CN100516649C - Exhaust gas treatment system - Google Patents
Exhaust gas treatment system Download PDFInfo
- Publication number
- CN100516649C CN100516649C CNB2005101361864A CN200510136186A CN100516649C CN 100516649 C CN100516649 C CN 100516649C CN B2005101361864 A CNB2005101361864 A CN B2005101361864A CN 200510136186 A CN200510136186 A CN 200510136186A CN 100516649 C CN100516649 C CN 100516649C
- Authority
- CN
- China
- Prior art keywords
- dust
- fluid
- treatment system
- exhaust treatment
- waste gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000012530 fluid Substances 0.000 claims abstract description 47
- 239000000428 dust Substances 0.000 claims abstract description 38
- 239000002912 waste gas Substances 0.000 claims abstract description 23
- 239000007921 spray Substances 0.000 claims abstract description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 37
- 238000005406 washing Methods 0.000 claims description 22
- 238000002485 combustion reaction Methods 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 13
- 230000005484 gravity Effects 0.000 claims description 6
- 239000012190 activator Substances 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 4
- 238000010079 rubber tapping Methods 0.000 claims description 4
- 230000005574 cross-species transmission Effects 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 230000007797 corrosion Effects 0.000 claims 1
- 238000005260 corrosion Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 19
- 238000000034 method Methods 0.000 description 7
- 239000008187 granular material Substances 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 238000012423 maintenance Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
Images
Abstract
The invention relates to a waste gas treating system, which comprises a guide channel, a fluid nozzle and a dust-collection box. Wherein, the guide channel is used to guide the burnt waste gas; the fluid nozzle is inside the guide channel to spray the fluid to cool the waste gas and adhere the dust on the fluid; and the dust-collection box is vertically connected to the lower outlet of guide channel to collect the dust and fluid.
Description
Technical field
The present invention relates to a kind of exhaust treatment system, particularly relate to a kind of exhaust treatment system that is applicable to semiconductor fabrication process or display floater manufacture craft.
Background technology
Efforts at environmental protection are the focus that everybody watches attentively, and no matter for environment now or be descendants's living environment backward, environmental consciousness is the world mankind's a common recognition now.So the relevant decree in various countries is formulated one after another, also there is the relevant regulations standard in this country for toxic emission.
Make in field such as semiconductor, photoelectricity or the display floater manufacture process at high-tech now; must be accompanied by some waste gas bodies and produce (for example employed equipment of etching process); in order to handle the waste gas (as fluorine-containing toxic gas etc.) that produces in the manufacture craft; usually can be connected with the device of exhaust-gas treatment at the equipment back segment, it mainly handles waste gas by burning and water-washing method.
Yet, burning back not of uniform size and a large amount of dust granules that produces is easy to pile up in the pipeline that is blocked in exhaust treatment system, make the treatment system can't normal process waste gas and cause working as machine, therefore also must have a strong impact on the service time and the human resources of equipment with the action of frequent cycle actuating equipment maintenance.
How to take into account industrial progress, and to discharge due environmental protection responsibility be that manufacturer desires most ardently the target of pursuit now.Therefore need a kind of design that can avoid the problems referred to above, so that the manufacture craft operation is more efficient.
Summary of the invention
Therefore a purpose of the present invention is to provide a kind of exhaust treatment system, piles up the situation that is blocked on the inner circulation pipeline in order to dust in the minimizing device.
Another object of the present invention is to provide a kind of exhaust treatment system, reduce the frequency of maintenance.
Another purpose of the present invention is to provide a kind of exhaust treatment system, reduces manually burden.
According to above-mentioned purpose of the present invention, a kind of exhaust treatment system is proposed, comprise (1) one pilot channel,, be positioned at pilot channel in order to waste gas, and (2) the one fluid nozzles of guiding through burning, make the waste gas cooling in order to spray fluid, and make the dust in the waste gas be attached to fluid and (3) one dust-collecting boxes, vertically be connected with the below outlet of pilot channel, in order to collect dust and fluid, one water receiving tank is communicated with this dust-collecting box with the level or the angle that tilts; And a water washing device, comprising a plurality of water jets and a washing pipeline, this washing pipeline is connected with water receiving tank, and the water that those water jets spray can be washed pipeline via this because of gravity, falls in this water receiving tank.
Manufacture craft waste gas enters pilot channel after burning, through the fluid of fluid tip ejection, the dust granules that part burning generates is attached on the fluid again, and fluid drops towards dust-collecting box because of gravity.Because pilot channel and dust-collecting box junction are a straight structures, make the dust that is attached on the fluid follow fluid to fall into dust-collecting box very smooth-goingly, be difficult for allowing dust be deposited on the channel in the process.Even when pilot channel this during as a straight channel, guarantee that more fluid and dust enter dust-collecting box in the mode that directly drops, pile up the obstruction situation even can eliminate.
