the starting point of 60ppb will need 20 minutes.The real time that reaches 10ppt for XCDA or pure nitrogen gas is much longer, shows the outflow from the removing domination hydrocarbon of stainless steel inner surface from wafer chamber.Other test shows in case by the XCDA that purifies hydrocarbon is reduced to low-down level (10ppt and following), uses the cleaning of UHP nitrogen can not produce to be higher than the hydrocarbon concentration of using the level that XCDA obtains last time subsequently.
Embodiment 2
In the present embodiment, before in being exposed to nitrogen-hydrocarbon mixture, 100 millimeters (4 inches) naked silicon substrates 510 are placed on wafer chamber 500 China and foreign countries, repeat the test of describing among the embodiment 1.Figure 10 is according to an embodiment of the present invention, has in wafer chamber under the situation of silicon chip, for the Figure 70 0 of 704 pairs of times 702 of total hydrocarbon concentration in two kinds of purgative gas mixtures of the wafer chamber of leaving Fig. 5.The decay of hydrocarbon concentration when curve 706 is illustrated in UHP nitrogen purge wafer chamber and wafer.The decay of hydrocarbon concentration when curve 708 is illustrated in XCDA clean wafers chamber that purifies and wafer.Approximate some during mark 710 expression stopping nitrogen-hydrocarbon mixture air inlet.Curve 706 and 708 shows that clearly removing hydrocarbon from silicon substrate is considerably slower than from the stainless steel surfaces of wafer chamber and removes.Embodiment 1 with the front is the same, compares with UHP nitrogen (curve 706), contains oxygen purgative gas (curve 708) and shows hydrocarbon concentration reduction faster.Figure 11 is the enlarged drawing of Figure 10, has represented in more detail from 10 hours to 25 hours the time interval.The curve (curve 808) that can find out 804 pairs of times 802 of hydrocarbon concentration of cleaning for XCDA from Figure 80 0 more significantly is better than UHP nitrogen curve 806.Under the concentration level of 20ppt, UHP nitrogen response lag XCDA response almost 5 hours.Certainly, this means that use UHP nitrogen purge wafer chamber and wafer to the level of 20ppt will need 5 hours again.
Embodiment 3
Figure 12 is according to an embodiment of the present invention, in wafer chamber, have under the situation of silicon chip, for meta-xylene and Figure 90 0 of 904 pairs of times 902 of paraxylene concentration in three kinds of purgative gas mixtures of the wafer chamber of leaving Fig. 5, wherein purgative gas comprises 0%, 1% and 20% oxygen.In the present embodiment, 1% oxygen and 20% oxygen (at nitrogen) compare with UHP nitrogen.Used hydrocarbon mixture is the nitrogen that comprises about 10ppb meta-xylene and 10ppb paraxylene.The same with embodiment 2, before being exposed to hydrocarbon, silicon substrate is put into wafer chamber.Curve 906 among Figure 12 is illustrated in the function of the concentration-response of two kinds of dimethylbenzene during the UHP nitrogen purge as the time.Curve 908 is illustrated in the function of the concentration-response that contains two kinds of dimethylbenzene during the nitrogen purge of 1 volume % oxygen as the time.The concentration-response of two kinds of dimethylbenzene was as the function of time during curve 910 was illustrated in and uses the nitrogen (XCDA) that contains 20 volume % oxygen to clean.Some when mark 912 expressions stop the hydrocarbon mixture air inlet.Figure 13 is the enlarged drawing of Figure 12, has represented in more detail from 5 hours to 25 hours the time interval.From Figure 100 0, can find out more significantly for purgative gas that contains 1% oxygen (curve 1008) and the curve of 1004 pairs of times 1002 of hydrocarbon concentration that contains the purgative gas (curve 1010) of 20% oxygen and be better than UHP nitrogen curve 1006.From three curve 1006-1010 relatively, can point out, contain 1% oxygen and to contain 20% oxygen the same effective, but higher oxygen concentration is slightly favourable in the level that is lower than 10ppt for the hydrocarbon level more than 10ppt.Two kinds contain the oxygen purgative gas and show and obviously be better than using the UHP nitrogen purge.
Embodiment 4
Figure 14 is according to an embodiment of the present invention, in wafer chamber, have under the situation of silicon chip, for the Figure 110 0 of the 1104 pairs of times 1102 of hydrocarbon concentration in five kinds of purgative gas mixtures of the wafer chamber of leaving Fig. 5, wherein purgative gas comprises 0%, 0.0001%, 0.01%, 0.1% and 1.0% oxygen.As described in example 1 above, hydrocarbon-nitrogen pollutant mixture is the 60ppb total hydrocarbon concentration.Drawn expression UHP nitrogen (mark 1106 among Figure 110 0, curve 1116), contain 0.0001 volume % oxygen nitrogen 1108, contain 0.01 volume % oxygen nitrogen 1110, contain the nitrogen 1112 of 0.1 volume % oxygen and contain the data of the nitrogen (mark 1114, curve 1118) of 1 volume % oxygen.As expected, all data drop between 0% oxygen curve 1116 (UHP nitrogen) and the 1% oxygen curve 1118.Clean validity along with oxygen concentration shown in the oxygen concentration scope increase and increase.Figure 15 is the enlarged drawing of Figure 14, has represented in more detail from 10 hours to 24 hours the time interval.Use expression UHP nitrogen (mark 1206, curve 1216), the data of the cleaning of 0.0001% oxygen 1208,0.01% oxygen 1210,0.1% oxygen 1212 and 1% oxygen (mark 1214, curve 1218) response are drawn Figure 120 0 of 1204 pairs of times 1202 of hydrocarbon concentration.Consult Figure 16-21 of dry removal time of expression to temperature or concentration.
