CN100524614C - 制造电子器件的方法和电子器件 - Google Patents
制造电子器件的方法和电子器件 Download PDFInfo
- Publication number
- CN100524614C CN100524614C CNB2004800039608A CN200480003960A CN100524614C CN 100524614 C CN100524614 C CN 100524614C CN B2004800039608 A CNB2004800039608 A CN B2004800039608A CN 200480003960 A CN200480003960 A CN 200480003960A CN 100524614 C CN100524614 C CN 100524614C
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- China
- Prior art keywords
- wafer
- semiconductor
- mems device
- layer
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Pressure Sensors (AREA)
- Micromachines (AREA)
Abstract
Description
Claims (16)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP03075398 | 2003-02-11 | ||
EP03075398.2 | 2003-02-11 | ||
EP03104154.4 | 2003-11-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1747891A CN1747891A (zh) | 2006-03-15 |
CN100524614C true CN100524614C (zh) | 2009-08-05 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004800039608A Expired - Fee Related CN100524614C (zh) | 2003-02-11 | 2004-02-10 | 制造电子器件的方法和电子器件 |
Country Status (1)
Country | Link |
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CN (1) | CN100524614C (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101239697B (zh) * | 2007-02-06 | 2013-02-13 | 万长风 | 垂直集成微电子机械结构、实现方法及其系统 |
US8604898B2 (en) | 2009-04-20 | 2013-12-10 | International Business Machines Corporation | Vertical integrated circuit switches, design structure and methods of fabricating same |
DE102020114347B3 (de) * | 2020-05-28 | 2021-10-28 | Infineon Technologies Ag | MEMS-Vorrichtungen mit Federelement und Kammantrieb sowie zugehörige Herstellungsverfahren |
-
2004
- 2004-02-10 CN CNB2004800039608A patent/CN100524614C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN1747891A (zh) | 2006-03-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: NXP CO., LTD. Free format text: FORMER OWNER: KONINKLIJKE PHILIPS ELECTRONICS N.V. Effective date: 20070824 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20070824 Address after: Holland Ian Deho Finn Applicant after: Koninkl Philips Electronics NV Address before: Holland Ian Deho Finn Applicant before: Koninklijke Philips Electronics N.V. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090805 Termination date: 20150210 |
|
EXPY | Termination of patent right or utility model |