According to a preferred embodiment of the present invention, exhaust treatment system more comprises a removing device and a fluid tapping equipment.Removing device is arranged near the combustion chamber, in order to strike off the dust that adheres on the burning chamber wall, cooperates the collecting function of dust-collecting box, reaches the purpose of easy clean.Fluid discharging apparatus is not only exempted the artificial demand of changing inspection in order to the fluid and the dust emission of dust-collecting box inside is extremely outside, has also prolonged the time of device running simultaneously.
From the above, use exhaust treatment system of the present invention and can make dust in the device more smooth-going and, improve the problem of channel sedimentating dust, and then make the cycle of maintenance reduce to save artificial directly through pilot channel and enter dust-collecting box.Fit applications removing device and tapping equipment, more convenient clean burning chamber and saving manpower demand, the shutdown eliminating frequency that must carry out because of the spill-over of residual collection capacity also can reduce many.
Description of drawings
Fig. 1 is each configuration of components figure of a kind of exhaust treatment system of a preferred embodiment of the present invention.
The main element symbol description:
102: pilot channel 102a: inlet
102b: outlet 104: fluid tip
106: dust-collecting box 110: the exhaust gas entrance pipeline
112: combustion chamber 114: water receiving tank
116: water washing device 118: water jet
120: washing pipeline 130: the washing unit
140: Waste gas outlet 150: removing device
152: scraper 154: power supply
156: timing activator appliance 158: fluid discharging apparatus
162: dust 164 flows: adhere to dust
166: remaining dust
Has embodiment
The present invention discloses a kind of exhaust treatment system, has improvement and piles up, blocks the effect in pipeline because of the dust that burnt gas produces.By with the channel vertical connection of burning gases outlets in a dust-collecting box, greatly reduce even eliminate the situation that dust is piled up in pipeline, also thereby reduced the frequent degree of equipment cleaning and more convenient.In order to make narration of the present invention more detailed and complete, can be with reference to the icon of following description and cooperation Fig. 1.
With reference to Fig. 1, it illustrates each the configuration of components figure of a kind of exhaust treatment system according to a preferred embodiment of the present invention.Exhaust treatment system mainly comprises a pilot channel 102, a fluid nozzle 104 and a dust-collecting box 106.One outlet 102b vertical connection of pilot channel 102 belows is in dust-collecting box 106, and pilot channel 102 inside are provided with a fluid nozzle 104, and with the gas of cooling after burning, and the dust granules one that provides burning to generate adheres to approach.Dust-collecting box 106 is in order to collect the fluid and the big or small dust granules that is attached to by fluid tip 104 ejections.
In a preferred embodiment, exhaust treatment system comprises a combustion chamber 112, is connected with an exhaust gas entrance pipeline 110, and exhaust gas entrance pipeline 110 is the manufacture craft waste gas that reception is come by manufacture craft equipment (a not illustrating) back segment, as etching machine.One pilot channel 102 has an inlet 102a and an outlet 102b, and inlet 102a is connected with combustion chamber 112, and outlet 102b then is communicated with dust-collecting box 106.
Dust-collecting box 106 is connected with a washing unit 130 in addition.Washing unit 130 comprises a water receiving tank 114 and a water washing device 116 in the present embodiment, and water receiving tank 114 is connected with dust-collecting box 106, receives the gas from dust-collecting box 106, for example is connected with the level or the angle that tilts.Water washing device 116 carries out secondary filter in order to spray filtered water to the gas from dust-collecting box 106, makes the dust on the fluid that is not attached to fluid tip 104 be attached to filtered water in this stage, strengthens the effect of cleaning.
Below will illustrate the running of manufacture craft waste gas in exhaust treatment system of the present invention.Usually, have an air exhauster (not being illustrated among the figure) in the exhaust treatment system and carry out the function of bleeding, make to run on the intrasystem waste gas of entire process and drawn by a strength, for example be positioned over Waste gas outlet 140 places or arbitrary pipe section of washing unit 130.After the self-control of manufacture craft waste gas was made technology equipment back segment, entered combustion chamber 112 via exhaust gas entrance pipeline 110, gas experienced combustion process in combustion chamber 112.The dust granules that gas combustion produces some will wall attached to combustion chamber 112 on, claim that this is the dust 162 that flows, some then follows gas to continue flow progresses.
Gas flow is to pilot channel inlet 102a and enter, and again through wherein fluid tip 104, the position of fluid tip 104 is for example near the inlet 102a of pilot channel, or a centre portion of pilot channel 102.The fluid that fluid tip 104 ejects not only has cooling because of burning is the function of condition of high temperature gas, more make in the gas not attached to the dust of combustion chamber 112 this stage attached to fluid on, be called and adhere to dust 164.No matter the fluid after the ejection has or not dust to adhere to, all can fall in the dust-collecting box 106 because of gravity.
Because pilot channel 102 is to be connected as the crow flies with dust-collecting box 106, when fluid falls into dust-collecting box 106 by pilot channel 102, reduced attached to the dust on the fluid being retained in chance on pilot channel 102 walls.Preferably, pilot channel 102 is a straight structures, more reduces dust is blocked in the situation of pilot channel 102.