Embodiment 5
Use method similar to Example 1 to show in the present embodiment and use aqueous mixtures to remove the validity of hydrocarbon from 316 Electrochemical polishing of stainless steel surfaces.Consult Figure 22.The nitrogen of initial purge mixes with six component hydrocarbon standard gas (benzene, toluene, ethylbenzene, dimethylbenzene, BTEX), produces the total organic compound of known 60ppb (TOC) and estimates (challenge) gas.Under the reference operating condition of 0.75sl m, 30psig and ambient temperature, placed the wafer chamber of wafer with the evaluation purge of gas.Use the hydrocarbon concentration in the gas chromatograph measurement wafer chamber effluent gases that is equipped with flame ionization detector, reach 60 ± 2ppb hydrocarbon until its concentration.Wafer chamber is to taking place after 4-5 hour the stabilization time of condition.
After wafer chamber is saturated with the TOC of 60ppb, close BTEX estimate gas and to shown in nitrogen current in add moisture or oxygen.Monitor wafer chamber effluent gases is reduced to every kind of pollutant until its TOC concentration and is lower than the 10ppt level.
Figure 23 is according to an embodiment of the present invention, and for the Figure 160 0 of 1604 pairs of times 1602 of ethylbenzene concentration in four kinds of purgative gas mixtures of the wafer chamber of leaving Fig. 5, wherein purgative gas comprises 100% nitrogen, 20% oxygen, 0.5% water and 100ppm water.As described in example 1 above, hydrocarbon-nitrogen pollutant mixture is the 60ppb total hydrocarbon concentration.Expression ethylbenzene cleans response to UHP nitrogen 1606, the nitrogen 1608 that contains 20 volume % oxygen, the nitrogen 1612 that contains the nitrogen 1610 of 100ppm volume water and contain 0.5 volume % water data have been drawn among Figure 160 0.Clean validity along with water concentration shown in the water concentration scope increase and increase.
Figure 24 is according to an embodiment of the present invention, and for the Figure 170 0 of 1704 pairs of times 1702 of ortho-xylene concentration in four kinds of purgative gas mixtures of the wafer chamber of leaving Fig. 5, wherein purgative gas comprises 100% nitrogen, 20% oxygen, 0.5% water and 100ppm water.As described in example 1 above, hydrocarbon-nitrogen pollutant mixture is the 60ppb total hydrocarbon concentration.The expression ortho-xylene cleans response to UHP nitrogen 1706, the nitrogen 1708 that contains 20 volume % oxygen, the nitrogen 1712 that contains the nitrogen 1710 of 100ppm volume water and contain 0.5 volume % water data have been drawn among Figure 170 0.Clean validity along with water concentration shown in the water concentration scope increase and increase.
Figure 25 is according to an embodiment of the present invention, and for paraxylene and Figure 180 0 of 1804 pairs of times 1802 of meta-xylene in four kinds of purgative gas mixtures of the wafer chamber of leaving Fig. 5, wherein purgative gas comprises 100% nitrogen, 20% oxygen, 0.5% water and 100ppm water.As described in example 1 above, hydrocarbon-nitrogen pollutant mixture is the 60ppb total hydrocarbon concentration.Expression paraxylene and meta-xylene clean response to UHP nitrogen 1806, the nitrogen 1808 that contains 20 volume % oxygen, the nitrogen 1812 that contains the nitrogen 1810 of 100ppm volume water and contain 0.5 volume % water data have been drawn among Figure 180 0.Clean validity along with water concentration shown in the water concentration scope increase and increase.
Table 1 uses the reduction of dry removal time of moisture time
Figure C200480021874D00251
Consult Figure 26-28 of dry removal time of expression to temperature or concentration.
Embodiment 6
Comparing the comparative test of determining XCDA efficient with the nitrogen that is used for purifying UHP equipment, assembled the quantitative measurement system that comprises three commercial UHP diaphragm valves, each valve is available from different manufacturers.Described device is illustrated in Figure 29, in 1300.In order to implement degasification test, each valve (VUT) 1302 in test directly with shown in the upstream of cold hydrazine 1304 be connected.Carry the purification sample gas (N of gas purity specification by each VUT less than the 1ppt hydrocarbon 2Or XCDA).(Aeronex, SS-500KF-I-4R) (Aeronex SS-700KF-o-4R) purifies the N that supplies with the optics clarifier to use the inertia clarifier respectively 2And XCDA.On VUT, twine heating tape (heater tape) and temperature probe, heating and monitoring temperature (not shown).Along with purgative gas passes through VUT,, be used for carrying out the hydrocarbon analysis at gas chromatograph 1304 at the pollutant of any desorb of cold hydrazine collected downstream.
Because previous research has shown the elastomeric components degasification from valve and has produced the evidence of hydrocarbon pollutant, so selector valve is as the representative in UHP systemic contamination thing source.Method by cold hydrazine collection and gas chromatographic measurement detects and measures.By carrying out the size that retention time on the post (TOC) relatively comes to determine pollutant with known standard.In Figure 30 and 31, represented respectively chromatogram 1400 and 1500, represented minute being that time 1402 of unit and 1502 pairs are 1404 and 1504 figure of unit with the millivolt from the degasification of the valve under two different temperatures (be room temperature and about 80 ℃).Provided based on the coarse analysis of chromatogram in the following table 2 the pollutant size.
Table 2 GC/FID analyzes total organic pollution (TOC) of pollutant
Time Compound Degasification %
＜10 minutes ＜5 carbon 10-20％
10-16 minute 6-10 carbon 0-5％
16-25 minute 11-15 carbon 20-40％
25 minutes 15 carbon 50-80％
It should be noted that the pollutant that great majority discharge is the pollutant of HMW.The front embodiment that low molecular weight hydrocarbon (promptly being less than 8 carbon) is cleaned out in this and analysis forms contrast.
Under room temperature (about 20 ℃), system operation is carried out measuring in 0 minute and 60 minutes, and measured 0 minute, 60 minutes and 720 minutes down at 80 ℃.Comprise once by measuring by the gas with various that cleans with secondary.In each case, then clean after the nitrogen purge with XCDA.Pass through in the test at twice, XCDA then carries out the nitrogen purge second time after cleaning.The test of three different UHP valves produces three kinds of different results.Valve under low-level hydrocarbon degasification, begin and even also be no more than 100ppt at intensification XCDA duration of test, and another produces thermally sensitive pollutant result.A remaining valve under 100ppt, begin and peak value at 1000ppt.In the forward side, all valves by suitable cleaning and thermal cycle can both reach the 1ppt of lower limit of our test apparatus detectability or following level.This shows by any one can use in the UHP pipe-line system in these valves of suitable preliminary treatment, carries the gas of 1ppt in technology.Represented to produce the result of the valve of 100-1000ppt degasification in the following table 3.
Table 3 nitrogen and XCDA clean the UHP valve relatively
Data from table 3 are obviously found out in all temperature and time scopes, the reduction of using nitrogen purge only to produce hydrocarbon concentration in the limited and very unacceptable valve.The cleaning of XCDA subsequently makes the hydrocarbon pollutant level be reduced to lower level, will good 2-25 than nitrogen purge lower limit doubly.In addition, realize that with nitrogen purge significantly reducing the required time compares, the XCDA cleaning can be reduced to hydrocarbon concentration low-level in the very short time.(it is believed that at room temperature nitrogen purge for the first time and cleaning increases between 0 minute and 60 minutes at 80 ℃ of following XCDA is because some hydrocarbon pollutants in the elastomeric components were moved to due to the time required on the clean surface.This be valve elastomeric material physical phenomenon and do not represent the cleansing power of all gases.)
The generally acknowledged rules that the UHP gas line is confirmed need thoroughly be cleaned with nitrogen, confirm that then pipeline does not contain pollutant in the nitrogen purge environment.But for all valves, XCDA makes the extra hydrocarbon volatilization that still keeps after UHP nitrogen purge and thermal cycle.Even at room temperature, also can discharge extra hydrocarbon when time in the purgative gas that is exposed to oxygen enrichment.
In order to determine to use any effect of purgative gas order, carry out the second series test.Use the purification of two identical commercial valve test hydrocarbon from same manufacturer.One (Al) uses nitrogen purge, then clean with XCDA, and another (A2) then uses nitrogen purge with the XCDA cleaning.The result is provided in the following table 4.
Table 4 nitrogen/XCDA cleans with the XCDA/ nitrogen purge and compares
Figure C200480021874D00281
At room temperature the XCDA step produces the result similar to nitrogen purge.But when valve A2 was heated to 80 ℃ under XCDA cleans, the outgassing rate of hydrocarbon significantly increased, and is reduced to fast below the detectability of checkout equipment then.Duplicate test shows raising seldom in nitrogen.When using nitrogen purge, the UHP component discharges hydrocarbon continuously.Because heavier hydrocarbon is slow by the pipe-line system migration, after cleaning beginning, just reach actual peak value after for a long time usually.
Represented particularly and the present invention has been described, but it will be appreciated by those skilled in the art that and to make the change on various forms and the details and can not deviate from the scope of the present invention that accessory claim is forgiven with reference to embodiment preferred.

Claims (39)

1. method that molecular contaminants is carried in the degasification of getting on from the surface, it comprises:
Make described gas-carrying molecule pollutant from described surface desorption by at least a portion zone around contacting described surface with the purgative gas that purifies, wherein this purgative gas comprises oxygen, water or its combination, the gas-carrying molecule pollutant levels of the purgative gas of this purification are lower than part per billion volume, and oxygen, water and combination thereof are not the gas-carrying molecule pollutants;
Thereby by producing the purgative gas that pollutes the purgative gas that will change described purification over to from the described gas-carrying molecule pollutant of described surface desorption; And
The purgative gas of described pollution is removed in described zone around from described surface.