Gas continues to flow to water receiving tank 114 from dust-collecting box 106, readvances to water washing device 116.When gas stream during through water jet 118, if still residual in this moment gas have a dust granules, be convenient to this stage attached in the filtered water, be called remaining dust 166, reach the effect of secondary filter.Filtered water after the ejection is fallen in the water receiving tank 114 via washing pipeline 120 because of gravity, and the function of collecting residue is arranged too.
Exhaust treatment system has more a removing device 150, comprises a scraper 152 and the power supply 154 that drives scraper 152, the action that utilizes the mobile dust 162 on the 112 chamber walls of 152 pairs of combustion chambers of scraper to strike off.Wherein scraper 152 uses heat proof material to make, with the high temperature of opposing burning.Preferably, removing device 150 more connects a timing activator appliance 156, sets a predetermined period regularly to activate removing device 150.Because the dust after striking off can drop equally in dust-collecting box 106, will the demand of artificial maintenance greatly be reduced.
Dust-collecting box 106 and water receiving tank 114 more can connect a fluid tapping equipment 158 again, it for example is a pump, fluid and dust with dust-collecting box 106 inside is disposed to the outside in good time on demand, allows the life cycle of exhaust treatment system elongate, and avoids dust-collecting box 106 spill-overs and do not have spatial accommodation.
By the invention described above preferred embodiment as can be known, use the present invention and have following at least advantage.By being the dust-collecting box of vertical connection with pilot channel, make attached to difficult accumulation of the dust in the fluid and keep somewhere in pilot channel, reduce the situation that pilot channel is blocked, also therefore greatly reduced in the cycle of exhaust treatment system maintenance overhaul, human resources obtain effectively utilization.And then the manufacture craft running time is prolonged, and output is increased.
Though disclosed the present invention in conjunction with above preferred embodiment; yet it is not in order to limit the present invention; anyly be familiar with this operator; without departing from the spirit and scope of the present invention; when can being used for a variety of modifications and variations, so protection scope of the present invention should be with appended being as the criterion that claim was defined.
Claims (9)
1. exhaust treatment system comprises at least:
One pilot channel, guiding is through a waste gas of burning;
One fluid nozzle is positioned at this pilot channel, makes this waste gas cooling in order to spray a fluid, and makes the dust in this waste gas be attached to this fluid;
One dust-collecting box vertically is connected with the below outlet of this pilot channel, in order to collect those dust and this fluid;
One water receiving tank is communicated with this dust-collecting box with the level or the angle that tilts; And
One water washing device comprises a plurality of water jets and a washing pipeline, and this washing pipeline is connected with water receiving tank, and the water of those water jet ejections can be washed pipeline via this because of gravity, falls in this water receiving tank.
2. exhaust treatment system as claimed in claim 1, wherein this fluid tip be positioned at this waste gas enter this pilot channel one the inlet near.
3. exhaust treatment system as claimed in claim 1, wherein this fluid tip is positioned at a centre portion of this pilot channel.
4. exhaust treatment system as claimed in claim 1 more comprises a fluid tapping equipment, is connected with this dust-collecting box, in order to discharge this fluid of this dust-collecting box inside, avoids spill-over.
5. exhaust treatment system as claimed in claim 1, wherein this fluid discharging apparatus is a pump.
6. exhaust treatment system as claimed in claim 1 is applicable to a manufacture craft treatment of waste gas, comprises at least:
One combustion chamber is in order to this manufacture craft waste gas that burns; With
One removing device is arranged near this combustion chamber, in order to the dust that adheres on the chamber wall that strikes off this combustion chamber.
7. exhaust treatment system as claimed in claim 1, wherein this removing device comprises a scraper.
8. exhaust treatment system as claimed in claim 1, wherein this scraper is made by a corrosion-resistant material or a heat proof material.
9. exhaust treatment system as claimed in claim 1, wherein this removing device connects a timing activator appliance, and this timing activator appliance activates this removing device according to a predetermined period.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101361864A CN100516649C (en) | 2005-12-20 | 2005-12-20 | Exhaust gas treatment system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101361864A CN100516649C (en) | 2005-12-20 | 2005-12-20 | Exhaust gas treatment system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1807979A CN1807979A (en) | 2006-07-26 |
| CN100516649C true CN100516649C (en) | 2009-07-22 |
Family
ID=36840011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101361864A Expired - Fee Related CN100516649C (en) | 2005-12-20 | 2005-12-20 | Exhaust gas treatment system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100516649C (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101391191B1 (en) * | 2013-03-20 | 2014-05-07 | 영진아이엔디(주) | Byproduct removing apparatus for scrubber and plasma scrubber including the same |
| CN105003928B (en) * | 2015-06-14 | 2017-10-24 | 安徽富芯微电子有限公司 | A kind of emission-control equipment suitable for semiconductor fabrication process |
| CN104964290B (en) * | 2015-06-14 | 2017-09-29 | 沈阳白云机械有限公司 | A kind of emission-control equipment |
-
2005
- 2005-12-20 CN CNB2005101361864A patent/CN100516649C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1807979A (en) | 2006-07-26 |
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|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090722 |
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| CF01 | Termination of patent right due to non-payment of annual fee |