2. method that molecular contaminants is carried in the degasification of getting on from the surface, it comprises:
Purify purgative gas, produce the purgative gas that purifies, wherein said purgative gas comprises oxygen, and the gas-carrying molecule pollutant levels of the purgative gas of described purification are lower than part per billion volume, and oxygen, water and combination thereof are not described gas-carrying molecule pollutants;
Contact with the described surface of at least a portion by purgative gas and to make described gas-carrying molecule pollutant from described surface desorption with described purification;
Thereby by producing the purgative gas that pollutes the purgative gas that will change described purification over to from the described gas-carrying molecule pollutant of described surface desorption; And
Remove the purgative gas of described pollution from described surface.
3. as the method for claim 1 or 2, wherein repeat described method, the concentration of the airborne contaminant in the purgative gas of described pollution is lower than part per billion volume.
4. as the method for claim 1 or 2, the purgative gas of wherein said purification has the gas-carrying molecule pollutant levels that are lower than part per trillion hundred volumes.
5. as the method for claim 1 or 2, the purgative gas of wherein said purification has the gas-carrying molecule pollutant levels that are lower than 10/1000000000000ths volumes.
6. as the method for claim 1 or 2, the purgative gas of wherein said purification has the gas-carrying molecule pollutant levels that are lower than the 1ppt volume.
7. as the method for claim 1 or 2, the purgative gas of wherein said purification also comprises water.
8. method as claimed in claim 7, wherein said water accounts for the 100ppm to 2% of described purgative gas volume.
9. method as claimed in claim 8, wherein said water accounts for the 100ppm to 0.5% of described purgative gas volume.
10. as the method for claim 1 or 2, wherein said surface comprises the inner surface that has around the device in space.
11. as the method for claim 10, wherein said device is around at least one silicon substrate.
12. as the method for claim 1 or 2, wherein said surface is the inner surface of ultra-high purity gas pipeline assembly.
13. as the method for claim 1 or 2, wherein said surface is the inner surface of valve.
14. as the method for claim 10, it uses the described device of inert gas purge after also being included in the purgative gas of removing described pollution from described device.
15. as the method for claim 14, wherein said inert gas is selected from nitrogen, rare gas, methane and their combination.
16. as the method for claim 15, wherein said rare gas is argon gas.
17. the method that molecular contaminants is carried in the degasification of getting on from the surface, it comprises:
Purify purgative gas, produce the purgative gas that purifies, wherein said purgative gas comprises the oxygen of concentration between 1-25 volume %, and the gas-carrying molecule pollutant levels of the purgative gas of described purification are less than part per billion volume, and oxygen, water and combination thereof are not described gas-carrying molecule pollutants;
Contact with the described surface of at least a portion by purgative gas and to make described gas-carrying molecule pollutant from described surface desorption with described purification;
By producing the purgative gas of pollution the purgative gas that will change described purification over to from the described gas-carrying molecule pollutant of described surface desorption; And
Remove the purgative gas of described pollution from described surface.
18. as the method for claim 17, it comprises the described method of continuation, pollutant levels are lower than the 1ppb volume in the purgative gas of described pollution.
19. as the method for claim 17, the purgative gas of wherein said purification has the gas-carrying molecule pollutant levels that are lower than 10/1000000000000ths volumes.
20. as the method for claim 17, the purgative gas of wherein said purification has the gas-carrying molecule pollutant levels that are lower than the 1ppt volume.
21. as the method for claim 17, the purgative gas of wherein said purification also comprises water.
22. as the method for claim 21, wherein said water accounts for the 100ppm to 2% of described purgative gas volume.
23. as the method for claim 17, wherein said surface comprises the inner surface that has around the device in space.
24. as the method for claim 23, wherein said device is around at least one silicon substrate.
25. the method that molecular contaminants is carried in the degasification of getting on from the surface, it comprises:
Purify purgative gas, produce the purgative gas that purifies, wherein said purgative gas comprises water, and the gas-carrying molecule pollutant levels of the purgative gas of described purification are less than part per billion volume, and oxygen, water and combination thereof are not described gas-carrying molecule pollutants;
Contact with the described surface of at least a portion by purgative gas and to make described gas-carrying molecule pollutant from described surface desorption with described purification;
Thereby by producing the purgative gas that pollutes the purgative gas that will change described purification over to from the described gas-carrying molecule pollutant of described surface desorption; And
Remove the purgative gas of described pollution from described surface.
26. as the method for claim 25, it comprises repeating said steps, is lower than the 1ppb volume until pollutant levels described in the purgative gas of described pollution.
27. as the method for claim 25, the purgative gas of wherein said purification has the gas-carrying molecule pollutant levels that are lower than 10/1000000000000ths volumes.
28. as the method for claim 25, the purgative gas of wherein said purification has the gas-carrying molecule pollutant levels that are lower than the 1ppt volume.
29. as the method for claim 25, wherein said water accounts for the 100ppm to 2% of described purgative gas volume.
30. as the method for claim 29, wherein said water accounts for the 100ppm to 0.5% of described purgative gas volume.
31. as the method for claim 25, wherein said surface comprises the inner surface that has around the device in space.
32. as the method for claim 31, it uses the described device of inert gas purge after also being included in the purgative gas of removing described pollution from described device.
33. as the method for claim 31, wherein said inert gas is selected from nitrogen, rare gas, methane and their combination.
34. as the method for claim 32, wherein said inert gas is an argon gas.
35. as the method for claim 34, wherein said device is around at least one silicon substrate.
36. as the method for claim 25, wherein said surface is the inner surface of ultra-high purity gas pipeline assembly.
37. as the method for claim 25, wherein said surface is the inner surface of valve.
38. the method that molecular contaminants is carried in the degasification of getting on from the wafer fabrication equipment surface, it comprises:
Make described gas-carrying molecule pollutant from described surface desorption by at least a portion surface with the purgative gas contact wafer manufacturing equipment that purifies, wherein this purgative gas comprises oxygen, water or its combination, the gas-carrying molecule pollutant levels of the purgative gas of this purification are lower than part per billion volume, and oxygen, water and combination thereof are not described gas-carrying molecule pollutants;
Thereby by producing the purgative gas that pollutes the purgative gas that will change described purification over to from the described gas-carrying molecule pollutant of described surface desorption; And
Remove the purgative gas of described pollution from described surface.
39. the method that molecular contaminants is carried in the degasification of getting on from the surface, it comprises:
Contacting described surface by the temperature between 20 ℃ to 100 ℃ with the purgative gas that purifies makes described gas-carrying molecule pollutant from described surface desorption at least a portion zone on every side, wherein this purgative gas comprises oxygen, water or its combination, the gas-carrying molecule pollutant levels of the purgative gas of this purification are lower than part per billion volume, and oxygen, water and combination thereof are not described gas-carrying molecule pollutants;
Thereby by producing the purgative gas that pollutes the purgative gas that will change described purification over to from the described gas-carrying molecule pollutant of described surface desorption; And
The purgative gas of described pollution is removed in described zone around from described surface.
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Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050229947A1 (en) * 2002-06-14 2005-10-20 Mykrolis Corporation Methods of inserting or removing a species from a substrate
US7189291B2 (en) * 2003-06-02 2007-03-13 Entegris, Inc. Method for the removal of airborne molecular contaminants using oxygen gas mixtures
US20060285091A1 (en) * 2003-07-21 2006-12-21 Parekh Bipin S Lithographic projection apparatus, gas purging method, device manufacturing method and purge gas supply system related application
US7384149B2 (en) 2003-07-21 2008-06-10 Asml Netherlands B.V. Lithographic projection apparatus, gas purging method and device manufacturing method and purge gas supply system
CN101263590B (en) * 2005-08-03 2010-05-19 恩特格林斯公司 A transfer container
US20070144118A1 (en) * 2005-12-22 2007-06-28 Alvarez Daniel Jr Purging of a wafer conveyance container
EP2453310B1 (en) 2006-06-19 2015-12-09 Entegris, Inc. System for purging reticle storage
US20080009977A1 (en) * 2006-07-10 2008-01-10 Ultra Clean Holdings Apparatus and Method for Monitoring a Chemical-Supply System
US20100112814A1 (en) * 2006-09-06 2010-05-06 Sowmya Krishnan Pre-certified process chamber and method
JP5554469B2 (en) * 2007-05-14 2014-07-23 東京エレクトロン株式会社 Thin film forming apparatus cleaning method, thin film forming method, and thin film forming apparatus
US20090078324A1 (en) * 2007-09-21 2009-03-26 Ultra Clean Technology, Inc. Gas-panel system
US20090114295A1 (en) * 2007-11-06 2009-05-07 Ultra Clean Holdings, Inc. Gas-panel assembly
US9376254B2 (en) 2009-01-27 2016-06-28 M-I L.L.C. Methods for granular scavenger material transfer
US8616821B2 (en) 2010-08-26 2013-12-31 Taiwan Semiconductor Manufacturing Company, Ltd. Integrated apparatus to assure wafer quality and manufacturability
US8414688B1 (en) * 2011-06-15 2013-04-09 Kla-Tencor Corporation Recirculation high purity system for protecting optical modules or inspection system during storage, transport and shipping
US9997384B2 (en) 2011-12-01 2018-06-12 Taiwan Semiconductor Manufacturing Company, Ltd. Methods for transporting wafers between wafer holders and chambers
KR102360223B1 (en) 2012-05-07 2022-02-09 도널드선 컴파니 인코포레이티드 Materials, methods, and devices for siloxane contaminant removal
US9579697B2 (en) * 2012-12-06 2017-02-28 Taiwan Semiconductor Manufacturing Co., Ltd. System and method of cleaning FOUP
US9064807B2 (en) 2013-02-27 2015-06-23 Taiwan Semiconductor Manufacturing Co., Ltd. Integrated platform for improved wafer manufacturing quality
JP6421552B2 (en) * 2014-11-12 2018-11-14 株式会社Sumco Silicon wafer manufacturing method
US10790177B2 (en) * 2017-11-14 2020-09-29 Taiwan Semiconductor Manufacturing Co., Ltd. Systems, devices, and methods for using a real time environment sensor in a FOUP
CN114147011A (en) * 2020-09-04 2022-03-08 中国石油天然气股份有限公司 Blockage relieving method for salt crystallization blockage of natural gas pipeline
US12117376B2 (en) 2020-09-16 2024-10-15 Changxin Memory Technologies, Inc. System for monitoring environment and monitoring method based on system for monitoring environment
US11854845B2 (en) * 2020-09-16 2023-12-26 Changxin Memory Technologies, Inc. System for monitoring environment
CN114015518B (en) * 2021-12-01 2023-10-27 重庆朗福环保科技有限公司 Carbon-cleaning powerful gas cleaning agent and preparation and use methods thereof
CN115739822A (en) * 2022-10-18 2023-03-07 福建兆元光电有限公司 Dry etching method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5661225A (en) * 1996-09-12 1997-08-26 Air Products And Chemicals, Inc. Dynamic dilution system
EP0867924A2 (en) * 1997-02-14 1998-09-30 Interuniversitair Micro-Elektronica Centrum Vzw Method for removing organic contaminants from a semiconductor surface
WO2001037329A1 (en) * 1999-11-15 2001-05-25 Lucent Technologies, Inc. System and method for removal of material
WO2002047142A1 (en) * 2000-12-05 2002-06-13 Tokyo Electron Limited Method and apparatus for treating article to be treated
US20020132480A1 (en) * 2000-12-28 2002-09-19 Tokyo Electron Limited Substrate processing apparatus and substrate processing method

Family Cites Families (90)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US621132A (en) * 1899-03-14 Fishing-tool
US4276368A (en) * 1979-05-04 1981-06-30 Bell Telephone Laboratories, Incorporated Photoinduced migration of silver into chalcogenide layer
JPS6314414A (en) 1986-07-04 1988-01-21 株式会社村田製作所 Manufacture of single plate capacitor
FR2620049B2 (en) * 1986-11-28 1989-11-24 Commissariat Energie Atomique PROCESS FOR PROCESSING, STORING AND / OR TRANSFERRING AN OBJECT INTO A HIGHLY CLEAN ATMOSPHERE, AND CONTAINER FOR CARRYING OUT SAID METHOD
US4936922A (en) * 1987-05-21 1990-06-26 Roger L. Cherry High-purity cleaning system, method, and apparatus
US5013335A (en) 1987-06-30 1991-05-07 Uop Process for sequestering ammonia and the odor associated therewith
JP2504598B2 (en) * 1990-01-30 1996-06-05 株式会社東芝 Single wafer surface treatment method for semiconductor substrates
US5169272A (en) * 1990-11-01 1992-12-08 Asyst Technologies, Inc. Method and apparatus for transferring articles between two controlled environments
JPH04305927A (en) * 1991-02-19 1992-10-28 Shimada Phys & Chem Ind Co Ltd Washer
US5160512A (en) 1992-01-13 1992-11-03 Cleveland State University Gas separation process
JP3309416B2 (en) * 1992-02-13 2002-07-29 松下電器産業株式会社 Connected clean space device
US5351415A (en) * 1992-05-18 1994-10-04 Convey, Inc. Method and apparatus for maintaining clean articles
JP3330166B2 (en) * 1992-12-04 2002-09-30 東京エレクトロン株式会社 Processing equipment
US5968232A (en) 1993-03-08 1999-10-19 Whitlock; David R. Method for ammonia production
US5470377A (en) 1993-03-08 1995-11-28 Whitlock; David R. Separation of solutes in gaseous solvents
US5346518A (en) 1993-03-23 1994-09-13 International Business Machines Corporation Vapor drain system
US5938854A (en) 1993-05-28 1999-08-17 The University Of Tennessee Research Corporation Method and apparatus for cleaning surfaces with a glow discharge plasma at one atmosphere of pressure
US5607647A (en) * 1993-12-02 1997-03-04 Extraction Systems, Inc. Air filtering within clean environments
BE1007907A3 (en) * 1993-12-24 1995-11-14 Asm Lithography Bv LENS SYSTEM WITH HOLDER MADE IN gasfilled lens elements and photolithographic DEVICE WITH SUCH A SYSTEM.
US5677789A (en) * 1994-01-12 1997-10-14 Asahi Kogaku Kogyo Kabushiki Kaisha Binocular
US5407647A (en) * 1994-05-27 1995-04-18 Florida Scientific Laboratories Inc. Gas-scrubber apparatus for the chemical conversion of toxic gaseous compounds into non-hazardous inert solids
US6124211A (en) 1994-06-14 2000-09-26 Fsi International, Inc. Cleaning method
TW276236B (en) * 1994-10-05 1996-05-21 Nifco Inc Cap
US5644855A (en) * 1995-04-06 1997-07-08 Air Products And Chemicals, Inc. Cryogenically purged mini environment
TW425484B (en) * 1995-04-28 2001-03-11 Toray Industries A resin black matrix for liquid crystal display device
US5540757A (en) 1995-05-15 1996-07-30 Jordan Holding Company Method for preconditioning adsorbent
US5833726A (en) * 1995-05-26 1998-11-10 Extraction System, Inc. Storing substrates between process steps within a processing facility
US5806574A (en) * 1995-12-01 1998-09-15 Shinko Electric Co., Ltd. Portable closed container
US5846338A (en) * 1996-01-11 1998-12-08 Asyst Technologies, Inc. Method for dry cleaning clean room containers
US5954963A (en) * 1996-01-25 1999-09-21 Oklahoma Rural Water Association Process for biologically treating water
US5833738A (en) 1996-03-01 1998-11-10 D.D.I. Ltd. Specialty gas purification system
US5810062A (en) * 1996-07-12 1998-09-22 Asyst Technologies, Inc. Two stage valve for charging and/or vacuum relief of pods
JP3600384B2 (en) * 1996-09-12 2004-12-15 株式会社東芝 Jet processing apparatus, jet processing system and jet processing method
US5869401A (en) * 1996-12-20 1999-02-09 Lam Research Corporation Plasma-enhanced flash process
US5955355A (en) 1997-03-27 1999-09-21 Millennium Pharmaceuticals, Inc. Chromosome 18 marker
US5944602A (en) * 1997-09-09 1999-08-31 Tumi Manufacturing, Inc. Portable cleanroom cabinet assembly
JP3167970B2 (en) * 1997-10-13 2001-05-21 ティーディーケイ株式会社 Clean box, clean transfer method and device
US5988233A (en) * 1998-03-27 1999-11-23 Asyst Technologies, Inc. Evacuation-driven SMIF pod purge system
US6319297B1 (en) * 1998-03-27 2001-11-20 Asyst Technologies, Inc. Modular SMIF pod breather, adsorbent, and purge cartridges
US6164664A (en) * 1998-03-27 2000-12-26 Asyst Technologies, Inc. Kinematic coupling compatible passive interface seal
JP2990431B1 (en) * 1998-07-22 1999-12-13 株式会社東京精密 Shape measuring method with shape measuring device
JP4208212B2 (en) 1998-09-18 2009-01-14 澁谷工業株式会社 Cleaning method
US6056026A (en) * 1998-12-01 2000-05-02 Asyst Technologies, Inc. Passively activated valve for carrier purging
KR100284743B1 (en) * 1999-01-06 2001-03-15 윤종용 High density DRAM semiconductor device compatible with low density DRAM controller
US6249932B1 (en) * 1999-01-29 2001-06-26 Taiwan Semiconductor Manufacturing Company, Ltd. Apparatus and method for removing fine particles
US6394109B1 (en) * 1999-04-13 2002-05-28 Applied Materials, Inc. Method and apparatus for removing carbon contamination in a sub-atmospheric charged particle beam lithography system
DE19924058A1 (en) 1999-05-26 2000-11-30 Bosch Gmbh Robert Surface decontamination apparatus, especially for organic contaminant removal from a structured silicon wafer or body, comprises an ozone reactor in which a structured body is heated during ozone exposure
JP3916380B2 (en) 1999-07-06 2007-05-16 株式会社荏原製作所 Substrate transfer container standby station
US6468490B1 (en) * 2000-06-29 2002-10-22 Applied Materials, Inc. Abatement of fluorine gas from effluent
JP4355834B2 (en) 1999-08-20 2009-11-04 独立行政法人 日本原子力研究開発機構 Method and apparatus for separating or removing gas components
US6364762B1 (en) * 1999-09-30 2002-04-02 Lam Research Corporation Wafer atmospheric transport module having a controlled mini-environment
US6221132B1 (en) 1999-10-14 2001-04-24 Air Products And Chemicals, Inc. Vacuum preparation of hydrogen halide drier
JP3193026B2 (en) * 1999-11-25 2001-07-30 株式会社半導体先端テクノロジーズ Load port system for substrate processing apparatus and substrate processing method
FR2802335B1 (en) * 1999-12-09 2002-04-05 Cit Alcatel MINI-ENVIRONMENT MONITORING SYSTEM AND METHOD
US6507390B1 (en) * 2000-02-10 2003-01-14 Asml Us, Inc. Method and apparatus for a reticle with purged pellicle-to-reticle gap
JP3619119B2 (en) * 2000-05-15 2005-02-09 キヤノン株式会社 Vacuum processing method
TWI226972B (en) * 2000-06-01 2005-01-21 Asml Netherlands Bv Lithographic apparatus, device manufacturing method, and device manufactured thereby
US6747729B2 (en) * 2000-07-14 2004-06-08 Asml Netherlands B.V. Lithographic projection apparatus, device manufacturing method, device manufactured thereby and gas composition
TW501194B (en) 2000-08-23 2002-09-01 Tokyo Electron Ltd Processing system for object to be processed
JP3939101B2 (en) * 2000-12-04 2007-07-04 株式会社荏原製作所 Substrate transport method and substrate transport container
JP4014126B2 (en) * 2001-01-17 2007-11-28 東京エレクトロン株式会社 Substrate processing method and substrate processing apparatus
US6710845B2 (en) * 2000-12-29 2004-03-23 Intel Corporation Purging gas from a photolithography enclosure between a mask protective device and a patterned mask
KR100410991B1 (en) * 2001-02-22 2003-12-18 삼성전자주식회사 Loadport for semiconductor processing apparatus
US20020139707A1 (en) * 2001-04-02 2002-10-03 Jorgen Hakansson Earplug dispenser
US6391090B1 (en) * 2001-04-02 2002-05-21 Aeronex, Inc. Method for purification of lens gases used in photolithography
US6922867B1 (en) * 2001-08-08 2005-08-02 Lam Research Corporation Two position robot design for FOUP purge
US6724460B2 (en) * 2001-11-19 2004-04-20 Asml Netherlands B.V. Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objects
US6828569B2 (en) * 2001-11-19 2004-12-07 Asml Netherlands B.V. Lithographic projection apparatus, device manufacturing method and device manufactured thereby
US6610123B2 (en) * 2001-12-17 2003-08-26 Intel Corporation Filtered mask enclosure
DE10164175B4 (en) * 2001-12-27 2004-02-12 Infineon Technologies Ag Process device with two room units and a third room unit connecting the two room units, each with a reduced density of contaminated particles compared to the environment, and method for operating the process device
US6701972B2 (en) * 2002-01-11 2004-03-09 The Boc Group, Inc. Vacuum load lock, system including vacuum load lock, and associated methods
US6652667B2 (en) * 2002-01-23 2003-11-25 Chevron Oronite Company Llc Method for removing engine deposits in a gasoline internal combustion engine
US6638341B1 (en) * 2002-06-14 2003-10-28 Aeronex, Inc. Method for rapid activation or preconditioning of porous gas purification substrates
US6824622B2 (en) * 2002-06-27 2004-11-30 Taiwan Semiconductor Manufacturing Co., Ltd Cleaner and method for removing fluid from an object
US6696367B1 (en) * 2002-09-27 2004-02-24 Asm America, Inc. System for the improved handling of wafers within a process tool
US6974505B2 (en) * 2002-10-16 2005-12-13 Taiwan Semiconductor Manufacturing Co., Ltd. Tool for cleaning substrates
JP2004235516A (en) * 2003-01-31 2004-08-19 Trecenti Technologies Inc Purging method in wafer housing jig, load port, and method for manufacturing semiconductor device
CN1756945A (en) 2003-02-21 2006-04-05 密科理股份有限公司 Method for analysis of contaminants in a process fluid stream
US6899145B2 (en) * 2003-03-20 2005-05-31 Asm America, Inc. Front opening unified pod
US7189291B2 (en) * 2003-06-02 2007-03-13 Entegris, Inc. Method for the removal of airborne molecular contaminants using oxygen gas mixtures
WO2004112117A1 (en) 2003-06-02 2004-12-23 Entegris, Inc. Method for the removal of airborne molecular contaminants using oxygen and/or water gas mixtures
US6919102B2 (en) * 2003-06-20 2005-07-19 Powerchip Semiconductor Corp. Method of stabilizing material layer
US20060285091A1 (en) 2003-07-21 2006-12-21 Parekh Bipin S Lithographic projection apparatus, gas purging method, device manufacturing method and purge gas supply system related application
US7384149B2 (en) * 2003-07-21 2008-06-10 Asml Netherlands B.V. Lithographic projection apparatus, gas purging method and device manufacturing method and purge gas supply system
KR100583726B1 (en) * 2003-11-12 2006-05-25 삼성전자주식회사 Apparatus and method for treating substrates
WO2005078771A2 (en) 2004-02-05 2005-08-25 Entegris Inc. Purging of a wafer conveyance container
TW200540922A (en) * 2004-06-04 2005-12-16 Kondoh Ind Ltd Air-purifying equipment in a semiconductor wafer container
CN101263590B (en) * 2005-08-03 2010-05-19 恩特格林斯公司 A transfer container
US20070144118A1 (en) * 2005-12-22 2007-06-28 Alvarez Daniel Jr Purging of a wafer conveyance container
EP1929885A1 (en) 2006-12-04 2008-06-11 Cognis IP Management GmbH Process for the manufacture of sterol preparations

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5661225A (en) * 1996-09-12 1997-08-26 Air Products And Chemicals, Inc. Dynamic dilution system
EP0867924A2 (en) * 1997-02-14 1998-09-30 Interuniversitair Micro-Elektronica Centrum Vzw Method for removing organic contaminants from a semiconductor surface
WO2001037329A1 (en) * 1999-11-15 2001-05-25 Lucent Technologies, Inc. System and method for removal of material
WO2002047142A1 (en) * 2000-12-05 2002-06-13 Tokyo Electron Limited Method and apparatus for treating article to be treated
US20020132480A1 (en) * 2000-12-28 2002-09-19 Tokyo Electron Limited Substrate processing apparatus and substrate processing method

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US6913654B2 (en) 2005-07-05
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CN101599432A (en) 2009-12-09
US8075704B2 (en) 2011-12-13
US7189291B2 (en) 2007-03-13
EP1629528A1 (en) 2006-03-01
CN1830071A (en) 2006-09-06
US20040238013A1 (en) 2004-12-02
US20040237777A1 (en) 2004-12-02
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JP4729483B2 (en) 2011-07-20

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